Boat wetting method for evaporation equipment

Abstract

The invention discloses a boat wetting method for evaporation equipment, and relates to the technical field of vacuum evaporation. Comprising the following steps that an evaporation boat is taken, the surface of the evaporation boat is coated with a magnesium oxide coating, aluminum wires are preset on the surface of the magnesium oxide coating after solidification, the evaporation boat is placed in evaporation equipment and preheated till the aluminum wires are completely melted, after molten aluminum obtained after melting overlays the evaporation boat, oxygen is introduced till no molten aluminum remains on the surface of the evaporation boat, oxygen introduction is stopped, and the pretreated evaporation boat is obtained; starting a wire feeding mechanism of the evaporation equipment, feeding magnesium-containing aluminum wires, melting to obtain magnesium-containing aluminum liquid, paving the surface of the pretreated evaporation boat with the magnesium-containing aluminum liquid, wetting the boat, stopping wire feeding after finishing, and turning off an evaporation power supply after the aluminum liquid is completely evaporated; in the implementation steps, parameters such as the magnesium oxide coating thickness, the aluminum wire specification, the preheating rate, the oxygen introduction amount and the wire feeding speed are clearly designed, it is ensured that the boat wetting process is stably carried out, the spreading performance of molten aluminum on the surface of the evaporation boat is improved, and therefore the quality of an evaporation product is improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum evaporation technology, specifically a method for lubricating a vapor deposition equipment. Background Technology

[0002] The working principle of existing evaporation coating technology is to heat the evaporation source to vaporize and evaporate the metal in the evaporation source. Then, the metal atoms are deposited on the surface of the material substrate to form a composite thin film material. In this process, the evaporation boat is the core component that carries and evaporates the metal (such as aluminum). Its main components are PN and TiB2. It is mostly boat-shaped with a groove on the top. The metal wire is sent to the surface of the evaporation boat through the wire guide tube. After being heated and melted, the metal wire is evaporated and deposited on the surface of the substrate. Current processes face a key challenge: at high temperatures, a stable and dense γ-Al₂O₃ oxide film easily forms on the surface of molten aluminum. When this oxide film comes into contact with the evaporation boat, there is an extremely high interfacial energy, resulting in mutual repulsion. This prevents the atoms inside the molten aluminum from effectively bonding with the evaporation boat, leading to a non-wetting state of the molten aluminum. Specifically, this manifests as a small aluminum molten aluminum spreading area on the evaporation boat surface and a slow evaporation rate. To achieve rapid evaporation of the molten aluminum, existing technologies typically increase the evaporation temperature. However, with increased evaporation temperature, the corrosion rate of the evaporation boat by the molten aluminum accelerates significantly. On the one hand, this generates a large amount of unevaporable impurities, which deposit on the surface of the evaporation boat, affecting its subsequent performance. On the other hand, some impurities splash out, causing aluminum sputtering, which not only damages other components of the vapor deposition equipment but also reduces the quality of the vapor-deposited products, increases production losses and costs, and severely restricts the stability and efficiency of the vapor deposition process.

[0003] Therefore, there is an urgent need for a vapor deposition equipment lubrication method that can improve the wetting performance of molten aluminum and the evaporation boat and avoid the above-mentioned problems. Summary of the Invention

[0004] The purpose of this invention is to provide a method for lubricating a boat in a vapor deposition equipment, which is mainly used to improve the wetting performance between the aluminum liquid and the evaporation boat during the vapor deposition process, reduce the corrosion of the evaporation boat by the aluminum liquid and the phenomenon of aluminum splashing, and improve the efficiency and quality of vapor deposition.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: A method for wetting a boat in an evaporation coating equipment, the core of which lies in improving the wetting performance of the aluminum liquid and the evaporation boat by reacting metallic magnesium with the oxide film on the surface of the aluminum liquid and forming a substance with a specific lattice structure on the surface of the evaporation boat. The specific implementation principle is as follows: (1) Destroying the oxide film and reducing surface tension: By adding a certain proportion of metallic magnesium to the aluminum wire, under high temperature environment, metallic magnesium can react chemically with the γ-Al2O3 oxide film on the surface of the aluminum liquid, destroying the dense oxide film structure. At the same time, metallic magnesium can also reduce the surface tension of the aluminum liquid, thereby improving the spreading performance of the aluminum liquid on the surface of the evaporation boat, thus solving the problem of non-wetting of the aluminum liquid. (2) Reduce interfacial energy: Between the surface of the evaporation boat and the aluminum liquid, a layer of magnesium aluminum spinel (MgAl2O4) will be formed between the magnesium metal, aluminum and the related components of the evaporation boat. The lattice structure of magnesium aluminum spinel has a high degree of matching with the lattice of aluminum metal. When the two come into contact, the interfacial energy is low, which further promotes the spread of aluminum liquid on the surface of the evaporation boat and enhances the wetting effect. There is no need to increase the evaporation temperature to achieve rapid evaporation of aluminum liquid.

