A push-to-pull ejector pin mechanism and semiconductor processing equipment

Abstract

This invention relates to the field of wafer processing equipment technology, and more particularly to a push-to-open ejector pin mechanism and semiconductor processing equipment. The mechanism includes a fixed base, an ejector pin body, a first sleeve, a second sleeve, and an elastic member. The fixed base is disposed on the inner wall of the process cavity and has a mounting groove. The ejector pin body is at least partially coaxially disposed within the mounting groove. The first sleeve is fixedly sleeved on the ejector pin body, and its outer side wall has a first snap-fit ​​portion. The second sleeve is movably sleeved on the ejector pin body and at least partially covers the first sleeve, and its inner side wall has a second snap-fit ​​portion. The elastic member is disposed within the mounting groove and abuts against the bottom end of the ejector pin body located within the mounting groove. This invention aims to design a novel connection structure between the ejector pin and the ejector pin seat, replacing the existing threaded fixing method, thereby avoiding the failure risk caused by thread wear and the problem of ceramic ejector pins breaking due to stress concentration during twisting.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and more particularly to a push-to-pull pin mechanism and semiconductor processing equipment. Background Technology

[0002] In etching equipment for semiconductor wafer processing, the wafer carrier base is typically fixed to a cavity base. To achieve automated wafer transfer, the carrier base has through holes, inside which is a vertically retractable ejector pin mechanism. During transfer, the ejector pin rises in a controlled manner, its tip passing through these holes to lift and receive the wafer; after transfer, the ejector pin descends to its lowest position, allowing the wafer to smoothly fall back onto the carrier base surface, thus completing the handover. However, the currently common method of fixing ejector pins and ejector pin holders with threads has significant drawbacks: the fine threads are prone to stripping after repeated tightening, causing the ejector pin to fail to reliably descend to the preset position; at the same time, the ceramic or sapphire ejector pin body experiences stress concentration when tightened, making it extremely prone to brittle breakage. To solve the above problems, this invention proposes a press-type insertion and removal ejector pin mechanism and a semiconductor processing device. Summary of the Invention

[0003] The purpose of this invention is to design a new connection method between the ejector pin and the ejector pin seat to replace the existing threaded fixing method, thereby avoiding the failure risk caused by thread wear and the problem of ceramic ejector pins breaking due to stress concentration during screwing.

[0004] This invention provides a push-to-pull ejector pin mechanism, comprising:

[0005] A fixed base is provided on the inner wall of the process cavity, and the fixed base has an axially recessed mounting groove extending from the top to the bottom.

[0006] The ejector pin body is at least partially coaxially disposed within the mounting groove;

[0007] The first set of components is fixedly sleeved on the body of the ejector pin, and the outer side wall of the first set of components is provided with a first snap-fit ​​portion extending radially outward.

[0008] The second set of components has one end connected and fixed to the side wall of the mounting groove. The end of the second set of components away from the side wall of the mounting groove is movably sleeved on the ejector pin body. The inner side wall of the second set of components is provided with a second snap-fit ​​portion extending radially inward. The second set of components covers at least part of the first set of components. The projection structure of the second snap-fit ​​portion at the bottom of the mounting groove at least partially overlaps with the projection structure of the first snap-fit ​​portion at the bottom of the mounting groove. When the ejector pin body is installed in the mounting groove, the second snap-fit ​​portion is positioned above the first snap-fit ​​portion and forms a blockage against the first snap-fit ​​portion to fix the ejector pin body.

[0009] An elastic member is disposed in the mounting groove and abuts against the bottom end of the ejector pin body. Under the action of pressing pressure, the ejector pin body causes the elastic member to undergo elastic deformation. After the pressing pressure on the ejector pin body is removed, the ejector pin body moves upward along the axial direction under the push of the elastic deformation force of the elastic member, and pushes the first locking part open and passes over the second locking part, thereby causing the ejector pin body to disengage from the mounting groove.

[0010] Optionally, the first set of components includes a first fixing seat fixed on the ejector pin body, and two first elastic clamping arms connected to the first fixing seat, wherein the outer side walls of the two first elastic clamping arms are respectively provided with the first snap-fit ​​portion.

[0011] The first elastic clamping arm is circumferentially encircled outside the ejector pin body and is spaced apart from the ejector pin body, so that when the first locking part is pushed open and passes the second locking part, the first elastic clamping arm moves radially toward the ejector pin body.

[0012] Optionally, the second set of components includes a second fixing seat fixed on the side wall of the mounting groove, and two second elastic clamping arms connected to the second fixing seat, wherein the outer side walls of the two second elastic clamping arms are respectively provided with the second snap-fit ​​portion;

[0013] The second elastic clamping arm is circumferentially disposed outside the ejector pin body, so that when the first latching portion is pushed open and passes the second latching portion, the second elastic clamping arm moves radially away from the ejector pin body.

[0014] Optionally, each of the first elastic clamping arms is provided with M first locking parts, and the M first locking parts are arranged sequentially from the end of the first elastic clamping arm away from the first fixed base to the end closer to the first fixed base;

[0015] Each of the second elastic clamping arms is provided with M second locking parts. The M second locking parts are arranged sequentially from the end of the second elastic clamping arm away from the second fixed seat to the end closer to the second fixed seat. The M second locking parts and the M first locking parts are arranged one-to-one in the axial direction of the ejector pin body. M is a positive integer greater than or equal to 2.

[0016] Optionally, an elastic buffer structure is provided between the first elastic clamping arm and the first locking portion, the elastic buffer structure comprising:

[0017] A groove is provided on the side of the first elastic clamping arm facing the first snap-fit ​​portion;

[0018] A protrusion portion is provided in the first snap-fit ​​portion and is movably inserted into the groove portion;

[0019] The elastic part has one end fixed to the side of the protrusion away from the first snap-fit ​​part, and the other end fixed to the bottom wall of the groove part opposite to the first snap-fit ​​part.

[0020] And / or the elastic buffer structure is provided between the second elastic clamping arm and the second snap-fit ​​portion.

[0021] Optionally, when cutting along the axial direction of the ejector pin body, the cut surface of the first snap-fit ​​portion is in the form of a first trapezoidal structure, and the first included angle formed by the extension line of the inclined side of the first trapezoidal structure and the second snap-fit ​​portion abutting each other with the central axis of the first trapezoidal structure is greater than or equal to 20° and less than or equal to 65°.

[0022] Optionally, when cutting along the axial direction of the ejector body, the cut surface of the second snap-fit ​​portion is a second trapezoidal structure, and the second included angle formed by the extension line of the inclined side of the second trapezoidal structure and the first snap-fit ​​portion and the central axis of the second trapezoidal structure is greater than or equal to 20° and less than or equal to 65°, and the second included angle is greater than or equal to the first included angle.

[0023] Optionally, the ejector pin body is further provided with a limiting groove in an annular structure arranged around its circumference, the first sleeve is disposed in the limiting groove, and the sum of the radial length of the first sleeve and the radial length of the first snap-fit ​​part is equal to or less than the radial depth of the limiting groove.

[0024] Optionally, the ejector pin body includes a first pin body located outside the mounting groove and a second pin body located at least partially inside the mounting groove, wherein the limiting groove is provided on the second pin body and located inside the mounting groove;

[0025] The top end of the second needle body is provided with a threaded groove that is recessed towards the bottom end of the second needle body;

[0026] The bottom end of the first needle body is provided with a threaded rod extending away from the bottom end of the first needle body. The threaded rod is inserted into the threaded groove through a threaded engagement to connect the first needle body and the second needle body. The axial distance between the first needle body and the second needle body is adjusted by adjusting the depth of the threaded rod inserted into the threaded groove.

[0027] Optionally, the bottom end of the first needle body is provided with a first buffer, and the first buffer is sleeved on the threaded rod;

[0028] The top end of the second needle body is provided with a second buffer that is adapted to the first buffer, and the second buffer is provided with a through hole for the threaded rod to pass through.

