Die coating processing device for high-frequency welded pipe and working method of die coating processing device

Abstract

The invention relates to the technical field of mold coating machining, in particular to a mold coating machining device for a high-frequency welded pipe and a working method thereof.The mold coating machining device comprises a vacuum box and an auxiliary clamping mechanism, a plurality of electric arc targets located on the revolution path of a clamping assembly are installed in the vacuum box, and the electric arc targets are connected with the positive electrode of a target source power source; an auxiliary clamping mechanism is installed on the bottom side in the vacuum box, the auxiliary clamping mechanism comprises an annular gear box, a rotating disc is rotatably installed on the annular gear box, a plurality of clamping assemblies are rotatably installed on the rotating disc at equal intervals, and each clamping assembly comprises a base disc; the surface of the die is exposed in plasmas without dead angles by combining the composite motion of revolution and rotation with lifting and overturning, the distribution of an electric field and the plasmas in a deep hole is effectively improved by the built-in uniform plating rod, and the high uniformity of the thickness of the inner hole coating is realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of mold coating processing, and in particular to a mold coating processing device for high-frequency welded pipes and a working method thereof. BACKGROUND

[0002] High-frequency welded pipe molds (such as extrusion rollers, sizing rollers, etc.) bear high temperature, high pressure and strong friction and wear during work, and their service life directly affects production efficiency and product cost. Preparing a layer of hard and wear-resistant coating (such as TiN, CrN, etc.) on the surface of the mold through physical vapor deposition technology is an effective means to improve its service life.

[0003] However, the traditional PVD equipment is mainly designed for workpieces with flat outer surfaces, and for high-frequency welded pipe molds with deep holes, especially the coating preparation of the inner hole surface, there are great challenges: Poor coating uniformity: the plasma transmission inside the deep hole is difficult, resulting in significant differences in coating thickness between the hole opening and the hole bottom, and the inner wall circumferential direction, and even unable to form an effective coating; Clamping and positioning difficulties: the mold shape is special, and the conventional clamp is difficult to achieve quick and accurate centering and clamping, and the clamping process is easy to damage the mold or introduce contamination; Low deposition efficiency: in order to ensure the inner hole coating, multiple clamping, angle changing, or reducing the deposition rate are often needed, resulting in low production efficiency and high cost; Insufficient bonding force: due to uneven plasma distribution, the ion bombardment cleaning and activation effect of the inner hole surface is poor, resulting in weak bonding force between the coating and the substrate, and easy early failure. SUMMARY

[0004] The problem solved by the present application is to provide a mold coating processing device for high-frequency welded pipes and a working method thereof to overcome the defects of uneven coating, inconvenient clamping, low efficiency and insufficient bonding force of the existing PVD technology when processing complex inner hole molds.

[0005] In order to achieve the above-mentioned purpose, the technical scheme adopted by the present application is as follows: The utility model provides a die coating processing device for high frequency welded pipe, including vacuum box and auxiliary clamping mechanism, a plurality of arc targets are installed in the inside of vacuum box and are located in the orbit of rotation of clamping assembly, and the arc target is connected with the positive pole of target source power supply, the bottom side of the inside of vacuum box is installed with auxiliary clamping mechanism, the auxiliary clamping mechanism includes ring gear box, the rotary installation of carousel is installed on the ring gear box, a plurality of clamping assemblies are installed on the carousel at equal intervals and rotate, the clamping assembly includes base disc, the symmetrical installation of mounting bracket is installed on the base disc, the lifting plate of lifting installation is installed on the mounting bracket, the lifting frame of lifting installation is installed on the lifting plate and rises and falls, the rotary installation of swing arm is installed in the inner side of lifting frame, and two swing arms are symmetrically installed on the outer side of inner baffle ring, the bottom installation of bottom sealing seat is installed in the inner side of inner baffle ring, the first inner ring seat of detachable installation is installed in the bottom sealing seat, the outer side detachable installation of outer baffle ring is installed in the inner baffle ring, the top installation of top sealing seat is installed in the outer baffle ring, the second inner ring seat of detachable installation is installed in the top sealing seat, the first inner ring seat and the second inner ring seat are adapted to the pipe hole of both ends of drawing die respectively, the drawing die is connected with the negative pole of bias power supply equipped on the outer baffle ring and top sealing seat, the fixed disc of installation is installed on the base disc, the even plating rod of penetration first inner ring seat, second inner ring seat and drawing die is installed on the fixed disc.

