Combustor center and feeding center coincidence judgment method and system

Abstract

The invention provides a combustor center and feeding center coincidence judgment method and system, and belongs to the technical field of deposition furnace equipment. The system comprises a power supply, a display unit and a conductive assembly which are electrically connected. According to the method, the display unit presents the corresponding working state and / or color through the state change of the movable part and the fixed part of the conductive assembly, and then whether the center of the burner and the center of feeding are aligned and coincident or not is judged according to the display result of the display unit. Through cooperation of the display unit and the conductive assembly, the defect that alignment judgment is inconvenient to carry out in the closed narrow space of the deposition furnace is overcome, whether the initial position between the combustor and the target rod meets the VAD deposition process requirement or not can be rapidly judged, whether the center of the combustor coincides with the feeding center or not is determined, the accuracy of the judgment result is greatly improved, and the working efficiency is improved. And meanwhile, a basis is provided for adjusting the initial position between the burner and the target rod in each direction.

Description

Technical Field

[0001] This invention relates to the field of deposition furnace equipment technology, and in particular to a method and system for determining the overlap between the burner center and the feeding center. Background Technology

[0002] In the chemical synthesis and production of quartz glass, after the burner is installed, determining whether the burner center (especially the central feed pipe) is aligned with the feeding center point (the center of the rotating target) is a crucial step to ensure process requirements, product quality, and safe production. In the early VAD (Vacuum-Adjustable Deposition) method for quartz glass preparation, since the burners were mostly located vertically, visual judgment of whether the burner center was aligned with the feeding center point could be achieved by using a plumb bob. However, in recent years, in the VAD method for quartz glass preparation, burners are mostly arranged at an angle, and the enclosed space inside the deposition furnace is small, making visual judgment using a plumb bob very limited and prone to significant measurement errors. Summary of the Invention

[0003] This invention addresses the problem that existing methods for visually determining whether the burner center is aligned with the feeding center using a vertical plumb bob are difficult to implement due to the limited space and large errors. It provides a method and system for determining the alignment of the burner center and the feeding center. Through the cooperation of the display unit and conductive components, it overcomes the inconvenience of alignment determination within the confined space of the deposition furnace. It can quickly determine whether the initial position between the burner and the target rod meets the requirements of the VAD deposition process, and confirm whether the burner center coincides with the feeding center. The operation is simple and convenient, and the accuracy of the judgment results is greatly improved. Furthermore, it is applicable to providing a basis for adjusting the initial position between the burner and the target rod in various directions, making it widely applicable.

[0004] The technical solution adopted in this invention is: A burner center and feeding center alignment determination system includes a power supply, a display unit, and a conductive component, which are electrically connected to form a circuit. In use, the fixed part of the conductive component is located in the center area of ​​the target surface of the target rod deposition, and the movable part of the conductive component is located at the feed pipe at the center of the burner. The state changes of the two parts of the conductive component can change the working state and / or display color of the display unit, thereby indicating whether the burner center and the feeding center are aligned and coincident. Furthermore, the conductive component includes a planar conductive element and a conductive contact rod; in use, the conductive element is laid flat in the center area of ​​the target surface of the target rod deposition, and the conductive contact rod is disposed in the central feed pipe of the burner, with the axial centers of the two coinciding. When the conductive contact rod contacts the conductive element, the circuit is connected, enabling the display unit; when there is no contact, the display unit is deactivated. Furthermore, the conductive element has two or more conductive regions arranged in concentric circles. The number of conductive regions is consistent with the number of colors that the display unit can display. Adjacent conductive regions are insulated from each other. The central conductive region is circular, and its center coincides with the axial center of the target rod. The remaining conductive regions are annular. When the conductive contact rod contacts different conductive regions, the display unit displays the corresponding color. Alternatively, the conductive element may have a conductive region that is circular and whose center coincides with the axial center of the target rod.

[0005] Furthermore, the conductive element includes a conductive foil or a conductive adhesive layer; And / or, the conductive contact rod includes a glass rod or a ceramic rod, and a metal wire laid along the axial center of the glass rod or the ceramic rod, wherein the portion of the metal wire in contact with the conductive element is exposed and extends in a straight line along the axial center direction of the glass rod or the ceramic rod.

