Manufacturing method of multilayer film material and film material cutting method

Abstract

The invention provides a manufacturing method of a multilayer film material. Providing an original film material which comprises at least one functional film and a release film; a structure reinforcing film material is provided and comprises a structure reinforcing film and a release film. The release film is removed from the structural reinforcement film material by a release mechanism. And the clamping and pasting mechanism is used for pasting the structural reinforcing film and the functional film, so that the multi-layer film material containing the functional film and the structural reinforcing film is obtained.

Description

Technical Field

[0001] This invention relates to a method for manufacturing a multilayer film and a method for cutting the multilayer film. Background Technology

[0002] In the manufacturing processes of semiconductor integrated circuits and various microelectromechanical systems (MEMS), thin films are attached to the surface or back of wafers to facilitate subsequent wafer fabrication processes. Thin films used for wafer attachment include, but are not limited to, dicing blue films, dicing white films, thinning protective films, UV films, and DAF (Die Attach Film) conductive films. Attaching the film to the wafer allows process particles to adhere to the wafer's surface or back, and removing the film removes these particles. Generally, the thin film attached to the wafer has a multilayer structure, including at least a dry film and a Mylar film. The dry film exhibits fluidity and adhesiveness when heated, thus enabling it to be stably attached to the wafer surface.

[0003] Currently, when cutting multilayer films, one method involves halving one layer to create layers of different dimensions. However, in certain applications, multilayer films may be unsuitable for halving due to their material properties or excessive thinness, or they may break during waste film roll-up. For example, multilayer films containing both ABF and PET films are not suitable for halving, limiting their applications. Summary of the Invention

[0004] In view of the above problems, the present invention provides a method for manufacturing multilayer film material, which helps to solve the problems that multilayer film material cannot be half-cut or breaks during waste film winding due to its material properties or excessive thickness. The present invention also provides a method for cutting film material.

[0005] The method for manufacturing a multilayer film material disclosed in this invention includes: providing a raw film material, wherein the raw film material includes at least one functional film and a release film; providing a structural reinforcement film material, including a structural reinforcement film and a release film; removing the release film from the structural reinforcement film material using a release mechanism; and bonding the structural reinforcement film and the functional film using a clamping mechanism to obtain a multilayer film material including the functional film and the structural reinforcement film.

[0006] The membrane cutting method disclosed in this invention includes: providing a multilayer membrane material manufactured by the aforementioned method; cutting the functional membrane of the multilayer membrane material with a first cutter to obtain a patterned functional membrane portion and a waste functional membrane portion attached to a structural reinforcement membrane; removing the waste functional membrane portion from the structural reinforcement membrane; and cutting the structural reinforcement membrane along a cutting path with a second cutter to attach the patterned functional membrane portion to the cut structural reinforcement membrane.

[0007] According to the manufacturing method and cutting method of the multilayer film material disclosed in this invention, a structural reinforcement film can replace the release film of the original film material as a new release film for carrying the functional film in the multilayer film material. The thickness or rigidity of the structural reinforcement film can be superior to that of the release film of the original film material. In this way, the original film material, which was originally unsuitable for half-cutting, can become a multilayer film material suitable for half-cutting by replacing the release film with the structural reinforcement film. Attached Figure Description

[0008] The above description of the content of this invention and the following description of the embodiments are used to demonstrate and explain the principles of this invention, and to provide a further explanation of the scope of the patent application of this invention.

[0009] Figure 1 This is a schematic diagram of the original membrane material according to an embodiment of the present invention.

[0010] Figure 2 This is a schematic diagram of a release mechanism removing a release film and providing a structural reinforcement film according to an embodiment of the present invention.

[0011] Figure 3 This is a schematic diagram of a multilayer film material including a structurally reinforcing membrane according to an embodiment of the present invention.

[0012] Figures 4 to 7 This is a schematic diagram illustrating a layer-film cutting device performing a layer-film cutting method according to an embodiment of the present invention. Detailed Implementation

[0013] The following embodiments describe in detail the features and advantages of the present invention, the content of which is sufficient to enable anyone skilled in the art to understand the technical content of the present invention and implement it accordingly. Furthermore, based on the disclosure, patent claims, and drawings in this specification, anyone skilled in the art can easily understand the present invention. The following embodiments further illustrate the points of the present invention in detail, but are not intended to limit the scope of the present invention in any way.

