Automatic access device for wafer aging test fixture

Abstract

The invention discloses an automatic access device for a wafer aging test fixture, and the device comprises a push-pull execution mechanism which comprises a material taking mechanism and jacking mechanisms installed around the material taking mechanism, the jacking mechanisms are used for receiving materials, and the material taking mechanism is used for storing the materials received by the jacking mechanisms into a wafer testing machine for testing; after the test is finished, the material is taken out and conveyed to the jacking mechanism; the lifting mechanism comprises a driving unit and a storage unit connected with the driving unit, the storage unit is used for installing a plurality of push-and-pull executing mechanisms, the driving unit is used for driving the storage unit to move up and down, the number of the push-and-pull executing mechanisms is at least two, and the material conveying directions of the push-and-pull executing mechanisms are the same or opposite. The multi-station and large-scale parallel testing is achieved through the multiple push-pull executing mechanisms, multi-layer bidirectional material storage and material taking can be achieved through the device, then multi-stage bidirectional testing is achieved, and the working efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically to an automatic storage and retrieval device for wafer aging test fixtures. Background Technology

[0002] Wafer burn-in is a critical process for reliability screening in semiconductor manufacturing. By controlling current, temperature, voltage, and duration, it applies various simulated external operating conditions to the wafer to test its quality and durability characteristics. Based on the test results, wafers are then efficiently and systematically sorted to prevent defective wafers from proceeding to the next stage. During wafer burn-in, after pre-defined steps such as wafer edge inspection, center positioning, and wafer clamping in the burn-in fixture, the wafer is held in the burn-in fixture, ready to be transported to the final testing station. Currently, most equipment requires manual intervention after wafer clamping in the burn-in fixture and transport to the testing station. After testing at the station, manual collection and transfer of the wafer are also necessary. Therefore, it is inefficient, only suitable for small-scale testing, and cannot perform large-scale parallel testing. Equipment requiring manual intervention has low integration and low intelligence. Summary of the Invention

[0003] This invention addresses the problems in existing technologies by disclosing an automatic storage and retrieval device for wafer aging test fixtures. The invention achieves fully automated material testing through an automatic feeding and retrieval mechanism and a lifting mechanism that automatically raises and lowers the material to a set position based on actual conditions, reducing the need for manual labor. Multiple push-pull actuators enable multi-station, large-scale parallel testing. The directions of the push-pull actuators can be set to be the same or different as needed, allowing the device to perform multi-layer bidirectional material storage and retrieval, thereby achieving multi-level bidirectional testing. This means that multiple materials can be tested simultaneously, greatly improving work efficiency.

[0004] This invention is achieved through the following technical solution: This invention first provides an automatic storage and retrieval device for wafer aging test fixtures, characterized in that it includes: The push-pull actuator includes a material picking mechanism and a lifting mechanism installed above and around it. The lifting mechanism is used to receive materials, and the material picking mechanism is used to store the materials received by the lifting mechanism into the wafer testing machine for testing, and after the testing is completed, the materials are taken out and transported to the lifting mechanism. The lifting mechanism includes a drive unit and a connected storage unit. The storage unit is used to mount multiple push-pull actuators, and the drive unit is used to drive the storage unit to move up and down. The number of push-pull actuators is at least two, and the multiple push-pull actuators transfer material in the same or opposite directions.

[0005] As a further embodiment, the lifting mechanism includes a main frame and a drive unit installed thereon. The drive unit is connected to a controller via a signal. Slide rails are provided on both sides of the main frame, and a loading unit is installed between the two slide rails. A buffer unit is also installed at the bottom of the main frame.

[0006] As a further embodiment, the storage unit includes a frame structure formed by an upper mounting plate, a first slide rail connecting plate, a lower mounting plate, and a second slide rail connecting plate arranged in sequence. The frame structure is used to install the first-layer push-pull actuator and the second-layer push-pull actuator. Several lifting cylinders are installed on both the upper and lower mounting plates. The first and second slide rail connecting plates are slidably connected to the slide rails on both sides. The storage unit also has a cylinder control valve island for controlling the extension and retraction of the lifting cylinders. The cylinder control valve island is connected to the controller.

[0007] As a further embodiment, the material handling mechanism includes a primary transmission unit, a secondary telescopic unit, and a tertiary material handling unit. The tertiary material handling unit is used to grip the material, and the primary transmission unit is used to drive the secondary telescopic unit and the tertiary material handling unit to move simultaneously to the left or right.

[0008] As a further embodiment, the primary transmission unit includes a frame and its installed tensioning unit and transmission gear set. The transmission gear set is fixedly connected to the rotating end of the transmission motor. The two sides of the frame are provided with transmission pulleys and guide blocks for sliding connection with the secondary telescopic unit. A position sensor for determining whether the material is in place is also installed on the outside of the frame. The position sensor and the transmission motor are both connected to the controller.

