Substrate bearing jig and using method and conveying device thereof

Abstract

The invention provides a substrate bearing jig, a using method of the substrate bearing jig and a conveying device.The substrate bearing jig comprises a bearing part, an adsorption part and a driving part, the adsorption part and the driving part are arranged on one side of the bearing part, the adsorption part comprises an air bag and a suction cup communicated with the air bag, and the air bag has a first form, a second form and a third form; the volume of the air bag in the first form is larger than that of the air bag in the second form, and the volume of the air bag in the third form is larger than that of the air bag in the second form and smaller than that of the air bag in the first form; the driving part is located on the peripheral side of the bearing part and used for adjusting the size of the air bag, so that the air bag is switched among the first form, the second form and the third form, and the adsorption force of the suction cup is adjusted through the size change of the air bag among the different forms. According to the embodiment, the adsorption force of the suction cup is adjusted by utilizing the volume change of the air bag in the adsorption part among different forms, so that not only is the substrate fixed, but also the equipment cost is reduced.

Description

Technical Field

[0001] This disclosure relates to the field of substrate transfer technology, and in particular to substrate carrier fixtures and their usage methods and transfer devices. Background Technology

[0002] In the manufacturing process of display panels, the support fixture is a tooling fixture mainly used to fix, support and position the display panel in various production environments.

[0003] In the existing technology, some load-bearing fixtures still have some shortcomings in use. Summary of the Invention

[0004] In view of this, the purpose of this disclosure is to provide a substrate carrier fixture and its method of use and a conveying device, which can not only fix the substrate but also has a low cost.

[0005] For the purposes described above, this disclosure discloses a substrate carrier fixture, which includes:

[0006] Load-bearing part;

[0007] An adsorption part is disposed on one side of the support part. The adsorption part includes an air bladder and a suction cup communicating with the air bladder. The air bladder has a first form, a second form and a third form. The volume of the air bladder in the first form is greater than the volume of the air bladder in the second form. The volume of the air bladder in the third form is greater than the volume of the air bladder in the second form and less than the volume of the air bladder in the first form.

[0008] The driving unit is located on the periphery of the support unit. The driving unit is used to adjust the volume of the airbag, so that the airbag switches between the first mode, the second mode and the third mode, so as to adjust the adsorption force of the suction cup by utilizing the volume change of the airbag between different modes.

[0009] In one embodiment, when the airbag is in the first configuration, the air pressure inside the airbag is in balance with the atmospheric pressure.

[0010] Preferably, when the airbag is in the second configuration, the air pressure inside the airbag is in balance with the atmospheric pressure.

[0011] Preferably, when the airbag is in the third configuration and a substrate is provided on the suction cup, the air pressure inside the airbag is less than atmospheric pressure.

[0012] In one embodiment, the adsorption unit further includes a connecting cylinder that connects the airbag and the suction cup;

[0013] Preferably, the airbag, connecting cylinder, and suction cup are an integrated structure;

[0014] Preferably, the material of the adsorption section includes an elastic material;

[0015] Preferably, the airbag comprises a spherical airbag.

[0016] In one embodiment, the suction cup has an opening in the middle for connection with the connecting cylinder, and the suction surface of the suction cup is a concave surface recessed toward the connecting cylinder.

[0017] In one embodiment, the support unit includes a support frame and a support plate disposed on the support frame. The support frame encloses and forms a receiving space. The airbag is located within the receiving space. The support plate is provided with an opening communicating with the receiving space. The connecting cylinder is snapped into the opening of the support plate.

[0018] In one embodiment, the driving unit includes a moving member and a pneumatic gripper. The pneumatic gripper is disposed at the output end of the moving member. The moving member drives the pneumatic gripper to move closer to or away from the airbag. The pneumatic gripper is used to squeeze or release the airbag. When the pneumatic gripper squeezes the airbag in the first form, the airbag changes from the first form to the second form. When the pneumatic gripper releases the airbag in the second form and a substrate is disposed on the suction cup, the airbag changes from the second form to the third form. When the pneumatic gripper squeezes the airbag in the third form, the airbag changes from the third form to the second form.

