A method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion

Abstract

This invention discloses a method for identifying the origin of quartz based on multimodal signal fusion using scanning electron microscopy (SEM). It utilizes only one SEM equipped with an energy dispersive spectroscopy (EDS) probe, a cathodoluminescence (CAT) probe, and a backscattered electron diffraction (BSE) probe. By comprehensively employing multiple indicators, including the coefficient of variation of CL band width (a), the Al-Ti influence coefficient (b), the lattice orientation difference influence coefficient (c), and the relative gravity coefficient of inclusion type (d), the method determines whether a quartz sample is of hydrothermal or metamorphic origin. This invention achieves rapid and accurate identification of the origin of quartz.

Description

Technical Field

[0001] This invention relates to the field of geological and mineral exploration technology, and in particular to a method for identifying the genesis of quartz based on the fusion of multimodal signals from scanning electron microscopy. Background Technology

[0002] Quartz is ubiquitous in various rocks, and determining its origin is crucial for understanding the genesis and geological significance of the rocks in which it occurs. However, traditional petrographic methods, relying on optical microscopy to observe associated mineral assemblages, are highly subjective and cannot achieve micro-area analysis, such as analysis at a scale of <10 μm. Isotope analysis methods, such as oxygen isotope δ¹⁸O₂... 18 O, requires destructive sampling and has a long testing cycle (3-5 working days), and is costly, with a single sample costing over 500 yuan. Cathodoluminescence (CL) can reflect quartz growth zoning, but lacks supporting compositional and structural data; energy dispersive spectroscopy (EDS) can detect trace elements, but cannot distinguish genetically related crystal defect features.

[0003] In summary, existing methods for identifying the genesis of quartz suffer from several problems, including reliance on manual macroscopic observation, high costs, inability to perform non-destructive micro-area analysis, and low accuracy due to the reliance on a single identification indicator. Summary of the Invention

[0004] In view of the above analysis, the present invention aims to provide a method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion, in order to solve at least one of the problems in the prior art of identifying the origin of quartz, such as reliance on manual macroscopic observation, high cost, inability to achieve non-destructive analysis of micro-areas, and low accuracy of identification results due to the single identification index factor.

[0005] The objective of this invention is mainly achieved through the following technical solutions:

[0006] A method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion, comprising the following steps:

[0007] S1. Preparation of thin sections of quartz rock samples:

[0008] S2. Multimodal data were collected on the test area of ​​the rock thin section using a scanning electron microscope, and the following parameters were calculated: CL ring width variation coefficient a, Al-Ti influence coefficient b, lattice orientation difference influence coefficient c, and inclusion type relative gravity coefficient d.

[0009] S3. Based on the CL ring width variation coefficient a, Al-Ti influence coefficient b, lattice orientation difference influence coefficient c, and inclusion type relative gravity coefficient d, determine whether the quartz sample is of hydrothermal origin or metamorphic origin.

[0010] Further, step S2 includes:

[0011] S21. Using a backscattered electron probe, receive the backscattered signal of quartz in the area to be tested on the rock thin section to obtain the morphology and inclusion characteristics of all quartz grains in the area to be tested, and determine the type and quantity of inclusions in each quartz grain; based on the number of gas-liquid inclusions N1 and the number of metamorphic mineral inclusions N2 in all quartz grains in the area to be tested, calculate the relative gravity coefficient d of the inclusion type according to the following formula:

[0012] When N1 > N2, then ;

[0013] When N1≤N2, then d=0.

[0014] Furthermore, step S2 also includes:

[0015] S22. Using a cathodoluminescence probe, perform cathodoluminescence analysis on the same test area of ​​a rock thin section, measure the width of the CL annulus, and obtain the widest annulus W. max and the narrowest ring width W min The coefficient of variation a of the CL ring width is calculated according to the following formula:

[0016] a=W max / W min ;

[0017] Among them, W max The widest annular band W max ,um;W min The narrowest annular band width is um.

[0018] Furthermore, step S2 also includes:

[0019] S23. Using an energy dispersive spectroscopy (EDS) probe, perform energy dispersive spectroscopy (EDS) micro-area composition analysis on the same test area of ​​the rock thin section to determine the Al and Ti element contents; calculate the Al-Ti influence coefficient b according to the following formula:

[0020] b=Al 含量 / Ti 含量

[0021] Among them, Al 含量 The values ​​represent the Al content (%) from the energy dispersive spectroscopy (EDS) data of quartz rings, and the Ti content (%). 含量 The Ti content value is represented by the energy dispersive spectroscopy (EDS) data of the quartz ring zone.

[0022] Furthermore, step S2 also includes:

[0023] S24. Adjust the sample stage to switch the tilt angle of the rock thin section, and use the backscattered electron probe to focus on the area to be tested in the rock thin section again; after the focus is completed, use the backscattered electron diffraction probe to perform EBSD crystal structure analysis on the quartz particles in the area to be tested, and calculate the lattice orientation difference influence coefficient c of the quartz particles according to the following formula:

[0024] ;

[0025] Where n is the total number of quartz particles; α max The maximum lattice orientation difference among all quartz grains is α, °; min The minimum lattice orientation difference among all quartz grains, °; α i Let be the lattice orientation difference of the i-th quartz grain, in °.

[0026] Further, in step S3, the origin of the quartz sample is determined according to the following identification model formula:

[0027] If a+b+c+d≥Q, it is determined to be of hydrothermal origin;

[0028] If a+b+c+d<Q, it is determined to be of a metamorphic origin;

[0029] Where Q is the critical value for quartz to be of hydrothermal and metamorphic origin.

[0030] Furthermore, it also includes the steps of: establishing a database of measured quartz samples of known hydrothermal and metamorphic origins, and continuously updating the database with measured data for quartz samples of known origins. 实测 b 实测 c 实测 d 实测 The value is then determined based on the continuously updated measured value of a in the database. 实测 b 实测 c 实测 d 实测 The critical value Q is adjusted based on the value data.

[0031] Further, step S1 includes:

[0032] S11. Cut the collected quartz sample into cuboid sample blocks, and perform mechanical grinding and argon ion polishing on the cuboid sample blocks to make the surface smooth, and obtain rock thin sections with a size of 2cm×2cm.