[0006] Furthermore, the thickness of the conductive element is 0.01~3mm; And / or, when there are two or more conductive regions, from the inside out, the outer diameter of the innermost conductive region is 1~2mm, and the outer diameter of the remaining conductive regions increases by 0.5~5mm compared to the outer diameter of the adjacent conductive regions.

[0007] Furthermore, the conductive component includes a light source and a planar photosensitive element; in use, the light source can emit light along the axial direction of the burner's central feed pipe, or the light emitted by the light source can be adjusted in size by a light spot adjustment mechanism and then emitted along the axial direction of the burner's central feed pipe. The photosensitive element is laid flat in the central area of ​​the target surface of the target rod deposition target. When the light emitted by the light source irradiates the photosensitive element, the circuit is turned on, enabling the display unit; when not irradiated, the display unit is turned off. Furthermore, the photosensitive element has multiple photoresistor regions arranged concentrically, adjacent photoresistor regions are insulated from each other, the number of photoresistor regions is consistent with the number of colors that the display unit can display, the central photoresistor region is circular and its center coincides with the axial center of the target rod, and the remaining photoresistor regions are annular; when the light emitted by the light source comes into contact with different photoresistor regions, the display unit displays the corresponding color; Alternatively, the photosensitive element has a photoresistor region that is circular and whose center coincides with the axial center of the target rod.

[0008] Furthermore, the photosensitive element includes a film-like photosensitive material.

[0009] Furthermore, the thickness of the photosensitive element is 0.01~3mm; And / or, when there are two or more photoresistor regions, from the inside out, the outer diameter of the innermost photoresistor region is 1~2mm, and the outer diameter of the remaining photoresistor regions increases by 0.5~5mm compared to the outer diameter of the adjacent photoresistor regions. Based on the same inventive concept, the present invention also provides a method for determining whether the burner center and the feeding center coincide. Based on the aforementioned burner center and feeding center coincidence determination system, the method uses the state changes of the moving part and the fixed part of the conductive component to make the display unit display the corresponding working state and / or color, and then determines whether the burner center and the feeding center are aligned and coincident based on the display result of the display unit.

[0010] The beneficial effects of this invention are: This invention provides a method and system for determining the coincidence of the burner center and the feeding center. By cooperating between the display unit and the conductive components, it overcomes the inconvenience of alignment judgment in the enclosed and narrow space of the deposition furnace. It can quickly determine whether the initial position between the burner and the target rod meets the requirements of the VAD deposition process and determine whether the burner center coincides with the feeding center. The operation is simple and convenient, and the accuracy of the judgment result is greatly improved. It is also suitable for providing a basis for adjusting the initial position between the burner and the target rod in various directions, and has a wide range of applications. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of the composition of the burner center and feeding center coincidence judgment system in Example 1.

[0013] Figure 2 This is a schematic diagram of the electrical principle.

[0014] Figure 3 This is a schematic diagram of the composition of the burner center and feeding center coincidence judgment system in Example 2.

[0015] Figure 4 This is a schematic diagram of the burner center and feeding center coincidence judgment system in Example 3.

[0016] Figure 5 This is a schematic diagram of the composition of the burner center and feeding center coincidence judgment system in Example 4. Attached image description: 100P, target rod; 110P, deposition target surface; 200P, burner; 210P, central feed tube; 100. Power supply; 200. Multicolor display unit; 300. Conductive component; 400. Monochrome display unit; 310. Conductive element; 311. Conductive area; 320. Conductive contact rod; 330. Light source; 340. Photosensitive element; 341. Photoresistor area. Detailed Implementation

[0018] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0019] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, these are merely examples and are not intended to limit the present invention.

[0020] The embodiments of the invention will now be described in detail with reference to the accompanying drawings.