[0019] In one embodiment, the substrate carrier fixture further includes a controller, which is electrically connected to the drive unit;

[0020] Preferably, the substrate support fixture further includes a sensor, which is disposed on the support plate with its sensing surface facing away from the support plate, and the sensor is electrically connected to the controller.

[0021] Based on the same inventive concept, this disclosure also provides a method of using a substrate carrier fixture, wherein the substrate carrier fixture has the substrate carrier fixture as described above, and the method of using it includes the following steps:

[0022] The airbag is clamped between the driving part and the adsorption part, so that the airbag changes from the first form to the second form.

[0023] When the airbag is in the second state, the substrate is placed on the suction cup of the adsorption part;

[0024] The airbag of the adsorption unit is released by the driving unit, so that the airbag changes from the second form to the third form, thereby adsorbing the substrate onto the suction cup;

[0025] The airbag of the adsorption unit is clamped by the driving part, so that the airbag changes from the third form to the second form, thereby realizing the separation of the substrate and the suction cup.

[0026] Based on the same inventive concept, this disclosure also provides a conveying device, which includes:

[0027] Transmission mechanism;

[0028] The substrate carrier fixture described above has a carrier portion and an adsorption portion disposed on the conveying mechanism, and a driving portion disposed on the side of the conveying mechanism.

[0029] In one embodiment, the conveying mechanism is a ring-shaped or semi-ring-shaped conveying mechanism.

[0030] Compared with the prior art, the substrate carrying fixture and its usage method and conveying device provided in this disclosure fix the substrate by setting an adsorption part in the carrying part, so as to prevent the substrate from shifting or falling during the movement. At the same time, the adsorption part and the driving part in this application are combined, and the volume change of the air bladder in the adsorption part between different shapes is used to adjust the adsorption force of the suction cup. This design not only achieves the fixation of the substrate, but also eliminates the need for air source production and transmission air path, reducing equipment cost. Moreover, the design and implementation are simple and there are no complicated transfer links. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in this disclosure or related technologies, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a top view of the substrate support fixture in the embodiment of this application;

[0033] Figure 2 This is a schematic diagram of the airbag in the substrate support fixture in the first configuration according to the embodiments of this application;

[0034] Figure 3 This is a schematic diagram of the airbag in the substrate support fixture in the second form according to the embodiments of this application;

[0035] Figure 4 This is a schematic diagram of the airbag in the third form of the substrate support fixture in the embodiments of this application;

[0036] Figure 5 This is a cross-sectional schematic diagram of the adsorption section in the embodiment of this application;

[0037] Figure 6 This is a schematic diagram of the method of using the substrate support fixture in the embodiments of this application;

[0038] Figure 7 This is a schematic diagram illustrating the process of using the substrate support fixture in the embodiments of this application;

[0039] Figure 8 This is a top view of the conveying device in the embodiment of this application;

[0040] Figure 9 This is a side view of the conveying device in the embodiment of this application. Detailed Implementation

[0041] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0042] It should be noted that the terms "first," "second," "third," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in sequences other than those illustrated or described herein.

[0043] Furthermore, the description of the accompanying drawings and embodiments is illustrative rather than restrictive. The same reference numerals throughout the specification denote the same elements. Additionally, unless explicitly stated otherwise, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, meaning that a process, method, system, product, or apparatus that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0044] When an embodiment can be implemented differently, the specific process sequence may be performed differently than the described sequence. For example, two consecutively described processes may be performed substantially at the same time or in the reverse order of their description.

[0045] In related technologies, products are naturally placed on the support portion of a substrate carrier fixture. During the movement of the substrate carrier fixture, the naturally placed products may shift or fall during the movement of the conveyor mechanism (especially at the junction of different conveyor belts). Therefore, a vision inspection system needs to be installed above the conveyor mechanism to detect whether the naturally placed products have shifted or fallen during the movement of the conveyor mechanism. If shifting or falling occurs, the position of the products needs to be corrected, which increases the overall cost. Some substrate carrier fixtures are equipped with vacuum or ESC adsorption devices to position the substrate, but the difficulty in air path or wiring layout makes the solution extremely difficult to implement.