[0006] The specific implementation steps are as follows: Step 1: Take an evaporation boat, coat its surface with a magnesium oxide coating, and after curing, place aluminum wires on the surface of the magnesium oxide coating; Step 2: Take an evaporation boat with aluminum wires pre-placed on its surface, place it in a vapor deposition equipment, preheat it until the aluminum wires are completely melted, and after the molten aluminum liquid covers the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat, then stop introducing oxygen to obtain a pre-treated evaporation boat; Step 3: Start the wire feeding mechanism of the vapor deposition equipment, feed in magnesium-aluminum wire, melt it to obtain magnesium-aluminum liquid, spread it all over the surface of the pretreated evaporation boat to moisten the boat, stop wire feeding after the process is completed, wait for the aluminum liquid to evaporate completely, and then turn off the evaporation power supply.

[0007] Preferably, the thickness of the magnesium oxide coating in step 1 is 50μm-100μm; this magnesium oxide coating can provide the basic material for the subsequent formation of magnesium aluminum spinel, while initially protecting the surface of the evaporation boat. Preferably, the ratio of aluminum wire usage to the evaporation area of ​​the evaporation boat in step 1 is 0.1 g / cm². 2 ; Preferably, the diameter of the aluminum wire in step 1 is 1.5mm-2mm to ensure that the aluminum wire can be evenly distributed on the surface of the evaporation boat, in preparation for subsequent melting and spreading; Preferably, the power increment rate during preheating to complete melting of the aluminum wire in step 2 is 5%·min. -1 ; More preferably, the total power required for preheating is 7kW; Preferably, the oxygen introduction rate in step 2 is 500 sccm-2000 sccm; Preferably, the magnesium content in the magnesium-aluminum wire in step 3 is 0.5%-5%; Preferably, the wire feeding speed in step 3 is 200 mm / min-300 mm / min; Preferably, the time for moistening the boat in step 3 is 5 min-20 min; to ensure that magnesium reacts fully with the aluminum liquid and the substances on the surface of the evaporation boat to form a stable magnesium aluminum spinel layer; Compared with the prior art, the beneficial effects achieved by the present invention are: 1. Improved wetting performance: This invention adds metallic magnesium to aluminum wire to break the γ-Al2O3 oxide film on the surface of aluminum liquid, reduce the surface tension of aluminum liquid, and form a magnesium aluminum spinel layer between the evaporation boat and aluminum liquid to reduce the interfacial energy. This effectively solves the problem of non-wetting between aluminum liquid and evaporation boat, so that aluminum liquid can be evenly spread on the surface of evaporation boat. 2. Reduce evaporation temperature: Due to the improved wettability of molten aluminum, it is no longer necessary to increase the evaporation temperature to achieve rapid evaporation of molten aluminum. This avoids the accelerated corrosion of the evaporation boat by molten aluminum at high temperatures, thereby extending the service life of the evaporation boat and reducing equipment maintenance costs. 3. Reduce impurities and aluminum splashing: The lower evaporation temperature reduces the amount of impurities generated by the corrosion of the evaporation boat by the aluminum liquid. At the same time, the stable aluminum liquid spreading state avoids the aluminum splashing phenomenon caused by impurities, which improves the quality of the vapor-deposited products and reduces production losses. 4. Stable and controllable process: In the implementation steps of this invention, each parameter (such as magnesium oxide coating thickness, aluminum wire specifications, preheating rate, oxygen flow rate, wire feeding speed, etc.) is clear and controllable, which can ensure the stable progress of the lubrication process and facilitate its application in industrial production. Detailed Implementation

