Vacuum adsorption rotating table of scribing machine

Abstract

The invention discloses a scribing machine vacuum adsorption rotating table, and particularly relates to the technical field of semiconductor product cutting, the scribing machine vacuum adsorption rotating table comprises a base, a rotating structure is fixedly installed on the base, a sealing structure is installed on the outer side of the rotating structure, the rotating structure comprises a ceramic suction cup, a steel ring is installed on the ceramic suction cup, and the sealing structure comprises a first waterproof cover. The first waterproof cover is fixedly installed on the outer side of the insulating ceramic, the second waterproof cover is installed on the outer side of the insulating ceramic, and the waterproof ring is installed on the first waterproof cover. Through the arrangement of the rotating structure and the sealing structure, an 8-inch or 12-inch ceramic suction cup can be compatible, disassembly and replacement are conducted through pins, the equipment utilization rate is increased, meanwhile, the sealing performance of all parts after assembly is improved through the sealing structure, and it is guaranteed that residual water and cutting impurities on the rotating workbench cannot erode and damage equipment; the service life of equipment is prolonged, and meanwhile, the workbench is completely insulated.

Description

Technical Field

[0001] This invention relates to the field of semiconductor product cutting technology, and more specifically, to a vacuum adsorption rotary table for a dicing machine. Background Technology

[0002] Vacuum adsorption rotary table is a precision tooling equipment that combines vacuum negative pressure adsorption and rotation positioning functions. It is widely used in industrial automation, precision machining, electronic manufacturing and other fields, and is especially suitable for clamping and rotating thin, fragile, non-magnetic or surface-sensitive workpieces.

[0003] The existing vacuum adsorption rotary table of the dicing machine is not compatible with 8-inch and 12-inch ceramic suction cups, and is not easy to disassemble and replace, which reduces the utilization rate of the equipment. The poor sealing of the assembled parts and the residual moisture and cutting impurities on the rotary table make the table unable to be insulated. Summary of the Invention

[0004] The present invention provides a vacuum adsorption rotary table for a dicing machine, which aims to solve the technical problems of existing vacuum adsorption rotary tables for dicing machines being incompatible with the disassembly and replacement of ceramic suction cups of different sizes and having poor sealing performance.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a vacuum adsorption rotary table for a dicing machine, comprising a base, a rotating structure fixedly mounted on the base, and a sealing structure mounted on the outer side of the rotating structure; The rotating structure includes a ceramic suction cup with a steel ring mounted on it. The sealing structure includes a waterproof cover one, which is fixedly installed on the outside of the insulating ceramic. A waterproof cover two is installed on the outside of the insulating ceramic. A waterproof ring is installed on the waterproof cover one, and a sealing ring and a rubber ring are fixedly installed on the waterproof ring. Different sizes of ceramic suction cups can be replaced by rotating the pins on the structure.

[0006] In a preferred embodiment, the rotating structure includes a DD motor, which is fixedly mounted on a base. A support base is fixedly mounted on the side of the base away from the DD motor. An insulating ceramic is fixedly mounted on the output end of the DD motor. A suction cup positioning plate is fixedly mounted on the side of the insulating ceramic away from the DD motor. The side of the suction cup positioning plate away from the insulating ceramic is fixedly connected to the ceramic suction cup.

[0007] In a preferred embodiment, an air pipe connector is fixedly installed on the side of the insulating ceramic away from the DD motor, and an adjusting stud is fixedly installed on the side of the insulating ceramic close to the DD motor. Several adjusting studs are provided.

[0008] In a preferred embodiment, a positioning ring is fixedly installed on the side of the suction cup positioning plate away from the DD motor, and the positioning ring is movably connected to the ceramic suction cup.

[0009] In a preferred embodiment, a limit assembly is installed on the DD motor. The limit assembly includes photoelectric switches, and several photoelectric switches are provided. A connecting plate is fixedly connected to the side of the photoelectric switch near the DD motor. A linear slide rail is fixedly installed on the connecting plate. A limit sensing plate is installed on the linear slide rail. A tension spring and a spring frame lever are fixedly installed on the outer side of the limit sensing plate.