[0046] Based on the above reasons, this application provides a substrate carrier fixture, a method for using the substrate carrier fixture, and a conveying device. The substrate carrier fixture includes a carrier part, an adsorption part, and a driving part. The adsorption part is disposed on the carrier part and includes an air bladder and a suction cup communicating with the air bladder. The air bladder has a first form, a second form, and a third form. The volume of the air bladder in the first form is larger than the volume of the air bladder in the second form, and the volume of the air bladder in the third form is larger than the volume of the air bladder in the second form but smaller than the volume of the air bladder in the first form. The driving part is located on one side of the carrier part and is used to adjust the volume of the air bladder, switching the air bladder between the first, second, and third forms. This utilizes the volume change of the air bladder between different forms to adjust the adsorption force of the suction cup. In this application, the substrate is fixed by setting the adsorption part on the carrier part, preventing the substrate from shifting or falling during movement. At the same time, the adsorption part and the driving part in this application are combined, and the volume change of the air bladder in the adsorption part between different forms is used to adjust the adsorption force of the suction cup. This design not only achieves the fixation of the substrate but also eliminates the need for an air source in the production and transmission air path, reducing equipment costs. Furthermore, the design and implementation are simple and do not involve complex transfer links.

[0047] Next, combine Figures 1-5 To describe the substrate carrier fixture 100 provided in the embodiments of this application, Figure 1 This is a top view of the substrate support fixture in the embodiment of this application. Figure 2 This is a schematic diagram of the airbag in the substrate support fixture in the first configuration according to the embodiments of this application; Figure 3 This is a schematic diagram of the airbag in the substrate support fixture in the second form according to the embodiments of this application; Figure 4 This is a schematic diagram of the airbag in the third form of the substrate support fixture in the embodiments of this application; Figure 5 This is a cross-sectional schematic diagram of the adsorption section in an embodiment of this application; the substrate support fixture 100 includes a support section 10, an adsorption section 20, a drive section 30, and a controller 40.

[0048] The support portion 10 in the substrate support fixture 100 is used to fix the adsorption portion 20 and serves to connect the adsorption portion 20 to the conveying mechanism 300 in the conveying device. Specifically, the support portion 10 includes a support frame 12 and a support plate 11 disposed on the support frame 12. In the conveying device, the support frame 12 is disposed on the conveying mechanism 300, and the support plate 11 is disposed on the side of the support frame 12 away from the conveying mechanism 300. The support frame 12 encloses and forms a receiving space 121. The support plate 11 is provided with an opening 111 communicating with the receiving space 121, through which the adsorption portion 20 is connected to the support portion 10. It should be noted that in this embodiment, the receiving space 121 is not a closed space; the periphery of the receiving space 121 is open to the outside. This design facilitates the connection between the drive unit 30 and the airbag 21 of the adsorption portion 20 within the receiving space 121.

