Waste hydrogen recycling system and method thereof

Abstract

The invention relates to a waste hydrogen recycling system and a waste hydrogen recycling method, mainly through the combined design of a process plant area, separation and purification equipment, a storage barrel and a furnace end, the process plant area is used for producing process tail gas, the process tail gas is separated and purified into hydrogen gas (H2) and nitrogen gas (N2) through the separation and purification equipment, and the storage barrel is used for storing the hydrogen gas (H2) and the nitrogen gas (N2). The hydrogen gas (H2) separated and purified by the separation and purification equipment is conveyed into the storage barrel, the natural gas conveying pipeline conveys a natural gas into the storage barrel, the natural gas and the hydrogen gas (H2) form a storage gas, and the storage gas of the storage barrel is conveyed to the furnace end through the storage gas conveying pipeline. The purified hydrogen (H2) is used as the gas for combustion of the furnace end, so that the waste hydrogen recycling efficiency is improved, and the application of recycling process tail gas is also realized.

Description

Technical Field

[0001] This invention relates to a waste hydrogen recycling system and method, and more particularly to a system that has the efficiency of waste hydrogen reuse and the application of recycling process tail gas, and is suitable for semiconductor plants, electronic manufacturing plants, optoelectronic manufacturing plants or similar areas. Background Technology

[0002] In the extreme ultraviolet lithography (EUV) process, semiconductor factories use hydrogen as a protective gas to prevent tin contamination. The main principle is that EUV lithography is generated by bombarding liquid tin droplets with a carbon dioxide laser at a rate of 50,000 times per second. The resulting EUV lithography image is then fed into the lithography machine through an ellipsoidal mirror with a diameter of 0.65 meters.

[0003] The key is to prevent the ellipsoidal mirror from fogging up. Why does this ellipsoidal mirror fog up? Mainly because the tin droplets are bombarded by a carbon dioxide laser, causing them to vaporize. Once vaporized, this vapor diffuses within the cavity and deposits on the ellipsoidal mirror. Therefore, by introducing hydrogen gas around the ellipsoidal mirror, extreme ultraviolet lithography (EUV) can separate the hydrogen molecules into hydrogen atoms. These hydrogen atoms can then combine with tin to form gaseous tin hydride (SnH4). Finally, the gaseous tin hydride (SnH4) is extracted from the cavity, preventing the ellipsoidal mirror from fogging up.

[0004] However, after using hydrogen, semiconductor factories produce hydrogen that is considered waste hydrogen. To ensure safety and prevent danger, nitrogen is added during the emission process. Currently, the main methods for treating waste hydrogen are combustion or direct dilution and emission, which easily leads to a waste of hydrogen resources.

[0005] Therefore, in view of the above problems, the present invention aims to provide a waste hydrogen recycling system and method with the efficiency of waste hydrogen reuse, which can be easily operated and assembled by users. The motivation for the development of this invention is to provide convenience to users through dedicated research, design and construction. Summary of the Invention

[0006] The main objective of this invention is to provide a waste hydrogen recovery and utilization system and method. This system primarily utilizes a combination design of a process plant, a separation and purification device, a storage tank, and a furnace. The process plant produces process tail gas containing at least one hydrogen gas (H2) and at least one nitrogen gas (N2). The separation and purification device separates and purifies the process tail gas into hydrogen gas (H2) and nitrogen gas (N2). The purified hydrogen gas (H2) is then transported to the storage tank, and a natural gas pipeline delivers natural gas, primarily composed of methane (CH4), to the storage tank. This natural gas reacts with the hydrogen gas (H2) to form a storage gas. The storage gas in the storage tank is then transported to the furnace via the storage gas pipeline. This allows the purified hydrogen gas (H2) to be used as combustion gas in the furnace, increasing the efficiency of waste hydrogen reuse and enabling the recovery of process tail gas, thereby enhancing the overall practicality.

[0007] Another objective of this invention is to provide a waste hydrogen recovery and utilization system and method. The separation and purification equipment has two embodiments. In the first embodiment, the separation and purification equipment includes a hydrogen purifier that employs any one or a combination of membrane separation technology, cryogenic separation technology, pressure swing adsorption (PSA) technology, and metal hydride technology. In the second embodiment, the separation and purification equipment includes any one or a combination of an electrochemical hydrogen purifier (ECHP) and a ceramic magnetic adsorption purifier (PCAP), enabling purification and reuse, thereby increasing overall usability.

[0008] Another objective of this invention is to provide a waste hydrogen recovery and utilization system and method, wherein the burner head is installed in an incinerator, which is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal oxidizer (RTO), and the incinerator is configured with any one of a dual-rotor volatile organic compound (VOC) treatment system or a single-rotor VOC treatment system. This allows the incinerator to perform high-temperature cracking of the desorbed and concentrated gas through the burner head, thereby reducing volatile organic compounds and simultaneously treating volatile organic compounds (VOCs) and waste hydrogen, achieving the goals of environmental protection, energy conservation, and carbon reduction, and thus increasing overall operability.

[0009] To further understand the features, characteristics, and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit the invention. Attached Figure Description

[0010] Figure 1A schematic diagram of the main system implementation is shown;

[0011] Figure 2 Another implementation diagram of the system is shown;

[0012] Figure 3 The flowchart of the main steps is shown;

[0013] Figure 4 A schematic diagram of the implementation steps after the natural gas is transported is shown.

[0014] Figure label:

[0015] 1. Dual-rotor volatile organic compound (VOC) treatment system;

[0016] 10. Process plant area;

[0017] 11. Hydrogen exhaust pipeline;

[0018] 111. Air extraction device;

[0019] 112 First drain valve;

[0020] 20. Separation and purification equipment;

[0021] 21. Nitrogen output pipeline;

[0022] 201 Hydrogen Purifier;

[0023] 201 Electrochemical Hydrogen Purifier (ECHP);

[0024] 203 Ceramic Adsorption Purifier (PCAP);

[0025] 30 storage containers;

[0026] 301 Storage gas;

[0027] 31. Hydrogen delivery pipeline;

[0028] 32. Natural gas transmission pipeline;

[0029] 40 burners;

[0030] 41. Gas storage and delivery pipelines;

[0031] 411 Pressure regulating valve;

[0032] 412 First shut-off valve;

[0033] 413 Second drain valve;

[0034] 414 Second shut-off valve;

[0035] 415 Gas flow controller;

[0036] 42. Air ductwork;

[0037] 421 Air flow control valve;

[0038] 50. Flow control equipment;

[0039] 51. Pressure sensor;

[0040] 52 First-class flow controller;

[0041] 53 Second mass flow controller;

[0042] 60 Incinerators;

[0043] 61. Entrance;

[0044] 70 First adsorption rotor;

[0045] 701 Adsorption Region;

[0046] 702 Cooling Zone;

[0047] 703 Desorption Zone;

[0048] 71. Exhaust gas intake pipe;

[0049] 711 Exhaust gas connection pipeline;

[0050] 7111 Exhaust gas connection control valve;

[0051] 72 First clean air discharge pipeline;

[0052] 721 First clean air connection pipeline;

[0053] 7211 First clean air connection control valve;

[0054] 73 First cooling air inlet pipe;

[0055] 74 First cooling gas delivery pipeline;

[0056] 75 First hot gas transmission pipeline;

[0057] 76 First desorption and concentration gas pipeline;

[0058] 761 Fan;

[0059] 80 Second adsorption rotor;

[0060] 801 Adsorption Region;

[0061] 802 Cooling Zone;

[0062] 803 Desorption Zone;

[0063] 81 Second clean air discharge pipeline;

[0064] 811 Fan;

[0065] 82 Second cooling air inlet pipe;

[0066] 83 Second cooling gas delivery pipeline;

[0067] 84 Second hot gas delivery pipeline;

[0068] 85 Second desorption and concentration gas pipeline;

[0069] 851 Fan;

[0070] 91 First heat exchanger;

[0071] 911 First cold side piping;

[0072] 912 First hot-side piping;

[0073] 92 Second heat exchanger;

[0074] 921 Second cold side piping;

[0075] 922 Second hot-side piping;

[0076] 93. Third heat exchanger;

[0077] 931 Third cold side piping;

[0078] 932 Third hot side piping;

[0079] 94 Third cold-side delivery pipeline;

[0080] 95. Chimneys;

[0081] S100 discharges process exhaust gas;

[0082] S110 is used for separation and purification;

[0083] S120 conveys the material to the storage tank;

[0084] S130 transports natural gas;

[0085] S140 Storage gas transport;

[0086] S200 is equipped with flow control equipment;

[0087] S210 controls the hydrogen flow rate;

[0088] S220 controls the flow rate of natural gas;

[0089] S230 adjusts the output ratio. Detailed Implementation

[0090] like Figures 1-4 The diagram shown is a schematic diagram of an embodiment of the present invention. The preferred implementation of the waste hydrogen recycling system and method of the present invention is to be used in semiconductor plants, electronic process plants, optoelectronic process plants or similar areas. It mainly has the function of reusing waste hydrogen and also has the application of recycling process tail gas.

