Air suction bed for vacuum device

Abstract

The invention discloses an air suction bed for a vacuum device, and relates to the technical field of vacuumizing equipment. A filter pipe is coaxially arranged in a columnar air suction bed main body, filter holes are uniformly distributed in the side wall of the filter pipe, and air suction metal is filled between the filter pipe and the inner wall of the columnar air suction bed main body. According to the getter bed for the vacuum device, the internal structure of the getter bed is optimized, a gas diffusion path is increased, and material agglomeration can be inhibited, so that the comprehensive performance of the getter bed is comprehensively improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum equipment technology, and more particularly to a suction bed for a vacuum device. Background Technology

[0002] In the field of vacuum technology, many industrial production activities (such as semiconductor manufacturing and the nuclear industry) require maintaining a high vacuum environment. However, relying solely on vacuum pumps is insufficient to effectively remove gas molecules such as water vapor from a vacuum system, thus limiting the improvement of the system's vacuum level. Furthermore, metals such as uranium readily react with common gas molecules such as hydrogen, oxygen, nitrogen, methane, carbon dioxide, and water at room temperature.

[0003] Therefore, by using metals such as uranium as getter materials and sealing the gettering active metal in a cylindrical tube with a valve to create a gettering activated chemical bed (often simply called a getter bed), gases in the vacuum system can be further removed, thereby enabling the vacuum system to achieve a high vacuum level. The getter bed is a key component in maintaining a high vacuum level in a vacuum system, and its performance indicators typically include activation time, getter volume, getter / de-gas rate, and service life.

[0004] However, when using a traditional air-breathing bed, such as Figure 2 As shown, gas can only enter the interior of the gas bed through the porous filter at the inlet end and come into contact with the getter metal. This single-path gas diffusion method results in slow gas diffusion and a long activation time for the getter bed. Furthermore, during use, the activated getter metal powder is prone to re-agglomeration and clumping, which significantly reduces the contact area between the gas and the getter metal, leading to a severe decline in getter performance—specifically manifested as reduced intake volume, slower intake / exhaust rates, and shortened service life.

[0005] Therefore, there is an urgent need for a new suction bed for vacuum devices that can improve gas diffusion efficiency and suppress material agglomeration. Summary of the Invention

[0006] The purpose of this invention is to provide a suction bed for a vacuum device, which improves the overall performance of the suction bed by optimizing its internal structure, increasing the gas diffusion path, and suppressing material agglomeration.

[0007] The technical solution of the present invention to solve the above-mentioned technical problems is: a suction bed for a vacuum device, comprising a columnar suction bed body with a hollow internal structure, one end of the columnar suction bed body is connected to a conduit, and a valve is provided on the free end of the conduit, a porous filter sheet capable of blocking the outlet of the conduit is provided inside the columnar suction bed body, a filter tube is coaxially provided inside the columnar suction bed body, and filter holes are evenly distributed on the side wall of the filter tube, and suction metal is filled between the filter tube and the inner wall of the columnar suction bed body.

[0008] As a further improvement of the present invention, the filter tube is fitted with a protective tube, and the protective tube has ventilation slots arranged symmetrically around its axis on its side wall.

[0009] As a further improvement of the present invention, the main body of the columnar air-suction bed includes a cover plate a, a cylinder and a cover plate b connected coaxially in sequence; the conduit is connected to the cover plate a, the porous filter is fixedly installed on the inner wall of the cover plate a, and the inner wall of the cover plate b is fixedly connected to the ends of the filter tube and the protective tube.

[0010] As a further improvement of the present invention, the cover plate a, cover plate b and porous filter are all made of stainless steel plates; the conduit, cylinder, filter tube and protective tube are all made of stainless steel tubes.

[0011] As a further improvement of the present invention, the conduit and cover plate a, cover plate a and porous filter, cover plate a and cylinder, cylinder and cover plate b, cover plate b and filter tube, and cover plate b and protective tube are all welded together.

[0012] As a further improvement of the present invention, the columnar air intake bed body, the filter tube, and the protective tube are all cylindrical.