[0014] According to an embodiment of the present invention, a method for manufacturing a multilayer film material is provided, which includes multiple steps. These steps can be performed individually or simultaneously, and can also be performed continuously or intermittently. These steps will be described in detail below.

[0015] First, the raw membrane material is provided. Please refer to... Figure 1This is a schematic diagram of the original film material according to an embodiment of the present invention. The original film material F includes a functional film F1 and a release film F2. The functional film F1 may be a bilayer structure comprising a layer of polyethylene terephthalate (PET) film and a layer of dry film, and the release film F2 may be a layer of Mylar film. The quantity and materials of the functional film F1 and the release film F2 are not intended to limit the present invention. In some embodiments, the functional film F1 may comprise a layer of ABF film, or may be a trilayer structure comprising a layer of PET film and two layers of dry film with different adhesion, and the release film F2 may comprise multiple layers of Mylar film.

[0016] Next, please refer to the following: Figure 2 This is a schematic diagram illustrating the removal of a release film and provision of a structurally reinforcing film using a release mechanism according to an embodiment of the present invention. The release mechanism 1 may include multiple mounting rollers and multiple take-up rollers. The mounting rollers may include mounting rollers 10a and 10b, wherein mounting roller 10b is used to mount the original film material F. The film material can be mounted on the mounting roller in a manner that includes, but is not limited to, wrapping the film material around the shaft of the mounting roller. The film material can be mounted on the take-up roller in a manner that includes, but is not limited to, attaching a portion of the film material to the outer surface of the take-up roller.

[0017] The feeding device of the release mechanism 1 can transport the original film material F to the processing area 100, and the tension adjustment component of the release mechanism 1 can stretch and flatten the original film material F.

[0018] Next, the system provides structural reinforcement membrane material. Refer again... Figure 2 The structural reinforcing film material F0 may include a structural reinforcing film F3 and a release film F4. The structural reinforcing film F3 may be an adhesive tape with one side being sticky, and the release film F4 may be a layer of Mylar film. The thickness of the structural reinforcing film F3 may be greater than the thickness of the release film F2 of the original film material F, or the rigidity of the structural reinforcing film F3 may be greater than the rigidity of the release film F2 of the original film material F. The structural reinforcing film material F0 may be disposed on the mounting roller 10a of the release mechanism 1, and the release film F4 of the structural reinforcing film material F0 disposed on the mounting roller 10a may be removed, for example, by manually or mechanically peeling a portion of the structural reinforcing film F3 and the release film F4 apart from each other. One side of the release film F4 may be disposed on the take-up roller 11a. Furthermore, a portion of the release film F4 separated from the structural reinforcing film F3 may be disposed on the take-up roller 11a.

[0019] like Figure 2 As shown, the take-up roller 11a is rotatable to peel the release film F4 from the structural reinforcement film F3. Furthermore, a drive element (e.g., a motor connected to the take-up roller) can rotate the take-up roller 11a to take up the release film F4, thereby ultimately causing the release film F4 to be completely peeled from the structural reinforcement film F3. The feeding device of the release mechanism 1 can convey the structural reinforcement film F3 to the processing area 100, and the tension adjusting element of the release mechanism 1 can stretch and flatten the structural reinforcement film F3.

[0020] Next, the structural reinforcing membrane F3 is bonded to the original membrane material F using a clamping mechanism to obtain a multilayer membrane material F comprising the original membrane material F and the structural reinforcing membrane F3. For example... Figure 2 As shown, the clamping mechanism 2 includes, for example but not limited to, two pressing rollers 20. The raw film material F and the structural reinforcing film F3, which are conveyed to the processing area 100, may be positioned between the two pressing rollers 20. The pressing rollers 20 may press the raw film material F and the structural reinforcing film F3 together to obtain a multilayer film material F". The multilayer film material F" may be wound up by the winding roller 11b. Figure 3 This is a schematic diagram of a multilayer membrane material including a structural reinforcement membrane according to an embodiment of the present invention, wherein the multilayer membrane material F” may include a primary membrane material F (functional membrane F1 and release membrane F2) having a double-layer structure and a structural reinforcement membrane F3.