[0010] In a preferred embodiment, a plurality of waterproof covers are provided, and a support block is fixedly installed between the waterproof covers and the waterproof covers. A plurality of support blocks are provided.

[0011] In a preferred embodiment, a sharpening structure is installed on the waterproof cover. The sharpening structure includes a fixing plate, and a plurality of fixing plates are provided. The fixing plates are fixedly installed on the side away from the DD motor, and a sharpening plate is installed on the side of the fixing plate away from the waterproof cover.

[0012] In a preferred embodiment, a disassembly component is provided between the fixed plate and the grinding plate. The disassembly component includes an iron block, which is fixedly connected to the side of the grinding plate near the fixed plate. A groove is provided on the side of the fixed plate near the grinding plate. An electromagnet and an inflatable airbag are installed inside the groove. Several inflatable airbags are provided. A hollow block is fixedly installed on the side of the fixed plate near the grinding plate. Several air vents are provided on the outer side of the hollow block. An air supply pipe is provided between the inflatable airbags and the hollow block. Several air supply pipes are provided. A shielding block is fixedly installed on the outer side of the grinding plate.

[0013] The beneficial effects of this invention are as follows: This invention, through the design of a rotating and sealing structure, can be compatible with 8-inch or 12-inch ceramic suction cups and can be disassembled and replaced using pins, increasing equipment utilization. At the same time, the sealing structure increases the sealing of each part after assembly, ensuring that residual moisture and cutting impurities on the rotating worktable will not corrode or damage the equipment, extending the service life of the equipment, while ensuring that the worktable is completely insulated.

[0014] This invention, through the design of the grinding blade structure, allows workers to use machinery instead of manual labor to disassemble and replace the grinding blade. At the same time, when installing the grinding blade, impurities and moisture on the fixing plate are also cleaned, preventing the grinding blade from being installed unevenly due to impurities and moisture. It also saves the amount of manual labor required to clean impurities. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0016] Figure 2 This is a schematic diagram of the overall exploded view of the present invention.

[0017] Figure 3 This is a cross-sectional structural schematic diagram of the present invention.

[0018] Figure 4 This is a schematic diagram of the structure of the DD motor and the limiting component of the present invention.

[0019] Figure 5 This is a schematic diagram of part of the grinding tool structure of the present invention.

[0020] Figure 6 This is a schematic diagram of another part of the grinding tool structure of the present invention.

[0021] The attached diagram is labeled as follows: 1. Base; 2. Rotating structure; 21. DD motor; 22. Insulating ceramic; 221. Air pipe connector; 222. Adjusting stud; 23. Suction cup positioning plate; 24. Positioning ring; 25. Ceramic suction cup; 26. Steel ring; 27. Limiting component; 271. Spring frame lever; 272. Photoelectric switch; 273. Linear slide rail; 274. Tension spring; 275. Limiting sensor plate; 3. Sealing structure; 31. Waterproof cover one; 32. Waterproof ring; 33. Sealing ring; 34. Rubber ring; 4. Support base; 5. Waterproof cover two; 6. Support block; 7. Grinding structure; 71. Fixing plate; 72. Grinding plate; 73. Disassembly part; 731. Iron block; 732. Electromagnet; 733. Groove; 734. Mouth-shaped block; 735. Inflatable airbag; 736. Blocking block. Detailed Implementation

[0022] The present application will now be described in further detail with reference to the accompanying drawings. It should be noted that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.

[0023] like Figures 1-6 As shown, a vacuum adsorption rotary table for a dicing machine includes a base 1, a rotating structure 2 fixedly mounted on the base 1, and a sealing structure 3 mounted on the outside of the rotating structure 2. The rotating structure 2 includes a ceramic suction cup 25, on which a steel ring 26 is mounted; The sealing structure 3 includes a waterproof cover 31, which is fixedly installed on the outside of the insulating ceramic 22. A second waterproof cover 5 is installed on the outside of the insulating ceramic 22. A waterproof ring 32 is installed on the waterproof cover 31. A sealing ring 33 and a rubber ring 34 are fixedly installed on the waterproof ring 32. The ceramic suction cups 25 of different sizes can be replaced by rotating the pins on structure 2.

