Online overturning tornado blowing device and method

Abstract

The invention relates to the technical field of semiconductor processing equipment, in particular to an online overturning tornado blowing device and method. The online overturning tornado blowing device is characterized in that a blowing opening is formed in a table top; the overturning mechanism comprises a rotating assembly fixed to the table top, a rack rotationally arranged on the rotating assembly, a feeding assembly and a fixing assembly, the feeding assembly and the fixing assembly are arranged on the rack, the fixing assembly can be relatively close to or away from each other in the direction facing the feeding assembly, materials are fixed between the fixing assembly and the feeding assembly, and when the rack overturns by 180 degrees, the materials face the blowing opening; the blowing mechanism is arranged below the blowing opening and blows air towards the materials between the fixing assembly and the feeding assembly, and the air blown out by the blowing mechanism is tornado type airflow. The discharging mechanism is arranged on the next station of the feeding assembly, corresponds to the feeding assembly and is used for receiving and conveying materials. Through overturning and tornado blowing, damage to the surfaces of materials is avoided, the efficient and thorough cleaning effect is achieved, and the overall production efficiency in the machining process is greatly improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment, and in particular to an online tornado flip sweeping device and method. BACKGROUND

[0002] In the process of semiconductor processing, the surface of the semiconductor material will be affected by various contaminants, such as fine particles, processing waste and other impurities generated in the cutting, polishing, cleaning and packaging steps. The presence of these impurities can directly affect the effect of subsequent processes and product quality. Therefore, the device needs to effectively remove the particles or waste accumulated on the surface of the semiconductor material through the sweeping structure in the device, which not only removes the impurities on the surface of the material, but also achieves uniform cleaning by controlling the flip angle and sweeping method, thereby improving the processing reliability and production efficiency.

[0003] In the prior art, the commonly used cleaning methods mainly include vacuum cleaning, electrostatic adsorption, ordinary gas sweeping and the like. However, the above technical solutions have obvious limitations in actual application. For example, vacuum cleaning relies on strong adsorption capacity to remove impurities, but for relatively heavy particles or waste, the suction force is often not enough to completely suck them away, causing impurities to remain. If the adsorption force is too strong, it may also have unnecessary negative effects on the surface of the semiconductor material, such as pulling or damaging the fragile structure of the semiconductor surface. Although ordinary gas sweeping has been improved, its airflow direction is single, which can easily cause uneven cleaning problems, and some small particles may be attached to the surface of the material to form electrostatic adsorption, reducing the cleaning effect.

[0004] Based on the above deficiencies of the prior art, a new technical solution is needed to effectively remove impurities and waste from the surface of the material during semiconductor production and processing, which can not only ensure the effective removal of heavy impurities, but also avoid physical damage to the structure of the semiconductor material itself, to overcome the shortcomings of low cleaning efficiency and uneven cleaning in the prior art. SUMMARY

[0005] In view of at least one of the above technical problems, the present application provides an online tornado flip sweeping device and method, which improves the cleaning efficiency and cleaning quality by improving the structure.

[0006] According to a first aspect of the present application, there is provided an online tornado flip sweeping device, comprising: a table top, wherein a sweeping port is formed in the table top; The turnover mechanism comprises a rotating assembly fixed on the table top, a rack rotatably arranged on the rotating assembly, a feeding assembly arranged on the rack for conveying materials, and a fixing assembly arranged on the rack and opposite to the feeding assembly, the fixing assembly being capable of relatively approaching or moving away from the feeding assembly, and a space between the fixing assembly and the feeding assembly being used for accommodating and fixing the materials, when the rack is turned over by 180°, the materials between the fixing assembly and the feeding assembly are directed to the blowing port; The blowing mechanism is arranged below the blowing port and blows air to the materials between the fixing assembly and the feeding assembly, the blowing mechanism blows air in the form of a tornado. The discharging mechanism is arranged on a next station of the feeding assembly and corresponds to the feeding assembly, and is used for receiving the conveyed materials.

[0007] In some embodiments of the present application, the rotating assembly comprises support plates fixed at opposite ends of the blowing port, a rotating piece penetrating through the support plates and fixed on the rack, and a rotating driving piece for driving the rotating piece to rotate.