[0008] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0009] The dimensions of the evaporation boat are: length × width × height = 150 × 40 × 10 mm; The base film is made of PET material and was purchased from Toray Polyester Film Co., Ltd. Example 1: This example provides a method for lubricating a boat in an evaporation coating equipment, and for evaporating and coating a base film. The specific steps are as follows: Step 1, Pretreatment stage: Take an evaporation boat and evenly coat the surface of the evaporation boat with a 50μm thick magnesium oxide coating. After curing, place 5g of aluminum wire on the surface of the magnesium oxide coating. The diameter of the aluminum wire is controlled at 1.8mm. Step 2, Preheating and Reaction Stage: Take an evaporation boat with aluminum wires pre-placed on its surface and place it in a vapor deposition equipment. Preheat it to a total power of 7kW and a power increment rate of 5% per minute until the aluminum wires are completely melted. After the molten aluminum wires evenly cover the evaporation surface of the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat. Stop introducing oxygen to obtain the pretreated evaporation boat. The oxygen introduction rate is 2000 sccm. Step 3, Boat Lubrication and Finishing Stage: Start the wire feeding mechanism of the evaporation equipment and feed in magnesium-aluminum wire with a magnesium content of 0.8% at a wire feeding speed of 200 mm / min. Melt to obtain magnesium-aluminum liquid and spread the magnesium-aluminum liquid all over the surface of the pretreated evaporation boat. Maintain this state for 15 minutes to lubricate the boat. After lubrication, stop wire feeding and wait for the aluminum liquid to evaporate completely before turning off the evaporation power. Step 4, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0010] Example 2: This example provides a method for lubricating a boat in an evaporation coating equipment, and for evaporating and coating a base film. The specific steps are as follows: Step 1, Pretreatment stage: Take an evaporation boat and evenly coat the surface of the evaporation boat with a 50μm thick magnesium oxide coating. After curing, place 5g of aluminum wire on the surface of the magnesium oxide coating. The diameter of the aluminum wire is controlled at 1.8mm. Step 2, Preheating and Reaction Stage: Take an evaporation boat with aluminum wires pre-placed on its surface and place it in the vapor deposition equipment. Preheat it according to the total power ratio, with a power increment rate of 5% per minute. Preheat until the aluminum wires are completely melted. After the molten aluminum wires evenly cover the evaporation surface of the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat. Stop introducing oxygen to obtain the pretreated evaporation boat. The oxygen introduction rate is 500 sccm. Step 3, lubrication and finishing stage: Start the wire feeding mechanism of the evaporation equipment, feed in magnesium-aluminum wire with a magnesium content of 5% at a wire feeding speed of 200mm / min, melt to obtain magnesium-aluminum liquid, and spread the magnesium-aluminum liquid to cover the surface of the pretreated evaporation boat. Maintain this state for 15 minutes to lubricate the boat. After lubrication, stop wire feeding, wait for the aluminum liquid to evaporate completely, and then turn off the evaporation power supply. Step 4, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0011] Example 3: This example provides a method for lubricating a boat in an evaporation coating equipment, and for evaporating and coating a base film. The specific steps are as follows: Step 1, Pretreatment stage: Take an evaporation boat and evenly coat the surface of the evaporation boat with a 50μm thick magnesium oxide coating. After curing, place 5g of aluminum wire on the surface of the magnesium oxide coating. The diameter of the aluminum wire is controlled at 1.8mm. Step 2, Preheating and Reaction Stage: Take an evaporation boat with aluminum wires pre-placed on its surface and place it in the vapor deposition equipment. Preheat it according to the total power ratio, with a power increment rate of 5% per minute. Preheat until the aluminum wires are completely melted. After the molten aluminum wires evenly cover the evaporation surface of the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat. Stop introducing oxygen to obtain the pretreated evaporation boat. The oxygen introduction rate is 2000 sccm. Step 3, Boat Lubrication and Finishing Stage: Start the wire feeding mechanism of the evaporation equipment and feed in magnesium-aluminum wire with a magnesium content of 0.8% at a wire feeding speed of 200 mm / min. Melt to obtain magnesium-aluminum liquid and spread the magnesium-aluminum liquid all over the surface of the pretreated evaporation boat. Maintain this state for 10 minutes to lubricate the boat. After lubrication, stop wire feeding and wait for the aluminum liquid to evaporate completely before turning off the evaporation power. Step 4, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0012] Comparative Example 1: As a control experiment for Example 1, the difference is that: no magnesium oxide coating was applied, no oxygen was introduced in step 2, and the magnesium-aluminum wire in step 3 was changed to aluminum wire, including the following steps: Step 1, Preheating and Reaction Stage: Take an evaporation boat and pre-place 5g of aluminum wire on its surface. The diameter of the aluminum wire should be controlled at 1.8mm. Place the boat in the vapor deposition equipment and preheat it according to the total power ratio. The power increment rate is 5% per minute. Preheat until the aluminum wire is completely melted. Start the wire feeding mechanism of the vapor deposition equipment and feed the aluminum wire at a speed of 200mm / min. Melt the aluminum liquid so that it covers the surface of the evaporation boat. Maintain this state for 15 minutes to moisten the boat. After moistening the boat, stop feeding the wire and wait for the aluminum liquid to completely evaporate before turning off the evaporation power. Step 2, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating process of 1000m-10000m is completed.