[0013] Beneficial effects Compared with the prior art, the advantages of the suction bed for a vacuum device of the present invention are as follows: 1. Improved gas diffusion efficiency and shortened activation time: Due to the filter tube with filter holes set coaxially in the center of the bed, the gas can diffuse simultaneously and quickly to the entire gas-absorbing metal filling layer from both axial (through the porous filter at the top) and radial (through the filter tube in the center) directions, which greatly increases the contact area and contact efficiency between the gas and the gas-absorbing metal, thereby shortening the activation time of the gas-absorbing bed by nearly half. 2. Effectively suppresses the agglomeration and caking of getter metal: The filter tube and protective tube divide the large-volume getter metal filling layer into a thin ring structure surrounding the center. This structure reduces the size of metal powder agglomerates. At the same time, the multi-channel air intake makes the gas distribution more uniform, avoiding local over-reaction and agglomeration, and fundamentally suppressing the agglomeration and caking of getter metal. 3. Significantly improved suction performance and service life: Thanks to the improvement in agglomeration and caking phenomena and the enhancement of gas diffusion efficiency, the suction rate of this suction bed is increased by approximately 12%, and the total suction volume is increased by approximately 12%. At the same time, due to the stable structure and good maintenance of metal activity, its maximum outgassing rate is also increased by approximately 8%, and the overall service life is significantly extended. 4. Enhanced internal structural stability: The added protective tube effectively resists the lateral pressure on the precision filter tube when the intake metal is heated and expanded, preventing deformation or damage to the filter tube, ensuring the long-term unobstructed flow of the radial gas channel and the structural reliability of the entire intake bed. 5. Compact structure and easy manufacturing: This invention innovates internally without changing the external dimensions of the traditional suction bed, resulting in a compact structure and good compatibility with existing vacuum systems. The welding process used is mature, reliable, simple, and easy to operate, making it very suitable for promotion and application in high-end fields such as the nuclear industry and vacuum equipment manufacturing.

[0014] The invention will become clearer from the following description, taken in conjunction with the accompanying drawings, which are used to explain embodiments of the invention. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the air intake channel of a traditional air-suction bed; Figure 3 This is a schematic diagram of the air intake channel of the present invention; Figure 4 This is a comparison chart of the degassing rates of the present invention and a traditional air-suction bed.

[0017] Wherein: 1-conduit; 2-cover plate a; 3-porous filter plate; 4-cylinder; 5-filter tube; 6-protective tube; 7-cover plate b. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0019] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; of course, they can also refer to a mechanical connection or an electrical connection; furthermore, they can refer to a direct connection, an indirect connection through an intermediate medium, or a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0020] Embodiments of the present invention will now be described with reference to the accompanying drawings.

[0021] Example: Specific embodiments of the present invention are as follows: Figure 1 , 3 As shown in Figure 4, a suction bed for a vacuum device is cylindrical in shape. Its main body is a columnar suction bed body with a hollow internal structure, mainly composed of a conduit 1, a cover plate a2, a porous filter 3, a cylinder 4, a filter tube 5, a protective tube 6, and a cover plate b7.

[0022] Specifically, the cylinder 4 is a stainless steel cylindrical tube, with its upper and lower ends vacuum-welded together and coaxially connected to cover plates a2 and b7, both also made of stainless steel. Together, these three form a sealed, columnar suction bed. A conduit 1, also made of stainless steel, is welded to the center of cover plate a2, with a valve at its free end for connecting to the vacuum system. A circular, porous filter 3, made of sintered stainless steel, is welded and fixed to the inner wall of cover plate a2 to block the outlet of conduit 1, effectively preventing the escape of internal suction metal powder while allowing gas to pass through.

[0023] The core improvement of this invention lies in the internal structure of the suction bed. Inside the cylinder 4, a cylindrical filter tube 5 is coaxially arranged. This filter tube 5 is also a porous stainless steel tube, with a large number of micron-sized filter pores evenly distributed on its sidewalls. Outside the filter tube 5, a coaxial cylindrical protective tube 6 is also fitted. This protective tube 6 is a solid-walled stainless steel tube with multiple rotationally symmetrical ventilation slots on its sidewalls; its function is to prevent damage to the internal components due to thermal expansion.