[0091] The waste hydrogen recovery and utilization system of this invention is mainly designed as a combination of a process plant area 10, a separation and purification device 20, a storage tank 30, and a furnace head 40. The process plant area 10 can be any one of a semiconductor process plant, an electronic process plant, or an optoelectronic process plant. This invention uses a semiconductor process plant as an example. In the extreme ultraviolet lithography (EUV) process, hydrogen (H2) is used as a protective gas to prevent tin contamination, thereby forming tin hydride gas to protect the EUV lens. Therefore, the process plant area 10 is equipped with a hydrogen pipeline 11 (e.g., Figure 1 and Figure 2 As shown), the process plant 10 produces a process tail gas, which contains at least one hydrogen gas (H2) and at least one nitrogen gas (N2). During the discharge of the process tail gas, when the process tail gas enters the hydrogen discharge pipeline 11, it will first be mixed with the nitrogen gas (N2) to ensure safety, and then be discharged through the hydrogen discharge pipeline 11.

[0092] Furthermore, the separation and purification equipment 20 is connected to the hydrogen exhaust pipeline 11, and the hydrogen exhaust pipeline 11 is equipped with a gas extraction device 111 (e.g., Figure 2 As shown), the extraction device 111 is either a fan or a blower, used to push the process exhaust gas to the separation and purification equipment 20. Furthermore, the hydrogen discharge pipeline 11 is equipped with a first discharge valve 112 (e.g., Figure 1 and Figure 2 As shown in the figure, the main function of the first drain valve 112 is to release pressure when the gas pressure in the hydrogen discharge pipeline 11 reaches a certain level, or to discharge the gas in the hydrogen discharge pipeline 11 when the separation and purification equipment 20 encounters a shutdown or cannot operate. In addition, the first drain valve 112 can be switched by either pneumatic or electric means, and the first drain valve 112 can be controlled by a control mechanism (not shown) for convenient operation.

[0093] The separation and purification equipment 20 separates and purifies the process tail gas into hydrogen gas (H2) and nitrogen gas (N2). The separation and purification equipment 20 is equipped with a nitrogen output pipeline 21 (e.g., Figure 1 and Figure 2As shown), the nitrogen gas (N2) is output via the nitrogen output pipeline 21 (e.g., discharged into the atmosphere, or stored in a gas storage tank). The separation and purification device 20 has two implementations; the first implementation includes a hydrogen purifier 201 (e.g., Figure 1 As shown in the diagram, the hydrogen purifier 201 employs a hydrogen purification technology that obtains high-purity hydrogen from various industrial gas raw materials through catalytic deoxygenation, adsorption drying, and filtration dust removal. It is a catalytic purification device that uses a specially formulated catalyst with high activity, reducing impurity oxygen in industrial gases to below 10 ppb and allowing for long-term use without regeneration. Furthermore, the hydrogen purifier 201 utilizes any one of the following technologies, or a combination thereof: membrane separation, cryogenic separation, pressure swing adsorption (PSA), or metal hydride technology.

[0094] The aforementioned hydrogen purifier 201 (such as...) Figure 1 As shown, membrane separation technology employs three methods: The first is the membrane separation method, which uses a selectively permeable membrane as the medium. Under the driving force of potential difference, pressure difference, concentration difference, etc., hydrogen selectively permeates through the membrane, thereby achieving separation and purification. The second is the palladium membrane diffusion method: at a certain temperature, hydrogen molecules dissociate into hydrogen atoms on one side of the palladium membrane, dissolve in palladium, diffuse to the other side, and then recombine into molecules. After primary separation, hydrogen with a purity of 99.99-99.9999% can be obtained. The third is the organic hollow fiber membrane diffusion method, using materials such as polysulfone, polyimide, and polycarbonate. Hollow fiber membrane separation for hydrogen recovery is the most widely used, from ammonia synthesis off-gas, methanol plant vent gas, and various tail gases from petroleum refining processes. Using organic hollow fiber membrane separation technology, the pressure of the vent gas itself can be utilized, with the partial pressure difference across the membrane as the driving force.

[0095] Additionally, the hydrogen purifier 201 (such as...) Figure 1 As shown, there are two types of low-temperature separation technology. The first is low-temperature condensation: based on the principle that hydrogen has a large difference in boiling point with other gases, this separation method condenses all high-boiling-point components except hydrogen into liquids at the operating temperature. It is suitable for recovering hydrogen from feed gas with a hydrogen content of 30-80%, producing hydrogen with a purity of 90-98%. The second is low-temperature adsorption: high-purity hydrogen and ultra-pure hydrogen with a purity of 99.999-99.9999% can be produced from electrolyzed hydrogen or industrial feed gas with a purity of 99.9%. In addition, the hydrogen purifier 201 uses pressure swing adsorption (PSA) technology, which is based on the physical adsorption of gas molecules on the internal surface of a specific adsorbent (porous solid material). It utilizes the characteristics of the adsorbent, which easily adsorbs high-boiling-point components and does not easily adsorb low-boiling-point components under the same pressure, and the adsorption capacity increases under high pressure and decreases under low pressure. The feed gas is passed through the adsorption bed under a certain pressure. High-boiling-point impurities relative to hydrogen are selectively adsorbed, while low-boiling-point hydrogen is not easily adsorbed and passes through the adsorption bed, achieving the separation of hydrogen and impurity components.

[0096] Additionally, the hydrogen purifier 201 (such as...) Figure 1 As shown, the metal hydride technology is used, which mainly utilizes the selective nature of hydrogen storage alloys to generate metal hydrides. Other impurities in the hydrogen are concentrated outside the hydrides. As the waste gas is discharged, the metal hydrides are separated and hydrogen is released, thereby purifying the hydrogen.

[0097] Furthermore, a second embodiment of the separation and purification device 20 includes either or a combination of an electrochemical hydrogen purifier (ECHP) 202 and a ceramic magnetic adsorption purifier (PCAP) 203 (e.g., Figure 2 As shown), the electrochemical hydrogen purifier (ECHP) 202 can be used alone. This ECHP 202 uses a platinum catalyst to split hydrogen gas in the process tail gas into hydrogen ions, which then pass through a membrane. Only hydrogen ions can pass through this membrane; nitrogen gas (N2) in the process tail gas cannot. The principle is that the hydrogen is first split into positively charged ions, which then pass through the membrane to the other side and combine with electrons to revert back to hydrogen gas (H2). Alternatively, the ECHP 202 can be used in combination with the ceramic magnetic adsorption purifier (PCAP) 203. The PCAP 203 filters various impurities, while the ECHP 202 purifies and recovers the hydrogen.

[0098] In addition, the storage tank 30 is equipped with a hydrogen delivery pipeline 31 and a natural gas delivery pipeline 32 (e.g. Figure 1 As shown in the figure, the hydrogen delivery pipeline 31 is connected to the separation and purification equipment 20 to deliver the hydrogen gas (H2) separated and purified by the separation and purification equipment 20 to the storage tank 30. In addition, natural gas is delivered to the storage tank 30 through the natural gas delivery pipeline 32. The natural gas is mainly composed of methane, i.e., CH4. One end of the natural gas delivery pipeline 32 is connected to any one of the natural gas storage tank, natural gas storage tank or natural gas equipment (not shown), and the natural gas and the hydrogen gas (H2) form a storage gas 301.

[0099] Furthermore, the storage tank 30 is assembled with a flow control device 50 (such as...). Figure 2As shown in the diagram, the flow control device 50 includes a pressure sensor 51, a first mass flow controller 52, and a second mass flow controller 53. The pressure sensor 51 is connected to the storage tank 30 to detect the gas pressure of the stored gas 301 within the storage tank 30. The first mass flow controller 52 is located on the hydrogen delivery pipeline 31 to control the flow rate of hydrogen gas (H2) within the hydrogen delivery pipeline 31. The first mass flow controller 52 is signal-connected to the pressure sensor 51. The second mass flow controller 53 is located on the natural gas delivery pipeline 32 to control the flow rate of natural gas. The flow rate of natural gas in the pipeline 32 is controlled by the second mass flow controller 53, which is connected to the pressure sensor 51. The pressure sensor 51 detects the gas pressure of the stored gas 301 in the storage tank 30, and proportional control is achieved by adjusting the first mass flow controller 52 and the second mass flow controller 53. That is, the flow rate of hydrogen gas (H2) of the first mass flow controller 52 and the flow rate of natural gas of the second mass flow controller 53 are respectively adjusted so that the stored gas 301 in the storage tank 30 can reach the optimal concentration and ratio required by the flame of the burner 40.