[0049] The substrate support fixture 100 has an adsorption part 20 disposed on one side of the support part 10. The adsorption part 20 is used to adsorb the substrate 200 (in this embodiment, the substrate 200 specifically refers to the display substrate 200). Specifically, the adsorption part 20 includes an air bladder 21, a connecting cylinder 22, and a suction cup 23. One end of the connecting cylinder 22 is connected to the air bladder 21, and the other end is connected to the suction cup 23. That is, the connecting cylinder 22 connects the air bladder 21 and the suction cup 23. The connecting cylinder 22 of the adsorption part 20 is engaged at the opening 111 of the support plate 11. The air bladder 21 of the adsorption part 20 is located in the accommodating cavity. Within space 121, the suction cup 23 of the adsorption unit 20 is located on the side of the support plate 11 away from the support frame 12. The airbag 21 of the adsorption unit 20 has a first form, a second form, and a third form. The volume of the airbag 21 in the first form is larger than the volume of the airbag 21 in the second form. The volume of the airbag 21 in the third form is larger than the volume of the airbag 21 in the second form but smaller than the volume of the airbag 21 in the first form. In this embodiment, the first form of the airbag 21 can be its natural form, that is, the airbag 21 is in its first form when no external force is applied (e.g., ...). Figure 2 As shown), the second form of the airbag 21 can be the compressed form of the airbag 21, that is, under the action of external force, the airbag 21 is in the second form (as shown). Figure 3 As shown), the third state of the airbag 21 can be a negative pressure state, that is, when the external force is removed after the second state and the air inside the airbag is not circulating with the outside atmosphere (which can be understood as when a substrate is provided on the suction cup of the adsorption part), the airbag 21 is in the third state (as shown). Figure 4(As shown). In this embodiment, the adsorption force of the adsorption unit 20 is determined by the volume of air inside the airbag 21. By adjusting the volume of the airbag 21, the volume of air inside the airbag 21 is controlled, thereby adjusting the adsorption force of the adsorption unit 20. The size of the adsorption unit 20 and the volume of the airbag 21 can be set according to actual needs. In this embodiment, the simple adsorption unit 20 replaces the original vacuum or ESC adsorption device, which not only reduces equipment costs (e.g., the production and transmission gas path without a gas source) but also eliminates the need for intermediate links such as gas path layout, reducing the purchase cost of gas pipes. It can easily solve the problem of semi-annular or annular transmission vacuum adsorption.

[0050] In one embodiment, in the first state, the air pressure inside the airbag 21 of the adsorption unit 20 is balanced with atmospheric pressure; in the second state, the air pressure inside the airbag 21 is balanced with atmospheric pressure; and in the third state, with a substrate provided on the suction cup, the air pressure inside the airbag is lower than atmospheric pressure. Specifically, this can be understood as follows: in the first state, when the airbag 21 of the adsorption unit 20 is in communication with the atmospheric environment (or when the airbag 21 of the adsorption unit 20 is in the first state and there is no substrate 200 on the suction cup 23 of the adsorption unit 20), the air pressure inside the airbag 21 is... When the air pressure inside the airbag 21 of the adsorption unit 20 changes from the first state to the second state and the suction cup 23 of the adsorption unit 20 is connected to the atmospheric environment, the air pressure inside the airbag 21 in the second state is balanced with the atmospheric pressure. When the airbag is in the second state, a substrate is placed on the suction cup, and the driving unit releases the airbag after the substrate is placed. At this time, the airbag changes from the second state to the third state, and the air pressure inside the airbag 21 in the third state is less than the atmospheric pressure. This stage utilizes the pressure difference between the airbag and the atmospheric pressure in the third state to achieve the adsorption of the substrate onto the suction cup. It can also be understood that the suction cup has an adsorption force at this time. When the airbag 21 of the adsorption unit 20 changes from the third state to the second state and the substrate 200 is placed on the suction cup 23 of the adsorption unit 20, the air pressure inside the airbag 21 in the second state is balanced with the atmospheric pressure. At this stage, the adsorption force of the suction cup can be eliminated, thereby realizing the separation of the substrate and the suction cup.

[0051] For example, the airbag 21, connecting cylinder 22 and suction cup 23 of the adsorption part 20 are an integrated structure, which can be understood as an integral structure formed by injection molding in one step. This integrated structure facilitates the processing and manufacturing of the adsorption part 20.

[0052] For example, the airbag 21 is a spherical airbag 21. This shape is easy to process and manufacture, and is also more convenient to use.

[0053] For example, the material of the adsorption part 20 includes an elastic material, that is, the materials of the airbag 21, the connecting cylinder 22 and the suction cup 23 are all elastic materials. For example, the airbag 21 can be an airbag 21 made of silicone material or rubber material, the connecting cylinder 22 can be a connecting cylinder 22 made of silicone material or rubber material, and the suction cup 23 can be a suction cup 23 made of silicone material or rubber material.

[0054] For example, the suction cup 23 has an opening 232 in the middle that communicates with the airbag 21. Specifically, the suction cup 23 has an opening 232 in the middle that connects with the connecting cylinder 22. The suction surface 231 of the suction cup 23 is a concave surface, that is, the suction surface 231 of the suction cup 23 is a concave surface that is recessed toward the connecting cylinder 22.