[0021] According to an embodiment of the present invention, a method for cutting film material is provided, more specifically, a method for cutting the aforementioned multilayer film material F”. Please refer to... Figures 4 to 7 This is a schematic diagram illustrating a film cutting apparatus performing a film cutting method according to an embodiment of the present invention. The film cutting method may include multiple steps. These steps may be performed individually or simultaneously, and may also be performed continuously or intermittently. These steps will be described in detail below.

[0022] The film cutting device may include a first cutter 30 and a second cutter 31. The first cutter 30 may be, for example but not limited to, a roller cutter, and may include a body 310 and at least one cutting edge 320. The body 310 may rotate about its own axis, and the cutting edge 320 may protrude outward from the body 310. Figure 4 The blade portion 320 is illustrated as a closed annular blade, and the length of the blade portion 320 may be less than the thickness of the multilayer film F”, so as to facilitate the half-cutting of the multilayer film F”. The second cutter 31 can be rotated relative to the multilayer film F” ​​by a drive device (e.g., a motor) to perform cutting.

[0023] First, a multilayer film material F” is provided to a multilayer film cutting device. Next, a functional film F1 is cut from the multilayer film material F” using a first cutter 30. For example... Figure 4 As shown, the multilayer film material F” passes through the first cutter 30 of the film cutting device, and the body 310 of the first cutter 30 rotates, causing the blade portion 320 to cut the functional film F1 of the multilayer film material F”. The functional film F1 cut by the first cutter 30 can be divided into a patterned functional film portion F11 attached to the structural reinforcing film F3 and a waste functional film portion F12. Due to the thickness of the multilayer film material F” on the blade portion 320, the blade portion 320 will not cut into the structural reinforcing film F3, or the blade portion 320 will not sever the structural reinforcing film F3. Figure 4 An example illustration shows that the release film F2 of the multilayer film material F” is removed before being cut by the first cutter 30.

[0024] In this embodiment, as Figure 5 As shown, the first cutter 30 completely cuts the functional membrane F1 but does not completely cut the structural reinforcement membrane F3. In other words, the first cutter 30 can partially cut the multilayer membrane material F". Here, "completely cutting the functional membrane F1" means that the cutter will cut the functional membrane F1, causing the functional membrane F1 to form two separate parts (patterned functional membrane part F11 and waste functional membrane part F12). "Not completely cutting the structural reinforcement membrane F3" means that the cutter will not cut the structural reinforcement membrane F3, or although it cuts the structural reinforcement membrane F3, it will not sever it. "Partially cutting the multilayer membrane material F" means that the cutter does not sever the multilayer membrane material F", and more specifically, it means that the cutter cuts the functional membrane F1 but does not cut the structural reinforcement membrane F3, or cuts but does not sever the structural reinforcement membrane F3.

[0025] Next, the waste functional film portion F12 is removed from the structural reinforcing film F3. After the functional film F1 is cut, the patterned functional film portion F11 can be conveyed together with the structural reinforcing film F3 to the subsequent processing area. The waste functional film portion F12 can be recycled by the waste film wheel (not shown). The steps of cutting the functional film F1 with the first cutter 30 and removing the waste functional film portion F12 from the structural reinforcing film F3 can be performed simultaneously.

[0026] Next, the structural reinforcing membrane F3 is cut along the cutting path using the second cutter 31. (As follows...) Figure 6 As shown, the patterned functional film portion F11 and the structural reinforcing film F3 are conveyed below the second cutter 31. The cutting edge of the second cutter 31 is close to the multilayer film material F” to cut the structural reinforcing film F3. Figure 7 As shown, the second cutter 31 can move along the cutting path P to completely cut the structural reinforcement film F3. The cutting path P can surround the patterned functional film portion F11, and the cutting path P can be spaced apart from the edge 111 of the patterned functional film portion F11. After the structural reinforcement film F3 is cut by the second cutter 31, the cut structural reinforcement film F3 is still attached to the patterned functional film portion F11, and the size of the cut structural reinforcement film F3 is larger than the size of the patterned functional film portion F11. Here, "completely cutting the structural reinforcement film F3" means that the cutter will cut the structural reinforcement film F3, that is, the cutter will completely cut the multilayer film material F". The multilayer film material F" cut by the first cutter 30 and the second cutter 31 can be adhered to the wafer.