[0029] Optionally, the elastic member includes:

[0030] The support plate is slidably disposed in the mounting groove along the axial direction of the mounting groove, and the support plate is abutting against the bottom end of the ejector pin body located in the mounting groove;

[0031] The telescopic component is fixedly connected at one end to the bottom of the support plate, and at the other end to the bottom wall of the mounting groove.

[0032] Optionally, the telescopic component includes a telescopic rod, a telescopic cylinder, and a telescopic spring. The telescopic cylinder is disposed on the bottom wall of the mounting groove. One end of the telescopic rod is fixed to the bottom of the support plate, and the other end is movably inserted into the telescopic cylinder. The telescopic spring is wound around the outside of the telescopic rod, and the two ends of the telescopic spring are respectively fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder.

[0033] Optionally, the top end of the support plate is provided with a first anti-rotation part that is recessed toward the bottom end of the support plate, and the groove of the first anti-rotation part is a frustum-shaped structure or a pyramid-shaped structure.

[0034] The bottom end of the ejector pin body is provided with a second anti-rotation part extending in a direction away from the bottom end of the ejector pin body. The second anti-rotation part abuts against the first anti-rotation part, and the structure of the second anti-rotation part is adapted to the structure of the first anti-rotation part, so as to restrict the rotation of the second anti-rotation part within the first anti-rotation part by the contact between the side wall of the first anti-rotation part and the second anti-rotation part.

[0035] Optionally, it also includes N third sets of components, where N is a positive integer greater than or equal to 1;

[0036] One end of the third set of components is connected and fixed to the side wall of the mounting groove, and the other end of the third set of components away from the side wall of the mounting groove is movably sleeved on the ejector pin body. The inner side wall of the third set of components is provided with a second snap-fit ​​portion extending radially inward, and the structure of the third set of components is the same as that of the second set of components.

[0037] N sets of third components are arranged at equal intervals from the second set of components toward the opening of the mounting groove, and are arranged on the same vertical line as the second set of components on the side wall of the mounting groove. When the ejector body moves out of the mounting groove, the ejector body, along with the first locking part, pushes open and passes past the second locking parts in the N sets of third components in sequence, so as to reduce the movement speed of the ejector body.

[0038] Optionally, the push-to-pull ejector pin mechanism further includes a guide tube disposed at the top end of the fixed base. The guide tube is arranged around the opening of the mounting groove and its cavity axis coincides with the axis of the mounting groove. The ejector pin body can be axially slidably inserted into the guide tube.

[0039] To achieve the above objectives, the present invention also provides a semiconductor processing apparatus, including a process cavity, a wafer carrier stage, and a push-to-pull pin mechanism disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The pin body of the push-to-pull pin mechanism is movably disposed within the through hole.

[0040] The beneficial effects of this invention are as follows:

[0041] This invention utilizes the elastic component within the fixed base to provide the reset power, and through the radial engagement and disengagement action between the first locking part on the first set of components and the second locking part on the second set of components, the ejector pin body can be locked or released step by step after being pressed. This avoids the failure risk caused by thread wear and reduces the problem of ceramic ejector pins breaking due to stress concentration during twisting. Attached Figure Description

[0042] Figure 1 This is a schematic diagram of the push-to-pull ejector pin mechanism according to an embodiment of the present invention;

[0043] Figure 2 This is a schematic diagram of the structure of the first set of components, the second set of components, and the ejector body in the push-to-pull ejector mechanism of this invention. Figure 1 ;

[0044] Figure 3 This is a schematic diagram of the structure of the first set of components, the second set of components, and the ejector body in the push-to-pull ejector mechanism of this invention. Figure 2 ;

[0045] Figure 4 This is a schematic diagram of the structure of the first set of components, the second set of components, and the ejector body in the push-to-pull ejector mechanism of this invention. Figure 3 ;

[0046] Figure 5 for Figure 4 An enlarged schematic diagram of the C structure in the diagram;

[0047] Figure 6 for Figure 2 A schematic diagram of the cross-sectional structure along the EE direction;

[0048] Figure 7 for Figure 1An enlarged schematic diagram of structure A in the middle.

[0049] Explanation of reference numerals in the attached figures:

[0050] 1. Fixed base; 2. Mounting groove; 3. Pin body; 31. First pin body; 32. Second pin body; 321. Limiting groove; 33. Threaded rod; 34. First buffer component; 35. Second buffer component; 4. Elastic component; 41. Support plate; 42. Telescopic component; 5. First set of fittings; 51. First fixed seat; 52. First elastic clamping arm; 6. Second set of fittings; 61. Second fixed seat; 62. Second elastic clamping arm; 7. First locking part; 8. Second locking part; 9. First anti-rotation part; 10. Third set of fittings; 11. Second anti-rotation part; 12. Guide tube; 13. Elastic buffer structure; 131. Boss part; 132. Groove part; 133. Elastic part. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0052] To address the problems existing in the prior art, embodiments of the present invention provide a press-type insertion and removal pin mechanism, such as... Figure 1 and Figure 2 As shown, it includes a fixed base 1, a pin body 3, a first set of components 5, a first locking part 7, a second set of components 6, a second locking part 8, and an elastic member 4.

[0053] In one embodiment, such as Figure 1 As shown, the fixing base 1 is disposed on the inner wall of the process cavity, and the fixing base 1 has a mounting groove 2 recessed axially from the top to the bottom; it is worth noting that the recessed direction of the mounting groove 2 is in the direction of... Figure 1 In the example, it is along the vertical direction.

[0054] In one embodiment, such as Figure 1 As shown, the ejector pin body 3 is at least partially coaxially disposed within the mounting groove 2; Figure 1In this embodiment, the ejector pin body 3 is vertically disposed within the mounting groove 2.

[0055] In one embodiment, such as Figure 1 and Figure 2 As shown, the first sleeve 5 is fixedly sleeved on the outside of the ejector body 3. The outer side wall of the first sleeve 5 is provided with a first snap-fit ​​portion 7 extending radially outward. Specifically, the first snap-fit ​​portion 7 is provided along the radial direction of the ejector body 3 and in a direction away from the outer side wall of the first sleeve 5.

[0056] In one embodiment, such as Figure 1 and Figure 2 As shown, one end of the second set of components 6 (in) Figure 1 In this embodiment, the left end of the second sleeve 6 is connected and fixed to the side wall of the mounting groove 2. The end of the second sleeve 6 away from the side wall of the mounting groove 2 is movably sleeved outside the ejector body 3 and at least partially covers the first sleeve 5. The inner side wall of the second sleeve 6 is provided with a second locking part 8 extending radially inward. Specifically, the second locking part 8 extends radially along the ejector body 3 and in a direction away from the inner side wall of the second sleeve 6; and the second sleeve 6 covers at least part of the first sleeve 5; the projection structure of the second locking part 8 at the bottom of the mounting groove 2 at least partially overlaps with the projection structure of the first locking part 7 at the bottom of the mounting groove 2, so that when the ejector body 3 is installed in the mounting groove 2, the second locking part 8 is located above the first locking part 7 and forms a block against the first locking part 7 to fix the ejector body 3.

[0057] In this embodiment, the overlapping projection structures of the first locking part 7 and the second locking part 8 at the bottom of the mounting groove 2 form a reliable axial locking mechanism. When the ejector body 3 is pressed downward, the first locking part 7 can open the second locking part 8 radially along the ejector body 3, achieving smooth over-travel action; at this time, the second locking part 8 forms a reverse locking block against the first locking part 7, thereby locking the ejector body 3 and the fixed base 1. It is worth noting that this process is the installation process of the ejector body 3, which can also be regarded as a coarse adjustment of the ejector body 3, first limiting the current height of the ejector body 3.

[0058] In one embodiment, such as Figure 1As shown, the elastic member 4 is disposed in the mounting groove 2 and abuts against the bottom end of the ejector pin body 3. Under the action of pressing pressure, the elastic member 4 will undergo elastic deformation. After the pressing pressure on the ejector pin body 3 is removed, the ejector pin body 3 will move upward along the axial direction under the push of the elastic deformation force of the elastic member 4, and push the first locking part 7 open and pass over the second locking part 8, thereby causing the ejector pin body 3 to disengage from the mounting groove 2.