[0055] The drive unit 30 of the substrate support fixture 100 is located on the periphery of the support unit 10. The drive unit 30 is used to adjust the volume of the airbag 21, so that the airbag 21 of the adsorption unit 20 switches between a first form, a second form, and a third form. By utilizing the volume change of the airbag 21 between different forms, the adsorption force of the suction cup 23 can be adjusted. In this embodiment, the different forms of the airbag 21 are controlled by the drive unit 30. By controlling the degree of compression of the airbag 21 by the drive unit 30, the airbag 21 can be controlled to change from the second form to the third form, thereby controlling the adsorption force of the adsorption unit 20.

[0056] In one specific embodiment, the driving unit 30 includes a moving member 31 and a pneumatic gripper 32. The pneumatic gripper 32 is disposed at the output end of the moving member 31. The moving member 31 drives the pneumatic gripper 32 to move closer to or away from the airbag 21. The pneumatic gripper 32 is used to squeeze or release the airbag 21. When the pneumatic gripper 32 squeezes the airbag 21 in the first form, the airbag 21 of the adsorption unit 20 changes from the first form to the second form. That is, at this time, the second form of the airbag 21 of the adsorption unit 20 is as follows: Figure 4 As shown; when the pneumatic gripper 32 of the drive unit 30 releases the second-form airbag 21 and the substrate is provided on the suction cup 23, due to the elasticity of the airbag 21 itself, the airbag 21 of the adsorption unit 20 changes from the second form to the third form, that is, the third form of the airbag 21 of the adsorption unit 20 at this time is as follows. Figure 5 As shown; when the pneumatic gripper 32 of the drive unit 30 squeezes the airbag 21 in the third form, the airbag 21 of the adsorption unit 20 changes from the third form to the second form, that is, the second form of the airbag 21 of the adsorption unit 20 at this time is as follows. Figure 4 As shown.

[0057] For example, in this embodiment, the moving part 31 can be a telescopic cylinder or a moving module, and the pneumatic gripper 32 can be a gripper cylinder.

[0058] In one embodiment, the substrate carrying fixture 100 further includes a controller 40, which is electrically connected to the drive unit 30. For example, before placing the substrate 200, the pneumatic gripper 32 in the drive unit 30 clamps the airbag 21. When the gripper of the pneumatic gripper 32 moves to a preset position, it sends a signal to the controller 40. The controller 40 controls the robot or the upstream supply chain to place the substrate 200 on the suction cup 23.

[0059] In one embodiment, the substrate support fixture 100 further includes a sensor 50, which is disposed on the support plate 11 with the sensing surface of the sensor 50 facing away from the support plate 11. The sensor 50 is used to sense whether the substrate 200 is on the suction cup 23. The sensor 50 is connected to the controller 40, and the controller 40 controls the drive unit 30 to release the adsorbed airbag 21 based on the transmission signal of the sensor 50.

[0060] refer to Figures 1-4 as well as Figure 6 and Figure 7 , Figure 6 This is a schematic diagram of the method of using the substrate support fixture in the embodiments of this application; Figure 7 This is a schematic diagram illustrating the process of using the substrate support fixture in the embodiments of this application.

[0061] Based on the same inventive concept, this disclosure also provides a method of using a substrate support fixture 100. The substrate support fixture 100 includes the substrate support fixture 100 described in any of the above embodiments, wherein the substrate support fixture 100 includes a support portion 10, an adsorption portion 20, and a driving portion 30. The method of using the substrate support fixture 100 includes the following steps:

[0062] refer to Figure 7 In part b, the airbag 21 of the adsorption part 20 is clamped by the driving part 30, so that the airbag 21 of the adsorption part 20 changes from the first form to the second form.