[0006] Preferably, the inner side of the ring gear box is provided with an internal gear ring, the first motor is inlaid and installed at the bottom side of the ring gear box, the output end of the first motor is provided with a driving gear installed in the ring gear box, and the driving gear is coaxially connected with the carousel, a plurality of planetary gears are installed at equal intervals between the internal gear ring and the driving gear, a rotating shaft is installed in the planetary gear, and the rotating shaft penetrates the carousel and is connected with the base disc.

[0007] Preferably, the bottom side of the mounting bracket is provided with a first pneumatic cylinder, and the top telescopic end of the first pneumatic cylinder is connected with the lifting plate.

[0008] Preferably, the top side of the lifting frame is provided with a second pneumatic cylinder, and the bottom telescopic end of the second pneumatic cylinder is connected with the lifting plate.

[0009] Preferably, one of the lifting frames is provided with a second motor, and the output end of the second motor is connected with the swing arm.

[0010] Preferably, the bottom sealing seat and the first inner ring seat are connected by bolts, and the top sealing seat and the second inner ring seat are connected by bolts.

[0011] Preferably, a plurality of straight grooves are formed at equal angles on the bottom sealing seat, a toothed disc is rotatably installed at the bottom side of the bottom sealing seat, a plurality of arc grooves are formed at equal angles on the toothed disc, guide rods are installed in the arc grooves and the straight grooves, sliding blocks are installed at the top ends of the guide rods, limit clamping blocks are installed on the sliding blocks, a plurality of guide grooves parallel to the straight grooves are formed on the bottom sealing seat, and guide blocks are installed at the bottom sides of the sliding blocks and are slidingly connected with the guide grooves.

[0012] Preferably, the third motor is installed outside the inner retaining ring, and the output end of the third motor is installed with a rotating gear, and the rotating gear is engaged with the toothed disc.

[0013] Preferably, the electromagnet is inlaidly installed at the top end of the inner retaining ring, and the permanent magnet is inlaidly installed in the outer retaining ring.

[0014] A working method of a die coating processing device for high-frequency welded pipes, and the specific operation steps of the working method are as follows: Step one: according to the inner hole size of the die, the appropriate first inner ring seat and the second inner ring seat are selected and installed on the bottom sealing seat and the top sealing seat, the appropriate uniform plating rod is installed on the fixed disc according to the inner hole diameter of the drawing die, the electromagnet is in the power-off state, the outer retaining ring and the top sealing seat are taken off, the drawing die is placed in the inner retaining ring and the bottom sealing seat, and the uniform plating rod penetrates the inner hole of the drawing die, at this time, the rotating gear is driven to rotate by the third motor, the meshing toothed disc is driven to rotate, the arc-shaped groove on the toothed disc and the straight slot on the bottom sealing seat jointly act to convert the rotary motion of the toothed disc into the radial linear motion of the sliding block, and the plurality of sliding blocks are synchronously close to or away from the center, and cooperate with the limiting clamping block to realize the quick, centering and stable installation of the drawing die, so that the distance between the uniform plating rod and the inner wall of the inner hole of the drawing die is kept the same. Step two: at this time, the outer retaining ring and the top sealing seat are installed to the drawing die and the outer side of the inner retaining ring, the electromagnet is started to be attracted to the permanent magnet, so that the outer retaining ring and the inner retaining ring are locked, the drawing die is firmly clamped in the middle, and sealing is formed, at this time, the inner hole of the drawing die is in an exposed state, the vacuum box is closed, the vacuum system is vacuumized, the process gas is introduced, the bias power supply and the arc target power supply are turned on, the driving gear is driven by the first motor, the rotating disc and all the base discs revolve around the center of the ring-shaped gear box, the planet gears are meshed with the driving gear at the center and the inner tooth ring of the outer ring at the same time, the differential transmission forces the planet gears to generate self-rotation while revolving, and the self-rotation is transmitted to the clamping assembly above and the drawing die through the rotating shaft, so that the die continuously changes the angle during the deposition process, at the same time, the lifting plate is lifted up by the first pneumatic cylinder, the lifting frame is lifted up by the second pneumatic cylinder, and then the inner retaining ring and the drawing die are lifted up to above the uniform plating rod, at this time, the inner retaining ring and the drawing die are turned over by the second motor, the position of the drawing die is changed, then the first pneumatic cylinder and the second pneumatic cylinder are retracted to contact the top sealing seat and the fixed disc, and at this time, the uniform plating rod continues to penetrate the inner hole of the drawing die, the subsequent drawing die is revolved and rotated again, and it is ensured that the plasma can uniformly cover all areas of the inner hole.