[0100] Additionally, the burner head 40 is equipped with a gas storage and delivery pipeline 41, which is connected to the storage tank 30 (e.g., Figure 1 As shown), the stored gas 301 stored in the storage tank 30 can be transported to the burner 40 via the stored gas delivery pipeline 41 for combustion in the burner 40. The stored gas delivery pipeline 41 is equipped with any one of the following: a pressure regulating valve 411, a first shut-off valve 412, a second drain valve 413, a second shut-off valve 414, and a gas flow control valve 415 (e.g., Figure 2(As shown). The pressure reducing valve 411 is located near the storage tank 30 to facilitate the adjustment of the stored gas 301. The pressure reducing valve 411, also known as a pressure regulating valve, is a fluid control device mainly used to ensure that the stored gas 301 maintains a safe and stable pressure level within the stored gas delivery pipeline 41. The working principle of the pressure reducing valve 411 is to limit the pressure of the stored gas 301 passing through the stored gas delivery pipeline 41 by adjusting the opening degree of the valve. The second drain valve 413 is installed on the gas storage pipeline 41. When the pressure in the gas storage pipeline 41 exceeds the pressure set by the second drain valve 413, it opens to release pressure, so as to ensure that the pressure in the gas storage pipeline 41 is within the pressure set by the second drain valve 413, thus protecting the gas storage pipeline 41. In addition, the second drain valve 413 can be switched by either pneumatic or electric means, and the second drain valve 413 can be controlled by a control mechanism (not shown) for convenient operation.

[0101] Furthermore, the gas storage pipeline 41 is equipped with a first shut-off valve 412 and a second shut-off valve 414 on both sides of the second drain valve 413. The first shut-off valve 412 and the second shut-off valve 414 are mainly linked to the second drain valve 413. When the pressure in the gas storage pipeline 41 exceeds the pressure set by the second drain valve 413, in addition to opening the second drain valve 413 to release pressure, the first shut-off valve 412 and the second shut-off valve 414 will be quickly closed or opened to temporarily stop the supply of gas 301 in the gas storage pipeline 41. In addition, the gas flow control valve 415 is located near the burner head 40. It is mainly used to open or close the stored gas 301 in the stored gas delivery pipeline 41. The gas flow control valve 415 can control the flow rate of the stored gas 301 delivered to the burner head 40, so that the flame of the burner head 40 can increase or decrease according to the opening size of the gas flow control valve 415.

[0102] Additionally, the burner head 40 is connected to an air passage pipe 42 (e.g., ...). Figure 2As shown), the air passage duct 42 is for the intake of external air or atmospheric air, so that the external air or atmospheric air input through the air passage duct 42 can mix with the stored gas 301 transported through the stored gas transport duct 41. The air passage duct 42 is equipped with an air flow control valve 421 to control the flow rate of the external air or atmospheric air input through the air passage duct 42. The air passage duct 42 is also equipped with a fan (not shown) to push and pull the external air or atmospheric air in the air passage duct 42.

[0103] Additionally, the burner head 40 is installed in an incinerator 60 (e.g., Figure 1 and Figure 2 As shown), the incinerator 60 is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal oxidizer (RTO). When the incinerator 60 is a direct-fired incinerator (TO), it is equipped with any one of two, three, or four heat exchangers. The incinerator 60 is configured with either a dual-rotor volatile organic compound (VOC) treatment system 1 or a single-rotor volatile organic compound (VOC) treatment system (not shown), so that the incinerator 60 can perform high-temperature cracking of the desorbed and concentrated gas through the burner head 40 to reduce volatile organic compounds. It has the ability to simultaneously treat volatile organic compounds (VOC) and waste hydrogen, thereby achieving the purpose of environmental protection, energy saving, and carbon reduction.

[0104] Furthermore, as described earlier, the incinerator 60 is configured with either a dual-rotor volatile organic compound (VOC) treatment system 1 or a single-rotor VOC treatment system (not shown). When the incinerator 60 is configured with a dual-rotor VOC treatment system 1, the dual-rotor VOC treatment system 1 is a combination design comprising a first heat exchanger 91, a second heat exchanger 92, a third heat exchanger 93, a third cold-side conveying pipeline 94, a first adsorption rotor 70, a second adsorption rotor 80, and a chimney 95 (e.g., Figure 1 and Figure 2 As shown), the first heat exchanger 91 is provided with a first cold side pipe 911 and a first hot side pipe 912, the second heat exchanger 92 is provided with a second cold side pipe 921 and a second hot side pipe 922, and the third heat exchanger 93 is provided with a third cold side pipe 931 and a third hot side pipe 932.

[0105] The aforementioned incinerator 60 has a burner head 40 (such as...). Figure 1 and Figure 2As shown, the high-temperature gas after combustion is first transported to one side of the third hot side pipe 932 of the third heat exchanger 93 for heat exchange, and then transported from the other side of the third hot side pipe 932 of the third heat exchanger 93 to one side of the first hot side pipe 912 of the first heat exchanger 91 for heat exchange, and then transported from the other side of the first hot side pipe 912 of the first heat exchanger 91 to one side of the second hot side pipe 922 of the second heat exchanger 92 for heat exchange, and then transported from the other side of the second hot side pipe 922 of the second heat exchanger 92 to the chimney 95.

[0106] Furthermore, the first adsorption rotor 70 of the present invention is provided with an adsorption zone 701, a cooling zone 702, and a desorption zone 703 (e.g., ...). Figure 1 and Figure 2 As shown, the first adsorption rotor 70 is connected to a waste gas inlet pipe 71, a first clean gas outlet pipe 72, a first cooling gas inlet pipe 73, a first cooling gas delivery pipe 74, a first hot gas delivery pipe 75, and a first desorption concentrated gas pipe 76. The second adsorption rotor 80 is provided with an adsorption zone 801, a cooling zone 802, and a desorption zone 803. The second adsorption rotor 80 is connected to a second clean gas outlet pipe 81, a second cooling gas inlet pipe 82, a second cooling gas delivery pipe 83, a second hot gas delivery pipe 84, and a second desorption concentrated gas pipe 85. The first adsorption rotor 70 and the second adsorption rotor 80 are respectively zeolite concentration rotors or concentration rotors made of other materials.

[0107] One end of the exhaust gas inlet pipe 71 is connected to one side of the adsorption zone 701 of the first adsorption rotor 70, so that the exhaust gas inlet pipe 71 can transport organic waste gas to one side of the adsorption zone 701 of the first adsorption rotor 70. One end of the first purified gas outlet pipe 72 is connected to the other side of the adsorption zone 701 of the first adsorption rotor 70, and one end of the first purified gas outlet pipe 72 is connected to one side of the adsorption zone 801 of the second adsorption rotor 80, so that the organic waste gas can be adsorbed by the adsorption zone 701 of the first adsorption rotor 70 and then transported to the adsorption zone 801 of the second adsorption rotor 80 by the first purified gas outlet pipe 72. Furthermore, the other side of the adsorption zone 801 of the second adsorption rotor 80 is connected to the second clean gas discharge pipe 81, so that the other end of the second clean gas discharge pipe 81 is connected to the chimney 97. The second clean gas discharge pipe 81 is equipped with a fan 811, which can push and pull the adsorbed gas in the second clean gas discharge pipe 81 into the chimney 95 for discharge.

[0108] Additionally, one side of the cooling zone 702 of the first adsorption rotor 70 is connected to the first cooling gas inlet pipe 73 (e.g., Figure 1 and Figure 2 As shown, the gas enters the cooling zone 702 of the first adsorption rotor 70 for cooling. The other side of the cooling zone 702 of the first adsorption rotor 70 is connected to one end of the first cooling gas delivery pipe 74, and the other end of the first cooling gas delivery pipe 74 is connected to one end of the first cold side pipe 911 of the first heat exchanger 91, so as to deliver the gas after entering the cooling zone 702 of the first adsorption rotor 70 to the first heat exchanger 91 for heat exchange. Furthermore, one end of the first hot gas delivery pipe 75 is connected to the other side of the desorption zone 703 of the first adsorption rotor 70, and the other end of the first hot gas delivery pipe 75 is connected to the other end of the first cold side pipe 911 of the first heat exchanger 91, so as to deliver the high-temperature hot gas that has undergone heat exchange in the first heat exchanger 91 to the desorption zone 703 of the first adsorption rotor 70 for desorption.