[0009] As a further embodiment, the transmission gear set includes several large gears and several small gears, which are arranged alternately, with adjacent gears meshing with each other, and one of the large gears is fixedly connected to the rotating end of the transmission motor.

[0010] As a further embodiment, the secondary telescopic unit includes a telescopic base plate and a rack mounted on top of it. The rack meshes with the transmission gear set in the primary transmission unit. The rack has a first sliding groove on both sides that is slidably connected to the transmission pulley. A telescopic limiting block is provided on each side of the first sliding groove to limit the relative position of the primary transmission unit and the secondary telescopic unit. The telescopic base plate also has a second sliding groove on both sides that is slidably connected to the material-retrieving pulley. A first pulley and a second pulley are rotatably connected to both ends of the telescopic base plate, both of which are toothed pulleys. The first pulley is connected to the tensioning unit via a first belt, and the second pulley is connected to the belt fixing part of the tertiary material-retrieving unit via a second belt. Both the first and second belts are toothed belts.

[0011] As a further embodiment, the three-stage material handling unit includes a material handling base plate and a belt fixing part and a motor mounting plate mounted on it. A drive motor is mounted on one side of the motor mounting plate, and a gear set formed by multiple meshing gears is mounted on the other side. One of the gears is fixedly connected to the rotating end of the motor. Both ends of the gear set are used to drive the material handling claw to rotate and handle material. A material handling sensor for detecting the material handling status is mounted on the material handling claw. A position sensor for detecting whether the material handling claw has retracted into place is also provided on the material handling base plate. A side plate is fixedly mounted on each side of the material handling base plate. A material handling pulley and a material handling guide block for sliding connection with the secondary telescopic unit are installed on the inner side of each side plate. The material handling sensor, the position sensor, and the drive motor are all connected to the controller.

[0012] As a further embodiment, the lifting mechanism includes a lifting frame and a lifting cylinder assembly, a throttle valve, and a lifting sensor for detecting whether the material is in place. The cylinders of the lifting cylinder assembly are all connected to the cylinder control valve island, and the lifting sensor is all connected to the controller.

[0013] As a further option, the lifting frame is a U-shaped frame formed by connecting the first cantilever, the cantilever connecting plate, and the second cantilever in sequence. The first cantilever is fixedly connected to the first slide rail connecting plate, and the second cantilever is fixedly connected to the second slide rail connecting plate. Both the first and second cantilever are connected to the frame, so that the first-layer push-pull actuator is fixedly connected to the placement unit.

[0014] The features and beneficial effects of this invention are as follows: (1) This invention realizes the transformation from semi-automatic testing to fully automatic testing through the automatic feeding and picking of materials by the material picking mechanism, reducing the use of personnel and the cost of equipment use. The multiple push-pull actuators enable multi-station, large-scale parallel testing. The direction of the push-pull actuators can be set to be the same or different according to the requirements, so that the device can store and pick up materials in multiple layers in both directions, thereby realizing multi-level bidirectional testing, that is, multiple materials can be tested at the same time, which greatly improves work efficiency.

[0015] (2) The push-pull actuator of each layer of the present invention includes a lifting mechanism and a material picking mechanism. The structure forms a material transport channel through the linkage of multiple lifting cylinders, and at the same time plays a role in limiting and protecting the material. The lifting cylinder integrates multiple functions through different installation positions, which greatly simplifies the structure of the equipment, improves the compactness of the structure, and saves space.

[0016] (3) The present invention can drive the second-level telescopic unit and the third-level material handling unit to extend and retract simultaneously through the first-level transmission unit. Compared with the prior art which requires two drives, it saves one drive, thereby reducing the overall cost of the device and simplifying the complexity of the device. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the automatic storage and retrieval device for wafer aging test fixtures and the three positions of the materials according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the lifting mechanism described in an embodiment of the present invention; Figure 3 for Figure 2 Enlarged view of the central X-section; Figure 4 This is a schematic diagram of the material handling mechanism described in an embodiment of the present invention; Figure 5 This is a schematic diagram of the primary transmission unit according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the two-stage telescopic unit described in an embodiment of the present invention; Figure 7 This is a schematic diagram of the three-stage material handling unit according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the lifting mechanism described in an embodiment of the present invention; Figure 9 This is a schematic diagram of the lifting cylinder according to an embodiment of the present invention; Figure 10 This is a schematic diagram showing the positional relationship between the access device and the placement rack in Embodiment 1 of the present invention; Figure 11 This is a schematic diagram showing the positional relationship between the access device and the placement rack in Embodiment 2 of the present invention.