[0015] The beneficial effects of the present application are: The coating exhibits excellent uniformity. The combined motion of revolution and rotation, along with lifting and flipping, ensures that the mold surface is exposed to plasma without any blind spots. The built-in uniform plating rod effectively improves the electric field and plasma distribution within the deep holes, achieving a high degree of uniformity in the coating thickness of the inner holes. The clamping is highly efficient and precise. The rapid centering mechanism enables automatic centering and clamping of the mold, and the magnetic locking enables rapid opening and closing of the sealing cover, which greatly improves clamping efficiency and accuracy, and ensures good electrical contact and sealing performance. High deposition efficiency and quality; multi-station design enables batch processing; ample plasma bombardment and uniform deposition environment ensure that the coating has extremely high density and bonding strength. It has good process flexibility. By changing the inner ring seat and the plating rod, it can be adapted to molds with different inner diameters and lengths, and has a wide range of applications. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the first structure of the auxiliary clamping mechanism of the present invention; Figure 2 This is a schematic diagram of the second structure of the auxiliary clamping mechanism of the present invention; Figure 3 This is a schematic diagram of the internal structure of the annular gearbox of the present invention; Figure 4 This is a schematic diagram of the first structure of the clamping assembly of the present invention; Figure 5 This is a schematic diagram of the second structure of the clamping assembly of the present invention; Figure 6 This is a schematic diagram of the internal structure of the clamping assembly of the present invention; Figure 7 This is a schematic diagram of the toothed disc structure of the present invention; Figure 8 This is a cross-sectional view of the clamping assembly of the present invention.

[0017] Legend: 1. Ring gearbox; 2. Turntable; 3. Clamping assembly; 4. First motor; 5. Drive gear; 6. Internal gear ring; 7. Planetary gear; 8. Rotating shaft; 9. Base plate; 10. Mounting bracket; 11. Lifting plate; 12. Lifting frame; 13. Rotating arm; 14. Inner retaining ring; 15. Bottom sealing seat; 16. First inner ring seat; 17. Outer retaining ring; 18. Top sealing seat; 19. Second inner ring seat; 20. Fixed plate; 21. Plating rod; 22. First pneumatic cylinder; 23. Second pneumatic cylinder; 24. Second motor; 25. Linear groove; 26. Slider; 27. Limiting clamp; 28. Gear plate; 29. ​​Third motor; 30. Rotating gear; 31. Arc groove; 32. Guide rod; 33. Electromagnet; 34. Permanent magnet. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Specific implementation examples are given below.