[0059] In this embodiment, the elastic component 4 serves as a power source, converting the pressing force into stored elastic potential energy. After the pressure is released, the deformation recovery drives the ejector pin to rise smoothly, achieving an automatic reset function without the need for an external power source, significantly improving the convenience of operation and the reliability of the mechanism. Simultaneously, during the assembly and disassembly of the ejector pin body 3, the elastic deformation force of the elastic component 4 ensures that the ejector pin body 3 obtains sufficient kinetic energy to push the first locking part 7 open and pass over the second locking part 8, allowing the ejector pin body 3 to be removed from the fixed base 1. This structure improves the traditional installation method of the ejector pin body 3 and the fixed base 1, solving the failure risk caused by thread wear in the traditional installation method, as well as the problem of ceramic ejector pins breaking due to stress concentration during twisting.

[0060] It is worth noting that the force exerted on the ejector body 3 during installation is less than that during disassembly; that is, during installation, the elastic deformation of the elastic member 4 is very small, or the bottom end of the ejector body 3 just contacts the elastic member 4, or even does not contact it; during disassembly, the elastic member 4 undergoes greater elastic deformation due to the downward pressure of the ejector body 3, so that the ejector body 3 can be disengaged from the mounting groove 2.

[0061] In one embodiment, such as Figure 2 As shown, the first set of components 5 includes a first fixed base 51 and two first elastic clamping arms 52.

[0062] In one embodiment, such as Figure 2 As shown, the first fixing seat 51 is fixed to the ejector pin body 3. The fixing method between the first fixing seat 51 and the ejector pin body 3 can be screw fixing, but is not limited to screw fixing, and will not be elaborated here. At the same time, the first fixing seat 51 is not limited to a long strip plate structure, and will not be elaborated here.

[0063] In one embodiment, such as Figure 2 As shown, the two first elastic clamping arms 52 are connected to the first fixed base 51. The outer side walls of the two first elastic clamping arms 52 are respectively provided with the first snap-fit ​​portion 7.

[0064] In one embodiment, the shape of the first elastic clamping arm 52 in the radial cross section of the ejector body 3 can be an arc-shaped plate structure, but is not limited to an arc-shaped plate structure.

[0065] In one embodiment, the thickness of the first elastic clamping arm 52 extends from the end of the first elastic clamping arm 52 away from the first fixing base 51 to the end closer to the first fixing base 51 (i.e., ... Figure 2 The thickness is gradually reduced from right to left (as shown in the diagram). This design is intended to optimize stress distribution and prevent fatigue fracture caused by stress concentration in the first elastic clamping arm 52.

[0066] In one embodiment, the first latching portion 7 may be a part of the first elastic clamping arm 52; the first latching portion 7 and the first elastic clamping arm 52 may also be two separate parts. When the first latching portion 7 and the first elastic clamping arm 52 are integrally formed (for example, by stamping or milling, the trapezoidal protrusion of the first latching portion 7 is directly formed on the first elastic clamping arm 52, such as...), Figure 6 As shown, this simplifies the manufacturing process, improves structural integrity and mechanical strength, and avoids assembly errors, making it particularly suitable for scenarios requiring high-precision alignment. When it is an independent component (such as the first snap-fit ​​part 7 being connected to the first elastic clamping arm 52 via an elastic buffer structure 13, which will be described in detail later), the first snap-fit ​​part 7 can be radially fine-tuned in the ejector body 3 through the elastic buffer structure 13. This not only provides buffering to reduce impact noise during overtravel movements, but also allows for flexible adjustment of the snap-fit ​​spacing and force by replacing the first snap-fit ​​part 7 with different sizes, enhancing the adaptability of the mechanism to different working environments.

[0067] When the first locking part 7 and the first elastic clamping arm 52 are independently arranged, the shape of the first locking part 7 in the radial section of the ejector body 3 can be an arc-shaped plate structure, and the curvature of the first locking part 7 and the first elastic clamping arm 52 are preferably the same.

[0068] In one embodiment, such as Figure 2 As shown, the first elastic clamping arm 52 is circumferentially arranged around the outside of the ejector pin body 3 and is spaced apart from the ejector pin body 3. That is, the two first elastic clamping arms 52 and the first fixing seat 51 form a semi-enclosed structure sleeved on the outside of the ejector pin body 3, and there is a gap (not labeled) between the first elastic clamping arm 52 and the ejector pin body 3 so that when the first locking part 7 is pushed open and passes the second locking part 8, the first elastic clamping arm 52 moves radially toward the ejector pin body 3.

[0069] In this embodiment, the first elastic clamping arm 52 is provided with radial elastic movement space. When the ejector pin body 3 is pressed downward, and the first locking part 7 and the second locking part 8 contact and generate radial compressive force, the gap allows the first elastic clamping arm 52 to elastically contract towards the ejector pin body 3, thereby effectively buffering the rigid impact between the first locking part 7 and the second locking part 8, reducing movement noise and wear; while the elastic restoring force of the first elastic clamping arm 52 can drive the first locking part 7 to quickly reset, ensuring that when the elastic member 4 pushes the ejector pin upward, the first locking part 7 and the second locking part 8 form a reliable locking, realizing precise step-by-step locking of the ejector pin. This semi-enclosed joint gap design maintains the stable guidance of the first set of components 5 to the ejector pin body 3, and improves the durability and movement smoothness of the mechanism under frequent insertion and removal conditions through a flexible deformation mechanism.

[0070] In one embodiment, such as Figure 2 As shown, the second set of components 6 includes a second fixed base 61 and a second elastic clamping arm 62.

[0071] In one embodiment, such as Figure 2 As shown, the second fixing seat 61 is fixed on the side wall of the mounting groove 2. In one embodiment, the radial cross section of the second fixing seat 61 in the ejector body 3 is not limited to a long strip plate structure, which will not be described in detail here.

[0072] In one embodiment, such as Figure 2 As shown, the two second elastic clamping arms 62 are respectively disposed on opposite ends of the second fixed base 61 in the length direction. The outer side walls of the two second elastic clamping arms 62 are respectively provided with the second snap-fit ​​portion 8. The connection between the second elastic clamping arms 62 and the second fixed base 61 can be integrally formed or welded.

[0073] In one embodiment, the radial cross-sectional shape of the second elastic clamping arm 62 in the ejector body 3 can be an arc-shaped plate structure, but is not limited to an arc-shaped plate structure.

[0074] In one embodiment, the thickness of the second elastic clamping arm 62 extends from the end of the second elastic clamping arm 62 away from the second fixing base 61 to the end closer to the second fixing base 61 (i.e., ... Figure 2 The thickness is gradually reduced from left to right (as shown in the diagram). This design is intended to optimize stress distribution and prevent fatigue fracture caused by stress concentration in the second elastic clamping arm 62.

[0075] In one embodiment, the second latching portion 8 may be part of the second elastic clamping arm 62, or the second latching portion 8 and the second elastic clamping arm 62 may be separate parts; this design provides structural flexibility and functional optimization. When the second latching portion 8 and the second elastic clamping arm 62 are integrally formed (e.g., by stamping or milling directly forming the trapezoidal protrusion of the second latching portion 8 on the second elastic clamping arm 62, such as...), Figure 6 As shown, this simplifies the manufacturing process, enhances the rigidity and stability of the overall structure, and avoids assembly errors, making it particularly suitable for high-precision alignment scenarios. When it is an independent component (such as the second latching part 8 being connected to the second elastic clamping arm 62 via an elastic buffer structure 13, which will be described in detail later), the second latching part 8 can be radially fine-tuned through the elastic buffer structure 13. This provides buffering during overtravel motion to reduce impact noise and wear, and allows for flexible adjustment of the latching spacing and force by replacing latching parts of different sizes, enhancing the adaptability of the mechanism to different working environments.