[0033] S12. Spray a 5-10 nm carbon film onto the rock thin sections in a vacuum coating machine to complete the preparation of the rock thin sections.

[0034] Furthermore, the scanning electron microscope is equipped with a backscattered electron probe, an energy dispersive spectroscopy probe, a cathode luminescence probe, and a backscattered electron diffraction probe.

[0035] Furthermore, the scanning electron microscope is also equipped with a sample stage.

[0036] Furthermore, the sample stage includes:

[0037] The plug-in base has its lower part mounted on the mounting base;

[0038] A rotating support arm, the bottom of which is hinged to the upper part of the plug-in base;

[0039] The drive mechanism is connected to the rotary arm drive and is used to drive the rotary arm to rotate.

[0040] The substrate stage is connected to the top of the rotating support arm at its bottom center.

[0041] The center of gravity holding mechanism is connected to the bottom of the substrate stage. When the rotating arm is tilted relative to the insertion base, the center of gravity holding mechanism moves in conjunction with the rotating arm so that the center of gravity of the rotating arm and the substrate stage is kept in the vertical direction where the insertion base is located.

[0042] Furthermore, the plug-in base includes a plug-in platform and a plug-in component. The plug-in platform is hollow inside. The drive mechanism includes a linear drive motor and a drive gear plate. The plug-in platform is installed at one end of the linear drive motor. The drive shaft of the linear drive motor passes through the plug-in platform. The plug-in component is installed at the other end of the linear drive motor. The drive gear plate is connected to the drive shaft of the linear drive motor. A hinge shaft is horizontally inserted on the side of the plug-in platform. The hinge shaft is rotatable. The side wall of the hinge shaft inside the plug-in platform has a toothed groove. The drive gear plate meshes with the hinge shaft. The rotating support arm is connected to the part of the hinge shaft outside the plug-in platform.

[0043] Furthermore, the center-of-gravity maintenance mechanisms include:

[0044] The slide rail is connected to the bottom of the substrate stage and is symmetrically arranged about the axis of rotation with a rotating support arm;

[0045] Counterweight component, slidably connected to the slide rail;

[0046] The counterweight drive mechanism is located at the bottom of the base plate and is used to drive the counterweight to a predetermined position when the rotating arm rotates in a first direction or a second direction opposite to the first direction, so that the center of the base plate and the counterweight as a whole is kept in the vertical direction where the insertion base is located.

[0047] Furthermore, the slide rail includes a hanger and a loop track. One end of the hanger is connected to the loop track, and the other end of the hanger is connected to the bottom of the base plate. The counterweight is provided with a sliding hole and passes through the lower horizontal frame of the loop track, and can slide relative to the horizontal frame.

[0048] Furthermore, the counterweight drive mechanism includes a timing belt, pulleys, wheel frame, and a speed-changing gear set. Pulleys are provided on the outer sides of both ends of the slide rail. The pulleys are rotatably connected to the wheel frame. The wheel frame is connected to the base plate. The timing belt is meshed with the pulleys. The speed-changing gear set is driven by the timing belt. The hinge shaft is meshed with the speed-changing gear set. The timing belt is connected to the counterweight.

[0049] Furthermore, the gear set includes a first gear, a second gear, a shift shaft, a bushing, and a third gear. The first gear is sleeved on the outer end of the hinge shaft. The rotating support arm has a mounting hole. The third gear is disposed in the mounting hole. The shift shaft is rotatably connected to the rotating support arm. One end of the shift shaft passes through the mounting hole and connects with the third gear. The other end passes through the outside of the rotating support arm and extends to a position above the first gear. The second gear meshes with the first gear. The bushing is sleeved on the shift shaft and connected to the rotating support arm. The timing belt passes through the mounting hole and meshes with the third gear.

[0050] Furthermore, the substrate stage is also provided with a slide groove, and a clamping rail is provided in the slide groove. Two slide blocks are provided on the clamping rail, and the slide blocks can slide relative to the clamping rail. A positioning member is provided in the middle of the clamping rail. An elastic pull rope is provided between the positioning member and the slide block. One end of the elastic pull rope is connected to the positioning member, and the other end is connected to the slide block. A V-shaped latch is hinged on the slide block. The latch includes a latching side wing and a connecting side wing. A spring is connected to the connecting side wing, and the spring is also connected to the slide block. The latching side wing is located on the substrate stage surface, and the latching side wing can rotate about the connecting side wing as a rotation axis.

[0051] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0052] a) The quartz origin identification method based on scanning electron microscopy multimodal signal fusion provided by the present invention can complete the determination of quartz origin using only one scanning electron microscope equipped with an energy dispersive spectroscopy probe, a cathodic emission probe and a backscattered electron diffraction probe, which significantly improves work efficiency. The whole process analysis time for a single sample is less than 2 hours, which is about 80% shorter than the whole process analysis time of the isotope method.

[0053] (b) The quartz origin identification method based on scanning electron microscopy multimodal signal fusion provided by this invention comprehensively adopts multiple index factors, including the CL ring width variation coefficient (a), Al-Ti influence coefficient (b), lattice orientation difference influence coefficient (c), and inclusion type relative weight coefficient (d). By directly substituting the values ​​of multiple index factors into the proposed identification model formula, the identification results of quartz origin can be obtained quickly. This overcomes the problems of existing methods, such as reliance on manual macroscopic observation, high cost, inability to achieve micro-area non-destructive analysis, lack of standardized procedures, and poor accuracy of identification results due to single identification index factors. The accuracy of the identification results is significantly improved.

[0054] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages may become apparent from the description or be learned by practicing the invention. The objects and other advantages of this invention can be realized and obtained from what is particularly pointed out in the description and drawings. Attached Figure Description

[0055] The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts.

[0056] Figure 1 This is a flowchart of an operation method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion, as provided in Example 1.

[0057] Figure 2 This is a schematic diagram of the overall structure of the sample stage provided in Example 2;

[0058] Figure 3 for Figure 2 A schematic diagram of the sample stage from an upward viewing angle;

[0059] Figure 4 This is a schematic diagram of the center-of-gravity holding mechanism provided in Example 2;

[0060] Figure 5 for Figure 2 Enlarged structural diagram of region A in the middle;

[0061] Figure 6 for Figure 4 A magnified structural diagram of region B in the middle;

[0062] Figure 7 for Figure 4 A magnified structural diagram of region C in the middle;

[0063] Figure 8 This is a schematic diagram of the structure of the substrate stage provided in Example 2;

[0064] Figure 9 for Figure 8 A magnified structural diagram of region D in the middle.

