Sliding texture sensor based on laser direct writing and microstructure and preparation method thereof
By using laser direct writing and microstructure technology to prepare copper-plated patterned layers on a flexible substrate, combined with photoactivated catalysts, the shortcomings of existing sliding sensing sensors in industrial applications have been overcome, achieving efficient sliding sensing and low-cost manufacturing, thus promoting the development of flexible bionic skin technology.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-28
- Publication Date
- 2026-03-10
AI Technical Summary
Existing sliding sensors have limited effectiveness in industrial applications and cannot meet the demand for simple manufacturing and good sliding sensing performance.
A sliding texture sensor with a controllable sliding sensing distribution of raised structures was prepared by forming a copper-plated pattern layer on a flexible substrate using laser direct writing and microstructure technology, combined with photoactivated catalyst and chemical plating process.
It achieves highly efficient sliding sensing performance, and features low cost and ease of mass production, promoting the widespread application of flexible bionic skin technology.
Smart Images
Figure CN121633532A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of sliding sensing sensor technology, specifically relating to a sliding texture sensor based on laser direct writing and microstructure and its fabrication method. Background Technology
[0002] A sliding sensor is a sensor that converts changes in resistance caused by external sliding stimuli into an electrical signal output. It has advantages such as simple structure, easy integration, and data output. Sliding sensor arrays are typically fabricated by first preparing a flexible substrate of composite conductive material, then creating microstructures on the front side of the flexible substrate using a molding process, and finally forming a strain or pressure sensing structure on the back side of the flexible substrate.
[0003] As research into slip sensing sensors continues to deepen, it involves multiple fields such as materials science, sensing technology, mechanical engineering, and artificial intelligence. It can mimic human tactile perception, helping robots identify the properties of objects they grasp and adjust the force applied to prevent slippage. Over the past decade, researchers have developed various slip detection methods using different sensors, but their practical impact on the industrial market remains relatively limited, leaving ample room and possibilities for future research and applications.
[0004] Therefore, developing a simple-to-manufacture sliding sensor with good sliding sensing effect is of great significance for the application of sliding sensor. Summary of the Invention
[0005] In response to the industrial needs of the background technology, this invention proposes a sliding texture sensor based on laser direct writing and microstructure and its fabrication method.
[0006] The technical solution adopted in this invention is as follows:
[0007] A sliding texture sensor based on laser direct writing and microstructure includes a substrate layer and a copper-plated pattern layer;
[0008] The base layer is a three-dimensional structure with protrusions distributed on its surface.
[0009] The copper-plated pattern layer is formed on the side of the raised structure, located in the area of 30% to 80% of the height of the raised structure. It is obtained by laser etching using laser direct writing technology followed by chemical copper plating.
[0010] Furthermore, the distribution of the protrusions can be uniform or non-uniform, and the shape of the protrusions is conical, with the cone tip used to sense sliding.
[0011] Furthermore, the height of the protrusion structure is 50 micrometers to 2 millimeters, and the spacing is 0 to 50 micrometers.
[0012] Furthermore, the substrate layer is an elastomer, composed of a flexible polymer, a conductive material, and a photoactivated catalyst, with a thickness of 1.1 mm to 1.5 mm.
[0013] Furthermore, in the substrate layer, the conductive material accounts for 1 wt% to 6 wt% of the mass of the flexible polymer, and the photoactivated catalyst accounts for 3 wt% to 6 wt% of the mass of the flexible polymer.
[0014] Furthermore, the flexible polymer is a thermosetting elastomer material, a thermoplastic elastomer material, etc., specifically polydimethylsiloxane; the conductive material is carbon nanotubes, carbon black, etc.; and the photoactivated catalyst is nano-tin antimony oxide, etc.
[0015] Furthermore, the copper-plated pattern layer serves to conduct electrical signals. When the cone is bent under force, the pattern attached to the surface of the cone tears, causing a change in the resistance value measured at both ends of the sensor. The pattern only needs to ensure that there is an electrical signal path at both ends of the sensor. It can be stripes, grids, or rhombuses, etc. The line width is 40 micrometers to 200 micrometers, the stripe spacing is 100 micrometers to 1 millimeter, the grid side length is 100 micrometers to 1 millimeter, and the rhombus side length is 100 micrometers to 1 millimeter.
[0016] Furthermore, the thickness of the copper-plated pattern layer is 5 micrometers to 40 micrometers.
[0017] A method for fabricating a sliding texture sensor based on laser direct writing and microstructure includes the following steps:
[0018] Step 1: Mix the flexible polymer, conductive material and photoactivated catalyst and stir thoroughly to make the dopants evenly distributed in the polymer to form a conductive flexible polymer colloid doped with photoactivated catalyst. Then add curing agent and stir evenly to form a colloid.