[0021] Example 1

[0022] Figure 1 This is a schematic diagram of the burner center and feed center coincidence determination system in Example 1. Figure 1As shown, the burner center and feed center coincidence determination system includes a power supply 100, a multi-color display unit 200, and a conductive component 300. The power supply 100, multi-color display unit 200, and conductive component 300 are electrically connected to form a circuit. The fixed portion of the conductive component 300 is located in the central region of the deposition target surface 110P on the target rod 100P, while the remaining movable portion is located within the central feed pipe 210P of the burner 200P. When the state between the two parts of the conductive component 300 (whether they are in contact, the contact position, etc.) changes, the operating state (e.g., enabled / disabled) and display color of the multi-color display unit 200 can change (e.g., displayed as green, yellow, or red when enabled). For example, when the moving part of the conductive component 300 contacts the center area of ​​its remaining fixed part, it displays green, indicating that the center of the burner 200P is aligned with the center of the deposition target 110P, that is, the center of the burner 200P coincides with the feeding center; if it displays red, it indicates that the center of the burner 200P is still horizontally offset from the center of the deposition target 110P, and further adjustment is needed; if there is no color display, it indicates that the center of the burner 200P is still horizontally offset from the center of the deposition target 110P, and a large adjustment is needed.

[0023] In this embodiment, the cooperation between the multi-color display unit and the conductive components overcomes the drawback of the inconvenience of alignment judgment in the enclosed and confined space of the deposition furnace. It can quickly determine whether the initial position between the burner and the target rod meets the requirements of the VAD deposition process, and determine whether the center of the burner (especially the central feed pipe of the burner) coincides with the feeding center (center of the rotating target deposition surface), that is, whether the center of the rotating target deposition surface is located on the center line of the burner. The operation is simple and convenient, and the accuracy of the judgment result is greatly improved. It is also suitable for providing a basis for adjusting the initial position between the burner and the target rod in various directions, and has a wide range of applications.

[0024] In the optimized technical solution of this embodiment, the conductive component 300 includes a planar conductive element 310 and a conductive contact rod 320. The overall thickness of the conductive element 310 is approximately 0.01~3mm, preferably 0.1~1mm. This suitable thickness allows the conductive element 310 to be laid flat on the central region of the deposition target surface 110P of the target rod 100P, while preventing the conductive contact rod 320 from damaging the conductive element 310 during translation. The conductive element 310 has multiple conductive regions 311 arranged concentrically, and the number of conductive regions 311 is consistent with the number of colors that the multicolor display unit 200 can display. Among them, the central conductive region 311 is circular, and its center coincides with the axial center of the target rod 100P. The remaining conductive regions 311 are annular; adjacent conductive regions 311 are insulated from each other. The conductive contact rod 320 is disposed inside the central feed pipe 210P of the burner 200P, and the axial centers of the two coincide. When the conductive contact 320 contacts the conductive area 311, the circuit formed by the power supply 100, the multi-color display unit 200, and the conductive component 300 is turned on, and the multi-color display unit 200 is activated. Conversely, the multi-color display unit 200 is deactivated and no color is displayed. When the conductive contact 320 contacts different conductive areas 311, the circuit formed by the power supply 100, the multi-color display unit 200, and the conductive component 300 is turned on, and the multi-color display unit 200 displays the corresponding color, such as green, yellow, or red when activated. In other words, the power supply 100, the driving circuit for a corresponding color in the multi-color display unit 200, the conductive contact 320, and the corresponding conductive area 311 can form a conductive circuit, so that the multi-color display unit 200 displays the corresponding color. That is, in the circuit formed by the power supply 100, the multi-color display unit 200, and the conductive component 300, the conductive contact 320 acts like a switch, which can control the conduction of different circuits, thereby displaying the corresponding color.For example, on the conductive element 310, different conductive areas 311 correspond to green, yellow, red, etc., from the inside out. When the conductive contact rod 320 contacts the innermost conductive area 311 on the conductive element 310, the multicolor display unit 200 displays green, indicating that the center of the burner 200P is aligned with the center of the deposition target surface 110P (the horizontal distance between the contact point of the conductive contact rod 320 and the center of the conductive element 310 is 0~1mm). That is, the center of the burner 200P coincides with the feeding center, and the initial position between the burner 200P and the target rod 100P meets the requirements of the VAD deposition process and no adjustment is needed. When the conductive contact rod 320 contacts the second conductive area 311 closest to the innermost part on the conductive element 310, the multicolor display unit 200 displays yellow, indicating that the center of the burner 200P is roughly aligned with the center of the deposition target surface 110P (the horizontal distance between the contact point of the conductive contact rod 320 and the center of the conductive element 310 is 0~1mm). If the horizontal distance is 1.01~2mm, the initial position between the burner 200P and the target rod 100P roughly meets the requirements of the VAD deposition process, and the position of the burner can be adjusted further or the current state can be maintained. If the multicolor display unit 200 displays red, it means that the center of the burner 200P is not aligned with the feeding center (the horizontal distance between the contact point of the conductive rod 320 and the center of the conductive element 310 is 2.01~5mm), and the initial position between the burner 200P and the target rod 100P does not meet the requirements of the VAD deposition process, and further adjustment is required. If the multicolor display unit 200 does not display any color, it means that the center of the burner 200P is completely deviated from the feeding center (the horizontal distance between the contact point of the conductive rod 320 and the center of the conductive element 310 is >5.01mm), and the initial position between the burner 200P and the target rod 100P does not meet the requirements of the VAD deposition process, and further significant adjustment is required.