[0008] In some embodiments of the present application, two position detection pieces are arranged on the support plates at opposite positions, and a blocking plate is arranged on the rack, the blocking plate being located in one of the position detection pieces when the rack is in an initial position, and the blocking plate being located in the other position detection piece when the rack is turned over by 180°.

[0009] In some embodiments of the present application, the fixing assembly comprises a pressing plate capable of relatively approaching or moving away from the materials, and a displacement driving piece connected between the pressing plate and the rack, the pressing plate being provided with a window corresponding to the position of the materials, and the side of the pressing plate facing the feeding assembly being provided with a plurality of fixing columns.

[0010] In some embodiments of the present application, a locking assembly is further provided, comprising two locking plates arranged at opposite positions of the rack, and a locking pin fixed on the table top, the locking plates being provided with locking holes, the locking pin being respectively inserted into one of the locking holes when the rack is in an initial position and is turned over by 180°.

[0011] In some embodiments of the present application, the blowing mechanism comprises a cleaning tank fixed at the blowing port, a blowing assembly slidingly arranged in the cleaning tank, and a blowing driving piece for driving the blowing assembly to relatively approach or move away from the blowing port.

[0012] In some embodiments of the present invention, the blowing assembly includes a dust collection box having an opening corresponding to the window, a plurality of air nozzles disposed inside the dust collection box facing the opening, and air pipes disposed on both sides inside the opening of the dust collection box, the air pipes having a plurality of air passage holes, and the dust collection box also having an air suction pipe connected to the outside.

[0013] In some embodiments of the present invention, both the feeding assembly and the discharging mechanism are conveyor belts for transporting materials, a feeding drive for driving the belt to rotate, and position sensors disposed at the belt inlet and outlet ends.

[0014] In some embodiments of the present invention, the feeding assembly and the discharging mechanism each have a limiting component at the material discharging end, including a stop block that can be relatively close to or away from the material direction, and a limiting drive member that drives the stop block. The feeding assembly and the discharging mechanism also have limiting strips on both sides.

[0015] According to a second aspect of the present invention, an online tornado sweeping method is also provided, comprising the following steps: The material is conveyed to the stationary component and the feeding component through the feeding component; Once the material position is determined, the fixing component moves toward the material and, together with the feeding component, fixes the material in place. The rotating component drives the frame and the material to rotate 180° together, so that the material faces the blow port. During the rotation, some of the impurities on the surface of the material fall off. The purging mechanism blows towards the material, using a tornado-like airflow to blow away all remaining impurities. After purging is completed, the frame is flipped back to its initial position using the rotating assembly; Open the fixing component, start the feeding component, transfer the material to the discharge mechanism, and then convey it to the next station of the discharge mechanism.

[0016] The beneficial effects of this invention are as follows: By setting up a flipping mechanism to rotate the frame 180°, the material between the feeding component and the fixing component mounted on the frame is flipped, causing impurities on the material surface to fall off. The material, initially placed upwards, is flipped downwards, ensuring thorough cleaning of impurities and waste without blind spots. Furthermore, the rotation mechanism avoids the problem of blind spots in traditional methods. The blowing mechanism emits a tornado-like airflow below the blowing port, effectively removing heavier impurities from the semiconductor surface using a strong and uniform airflow. The spiral characteristics of the airflow greatly improve cleaning efficiency while avoiding potential damage to the material due to excessive suction. The discharge mechanism located on one side of the feeding component allows the cleaned material to flow smoothly into the next process, ensuring the continuity of the production line and high efficiency of transportation. Through flipping and tornado blowing, damage to the material surface is avoided, and a highly efficient and thorough cleaning effect is achieved, significantly improving the overall production efficiency in the processing. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the online flipping tornado purging device in an embodiment of the present invention; Figure 2 This is a top view of the online flipping tornado purging device in an embodiment of the present invention; Figure 3 This is a schematic diagram of the purging mechanism in the online flipping tornado purging device in an embodiment of the present invention; Figure 4 This is a schematic diagram of the flipping mechanism in the online flipping tornado purging device in an embodiment of the present invention; Figure 5 This is a schematic diagram of the flipping mechanism in the online flipping tornado purging device according to another perspective in an embodiment of the present invention; Figure 6 This is a schematic diagram of the material discharge mechanism in the online flipping tornado purging device in an embodiment of the present invention; Figure 7 This is a flowchart illustrating the steps of the online flipping tornado purging method in an embodiment of the present invention.