[0109] The cooling zone 702 of the aforementioned first adsorption rotor 70 has two implementations. In the first implementation, a first cooling air inlet pipe 73 connected to one side of the cooling zone 702 of the first adsorption rotor 70 allows fresh air or outside air (not shown) to enter, thus providing cooling for the cooling zone 702 of the first adsorption rotor 70. The second implementation involves an exhaust gas inlet pipe 71 with an exhaust gas connecting pipe 711 (e.g., ...). Figure 1 As shown), the other end of the exhaust gas connecting pipe 711 is connected to the first cooling gas inlet pipe 73, so that the exhaust gas in the exhaust gas inlet pipe 71 can be transported to the cooling zone 702 of the first adsorption rotor 70 for cooling. In addition, the exhaust gas connecting pipe 711 is equipped with an exhaust gas connecting control valve 7111 (e.g., Figure 2 (as shown), to control the airflow of the exhaust gas connecting pipe 711.

[0110] Additionally, one side of the cooling zone 802 of the second adsorption rotor 80 is connected to the second cooling gas inlet pipe 82 (e.g., Figure 1 and Figure 2As shown, the gas enters the cooling zone 802 of the second adsorption rotor 80 for cooling. The other side of the cooling zone 802 of the second adsorption rotor 80 is connected to one end of the second cooling gas delivery pipe 83, and the other end of the second cooling gas delivery pipe 83 is connected to one end of the second cold side pipe 921 of the second heat exchanger 92, so as to deliver the gas after entering the cooling zone 802 of the second adsorption rotor 80 to the second heat exchanger 92 for heat exchange. Furthermore, one end of the second hot gas delivery pipe 84 is connected to the other side of the desorption zone 803 of the second adsorption rotor 80, and the other end of the second hot gas delivery pipe 84 is connected to the other end of the second cold side pipe 921 of the second heat exchanger 92, so as to deliver the high-temperature hot gas that has undergone heat exchange in the second heat exchanger 92 to the desorption zone 803 of the second adsorption rotor 80 for desorption.

[0111] The cooling zone 802 of the aforementioned second adsorption rotor 80 has two implementations. In the first implementation, the second cooling air inlet pipe 82 connected to one side of the cooling zone 802 of the second adsorption rotor 80 is for the intake of fresh air or outside air (such as...). Figure 2 As shown), the cooling zone 802 of the second adsorption rotor 80 is cooled by the fresh air or outside air. Alternatively, in a second embodiment, the first clean air discharge pipe 72 is provided with a first clean air connecting pipe 721 (as shown). Figure 1 As shown), the other end of the first clean gas connection pipe 721 is connected to the second cooling gas inlet pipe 83, so that the gas in the first clean gas discharge pipe 72 can be transported to the cooling zone 802 of the second adsorption rotor 80 for cooling. In addition, the first clean gas connection pipe 721 is equipped with a first clean gas connection control valve 7211 (e.g., Figure 1 As shown), to control the airflow of the first clean air connection duct 721.

[0112] Additionally, one end of the first desorption concentrated gas pipeline 76 is connected to one side of the desorption zone 703 of the first adsorption rotor 70 (e.g., Figure 1 and Figure 2As shown), the other end of the first desorbed concentrated gas pipeline 76 is connected to one end of the third cold-side pipeline 931 of the third heat exchanger 93, and the other end of the third cold-side pipeline 931 of the third heat exchanger 93 is connected to one end of the third cold-side conveying pipeline 94. Furthermore, the other end of the third cold-side conveying pipeline 94 is connected to the inlet 61 of the incinerator 60, so that the desorbed concentrated gas desorbed at high temperature can be conveyed through the first desorbed concentrated gas pipeline 76 to one end of the third cold-side pipeline 931 of the third heat exchanger 93, and from the other end of the third cold-side pipeline 931 of the third heat exchanger 93 to one end of the third cold-side conveying pipeline 94, and from the other end of the third cold-side conveying pipeline 94 to the inlet 61 of the incinerator 60 (as shown). Figure 1 and Figure 2 As shown), this allows the burner head 40 of the incinerator 60 to undergo high-temperature pyrolysis, thereby reducing volatile organic compounds. Additionally, the first desorption and concentration gas pipeline 76 is equipped with a fan 761 (as shown). Figure 2 As shown), it can push or pull the desorbed concentrated gas into one end of the third cold side pipe 931 of the third heat exchanger 93.

[0113] Additionally, one end of the second desorption and concentration gas pipeline 85 is connected to one side of the desorption zone 803 of the second adsorption rotor 80. The other end of the second desorption and concentration gas pipeline 85 has two implementations. The first implementation is that the other end of the second desorption and concentration gas pipeline 85 is connected to the exhaust gas inlet pipeline 71 (e.g., Figure 1 As shown), the concentrated gas can then re-enter the adsorption zone 701 of the first adsorption rotor 70 via the exhaust gas inlet pipe 71 for re-adsorption. Alternatively, in a second embodiment, the other end of the second desorption concentrated gas pipe 85 is connected to the first cooling gas inlet pipe 73 (as shown). Figure 2 As shown, the concentrated gas can then enter the cooling zone 702 of the first adsorption rotor 70 via the first cooling gas inlet pipe 73 for cooling. Furthermore, the second desorbed concentrated gas pipe 85 is equipped with a fan 851 to push or pull the desorbed concentrated gas into the waste gas inlet pipe 71 or the first cooling gas inlet pipe 73. This allows the desorbed gas generated in the desorption zone 803 of the second adsorption rotor 80 to be recycled into the adsorption zone 701 or the cooling zone 702 of the first adsorption rotor 70.

[0114] Finally, when the incinerator 60 is configured as a direct-fired incinerator (TO), the aforementioned dual-rotor volatile organic compound (VOC) treatment system 1 can be modified by adding the first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93, and a new fourth heat exchanger (not shown in the figure), in addition to the aforementioned first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93. The difference lies in the addition of the new fourth heat exchanger (not shown in the figure). The remaining first adsorption rotor 70 and second adsorption rotor 80 adopt the same design. Therefore, when the aforementioned incinerator 60 is modified into a direct-fired incinerator (TO), the contents of the first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93, the third cold-side conveying pipeline 94, the first adsorption rotor 70, the second adsorption rotor 80, and the chimney 95 will not be repeated. Please refer to the above description.

[0115] In addition to being configured with the dual-rotor volatile organic compound (VOC) treatment system 1 as described above, the incinerator 60 of the present invention can also be configured with a single-rotor volatile organic compound (VOC) treatment system (not shown). The difference between the single-rotor volatile organic compound (VOC) treatment system (not shown) and the dual-rotor volatile organic compound (VOC) treatment system 1 is that the second adsorption rotor 80 is omitted. When the incinerator 60 is configured as a direct-fired incinerator (TO), the direct-fired incinerator (TO) can be equipped with two or three heat exchangers. Its configuration can be referred to the design of the first adsorption rotor 70 in the dual-rotor volatile organic compound (VOC) treatment system 1. The details will not be repeated here. Please refer to the above description.

[0116] The waste hydrogen recovery and utilization method of the present invention is mainly used in a waste hydrogen recovery and utilization system, and is designed with a combination of a process plant area 10, a separation and purification device 20, a storage tank 30 and a furnace head 40 (e.g., Figure 1 and Figure 2 As shown), the process plant 10 is equipped with a hydrogen discharge pipeline 11. The process plant 10 can be any one of a semiconductor process plant, an electronic process plant, or an optoelectronic process plant. The separation and purification equipment 20 is equipped with a nitrogen output pipeline 21. The storage tank 30 is equipped with a hydrogen delivery pipeline 31 and a natural gas delivery pipeline 32. The furnace head 40 is equipped with a storage gas delivery pipeline 41.

[0117] The main steps of this waste hydrogen recycling method (such as...) Figure 3 As shown, step S100 involves discharging process tail gas: the process plant 10 produces process tail gas containing at least one hydrogen gas (H2) and at least one nitrogen gas (N2), which is output through the hydrogen discharge pipeline 11. After completing step S100, the next step S110 is performed.