[0025] In this optimized technical solution, the outer diameter of the innermost conductive area 311 on the conductive element 310, from the inside out, is 1~2mm, and the outer diameters of the remaining conductive areas 311 increase by 0.5~5mm compared to the adjacent conductive areas 311. Therefore, when the multi-color display unit 200 displays the corresponding color, the horizontal distance between the contact point of the conductive contact rod 320 and the conductive element 310 and the center of the conductive element 310 can be roughly determined. This allows for a rough determination of the adjustment range required when aligning the center of the burner 200P with the feeding center, which is beneficial for adjusting the initial position / initial state of the burner 200P.

[0026] In this optimized technical solution, the multicolor display unit 200 can be a light bulb, LED display, OLED display, plasma display, etc. of different colors. The conductive element 310 can be a conductive foil (copper foil, aluminum foil, etc.) or a conductive adhesive layer, directly disposed in the central area of ​​the deposition target surface 110P of the target rod 100P. Alternatively, the conductive element 310 can be an insulating substrate and a conductive foil (copper foil, aluminum foil, etc.) or conductive adhesive layer disposed on the insulating substrate, and then disposed in the central area of ​​the deposition target surface 110P of the target rod 100P. The conductive contact rod 320 is a glass rod / ceramic rod and a metal wire laid along the axial center of the glass rod / ceramic rod (the part of the metal wire in contact with the conductive element 310 needs to be exposed and kept in a straight line extending along the axial center direction of the glass rod or ceramic rod, with a diameter of 0.5~1mm).

[0027] Taking red, yellow, and green light bulbs and a glass rod with a metal wire as an example, three concentric aluminum foil rings (outer diameters of 2mm, 4mm, and 6mm, numbered 1# to 3#) are first pasted onto the center area of ​​the deposition target surface 110P on the target rod 100P. Each aluminum foil ring is electrically connected to a light bulb and a power supply, ultimately forming a structure similar to... Figure 2 The circuit structure is as follows: A glass rod is fixed on the central feed pipe 210P of the burner 200P, ensuring that the axial centers of the two coincide. The glass rod changes with the state (position, tilt angle) of the burner 200P, so that it can contact different aluminum foil rings, thereby lighting up the red, yellow or green light, and thus determining whether the center of the burner 200P and the feeding center are aligned and coincident.

[0028] Example 2 Figure 3 This is a schematic diagram of the burner center and feed center coincidence determination system in Example 2. Figure 1 As shown, the burner center and feeding center coincidence determination system includes a power supply 100, a multi-color display unit 200, and a conductive component 300. The power supply 100, the driving circuit for a corresponding color in the multi-color display unit 200, and the conductive component 300 can form a conductive loop, so that the multi-color display unit 200 displays the corresponding color. That is, in the loop formed by the power supply 100, the multi-color display unit 200, and the conductive component 300, the conductive component 300 acts like a switch, which can control the conduction of different loops, thereby displaying the corresponding color.