[0019] Reference numerals: 1. Tabletop; 11. Purge port; 2. Tilting mechanism; 21. Rotating assembly; 21a. Support plate; 21a1. Position detection component; 21a2. Blocking plate; 21b. Rotating component; 21c. Rotating drive component; 22. Frame; 23. Feeding assembly; 24. Fixing assembly; 24a. Pressure plate; 24b. Displacement drive component; 24c. Window; 24d. Fixing column; 25. Locking assembly; 25a. Locking plate; 25a1. Locking 25b, Locking pin; 3, Blowing mechanism; 31, Cleaning tank; 32, Blowing assembly; 32a, Dust collection box; 32a1, Opening; 32b, Air nozzle; 32c, Air pipe; 32c1, Air passage hole; 32d, Suction pipe; 33, Blowing drive component; 4, Discharge mechanism; 41, Belt; 42, Feeding drive component; 43, Position sensor; 44, Limiting assembly; 44a, Stop block; 44b, Limiting drive component; 45, Limiting stop bar. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0021] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly attached to the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0023] like Figures 1 to 6 The online tornado purging device shown includes: Tabletop 1, with a purge port 11 provided on the tabletop 1; Flipping mechanism 2, such as Figure 4 , Figure 5As shown, the assembly includes a rotating component 21 fixed on the table 1, a frame 22 rotatably mounted on the rotating component 21, a feeding component 23 mounted on the frame 22 for conveying materials, and a fixing component 24 mounted on the frame 22 and opposite to the feeding component 23. The fixing component 24 can move closer to or further away from the feeding component 23. The fixing component 24 and the feeding component 23 are used to accommodate and fix the materials. When the frame 22 is rotated 180°, the materials between the fixing component 24 and the feeding component 23 are directed towards the blow port 11. The rotating component 21 drives the frame 22 and the internal structure of the frame 22 to rotate. On the production line, various steps such as cutting and polishing of materials at previous workstations may generate impurities and waste of different sizes. The rotation of the rotating component 21 can cause some of the impurities and waste that are not attached to the materials to fall off. The clamping of the materials by the fixing component 24 and the feeding component 23 can better fix the materials, facilitating the next step of blowing. It should be noted that the rotating component 21 can take many forms, including gear drive, belt drive 41, rotary motor, or other drive mechanisms capable of rotation. The feeding component 23 serves two purposes: conveying and securing the material. Specifically, after purging, it rotates 180° back to its initial position, allowing the material to be repositioned with the discharge mechanism 4 at the next station for output.

[0024] Purging mechanism 3, such as Figure 3 As shown, the blowing mechanism 3, positioned below the blowing port 11, blows air towards the material between the fixed assembly 24 and the feeding assembly 23. The air blown out by the blowing mechanism 3 forms a tornado-like airflow. In the above technical solution, the material is rotated 180° by the rotating assembly 21, and the surface of the material is swept by the tornado-like airflow formed by the blowing mechanism 3. This can more thoroughly remove impurities and waste, reduce the residue of impurities and waste, and improve the blowing efficiency. It should be noted that the blowing mechanism 3 can be a structure with multiple nozzles. The nozzle positions can be set according to the distribution of waste and impurities generated by the material being blown, or according to the formation of the airflow.

[0025] Discharge mechanism 4, such as Figure 1 , Figure 6 As shown, it is located at the next station after the feeding assembly 23, corresponding to the feeding assembly 23, and is used to receive and convey materials. The discharge mechanism 4 corresponds to the feeding assembly 23 and can better transfer the cleaned materials out.