[0118] This invention uses a semiconductor process plant as an example. In the extreme ultraviolet (EUV) lithography process, hydrogen (H2) is used as a protective gas to prevent tin contamination, thereby forming tin hydride gas to protect the EUV lens. Therefore, the process plant 10 is equipped with a row of hydrogen pipelines 11 (e.g., Figure 1 and Figure 2 As shown), the process plant 10 produces a process tail gas, which contains at least one hydrogen gas (H2) and at least one nitrogen gas (N2). During the discharge of the process tail gas, when the process tail gas enters the hydrogen discharge pipeline 11, it will first be mixed with the nitrogen gas (N2) to ensure safety, and then be discharged through the hydrogen discharge pipeline 11.

[0119] In addition, the next step S110 involves separation and purification: the separation and purification device 20 is connected to the hydrogen exhaust pipeline 11, and the process tail gas is separated and purified into hydrogen gas (H2) and nitrogen gas (N2) through the separation and purification device 20. The nitrogen gas (N2) is output through the nitrogen output pipeline 21. After completing the above step S110, the next step S120 is performed.

[0120] The aforementioned separation and purification equipment 20 is connected to the hydrogen exhaust pipeline 11, and the hydrogen exhaust pipeline 11 is equipped with a gas extraction device 111 (e.g., Figure 2 As shown), the extraction device 111 is either a fan or a blower, used to push the process exhaust gas to the separation and purification equipment 20. Furthermore, the hydrogen discharge pipeline 11 is equipped with a first discharge valve 112 (e.g., Figure 1 and Figure 2 As shown in the figure, the main function of the first drain valve 112 is to release pressure when the gas pressure in the hydrogen discharge pipeline 11 reaches a certain level, or to discharge the gas in the hydrogen discharge pipeline 11 when the separation and purification equipment 20 encounters a shutdown or cannot operate. In addition, the first drain valve 112 can be switched by either pneumatic or electric means, and the first drain valve 112 can be controlled by a control mechanism (not shown) for convenient operation.

[0121] The separation and purification equipment 20 separates and purifies the process tail gas into hydrogen gas (H2) and nitrogen gas (N2). The separation and purification equipment 20 is equipped with a nitrogen output pipeline 21 (e.g., Figure 1 and Figure 2 As shown), the nitrogen gas (N2) is output via the nitrogen output pipeline 21 (e.g., discharged into the atmosphere, or stored in a gas storage tank). The separation and purification device 20 has two implementations; the first implementation includes a hydrogen purifier 201 (e.g., Figure 1As shown in the diagram, the hydrogen purifier 201 employs a hydrogen purification technology that obtains high-purity hydrogen from various industrial gas raw materials through catalytic deoxygenation, adsorption drying, and filtration dust removal. It is a catalytic purification device that uses a specially formulated catalyst with high activity, reducing impurity oxygen in industrial gases to below 10 ppb and allowing for long-term use without regeneration. Furthermore, the hydrogen purifier 201 utilizes any one of the following technologies, or a combination thereof: membrane separation, cryogenic separation, pressure swing adsorption (PSA), or metal hydride technology.

[0122] The aforementioned hydrogen purifier 201 (such as...) Figure 1 As shown, membrane separation technology employs three methods: The first is the membrane separation method, which uses a selectively permeable membrane as the medium. Under the driving force of potential difference, pressure difference, concentration difference, etc., hydrogen selectively permeates through the membrane, thereby achieving separation and purification. The second is the palladium membrane diffusion method: at a certain temperature, hydrogen molecules dissociate into hydrogen atoms on one side of the palladium membrane, dissolve in palladium, diffuse to the other side, and then recombine into molecules. After primary separation, hydrogen with a purity of 99.99-99.9999% can be obtained. The third is the organic hollow fiber membrane diffusion method, using materials such as polysulfone, polyimide, and polycarbonate. Hollow fiber membrane separation for hydrogen recovery is the most widely used, from ammonia synthesis off-gas, methanol plant vent gas, and various tail gases from petroleum refining processes. Using organic hollow fiber membrane separation technology, the pressure of the vent gas itself can be utilized, with the partial pressure difference across the membrane as the driving force.

[0123] Additionally, the hydrogen purifier 201 (such as...) Figure 1 As shown, there are two types of low-temperature separation technology. The first is low-temperature condensation: based on the principle that hydrogen has a large difference in boiling point with other gases, this separation method condenses all high-boiling-point components except hydrogen into liquids at the operating temperature. It is suitable for recovering hydrogen from feed gas with a hydrogen content of 30-80%, producing hydrogen with a purity of 90-98%. The second is low-temperature adsorption: high-purity hydrogen and ultra-pure hydrogen with a purity of 99.999-99.9999% can be produced from electrolyzed hydrogen or industrial feed gas with a purity of 99.9%. In addition, the hydrogen purifier 201 uses pressure swing adsorption (PSA) technology, which is based on the physical adsorption of gas molecules on the internal surface of a specific adsorbent (porous solid material). It utilizes the characteristics of the adsorbent, which easily adsorbs high-boiling-point components and does not easily adsorb low-boiling-point components under the same pressure, and the adsorption capacity increases under high pressure and decreases under low pressure. The feed gas is passed through the adsorption bed under a certain pressure. High-boiling-point impurities relative to hydrogen are selectively adsorbed, while low-boiling-point hydrogen is not easily adsorbed and passes through the adsorption bed, achieving the separation of hydrogen and impurity components.

[0124] Additionally, the hydrogen purifier 201 (such as...) Figure 1(As shown) The technology employs metal hydride technology, which mainly utilizes the selective absorption of hydrogen by hydrogen storage alloys to generate metal hydrides. Other impurities in the hydrogen are concentrated outside the hydrides. As the waste gas is discharged, the metal hydrides separate and release hydrogen gas, thereby purifying the hydrogen gas.

[0125] Furthermore, a second embodiment of the separation and purification device 20 includes either or a combination of an electrochemical hydrogen purifier (ECHP) 202 and a ceramic magnetic adsorption purifier (PCAP) 203 (e.g., Figure 2 As shown), the electrochemical hydrogen purifier (ECHP) 202 can be used alone. This ECHP 202 uses a platinum catalyst to split hydrogen gas in the process tail gas into hydrogen ions, which then pass through a membrane. Only hydrogen ions can pass through this membrane; nitrogen gas (N2) in the process tail gas cannot. The principle is that the hydrogen is first split into positively charged ions, which then pass through the membrane to the other side and combine with electrons to revert back to hydrogen gas (H2). Alternatively, the ECHP 202 can be used in combination with the ceramic magnetic adsorption purifier (PCAP) 203. The PCAP 203 filters various impurities, while the ECHP 202 purifies and recovers the hydrogen.

[0126] In addition, the next step, S120, involves delivering hydrogen to a storage tank: the hydrogen delivery pipeline 31 is connected to the separation and purification equipment 20 to deliver the hydrogen gas (H2) separated and purified by the separation and purification equipment 20 to the storage tank 30. After completing the above step S120, the next step, S130, is performed.

[0127] In addition, the next step, S130, involves supplying natural gas: the natural gas supply pipeline 32 delivers natural gas to the storage tank 30, where it combines with the hydrogen gas (H2) to form a storage gas. After completing step S130, the next step, S140, is then performed.

[0128] The aforementioned storage tank 30 is equipped with a hydrogen delivery pipeline 31 and a natural gas delivery pipeline 32 (e.g., Figure 1 As shown), the hydrogen delivery pipeline 31 is connected to the separation and purification equipment 20 to deliver the hydrogen gas (H2) separated and purified by the separation and purification equipment 20 to the storage tank 30. In addition, natural gas is delivered to the storage tank 30 through the natural gas delivery pipeline 32. One end of the natural gas delivery pipeline 32 is connected to any one of the natural gas storage tank, natural gas storage tank or natural gas equipment (not shown), and the natural gas and the hydrogen gas (H2) form a storage gas 301.

[0129] In addition, the next step, S140, involves the delivery of stored gas: the stored gas delivery pipeline 41 is connected to the storage tank 30, so that the stored gas 301 in the storage tank 30 can be delivered to the burner head 40 via the stored gas delivery pipeline 41.