[0029] The conductive component 300 includes a light source 330 and a planar photosensitive element 340. Since most existing burners 200P are made of glass, light can pass through. In this embodiment, the light source 330 can emit light (such as laser, visible light, ultraviolet light, or infrared light) along the axial direction of the central feed tube 210P of the burner 200P, or the light emitted by the light source 330 can first pass through a spot adjustment mechanism (not shown in the figure) to adjust the spot size before being emitted along the axial direction of the central feed tube 210P of the burner 200P. The planar photosensitive element 340 has a thickness of approximately 0.01~3mm, preferably 0.1~1mm. This suitable thickness allows the photosensitive element 340 to be laid flat on the central region of the deposition target surface 110P of the target rod 100P. The photosensitive element 340 has multiple photoresistor regions 341 arranged concentrically, and the number of photoresistor regions 341 is consistent with the number of colors that the multicolor display unit 200 can display. The central photoresistor region 341 is circular, with its center coinciding with the axial center of the target rod 100P. The remaining photoresistor regions 341 are annular. Adjacent photoresistor regions 341 are insulated from each other. When light emitted by the light source 330 comes into contact with the photoresistor region 341, the circuit formed by the power supply 100, the multicolor display unit 200, and the conductive component 300 is turned on, and the multicolor display unit 200 is activated. Conversely, the multicolor display unit 200 is deactivated, and no color is displayed. When light emitted by the light source 330 comes into contact with different photoresistor regions 341 (whose resistance value decreases rapidly after being excited by the light emitted by the light source 330), the circuit formed by the power supply 100, the multicolor display unit 200, and the conductive component 300 is turned on, and the multicolor display unit 200 is activated. 0 displays the corresponding color, such as green, yellow, or red when enabled. That is, the power supply 100, the driving circuit of the corresponding color in the multi-color display unit 200, and the corresponding photoresistor area 341 can form a conductive loop, so that the multi-color display unit 200 displays the corresponding color. In other words, in the loop formed by the power supply 100, the multi-color display unit 200, and the conductive component 300, when the light emitted by the light source 330 acts like a switch, it can control the conduction of different loops, thereby displaying the corresponding color.For example, on the photosensitive element 340, different photoresistor regions 341 correspond to green, yellow, red, etc., from the inside out; when the light emitted by the light source 330 comes into contact with the innermost photoresistor region 341 on the photosensitive element 340, the multicolor display unit 200 displays green, indicating that the center of the burner 200P is aligned with the center of the deposition target surface 110P (the horizontal distance between the contact point between the light emitted by the light source 330 and the photosensitive element 340, i.e., the light spot and the center of the photosensitive element 340, is 0~1mm), which means that the burner is in contact with the target surface 110P. The center of burner 200P coincides with the feeding center. The initial position between burner 200P and target rod 100P meets the requirements of VAD deposition process and requires no adjustment. When the light emitted by light source 330 contacts the second photoresistor region 341 near the innermost side of photosensitive element 340, the multicolor display unit 200 displays yellow, indicating that the center of burner 200P is approximately aligned with the center of deposition target surface 110P (the contact point between the light emitted by light source 330 and photosensitive element 340, i.e., the light spot and photosensitive element 340). If the horizontal distance between the centers is 1.01~2mm, the initial position between the burner 200P and the target rod 100P roughly meets the requirements of the VAD deposition process, and the position of the burner can be further adjusted or the current state can be maintained. If the multicolor display unit 200 displays red, it means that the center of the burner 200P is not aligned with the feeding center (the horizontal distance between the contact point of the light emitted by the light source 330 and the photosensitive element 340, i.e., the light spot and the center of the photosensitive element 340, is 2.01~5mm), and the initial position between the burner 200P and the target rod 100P does not meet the requirements of the VAD deposition process, and further adjustment is required. If the multicolor display unit 200 does not display any color, it means that the center of the burner 200P is completely deviated from the feeding center (the horizontal distance between the contact point of the light emitted by the light source 330 and the photosensitive element 340, i.e., the light spot and the center of the photosensitive element 340, is >5.01mm), and the initial position between the burner 200P and the target rod 100P does not meet the requirements of the VAD deposition process, and further significant adjustment is required.