[0063] It should be noted that before the pneumatic gripper 32 of the drive unit 30 clamps the airbag 21 of the adsorption unit 20, it can also be understood that when the substrate support fixture 100 is unloaded, the airbag 21 of the adsorption unit 20 is always in the first state. In the first state, the air pressure inside the airbag 21 is balanced with the atmospheric pressure (external ambient air pressure), such as... Figure 7 As shown in part a;

[0064] When the adsorption part 20 of the substrate carrier fixture 100 needs to carry the adsorption substrate 200, the moving member 31 in the driving part 30 drives the pneumatic gripper 32 to approach the airbag 21 on the carrier part 10, so that the two grippers of the pneumatic gripper 32 are respectively located on opposite sides of the airbag 21, and clamp the airbag 21 by the two grippers of the pneumatic gripper 32, and discharge the air in the airbag 21 from the outlet of the suction cup 23. When the two grippers of the pneumatic gripper 32 move to the preset position, the grippers are maintained in the preset position so that the airbag 21 of the adsorption part 20 is in the second state. At this time, the air pressure in the airbag 21 is balanced with the atmospheric pressure.

[0065] refer to Figure 7 In part c, when the airbag 21 of the adsorption part 20 is in the second state, the substrate 200 is placed on the suction cup 23 of the adsorption part 20.

[0066] It should be noted that after receiving a signal that the two grippers of the pneumatic gripper 32 have moved to a preset position, the controller 40 will issue a placement signal to place the substrate 200 on the suction cup 23 of the adsorption part 20.

[0067] refer to Figure 7 In the middle d section, the airbag 21 of the adsorption section 20 is released by the driving section 30, so that the airbag 21 changes from the second form to the third form, thereby adsorbing the substrate 200 onto the suction cup 23.

[0068] It should be noted that in this step, when the sensor 50 on the carrier 10 senses that the substrate 200 is placed on the suction cup 23 of the adsorption unit 20, it sends a sensing signal to the controller 40. Based on the sensing signal, the controller 40 controls the two grippers of the pneumatic gripper 32 to move away from the airbag 21, that is, to release the airbag 21 of the adsorption unit 20. Due to its own elasticity, the airbag 21 of the adsorption unit 20 will directly change from the second form to the third form. Since the substrate 200 on the suction cup 23 blocks the communication between the airbag 21 and the outside gas, a vacuum pressure difference will be generated when the airbag 21 of the adsorption unit 20 changes from the second form to the third form. This vacuum pressure difference will cause the substrate 200 to be adsorbed on the suction cup 23, thereby completing the fixation of the substrate 200.

[0069] refer to Figure 7 In part e, the airbag 21 of the adsorption part 20 is clamped by the driving part 30, so that the airbag 21 changes from the third form to the second form, thereby realizing the separation of the substrate 200 and the suction cup 23.

[0070] It should be noted that in this step, the moving part 31 in the driving part 30 drives the pneumatic gripper 32 to approach the airbag 21 on the bearing part 10 again, so that the two grippers of the pneumatic gripper 32 are respectively located on opposite sides of the airbag 21, and clamp the airbag 21 by the two grippers of the pneumatic gripper 32, so that the airbag 21 changes from the third form to the second form. During the clamping process of the airbag 21, the internal air pressure and atmospheric pressure of the airbag 21 can be balanced, thereby eliminating the adsorption force and separating the substrate 200 from the suction cup 23. In this method of use, by combining the adsorption part 20 and the driving part 30, the volume change of the airbag 21 in the adsorption part 20 between different forms is used to adjust the adsorption force of the suction cup 23. This design not only achieves the fixation of the substrate 200, but also eliminates the production and transmission air path without an air source, reducing equipment costs, and the design and implementation are simple without complicated transfer links.

[0071] refer to Figures 1-5 as well as Figure 8 and Figure 9 , Figure 8 This is a top view of the conveying device in the embodiment of this application; Figure 9 This is a side view of the conveying device in the embodiment of this application.