[0130] The aforementioned burner head 40 is equipped with a gas storage and delivery pipeline 41, which is connected to the storage tank 30 (e.g., Figure 1 As shown), the stored gas 301 stored in the storage tank 30 can be transported to the burner 40 via the stored gas delivery pipeline 41 for combustion in the burner 40. The stored gas delivery pipeline 41 is equipped with any one of the following: a pressure regulating valve 411, a first shut-off valve 412, a second drain valve 413, a second shut-off valve 414, and a gas flow control valve 415 (e.g., Figure 2 (As shown). The pressure reducing valve 411 is located near the storage tank 30 to facilitate the adjustment of the stored gas 301. The pressure reducing valve 411, also known as a pressure regulating valve, is a fluid control device mainly used to ensure that the stored gas 301 maintains a safe and stable pressure level within the stored gas delivery pipeline 41. The working principle of the pressure reducing valve 411 is to limit the pressure of the stored gas 301 passing through the stored gas delivery pipeline 41 by adjusting the opening degree of the valve. The second drain valve 413 is installed on the gas storage pipeline 41. When the pressure in the gas storage pipeline 41 exceeds the pressure set by the second drain valve 413, it opens to release pressure, so as to ensure that the pressure in the gas storage pipeline 41 is within the pressure set by the second drain valve 413, thus protecting the gas storage pipeline 41. In addition, the second drain valve 413 can be switched by either pneumatic or electric means, and the second drain valve 413 can be controlled by a control mechanism (not shown) for convenient operation.

[0131] Furthermore, the gas storage pipeline 41 is equipped with a first shut-off valve 412 and a second shut-off valve 414 on both sides of the second drain valve 413. The first shut-off valve 412 and the second shut-off valve 414 are mainly linked to the second drain valve 413. When the pressure in the gas storage pipeline 41 exceeds the pressure set by the second drain valve 413, in addition to opening the second drain valve 413 to release pressure, the first shut-off valve 412 and the second shut-off valve 414 will be quickly closed or opened to temporarily stop the supply of gas 301 in the gas storage pipeline 41. In addition, the gas flow control valve 415 is located near the burner head 40. It is mainly used to open or close the stored gas 301 in the stored gas delivery pipeline 41. The gas flow control valve 415 can control the flow rate of the stored gas 301 delivered to the burner head 40, so that the flame of the burner head 40 can increase or decrease according to the opening size of the gas flow control valve 415.

[0132] Additionally, the burner head 40 is connected to an air passage pipe 42 (e.g., ...). Figure 2 As shown), the air passage duct 42 is for the intake of external air or atmospheric air, so that the external air or atmospheric air input through the air passage duct 42 can mix with the stored gas 301 transported through the stored gas transport duct 41. The air passage duct 42 is equipped with an air flow control valve 421 to control the flow rate of the external air or atmospheric air input through the air passage duct 42. The air passage duct 42 is also equipped with a fan (not shown) to push and pull the external air or atmospheric air in the air passage duct 42.

[0133] Furthermore, after conveying natural gas in step S130, the present invention includes the following steps: S200, assembling a flow control device: the storage tank 30 is assembled with a flow control device 50, which is equipped with a pressure sensor 51, a first mass flow controller 52, and a second mass flow controller 53. After completing step S200, the next step S210 is performed.

[0134] In addition, the next step, S210, controls the hydrogen flow rate: the first mass flow controller 52 is installed on the hydrogen delivery pipeline 31 and is connected to the pressure sensor 51 to control the hydrogen flow rate of the hydrogen delivery pipeline 31. After completing the above step S210, the next step S220 is performed.

[0135] In addition, the next step, S220, controls the natural gas flow rate: the second mass flow controller 53 is installed on the natural gas transmission pipeline 32 and is connected to the pressure sensor 51 to control the natural gas flow rate of the natural gas transmission pipeline 32. After completing the above step S220, the next step S230 is performed.

[0136] In addition, the next step S230 adjusts the output ratio: the pressure sensor 51 is connected to the storage tank 30. The pressure sensor 51 is used to detect the gas pressure of the stored gas 601 in the storage tank 30 and adjust the first mass flow controller 52 and the second mass flow controller 53 to control the ratio of the hydrogen flow rate of the hydrogen delivery pipeline 31 to the natural gas flow rate of the natural gas delivery pipeline 32.

[0137] Furthermore, the aforementioned storage tank 30 is assembled with a flow control device 50 (such as...). Figure 2 As shown in the diagram, the flow control device 50 includes a pressure sensor 51, a first mass flow controller 52, and a second mass flow controller 53. The pressure sensor 51 is connected to the storage tank 30 to detect the gas pressure of the stored gas 301 within the storage tank 30. The first mass flow controller 52 is located on the hydrogen delivery pipeline 31 to control the flow rate of hydrogen gas (H2) within the hydrogen delivery pipeline 31. The first mass flow controller 52 is signal-connected to the pressure sensor 51. The second mass flow controller 53 is located on the natural gas delivery pipeline 32 to control the flow rate of natural gas. The flow rate of natural gas in the pipeline 32 is controlled by the second mass flow controller 53, which is connected to the pressure sensor 51. The pressure sensor 51 detects the gas pressure of the stored gas 301 in the storage tank 30, and proportional control is achieved by adjusting the first mass flow controller 52 and the second mass flow controller 53. That is, the flow rate of hydrogen gas (H2) of the first mass flow controller 52 and the flow rate of natural gas of the second mass flow controller 53 are respectively adjusted so that the stored gas 301 in the storage tank 30 can reach the optimal concentration and ratio required by the flame of the burner 40.

[0138] Additionally, the burner head 40 is installed in an incinerator 60 (e.g., Figure 1 and Figure 2As shown), the incinerator 60 is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal oxidizer (RTO). When the incinerator 60 is a direct-fired incinerator (TO), it is equipped with any one of two, three, or four heat exchangers. The incinerator 60 is configured with either a dual-rotor volatile organic compound (VOC) treatment system 1 or a single-rotor volatile organic compound (VOC) treatment system (not shown), so that the incinerator 60 can perform high-temperature cracking of the desorbed and concentrated gas through the burner head 40 to reduce volatile organic compounds. It has the ability to simultaneously treat volatile organic compounds (VOC) and waste hydrogen, thereby achieving the purpose of environmental protection, energy saving, and carbon reduction.

[0139] Furthermore, as described earlier, the incinerator 60 is configured with either a dual-rotor volatile organic compound (VOC) treatment system 1 or a single-rotor VOC treatment system (not shown). When the incinerator 60 is configured with a dual-rotor VOC treatment system 1, the dual-rotor VOC treatment system 1 is a combination design comprising a first heat exchanger 91, a second heat exchanger 92, a third heat exchanger 93, a third cold-side conveying pipeline 94, a first adsorption rotor 70, a second adsorption rotor 80, and a chimney 95 (e.g., Figure 1 and Figure 2 As shown), the first heat exchanger 91 is provided with a first cold side pipe 911 and a first hot side pipe 912, the second heat exchanger 92 is provided with a second cold side pipe 921 and a second hot side pipe 922, and the third heat exchanger 93 is provided with a third cold side pipe 931 and a third hot side pipe 932.

[0140] The aforementioned incinerator 60 has a burner head 40 (such as...). Figure 1 and Figure 2 As shown, the high-temperature gas after combustion is first transported to one side of the third hot side pipe 932 of the third heat exchanger 93 for heat exchange, and then transported from the other side of the third hot side pipe 932 of the third heat exchanger 93 to one side of the first hot side pipe 912 of the first heat exchanger 91 for heat exchange, and then transported from the other side of the first hot side pipe 912 of the first heat exchanger 91 to one side of the second hot side pipe 922 of the second heat exchanger 92 for heat exchange, and then transported from the other side of the second hot side pipe 922 of the second heat exchanger 92 to the chimney 95.

[0141] Furthermore, the first adsorption rotor 70 of the present invention is provided with an adsorption zone 701, a cooling zone 702, and a desorption zone 703 (e.g., ...). Figure 1 and Figure 2 As shown, the first adsorption rotor 70 is connected to a waste gas inlet pipe 71, a first clean gas outlet pipe 72, a first cooling gas inlet pipe 73, a first cooling gas delivery pipe 74, a first hot gas delivery pipe 75, and a first desorption concentrated gas pipe 76. The second adsorption rotor 80 is provided with an adsorption zone 801, a cooling zone 802, and a desorption zone 803. The second adsorption rotor 80 is connected to a second clean gas outlet pipe 81, a second cooling gas inlet pipe 82, a second cooling gas delivery pipe 83, a second hot gas delivery pipe 84, and a second desorption concentrated gas pipe 85. The first adsorption rotor 70 and the second adsorption rotor 80 are respectively zeolite concentration rotors or concentration rotors made of other materials.