[0019] Explanation of reference numerals in the attached figures: 10-Lifting mechanism; 101-Main frame; 102-Screw; 103-Lifting motor mounting plate; 104-Pulley; 105-Drive wheel; 106-Protective cover; 107-Slide rail; 108-Upper mounting plate; 109-Upper and lower layer connecting plate; 110-Lower mounting plate; 111-Slide rail connecting plate No. 1; 112-Drag chain; 113-Screw support; 114-Buffer unit; 115-Limit mechanism; 116-Servo motor; 117-Cylinder control valve island; 118-Auxiliary roller; 119-Auxiliary roller mounting plate; 120-Slide rail connecting plate No. 2 Connecting plate, 20-No. 1 material handling mechanism, 210-First stage transmission unit, 2101-Left transmission mechanism mounting plate, 2102-Right transmission mechanism mounting plate, 2103-Front mechanism connecting plate, 2104-Transmission pulley, 2105-Guide block, 2106-Tensioning bolt, 2107-Belt pressure block, 2108-Belt tensioning block, 2109-Tensioning block guide groove, 2110-Mounting block, 2111-Position sensor, 2112-Large gear, 2113-Fixing plate, 2114-Motor, 2115-Coupling, 2116-Motor support, 2 117-Auxiliary connector, 2118-Pin gear, 220-Secondary telescopic unit, 2201-Telescopic base plate, 2202-Zeroing detection plate, 2203-Belt No. 1, 2204-Pulley No. 1, 2205-Telescopic limit block, 2206-Rack, 2207-Pulley No. 2, 2208-Belt No. 2, 230-Third-stage material handling unit, 2301-Material handling base plate, 2302-Material handling claw, 2303-Position sensor, 2304-Material handling limit block, 2305-Gear, 2306-Motor mounting plate, 2307-Side plate, 230 8-Retrieving pulley, 2309-Retrieving guide block, 2310-Drive motor, 2311-Retrieving cable chain; 30-First lifting mechanism, 301-First cantilever, 302-Lifting sensor, 303-Lifting cylinder assembly, 3301-Pulley mounting plate, 3302-Pulley, 3303-Cylinder, 3304-Connector, 304-Cable chain groove, 305-Cantilever connecting plate, 306-Throttle valve, 307-Second cantilever, 308-Roller mounting plate; 40-Second lifting mechanism, 50-Second retrieving mechanism, 60-Material; 70-Wafer testing machine. Detailed Implementation

[0020] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be given below, and embodiments of the present invention will be provided, but this does not limit the scope of the present invention.

[0021] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0022] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0023] like Figures 1 to 11 As shown, an automatic storage and retrieval device for a wafer aging test fixture includes: The first layer of push-pull actuators includes a first material picking mechanism 20 and a first lifting mechanism 30 installed above it. The first lifting mechanism 30 is used to receive materials, and the first material picking mechanism 20 is used to store the materials received by the first lifting mechanism 30 into the wafer tester 70 for testing, and after the test is completed, the materials are taken out and transported to the first lifting mechanism 30. The second-layer push-pull actuator includes the second material handling mechanism 50 and the second lifting mechanism 40 installed above it. The second lifting mechanism 40 is used to receive materials. The second material handling mechanism 50 stores the materials received by the second lifting mechanism 40 into the wafer testing machine 70 for testing, and after the testing is completed, it takes out the materials and transports them to the second lifting mechanism 40. The lifting mechanism 10 includes a drive unit and a connected storage unit. The storage unit is used to install a first-layer push-pull actuator and a second-layer push-pull actuator. The drive unit is used to drive the storage unit to move up and down. Each storage unit can be equipped with multiple first-layer push-pull actuators and second-layer push-pull actuators as needed to achieve simultaneous storage and retrieval of multiple materials.

[0024] The wafer aging test fixture automatic storage and retrieval device provided in this application realizes the transition from semi-automatic testing to fully automated testing through the automatic feeding and retrieval of materials by the material handling mechanism. This reduces personnel usage, lowers equipment operating costs, and improves efficiency. The multiple push-pull actuators enable multi-station, large-scale parallel testing. The directions of the push-pull actuators can be set to be the same or different according to requirements, allowing the device to store and retrieve materials in multiple layers in both directions, thereby achieving multi-level bidirectional testing. In other words, multiple materials can be tested simultaneously, greatly improving work efficiency.

[0025] The lifting mechanism 10 includes a main frame 101 and slide rails 107 on both sides. A storage unit is fixedly installed between the two slide rails 107. The storage unit is equipped with a first material picking mechanism 20, a first lifting mechanism 30, a second material picking mechanism 50 and a second lifting mechanism in sequence from top to bottom. A drive unit for driving the storage unit to move up and down is provided in the middle of the main frame 101. The drive unit is connected to the controller.