[0020] See Figures 1-8 A mold coating processing device for high-frequency welded pipes includes a vacuum chamber and an auxiliary clamping mechanism. Several arc targets are installed inside the vacuum chamber, located on the revolution path of the clamping assembly 3, and the arc targets are connected to the positive terminal of the target source power supply. By arranging the arc targets on the revolution path of the clamping assembly 3 and connecting them to the power supply, a stable plasma deposition environment is established, providing the basic conditions for achieving uniform coating in the future. An auxiliary clamping mechanism is installed on the bottom side of the vacuum chamber. The auxiliary clamping mechanism includes a ring gear box 1, a turntable 2 is rotatably mounted on the ring gear box 1, and several clamping components 3 are rotatably mounted on the turntable 2 at equal intervals. An internal gear ring 6 is provided inside the ring gear box 1, and a first motor 4 is embedded in the bottom side of the ring gear box 1. The output end of the first motor 4 is located inside the ring gear box 1 and is equipped with a drive gear 5, which is coaxially connected to the turntable 2. Several planetary gears 7 are installed at equal intervals between the internal gear ring 6 and the drive gear 5. A rotating shaft 8 is installed inside the planetary gear 7, and the rotating shaft 8 passes through the turntable 2 and connects to the base plate 9. The planetary gear 7 gear train is driven by the first motor 4, which ingeniously makes all clamping components 3 revolve around the center while rotating around their own axes. This composite motion ensures that all surfaces of the mold can be exposed to the plasma without dead angles and at multiple angles, fundamentally solving the problem of uneven coating caused by fixed posture in traditional technology. Moreover, the transmission structure is compact and highly efficient. The clamping assembly 3 includes a base plate 9, on which mounting frames 10 are symmetrically mounted. A lifting plate 11 is flexibly mounted on the mounting frames 10, and a lifting frame 12 is flexibly mounted on the lifting plate 11. A rotating arm 13 is rotatably mounted on the inner side of the lifting frame 12, and two rotating arms 13 are symmetrically mounted on the outer side of the inner retaining ring 14. A first pneumatic cylinder 22 is mounted on the bottom side of the mounting frame 10, and the top telescopic end of the first pneumatic cylinder 22 is connected to the lifting plate 11. A second pneumatic cylinder 23 is mounted on the top side of the lifting frame 12. The bottom telescopic end of the 23 is connected to the lifting plate 11. A second motor 24 is installed on one of the lifting frames 12. The output end of the second motor 24 is connected to the rotating arm 13. A bottom sealing seat 15 is installed at the bottom of the inner retaining ring 14. A first inner ring seat 16 is detachably installed inside the bottom sealing seat 15. An outer retaining ring 17 is detachably installed on the outside of the inner retaining ring 14. A top sealing seat 18 is installed on the top of the outer retaining ring 17. A second inner ring seat 19 is detachably installed inside the top sealing seat 18. The first inner ring seat 16 and the second inner ring seat 19 are connected to the bottom sealing seat 14. The ring seat 19 is adapted to the tube holes at both ends of the drawing die. The bottom sealing seat 15 and the first inner ring seat 16 are connected by bolts. The top sealing seat 18 and the second inner ring seat 19 are connected by bolts. The drawing die is connected to the negative terminal of the bias power supply equipped on the outer retaining ring 17 and the top sealing seat 18. An electromagnet 33 is embedded in the top of the inner retaining ring 14. A permanent magnet 34 is embedded in the outer retaining ring 17. A fixed plate 20 is installed on the base plate 9. A plating rod 21 that penetrates the first inner ring seat 16, the second inner ring seat 19 and the drawing die is installed on the fixed plate 20. The drawing die is precisely lifted and lowered by a two-stage pneumatic cylinder. The 180-degree rotation of the die is achieved by driving the rotating arm 13 by the second motor 24. This allows the two ends of the inner hole of the drawing die to be adjusted to the optimal deposition angle, which greatly enhances the process flexibility. At the same time, this structure connects the die to the negative terminal of the bias power supply, ensuring that the die is continuously bombarded by plasma during the deposition process, thereby obtaining a coating with extremely strong adhesion. The combination of electromagnet 33 and permanent magnet 34 enables rapid magnetic locking and sealing of outer retaining ring 17. The operation is simple and reliable, ensuring vacuum sealing and electrical connection stability, and greatly improving mold changing efficiency.