[0142] One end of the exhaust gas inlet pipe 71 is connected to one side of the adsorption zone 701 of the first adsorption rotor 70, so that the exhaust gas inlet pipe 71 can transport organic waste gas to one side of the adsorption zone 701 of the first adsorption rotor 70. One end of the first purified gas outlet pipe 72 is connected to the other side of the adsorption zone 701 of the first adsorption rotor 70, and one end of the first purified gas outlet pipe 72 is connected to one side of the adsorption zone 801 of the second adsorption rotor 80, so that the organic waste gas can be adsorbed by the adsorption zone 701 of the first adsorption rotor 70 and then transported to the adsorption zone 801 of the second adsorption rotor 80 by the first purified gas outlet pipe 72. Furthermore, the other side of the adsorption zone 801 of the second adsorption rotor 80 is connected to the second clean gas discharge pipe 81, so that the other end of the second clean gas discharge pipe 81 is connected to the chimney 97. The second clean gas discharge pipe 81 is equipped with a fan 811, which can push and pull the adsorbed gas in the second clean gas discharge pipe 81 into the chimney 95 for discharge.

[0143] Additionally, one side of the cooling zone 702 of the first adsorption rotor 70 is connected to the first cooling gas inlet pipe 73 (e.g., Figure 1 and Figure 2As shown, the gas enters the cooling zone 702 of the first adsorption rotor 70 for cooling. The other side of the cooling zone 702 of the first adsorption rotor 70 is connected to one end of the first cooling gas delivery pipe 74, and the other end of the first cooling gas delivery pipe 74 is connected to one end of the first cold side pipe 911 of the first heat exchanger 91, so as to deliver the gas after entering the cooling zone 702 of the first adsorption rotor 70 to the first heat exchanger 91 for heat exchange. Furthermore, one end of the first hot gas delivery pipe 75 is connected to the other side of the desorption zone 703 of the first adsorption rotor 70, and the other end of the first hot gas delivery pipe 75 is connected to the other end of the first cold side pipe 911 of the first heat exchanger 91, so as to deliver the high-temperature hot gas that has undergone heat exchange in the first heat exchanger 91 to the desorption zone 703 of the first adsorption rotor 70 for desorption.

[0144] The cooling zone 702 of the aforementioned first adsorption rotor 70 has two implementations. In the first implementation, a first cooling air inlet pipe 73 connected to one side of the cooling zone 702 of the first adsorption rotor 70 allows fresh air or outside air (not shown) to enter, thus providing cooling for the cooling zone 702 of the first adsorption rotor 70. The second implementation involves an exhaust gas inlet pipe 71 with an exhaust gas connecting pipe 711 (e.g., ...). Figure 1 As shown), the other end of the exhaust gas connecting pipe 711 is connected to the first cooling gas inlet pipe 73, so that the exhaust gas in the exhaust gas inlet pipe 71 can be transported to the cooling zone 702 of the first adsorption rotor 70 for cooling. In addition, the exhaust gas connecting pipe 711 is equipped with an exhaust gas connecting control valve 7111 (e.g., Figure 2 (as shown), to control the airflow of the exhaust gas connecting pipe 711.

[0145] Additionally, one side of the cooling zone 802 of the second adsorption rotor 80 is connected to the second cooling gas inlet pipe 82 (e.g., Figure 1 and Figure 2As shown, the gas enters the cooling zone 802 of the second adsorption rotor 80 for cooling. The other side of the cooling zone 802 of the second adsorption rotor 80 is connected to one end of the second cooling gas delivery pipe 83, and the other end of the second cooling gas delivery pipe 83 is connected to one end of the second cold side pipe 921 of the second heat exchanger 92, so as to deliver the gas after entering the cooling zone 802 of the second adsorption rotor 80 to the second heat exchanger 92 for heat exchange. Furthermore, one end of the second hot gas delivery pipe 84 is connected to the other side of the desorption zone 803 of the second adsorption rotor 80, and the other end of the second hot gas delivery pipe 84 is connected to the other end of the second cold side pipe 921 of the second heat exchanger 92, so as to deliver the high-temperature hot gas that has undergone heat exchange in the second heat exchanger 92 to the desorption zone 803 of the second adsorption rotor 80 for desorption.

[0146] The cooling zone 802 of the aforementioned second adsorption rotor 80 has two implementations. In the first implementation, the second cooling air inlet pipe 82 connected to one side of the cooling zone 802 of the second adsorption rotor 80 is for the intake of fresh air or outside air (such as...). Figure 2 As shown), the cooling zone 802 of the second adsorption rotor 80 is cooled by the fresh air or outside air. Alternatively, in a second embodiment, the first clean air discharge pipe 72 is provided with a first clean air connecting pipe 721 (as shown). Figure 1 As shown), the other end of the first clean gas connection pipe 721 is connected to the second cooling gas inlet pipe 83, so that the gas in the first clean gas discharge pipe 72 can be transported to the cooling zone 802 of the second adsorption rotor 80 for cooling. In addition, the first clean gas connection pipe 721 is equipped with a first clean gas connection control valve 7211 (e.g., Figure 1 As shown), to control the airflow of the first clean air connection duct 721.

[0147] Additionally, one end of the first desorption concentrated gas pipeline 76 is connected to one side of the desorption zone 703 of the first adsorption rotor 70 (e.g., Figure 1 and Figure 2As shown), the other end of the first desorbed concentrated gas pipeline 76 is connected to one end of the third cold-side pipeline 931 of the third heat exchanger 93, and the other end of the third cold-side pipeline 931 of the third heat exchanger 93 is connected to one end of the third cold-side conveying pipeline 94. Furthermore, the other end of the third cold-side conveying pipeline 94 is connected to the inlet 61 of the incinerator 60, so that the desorbed concentrated gas desorbed at high temperature can be conveyed through the first desorbed concentrated gas pipeline 76 to one end of the third cold-side pipeline 931 of the third heat exchanger 93, and from the other end of the third cold-side pipeline 931 of the third heat exchanger 93 to one end of the third cold-side conveying pipeline 94, and from the other end of the third cold-side conveying pipeline 94 to the inlet 61 of the incinerator 60 (as shown). Figure 1 and Figure 2 As shown), this allows the burner head 40 of the incinerator 60 to undergo high-temperature pyrolysis, thereby reducing volatile organic compounds. Additionally, the first desorption and concentration gas pipeline 76 is equipped with a fan 761 (as shown). Figure 2 As shown), it can push or pull the desorbed concentrated gas into one end of the third cold side pipe 931 of the third heat exchanger 93.

[0148] Additionally, one end of the second desorption and concentration gas pipeline 85 is connected to one side of the desorption zone 803 of the second adsorption rotor 80. The other end of the second desorption and concentration gas pipeline 85 has two implementations. The first implementation is that the other end of the second desorption and concentration gas pipeline 85 is connected to the exhaust gas inlet pipeline 71 (e.g., Figure 1 As shown), the concentrated gas can then re-enter the adsorption zone 701 of the first adsorption rotor 70 via the exhaust gas inlet pipe 71 for re-adsorption. Alternatively, in a second embodiment, the other end of the second desorption concentrated gas pipe 85 is connected to the first cooling gas inlet pipe 73 (as shown). Figure 2 As shown, the concentrated gas can then enter the cooling zone 702 of the first adsorption rotor 70 via the first cooling gas inlet pipe 73 for cooling. Furthermore, the second desorbed concentrated gas pipe 85 is equipped with a fan 851 to push or pull the desorbed concentrated gas into the waste gas inlet pipe 71 or the first cooling gas inlet pipe 73. This allows the desorbed gas generated in the desorption zone 803 of the second adsorption rotor 80 to be recycled into the adsorption zone 701 or the cooling zone 702 of the first adsorption rotor 70.

[0149] Finally, when the incinerator 60 is configured as a direct-fired incinerator (TO), the aforementioned dual-rotor volatile organic compound (VOC) treatment system 1 can be modified by adding the first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93, and a new fourth heat exchanger (not shown in the figure), in addition to the aforementioned first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93. The difference lies in the addition of the new fourth heat exchanger (not shown in the figure). The remaining first adsorption rotor 70 and second adsorption rotor 80 adopt the same design. Therefore, when the aforementioned incinerator 60 is modified into a direct-fired incinerator (TO), the contents of the first heat exchanger 91, the second heat exchanger 92, the third heat exchanger 93, the third cold-side conveying pipeline 94, the first adsorption rotor 70, the second adsorption rotor 80, and the chimney 95 will not be repeated. Please refer to the above description.