[0026] In some embodiments, the drive unit is a ball screw, comprising a screw 102, a servo motor 116, a drive wheel 105, and a pulley 104. The main frame 101 is fixedly connected to a lifting motor mounting plate 103. The servo motor 116 is fixedly mounted below the lifting motor mounting plate 103, and the drive wheel 105 and pulley 104 are rotatably mounted above it, forming a transmission mechanism via a conveyor belt. The drive wheel 105 is fixedly connected to the rotating shaft of the servo motor 116. The pulley 104 is fixedly connected below the screw 102 to drive the screw 102 to rotate. The screw 102 is connected to the storage unit via a ball nut, and the servo motor 116 is signal-connected to the controller. This structure effectively prevents the storage unit from malfunctioning and falling naturally.

[0027] In other embodiments, the drive unit is a transmission mechanism consisting of rollers and a conveyor belt.

[0028] In some embodiments, in order to protect the first transmission mechanism, a removable protective cover 106 is provided above the lifting motor mounting plate 103. The protective cover 106 is a removable structure, which facilitates the maintenance of the first transmission mechanism.

[0029] In some embodiments, a cable chain 112 for mounting wire harnesses is also provided on one side of the main frame 101.

[0030] In some embodiments, the bottom buffer unit 114 of the main frame 101 serves as a safety structure in the event of a slow fall due to mechanism failure. Preferably, the buffer unit 114 is a spring, a sponge pad, or a rubber pad.

[0031] In some embodiments, in order to ensure the stability of the lead screw 102 installation, the lead screw 102 is fixedly connected to the bottom of the main frame 101 by the lead screw support 113.

[0032] In some embodiments, the storage unit includes an upper mounting plate 108, a first slide rail connecting plate 111, a lower mounting plate 110, and a second slide rail connecting plate 120 arranged sequentially to form a frame structure. Lifting cylinders a1, a2, a3, and a4 are respectively mounted on the side of the upper mounting plate 108 and the lower mounting plate 110 closest to the main frame 101. The upper mounting plate 108 is used to mount the first-layer push-pull actuator, and the lower mounting plate 110 is used to mount the second-layer push-pull actuator. The first slide rail connecting plate 111 and the second slide rail connecting plate 120 are slidably connected to the slide rails 107 on both sides. The storage unit also has upper and lower connecting plates 109, a cylinder control valve island 117, an auxiliary roller mounting plate 119, and an auxiliary roller 118 above it fixedly mounted. The auxiliary roller 118 facilitates the sliding entry and exit of the material 60. The cylinder control valve island 117 controls the lifting and lowering of all cylinders in the device and is connected to the controller via a signal.

[0033] In some embodiments, a limiting mechanism 115 is also installed on the top of the main frame 101 to limit the position of the storage unit and prevent it from exceeding the set range, thus preventing damage to the device. Preferably, the limiting mechanism 115 is a limiting plate or a limiting sensor.

[0034] The working principle of the lifting mechanism is as follows: The controller controls the servo motor 116 to work according to the actual situation. The rotation of the servo motor 116 drives the drive wheel 105 to rotate. The drive wheel 105 drives the lead screw 102 to rotate through the pulley 104, thereby driving the storage unit to move up and down in a linear motion.

[0035] The No. 1 material handling mechanism 20 and the No. 2 material handling mechanism 50 have the same structure.

[0036] The first material handling mechanism 20 includes a primary transmission unit 210, a secondary telescopic unit 220, and a tertiary material handling unit 230. The tertiary material handling unit 230 is used to grip the material 60, and the primary transmission unit 210 is used to drive the secondary telescopic unit 220 and the tertiary material handling unit 230 to move left and right simultaneously.

[0037] The primary transmission unit 210 includes a frame and a transmission gear set installed inside it. The transmission gear set is fixedly connected to the rotating end of the transmission motor 2114. The two sides of the frame are provided with transmission pulleys 2104 and guide blocks 2105 for sliding connection with the secondary telescopic unit 220. The frame is also equipped with a position sensor 2111 for detecting whether the material 60 is in place. A tensioning unit is symmetrically installed on both sides of the frame. The position sensor 2111 and the transmission motor 2114 are connected to the controller.

[0038] In some embodiments, an auxiliary connector 2117 is also installed on the frame. The auxiliary connector 2117 is located on the side where the drive motor 2114 is located. The auxiliary connector 2117 is fixedly connected to the upper mounting plate and is used to fix the first material handling mechanism 20 to the placement unit.

[0039] In some embodiments, the frame is formed by sequentially connecting and enclosing a left transmission mechanism mounting plate 2101, a front mechanism connecting plate 2103, a right transmission mechanism mounting plate 2102, and a fixing plate 2113. A plurality of transmission pulleys 2104, guide blocks 2105, and tensioning units are fixedly mounted on the outer sides of the left transmission mechanism mounting plate 2101 and the right transmission mechanism mounting plate 2102.