[0013] Comparative Example 2: As a control experiment for Example 1, the difference is that no magnesium oxide coating was applied, and the experiment included the following steps: Step 1, Preheating and Reaction Stage: Take an evaporation boat and pre-place 5g of aluminum wire (diameter controlled at 1.8mm) on its surface. Place the boat in the vapor deposition equipment and preheat according to the total power ratio, with a power increment rate of 5% per minute. Preheat until the aluminum wire is completely melted. After the molten aluminum wire evenly covers the evaporation surface of the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat. Stop introducing oxygen to obtain the pretreated evaporation boat. The oxygen introduction rate is 2000 sccm. Step 2, Boat Lubrication and Finishing Stage: Start the wire feeding mechanism of the evaporation equipment and feed in magnesium-aluminum wire with a magnesium content of 0.8% at a wire feeding speed of 200 mm / min. Melt to obtain magnesium-aluminum liquid and spread the magnesium-aluminum liquid all over the surface of the pretreated evaporation boat. Maintain this state for 15 minutes to lubricate the boat. After lubrication, stop wire feeding and wait for the aluminum liquid to evaporate completely before turning off the evaporation power. Step 3, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0014] Comparative Example 3: As a control experiment for Example 1, the difference is that oxygen was not introduced in step 2, and the experiment included the following steps: Step 1, Pretreatment stage: Take an evaporation boat and evenly coat the surface of the evaporation boat with a 50μm thick magnesium oxide coating. After curing, place 5g of aluminum wire on the surface of the magnesium oxide coating. The diameter of the aluminum wire is controlled at 1.8mm. Step 2, Preheating and Reaction Stage: Take an evaporation boat with aluminum wires pre-placed on its surface and place it in the vapor deposition equipment. Preheat it according to the total power ratio, with the power increasing rate at 5% per minute. Preheat until the aluminum wires are completely melted, and wait for the molten aluminum formed by the melted aluminum wires to evenly cover the evaporation surface of the evaporation boat. Step 3, Boat Lubrication and Finishing Stage: Start the wire feeding mechanism of the evaporation equipment and feed in magnesium-aluminum wire with a magnesium content of 0.8% at a wire feeding speed of 200 mm / min. Melt to obtain magnesium-aluminum liquid and spread the magnesium-aluminum liquid all over the surface of the pretreated evaporation boat. Maintain this state for 15 minutes to lubricate the boat. After lubrication, stop wire feeding and wait for the aluminum liquid to evaporate completely before turning off the evaporation power. Step 4, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0015] Comparative Example 4: As a control experiment for Example 1, the difference is that the magnesium-aluminum wire in step 3 was changed to aluminum wire, including the following steps: Step 1, Pretreatment stage: Take an evaporation boat and evenly coat the surface of the evaporation boat with a 50μm thick magnesium oxide coating. After curing, place 5g of aluminum wire on the surface of the magnesium oxide coating. The diameter of the aluminum wire is controlled at 1.8mm. Step 2, Preheating and Reaction Stage: Take an evaporation boat with aluminum wires pre-placed on its surface and place it in the vapor deposition equipment. Preheat it according to the total power ratio, with a power increment rate of 5% per minute. Preheat until the aluminum wires are completely melted. After the molten aluminum wires evenly cover the evaporation surface of the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat. Stop introducing oxygen to obtain the pretreated evaporation boat. The oxygen introduction rate is 2000 sccm. Step 3, Boat Lubrication and Finishing Stage: Start the wire feeding mechanism of the evaporation equipment, feed in aluminum wire at a speed of 200 mm / min, melt it to obtain aluminum liquid, and spread the aluminum liquid to