[0030] It should be noted that the structure of the burner 200P in this embodiment is as shown in CN216273732U, "A High-Efficiency Burner for Producing Large-Size Quartz Glass", and CN210048651U, "An Oxy-Hydrogen Flame Burner for Gas-Phase Synthesis of Quartz Glass Bubbles", etc., which are existing technologies disclosed in the industry. This embodiment does not involve any adjustment to the material or structure of the burner 200P. The light spot adjustment mechanism used in this embodiment (whose structure is shown in CN207716139U, "Light Spot Adjustment Mechanism and Uniform Light Lamp", and CN212097539U, etc.) mainly adjusts the size of the light spot. It adopts existing technologies disclosed in the industry and only makes adaptive adjustments according to installation requirements. Those skilled in the art do not need to make any creative efforts. The principle of achieving circuit conduction of the photoexcitation photosensitive circuit in this embodiment is an existing technology disclosed in the industry, such as CN216273732U, "A Wireless Laser Targeting Machine" References such as 201040182Y, "Contactless Potentiometer" (CN100570760C), etc., only require adaptive adjustments based on installation needs, and those skilled in the art need not expend creative effort. In this embodiment, photosensitive materials such as those shown in "Photoresistors and Their Preparation Methods" (CN100372130C) and "A Preparation Method of Titanium Dioxide Nanofiber Ultraviolet Photoresistors" (CN102867887B) are used, employing publicly available prior art. Only adaptive adjustments are made based on installation needs, and those skilled in the art need not expend creative effort.

[0031] In this embodiment, the cooperation between the multi-color display unit and the conductive components overcomes the drawback of the inconvenience of alignment judgment in the enclosed and confined space of the deposition furnace. It can quickly determine whether the initial position between the burner and the target rod meets the requirements of the VAD deposition process, and determine whether the center of the burner (especially the central feed pipe of the burner) coincides with the feeding center (the center of the deposition target surface of the rotating target) (whether the center of the deposition target surface of the rotating target is located on the center line of the burner). The operation is simple and convenient, and the accuracy of the judgment results is greatly improved. It is also suitable for providing a basis for adjusting the initial position between the burner and the target rod in various directions, and has a wide range of applications.

[0032] In this optimized technical solution, the outer diameter of the innermost photoresistor region 341 on the photosensitive element 340, from the inside out, is 1~2mm, and the outer diameters of the remaining photoresistor regions increase by 0.5~5mm compared to the outer diameters of adjacent photoresistor regions. Therefore, when the multicolor display unit 200 displays the corresponding color, the horizontal distance between the contact point between the light emitted by the light source 330 and the photosensitive element 340 (i.e., the light spot and the center of the photosensitive element 340) can be roughly determined. This allows for a rough determination of the adjustment range required when aligning the center of the burner 200P with the feeding center, which is beneficial for adjusting the initial position / initial state of the burner 200P.

[0033] In this optimized technical solution, the multicolor display unit 200 can be a light bulb, LED display, OLED display, plasma display, etc. of different colors. The photosensitive element 340 can be a film-like photosensitive material, directly disposed in the central region of the deposition target surface 110P on the target rod 100P, or the photosensitive element 340 can be an insulating substrate and a film-like photosensitive material disposed on the insulating substrate, and then disposed in the central region of the deposition target surface 110P on the target rod 100P.

[0034] Example 3 Figure 4 This is a schematic diagram of the burner center and feed center coincidence determination system in Example 1. Figure 1 As shown, the burner center and feeding center coincidence determination system includes a power supply 100, a monochrome display unit 400, and a conductive component 300. The power supply 100, monochrome display unit 400, and conductive component 300 are electrically connected to form a circuit. The fixed portion of the conductive component 300 is located in the central region of the deposition target surface 110P on the target rod 100P, while the remaining movable portion is located within the central feeding pipe 210P of the burner 200P. The structure of the conductive component 300 is similar to that in Embodiment 1, including a conductive element 310 and a conductive contact rod 320, with only one conductive area 311 on the conductive element 310. When the state (whether in contact) between the two parts of the conductive component 300 changes, the operating state (e.g., enabled / disabled) and display color of the monochrome display unit 400 can change (e.g., displaying green, yellow, or red when enabled). For example, when the conductive contact rod 320 contacts the conductive area 311, it displays green, indicating that the center of the burner 200P is aligned with the center of the deposition target 110P, that is, the center of the burner 200P coincides with the feeding center; if there is no color display, it means that the center of the burner 200P and the center of the deposition target 110P still have a large horizontal offset, which requires a large adjustment.