[0065] Figure label:

[0066] 10. Plug-in base; 101. Plug-in platform; 102. Plug-in component; 11. Mounting base;

[0067] 20. Rotary support arm; 201. Mounting hole;

[0068] 30. Base plate stage; 31. Slide groove; 32. Clamping rail; 33. Slide block; 34. Positioning component; 35. Elastic pull rope; 36. Claw; 361. Snap-on side wing; 362. Connecting side wing;

[0069] 40. Center of gravity holding mechanism; 401. Slide rail; 4011. Hanger; 4012. Corrugated track; 402. Counterweight; 403. Synchronous belt; 4031. Pushing component; 4032. Through hole; 404. Pulley; 405. First speed change pulley; 406. Second speed change pulley; 407. Converter shaft; 408. Bushing; 409. Third speed change pulley;

[0070] 50. Linear drive motor; 51. Drive gear plate; 52. Hinge shaft. Detailed Implementation

[0071] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0072] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the term "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific circumstances.

[0073] Throughout the text, the terms “top,” “bottom,” “above,” “below,” and “on top” refer to the relative positions of components of the device, such as the relative positions of the top and bottom substrates within the device. It is understood that the device is multifunctional and independent of its spatial orientation.

[0074] Example 1

[0075] A specific embodiment of the present invention discloses a method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion, comprising steps S1 to S3:

[0076] S1. Prepare quartz sample rock thin sections.

[0077] S11. Cut the collected quartz sample into cuboid sample blocks, and perform mechanical grinding and argon ion polishing on the cuboid sample blocks to make the surface smooth, and obtain rock thin sections with a size of 2cm×2cm.

[0078] S12. Spray a 5-10 nm carbon film onto the prepared rock thin sheet in a vacuum coating machine to enhance conductivity, thus completing the preparation of the rock thin sheet.

[0079] S2. Multimodal data were collected on the test area of ​​the prepared rock thin section using a scanning electron microscope (SEM), and multiple index data were calculated, including the coefficient of variation of CL ring width a, Al-Ti influence coefficient b, lattice orientation difference influence coefficient c, and inclusion type relative gravity coefficient d.

[0080] The scanning electron microscope used in this embodiment is equipped with a backscattered electron probe, an energy dispersive spectroscopy probe, a cathode luminescence probe, and a backscattered electron diffraction probe.

[0081] The scanning electron microscope in this embodiment is also equipped with a sample stage. A thin sample section is placed on the sample stage, and double-sided tape can be used to adhere the sample section to the surface of the sample stage, awaiting testing.

[0082] S21. Using a backscattered electron probe, receive the backscattered signal of quartz in the area to be tested on the rock thin section to obtain the morphology and inclusion characteristics of all quartz grains in the area to be tested, and determine the type and quantity of inclusions in each quartz grain; based on the number of gas-liquid inclusions N1 and the number of metamorphic mineral inclusions N2 in all quartz grains in the area to be tested, calculate the relative gravity coefficient d of the inclusion type according to the following formula:

[0083] When N1 > N2, then ;

[0084] When N1≤N2, then d=0; in this case, it can be directly determined to be a cause of metamorphism.

[0085] In this step, backscattered electron (BSE) imaging was used with an accelerating voltage of 20 kV and a beam current of 10 nA to identify the types of inclusions in all quartz grains in the test area of ​​the rock thin section, and to count the total number of gas-liquid inclusions and the total number of metamorphic mineral inclusions in all quartz grains in the test area, which were N1 and N2, respectively.

[0086] In this embodiment, the minimum size of the area to be measured can reach 5 μm × 5 μm.

[0087] S22. Using a cathodoluminescence probe, perform cathodoluminescence analysis on the same area to be tested in the thin rock section at this location, measure the width of the CL ring, and calculate the coefficient of variation a of the CL ring width based on the ring width.

[0088] Specifically, using a cathodoluminescence probe, emission images are acquired in low-current mode to identify the quartz ring structure or diffuse emission structure. During cathodoluminescence analysis, the wavelength range is 300-800 nm, the current in low-current mode is 10 nA, and the accelerating voltage is 10 kV. Simultaneously, the width of the CL ring is measured using the measurement tools built into the scanning electron microscope, obtaining the widest ring W. max and the narrowest ring width Wmin Based on the widest annular band width W max and the narrowest ring width W min The coefficient of variation α of the CL annular band width is calculated according to the following formula:

[0089] a=W max / W min ;

[0090] Among them, W max The widest annular band W max ,um;W min The narrowest annular band width is um.

[0091] S23. Using an energy dispersive spectroscopy (EDS) probe, the same test area of ​​the rock thin section is subjected to energy dispersive spectroscopy (EDS) micro-area composition detection to determine the Al and Ti element contents, and the Al-Ti influence coefficient b is calculated based on the determined Al and Ti element contents.

[0092] Point analysis was performed on different regions of the CL zonation within the same analytical area of ​​a rock thin section using an energy dispersive spectroscopy (EDS) probe. An accelerating voltage of 20 kV was used during the test to obtain quartz zonation EDS data, and the Al and Ti elemental contents were determined. Based on the determined Al and Ti elemental contents, the Al-Ti influence coefficient b was calculated using the following formula:

[0093] b=Al 含量 / Ti 含量 ;

[0094] Among them, Al 含量 The values ​​represent the Al content (wt%) and Ti content from the quartz ring zone energy dispersive spectroscopy data. 含量 The Ti content value is represented by the energy dispersive spectroscopy (EDS) data of the quartz ring zone.

[0095] S24. Adjust the sample stage to switch the tilt angle of the rock thin section, and use the backscattered electron probe to focus on the area to be tested in the rock thin section again; after the aggregation is completed, use the backscattered electron diffraction probe to perform EBSD crystal structure analysis on the quartz particles in the area to be tested, and calculate the lattice orientation difference influence coefficient c of the quartz particles.