[0021] The bottom sealing seat 15 has several straight grooves 25 at equal angles. A gear plate 28 is rotatably mounted on the bottom side of the bottom sealing seat 15. Several arc grooves 31 are formed on the gear plate 28 at equal angles. A guide rod 32 is installed through the arc grooves 31 and the straight grooves 25. A slider 26 is installed at the top of the guide rod 32. A limit clamp 27 is installed on the slider 26. Several guide grooves parallel to the straight grooves 25 are formed on the bottom sealing seat 15. A guide block that slides and connects with the guide groove is installed on the bottom side of the slider 26. A third motor 29 is installed on the outside of the inner retaining ring 14. A rotating tooth 30 is installed at the output end of the third motor 29 and meshes with the gear plate 28. The gear plate 28 is driven by the third motor 29. By utilizing the cooperation of the arc grooves 31 and the straight grooves 25, the rotational motion is converted into the synchronous radial linear motion of multiple sliders 26, realizing the automatic centering and clamping of the mold and adjusting the position of the inner hole of the drawing mold and the plating rod 21.

[0022] Working principle: Based on the inner hole size of the mold, select the appropriate first inner ring seat 16 and second inner ring seat 19, and install them on the bottom sealing seat 15 and top sealing seat 18. According to the inner hole diameter of the drawing mold, a matching plating rod 21 is installed on the fixed plate 20. The electromagnet 33 is in the de-energized state. Remove the outer retaining ring 17 and the top sealing seat 18, and place the drawing mold inside the inner retaining ring 14 and the bottom sealing seat 15. The plating rod 21 passes through the inner hole of the drawing mold. At this time, the third motor 29 drives the rotating gear 30 to rotate, which drives the meshing gear plate 28 to rotate. The arc groove 31 on the gear plate 28 and the straight groove 25 on the bottom sealing seat 15 work together to convert the rotational motion of the gear plate 28 into the radial linear motion of the slider 26. Multiple sliders 26 move towards or away from the center synchronously. With the help of the limiting clamp 27, the drawing mold is quickly, centered and stably installed, ensuring that the distance between the plating rod 21 and the inner wall of the inner hole of the drawing mold remains the same. At this point, the outer retaining ring 17 and the top sealing seat 18 are installed on the outside of the drawing die and the inner retaining ring 14. By activating the electromagnet 33, it is made to engage with the permanent magnet 34, thereby locking the outer retaining ring 17 and the inner retaining ring 14, firmly clamping the drawing die in the middle to form a seal. At this time, the inner hole of the drawing die is exposed. The vacuum box is closed, the vacuum system is evacuated, process gas is introduced, and the bias power supply and arc target power supply are turned on. The first motor 4 drives the active gear 5, causing the turntable 2 and all base disks 9 to revolve around the center of the ring gearbox 1. The planetary gear 7 simultaneously interacts with the central active gear 5 and the outer inner gear ring 6. The meshing differential transmission forces the planetary gear 7 to rotate while revolving, and transmits the rotation to the clamping assembly 3 and the drawing die above through the rotating shaft 8. This causes the die to continuously change angles during the deposition process. At the same time, the first pneumatic cylinder 22 drives the lifting plate 11 to move upward, and the second pneumatic cylinder 23 drives the lifting frame 12 to move upward, thereby moving the inner retaining ring 14 and the drawing die above the plating rod 21. At this time, the second motor 24 works to flip the inner retaining ring 14 and the drawing die, realizing the repositioning of the drawing die. Then, the first pneumatic cylinder 22 and the second pneumatic cylinder 23 retract until the top sealing seat 18 contacts the fixed plate 20. At this time, the plating rod 21 continues to penetrate the inner hole of the drawing die. Subsequently, the drawing die revolves and rotates again to ensure that the plasma can uniformly cover all areas of the inner hole.