[0076] When the second latching part 8 and the second elastic clamping arm 62 are independently arranged, the shape of the second latching part 8 is adapted to the shape of the first latching part 7 so that the second latching part 8 can effectively block the first latching part 7, which will not be described in detail here.

[0077] In one embodiment, such as Figure 2 As shown, the second elastic clamping arm 62 is disposed circumferentially outside the ejector pin body 3. The two second elastic clamping arms 62 form a semi-enclosed structure sleeved outside the ejector pin body 3, so that when the first locking part 7 is pushed open and passes the second locking part 8, the second elastic clamping arm 62 moves radially away from the ejector pin body 3.

[0078] In this embodiment, the second elastic clamping arm 62 provides the necessary radial elastic deformation space. When the first locking part 7 moves downward under the action of the ejector pin body 3 and contacts the second locking part 8, the second elastic clamping arm 62 elastically expands away from the ejector pin body 3, thereby significantly reducing the sliding resistance and contact wear between the first locking part 7 and the second locking part 8. The elastic restoring force of the second elastic clamping arm 62 can also drive the second locking part 8 to quickly reset, ensuring that when the elastic member 4 pushes the ejector pin upward, the second locking part 8 and the first locking part 7 form a reliable locking, achieving precise locking of the ejector pin body 3. This semi-enclosed design maintains the effective constraint of the second set of components 6 on the movement trajectory and improves the smoothness and durability of the mechanism under frequent insertion and removal conditions through a flexible deformation mechanism.

[0079] In one embodiment, the structure of the second latching portion 8 is adapted to the structure of the first latching portion 7 so that the second latching portion 8 can effectively block the first latching portion 7, which will not be described in detail here.

[0080] In one embodiment, only one first latching portion 7 is provided on a single first elastic clamping arm 52; and only one second latching portion 8 is provided on a single second elastic clamping arm 62.

[0081] In another embodiment, such as Figure 3 As shown, each of the first elastic clamping arms 52 is provided with M first locking parts 7, and the M first locking parts 7 are arranged sequentially from the end of the first elastic clamping arm 52 away from the first fixed base 51 to the end closer to the first fixed base 51; each of the second elastic clamping arms 62 is provided with M second locking parts 8, and the M second locking parts 8 are arranged sequentially from the end of the second elastic clamping arm 62 away from the second fixed base 61 to the end closer to the second fixed base 61, where M is a positive integer greater than or equal to 2; and the M second locking parts and the M first locking parts are arranged one-to-one in the axial direction of the ejector body, that is, the first locking parts 7 and the second locking parts 8 on the first elastic clamping arm 52 and the second elastic clamping arm 62 on the same side are arranged one-to-one in the axial direction of the ejector body 3. It can be understood that the number of first latching parts 7 provided on the same first elastic clamping arm 52 can be 2, 3, 4 or more, and the corresponding number of second latching parts 8 can also be set to 2, 3, 4 or more. It is worth noting that when setting, it is necessary to ensure that the number of first latching parts 7 provided on the first elastic clamping arm 52 is consistent with the number of second latching parts 8 provided on the second elastic clamping arm 62 on the same side.

[0082] In one embodiment, M first locking portions 7 on the same first elastic clamping arm 52 are arranged at the same height in the axial direction of the ejector body 3, that is, the M first locking portions 7 are located on the same radial horizontal plane of the ejector body 3, and the corresponding second locking portions 8 are adapted to the height of the first locking portions 7. It can be understood that, taking the inner bottom of the process cavity as a reference, assuming that the height of the first locking portion 7 is 6cm, then the height of the second locking portion 8 is 7cm; it should be noted that the height of the first locking portion 7 and the second locking portion 8 can be understood as the height of the central axis of the trapezoidal cross-section of the two (the cross-sectional structure of the first locking portion 7 and the second locking portion 8 will be described in detail later).

[0083] In this embodiment, M first locking portions 7 on the same first elastic clamping arm 52 are positioned at the same height along the axial direction of the ejector body 3 (which can be understood as all M first locking portions 7 being located on the same radial surface of the ejector body 3), and their corresponding second locking portions 8 are height-matched. The core advantage of this symmetrical alignment design is that it significantly improves the stability and durability of the mechanism through uniform load distribution and cooperative locking mechanism. Specifically, when the ejector body 3 moves axially, multiple first locking portions 7 located on the same radial surface of the ejector body 3 can simultaneously abut or disengage with multiple second locking portions 8 located on the same radial surface of the ejector body 3, avoiding stress concentration caused by unilateral contact due to height deviation, thereby reducing the risk of local wear and jamming; at the same time, the height matching of the first locking portions 7 and the second locking portions 8 ensures that the force direction of the first locking portions 7 and the second locking portions 8 is consistent when they contact, reducing the torsional effect of radial force on the elastic clamping arm, which is beneficial to maintaining the stability of the semi-enclosed structure. In addition, the simultaneous contact of multiple first snap-fit ​​parts 7 and multiple second snap-fit ​​parts 8 will also distribute the stress evenly, thereby reducing the wear of the first snap-fit ​​parts 7 and the second snap-fit ​​parts 8 and extending the service life of the equipment.

[0084] In one embodiment, M first engaging portions 7 on the same first elastic clamping arm 52 are disposed at different heights along the axial direction of the ejector pin body 3, for example, in Figure 3 In this embodiment, the axial height of the M first latching portions 7 increases or decreases gradually from left to right, and the corresponding M second latching portions 8 are in... Figure 3 In the embodiments, the height increases or decreases gradually from left to right. This can be understood as follows: when there are three first locking portions 7 on the same first elastic clamping arm 52, there are also three second locking portions 8 on the same second elastic clamping arm 62. When setting the height, assuming the heights of the three second locking portions 8 are 7cm, 6cm, and 5cm from right to left, and the ejector pin body 3 is installed in the mounting groove 2, then the heights of the corresponding three first locking portions 7 are set slightly lower than 7cm, 6cm, and 5cm from right to left. For ease of understanding, we can assume they can be 6cm, 5cm, and 4cm.

[0085] In this embodiment, the three first engaging portions 7 on the same first elastic clamping arm 52 are positioned at different heights along the axial direction of the ejector body 3 (e.g., 5cm, 6cm, and 7cm from left to right). Simultaneously, the three second engaging portions 8 on the corresponding second elastic clamping arm 62 are matched in reverse height order (e.g., 6cm, 5cm, and 4cm from right to left). This staggered height arrangement significantly optimizes the stability and structural reliability of the ejector body 3's movement through a phased blocking and load distribution mechanism. Specifically, when the ejector body 3 moves axially, the first engaging portions 7 and second engaging portions 8 with staggered heights participate in blocking in sequence: the first engaging portions 7 and second engaging portions 8 at the lower position contact and bear the initial impact load first, while the first engaging portions 7 and second engaging portions 8 at the middle and higher positions gradually share the pressure, avoiding rigid collisions and stress concentrations caused by the simultaneous engagement of multiple first engaging portions 7 and multiple second engaging portions 8.

[0086] In one embodiment, such as Figure 4 and Figure 5 As shown, an elastic buffer structure 13 is provided between the first elastic clamping arm 52 and the first locking part 7, or the elastic buffer structure 13 is provided between the second elastic clamping arm 62 and the second locking part 8.

[0087] In this embodiment, an elastic buffer structure is introduced between the first elastic clamping arm 52 or the second elastic clamping arm 62 and the corresponding locking part, so that the first locking part 7 or the second locking part 8 has a retractable fine-adjustment capability in the radial direction of the ejector body 3. Thus, when the first locking part 7 and the second locking part 8 push each other apart to perform overtravel movement, the elastic buffer structure 13 can significantly absorb impact energy and reduce rigid collision noise and wear. At the same time, the elastic buffer structure 13 with different elastic coefficients can be flexibly replaced according to the working conditions to adjust the locking force and the distance between the first locking part 7 and the first elastic clamping arm 52 or the second locking part 8 and the second elastic clamping arm 62. This avoids the risk of fatigue fracture caused by stress concentration in traditional integrated structures, and facilitates independent maintenance and replacement of the easily worn first locking part 7 and / or second locking part 8, greatly extending the overall service life of the mechanism and enhancing its adaptability to different process environments.