[0096] During the test, the system's built-in software records the position of the quartz particles. Specifically, in step 2.1, the system's built-in software has already acquired and recorded the position data of all quartz particles in the area to be tested. In the subsequent step 2.4, when switching to the backscattered electron probe, the position of the corresponding quartz particles in the rock thin section can be found again, thereby determining the area to be analyzed in the rock thin section during the analysis in steps S21 to S23, thus ensuring that the position of the area to be analyzed remains consistent under different probe tests.

[0097] The sample stage was adjusted to tilt the thin-film sample by 70°. The KAM pattern of the thin-film sample was acquired using a backscattered electron diffraction probe. Based on the KAM pattern, the lattice orientation difference data of all quartz particles was obtained. Based on the lattice orientation difference data of all quartz particles obtained from EBSD crystal structure analysis, the lattice orientation difference influence coefficient c of the quartz particles was calculated using the following formula:

[0098] ;

[0099] Where n is the total number of quartz particles; α max The maximum lattice orientation difference among all quartz grains is α, °; min The minimum lattice orientation difference among all quartz grains, °; α i Let be the lattice orientation difference of the i-th quartz grain, in °.

[0100] S3. Perform data fusion and discrimination on the multiple data indicators obtained in step S2: Based on the CL ring width variation coefficient a, Al-Ti influence coefficient b, lattice orientation difference influence coefficient c, and inclusion type relative gravity coefficient d obtained in step S2, determine whether the quartz sample is of hydrothermal origin or metamorphic origin.

[0101] Overall judgment principle:

[0102] When N1≤N2, then d=0; in this case, it can be directly determined to be a cause of metamorphism.

[0103] When N1 > N2, the origin of quartz is determined based on the values ​​of a, b, c, and d according to the following identification model formula:

[0104] If a+b+c+d≥Q, it is determined to be of hydrothermal origin;

[0105] If a+b+c+d<Q, it is determined to be of a metamorphic origin;

[0106] Where Q is the threshold for hydrothermal origin of quartz, that is, the critical value between hydrothermal and metamorphic origin of quartz. This critical value Q can be determined based on the measured values ​​of multiple quartz samples of known origin. 实测 b 实测 c 实测 d 实测 The value is determined, specifically, for quartz samples of known origin, a. 实测 b 实测 c 实测 d 实测 The values ​​are summed to obtain the summation value Q of multiple quartz samples. 实测 The summation value Q of multiple hydrothermal quartz samples 实测 The summation of Q from multiple metamorphic quartz samples 实测The values ​​will be divided into two sets of data, which will be distributed within two numerical ranges. The critical value Q is a value or a very small range between these two numerical ranges, even if there are individual samples with Q values ​​within the two sets of numerical ranges. 实测 Data overlap exists, and these data can be removed before determining the critical value Q. It is understood that the critical value Q in this embodiment is not an absolutely precise value; the more known the genetic origin of the quartz samples, the more accurate the critical value Q will be. Therefore, this embodiment also includes the following steps: establishing a measured database of known hydrothermal and metamorphic quartz samples, and continuously updating the database with measured values ​​of known genetic quartz samples. 实测 b 实测 c 实测 d 实测 The value is then determined based on the continuously updated measured value of a in the database. 实测 b 实测 c 实测 d 实测 The critical value Q is adjusted based on the value data.

[0107] For example, based on laboratory statistics of multiple quartz samples of known origin, according to a of quartz samples of different origins 实测 b 实测 c 实测 d 实测 The distribution range of the summation values ​​was determined, and the critical value Q was set to 7. Based on the determined critical value Q of 7, the method of this embodiment was used to identify five samples from Dalian, Liaoning; Xing'an League, Inner Mongolia; Yantai, Shandong; Qiandongnan, Guizhou; and Wenshan Prefecture, Yunnan. The N1 and N2 values ​​of the five samples were (11 and 6), (8 and 5), (6 and 4), (9 and 7), and (2 and 5), respectively. According to the overall judgment principle, only the quartz sample from Wenshan Prefecture, Yunnan, had N1=2 < N2=5. Therefore, the quartz sample from Wenshan Prefecture, Yunnan, was directly judged. The samples were determined to be of metamorphic origin. Furthermore, the sum of a+b+c+d values ​​of the quartz samples from the other four sites were 7.21, 7.06, 7.99, and 5.36, respectively. Since the critical value Q=7, the sum of a+b+c+d values ​​of the quartz samples from Dalian, Liaoning; Xing'an League, Inner Mongolia; and Yantai, Shandong were greater than 7, and these three quartz samples were determined to be of hydrothermal origin. The sum of a+b+c+d values ​​of the quartz sample from Qiandongnan, Guizhou was less than 7, and this quartz sample was determined to be of metamorphic origin.

[0108] Table 1. Statistical table of identification test results of quartz samples using the identification method of this application.

[0109]

[0110] Compared with existing technologies, the quartz origin identification method based on scanning electron microscopy multimodal signal fusion provided in this embodiment can achieve the following beneficial effects:

[0111] 1. The identification method of the present invention uses only one scanning electron microscope equipped with an energy dispersive spectroscopy probe, a cathodic emission probe, and a backscattered electron diffraction probe to determine the origin of quartz, which significantly improves work efficiency. The total analysis time for a single sample is less than 2 hours, which is about 80% shorter than the total analysis time of the isotope method.

[0112] 2. By comprehensively employing multiple indicators such as the coefficient of variation of CL ring width (a), the influence coefficient of Al-Ti (b), the influence coefficient of lattice orientation difference (c), and the relative gravity coefficient of inclusion type (d), the proposed identification model formula can be directly substituted into the values ​​of multiple indicators to quickly obtain the identification results of quartz origin. This overcomes the problems of existing methods, such as reliance on manual macroscopic observation, high cost, inability to achieve non-destructive analysis of micro-areas, lack of standardized procedures, and poor accuracy of identification results due to the single identification indicator.

[0113] 3. Compared with traditional identification methods, the identification method of this invention significantly improves the accuracy of the identification results. Based on test results of 100 known quartz samples, the overall accuracy of the identification results obtained using the method of this invention reaches 92%, while the accuracy of these samples obtained using traditional petrographic methods (microthermometry, fluid inclusion analysis) is approximately 70%. Furthermore, it achieves non-destructive micro-area analysis, with the smallest analytical area reaching 5 μm × 5 μm, without damaging the sample, facilitating subsequent experiments. Moreover, it has a lower testing cost compared to isotope analysis methods.