[0026] This invention utilizes a flipping mechanism 2 to rotate the frame 22 180°, causing impurities on the material between the feeding assembly 23 and the fixing assembly 24 mounted on the frame 22 to fall off. This flipping process ensures thorough cleaning of impurities and waste, avoiding blind spots common in traditional methods. The blowing mechanism 3 emits a tornado-like airflow below the blowing port 11, effectively removing heavier impurities from the semiconductor surface. The spiral nature of the airflow significantly improves cleaning efficiency while preventing damage to the material from excessive suction. A discharge mechanism 4 located on one side of the feeding assembly 23 allows the cleaned material to flow smoothly into the next process, ensuring production line continuity and efficient transportation. Through flipping and tornado-like blowing, damage to the material surface is avoided, achieving a highly efficient and thorough cleaning effect and significantly improving overall production efficiency during processing.

[0027] Continue to refer to Figure 4 , Figure 5 The rotating assembly 21 includes support plates 21a fixed at opposite ends of the purge port 11, a rotating component 21b passing through the support plates 21a and fixed to the frame 22, and a rotary drive component 21c that drives the rotating component 21b to rotate. The rotating assembly 21 is securely installed via the support plates 21a fixed at opposite ends of the purge port 11, and the rotating component 21b, passing through the support plates 21a and fixed to the frame 22, provides the basis for material flipping, ensuring the stability of the equipment and the accuracy of the rotation, and avoiding possible deviation or loosening during high-speed operation. The rotary drive component 21c that drives the rotating component 21b makes the entire flipping process more efficient and controllable, not only increasing the flipping speed but also allowing for fine adjustments through a precise control system to adapt to different types of materials and achieve more uniform and comprehensive cleaning.

[0028] Traditional equipment often struggles to monitor and control the position of the flipping motion, which can easily lead to incomplete material flipping or positional deviation, thus affecting cleaning effectiveness. For example... Figure 4As shown, two positioning detection elements 21a1 are positioned relative to each other on the support plate 21a, and a blocking plate 21a2 is provided on the frame 22. In the initial position of the frame 22, the blocking plate 21a2 is located within one of the positioning detection elements 21a1. When the frame 22 is rotated 180°, the blocking plate 21a2 is located within the other positioning detection element 21a1. The positioning detection elements 21a1 and the blocking plate 21a2 constitute a reliable flipping detection system, ensuring accuracy and consistency during the flipping process and avoiding incomplete flipping or material positioning deviations caused by inaccurate dynamic positioning in traditional methods. Through the coordinated work of the positioning detection elements 21a1 and the blocking plate 21a2, real-time feedback and precise position control are provided. By monitoring the flipping positioning status in real time, the precise execution of each flipping action is ensured, providing a stable and clean environment for semiconductor materials.

[0029] In some embodiments of the present invention, such as Figure 4 , Figure 5 As shown, the fixing assembly 24 includes a pressure plate 24a that can be relatively close to or away from the material, and a displacement drive component 24b connecting the pressure plate 24a and the frame 22. The pressure plate 24a has an opening 24c corresponding to the material position, and the side of the pressure plate 24a facing the feeding assembly 23 also has multiple fixing posts 24d. The pressure plate 24a can be precisely positioned by the displacement drive component 24b to adapt to the size and shape of different materials, ensuring that the material remains stable during the cleaning process and avoiding the problems of material movement or improper positioning caused by traditional fixing structures. The opening 24c on the pressure plate 24a corresponds to the material position. Multiple fixing posts 24d are provided on the side of the pressure plate 24a facing the feeding assembly 23. The material is fixed by fixing posts 24d, which reduces the contact area between the material and the pressure plate 24a. This ensures that the fixing posts 24d on the pressure plate 24a can not only firmly fix the material, but also ensure that the operation or inspection of the material surface is not hindered during the cleaning process. This simplifies visual inspection and subsequent process steps and improves the overall operating efficiency.

[0030] To enhance the stability of the frame 22, at the initial flipping position or when flipping 180°, the following steps are taken: [Continue to refer to...] Figure 4 , Figure 5The machine also includes a locking assembly 25, comprising two locking plates 25a positioned opposite each other on the frame 22, and a locking pin 25b fixed to the table surface 1. The locking plates 25a have locking holes 25a1. When the frame 22 is in its initial position and when rotated 180°, the locking pin 25b extends into one of the locking holes 25a1. This design ensures the physical stability of the frame 22. The precise fit between the locking holes 25a1 on the locking plates 25a and the locking pin 25b allows the frame 22 to be effectively locked in both its initial position and when rotated 180°. The design of the locking pins 25b extending into the locking holes 25a1 ensures that the frame 22 remains stable and immovable even during rotation, effectively solving the problem of vibration or positional deviation caused by the lack of fixation of the frame 22 in traditional methods. This prevents material damage and incomplete cleaning caused by movement or vibration of the frame 22 during dynamic operation.