[0088] In another embodiment, such as Figure 4 and Figure 5As shown, the elastic buffer structure 13 is provided between the first elastic clamping arm 52 and the first locking part 7, and between the second elastic clamping arm 62 and the second locking part 8. This embodiment, compared to providing the elastic buffer structure 13 only between the first elastic clamping arm 52 and the first locking part 7, or only between the second elastic clamping arm 62 and the second locking part 8, has the advantage that by symmetrically configuring the double-sided radial elastic buffer structure, it achieves completely synchronous deformation and bidirectional energy absorption during the locking process, effectively avoiding uneven force and off-center load problems caused by unilateral extension and contraction, and significantly reducing the risk of pin tilting, jamming, and abnormal wear caused by asymmetrical deformation. Simultaneously, the synergistic effect of the double-sided elastic parts 133 allows for a more balanced distribution of impact loads, further reducing stress concentration, improving the system's motion stability, noise reduction effect, and overall fatigue life under frequent insertion and removal conditions, and ensuring that the first locking part 7 and the second locking part 8 maintain precise alignment during overtravel, thereby significantly enhancing the reliability and durability of the mechanism in high-precision environments such as semiconductors.

[0089] In one embodiment, such as Figure 4 and Figure 5 As shown, the elastic buffer structure 13 includes a boss portion 131, a groove portion 132, and an elastic portion 133; the boss portion 131 is disposed on the first snap-fit ​​portion 7 and is movably inserted into the groove portion 132; the groove portion 132 is disposed on the side of the first elastic clamping arm 52 facing the first snap-fit ​​portion 7; one end of the elastic portion 133 is fixed to the side of the boss portion 131 away from the first snap-fit ​​portion 7, and the other end is fixed to the bottom wall of the groove portion 132 opposite to the first snap-fit ​​portion 7.

[0090] In one embodiment, the elastic buffer structure 13 includes a boss portion 131, a groove portion 132, and an elastic portion 133; the boss portion 131 is disposed on the second latching portion 8 and movably inserted into the groove portion 132; the groove portion 132 is disposed on the side of the second elastic clamping arm 62 facing the second latching portion 8; one end of the elastic portion 133 is fixed to the side of the boss portion 131 away from the second latching portion 8, and the other end is fixed to the bottom wall of the groove portion 132 opposite to the second latching portion 8.

[0091] In this embodiment, the sliding fit between the boss portion 131 and the groove portion 132 provides a stable radial guide for the snap-fit ​​portion, ensuring accurate and unbiased overtravel action; the independent elastic portion 133 is dedicated to radial deformation, and its stiffness and stroke can be independently designed and replaced, making the snap-fit ​​force and buffering effect flexibly adjustable; the modular structure not only avoids the elastic element from directly bearing shear stress and thus extending its life, but also allows for individual maintenance and replacement of the vulnerable elastic portion 133 or snap-fit ​​portion, greatly reducing maintenance costs. At the same time, the standardized docking design ensures the consistency and reliability of batch assembly, significantly improving the durability, motion smoothness and adaptability to different process environments of the mechanism under high-frequency insertion and extraction conditions.

[0092] In one embodiment, the boss portion 131 is a guide post integrally formed with the first snap-fit ​​portion 7 or the second snap-fit ​​portion 8 or a slider structure that is assembled independently. The groove portion 132 is correspondingly configured as a guide blind hole or guide groove structure opened on the elastic clamping arm. The elastic portion 133 is selected from cylindrical compression springs, disc springs or high-performance elastomers (such as fluororubber, PEEK composite materials).

[0093] In one embodiment, the number of elastic portions 133 corresponding to the same boss portion 131 can be one, two, three or more.

[0094] In one embodiment, such as Figure 6 As shown, when cutting along the axial direction of the ejector body 3, the cut surface of the first snap-fit ​​part 7 is a first trapezoidal structure, and the first angle formed by the extension line of the inclined side of the first trapezoidal structure and the second snap-fit ​​part 8 abutting against each other and the central axis of the first trapezoidal structure is greater than or equal to 20° and less than or equal to 65°.

[0095] This embodiment achieves an optimal balance between locking and overtravel performance by designing the first locking part 7 as a trapezoidal structure (preferably an isosceles trapezoidal structure) with an inclination angle of 20° to 65°. The inclined edge provides a progressive guide slope, allowing the first locking part 7 and the second locking part 8 to form a smooth sliding transition rather than a rigid collision during contact and push-out, significantly reducing impact noise, contact wear, and stress concentration. The lower limit of 20° ensures sufficient mechanical strength and axial force, avoiding self-locking or excessive operating resistance caused by an excessively gentle slope, while the upper limit of 65° ensures the guidance of the slope and reduces the required push-out force, preventing the loss of buffering effect due to an excessively steep slope. This angle range has been engineering-verified, allowing the ejector pin body 3 to smoothly overtravel under the drive of the elastic member 4 while ensuring reliable locking, and at the same time dispersing contact stress to extend the fatigue life of the locking part, thus taking into account ease of operation, smooth movement, and structural durability.

[0096] In one embodiment, such as Figure 6As shown, when cutting along the axial direction of the ejector pin body 3, the cut surface of the second locking part 8 forms a second trapezoidal structure. The second included angle formed by the extension line of the inclined side of the second trapezoidal structure that abuts against the first locking part 7 and the central axis of the second trapezoidal structure is greater than or equal to 20° and less than or equal to 65°, and the second included angle is greater than or equal to the first included angle. In this embodiment, the setting of the second included angle has the same function as the setting of the first included angle, and will not be elaborated further here.

[0097] In one embodiment, the degrees of the first included angle and the second included angle can be set to be the same or different. Specifically, when the degrees of the first included angle and the second included angle are the same (for example, both are 30°), the trapezoidal inclined surfaces of the first locking part 7 and the second locking part 8 are perfectly symmetrically matched, achieving the maximum contact area and the most uniform stress distribution, significantly improving motion stability and reducing local wear, which is suitable for the high reliability requirements under standard working conditions; when the degrees of the first included angle and the second included angle are different (for example, one is 30° and the other is 35°), the first included angle (actively pushing side) is usually designed to be slightly smaller than the second included angle (passively receiving force side) to reduce initial contact resistance and operating force.

[0098] In one embodiment, such as Figure 7 As shown, the ejector pin body 3 is also provided with a limiting groove 321 in a ring structure arranged around its circumference. The first sleeve 5 is disposed in the limiting groove 321. The sum of the radial length of the first sleeve 5 and the radial length of the first snap-fit ​​part 7 is equal to or less than the radial depth of the limiting groove 321.

[0099] The configuration of this embodiment ensures that the outer contour of the first set of components 5 does not protrude from the outer wall of the ejector body 3, avoiding interference between the first set of components 5 and the side wall of the mounting groove 2 or the guide tube 12 (described later), allowing the ejector body 3 to move smoothly up and down. It also optimizes stress distribution, reduces stress concentration, and maintains the regularity of the ejector shape, facilitating stable sliding within the through hole of the wafer carrier stage. This significantly improves the assembly accuracy, motion reliability, and overall structural compactness of the mechanism. Secondly, the limiting groove 321 provides precise axial and circumferential positioning references, preventing the first set of components 5 from slipping or deflecting during frequent insertion and removal, ensuring that the first locking part 7 and the second locking part 8 are always aligned.