[0040] In some embodiments, the tensioning unit includes a tensioning block guide groove 2109, the tensioning block guide groove 2109 is fixedly mounted with a belt tensioning block 2108 by a tensioning bolt 2106, the belt tensioning block 2108 is provided with teeth for meshing with a first belt 2203 (a number of teeth are arranged on the surface of the first belt 2203), and a belt pressing block 2107 for pressing the first belt 2203 is also provided above the belt tensioning block 2108.

[0041] In some embodiments, the position sensor 2111 is fixedly connected to the frame via a sensor mounting block 2110.

[0042] In some embodiments, the transmission gear set includes a plurality of large gears 2112 and a plurality of small gears 2118, which are staggered and mesh with each other between adjacent gears. The staggered arrangement of large and small gears ensures that the same gears are driven in the same direction, while also providing position avoidance and saving the overall space of the equipment.

[0043] In some embodiments, the drive motor 2114 is connected to the drive gear set via a coupling 2115, and the drive motor 2114 is fixedly connected to the frame via a motor support 2116.

[0044] In some embodiments, the secondary telescopic unit 220 includes a telescopic base plate 2201 and a rack 2206 disposed above it. The rack 2206 meshes with a gear in the primary transmission unit 210. The rack 2206 has a first groove on both sides that is slidably connected to the transmission pulley 2104. A telescopic limiting block 2205 is provided on both sides of the first groove to limit the relative position of the primary transmission unit 210 and the secondary telescopic unit 220. The telescopic base plate 2201 also has a second groove on both sides that is slidably connected to the material picking pulley 2308. The telescopic base plate 2201 is rotatably connected to a first pulley 2204 and a second pulley 2207 at both ends, both of which are toothed pulleys. The first pulley 2204 is connected to a belt tensioning block 2108 via a first belt 2203 and is fixed by a belt pressure block 2107. The second pulley 2207 is connected to the belt fixing part of the third-stage material handling unit 230 via a second belt 2208, both of which are toothed belts that mesh with their corresponding pulleys. This structure allows the second-stage telescopic unit 220 to move synchronously with the third-stage material handling unit 230 during telescopic movement.

[0045] In some embodiments, the telescopic substrate 2201 is further provided with zeroing detection plates 2202 on both sides, which are used to detect whether the secondary telescopic unit 220 has been extended or retracted into place.

[0046] In some embodiments, the three-stage material handling unit 230 includes a material handling base plate 2301 and a belt fixing part and a motor mounting plate 2306 mounted on it. A drive motor 2310 is mounted on one side of the motor mounting plate 2306, and a gear set formed by the meshing of multiple gears 2305 is mounted on the other side. One of the gears 2305 is fixedly connected to the rotating end of the motor. Both ends of the gear set are used to drive the material handling claw 2302 to rotate and handle material. A material handling sensor is mounted on the material handling claw 2302. The material handling base plate 2301 is also provided with a position sensor 2303 for detecting whether the material handling claw 2302 has retracted into place. A side plate 2307 is fixedly mounted on each side of the material handling base plate 2301. A material handling pulley 2308 and a material handling guide block 2309 are mounted on the inner side of each side plate 2307 for sliding connection with the secondary telescopic unit 220. The position sensor 2303 and the drive motor 2310 are connected to the controller.

[0047] The structure of the belt fixing part is the same as that of the tensioning unit. The way the second pulley 2207 is fixed is the same as the way the first pulley is fixed in the tensioning unit. The two have the same structure, which facilitates synchronous movement and makes it easy to replace parts when the equipment is damaged.

[0048] In some embodiments, a material handling cable chain 2311 for mounting wire harnesses is also installed on the material handling substrate 2301.

[0049] In some embodiments, the material picking substrate 2301 is further provided with a material picking limit block 2304 for limiting the rotation angle of the material picking claw 2302.

[0050] In some embodiments, the material picking base plate 2301 is further provided with two material picking claws 2302 for picking up materials, and the two material picking claws 2302 are respectively located on both sides of the gear set.

[0051] Working principle of material handling mechanism 20: Material 60 from Figure 1 The process of conveying material 60 from position B to position C is as follows: When the controller determines that material 60 has reached position B, it controls the drive motor 2310 to work, which drives the two picking claws 2302 to rotate and align with the motor mounting plate 2306 via a gear set. Since material 60 has slots that mate with the structure of the picking claws 2302, when the picking claws 2302 rotate and hook onto material 60, the picking sensor transmits the information to the controller. The controller then controls the motor 2114 to work. The motor 2114 meshes with the rack 2206 via a transmission gear set, driving the secondary telescopic unit 220 to move. Since the secondary telescopic unit 220 is connected to the primary transmission unit 210 via a first belt 2203 and to the tertiary picking unit 230 via a second belt 2208, the primary transmission unit 210 drives the secondary telescopic unit 220 and the tertiary picking unit 230 to extend and retract simultaneously until material 60 is moved from position B to position C. Figure 1 The material is transported from position B to position C. After reaching the set position, the picking claw 2302 returns to its original position. When the position sensor 2303 detects that the picking claw has returned to its original position, it transmits the information to the controller. The controller drives the two picking claws 2302 to rotate back to their original angle via the drive motor 2310.