[0019] Step 2: Using a molding method, the colloid obtained in Step 1 is formed into a three-dimensional structure with a raised surface to obtain the base layer;
[0020] Step 3: Laser etching is performed on the obtained substrate layer using laser direct writing technology to form a copper layer pattern;
[0021] Step 4: Perform electroless copper plating on the substrate layer after laser etching in Step 3 to obtain a copper-plated pattern layer;
[0022] Step 5: Clean and dry to obtain the sliding texture sensor.
[0023] Furthermore, in step 1, the conductive material accounts for 1 wt% to 6 wt% of the mass of the flexible polymer, and the photoactivated catalyst accounts for 3 wt% to 6 wt% of the mass of the flexible polymer; the curing agent is a styrene polymer, etc., and the mass ratio of the curing agent to the flexible polymer is 1:10.
[0024] Furthermore, the laser etching process in step 3 is as follows: using an ultraviolet laser, the substrate is laser-treated at a laser frequency of 50kHz to 60kHz and a speed of 1000mm / s to 2000mm / s to activate the photoactive catalyst in the substrate, wherein the filling interval of the laser treatment is less than 0.02mm.
[0025] Furthermore, in step 4, the electroless copper plating process uses a plating solution prepared with water, copper plating solution component A, and copper plating solution component B in a mass ratio of 15:2:1. The temperature is 30°C–35°C, the humidity is 20%–30%, and the electroless plating time is 8–10 hours. Copper plating solution component A includes copper sulfate and formaldehyde, etc.; copper plating solution component B includes complexing agents such as sodium EDTA and tartrate, and alkaline substances such as sodium hydroxide and sodium carbonate.
[0026] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0027] 1. The present invention provides a sliding texture sensor based on laser direct writing and microstructure. By doping a photoactivated catalyst in the substrate layer, the photoactivated catalyst undergoes a displacement reaction with the chemical plating solution after being activated by laser, thereby realizing the preparation of a copper layer on the substrate layer with a raised structure, which enhances the sensing ability and conductivity of the biomimetic skin.
[0028] 2. The present invention provides a sliding texture sensor based on laser direct writing and microstructure, wherein a raised structure with controllable sliding sensing distribution is distributed on the surface of the substrate layer. When sliding, the raised structure will bend and deform, thereby causing the measured resistance to change, thus realizing sliding sensing.
[0029] 3. The sliding texture sensor based on laser direct writing and microstructure provided by this invention has good sliding sensing performance, and is also low-cost and easy to mass-produce, laying a solid foundation for promoting the widespread application of flexible bionic skin technology. Attached Figure Description
[0030] Figure 1 A schematic diagram of a sliding texture sensor based on laser direct writing and microstructure provided by the present invention;
[0031] Figure 2 Here are two schematic diagrams: (a) showing the sliding process and (b) showing the copper wire fracture on the protruding structure.
[0032] Figure 3This is a physical image of the 2×2 unit sliding sensing sensor array prepared in Example 1;
[0033] Figure 4 This is a physical image of the 6×6 unit sliding sensing sensor array prepared in Example 2;
[0034] Figure 5 The frequency domain curve of the resistance detected by the sliding sensing sensor unit of Example 1 when the stripe spacing is 1 mm, the height of the protrusion structure is 1 mm and the spacing is 0, and the sliding speed is 105 mm per second.
[0035] Figure 6 The frequency domain curves of the resistance of each unit of the 2×2 unit sliding sensing sensor array in Example 1 are obtained when the stripe spacing is 1 mm, the height of the protrusion structure is 1 mm and the spacing is 0, and the sliding direction is at a sliding speed of 90 mm / s and at a sliding angle of 45° to the stripe structure.
[0036] Figure 7 The frequency domain curves of the resistance of each unit of the 2×2 unit sliding sensing sensor array in Example 1 are obtained when the stripe spacing is 1 mm, the height of the protrusion structure is 1 mm, the spacing is 0, the sliding speed is 90 mm / s, and the sliding direction is at a 30° angle to the stripe structure.
[0037] Figure 8 The frequency domain curves of the resistance of each unit of the 2×2 unit sliding sensing sensor array in Example 1 are obtained when the stripe spacing is 1 mm, the height of the protrusion structure is 1 mm and the spacing is 0, and the sliding speed is 90 mm / s and the sliding direction is at a 60° angle to the stripe structure.
[0038] Figure 9 The curve showing the relationship between the angle between the 2×2 unit sliding sensing sensor array of Example 1 and the stripe structure and the characteristic frequency of the detected resistance when the slat spacing is 1 mm, the height of the protrusion structure is 1 mm and the spacing is 0, and the slid speed is 90 mm / s.