[0100] In one embodiment, the height of the cavity of the limiting groove 321 in the axial direction of the ejector body 3 is the same as the height of the first sleeve 5 in the axial direction of the ejector body 3, or the height of the cavity of the limiting groove 321 in the axial direction of the ejector body 3 is greater than the height of the first sleeve 5 in the axial direction of the ejector body 3 (e.g., Figure 1(As shown in the embodiment). This embodiment achieves an optimal balance between manufacturing precision and assembly / maintenance by allowing the axial height of the limiting groove 321 to flexibly match the axial height of the first set of components 5. Specifically, when the two heights are the same, it ensures that the first set of components 5 is fully embedded, the outer contour of the ejector body 3 is most regular, and the movement stability is optimal. When the height of the cavity of the limiting groove 321 in the axial direction of the ejector body 3 is greater than the height of the first set of components 5 in the axial direction of the ejector body 3, this reduces the stringent requirements for machining precision, avoids assembly stress caused by over-positioning, and facilitates the simplification of disassembly and maintenance processes by reserving gaps, or provides additional axial adjustment margin when needed, thereby significantly improving the engineering feasibility, manufacturing yield, and maintenance convenience of the technical solution.

[0101] In the above embodiment, by combining the first locking part 7, the second locking part 8 and the elastic member 4, after locking the ejector body 3 and the fixed base 1, in this embodiment, after the ejector body 3 is fixed to the fixed base 1, the ejector body 3 has a certain height, that is, this process can be regarded as a coarse adjustment of the height of the ejector body 3.

[0102] To further finely adjust the height of the ejector pin body 3, in one embodiment, such as Figure 1 and Figure 7 As shown, the ejector pin body 3 includes a first needle body 31 located outside the mounting groove 2 and a second needle body 32 located at least partially inside the mounting groove 2. The limiting groove 321 is provided on the second needle body 32 and located inside the mounting groove 2. The top end of the second needle body 32 is provided with a threaded groove recessed towards the bottom end of the second needle body 32. The bottom end of the first needle body 31 is provided with a threaded rod 33 extending away from the bottom end of the first needle body 31. The threaded rod 33 is inserted into the threaded groove through a threaded engagement, so that the first needle body 31 and the second needle body 32 are connected, and the axial distance between the first needle body 31 and the second needle body 32 is adjusted by adjusting the depth of the threaded rod 33 inserted into the threaded groove.

[0103] This embodiment, by splitting the ejector body 3 into a first pin body 31 and a second pin body 32 connected by threads, retains the core function of quick-plug insertion and removal while achieving precise fine-tuning of the total height of the ejector body 3. This allows the equipment to flexibly adapt to different wafer thicknesses, process parameter changes, or cumulative installation errors without replacing the entire ejector mechanism. The threaded adjustment structure is placed outside the mounting slot 2, allowing operators to directly observe the thread engagement length and adjustment stroke. The first pin body 31 can be screwed on using tools or manually without disassembling the cavity assembly, greatly improving debugging efficiency and maintainability. At the same time, it is convenient to set visible scale marks on the threaded rod 33 or the first pin body 31 to achieve quantitative recording and rapid reproduction of the adjustment amount. This transforms the traditional hidden adjustment into a visible and quantifiable online adjustment, significantly reducing errors and downtime caused by blind adjustment.

[0104] In one embodiment, such as Figure 1 As shown, the bottom end of the first needle body 31 is provided with a first buffer 34, and the first buffer 34 is sleeved on the threaded rod 33; the top end of the second needle body 32 is provided with a second buffer 35 that is adapted to the first buffer 34, and the second buffer 35 is provided with a through hole through which the threaded rod 33 passes.

[0105] This embodiment adds a first buffer 34 and a second buffer 35 between the threaded adjustment end faces, transforming the rigid contact between the first needle body 31 and the second needle body 32 during screwing into an elastic buffer contact. This effectively avoids stress concentration and brittle fracture caused by hard extrusion of the ceramic or sapphire first needle body 31 and the second needle body 32 due to end face compression. At the same time, the first buffer 34 and the second buffer 35 can absorb high-frequency vibrations during equipment operation, significantly reducing the risk of fretting wear and fatigue loosening of the threaded pair. This ensures long-term stable and reliable height position after screwing, retaining the convenience of thread fine-tuning while eliminating the hidden dangers of slippage and brittle fracture caused by direct force in traditional thread fixing.

[0106] In one embodiment, the first buffer 34 and the second buffer 35 can be high-performance polymer gaskets (such as PEEK, PTFE, or their composites), utilizing their excellent temperature resistance, chemical inertness, and elastic modulus to achieve flexible isolation between rigid threaded end faces; or they can be O-rings made of fluororubber or perfluoroether rubber, providing continuous cushioning and absorbing vibration through compression deformation; or they can be metal elastic washers (such as stainless steel wave washers or disc springs), providing pre-tightened elastic support while ensuring cleanliness; the specific selection needs to comprehensively consider the process temperature, cavity cleanliness level, buffer stiffness requirements, and material compatibility with ceramic / sapphire needles to achieve the optimal balance between preventing brittle fracture and avoiding the introduction of particulate contamination.

[0107] In one embodiment, such as Figure 1 As shown, the elastic member 4 includes a support plate 41 and a telescopic member 42.

[0108] In one embodiment, such as Figure 1 As shown, the support plate 41 is slidably disposed in the mounting groove 2 along the axial direction of the mounting groove 2, and the support plate 41 and the bottom end of the ejector pin body 3 located in the mounting groove 2 are abutted together. In this embodiment, the sliding fit between the side wall of the support plate 41 and the side wall of the mounting groove 2 provides stable radial constraint and guidance for the elastic member 4 and the ejector pin body 3, effectively preventing the ejector pin body 3 from radially shaking or swaying during the lifting process, ensuring that it always maintains accurate axial alignment, thereby avoiding scraping or jamming between the ejector pin and the through hole of the wafer carrier stage.

[0109] In one embodiment, such as Figure 1 As shown, one end of the telescopic member 42 is fixedly connected to the bottom of the support plate 41, and the other end is fixedly disposed on the bottom wall of the mounting groove 2. Under the action of pressing pressure, the ejector pin body 3 pushes the support plate towards the bottom wall of the mounting groove 2, thereby causing the telescopic member 42 to undergo elastic contraction deformation. After the pressing pressure on the ejector pin body 3 is removed, the support plate slides away from the bottom wall of the mounting groove 2 under the push of the elastic deformation force of the telescopic member 42, thereby driving the ejector pin body 3 to move upward along the axial direction. In this embodiment, the telescopic member 42 is directly connected between the support plate 41 and the bottom wall of the mounting groove 2, so that the elastic force is evenly transmitted to the ejector pin body 3 through the support plate 41. This avoids the stress concentration and fracture risk caused by the elastic element directly acting on the brittle ejector pin, and the sliding guide between the support plate 41 and the side wall of the mounting groove 2 ensures that the ejector pin lifting process is smooth and without swaying, preventing it from scratching or getting stuck with the through hole of the wafer carrier stage.

[0110] In one embodiment, the telescopic member 42 includes a telescopic rod, a telescopic cylinder, and a telescopic spring (not shown). The telescopic cylinder is disposed on the bottom wall of the mounting groove 2. One end of the telescopic rod is fixed to the bottom of the support plate 41, and the other end is movably inserted into the telescopic cylinder. The telescopic spring is wound around the outside of the telescopic rod, and the two ends of the telescopic spring are respectively fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder.

[0111] This embodiment employs a combined architecture of a telescopic rod, a telescopic cylinder, and an externally wound telescopic spring, achieving integrated optimization of guiding and energy storage functions. The nested cooperation of the telescopic rod and the telescopic cylinder provides reliable axial guidance for the telescopic spring, effectively suppressing lateral buckling and torsional deformation during compression and ensuring stable transmission of elastic force along the ejector pin axis. The externally wound configuration of the telescopic spring not only enhances heat dissipation, avoiding elastic attenuation caused by heat accumulation in high-temperature processes, but also facilitates online observation of the spring status and rapid replacement and maintenance, significantly improving maintainability. Simultaneously, the two ends of the telescopic spring are directly fixed to the outer walls of the telescopic rod and the telescopic cylinder, respectively, eliminating the complex connection structure of traditional built-in springs, resulting in faster elastic response and more compact assembly, thereby comprehensively improving the reliability, durability, and environmental adaptability of the elastic component 4.

[0112] In other embodiments, the telescopic member 42 may also be a separately configured spring (e.g., Figure 1 As shown in the examples, they will not be repeated here.