[0027] In summary, according to the manufacturing method and cutting method of the multilayer film material disclosed in this invention, a structural reinforcement film can replace the release film of the original film material as a new release film for carrying the functional film in the multilayer film material. The thickness or rigidity of the structural reinforcement film can be superior to that of the release film of the original film material. In this way, the original film material, which was originally unsuitable for half-cutting, can become a multilayer film material suitable for half-cutting by replacing the release film with the structural reinforcement film.

[0028] Figure label:

[0029] F: Raw membrane material

[0030] F”: Multilayer film material

[0031] F1: Functional membrane

[0032] F11: Patterned functional film section

[0033] F12: Waste functional membrane section

[0034] F2: Release film

[0035] F0: Structurally reinforced membrane material

[0036] F3: Structural Reinforcement Membrane

[0037] F4: Release film

[0038] 1: Release mechanism

[0039] 10a, 10b: Installation rollers

[0040] 11a, 11b: Take-up rollers

[0041] 100: Processing Area

[0042] 2: Clipping mechanism

[0043] 20: Pressing roller

[0044] 30: First cutting tool

[0045] 310:Ontology

[0046] 320: Blade section

[0047] 31: Second cutting tool

[0048] 111: Edge

[0049] P: Cutting path

Claims

1. A method for manufacturing a multilayer film material, comprising: Provide raw membrane material comprising at least one functional membrane and a release membrane; A structural reinforcing membrane material is provided, which comprises a structural reinforcing membrane and a release membrane; The release film is removed from the reinforcing film material by a release mechanism; and The structural reinforcement film is bonded to the original film material using a clamping mechanism to obtain a multilayer film material containing the original film material and the structural reinforcement film.

2. The method for manufacturing the multilayer film material as described in claim 1, wherein, The at least one functional film comprises a polyethylene terephthalate (PET) film and a dry film, and the release film is a Mylar film.

3. The method for manufacturing the multilayer film material as described in claim 1, wherein, The structural reinforcement membrane is an adhesive tape.

4. The method for manufacturing the multilayer film material as described in claim 1, wherein, The release mechanism removes the release film from the structurally reinforcing film material, comprising: One side of the release film is disposed on the take-up roller of the release mechanism; and Rotate the take-up roller to peel off the release film.

5. The method for manufacturing the multilayer film material as described in claim 1, wherein, The bonding mechanism for attaching the structural reinforcement membrane to the original membrane material includes: Positioning the original film material and the structurally reinforcing film between the two pressure rollers of the clamping mechanism; and The original film material is pressed together with the structural reinforcement film using the two pressure rollers.

6. A method for cutting film material, comprising: Provides a multilayer film material manufactured using the manufacturing method of any one of claims 1 to 5; The first cutter cuts at least one functional film of the multilayer film material to obtain a patterned functional film portion and a waste functional film portion attached to the structural reinforcing film. The waste functional membrane portion is removed from the reinforcing membrane structure. as well as The structural reinforcement film is cut along the cutting path using a second cutter, so that the cut structural reinforcement film is attached to the patterned functional film portion.

7. The film material cutting method as described in claim 6, wherein, The cutting path surrounds the patterned functional film portion and is spaced apart from the edges of the patterned functional film portion.

8. The film material cutting method as described in claim 6, wherein, When the first cutter cuts the at least one functional membrane, the first cutter will not completely cut the structural reinforcement membrane.

9. The film material cutting method as described in claim 6, wherein, The first cutting tool is a hobbing cutter.

10. The film material cutting method as described in claim 6, wherein, Simultaneously, the first tool is used to cut the at least one functional membrane and the waste functional membrane portion is removed from the structural reinforcement membrane.

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