[0039] Figure 10 The resistance changes of the 6×6 unit sliding sensing sensor array in Example 2 when it is sequentially subjected to sliding paths “S”, “I”, “A” and “S”, and the resistance changes of two units during each sliding process;
[0040] Figure 11 The resistance changes of the 6×6 unit sliding sensing sensor array in Example 2 when it slides on the "human" shaped protrusion structure are shown in (a), (b), and (c) respectively. Detailed Implementation
[0041] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.
[0042] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.
[0043] In this invention, unless otherwise stated, the directional terms such as "up" and "down" generally refer to the directions shown in the accompanying drawings, or to the vertical, perpendicular, or gravitational direction; similarly, for ease of understanding and description, "left" and "right" generally refer to the left and right shown in the accompanying drawings; "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not intended to limit this invention.
[0044] A sliding texture sensor based on laser direct writing and microstructure includes a substrate layer and a copper-plated pattern layer;
[0045] The base layer is a three-dimensional structure with a surface covered by protrusions that can be controlled to slide and sense distribution. It is composed of a flexible polymer, a conductive material, and a photoactivated catalyst.
[0046] The copper-plated pattern layer is formed on the side of the raised structure, located in the area of 30% to 80% of the height of the raised structure. It is a copper layer formed by laser-catalyzed chemical plating that is closely attached to the three-dimensional surface of the substrate.
[0047] The photoactivated catalyst in the substrate is a catalyst such as nano-tin antimony oxide that undergoes a displacement reaction with the chemical plating solution after being activated by laser.
[0048] Example 1
[0049] Step 1: Mix the flexible polymer polydimethylsiloxane (PDMS), conductive material carbon nanotubes, and photoactivated catalyst nano-tin antimony oxide, and stir thoroughly to ensure the dopants are evenly distributed within the polymer, forming a conductive flexible polymer colloid doped with the photoactivated catalyst. Then, add the curing agent styrene polymer and stir evenly to form a colloid. The conductive material accounts for 3 wt% of the mass of the flexible polymer, the photoactivated catalyst accounts for 5 wt% of the mass of the flexible polymer, and the mass ratio of the curing agent to the flexible polymer is 1:10.
[0050] Step 2: Spray silicone release agent onto the mold, heat in an oven at 60°C for 0.5 hours, then pour the resulting colloid into the mold, place it in a vacuum dryer and vacuum until no bubbles are generated, continue heating in an oven at 60°C for 10 hours, and demold after curing to form a three-dimensional structure with raised surface, i.e., the base layer.
[0051] Step 3: Laser etching is performed on the obtained substrate layer using laser direct writing technology to form a copper layer pattern; specifically, an ultraviolet laser is used to laser process the substrate layer at a laser frequency of 60kHz and a speed of 2000mm / s to activate the photoactive catalyst in the substrate layer, wherein the filling interval of the laser processing is 0.02mm.
[0052] Step 4: Perform chemical copper plating on the substrate layer after laser etching in Step 3 to obtain a copper pattern layer. The plating solution is prepared by mixing water, copper plating solution component A and copper plating solution component B in a mass ratio of 15:2:1. The temperature is 30°C, the humidity is 20%, and the chemical plating time is 8 hours. The resulting copper pattern layer has a striped structure.
[0053] Step 5: Clean and dry to obtain a 2×2 unit sliding texture sensor.
[0054] Depend on Figure 5 It can be seen that this sensor can accurately measure the sliding speed; from Figures 6 to 9 It can be seen that the sensor can accurately measure the direction of sliding.
[0055] Example 2
[0056] Step 1: Mix the flexible polymer polydimethylsiloxane (PDMS), conductive material carbon nanotubes, and photoactivated catalyst nano-tin antimony oxide, and stir thoroughly to ensure the dopants are evenly distributed within the polymer, forming a conductive flexible polymer colloid doped with the photoactivated catalyst. Then, add the curing agent styrene polymer and stir evenly to form a colloid. The conductive material accounts for 4 wt% of the mass of the flexible polymer, the photoactivated catalyst accounts for 5 wt% of the mass of the flexible polymer, and the mass ratio of the curing agent to the flexible polymer is 1:10.
[0057] Step 2: Spray silicone release agent onto the mold, heat in an oven at 60°C for 0.5 hours, then pour the resulting colloid into the mold, place it in a vacuum dryer and vacuum until no bubbles are generated, continue heating in an oven at 60°C for 10 hours, and demold after curing to form a three-dimensional structure with raised surface, i.e., the base layer.