[0150] In addition to being configured with the dual-rotor volatile organic compound (VOC) treatment system 1 as described above, the incinerator 60 of the present invention can also be configured with a single-rotor volatile organic compound (VOC) treatment system (not shown). The difference between the single-rotor volatile organic compound (VOC) treatment system (not shown) and the dual-rotor volatile organic compound (VOC) treatment system 1 is that the second adsorption rotor 80 is omitted. When the incinerator 60 is configured as a direct-fired incinerator (TO), the direct-fired incinerator (TO) can be equipped with two or three heat exchangers. Its configuration can be referred to the design of the first adsorption rotor 70 in the dual-rotor volatile organic compound (VOC) treatment system 1. The details will not be repeated here. Please refer to the above description.

[0151] The above detailed description enables those skilled in the art to understand that the present invention can indeed achieve the aforementioned objectives and complies with the provisions of the Patent Law; therefore, this patent application is hereby filed.

[0152] The above description is merely a preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any simple equivalent changes and modifications made in accordance with the claims and description of the present invention should still fall within the scope of the present invention.

Claims

1. A waste hydrogen recovery and utilization system, characterized in that, include: A process plant area is provided with a hydrogen exhaust pipeline. The process plant area produces a process tail gas containing at least one hydrogen gas (H2) and at least one nitrogen gas (N2), which is discharged through the hydrogen exhaust pipeline. A separation and purification device is provided, which is equipped with a nitrogen output pipeline. The separation and purification device is connected to the hydrogen exhaust pipeline and separates and purifies the process tail gas into hydrogen gas (H2) and nitrogen gas (N2) through the separation and purification device. The nitrogen gas (N2) is output through the nitrogen output pipeline. A storage tank is provided with a hydrogen delivery pipeline and a natural gas delivery pipeline. The hydrogen delivery pipeline is connected to the separation and purification equipment to deliver hydrogen gas (H2) separated and purified by the equipment to the storage tank. The natural gas delivery pipeline delivers natural gas to the storage tank, where it combines with the hydrogen gas (H2) to form a storage gas. A furnace head is provided with a gas storage pipeline, which is connected to a storage tank so that the stored gas in the storage tank can be transported to the furnace head through the gas storage pipeline.

2. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, This process plant area is further divided into one of the semiconductor process plant area, electronic process plant area, and optoelectronic process plant area.

3. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The hydrogen exhaust pipeline is further equipped with a gas extraction device to push the process exhaust gas to the separation and purification equipment.

4. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The hydrogen discharge pipeline is further equipped with a first discharge valve, which can be operated by either pneumatic or electric means.

5. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The storage tank is further integrated with a flow control device, which includes a pressure sensor, a first mass flow controller, and a second mass flow controller. The pressure sensor is connected to the storage tank, the first mass flow controller is located on the hydrogen delivery pipeline and is signal-connected to the pressure sensor, and the second mass flow controller is located on the natural gas delivery pipeline and is signal-connected to the pressure sensor.

6. The waste hydrogen recovery and utilization system according to claim 5, characterized in that, The pressure sensor is further used to detect the gas pressure of the stored gas in the storage tank.

7. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The gas storage pipeline is further provided with any one of a pressure regulating valve, a first shut-off valve, a second drain valve, a second shut-off valve, and a gas flow control valve.

8. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The burner head is further connected to an air passage pipe, which is equipped with an air flow control valve to control the air flow.

9. The waste hydrogen recovery and utilization system according to claim 8, characterized in that, The air passage duct is further equipped with a fan to push or pull the gas inside the air passage duct.

10. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The separation and purification equipment further includes a hydrogen purifier, which employs any one or a combination of membrane separation technology, cryogenic separation technology, pressure swing adsorption (PSA) technology, and metal hydride technology.

11. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The separation and purification equipment further includes either or a combination of an electrochemical hydrogen purifier (ECHP) and a ceramic magnetic adsorption purifier (PCAP).

12. The waste hydrogen recovery and utilization system according to claim 1, characterized in that, The burner head is further installed in an incinerator, which is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal oxidizer (RTO).

13. The waste hydrogen recovery and utilization system according to claim 12, characterized in that, The incinerator is further configured with either a dual-rotor volatile organic compound (VOC) treatment system or a single-rotor volatile organic compound (VOC) treatment system.

14. The waste hydrogen recovery and utilization system according to claim 12, characterized in that, The direct-fired incinerator (TO) is further equipped with one of two, three, or four heat exchangers.

15. A method for recycling waste hydrogen, mainly used in a waste hydrogen recycling system, comprising a process plant, a separation and purification device, a storage tank, and a furnace head. The process plant is equipped with a hydrogen discharge pipeline, the separation and purification device is equipped with a nitrogen output pipeline, the storage tank is equipped with a hydrogen delivery pipeline and a natural gas delivery pipeline, and the furnace head is equipped with a storage gas delivery pipeline. The main steps of the waste hydrogen recycling method include: Process exhaust gas: This process plant produces a process exhaust gas containing at least one hydrogen gas (H2) and at least one nitrogen gas (N2), which is discharged through the hydrogen exhaust pipeline. Separation and purification: The separation and purification equipment is connected to the hydrogen exhaust pipeline, and the process tail gas is separated and purified into hydrogen gas (H2) and nitrogen gas (N2) through the separation and purification equipment. The nitrogen gas (N2) is output through the nitrogen output pipeline. Delivery to storage tank: The hydrogen delivery pipeline is connected to the separation and purification equipment to deliver the hydrogen gas (H2) separated and purified by the separation and purification equipment to the storage tank; Natural gas transportation: The natural gas transportation pipeline transports natural gas to the storage tank, where it combines with hydrogen gas (H2) to form a stored gas; and Storage gas delivery: The storage gas delivery pipeline is connected to the storage tank, so that the stored gas in the storage tank can be delivered to the furnace head via the storage gas delivery pipeline.

16. The method for recycling waste hydrogen according to claim 15, characterized in that, Following the natural gas delivery step, the following steps are further included: Assembly of flow control equipment: The storage tank is assembled with a flow control device, which is equipped with a pressure sensor, a first mass flow controller and a second mass flow controller; Controlling hydrogen flow rate: The first mass flow controller is installed on the hydrogen delivery pipeline and is connected to the pressure sensor signal to control the hydrogen flow rate of the hydrogen delivery pipeline; Controlling the natural gas flow rate: The second mass flow controller is installed on the natural gas transmission pipeline and is connected to the pressure sensor signal to control the natural gas flow rate of the natural gas transmission pipeline; as well as Controlling the output ratio: The pressure sensor is connected to the storage tank. The pressure sensor is used to detect the gas pressure of the stored gas in the storage tank and to control the ratio of the hydrogen flow rate in the hydrogen delivery pipeline to the natural gas flow rate in the natural gas delivery pipeline.

17. The method for recycling waste hydrogen according to claim 15, characterized in that, This process plant area is further divided into one of the semiconductor process plant area, electronic process plant area, and optoelectronic process plant area.

18. The method for recycling waste hydrogen according to claim 15, characterized in that, The hydrogen exhaust pipeline is further equipped with a gas extraction device to push the process exhaust gas to the separation and purification equipment.

19. The method for recycling waste hydrogen according to claim 15, characterized in that, The hydrogen discharge pipeline is further equipped with a first discharge valve, which can be operated by either pneumatic or electric means.

20. The method for recycling waste hydrogen according to claim 15, characterized in that, The gas storage pipeline is further provided with any one of a pressure regulating valve, a first shut-off valve, a second drain valve, a second shut-off valve, and a gas flow control valve.

21. The method for recycling waste hydrogen according to claim 15, characterized in that, The burner head is further connected to an air passage pipe, which is equipped with an air flow control valve to control the air flow.

22. The method for recycling waste hydrogen according to claim 21, characterized in that, The air passage duct is further equipped with a fan to push or pull the gas inside the air passage duct.

23. The method for recycling waste hydrogen according to claim 15, characterized in that, The separation and purification equipment further includes a hydrogen purifier, which employs any one or a combination of membrane separation technology, cryogenic separation technology, pressure swing adsorption (PSA) technology, and metal hydride technology.

24. The method for recycling waste hydrogen according to claim 15, characterized in that, The separation and purification equipment further includes either or a combination of an electrochemical hydrogen purifier (ECHP) and a ceramic magnetic adsorption purifier (PCAP).

25. The method for recycling waste hydrogen according to claim 15, characterized in that, The burner head is further installed in an incinerator, which is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal oxidizer (RTO).

26. The method for recycling waste hydrogen according to claim 25, characterized in that, The incinerator is further configured with either a dual-rotor volatile organic compound (VOC) treatment system or a single-rotor volatile organic compound (VOC) treatment system.

27. The method for recycling waste hydrogen according to claim 25, characterized in that, The direct-fired incinerator (TO) is further equipped with one of two, three, or four heat exchangers.

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