[0114] Example 2

[0115] In step S24 of Example 1, when performing EBSD crystal structure analysis, it is necessary to adjust the tilt angle of the sample stage so that the rock thin section to be tested is tilted at a predetermined angle in the SEM to optimize the interaction between the electron beam and the detector. However, there is currently no substrate stage that can control the autonomous tilting of the sample. At the same time, for large geological thin sections that exceed the size of existing substrate stages, the center of gravity of the sample shifts significantly when tilted, which can easily lead to image drift during SEM imaging and affect the accuracy of data acquisition.

[0116] To address the aforementioned issues, another specific embodiment of the present invention discloses a sample stage, specifically an EBSD testing sample stage for geological thin sections, which can be applied to the scanning electron microscope in Example 1. This sample stage not only accommodates large-sized rock thin section samples but also avoids significant center-of-gravity shift when tilted, preventing image drift during SEM imaging and improving data acquisition accuracy.

[0117] like Figures 2 to 9 As shown, the sample stage includes a mounting base 11, a plug-in base 10, a rotating support arm 20, a drive mechanism, a substrate stage 30, and a center of gravity holding mechanism 40.

[0118] The mounting base 11 serves as a support component for the test sample stage, and its top surface is provided with an insertion hole. The lower part of the insertion base 10 is inserted into the mounting base 11. The bottom of the rotating support arm 20 is hinged to the upper part of the insertion base 10. The drive mechanism is connected to the rotating support arm 20 to drive the rotating support arm 20 to rotate. The substrate stage 30 is connected to the rotating support arm 20, and the rotating support arm 20 is connected to the center of the substrate stage 30. The geological sheet to be tested is fixedly mounted on the substrate stage 30. The center of gravity holding mechanism 40 is located at the bottom of the substrate stage 30. When the rotating support arm 20 is tilted relative to the insertion base 10, the center of gravity holding mechanism 40 moves in association with the rotating support arm 20, so that the center of gravity of the rotating support arm 20 and the substrate stage 30 is kept in the vertical direction where the insertion base 10 is located, that is, the center of gravity of the rotating support arm 20 and the substrate stage 30 is located or substantially located on the axis of the cylindrical insertion base 10.

[0119] It should be noted that the center of gravity of the rotating support arm 20 and the base plate 30 as a whole can be located on the axis of the cylindrical plug-in base 10, or it can deviate slightly from the axis of the plug-in base 10. For example, after adjusting the center of gravity, the vertical distance between the center of gravity of the two as a whole and the axis of the plug-in base 10 does not exceed 3mm.

[0120] Compared with the prior art, the sample stage of this application uses a plug-in base 10 as a supporting component and is hinged to a rotating support arm 20. The drive mechanism is driven by the rotating support arm 20 to provide rotational power. The plug-in base 10 can be plugged into a mounting base 11, which has a disc structure and at least one insertion hole on its top surface. The plug-in base 10 can be plugged into the insertion hole. When the drive mechanism is activated, the rotating support arm 20 rotates around the hinge point, causing the centrally connected substrate stage 30 to tilt to a predetermined angle, 70°. At this time, the center of gravity holding mechanism 40 moves in association with the rotating support arm 20, so that the overall center of gravity of the rotating support arm 20 and the substrate stage 30 is always maintained in the vertical direction where the plug-in base 10 is located, preventing the center of gravity from shifting when large geological sections are tilted. By actively balancing the center of gravity, the center of gravity shift caused by the tilt of large samples is avoided, ensuring the stability of SEM imaging and improving the accuracy of data acquisition. The integrated drive and center of gravity adjustment functions can achieve stable tilting without manual intervention, simplifying the operation process.

[0121] In this embodiment, the area of ​​the sample supported by the substrate stage 30 is greater than 1 cm²; preferably, the area supporting the sample on the substrate stage 30 is a rectangular area, with a length and width of 4 cm, so that two larger geological sections can be mounted. By increasing the area of ​​the sample supported by the substrate stage 30, the testing of larger geological sections (i.e., large-size samples) can be accommodated.

[0122] In some optional embodiments, the plug-in base 10 includes a plug-in platform 101 and a plug-in member 102. The plug-in platform 101 is hollow inside, and the plug-in member 102 is a solid round rod. The driving mechanism includes a linear drive motor 50 and a drive gear plate 51. The plug-in platform 101 is installed at one end of the linear drive motor 50, and the drive shaft of the linear drive motor 50 passes through the plug-in platform 101. The plug-in member 102 is installed at the other end of the linear drive motor 50. The drive gear plate 51 is connected to the drive shaft of the linear drive motor 50. A hinge shaft 52 is horizontally inserted on the side of the plug-in platform 101. The hinge shaft 52 is rotatable. The side wall of the hinge shaft 52 located inside the plug-in platform 101 has a toothed groove. The drive gear plate 51 meshes with the hinge shaft 52. The rotating support arm 20 is connected to the part of the hinge shaft 52 located outside the plug-in platform 101.

[0123] The insertion platform 101 of the insertion base 10 is a hollow cylindrical structure, while the insertion component 102 is a solid cylindrical structure. The drive mechanism consists of a linear drive motor 50 and a drive gear plate 51. The insertion platform 101 is installed at one end of the linear drive motor 50, and the drive shaft passes through the insertion platform 101 and connects to the drive gear plate 51. The insertion component 102 is installed at the other end of the linear drive motor 50 and is fixedly connected to the motor housing of the linear drive motor 50. The insertion component 102 is used to connect to the mounting base 11 of the SEM, and the insertion component 102 is coaxially arranged with the insertion platform 101 and the drive shaft of the linear drive motor 50. This arrangement allows the linear drive motor 50 body to be used as a support structure, integrating multiple parts into one, which is beneficial for center of gravity control. When the drive shaft of the linear drive motor 50 reciprocates, the drive gear plate 51 pushes the hinge shaft 52 to rotate, thereby driving the rotating support arm 20 connected to the exposed part of the hinge shaft 52 to rotate, realizing the tilting action of the substrate stage 30. The hollow insertion stage 101 provides installation space for the drive tooth plate 51 and hinge shaft 52, adapting to the limited installation environment inside the scanning electron microscope and avoiding structural interference.