[0023] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A die coating processing apparatus for high frequency pipe welding, characterized by comprising: The utility model provides a vacuum box and auxiliary clamping mechanism, a plurality of arc targets are installed in the vacuum box, the arc targets are connected with the positive pole of target source power supply, the auxiliary clamping mechanism is installed on the bottom of the vacuum box, the auxiliary clamping mechanism includes annular gear box (1), the annular gear box (1) is rotatably installed with turntable (2), a plurality of clamping assemblies (3) are rotatably installed on turntable (2) at equal intervals, the clamping assembly (3) includes base disc (9), the mounting frame (10) is symmetrically installed on the base disc (9), the lifting plate (11) is liftably installed on the mounting frame (10), the lifting frame (12) is liftably installed on the lifting plate (11), the rotating arm (13) is rotatably installed on the inner side of the lifting frame (12), and the two rotating arms (13) are symmetrically installed on the outer side of the inner blocking ring (14), the bottom sealing seat (15) is installed on the bottom of the inner blocking ring (14), the first inner ring seat (16) is detachably installed in the bottom sealing seat (15), the outer blocking ring (17) is detachably installed on the outer side of the inner blocking ring (14), the top sealing seat (18) is installed on the top of the outer blocking ring (17), the second inner ring seat (19) is detachably installed in the top sealing seat (18), the first inner ring seat (16) and the second inner ring seat (19) are respectively matched with the pipe hole at the two ends of the drawing die, the drawing die is connected with the negative pole of the bias power supply arranged on the outer blocking ring (17) and the top sealing seat (18), the fixed disc (20) is installed on the base disc (9), the uniform coating rod (21) is installed on the fixed disc (20) and penetrates the first inner ring seat (16), the second inner ring seat (19) and the drawing die.

2. A die coating apparatus for high frequency pipe welding as defined in claim 1, wherein The inner gear ring (6) is arranged on the inner side of the annular gear box (1), the first motor (4) is inlaidly installed on the bottom of the annular gear box (1), the driving tooth (5) is arranged on the output end of the first motor (4) and is coaxially connected with the turntable (2), a plurality of planet gears (7) are arranged at equal intervals between the inner gear ring (6) and the driving tooth (5), the rotating shaft (8) is arranged in the planet gear (7) and is connected with the base disc (9) and penetrates the turntable (2).

3. A die coating apparatus for high frequency pipe welding as defined in claim 2 wherein, The first pneumatic cylinder (22) is installed on the bottom of the mounting frame (10), and the top telescopic end of the first pneumatic cylinder (22) is connected with the lifting plate (11).

4. A die coating apparatus for high frequency pipe welding as defined in claim 3 wherein, The second pneumatic cylinder (23) is installed on the top side of the lifting frame (12), and the bottom telescopic end of the second pneumatic cylinder (23) is connected with the lifting plate (11).

5. A die coating apparatus for high frequency pipe welding as defined in claim 4 wherein, The second motor (24) is installed on one of the lifting frames (12), and the output end of the second motor (24) is connected with the rotating arm (13).

6. A die coating apparatus for high frequency pipe welding as defined in claim 5 wherein, The bottom sealing seat (15) and the first inner ring seat (16) are connected through bolts, and the top sealing seat (18) and the second inner ring seat (19) are connected through bolts.