[0024] It should be noted that the waterproof cover 31 is made of PC and carbon fiber material through casting and processing. The waterproof cover is a non-metallic casting and cannot conduct electricity. The waterproof cover 5 is an accordion type for easy reciprocating movement, but it also cannot conduct electricity. The waterproof ring 32 is made of glass fiber, and the rubber ring 34 is made of nitrile rubber. The sealing ring 33 is also made of nitrile rubber material.

[0025] The rotating structure 2 includes a DD motor 21, which is fixedly mounted on the base 1. A support base 4 is fixedly mounted on the side of the base 1 away from the DD motor 21. An insulating ceramic 22 is fixedly mounted on the output end of the DD motor 21. A suction cup positioning plate 23 is fixedly mounted on the side of the insulating ceramic 22 away from the DD motor 21. The side of the suction cup positioning plate 23 away from the insulating ceramic 22 is fixedly connected to the ceramic suction cup 25.

[0026] It should be noted that the suction cup positioning plate 23 is a key component that integrates three core functions: vacuum adsorption, precision positioning, and rigid support.

[0027] An air pipe connector 221 is fixedly installed on the side of the insulating ceramic 22 away from the DD motor 21, and an adjusting stud 222 is fixedly installed on the side of the insulating ceramic 22 close to the DD motor 21. Several adjusting studs 222 are provided.

[0028] It should be noted that the adjusting stud 222 is a core auxiliary component used for mechanical precision compensation, gap elimination, and benchmark calibration. It complements the drive system and detection system, solves the problem of angle positioning deviation caused by machining errors, assembly stress, and long-term wear, and further improves the angle control accuracy and stability of the rotary table.

[0029] A positioning ring 24 is fixedly installed on the side of the suction cup positioning plate 23 away from the DD motor 21, and the positioning ring 24 is movably connected to the ceramic suction cup 25.

[0030] It should be noted that the ceramic disk positioning ring 24 is a precision annular positioning component installed between the ceramic adsorption disk and the rotary table drive spindle. Its core function is to achieve high-precision coaxial positioning, rigid centering, and wear protection of the ceramic disk, directly ensuring the angle control accuracy and table rotation stability of the rotary table.

[0031] A limit component 27 is installed on the DD motor 21. The limit component 27 includes a photoelectric switch 272. Several photoelectric switches 272 are provided. A connecting plate is fixedly connected to the side of the photoelectric switch 272 near the DD motor 21. A linear slide rail 273 is fixedly installed on the connecting plate. A limit sensing plate 275 is installed on the linear slide rail 273. A tension spring 274 and a spring frame lever 271 are fixedly installed on the outside of the limit sensing plate 275.

[0032] It should be noted that there are two photoelectric switches 272. A fixed toggle block is installed on the outside of the rotating structure 2 of the DD motor 21. When the DD motor 21 rotates, it drives the fixed toggle block to rotate. When the fixed toggle block rotates, it drives the spring frame toggle block 271 to move. The spring frame toggle block 271 slides on the linear slide rail 273 with the limit sensor plate 275. The limit sensor plate 275 blocks the photoelectric switch 272, stopping the operation of the DD motor 21. At the same time, the limit sensor plate 275 stretches the tension spring 274 to move. At this time, the DD motor 21 can stop after rotating 45°. At the same time, the limit sensor plate 275 is reset by the tension spring 274.

[0033] Several waterproof covers 2 5 are provided, and a support block 6 is fixedly installed between waterproof cover 2 5 and waterproof cover 1 31. Several support blocks 6 are provided.

[0034] It should be noted that its support block 6 is mainly used to fix and install the waterproof cover 2 5.