[0052] This application can simultaneously drive the secondary telescopic unit 220 and the tertiary material handling unit 230 to extend and retract at the same time through the primary transmission unit 210. Compared with the prior art which requires two drives, this saves one drive, thereby reducing the overall cost of the device and simplifying the complexity of the device.

[0053] The structure provided in this application allows the primary transmission unit 210 to simultaneously drive the secondary telescopic unit 220 and the tertiary material handling unit 230 to extend or retract to the left or right, thereby enabling bidirectional access of the primary material handling mechanism 20.

[0054] The No. 1 lifting mechanism 30 and the No. 2 lifting mechanism 40 are the same.

[0055] The first lifting mechanism 30 includes a lifting frame and a lifting cylinder assembly 303, a lifting sensor 302, and a throttle valve 306 mounted on top of it. The throttle valve 306 is used to control the airflow of the lifting cylinder assembly, thereby controlling the extension and retraction speed of the cylinders in the lifting cylinder assembly 303 to improve the stability of the equipment. The lifting sensor 302 is used to detect whether the material 60 has completely entered the position set by the first lifting mechanism 30. The cylinder signal of the lifting cylinder assembly 303 is connected to the cylinder control valve island 117. The cylinder control valve island 117 and the lifting sensor 302 are both connected to the controller.

[0056] In some embodiments, the lifting frame is a U-shaped frame, which is formed by sequentially connecting a first cantilever 301, a cantilever connecting plate 305, and a second cantilever 307.

[0057] In some embodiments, a roller mounting plate 308 is also connected to one side of the cantilever connecting plate 305.

[0058] In some embodiments, the connection between the first-layer push-pull actuator and the storage unit is as follows: lifting cylinders a5 and a6 are respectively installed on the outer side of the first cantilever 301, and the first cantilever 301 is fixedly connected to the inner wall of the first slide rail connecting plate 111; lifting cylinders a7 and a8 are respectively installed on the outer side of the second cantilever 307, and the second cantilever 307 is also fixedly connected to the second slide rail connecting plate 120, thus fixing the first lifting mechanism 30 to the storage unit; a lifting cylinder a9 is fixedly installed on the outer side of the cantilever connecting plate 305; the first cantilever 301 and the second cantilever 307 are respectively connected to the front mechanism connecting plate 2103 and the fixing plate 2113 of the frame, so that the first-layer push-pull actuator is fixedly connected to the storage unit. Similarly, the second-layer push-pull actuator is also connected to the storage unit in the same way.

[0059] In some embodiments, the lifting frame is also provided with a cable chain groove 304 for mounting the material handling cable chain 2311. This makes the structure of the device more compact and saves overall space.

[0060] In some embodiments, the lifting cylinder assembly 303 includes a plurality of independently mounted lifting cylinders, each mounted on the outside of the lifting frame, for lifting the material 60.

[0061] In some embodiments, the lifting cylinder includes a cylinder 3303 and a connector 3304 disposed on one side thereof. The connector 3304 is connected to a throttle valve 306 via a pipeline, and the movable end of the cylinder 3303 is connected to a pulley mounting plate 3301 for mounting a pulley 3302.

[0062] Working principle of lifting mechanism 30: External handling equipment will move material 60 from to Figure 1The process of transporting material from position A to position B is as follows: The controller receives external information and controls the cylinder control valve island 117 to work. The cylinder control valve island 117 controls the lifting cylinder a9 to descend, facilitating the entry of material 60. At the same time, it controls the lifting cylinders a5, a6, a7, and a8 to rise, facilitating the sliding of material 60 through the pulleys 3302 of the aforementioned lifting cylinders. The aforementioned lifting cylinders also serve as limiters. When the lifting sensor 302 detects that material 60 has reached the set position, it transmits the data to the controller. The controller then controls the lifting cylinder a9 to rise, preventing material 60 from falling.

[0063] The present application has a lifting mechanism and a material handling mechanism that work together to form a push-pull actuator. Multiple lifting cylinders work together to form a material transport channel, while also limiting and protecting the material. The lifting cylinders integrate multiple functions by different installation positions, which greatly simplifies the structure of the equipment, improves the compactness of the structure, and saves space.

[0064] In some embodiments, the controller is a central control room on the production line or a separate control cabinet, as long as it can perform the above functions.