[0035] In this embodiment, the cooperation between the monochrome display unit and the conductive components overcomes the drawback of the inconvenience of alignment judgment in the enclosed and confined space of the deposition furnace. It can quickly determine whether the initial position between the burner and the target rod meets the requirements of the VAD deposition process, and determine whether the center of the burner (especially the central feed pipe of the burner) coincides with the feeding center (the center of the deposition target surface of the rotating target) (whether the center of the deposition target surface of the rotating target is located on the center line of the burner). The operation is simple and convenient, and the accuracy of the judgment results is greatly improved. It is also suitable for providing a basis for adjusting the initial position between the burner and the target rod in various directions, and has a wide range of applications.

[0036] Example 4 Figure 5This is a schematic diagram of the burner center and feed center coincidence determination system in Example 1. Figure 1 As shown, the burner center and feeding center coincidence determination system includes a power supply 100, a monochrome display unit 400, and a conductive component 300. The power supply 100, monochrome display unit 400, and conductive component 300 are electrically connected to form a circuit. The fixed portion of the conductive component 300 is located in the central region of the deposition target surface 110P on the target rod 100P, while the remaining movable portion is located within the central feeding pipe 210P of the burner 200P. The structure of the conductive component 300 is similar to that in Embodiment 2, including a light source 330 and a photosensitive element 340, where the photosensitive element 340 has only one photoresistor region 341. When the light emitted by the light source 330 comes into contact with the photoresistor region 341 on the photosensitive element 340, the monochrome display unit 400 displays green, indicating that the center of the burner 200P is aligned with the center of the deposition target 110P (the horizontal distance between the contact point of the light emitted by the light source 330 and the photosensitive element 340, i.e., the light spot and the center of the photosensitive element 340, is 0~1mm). In other words, the center of the burner 200P coincides with the feeding center, and the initial position between the burner 200P and the target rod 100P meets the requirements of the VAD deposition process and no adjustment is needed. When the monochrome display unit 400 does not display any color, it indicates that the center of the burner 200P is completely deviated from the feeding center (the horizontal distance between the contact point of the light emitted by the light source 330 and the photosensitive element 340, i.e., the light spot and the center of the photosensitive element 340, is >5.01mm). The initial position between the burner 200P and the target rod 100P does not meet the requirements of the VAD deposition process and requires further significant adjustment.

[0037] In this embodiment, the cooperation between the monochrome display unit and the conductive components overcomes the drawback of the inconvenience of alignment judgment in the enclosed and confined space of the deposition furnace. It can quickly determine whether the initial position between the burner and the target rod meets the requirements of the VAD deposition process, and determine whether the center of the burner (especially the central feed pipe of the burner) coincides with the feeding center (the center of the deposition target surface of the rotating target) (whether the center of the deposition target surface of the rotating target is located on the center line of the burner). The operation is simple and convenient, and the accuracy of the judgment results is greatly improved. It is also suitable for providing a basis for adjusting the initial position between the burner and the target rod in various directions, and has a wide range of applications.

[0038] Example 5 A method for determining the overlap between the burner center and the feeding center, implemented based on the burner center and feeding center overlap determination system in Embodiment 1, Embodiment 2, Embodiment 3, or Embodiment 4, includes the following steps: Step S1: Set the fixing part of the conductive component 300 on the deposition target surface 110P of the target rod 100P, and keep the center of the fixing part coincide with the axial center of the deposition target surface 110P. Step S2: A movable part of a conductive component 300 is provided at the central feed pipe 210P of the burner 200P, so that it moves or emits light as the position of the burner 200P changes. Step S3: Electrically connect the conductive component 300, the power supply 100, and the display unit to form a circuit; Step S4: Determine the degree of horizontal offset between the burner center and the feeding center based on the color or on / off state of the display unit, and adjust the position of burner 200P accordingly.

[0039] In this embodiment, the cooperation between the display unit and the conductive components overcomes the drawback of the inconvenience of alignment judgment in the enclosed and narrow space of the deposition furnace. It can quickly determine whether the initial position between the burner and the target rod meets the requirements of the VAD deposition process, and determine whether the center of the burner (especially the central feed pipe of the burner) coincides with the feeding center (the center of the deposition target surface of the rotating target) (whether the center of the deposition target surface of the rotating target is located on the center line of the burner). The operation is simple and convenient, and the accuracy of the judgment results is greatly improved. It is also suitable for providing a basis for adjusting the initial position between the burner and the target rod in various directions, and has a wide range of applications.