cover the surface of the pretreated evaporation boat. Maintain this state for 15 minutes to lubricate the boat. After lubrication, stop feeding the wire and wait for the aluminum liquid to evaporate completely before turning off the evaporation power. Step 4, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0016] Comparative Example 5: As a control experiment for Example 1, the difference is that the magnesium oxide thickness in step 1 was adjusted to 250 μm. The specific steps are as follows: Step 1, Pretreatment stage: Take an evaporation boat and evenly coat the surface of the evaporation boat with a magnesium oxide coating with a thickness of 250μm. After curing, place 5g of aluminum wire on the surface of the magnesium oxide coating. The diameter of the aluminum wire is controlled at 1.8mm. Step 2, Preheating and Reaction Stage: Take an evaporation boat with aluminum wires pre-placed on its surface and place it in the vapor deposition equipment. Preheat it according to the total power ratio, with a power increment rate of 5% per minute. Preheat until the aluminum wires are completely melted. After the molten aluminum wires evenly cover the evaporation surface of the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat. Stop introducing oxygen to obtain the pretreated evaporation boat. The oxygen introduction rate is 2000 sccm. Step 3, Boat Lubrication and Finishing Stage: Start the wire feeding mechanism of the evaporation equipment and feed in magnesium-aluminum wire with a magnesium content of 0.8% at a wire feeding speed of 200 mm / min. Melt to obtain magnesium-aluminum liquid and spread the magnesium-aluminum liquid all over the surface of the pretreated evaporation boat. Maintain this state for 15 minutes to lubricate the boat. After lubrication, stop wire feeding and wait for the aluminum liquid to evaporate completely before turning off the evaporation power. Step 4, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0017] Comparative Example 6: As a control experiment for Example 1, the difference is that the wire feeding speed was adjusted to 600 mm / min, and the specific steps are as follows: Step 1, Pretreatment stage: Take an evaporation boat and evenly coat the surface of the evaporation boat with a 50μm thick magnesium oxide coating. After curing, place 5g of aluminum wire on the surface of the magnesium oxide coating. The diameter of the aluminum wire is controlled at 1.8mm. Step 2, Preheating and Reaction Stage: Take an evaporation boat with aluminum wires pre-placed on its surface and place it in the vapor deposition equipment. Preheat it according to the total power ratio, with a power increment rate of 5% per minute. Preheat until the aluminum wires are completely melted. After the molten aluminum wires evenly cover the evaporation surface of the evaporation boat, introduce oxygen until there is no aluminum liquid residue on the surface of the evaporation boat. Stop introducing oxygen to obtain the pretreated evaporation boat. The oxygen introduction rate is 2000 sccm. Step 3, Boat Lubrication and Finishing Stage: Start the wire feeding mechanism of the evaporation equipment, feed in magnesium-aluminum wire with a magnesium content of 0.8% at a wire feeding speed of 600 mm / min, melt to obtain magnesium-aluminum liquid, and spread the magnesium-aluminum liquid all over the surface of the pretreated evaporation boat. Maintain this state for 15 minutes to lubricate the boat. After lubrication, stop wire feeding, wait for the aluminum liquid to evaporate completely, and then turn off the evaporation power supply. Step 4, Evaporation Coating Stage: A 6μm thick base film is fixed to the winding carriage. After unwinding and rewinding, tension is adjusted: 130N at the unwinding end and 100N at the rewinding end. The winding carriage is then evacuated to a vacuum of 5×10⁻⁶ after entering the evaporation chamber. -3 Pa, the cooling roller temperature is -20℃, the winding carriage is started, the speed is controlled at 10m / min, the evaporation boat is heated and aluminum wire is fed at a speed of 450mm / min, until the coating length of 1000m-10000m is completed.