[0035] A sharpening structure 7 is installed on the waterproof cover 31. The sharpening structure 7 includes a fixing plate 71. Several fixing plates 71 are provided. The fixing plates 71 are fixedly installed on the side away from the DD motor 21. A sharpening plate 72 is installed on the side of the fixing plate 71 away from the waterproof cover 31.

[0036] It should be noted that the sharpening plate 72 is a special precision tooling used for blade sharpening, edge preparation, and precision calibration. Its core function is to restore blade sharpness, correct the cutting edge angle, and control radial runout.

[0037] In this embodiment, the specific implementation scenario is as follows: When the vacuum adsorption rotary table device is working, when it is necessary to fix an object, the object is first placed on the ceramic suction cup 25. An external air extraction device connected to the air pipe connector 221 is activated to fix the object. When it is necessary to adjust the rotation angle, the DD motor 21 is activated. The DD motor 21 rotates the insulating ceramic 22, which in turn rotates the suction cup positioning plate 23. The suction cup positioning plate 23 rotates the ceramic suction cup 25 and the object. Under the control of the limiting structure, the angle is adjusted to 45°, which can be adjusted according to the size of the object. Different ceramic suction cups 25 can be replaced, including 8-inch or 12-inch ceramic suction cups 25. When replacement is required, under the constraints of the suction cup positioning plate 23 and positioning ring 24, the position of the ceramic suction cup 25 should be accurately installed, and then it can be fixed with pins. In the entire working state of the device, it has a waterproof cover 31, a waterproof ring 32, a sealing ring 33, and a rubber ring 34 to increase the sealing of the device. At the same time, the addition of a second waterproof cover 5 solves the problem that residual moisture in the cutting process can conduct electricity with the motor base 1, causing inaccuracy between the cutter and the NCS height measuring device in the dicing machine.

[0038] When the sharpening plate 72 needs to be replaced after long-term use, it was originally disassembled and installed using screws, which was time-consuming and laborious. At the same time, some debris and water may remain inside its threaded holes, causing the sharpening plate 72 to be installed unevenly, which is not conducive to sharpening the tools.

[0039] A disassembly component 73 is provided between the fixed plate 71 and the grinding plate 72. The disassembly component 73 includes an iron block 731, which is fixedly connected to the side of the grinding plate 72 near the fixed plate 71. A groove 733 is provided on the side of the fixed plate 71 near the grinding plate 72. An electromagnet 732 and an inflatable airbag 735 are installed inside the groove 733. Several inflatable airbags 735 are provided. A mouth-shaped block 734 is fixedly installed on the side of the fixed plate 71 near the grinding plate 72. The mouth-shaped block 734 is a hollow structure. Several air vents are provided on the outside of the mouth-shaped block 734. An air supply pipe is provided between the inflatable airbag 735 and the mouth-shaped block 734. Several air supply pipes are provided. A blocking block 736 is fixedly installed on the outside of the grinding plate 72.

[0040] It should be noted that there are four inflatable airbags 735 located on the bottom side inside the groove 733, and there are also four air supply pipes. The shielding block 736 is mainly to prevent external impurities or moisture from entering the groove 733.

[0041] In this embodiment, the specific implementation scenario is as follows: When the grinding plate 72 needs to be replaced, the electromagnet 732 is de-energized, allowing the unloading robot on the dicing machine to carry the grinding plate 72 and the iron block 731 away from the groove 733. At the same time, the inflatable airbag 735, which was squeezed by the iron block 731, returns to its original state. Then, the unloading robot carries the iron block 731 of the grinding plate 72 and squeezes the inflatable airbag 735 inside the groove 733 back and forth, allowing the gas to pass through the inlet block 734 and then out through the outlet hole, cleaning the impurities that fall on the upper side of the fixing plate 71. In this way, the external moisture and impurities can also be cleaned when the grinding plate 72 is installed. Finally, the electromagnet 732 is energized to attract and fix the iron block 731 and the grinding plate 72.

[0042] The embodiments described above are merely examples of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention.