[0072] Based on the same inventive concept, this disclosure also provides a conveying device, which includes a substrate carrying fixture 100 and a conveying mechanism 300 provided in any of the above embodiments. The carrying part 10 and the adsorption part 20 in the substrate carrying fixture 100 are disposed on the conveying mechanism 300, and the driving part 30 is disposed on the side of the conveyor belt. In this application, the substrate 200 is fixed by providing the adsorption part 20 in the carrying part 10 to prevent the substrate 200 from shifting or falling during the movement. At the same time, in this application, the adsorption part 20 is combined with the driving part 30, and the volume change of the air bag 21 in the adsorption part 20 between different shapes is used to adjust the adsorption force of the suction cup 23. This design not only achieves the fixation of the substrate 200, but also eliminates the need for an air source in the production and transmission air path, reducing equipment costs. Moreover, the design and implementation are simple and there are no complicated transfer links. During the transmission movement, the adsorption part 20 fixes the substrate 200 in the transmission process to prevent the substrate 200 from shifting or falling during the transmission process.

[0073] For example, in this embodiment, the support plate 11 corresponding to the support portion 10 can be provided with multiple openings 111, and the support portion 10 corresponding to the support frame 12 can be enclosed to form multiple receiving spaces 121. That is, one support portion 10 can be provided with multiple adsorption portions 20, so that one side of the support portion 10 can transport multiple substrates 200 at one time, thereby improving transportation efficiency. For example, one support portion can be provided with two adsorption portions 20, so that one side of the support portion can transport two substrates 200 at one time.

[0074] In one embodiment, the conveying mechanism 300 includes a ring conveying mechanism 300 or a semi-ring conveying mechanism 300. When the conveying mechanism 300 is a ring conveying mechanism 300, only one driving unit 30 can be provided. When the conveying mechanism 300 is a semi-ring conveying mechanism 300 (such as a U-shaped conveying mechanism 300), two driving units 30 can be provided, such as one driving unit 30 at the beginning and one at the end of the semi-ring conveying mechanism 300. In this embodiment, since the substrate carrying fixture 100 is provided with an adsorption unit 20, the adsorption unit 20 can fix the substrate 200 and prevent displacement or detachment during the movement of the substrate 200. Even at the docking position of the ring conveying mechanism 300 or the semi-ring conveying mechanism 300, displacement or detachment will basically not occur.

[0075] The specific operation flow of the transmission device in this application is as follows: First, the pneumatic gripper 32 is driven by the moving part 31 in the drive unit 30 to approach the airbag 21 on the support unit 10, so that the two grippers of the pneumatic gripper 32 are respectively located on opposite sides of the airbag 21, and the airbag 21 is clamped by the two grippers of the pneumatic gripper 32, and the air in the airbag 21 is discharged from the outlet of the suction cup 23. When the two grippers of the pneumatic gripper 32 move to the preset position, the grippers are maintained in the preset position so that the airbag 21 of the adsorption unit 20 is in the second state (compression state). When the airbag 21 is in the second state, the substrate 200 is placed on the suction cup 23. On the suction cup 23, after the substrate 200 is placed on the suction cup 23, the two grippers of the pneumatic gripper 32 are controlled to move away from the airbag 21, and the moving member 31 drives the pneumatic gripper 32 away from the support part 10. Due to its own elasticity, the airbag 21 of the adsorption part 20 will directly change from the second form to the third form. Since the substrate 200 on the suction cup 23 blocks the communication between the airbag 21 and the outside gas, a vacuum pressure difference will be generated when the airbag 21 of the adsorption part 20 changes from the second form to the third form. This vacuum pressure difference will cause the substrate 200 to be adsorbed on the suction cup 23, thereby completing the fixation of the substrate 200. After the substrate 200 is fixed by the transmission mechanism, and after the substrate is inspected, when the substrate 200 is transferred to the end of the transmission mechanism 300, the moving part 31 in the driving part 30 drives the pneumatic gripper 32 to approach the airbag 21 on the bearing part 10, so that the two grippers of the pneumatic gripper 32 are respectively located on opposite sides of the airbag 21, and the airbag 21 is clamped by the two grippers of the pneumatic gripper 32, so that the airbag 21 changes from the third form to the second form. During the clamping process of the airbag 21, the internal air pressure and atmospheric pressure of the airbag 21 can be balanced, thereby eliminating the adsorption force and separating the substrate 200 from the suction cup 23.