[0113] In one embodiment, such as Figure 1 and Figure 7 As shown, the top end of the support plate 41 is provided with a first anti-rotation part 9 recessed towards the bottom end of the support plate 41, and the groove of the first anti-rotation part 9 is a frustum-shaped structure or a pyramid-shaped structure; the bottom end of the ejector pin body 3 is provided with a second anti-rotation part 11 extending away from the bottom end of the ejector pin body 3, the second anti-rotation part 11 abuts against the first anti-rotation part 9, and the structure of the second anti-rotation part 11 is adapted to the structure of the first anti-rotation part 9, so that the rotation of the second anti-rotation part 11 within the first anti-rotation part 9 is restricted by the contact between the side wall of the first anti-rotation part 9 and the second anti-rotation part 11.

[0114] This embodiment achieves precise circumferential positioning of the ejector body 3 through a frustum or pyramidal anti-rotation structure between the support plate 41 and the ejector body 3. This effectively prevents the first locking part 7 and the second locking part 8 from misaligning, jamming, or even breaking due to rotation caused by lateral force or vibration during lifting and lowering. While fully preserving axial free sliding to achieve normal extension and retraction of the ejector, this structure provides a self-centering effect through conical surface mating, dispersing contact stress and significantly reducing the risk of fracture of the brittle ceramic ejector due to torsional stress concentration. This ensures that the locking mechanism maintains precise alignment over a long period of time, greatly improving the operational reliability, positioning accuracy, and service life of the ejector mechanism.

[0115] In one embodiment, the structure of the first anti-rotation part 9 and the second anti-rotation part 11 can be a multi-faceted structure such as a triangular frustum, a quadrangular frustum, or a hexagonal frustum, or a multi-faceted pyramidal structure such as a truncated cone, a quadrangular pyramid, or a hexagonal pyramid. Alternatively, in a simplified design, a non-circular cross-section column such as a D-shaped or polygonal (triangular, quadrilateral, or hexagonal) cross-section column can be used to fit with the corresponding cavity. Standard mechanical anti-rotation structures such as keyways or splines can even be used. The specific selection needs to comprehensively consider the anti-rotation accuracy requirements, processing costs, and the impact on the strength of the support plate 41 and the ejector pin body 3, so as to achieve the optimal balance between ensuring reliable circumferential locking and smooth axial sliding.

[0116] In one embodiment, such as Figure 1 As shown, the press-type insert-and-pull ejector pin mechanism further includes N third sleeve components 10. One end of each third sleeve component 10 is connected and fixed to the side wall of the mounting groove. The end of the third sleeve component 10 away from the side wall of the mounting groove is movably sleeved outside the ejector pin body 3. The inner side wall of the third sleeve component 10 is provided with a second locking portion 8 extending radially inward. The specific setting direction is consistent with the direction of the second locking portion 8 in the second sleeve component 6, which will not be described in detail here. The structure of the third sleeve component 10 is the same as the structure of the second sleeve component 6. N sets of third components 10 are arranged at equal intervals from the second set of components 6 toward the opening of the mounting groove 2, and are arranged on the same vertical line as the second set of components 6 on the side wall of the mounting groove 2. When the ejector body 3 moves out of the mounting groove 2, the ejector body 3, along with the first locking part 7, pushes open and passes the second locking part 8 in the N sets of third components 10 in sequence to reduce the movement speed of the ejector body 3, where N is a positive integer greater than or equal to 1.

[0117] This embodiment adds a third set of identical components 10 above the second set of components 6, forming a multi-level snap-fit ​​buffer system. When the ejector pin body 3 rises under the drive of the elastic component 4, it needs to push open and pass through multiple sets of second snap-fit ​​parts 8 in sequence, thereby decomposing the elastic potential energy released at one time into multiple stages of gradual consumption. This effectively slows down the ejector pin movement speed and prevents it from being ejected at high speed due to excessive instantaneous reset force, significantly reducing the risk of impact to the wafer or equipment. At the same time, the multi-level snap-fit ​​provides stepped damping, making the ejector pin lifting process more stable and controllable, and dispersing the impact load and wear of the single-level snap-fit ​​part, further extending the service life of the mechanism. It is especially suitable for semiconductor process environments with extremely high requirements for motion stability and positioning accuracy.

[0118] In one embodiment, the number of the third set of devices 10 can be one, two, three or more.

[0119] In one embodiment, such as Figure 1As shown, the push-type insertion and removal pin mechanism also includes a guide tube 12 disposed at the top end of the fixed base 1. The guide tube 12 is arranged around the opening of the mounting groove 2 and its cavity coincides with the axis of the mounting groove 2. The pin body 3 can be axially slidably inserted into the guide tube 12.

[0120] This embodiment provides an extended sliding guide channel for the ejector pin body 3 through the guide tube 12, which significantly enhances the radial constraint and stability of its axial movement. It effectively avoids the ejector pin from scraping or getting stuck with the wafer carrier stage through hole due to radial swaying caused by the reset impact of the elastic component 4 or external vibration during the lifting and lowering process. This completely solves the risk of brittle fracture of the ceramic ejector pin caused by stress concentration due to off-center loading. At the same time, the guide tube 12 covers the opening of the mounting groove 2, blocking the etching gas and particles in the process cavity from entering the internal locking mechanism. This prevents the elastic component 4 and the locking part from failing prematurely due to contamination or corrosion, ensuring the long-term reliability of the press-type insertion and removal mechanism in clean and corrosive environments. In addition, the precise sliding fit between the guide tube 12 and the ejector pin body 3 makes the movement smoother, reduces impact noise and wear, and ensures the perpendicularity of the ejector pin tip when it contacts the wafer. This significantly improves the positioning accuracy and safety of wafer handover, and comprehensively optimizes the durability and process adaptability of the mechanism.

[0121] In one embodiment, the guide tube 12 can be a thin-walled straight tube or a stepped sleeve. Its bottom end can be fixed to the top of the fixed base 1 by thread, welding or flange structure. The inner wall of the tube cavity is precision ground to reduce the friction coefficient and the surface roughness is controlled within 0.2μm. The top end can be provided with a chamfer or rounded corner structure to avoid scratching the ejector pin body 3.

[0122] To address the problems existing in the prior art, embodiments of the present invention also provide a semiconductor processing apparatus (not shown), including a process cavity, a wafer carrier stage, and a push-to-pull ejector pin mechanism disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body 3 of the push-to-pull ejector pin mechanism is movably disposed within the through hole.

[0123] It is worth noting that the semiconductor processing equipment includes, but is not limited to, resist stripping equipment, deposition equipment, and etching equipment. In these three types of semiconductor processing equipment, such as resist stripping, deposition, and etching, a push-type insertion and removal pin mechanism is set up. Its design advantages of no threads, low stress, and high cleanliness can effectively avoid the risk of slippage failure and brittle fracture of ceramic pins caused by traditional threaded fixing. It ensures that the pin can achieve smooth and reliable lifting and lowering movement in vacuum or corrosive atmosphere environments, thereby improving the positioning accuracy and process compatibility of wafer transfer, significantly extending the equipment maintenance cycle, and reducing operating costs.

[0124] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A press-type insert / remove ejector pin mechanism, characterized in that, include: A fixed base is provided on the inner wall of the process cavity, and the fixed base has an axially recessed mounting groove extending from the top to the bottom. The ejector pin body is at least partially coaxially disposed within the mounting groove; The first set of components is fixedly sleeved on the body of the ejector pin, and the outer side wall of the first set of components is provided with a first snap-fit ​​portion extending radially outward. The second set of components has one end connected and fixed to the side wall of the mounting groove. The end of the second set of components away from the side wall of the mounting groove is movably sleeved on the ejector pin body. The inner side wall of the second set of components is provided with a second snap-fit ​​portion extending radially inward. The second set of components covers at least part of the first set of components. The projection structure of the second snap-fit ​​portion at the bottom of the mounting groove at least partially overlaps with the projection structure of the first snap-fit ​​portion at the bottom of the mounting groove. When the ejector pin body is installed in the mounting groove, the second snap-fit ​​portion is positioned above the first snap-fit ​​portion and forms a blockage against the first snap-fit ​​portion to fix the ejector pin body. An elastic member is disposed in the mounting groove and abuts against the bottom end of the ejector pin body. Under the action of pressing pressure, the ejector pin body causes the elastic member to undergo elastic deformation. After the pressing pressure on the ejector pin body is removed, the ejector pin body moves upward along the axial direction under the push of the elastic deformation force of the elastic member, and pushes the first locking part open and passes over the second locking part, thereby causing the ejector pin body to disengage from the mounting groove.