[0124] The connector 102 is used to connect to the mounting base 11. After the connector 102 is connected to the mounting base 11, the end face of the linear drive motor 50 abuts against the end face of the mounting base 11. When the connector 102 is inserted into the mounting base 11, the end face of the linear drive motor 50 and the end face of the mounting base 11 are tightly abutted, forming a rigid support through mechanical engagement, limiting the minute displacement of the substrate stage 30 caused by electron beam bombardment or mechanical vibration during SEM imaging. The abutment eliminates any gaps during installation, ensuring the positioning accuracy of the substrate stage 30 during tilting movements and further suppressing image drift. It also provides better support and stability for the substrate stage 30.

[0125] In some optional embodiments, the center of gravity holding mechanism 40 includes a slide rail 401, a counterweight 402, and a counterweight driving mechanism; the slide rail 401 is connected to the bottom of the base plate 30 and is symmetrically arranged about the axis of rotation of the support arm 20; the counterweight 402 is slidably connected to the slide rail 401; the counterweight driving mechanism is disposed at the bottom of the base plate 30 and is used to drive the counterweight 402 to a predetermined position when the support arm 20 rotates in a first direction or in a second direction opposite to the first direction, so that the center of the base plate 30 and the counterweight 402 as a whole is maintained in the vertical direction where the insertion base 10 is located.

[0126] When the rotating arm 20 rotates in the first direction (e.g., to the left), the counterweight drive mechanism drives the counterweight 402 to move to a predetermined position in the opposite second direction (e.g., to the right); and vice versa. By adjusting the position of the counterweight 402, the overall center of mass of the substrate stage 30 and the counterweight 402 is always kept on the vertical axis of the insertion base 10, balancing the center of gravity shift when a large sample is tilted. According to the tilt angle and direction of the rotating arm 20, the counterweight drive mechanism synchronously adjusts the position of the counterweight 402, forming a dynamic balance torque to ensure SEM imaging stability.

[0127] In one alternative embodiment, the length of the rotating support arm 20 is set to 4 cm, the weight of the substrate stage 30 and the sample is set to 50 g, and after the rotating support arm 20 rotates 20 degrees to the left from a vertical position, the counterweight 402 moves 3 cm to the right, and the weight of the counterweight 402 is set to 22.8 g. The weight of the rotating support arm 20 is negligible in the calculation, or its center of gravity is located at the hinge point. In actual use, the weight of various additional structures and other conditions should be considered.

[0128] In one alternative embodiment, the slide rail 401 includes a hanger 4011 and a loop track 4012. One end of the hanger 4011 is connected to the loop track 4012, and the other end of the hanger 4011 is connected to the bottom of the substrate platform 30. The counterweight 402 is provided with a sliding hole and passes through the lower horizontal frame of the loop track 4012, and can slide relative to the horizontal frame. The loop track 4012 is suspended from the bottom of the substrate platform 30 by the hanger 4011, and its horizontal frame provides a straight sliding path for the counterweight 402. The movement direction of the counterweight 402 is consistent with the surface of the substrate platform 30.

[0129] In one alternative embodiment, the counterweight drive mechanism includes a timing belt 403, pulleys 404, a wheel frame, and a speed-changing gear set. Pulleys 404 are provided on the outer sides of both ends of the slide rail 401. The pulleys 404 are rotatably connected to the wheel frame. The wheel frame is connected to the base plate 30. The timing belt 403 is meshed with the pulleys 404. The speed-changing gear set is driven by the timing belt 403. The hinge shaft 52 is meshed with the speed-changing gear set. The timing belt 403 is connected to the counterweight 402.

[0130] The pulleys 404 on the outer sides of both ends of the slide rail 401 are fixed to the base plate 30 via wheel frames. The synchronous belt 403 meshes with the pulleys 404 and is connected to the counterweight 402. When the hinge shaft 52 rotates, it drives the speed-changing gear set to rotate. After speed change, the speed-changing gear set drives the synchronous belt 403 to move, thereby driving the counterweight 402 to slide along the slide rail 401. The speed-changing gear set, through the gear meshing transmission ratio conversion, makes the moving speed of the counterweight 402 match the tilt angle of the rotating support arm 20. For example, when the hinge shaft 52 rotates 20 degrees to the left, the speed-changing gear set controls the synchronous belt 403 to drive the counterweight 402 to move 3cm to the right. When the counterweight 402 moves to this position, the center of gravity of the tilted base plate 30 and the counterweight 402 as a whole remains in the same vertical direction as the center of the vertical base plate 30.

[0131] Through the coupling transmission of the gear set and the synchronous belt 403, the angle change of the rotating support arm 20 is converted into the position adjustment of the counterweight 402 in real time, realizing dynamic synchronization of center of gravity compensation. During the test, the base plate stage 30 rotates at an angle that is usually 20 degrees relative to the vertical direction. When the base plate stage 30 may need to rotate to different angles, the moving distance and weight of the counterweight 402 need to be preset in advance to avoid the proportional relationship between the base plate stage 30 and the torque when rotating at different angles.

[0132] In one alternative embodiment, the gear set includes a first gear 405, a second gear 406, a shift shaft 407, a bushing 408, and a third gear 409. The first gear 405 is sleeved on one end of the hinge shaft 52 extending outward. The rotating support arm 20 is provided with a mounting hole 201. The third gear 409 is disposed in the mounting hole 201. The shift shaft 407 is rotatably connected to the rotating support arm 20. One end of the shift shaft 407 passes through the mounting hole 201 and connects with the third gear 409. The other end passes through the outside of the rotating support arm 20 and extends to a position above the first gear 405. The second gear 406 is meshed with the first gear 405. The bushing 408 is sleeved on the shift shaft 407 and connected to the rotating support arm 20. The timing belt 403 passes through the mounting hole 201 and meshes with the third gear 409.

[0133] When the hinge shaft 52 rotates, the first gear-changing wheel 405 drives the second gear-changing wheel 406 to rotate, which in turn drives the third gear-changing wheel 409 to rotate via the conversion shaft 407. This causes the synchronous belt 403, which meshes with the third gear-changing wheel 409, to move, pulling the counterweight 402 to slide. The bushing 408 strengthens the connection of the conversion shaft 407, ensuring stable rotation of the conversion shaft 407.