[0024] The lower ends of both the filter tube 5 and the protective tube 6 are fixedly connected to the inner wall of the cover plate b7 by welding. This forms an annular cavity between the filter tube 5, the protective tube 6, and the inner wall of the outer cylinder 4. This annular cavity is filled with reactive gettering metal powder such as uranium.

[0025] In this embodiment, the gas diffusion path of the suction bed is fundamentally improved during operation, wherein: The axial path is as follows: gas enters from the conduit 1, passes through the porous filter 3 at the upper end, and directly enters the upper part of the annular cavity.

[0026] The radial path is as follows: the gas passes through the filter holes on the side wall of the filter tube 5, and then radially through the vent slot of the protective tube 6, diffuses into the intake metal of the entire annular cavity.

[0027] This dual diffusion mode of "axial + radial" greatly increases the effective contact area and contact efficiency between the gas and the getter metal, reducing the activation time of the getter bed by nearly half compared to the traditional single-path structure. At the same time, the uniform radial air intake effectively prevents local over-reaction and accumulation of the getter metal powder. In addition, the protective tube 6 physically divides the metal filling layer into a thinner annular structure, which together significantly inhibits the agglomeration and caking of the metal powder.

[0028] Compared to existing technologies, the intake bed using this structure increases both the intake rate and total intake volume by approximately 12%, and the maximum exhaust rate by approximately 8%. Its service life is also significantly extended due to improved structural stability and anti-agglomeration capabilities. Furthermore, the presence of the protective tube 6 ensures that the delicate and fragile filter tube 5 is not compressed when the intake metal expands due to heat, maintaining the long-term stability of the radial gas channel.

[0029] In addition, this invention innovates internally without altering the external dimensions of the traditional suction bed, resulting in a compact structure and good compatibility with existing vacuum systems. Furthermore, the welding process employed in this invention is mature, reliable, simple, and highly operable, making it very suitable for widespread application in high-end fields such as the nuclear industry and vacuum equipment manufacturing.

[0030] The present invention has been described above in conjunction with the preferred embodiments, but the present invention is not limited to the embodiments disclosed above, but should cover various modifications and equivalent combinations made in accordance with the essence of the present invention.

Claims

1. A getter bed for vacuum devices, comprising a cylindrical getter bed body with a hollow structure, one end of which is connected to a conduit (1), and a valve is provided on the free end of the conduit (1), and a porous filter sheet (3) is provided in the cylindrical getter bed body, which is capable of blocking the outlet of the conduit (1), characterized in that, The cylindrical getter bed body is coaxially provided with a filter pipe (5), and the filter pipe (5) is uniformly provided with filter holes on the side wall, and the filter pipe (5) and the inner wall of the cylindrical getter bed body are filled with getter metal.

2. The getter bed for vacuum devices according to claim 1, characterized in that The filter pipe (5) is sleeved with a protection pipe (6), and the protection pipe (6) is provided with air passage notches which are rotationally symmetrically arranged around the axis.

3. The getter bed for vacuum devices according to claim 2, characterized in that, The cylindrical getter bed body comprises a cover plate a (2), a cylinder (4) and a cover plate b (7) which are coaxially connected in sequence; the conduit (1) is connected with the cover plate a (2), the porous filter sheet (3) is fixedly installed on the inner wall of the cover plate a (2), and the inner wall of the cover plate b (7) is fixedly connected with the end of the filter pipe (5) and the protection pipe (6).

4. The getter bed for vacuum devices according to claim 3, characterized in that The cover plate a (2), the cover plate b (7) and the porous filter sheet (3) are all stainless steel plates; the conduit (1), the cylinder (4), the filter pipe (5) and the protection pipe (6) are all stainless steel pipes.

5. The getter bed for vacuum devices according to claim 4, characterized in that, The conduit (1) and the cover plate a (2), the cover plate a (2) and the porous filter sheet (3), the cover plate a (2) and the cylinder (4), the cylinder (4) and the cover plate b (7), the cover plate b (7) and the filter pipe (5), and the cover plate b (7) and the protection pipe (6) are all connected by welding.

6. The getter bed for vacuum devices according to claim 2, characterized in that, The cylindrical getter bed body, the filter pipe (5) and the protection pipe (6) are all cylindrical.

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