Claims

1. A system for determining the overlap between the burner center and the feeding center, characterized in that, It includes a power supply, a display unit, and a conductive component, which are electrically connected to form a circuit. In use, the fixed part of the conductive component is located in the center area of ​​the target surface of the target rod deposition, and the movable part of the conductive component is located at the central feed pipe of the burner. The state changes of the two parts of the conductive component can change the working state and / or display color of the display unit, thereby indicating whether the center of the burner and the feeding center are aligned and coincident.

2. The burner center and feed center coincidence judgment system according to claim 1, characterized in that, The conductive component includes a planar conductive element and a conductive contact rod. In use, the conductive element is laid flat in the center area of ​​the target surface of the target rod deposition, and the conductive contact rod is placed inside the central feed pipe of the burner, with their axial centers coinciding. When the conductive contact rod contacts the conductive element, the circuit is connected, enabling the display unit; when there is no contact, the display unit is deactivated.

3. The burner center and feed center coincidence judgment system according to claim 2, characterized in that, The conductive element has two or more conductive regions arranged in concentric circles. The number of conductive regions is the same as the number of colors that the display unit can display. Adjacent conductive regions are insulated from each other. The central conductive region is circular, and its center coincides with the axial center of the target rod. The remaining conductive regions are annular. When the conductive contact rod contacts different conductive regions, the display unit displays the corresponding color. Alternatively, the conductive element may have a conductive region that is circular and whose center coincides with the axial center of the target rod.

4. The burner center and feed center coincidence judgment system according to claim 2, characterized in that, The conductive element includes a conductive foil or a conductive adhesive layer; And / or, the conductive contact rod includes a glass rod or a ceramic rod, and a metal wire laid along the axial center of the glass rod or the ceramic rod, wherein the portion of the metal wire in contact with the conductive element is exposed and extends in a straight line along the axial center direction of the glass rod or the ceramic rod.

5. The burner center and feed center coincidence judgment system according to claim 2, characterized in that, The thickness of the conductive element is 0.01~3mm; And / or, when there are two or more conductive regions, from the inside out, the outer diameter of the innermost conductive region is 1~2mm, and the outer diameter of the remaining conductive regions increases by 0.5~5mm compared to the outer diameter of the adjacent conductive regions.

6. The burner center and feed center coincidence judgment system according to claim 1, characterized in that, The conductive component includes a light source and a planar photosensitive element. In use, the light source can emit light along the axial direction of the central feed pipe of the burner, or the light emitted by the light source can be adjusted in size by a light spot adjustment mechanism and then emitted along the axial direction of the central feed pipe of the burner. The photosensitive element is laid flat in the central area of ​​the target surface of the target rod deposition. When the light emitted by the light source irradiates the photosensitive element, the circuit is turned on, enabling the display unit. When not irradiated, the display unit is turned off.

7. The burner center and feed center coincidence determination system according to claim 6, characterized in that, The photosensitive element has multiple photoresistor regions arranged in concentric circles. Adjacent photoresistor regions are insulated from each other. The number of photoresistor regions is consistent with the number of colors that the display unit can display. The central photoresistor region is circular, and its center coincides with the axial center of the target rod. The remaining photoresistor regions are annular. When the light emitted by the light source comes into contact with different photoresistor regions, the display unit displays the corresponding color. Alternatively, the photosensitive element has a photoresistor region that is circular and whose center coincides with the axial center of the target rod.

8. The burner center and feed center coincidence judgment system according to claim 6, characterized in that, The photosensitive element includes a film-like photosensitive material.

9. The burner center and feed center coincidence judgment system according to claim 7, characterized in that, The thickness of the photosensitive element is 0.01~3mm; And / or, when there are two or more photoresistor regions, from the inside out, the outer diameter of the innermost photoresistor region is 1~2mm, and the outer diameter of the remaining photoresistor regions increases by 0.5~5mm compared to the outer diameter of the adjacent photoresistor regions.

10. A method for determining the overlap between the burner center and the feeding center, implemented based on the burner center and feeding center overlap determination system as described in any one of claims 1 to 9, characterized in that, By changing the state of the moving and fixed parts of the conductive components, the display unit displays the corresponding working state and / or color. Then, based on the display results, it is determined whether the burner center and the feeding center are aligned and coincident.

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