[0134] In one alternative embodiment, the first gear shift wheel 405, the second gear shift wheel 406, the conversion shaft 407, the bushing 408, and the third gear shift wheel 409 can all be made of nylon or engineering plastic to further reduce their weight. A balancing component can also be provided on the rotating support arm 20 to balance the lateral force exerted by the second gear shift wheel 406 on the rotating support arm 20.

[0135] In one alternative embodiment, when the hinge shaft 52 rotates to the left, the first gear shifter 405, being sleeved on the hinge shaft 52 and coaxial with it in the same direction, rotates to the left. When the gears mesh, adjacent gears rotate in opposite directions. The leftward rotation of the first gear shifter 405 drives the second gear shifter 406 to rotate to the right. The second gear shifter 406 and the third gear shifter 409 are coaxial and rotate in the same direction; therefore, the third gear shifter 409 rotates in the same direction as the second gear shifter 406. When the synchronous belt 403 meshes with the third gear shifter 409, the direction of gear rotation determines the direction of synchronous belt 403's movement. When the third gear shifter 409 rotates to the right, the upper synchronous belt 403 is driven to move to the right, and the lower synchronous belt 403 moves to the left. Therefore, the counterweight 402 connected to the upper synchronous belt 403 moves to the right.

[0136] In one optional embodiment, a tooth configuration is provided for the first gear shifter 405, the second gear shifter 406, and the third gear shifter 409. The first gear shifter 405 has 6 teeth, the second gear shifter 406 has 33 teeth, and the third gear shifter 409 has 33 teeth. The diameter of the first gear shifter 405 is 0.54 cm, the diameter of the second gear shifter 406 is 2.97 cm, and the diameter of the third gear shifter 409 is 2.97 cm. With this configuration, the gear pairing of the first gear shifter 405, the second gear shifter 406, and the third gear shifter 409 ensures that when the hinge shaft 52 rotates to the left, the combination of the timing belt 403 and the gears moves the counterweight 402 to the right, completing the center-of-gravity balancing action of the base plate 30. It is understood that the above parameters can be adjusted according to actual conditions.

[0137] The third gear shift wheel 409, synchronous belt 403, pulley 404, slide rail 401, and counterweight 402 are all located within the rotation plane of the rotating arm 20. This plane (i.e., the plane perpendicular to the axis of hinge shaft 52) ​​is also located within the rotation plane of the rotating arm 20. When the rotating arm 20 rotates around hinge shaft 52, all moving parts work together in the same plane. The synchronous belt 403 moves along the slide rail 401, and the counterweight 402 slides with the synchronous belt 403 within the rotation plane, ensuring that the change in the lever arm of the center of gravity adjustment is coupled with the change in the tilt angle within the same plane. This configuration eliminates motion coupling errors in three-dimensional space, allowing the position adjustment of the counterweight 402 to directly correspond to the offset of the center of gravity within the rotation plane, thus improving the response speed of balance control.

[0138] In one alternative embodiment, the top of the rotating arm 20 is connected to the base plate 30 in a Y-shaped structure, and the slide rail 401, counterweight 402 and timing belt 403 are all spaced through the Y-shaped structure at the top of the rotating arm 20.

[0139] In one alternative embodiment, two pushers 4031 are connected to the outer surface of the synchronous belt 403. A through hole 4032 is provided on the counterweight 402, through which the synchronous belt 403 passes. The two pushers 4031 are respectively located on opposite sides of the through hole 4032 and are in close contact with the counterweight 402. A gap exists between the through hole 4032 and the belt surface of the synchronous belt 403. The pushers 4031 are located on opposite sides of the through hole 4032 and are in close contact with the counterweight 402. When the synchronous belt 403 moves, the pushers 4031 push the counterweight 402 to slide along the slide rail 401. The gap design allows the synchronous belt 403 to freely pass through the through hole 4032, avoiding friction between the belt surface and the hole wall. Simultaneously, direct connection between the synchronous belt 403 and the counterweight 402 is avoided, thus sharing the weight of the counterweight 402 and preventing imbalance.

[0140] In one alternative embodiment, the substrate stage 30 is further provided with a clamping and fixing assembly for clamping and fixing the geological sheet to be tested onto the substrate stage 30.

[0141] The number of clamping and fixing components is two, and the two clamping and fixing components can clamp and fix two geological thin sections. Preferably, each clamping and fixing component has four clamping and fixing points at the edge of the geological thin section, and the four clamping and fixing points are located at the four corners of a rectangle.

[0142] In one alternative embodiment, the clamping and fixing assembly includes a clamping rail 32, a slide block 33, a positioning member 34, an elastic pull rope 35, and a claw 36. The table surface of the substrate platform 30 is also provided with a slide groove 31, and the clamping rail 32 is provided in the slide groove 31. Two slide blocks 33 are provided on the clamping rail 32, and the slide blocks 33 can slide relative to the clamping rail 32. A positioning member 34 is provided at the middle position of the clamping rail 32. An elastic pull rope 35 is provided between the positioning member 34 and the slide block 33. One end of the elastic pull rope 35 is connected to the positioning member 34, and the other end is connected to the slide block 33. A V-shaped claw 36 is hinged on the slide block 33. The claw 36 includes a snap-fit ​​side wing 361 and a connecting side wing 362. A spring is connected to the connecting side wing 362, and the spring is also connected to the slide block 33. The snap-fit ​​side wing 361 is located on the table surface of the substrate platform 30, and the snap-fit ​​side wing 361 can rotate about the connecting side wing 362 as a rotation axis.

[0143] When the geological sheet is mounted onto the substrate stage 30, the sliding slide 33 adjusts the position of the clamping claws 36, and the elastic pull rope 35 provides pre-tension. After the geological sheet is placed in position, the clamping claws 36 on both sides of the geological sheet press against each other, thus fixing the geological sheet. The clamping claws 36 press the sample firmly, and the clamping side wings 361 can rotate through the connecting side wings 362 to adapt to geological sheets of different thicknesses. At the same time, they press and fix the surface of the geological sheet, making the geological sheet fit the substrate stage 30. The cooperation of the elastic pull rope 35 and the spring allows the sliding slide 33 to automatically adjust its position according to the size of the geological sheet, and the clamping claws 36 apply a uniform clamping force, firmly fixing large-sized geological sheets and avoiding sample drift caused by traditional adhesive methods.