[0065] Example 1 An automated wafer aging test fixture storage and retrieval device is placed on one side of a shelf. Each shelf holds several layers of wafer testing machines 70. The wafer testing machines 70 are used to test the wafer material 60. Other mechanisms on the production line perform edge inspection, center positioning, and handling steps on the wafers. The wafer material 60 then clamps and secures the wafers before transferring them to a suitable location. Figure 1 At position A, other mechanisms will perform rotation, lifting, pushing, and pulling actions to achieve the corresponding directional positioning. The other mechanisms will push the material to position B. Position C represents the wafer testing machine 70, and position C is divided into multiple layers. The path for material 60 is as follows: untested material moves from position A to position B and then to position C. After testing, it returns from position C to position B, then from position B back to position A. At position A, other mechanisms will retrieve and supply the material. The working process of the first-layer push-pull actuator and the second-layer push-pull actuator is the same. One of them will now be described, and the specific working method is as follows: The controller receives an external signal and determines that the untested item has reached position A and needs to move to position B. The controller then activates the cylinder control valve island 117, which retracts the lifting cylinder a9 and simultaneously extends lifting cylinders a5, a6, a7, and a8 to facilitate the material 60 sliding into the pulley 3302 of the lifting cylinders. When the lifting sensor 302 detects that the material 60 has reached the set position, it transmits the data to the controller. The controller then retracts lifting cylinders a5, a6, a7, and a8 to prevent interference; simultaneously, it controls the... Lifting cylinders a9, a1, a2, a3, and a4 extend. Lifting cylinder a9 extends to prevent material 60 from falling. Lifting cylinders a1 and a2 extend to facilitate the sliding of material 60 from point B to point C in the first-layer push-pull actuator. Lifting cylinders a3 and a4 extend to facilitate the sliding of material 60 from point B to point C in the second-layer push-pull actuator. Controlling the lifting cylinders simultaneously controls the servo motor 116 to drive the first-layer push-pull actuator and the second-layer push-pull actuator to move up and down through the placement unit until material 60 reaches the set wafer testing machine 70 inlet.

[0066] The controller controls the drive motor 2310 to work, which drives the two picking claws 2302 to rotate and become flush with the motor mounting plate 2306 through the gear set. Since the material 60 has a slot that matches the structure of the picking claw 2302, when the picking claw 2302 rotates and hooks the material 60, the picking sensor transmits the information to the controller. The controller controls the motor 2114 to work. The motor 2114 meshes with the rack 2206 through the transmission gear set, driving the secondary telescopic unit 220 and the tertiary picking unit 230 to extend simultaneously until the material 60 is transported to position C (wafer testing machine 70). The controller controls the motor 2114 to work until the secondary telescopic unit 220 and the tertiary picking unit 230 extend and retract simultaneously, and the picking claw 2302 returns to its original position. When the controller receives a signal from the wafer tester 70 and determines that the material 60 has been tested, the material 60 that needs to be tested is pulled back. At this time, the controller drives the secondary telescopic unit 220 and the tertiary picking unit 230 to extend simultaneously through the motor 2114, and the picking claw 2302 rotates to pull the material 60 back. Then, the cylinder control valve island 117 controls the lifting cylinders a5, a6, a7, a8 and a9 to descend, so that the external equipment can slide the material 60 out of the pulley 3302 of the lifting cylinder. At this time, the material 60 returns from position B to position A and is carried away by the external equipment. Thus, a storage and retrieval cycle in the wafer tester 70 is completed.

[0067] Example 2 The difference between Example 2 and Example 1 is that the automatic storage and retrieval device for wafer aging test fixtures is placed between two placement racks. The running direction of the secondary telescopic unit 220 and the tertiary material handling unit 230 can be controlled according to the actual situation. Other operating conditions are the same as in Example 1, which can realize bidirectional storage and retrieval.

[0068] In summary, this invention achieves fully automated testing of materials by controlling the lifting mechanism and the push-pull actuator with a controller, saving manpower. Furthermore, by setting up the push-pull actuator, it enables multi-station, large-scale parallel testing, greatly improving testing efficiency.