Claims

1. A vacuum adsorption rotary table for a dicing machine, comprising a base (1), characterized in that, A rotating structure (2) is fixedly installed on the base (1), and a sealing structure (3) is installed on the outside of the rotating structure (2). The rotating structure (2) includes a ceramic suction cup (25) on which a steel ring (26) is mounted. The sealing structure (3) includes a waterproof cover (31), which is fixedly installed on the outside of the insulating ceramic (22). A second waterproof cover (5) is installed on the outside of the insulating ceramic (22). A waterproof ring (32) is installed on the first waterproof cover (31), and a sealing ring (33) and a rubber ring (34) are fixedly installed on the waterproof ring (32).

2. The vacuum adsorption rotary table for a dicing machine according to claim 1, characterized in that, The rotating structure (2) includes a DD motor (21), which is fixedly mounted on a base (1). A support seat (4) is fixedly mounted on the side of the base (1) away from the DD motor (21). An insulating ceramic (22) is fixedly mounted on the output end of the DD motor (21). A suction cup positioning plate (23) is fixedly mounted on the side of the insulating ceramic (22) away from the DD motor (21). The side of the suction cup positioning plate (23) away from the insulating ceramic (22) is fixedly connected to the ceramic suction cup (25).

3. The vacuum adsorption rotary table for a dicing machine according to claim 2, characterized in that, An air pipe connector (221) is fixedly installed on the side of the insulating ceramic (22) away from the DD motor (21), and an adjusting stud (222) is fixedly installed on the side of the insulating ceramic (22) close to the DD motor (21). Several adjusting studs (222) are provided.

4. The vacuum adsorption rotary table for a dicing machine according to claim 3, characterized in that, The suction cup positioning plate (23) is fixedly installed with a positioning ring (24) on the side away from the DD motor (21), and the positioning ring (24) is movably connected to the ceramic suction cup (25).

5. The vacuum adsorption rotary table for a dicing machine according to claim 4, characterized in that, The DD motor (21) is equipped with a limit assembly (27), which includes a photoelectric switch (272). Several photoelectric switches (272) are provided. A connecting plate is fixedly connected to the side of the photoelectric switch (272) near the DD motor (21). A linear slide rail (273) is fixedly installed on the connecting plate. A limit sensor (275) is installed on the linear slide rail (273). A tension spring (274) and a spring frame lever (271) are fixedly installed on the outer side of the limit sensor (275).

6. The vacuum adsorption rotary table for a dicing machine according to claim 5, characterized in that, Several waterproof cover two (5) are provided, and a support block (6) is fixedly installed between the waterproof cover two (5) and the waterproof cover one (31). Several support blocks (6) are provided.

7. A vacuum adsorption rotary table for a dicing machine according to claim 6, characterized in that, A sharpening structure (7) is installed on the waterproof cover (31). The sharpening structure (7) includes a fixing plate (71). Several fixing plates (71) are provided. The fixing plate (71) is fixedly installed on the side away from the DD motor (21). A sharpening plate (72) is installed on the side of the fixing plate (71) away from the waterproof cover (31).

8. The vacuum adsorption rotary table for a dicing machine according to claim 7, characterized in that, A disassembly component (73) is provided between the fixing plate (71) and the grinding plate (72). The disassembly component (73) includes an iron block (731), which is fixedly connected to the side of the grinding plate (72) near the fixing plate (71). A groove (733) is provided on the side of the fixing plate (71) near the grinding plate (72). An electromagnet (732) and an inflatable airbag (735) are installed inside the groove (733). (735) Several of them are provided. A mouth-shaped block (734) is fixedly installed on the side of the fixing plate (71) near the grinding plate (72). The mouth-shaped block (734) is set as a hollow structure. An air outlet is provided on the outside of the mouth-shaped block (734) and several of them are provided. An air supply pipe is provided between the inflatable airbag (735) and the mouth-shaped block (734) and several of them are provided. A shielding block (736) is fixedly installed on the outside of the grinding plate (72).

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