[0031] To improve cleaning effectiveness and efficiency, such as Figure 1 , Figure 3 As shown, the purging mechanism 3 includes a cleaning tank 31 fixed at the purging port 11, a purging assembly 32 slidably disposed inside the cleaning tank 31, and a purging drive 33 that drives the purging assembly 32 to move relatively close to or away from the purging port 11. The cleaning tank 31, fixed at the purging port 11, provides a stable and concentrated purging environment for the entire device. The cleaning tank 31 ensures the concentration and control of airflow, reduces potential losses during airflow diffusion, and improves purging efficiency. The purging assembly 32, slidably disposed inside the cleaning tank 31, improves cleaning flexibility, allowing the purging assembly 32 to be precisely positioned or moved within the cleaning tank 31 to contact the material surface at the optimal angle. Regardless of the size or shape of the material, it can be thoroughly cleaned, avoiding the problem of traditional airflows failing to provide comprehensive coverage. The purging drive 33 provides the ability to dynamically adjust the position of the purging assembly 32, allowing the airflow to approach or move away from the material surface. During the purging process, airflow from different positions is generated, improving airflow contact efficiency and cleaning effect, achieving a more efficient and flexible cleaning process.

[0032] Continue to refer to Figure 3The blowing assembly 32 includes a dust collection box 32a with an opening 32a1 corresponding to the window 24c, multiple air nozzles 32b disposed inside the dust collection box 32a facing the opening 32a1, and air pipes 32c disposed on both sides inside the opening 32a1 of the dust collection box 32a. Multiple air passages 32c1 are provided on the air pipes 32c. The dust collection box 32a also has a suction pipe 32d connected to the outside. Through the opening 32a1 corresponding to the window 24c, the dust collection box 32a can fit tightly against the material surface, ensuring that the air nozzles 32b and air pipes 32c can directly act on the cleaning area. This concentrates the airflow and effectively covers the entire cleaning surface of the material, enhancing cleaning efficiency and avoiding the problem of airflow loss that is common with traditional openings 32a1. The multiple air nozzles 32b inside the dust collection box 32a provide a powerful airflow by being designed to directly face the material surface, forming a tornado-like airflow. In traditional methods, a single airflow direction can easily miss blind spots or make it difficult to handle stubborn impurities. This invention maximizes cleaning power through the arrangement of multiple nozzles. The air blowing pipes 32c located on both sides of the opening 32a1 of the dust collection box 32a provide additional lateral airflow coverage through the air passage 32c1, forming an all-round airflow field, enhancing the coverage range of the airflow, so that impurities in every corner of the material surface can be thoroughly removed, and the comprehensiveness of cleaning is significantly improved.

[0033] like Figures 4 to 6 As shown, both the feeding assembly 23 and the discharging mechanism 4 use a conveyor belt 41 to transport materials, a feeding drive 42 to drive the belt 41 to rotate, and position sensors 43 located at the inlet and outlet ends of the belt 41. By using the conveyor belt 41, combined with the feeding drive 42 that drives the belt 41 to rotate, and the position sensors 43 located at the inlet and outlet ends of the belt 41, precise control and monitoring of the material conveying process are achieved. The belt 41, as the conveying medium, provides a stable and continuous material propulsion force. Driven by the feeding drive 42, the belt 41 rotates, making the entire material conveying process smoother and more reliable, increasing the material conveying speed, and ensuring the stability of the material during conveying through precise drive control. The position sensors 43 located at the inlet and outlet ends of the belt 41 provide real-time monitoring and feedback capabilities for the material conveying process, ensuring accurate positioning of materials when entering and leaving the conveyor chain, avoiding misalignment or material detachment common in traditional conveying systems. Real-time monitoring and rapid feedback effectively improve the safety and operational efficiency of the production line, ensuring accurate and compliant material conveying at each stage.