2. The push-to-pull ejector pin mechanism according to claim 1, characterized in that, The first set of components includes a first fixing seat fixed on the ejector pin body, and two first elastic clamping arms connected to the first fixing seat. The outer side walls of the two first elastic clamping arms are respectively provided with the first snap-fit ​​portion. The first elastic clamping arm is circumferentially encircled outside the ejector pin body and is spaced apart from the ejector pin body, so that when the first locking part is pushed open and passes the second locking part, the first elastic clamping arm moves radially toward the ejector pin body.

3. The push-to-pull ejector pin mechanism according to claim 2, characterized in that, The second set of components includes a second fixing seat fixed on the side wall of the mounting groove, and two second elastic clamping arms connected to the second fixing seat. The outer side walls of the two second elastic clamping arms are respectively provided with the second snap-fit ​​portion. The second elastic clamping arm is circumferentially disposed outside the ejector pin body, so that when the first latching portion is pushed open and passes the second latching portion, the second elastic clamping arm moves radially away from the ejector pin body.

4. The push-to-pull ejector pin mechanism according to claim 3, characterized in that, Each of the first elastic clamping arms is provided with M first locking parts, and the M first locking parts are arranged sequentially from the end of the first elastic clamping arm away from the first fixed base to the end closer to the first fixed base; Each of the second elastic clamping arms is provided with M second locking parts. The M second locking parts are arranged sequentially from the end of the second elastic clamping arm away from the second fixed seat to the end closer to the second fixed seat. The M second locking parts and the M first locking parts are arranged one-to-one in the axial direction of the ejector pin body. M is a positive integer greater than or equal to 2.

5. The push-to-pull ejector pin mechanism according to claim 3, characterized in that, An elastic buffer structure is provided between the first elastic clamping arm and the first locking portion, the elastic buffer structure comprising: A groove is provided on the side of the first elastic clamping arm facing the first snap-fit ​​portion; A protrusion portion is provided in the first snap-fit ​​portion and is movably inserted into the groove portion; The elastic part has one end fixed to the side of the protrusion away from the first snap-fit ​​part, and the other end fixed to the bottom wall of the groove part opposite to the first snap-fit ​​part. And / or the elastic buffer structure is provided between the second elastic clamping arm and the second snap-fit ​​portion.

6. The push-to-pull ejector pin mechanism according to claim 1, characterized in that, When cutting along the axial direction of the ejector pin body, the cut surface of the first snap-fit ​​portion has a first trapezoidal structure, and the first angle formed by the extension line of the inclined side of the first trapezoidal structure and the second snap-fit ​​portion abutting against each other with the central axis of the first trapezoidal structure is greater than or equal to 20° and less than or equal to 65°.

7. The push-to-pull ejector pin mechanism according to claim 6, characterized in that, When cutting along the axial direction of the ejector pin body, the cut surface of the second snap-fit ​​portion is a second trapezoidal structure, and the second included angle formed by the extension line of the inclined side of the second trapezoidal structure and the first snap-fit ​​portion and the central axis of the second trapezoidal structure is greater than or equal to 20° and less than or equal to 65°, and the second included angle is greater than or equal to the first included angle.

8. The push-to-pull ejector pin mechanism according to claim 2, characterized in that, The ejector pin body is also provided with a limiting groove in an annular structure arranged around its circumference. The first sleeve is disposed in the limiting groove, and the sum of the radial length of the first sleeve and the radial length of the first snap-fit ​​part is equal to or less than the radial depth of the limiting groove.

9. The push-to-pull ejector pin mechanism according to claim 8, characterized in that, The ejector pin body includes a first pin body located outside the mounting groove and a second pin body located at least partially inside the mounting groove, and the limiting groove is provided on the second pin body and located inside the mounting groove; The top end of the second needle body is provided with a threaded groove that is recessed towards the bottom end of the second needle body; The bottom end of the first needle body is provided with a threaded rod extending away from the bottom end of the first needle body. The threaded rod is inserted into the threaded groove through a threaded engagement to connect the first needle body and the second needle body. The axial distance between the first needle body and the second needle body is adjusted by adjusting the depth of the threaded rod inserted into the threaded groove.

10. The push-to-pull ejector pin mechanism according to claim 9, characterized in that, The bottom end of the first needle body is provided with a first buffer, and the first buffer is sleeved on the threaded rod; The top end of the second needle body is provided with a second buffer that is adapted to the first buffer, and the second buffer is provided with a through hole for the threaded rod to pass through.

11. The push-to-pull ejector pin mechanism according to claim 1, characterized in that, The elastic member includes: The support plate is slidably disposed in the mounting groove along the axial direction of the mounting groove, and the support plate is abutting against the bottom end of the ejector pin body located in the mounting groove; The telescopic component is fixedly connected at one end to the bottom of the support plate, and at the other end to the bottom wall of the mounting groove.

12. The push-to-pull ejector pin mechanism according to claim 11, characterized in that, The telescopic component includes a telescopic rod, a telescopic cylinder, and a telescopic spring. The telescopic cylinder is located on the bottom wall of the mounting groove. One end of the telescopic rod is fixed to the bottom of the support plate, and the other end is movably inserted into the telescopic cylinder. The telescopic spring is wound around the outside of the telescopic rod, and both ends of the telescopic spring are respectively fixedly connected to the side wall of the telescopic rod and the outer side wall of the telescopic cylinder.

13. The push-to-pull ejector pin mechanism according to claim 11, characterized in that, The top end of the support plate is provided with a first anti-rotation part that is recessed towards the bottom end of the support plate, and the groove of the first anti-rotation part is a frustum-shaped structure or a pyramid-shaped structure. The bottom end of the ejector pin body is provided with a second anti-rotation part extending in a direction away from the bottom end of the ejector pin body. The second anti-rotation part abuts against the first anti-rotation part, and the structure of the second anti-rotation part is adapted to the structure of the first anti-rotation part, so as to restrict the rotation of the second anti-rotation part within the first anti-rotation part by the contact between the side wall of the first anti-rotation part and the second anti-rotation part.

14. The push-to-pull ejector pin mechanism according to claim 3, characterized in that, It also includes N third-set components, where N is a positive integer greater than or equal to 1; One end of the third set of components is connected and fixed to the side wall of the mounting groove, and the other end of the third set of components away from the side wall of the mounting groove is movably sleeved on the ejector pin body. The inner side wall of the third set of components is provided with a second snap-fit ​​portion extending radially inward, and the structure of the third set of components is the same as that of the second set of components. N sets of third components are arranged at equal intervals from the second set of components toward the opening of the mounting groove, and are arranged on the same vertical line as the second set of components on the side wall of the mounting groove. When the ejector body moves out of the mounting groove, the ejector body, along with the first locking part, pushes open and passes past the second locking parts in the N sets of third components in sequence, so as to reduce the movement speed of the ejector body.

15. The push-to-pull ejector pin mechanism according to claim 1, characterized in that, It also includes a guide tube disposed at the top end of the fixed base, the guide tube being arranged around the opening of the mounting groove and the axis of its cavity coinciding with the axis of the mounting groove, the ejector pin body being axially slidably inserted into the guide tube.

16. A semiconductor processing apparatus, characterized in that, The device includes a process cavity, a wafer carrier stage, and a push-to-pull ejector pin mechanism as described in any one of claims 1 to 15 disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body of the push-to-pull ejector pin mechanism is movably disposed within the through hole.

Images