[0058] Step 3: Laser etching is performed on the obtained substrate layer using laser direct writing technology to form a copper layer pattern; specifically, an ultraviolet laser is used to laser process the substrate layer at a laser frequency of 60kHz and a speed of 2000mm / s to activate the photoactive catalyst in the substrate layer, wherein the filling interval of the laser processing is 0.02mm.
[0059] Step 4: Perform chemical copper plating on the substrate layer after laser etching in Step 3 to obtain a copper pattern layer. The plating solution is prepared by mixing water, copper plating solution component A and copper plating solution component B in a mass ratio of 15:2:1. The temperature is 30°C, the humidity is 20%, and the chemical plating time is 8 hours. The resulting copper pattern layer has a striped structure.
[0060] Step 5: Clean and dry to obtain a 6×6 unit sliding texture sensor.
[0061] Depend on Figure 10 It can be seen that the sensor can accurately sense the sliding path; from Figure 11 It can be seen that the sensor can accurately identify the features of the surface structure by sliding and touching it.
[0062] Obviously, the embodiments described above are merely some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort should fall within the scope of protection of the present invention.
[0063] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0064] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.
[0065] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.
Claims
1. A laser direct writing and microstructure based sliding texture sensor, characterized in that, The sliding texture sensor comprises a substrate layer and a copper-plated pattern layer. The substrate layer is a three-dimensional structure with convex structures distributed on the surface. The copper-plated pattern layer is formed on the side surface of the convex structure and located in the area of 30% to 80% of the height of the convex structure, and is obtained by laser etching using a laser direct writing technology and then chemical copper plating.
2. The laser direct writing and microstructure based sliding texture sensor of claim 1, wherein, The convex structure is a cone, and the height of the convex structure is 50 microns to 2 millimeters, and the interval is 0 to 50 microns.
3. The laser direct writing and microstructure based sliding texture sensor of claim 1, wherein, The substrate layer is obtained by compounding a flexible polymer, a conductive material and a light-activated catalyst.
4. The laser direct writing and microstructure based sliding texture sensor of claim 3, wherein, In the substrate layer, the conductive material accounts for 1wt% to 6wt% of the mass of the flexible polymer, and the light-activated catalyst accounts for 3wt% to 6wt% of the mass of the flexible polymer.
5. The laser direct writing and microstructure based sliding texture sensor of claim 3, wherein, The flexible polymer is a thermosetting elastomer material or a thermoplastic elastomer material, the conductive material is carbon nanotubes or carbon black, and the light-activated catalyst is nano-tin oxide antimony.
6. The laser direct writing and microstructure based sliding texture sensor of claim 1, wherein, The copper-plated pattern layer is a stripe, a grid or a rhombus, the line width is 40 microns to 200 microns, the stripe line interval is 100 microns to 1 millimeter, the grid side length is 100 microns to 1 millimeter, and the rhombus side length is 100 microns to 1 millimeter.
7. A method for fabricating a laser direct writing and microstructure based sliding texture sensor, characterized in that, The method comprises the following steps: Step 1, the conductive flexible polymer colloid doped with a light-activated catalyst is formed by mixing a flexible polymer, a conductive material and a light-activated catalyst and then fully stirring, and a curing agent is added and stirred uniformly to form a colloid; Step 2, the colloid obtained in step 1 is formed into a three-dimensional structure with convex structures distributed on the surface by using a reverse mold method to obtain a substrate layer; Step 3, laser etching is performed on the obtained substrate layer by using a laser direct writing technology to form a pattern of a copper layer; Step 4, chemical copper plating is performed on the substrate layer after laser etching in step 3 by using a chemical plating process to obtain a copper-plated pattern layer; Step 5, cleaning, drying and obtaining the sliding texture sensor.
8. The method according to claim 7, wherein, In step 1, the conductive material accounts for 1wt% to 6wt% of the mass of the flexible polymer, and the light-activated catalyst accounts for 3wt% to 6wt% of the mass of the flexible polymer; the curing agent is a styrene polymer, and the mass ratio of the curing agent to the flexible polymer is 1:
10.
9. The method of claim 7, wherein the laser direct writing and microstructure based sliding texture sensor is prepared by the steps of: In step 3, the laser etching process is as follows: an ultraviolet laser is used to perform laser treatment on the substrate layer at a laser frequency of 50kHz to 60kHz and a speed of 1000mm / s to 2000mm / s to activate the light-activated catalyst in the substrate layer, and the filling interval of the laser treatment is 0.02mm or less.
10. The method of claim 7, wherein the laser direct writing and microstructure based sliding texture sensor is prepared by the steps of: In the chemical copper plating process of step 4, the plating solution is prepared by using water, plating copper liquid component A and plating copper liquid component B at a mass ratio of 15:2:1, the temperature is 30° to 35°, the humidity is 20% to 30%, and the chemical plating time is 8 to 10h.