[0076] It should be noted that the above description describes some embodiments of this disclosure. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in a different order than that shown in the above embodiments and still achieve the desired result. Furthermore, the processes depicted in the drawings do not necessarily require a specific or sequential order to achieve the desired result. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0077] This disclosure is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A substrate support fixture, characterized in that, include: Load-bearing part; An adsorption part is disposed on one side of the support part. The adsorption part includes an air bladder and a suction cup communicating with the air bladder. The air bladder has a first form, a second form and a third form. The volume of the air bladder in the first form is greater than the volume of the air bladder in the second form. The volume of the air bladder in the third form is greater than the volume of the air bladder in the second form and less than the volume of the air bladder in the first form. The driving unit is located on the periphery of the support unit. The driving unit is used to adjust the volume of the airbag, so that the airbag switches between the first mode, the second mode and the third mode, so as to adjust the adsorption force of the suction cup by utilizing the volume change of the airbag between different modes.

2. The substrate support fixture as described in claim 1, characterized in that, When the airbag is in the first configuration, the air pressure inside the airbag is in balance with the atmospheric pressure. Preferably, in the second configuration, the airbag's internal pressure is balanced with atmospheric pressure. Preferably, when the airbag is in the third configuration and a substrate is provided on the suction cup, the air pressure inside the airbag is less than atmospheric pressure.

3. The substrate support fixture as described in claim 1, characterized in that, The adsorption unit also includes a connecting cylinder, which connects the airbag and the suction cup; Preferably, the airbag, connecting cylinder, and suction cup are an integrated structure; Preferably, the material of the adsorption portion includes an elastic material; Preferably, the airbag comprises a spherical airbag.

4. The substrate support fixture as described in claim 3, characterized in that, The suction cup has an opening in the middle for connection with the connecting cylinder, and the suction surface of the suction cup is a concave surface that is recessed toward the connecting cylinder.

5. The substrate support fixture as described in claim 3, characterized in that, The support unit includes a support frame and a support plate disposed on the support frame. The support frame encloses and forms an accommodating space. The airbag is located within the accommodating space. The support plate is provided with an opening communicating with the accommodating space. The connecting cylinder is snapped into the opening of the support plate.

6. The substrate support fixture as described in claim 1, characterized in that, The driving unit includes a moving member and a pneumatic gripper. The pneumatic gripper is disposed at the output end of the moving member. The moving member drives the pneumatic gripper to move closer to or away from the airbag. The pneumatic gripper is used to squeeze or release the airbag. When the pneumatic gripper squeezes the airbag in the first form, the airbag changes from the first form to the second form. When the pneumatic gripper releases the airbag in the second form and a substrate is disposed on the suction cup, the airbag changes from the second form to the third form. When the pneumatic gripper squeezes the airbag in the third form, the airbag changes from the third form to the second form.

7. The substrate support fixture as described in claim 3, characterized in that, The substrate support fixture also includes a controller, which is electrically connected to the drive unit; Preferably, the substrate support fixture further includes a sensor, which is disposed on the support plate with its sensing surface facing away from the support plate, and the sensor is electrically connected to the controller.

8. A method of using a substrate support fixture, characterized in that, The substrate carrier fixture is the substrate carrier fixture according to any one of claims 1-7, and the method of using it includes the following steps: The airbag is clamped between the driving part and the adsorption part, so that the airbag changes from the first form to the second form. When the airbag is in the second state, the substrate is placed on the suction cup of the adsorption part; The airbag of the adsorption unit is released by the driving unit, so that the airbag changes from the second form to the third form, thereby adsorbing the substrate onto the suction cup; The airbag of the adsorption unit is clamped by the driving part, so that the airbag changes from the third form to the second form, thereby realizing the separation of the substrate and the suction cup.

9. A conveying device, characterized in that, include: Transmission mechanism; The substrate carrier fixture as described in any one of claims 1-8, wherein the carrier portion and the adsorption portion of the substrate carrier fixture are disposed on the conveying mechanism, and the driving portion of the carrier fixture is disposed on the side of the conveying mechanism.

10. The conveying device as claimed in claim 9, characterized in that, The conveying mechanism is a ring or semi-ring conveying mechanism.

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