7. A die coating apparatus for high frequency pipe welding as defined in claim 6 wherein, A plurality of straight grooves (25) are equiangularly formed on the bottom sealing seat (15), and a gear disc (28) is rotatably installed on the bottom side of the bottom sealing seat (15), a plurality of arc grooves (31) are equiangularly formed on the gear disc (28), a guide rod (32) is transversely installed in the arc grooves (31) and the straight grooves (25), and a sliding block (26) is installed on the top end of the guide rod (32), a limiting clamp block (27) is installed on the sliding block (26), a plurality of guide grooves parallel to the straight grooves (25) are formed on the bottom sealing seat (15), and a guide block is slidably connected to the guide grooves on the bottom side of the sliding block (26).

8. A die coating apparatus for high frequency pipe welding as defined in claim 7 wherein, A third motor (29) is installed on the outer side of the inner blocking ring (14), and a rotating gear (30) is installed on the output end of the third motor (29) and engaged with the gear disc (28).

9. A die coating apparatus for high frequency pipe welding as defined in claim 8 wherein, An electromagnet (33) is inlaidly installed on the top end of the inner blocking ring (14), and a permanent magnet (34) is inlaidly installed in the inner blocking ring (17).

10. A method of operating a die coating apparatus for high frequency pipe welding as defined in claim 9, wherein, The specific operation steps of the working method are as follows: Step one: according to the inner hole size of the mold, select the appropriate first inner ring seat (16) and the second inner ring seat (19), and install them on the bottom sealing seat (15) and the top sealing seat (18), according to the inner hole diameter of the drawing die, install the appropriate uniform plating rod (21) on the fixed disc (20), the electromagnet (33) is in the off state, remove the outer blocking ring (17) and the top sealing seat (18), place the drawing die in the inner blocking ring (14) and the bottom sealing seat (15), and the uniform plating rod (21) penetrates the inner hole of the drawing die, at this time, the rotating gear (30) is driven to rotate by the third motor (29), the meshing gear disc (28) is driven to rotate, the arc grooves (31) on the gear disc (28) and the straight grooves (25) on the bottom sealing seat (15) work together to convert the rotating motion of the gear disc (28) into the radial linear motion of the sliding block (26), a plurality of sliding blocks (26) are synchronized to move towards the center or away from the center, and the limiting clamp block (27) is matched to realize the quick, centering and stable installation of the drawing die, so that the distance between the uniform plating rod (21) and the inner wall of the inner hole of the drawing die is kept the same. Step two: At this time, the outer retaining ring (17) and the top sealing seat (18) are installed to the drawing die and the inner retaining ring (14) outside, by starting the electromagnet (33), it is attracted with the permanent magnet (34), so as to lock the outer retaining ring (17) and the inner retaining ring (14), firmly clamp the drawing die in the middle, form a seal, at this time the drawing die hole is in the exposed state, close the vacuum box, the vacuum system is vacuumized, the process gas is inhaled, the bias power supply and the arc target power supply are opened, the first motor (4) drives the driving tooth (5), drives the turntable (2) and all the base disc (9) to revolve around the center of the ring gear box (1), the planetary gear (7) is engaged with the driving tooth (5) in the center and the inner tooth ring (6) in the outer circle at the same time, this differential transmission forces the planetary gear (7) to produce autorotation while revolving, and transmits autorotation to the clamping assembly (3) and the drawing die above through the rotating shaft (8), so that the die changes angle constantly in the deposition process, at the same time, the lifting plate (11) is driven to move up by the first pneumatic cylinder (22), the lifting frame (12) is driven to move up by the second pneumatic cylinder (23), and then the inner retaining ring (14) and the drawing die are moved up to above the uniform deposition rod (21), at this time, the inner retaining ring (14) and the drawing die are turned over by the work of the second motor (24), the position of the drawing die is changed, then the first pneumatic cylinder (22) and the second pneumatic cylinder (23) are retracted to contact the top sealing seat (18) and the fixed disc (20), and at this time the uniform deposition rod (21) continues to penetrate the inner hole of the drawing die, the subsequent drawing die is revolved and autorotated again, so as to ensure that the plasma can uniformly cover all areas of the inner hole.

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