[0034] In semiconductor manufacturing, the accuracy and stability of material delivery are crucial for ensuring processing quality and production efficiency. Traditional conveying equipment often lacks effective limiting mechanisms, leading to material deviation, shaking, or even detachment during the conveying and discharging stages. This not only affects process stability but can also cause material loss or equipment malfunction. Figures 4 to 6 As shown, both the feeding assembly 23 and the discharging mechanism 4 have a limiting assembly 44 at the material discharge end. This includes a stop 44a that can move relative to or away from the material direction, and a limiting drive 44b that drives the stop 44a. Limiting bars 45 are also provided on both sides of the feeding assembly 23 and the discharging mechanism 4. The limiting assembly 44 includes a stop 44a that can move relative to the material direction and a limiting drive 44b that drives the stop 44a. By dynamically adjusting the limiting position at the end of the material conveying process, accurate positioning of the material at the discharge end is ensured. When material enters the feeding assembly 23 or the discharging mechanism 4, the limiting bars 45 rise to the same height as the material to block its forward movement. Simultaneously, the cooperation of the stop 44a and the limiting bars 45 on both sides achieves precise positioning of the material, solving the material misalignment problem caused by the inability to dynamically adjust traditional fixed baffles. Furthermore, precise control of the material movement path improves the reliability of the conveying process. Once the material has completed its operation at the feeding assembly 23 or the discharging mechanism 4, the stop 44a will descend below the material, releasing the restriction on the material and allowing it to pass smoothly to the next process. This ensures the smoothness and efficiency of the entire production process, avoids material stagnation or accumulation at key workstations, and improves the overall operating speed of the production line.

[0035] According to a second aspect of the present invention, an online flipping tornado purging method is also provided, such as... Figure 7 As shown, the steps include: S10: The material is conveyed to the stationary component 24 and the feeding component 23 via the feeding component 23; S20: After the material position is determined, the fixing component 24 moves toward the material and fixes the material together with the feeding component 23; S30: The rotating component 21 drives the frame 22 and the material to rotate 180° together, so that the material faces the blow port 11. During the rotation process, some of the impurities on the surface of the material fall off. S40: The purging mechanism 3 blows towards the material, using a tornado-like airflow to blow away all remaining impurities; S50: After purging is completed, the frame 22 is flipped back to its initial position using the rotating component 21; S60: Open the fixing component 24, start the feeding component 23, transfer the material to the discharge mechanism 4, and convey it to the next station of the discharge mechanism 4.

[0036] like Figure 1 , Figure 2As shown, in this initial stage, the conveying assembly 23 begins operation, securely transporting the semiconductor material to be cleaned to the positioning area, i.e., between the fixing assembly 24 and the feeding assembly 23, ensuring that all materials are accurately positioned, laying the foundation for subsequent steps and guaranteeing the smoothness of the process and the accuracy of the materials. After the material enters the designated position, the fixing assembly 24 moves appropriately toward the material, using the feeding assembly 23 to clamp or support and stabilize the material. This prevents the material from moving during the flipping and blowing operations, ensuring the stability of the cleaning process. The rotating assembly 21 starts, flipping the frame 22 along with the material 180°. The flipping process naturally utilizes gravity, causing larger impurities on the material surface to fall off, reducing the initial cleaning burden. Utilizing the advantages of physical flipping, the material surface is initially cleaned. The material in the flipped position is exposed to the specially designed blowing port 11. The blowing mechanism 3 emits a tornado-like airflow, concentrating and comprehensively blowing the material surface, ensuring that all residual impurities, including stubborn and tiny particles, are thoroughly removed, improving the depth and efficiency of the cleaning. After cleaning is completed, the rotating component 21 operates, flipping the frame 22 back to its original position, ensuring that the treated material can continue to be produced or tested, thus ensuring the continuity of the production line. Finally, the fixing component 24 is opened to release the material, and the feeding component 23 is activated again to smoothly deliver the cleaned material to the discharge mechanism 4, realizing the smooth transfer of cleaned material and maintaining the efficient operation of continuous production and workflow.