[0069] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A wafer burn-in test fixture automated storage and retrieval device, characterized by: The application relates to a wafer testing device. The push-pull execution mechanism comprises a material taking mechanism and a jacking mechanism arranged around the material taking mechanism, the jacking mechanism is used for receiving materials, the material taking mechanism is used for storing the materials received by the jacking mechanism into a wafer testing machine for testing, and the materials are taken out and transported to the jacking mechanism after the testing is completed. The material taking mechanism comprises a first-stage transmission unit, a second-stage telescopic unit and a third-stage material taking unit, the third-stage material taking unit is used for grabbing materials, and the first-stage transmission unit is used for driving the second-stage telescopic unit and the third-stage material taking unit to move leftwards or rightwards simultaneously. The jacking mechanism comprises a jacking frame, a jacking cylinder group arranged above the jacking frame, a throttle valve and a jacking sensor used for detecting whether materials are in place, the cylinders of the jacking cylinder group are signal-connected to a cylinder control valve island, and the jacking sensors are signal-connected to a controller. The lifting mechanism comprises a main frame and a driving unit arranged on the main frame, slide rails are arranged on the two sides of the main frame, a material placing unit is arranged between the two slide rails, a plurality of push-pull execution mechanisms are required to be arranged on the material placing unit in layers to realize parallel storage and taking, the driving unit is used for driving the material placing unit to move up and down, and a buffer unit is further arranged at the bottom of the main frame. The number of the push-pull execution mechanisms is at least two, and the directions in which the plurality of push-pull execution mechanisms transport materials are the same or opposite.

2. The wafer burn-in test fixture automatic storage and retrieval device of claim 1, wherein: The material placing unit comprises a frame structure formed by sequentially surrounding an upper mounting plate, a first slide rail connecting plate, a lower mounting plate and a second slide rail connecting plate, the frame structure is used for arranging the first-layer push-pull execution mechanism and the second-layer push-pull execution mechanism, the upper mounting plate and the lower mounting plate are provided with a plurality of jacking cylinders, the first slide rail connecting plate and the second slide rail connecting plate are slidably connected with the slide rails on the two sides respectively, and the material placing unit is further provided with a cylinder control valve island used for controlling the extension and retraction of the jacking cylinders, and the cylinder control valve island is signal-connected to the controller.

3. The wafer burn-in test fixture automatic storage and retrieval device of claim 1, wherein: The first-stage transmission unit comprises a frame, a tensioning unit and a transmission gear set arranged on the frame, the transmission gear set is fixedly connected to the rotating end of a transmission motor, the frame is provided with a transmission pulley and a guide block used for slidably connecting with the second-stage telescopic unit on the two sides, and a position sensor used for detecting whether materials are in place is further arranged outside the frame, and the position sensor and the transmission motor are signal-connected to the controller.

4. The wafer burn-in test fixture automatic storage and retrieval device of claim 3, wherein: The transmission gear set comprises a plurality of large gears and a plurality of small gears, the large gears and the small gears are arranged alternately, and adjacent two gears are meshed with each other, and one of the large gears is fixedly connected to the rotating end of the transmission motor.

5. The automatic wafer burn-in test fixture storage and retrieval apparatus of claim 3 wherein: The second-stage telescopic unit comprises a telescopic base plate and a rack arranged above the telescopic base plate, the rack is meshed with the transmission gear set in the first-stage transmission unit, the two sides of the rack are provided with a first sliding groove slidably connected with the transmission pulley, the two sides of the first sliding groove are respectively provided with one telescopic limiting block used for limiting the relative position of the first-stage transmission unit and the second-stage telescopic unit, and the two sides of the telescopic base plate are further provided with a second sliding groove slidably connected with a material taking pulley; the two ends of the telescopic base plate are further rotatably connected with a first belt pulley and a second belt pulley, the first belt pulley and the second belt pulley are both toothed belt pulleys; the first belt pulley is connected to the tensioning unit through a first toothed belt, and the second belt pulley is connected to a belt fixing part of the third-stage material taking unit through a second toothed belt.

6. The automatic wafer burn-in test fixture storage and retrieval apparatus of claim 5 wherein: The third-order material taking unit comprises a material taking base plate, a belt fixing part mounted above the material taking base plate, and a motor mounting plate, one side of the motor mounting plate is provided with a driving motor, and the other side is provided with a gear set formed by a plurality of gears meshing with each other, and one of the gears is fixedly connected to a rotating end of the motor, both ends of the gear set are used to drive a material taking claw to turn to take material, a material taking sensor for detecting a material taking state is mounted on the material taking claw, a position sensor for detecting whether the material taking claw is retracted in place is further arranged on the material taking base plate, one side plate is fixedly mounted on each side of the material taking base plate, a material taking pulley and a material taking guide block for sliding connection with the second-order telescopic unit are mounted on the inner side of each side plate, and the material taking sensor, the position sensor and the driving motor are signal connected to a controller.

7. The automatic wafer burn-in test fixture storage and retrieval device of claim 1, wherein: The jacking frame is a U-shaped frame formed by a first cantilever, a cantilever connecting plate and a second cantilever connected in sequence, the first cantilever is fixedly connected with the first slide rail connecting plate, the second cantilever is fixedly connected with the second slide rail connecting plate, and the first cantilever and the second cantilever are connected to the frame, so that the first layer push-pull actuator is fixedly connected with the storage unit.

Images