[0018] Performance testing: 1. For the evaporation boat molten pools of 1000m to 10000m produced by coating in Examples 1-3 and Comparative Examples 1-6, the corrosion depth of the molten pool pits was measured with vernier calipers every 1000m, and the data were recorded in Table 1. 2. Take the coatings prepared in Examples 1-3 and Comparative Examples 1-6 and perform CCD pinhole detection. Using a backlight imaging method, a CCD line scan camera installed on the production line is used for real-time synchronous scanning to capture light leakage points and calculate the number of sputtering points and holes. The data is recorded in Table 2. Among them, the gray values ​​for sputtering and pinhole leakage are: sputtering points (-255~-40), leakage (40~200), and pinholes (200~255). 3. Take the coatings prepared in Examples 1-3 and Comparative Examples 1-6, and test their tensile strength and elongation at break using an electronic universal testing machine. The test conditions are: gauge length 10 mm, tensile strength 100 mm / min, width 15 mm, referring to GB / T1040.3-2006. The data are recorded in Table 2. Table 1

[0019] Table 2

[0020] Conclusions: The test data above show that Example 2, compared to Example 1, adjusted the magnesium content and oxygen flow rate. Due to the low oxygen environment, the pretreatment was incomplete, and excessive magnesium content would damage the magnesium oxide layer in the pretreatment, resulting in an increased corrosion depth compared to Example 1. Example 3, compared to Example 1, adjusted the boat wetting time, resulting in a less complete reaction and an increased corrosion depth. Comparative Example 1, as a control experiment of Example 1, did not perform the pretreatment in step 1, did not introduce oxygen in step 2, and changed the magnesium-aluminum wire in step 3 to aluminum wire. The corrosion was the fastest, and impurities were easily splashed, resulting in a significant decrease in the quality of the vapor-deposited product. Comparative Example 5 increased the magnesium oxide coating thickness. The coating was too thick and was easy to fall off during subsequent evaporation and heating, reducing its protective effect. Comparative Example 6 increased the wire feeding rate, which damaged the stability of the boat wetting, resulting in a decrease in the corrosion resistance of the evaporation boat and a decrease in the performance of the final coated product.

[0021] This invention forms an aluminum-magnesium spinel layer on the surface of the evaporation boat during the lubrication process. The increased aluminum melt spreading area during the coating process forms a protective layer in the evaporation tank, significantly improving the corrosion of the evaporation boat molten pool and significantly reducing the amount of aluminum sputtering in the composite aluminum film. At the same time, the lower operating temperature of the evaporation boat reduces the impact on the thermal radiation of the film surface, resulting in a significant improvement in the film elongation and tensile strength.

[0022] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A boat conditioning method for an evaporation apparatus, characterized by, The method comprises the following steps: Step 1: take an evaporation boat, brush magnesium oxide coating on the surface of the evaporation boat, and preposition aluminum wire on the surface of the magnesium oxide coating after solidification; Step 2: take the evaporation boat with the prepositioned aluminum wire, place it in an evaporation device, preheat until the aluminum wire is completely melted, then pass oxygen into the evaporation boat until there is no aluminum liquid residue on the surface of the evaporation boat, stop passing oxygen, and obtain a pretreated evaporation boat; Step 3: start the wire feeding mechanism of the evaporation device, feed magnesium-containing aluminum wire, melt to obtain magnesium-containing aluminum liquid, and spread the magnesium-containing aluminum liquid on the surface of the pretreated evaporation boat to wet the evaporation boat, then stop feeding the wire after the wetting is completed, wait until the aluminum liquid is completely evaporated, and then turn off the evaporation power.

2. The boat conditioning method of claim 1, wherein, The thickness of the magnesium oxide coating in step 1 is 50-100 μm.

3. The boat conditioning method of claim 1, wherein, The ratio of the amount of the aluminum wire used in the step 1 to the evaporation area of the evaporation boat is 0.1 g / cm 2 .

4. The boat conditioning method of claim 3, wherein, The amount of aluminum wire is 5-10 g, and the diameter of the aluminum wire is 1.5-2 mm.

5. The boat conditioning method of claim 1, wherein, The rate of increase of power in step 2 to preheat to complete melting of the aluminum wire is 5%·min -1 .

6. The boat conditioning method of claim 1, wherein, The oxygen flow rate in step 2 is 500-2000 sccm.

7. The method of claim 1, wherein the method further comprises: The magnesium content in the magnesium-containing aluminum wire in step 3 is 0.5-5%.

8. The boat conditioning method of claim 1, wherein, The wire feeding speed in step 3 is 200-300 mm / min.

9. The method of claim 1, wherein the method further comprises: The wetting time in step 3 is 5-20 min.

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