[0144] For example, the number of clamping and fixing components is two, and the number of slides 31 is four. Each geological sheet corresponds to two slides 31 and four latches 36. The slides 31 correspond to the side edges of the geological sheet, and the latches 36 correspond to the opposite ends of the geological sheet, with two latches 36 provided at each end. The latches 36, clamping rails 32, and slide blocks 33 are made of conductive metal, such as copper.

[0145] In Example 1, the EBSD test was performed using the aforementioned sample stage on the geological thin section. During the test, the large-sized geological thin section to be tested was fixed on the substrate stage 30. The drive mechanism was activated, causing the rotating arm 20 to rotate around the hinge point, tilting the centrally connected substrate stage 30 to 70°. At this time, the center-of-gravity holding mechanism 40 moved in conjunction with the rotating arm 20, ensuring that the overall center of gravity of the rotating arm 20 and the substrate stage 30 remained in the vertical direction of the insertion base 10, thus completing the installation of the large-sized geological thin section. Subsequently, EBSD crystal structure analysis was performed to obtain the test results.

[0146] Compared with the prior art, the sample stage of this embodiment, suitable for the scanning electron microscope in Embodiment 1, not only enables the testing of large-sized geological thin sections, but also prevents the center of gravity from shifting when large-sized geological thin sections are tilted through a center-of-gravity maintaining mechanism, ensuring stable SEM imaging, improving data acquisition accuracy, and achieving stable tilting without manual intervention, thus simplifying the operation process. The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this application. It should be understood that the above descriptions are merely specific embodiments of this application and are not intended to limit the scope of protection of this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion, characterized in that, Including the following steps: S1. Preparation of thin sections of quartz rock samples: S2. Multimodal data were collected on the test area of ​​the rock thin section using a scanning electron microscope, and the following parameters were calculated: CL ring width variation coefficient a, Al-Ti influence coefficient b, lattice orientation difference influence coefficient c, and inclusion type relative gravity coefficient d. S3. Based on the CL ring width variation coefficient a, Al-Ti influence coefficient b, lattice orientation difference influence coefficient c, and inclusion type relative gravity coefficient d, determine whether the quartz sample is of hydrothermal origin or metamorphic origin. Step S2 includes: S21. Using a backscattered electron probe, receive the backscattered signal of quartz in the area to be tested on the rock thin section to obtain the morphology and inclusion characteristics of all quartz grains in the area to be tested, and determine the type and quantity of inclusions in each quartz grain; based on the number of gas-liquid inclusions N1 and the number of metamorphic mineral inclusions N2 in all quartz grains in the area to be tested, calculate the relative gravity coefficient d of the inclusion type according to the following formula: When N1 > N2, then ; When N1≤N2, then d=0; S22. Using a cathodoluminescence probe, perform cathodoluminescence analysis on the same test area of ​​a rock thin section, measure the width of the CL ring, and obtain the widest ring width W. max and the narrowest ring width W min The coefficient of variation a of the CL ring width is calculated according to the following formula: a=W max / W min ; Among them, W max The width of the widest annular band is um; W min The narrowest annular band width, in μm; S23. Using an energy dispersive spectroscopy (EDS) probe, perform energy dispersive spectroscopy (EDS) micro-area composition analysis on the same test area of ​​the rock thin section to determine the Al and Ti element contents; calculate the Al-Ti influence coefficient b according to the following formula: b=Al 含量 / Ti 含量 ; Among them, Al 含量 The values ​​represent the Al content (%) from the energy dispersive spectroscopy (EDS) data of quartz rings, and the Ti content (%). 含量 The Ti content value is represented by the energy dispersive spectroscopy (EDS) data of the quartz ring zone, in percentage S24. Adjust the sample stage to switch the tilt angle of the rock thin section, and use the backscattered electron probe to focus on the area to be tested in the rock thin section again; after the focus is completed, use the backscattered electron diffraction probe to perform EBSD crystal structure analysis on the quartz particles in the area to be tested, and calculate the lattice orientation difference influence coefficient c of the quartz particles according to the following formula: ； Where n is the total number of quartz particles; α max The maximum lattice orientation difference among all quartz grains is α, °; min The minimum lattice orientation difference among all quartz grains, °; α i Let be the lattice orientation difference of the i-th quartz grain, in °; In step S3, the origin of the quartz sample is determined according to the following identification model formula: When N1≤N2, then d=0; in this case, it can be directly determined to be a metamorphic cause. When N1 > N2, the origin of quartz is determined based on the values ​​of a, b, c, and d according to the following identification model formula: If a+b+c+d≥Q, it is determined to be of hydrothermal origin; If a+b+c+d<Q, it is determined to be of a metamorphic origin; Where Q is the critical value for quartz to be of hydrothermal and metamorphic origin.

2. The method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion according to claim 1, characterized in that, It also includes the following steps: establishing a database of measured quartz samples of known hydrothermal and metamorphic origins, and continuously updating the database with measured data for quartz samples of known origins. 实测 b 实测 c 实测 d 实测 The value is then determined based on the continuously updated measured value of a in the database. 实测 b 实测 c 实测 d 实测 The critical value Q is adjusted based on the value data.

3. The method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion according to claim 1, characterized in that, Step S1 includes: S11. Cut the collected quartz sample into cuboid sample blocks, and perform mechanical grinding and argon ion polishing on the cuboid sample blocks to make the surface smooth, and obtain rock thin sections with a size of 2cm×2cm. S12. Spray a 5-10 nm carbon film onto the rock thin sections in a vacuum coating machine to complete the preparation of the rock thin sections.

4. The method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion according to claim 1, characterized in that, The scanning electron microscope is equipped with a backscattered electron probe, an energy dispersive spectroscopy probe, a cathode luminescence probe, and a backscattered electron diffraction probe.

5. The method for identifying the origin of quartz based on scanning electron microscopy multimodal signal fusion according to claim 4, characterized in that, The scanning electron microscope is also equipped with a sample stage.

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