[0037] Those skilled in the art should understand that this invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to this invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. An in-line flip tornado blowoff device characterized by, The utility model provides a material conveying device, including: A table top with a blowing port; A turnover mechanism including a rotating assembly fixed on the table top, a rack rotatably arranged on the rotating assembly, a feeding assembly arranged on the rack for conveying materials, and a fixed assembly arranged on the rack opposite to the feeding assembly, the fixed assembly can be relatively close to or away from the feeding assembly, the fixed assembly and the feeding assembly are used for accommodating and fixing the materials, when the rack is turned over by 180 DEG, the materials between the fixed assembly and the feeding assembly are directed to the blowing port; A blowing mechanism arranged below the blowing port and blowing air to the materials between the fixed assembly and the feeding assembly, the blowing mechanism blows air in the form of a tornado; A discharge mechanism arranged on the next station of the feeding assembly corresponding to the feeding assembly for receiving the conveyed materials.

2. The online flip tornado blow off device of claim 1, wherein, The rotating assembly includes support plates fixed at opposite ends of the blowing port, a rotating piece penetrating through the support plates and fixed on the rack, and a rotating drive piece driving the rotating piece to rotate.

3. The online flip tornado blow off device of claim 2, wherein, The support plates are provided with two position detection pieces at opposite positions, the rack is provided with a blocking plate, the blocking plate is located in one of the position detection pieces when the rack is in the initial position, and the blocking plate is located in the other position detection piece when the rack is turned over by 180 DEG.

4. The online flip tornado blow off device of claim 1, wherein, The fixed assembly includes a pressing plate relatively close to or away from the materials, a displacement drive piece connected between the pressing plate and the rack, the pressing plate is provided with a window corresponding to the position of the materials, and the side of the pressing plate towards the feeding assembly is provided with a plurality of fixing columns.

5. The online flip tornado blow off device of claim 1, wherein, The utility model also has a locking assembly including two locking plates arranged at opposite positions of the rack and a locking pin fixed on the table top, the locking plates are provided with locking holes, the locking pin respectively extends into one of the locking holes when the rack is in the initial position and turned over by 180 DEG.

6. The online flip tornado blow off device of claim 4, wherein, The blowing mechanism includes a cleaning tank fixed at the blowing port, a blowing assembly slidingly arranged in the cleaning tank, and a blowing drive piece driving the blowing assembly to relatively close to or away from the blowing port.

7. The online flip tornado blow off device of claim 6, wherein, The blowing assembly includes a dust collection box with an opening corresponding to the window, a plurality of air blowing nozzles arranged in the dust collection box towards the opening, and air blowing pipes arranged at both sides of the opening in the dust collection box, the air blowing pipes are provided with a plurality of air passing holes, and the dust collection box is further provided with an air suction pipeline connected with the outside.

8. The online flip tornado blow off device of claim 1, wherein, The feeding assembly and the discharge mechanism both convey materials by a belt, a feeding drive piece driving the belt to rotate, and a position sensor arranged at the entry end and the output end of the belt.

9. The online flip tornado blow off device of claim 8, wherein, The feeding assembly and the discharge mechanism conveying and discharging materials are both provided with a limiting assembly including a stop block relatively close to or away from the materials, a limiting drive piece driving the stop block, and limiting bars arranged at both sides of the feeding assembly and the discharge mechanism.

10. An online tornado flip sweep method, characterized by, The online reverse tornado blowing device according to any one of claims 1 to 9, comprising the following steps: feeding the material to the fixed assembly and the feeding assembly by the feeding assembly; after the position of the material is determined, the fixed assembly moves towards the material and fixes the material together with the feeding assembly; the rotating assembly drives the rack and the material to turn 180° together, so that the material faces the blowing port, and the impurities on the surface of the material fall off during the turning process; the blowing mechanism blows towards the material, and the remaining impurities are blown off by the tornado airflow; after the blowing is completed, the rack is turned back to the initial position by the rotating assembly; the fixed assembly is opened, the feeding assembly is started, the material is transmitted to the discharging mechanism, and is conveyed to the next station of the discharging mechanism.

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