Chip test notch, chip test device and chip test system

Abstract

The invention belongs to the technical field of chip testing, and particularly discloses a chip testing notch, a chip testing device and a chip testing system, and the chip testing notch, the chip testing device and the chip testing system are used for allowing a chip testing clamp to be inserted to test a chip. The test plate is arranged above the heating plate, a test station for accommodating the chip test clamp is formed between the test plate and the heating plate, and at least one reed is arranged at the position, opposite to the test station, of the test plate; wherein when the chip test fixture is placed at the test station, the reed is elastically crimped on a test contact on the upper surface of the chip test fixture. The chip test fixture can solve the problem that the probe is easy to damage when the current chip test fixture is plugged in and pulled out of the drawer, and is suitable for automatic aging test, so that the aging test efficiency is improved, and the safety and reliability of the test process are guaranteed.

Description

Technical Field

[0001] This application belongs to the field of chip testing technology, and more specifically, relates to a chip testing slot, a chip testing device, and a chip testing system. Background Technology

[0002] In the mass production of electronic products, aging and testing are crucial steps for companies to ensure product quality. Their purpose is to apply stress to effectively eliminate components that fail early or lack stability, thereby ensuring the final product has high reliability. Aging tests typically use aging test furnaces, which utilize electrical energy or other energy sources to heat components in a constant high-temperature environment, driving them to operate continuously for a certain period. During this process, any faulty components can be identified and replaced, thus improving the overall quality of the product.

[0003] In widely used ambient and high-temperature chip aging test systems, the common approach is to install the chip-carrying test fixture inside an aging drawer, and then insert the entire system into the test cabinet for aging operations. For example, Chinese patent application CN116773998A discloses a high-temperature chip testing system. This system includes a housing and multiple drawer units, each of which can be embedded in a corresponding mounting opening in the housing to perform aging tests. The drawer units carry the fixture, while the housing controls the test environment. During testing, the chip-containing fixture is vertically inserted into the test board of the drawer unit. Vertical extension and retraction contact is achieved between the chip and the drawer unit through several external contact points on the lower surface of the fixture's circuit board and multiple probes on the upper surface of the test board, thus establishing an electrical connection between the chip and the drawer unit.

[0004] However, the disclosed structure still faces some significant challenges in practical applications: due to the fine size and dense arrangement of the probes on the drawer unit, the alignment accuracy of the fixture contacts is extremely high. Typically, professionals need to manually insert the fixture vertically into the drawer unit and then push the entire drawer into the housing. This process is not only cumbersome but also affects testing efficiency. Especially in automated aging test equipment, if a robotic arm is used to directly load the fixture, probe damage is easily caused by alignment deviations or operational collisions, severely impacting the drawer unit's lifespan and testing reliability.

[0005] In addition, key components that provide the testing environment for the chip (such as heat sink components) are all integrated inside the drawer unit, making the drawer itself more complex and larger in size. This not only increases the mechanical load of a single insertion and removal but also reduces its flexibility in being used between multiple devices, thus restricting the throughput efficiency and equipment utilization of aging tests as a whole.

[0006] Therefore, in order to solve the problems of poor automation compatibility, easy damage to operation, bulky structure and low turnover efficiency in current aging tests, it is urgent to develop a new type of fixture mounting and test interface solution that is compatible with automated equipment, so as to improve the overall efficiency of aging tests and ensure high safety and high reliability of the test process. Summary of the Invention

[0007] In response to the deficiencies or improvement needs of existing technologies, this application provides a chip test slot, a chip test device, and a chip test system, which aims to solve the problem that the insertion and removal of chip test fixtures in the drawer can easily cause probe damage. It is suitable for use in automated aging tests to improve aging test efficiency and ensure the safety and reliability of the test process.

[0008] In a first aspect, this application provides a chip test slot for inserting a chip test fixture to test a chip, comprising: Heating plate; A test board is disposed above the heating plate, and a test station for accommodating the chip test fixture is formed between the test board and the heating plate. At least one spring is provided on the test board at a position opposite to the test station. When the chip test fixture is placed in the test station, the spring is elastically pressed against the test contact on the upper surface of the chip test fixture.

[0009] As a further preferred embodiment, the chip test slot further includes a base, which is located between the heating plate and the test plate, and the test plate is mounted above the heating plate via the base.

[0010] As a further preferred embodiment, the test board is electrically connected to the heating plate via an adapter cable to supply power to the heating plate.

[0011] As a further preferred embodiment, the base is provided with at least one test through hole, which is disposed opposite to the chip slot on the chip test fixture for placing the chip. At least one light-receiving PD board is provided on the side of the base facing away from the test station, which is disposed opposite to the test through hole so as to receive the light emitted by the chip through the test through hole during the test.

[0012] As a further preferred embodiment, the base has a test through hole with an elongated cross-section; or, the base has a plurality of test through holes spaced apart, each test through hole corresponding one-to-one with a plurality of chip slots on the chip test fixture.

[0013] As a further preferred embodiment, the light-receiving PD board is connected to a driving mechanism, which is used to drive the light-receiving PD board to move relative to the base.

[0014] As a further preferred embodiment, a base is fixedly connected to the upper side of the heating plate, and support arms extend from both ends of the base. A floating seat is provided above the base, and one end of the test plate with the spring is connected to the floating seat. A pin is installed on the floating seat corresponding to the support arm, and a pin through hole is provided on the support arm corresponding to the position of the pin. The lower end of the pin passes through the pin through hole and extends downward out of the support arm. The pin can slide up and down in the pin through hole to drive the floating seat and the test plate to rise and fall.

[0015] As a further preferred embodiment, at least one side of the pin is provided with a screw connecting the base and the floating seat, the floating seat and the support arm are provided with screw mounting holes for installing the screw, the upper section of the screw is fitted with a spring and passes through the screw mounting hole on the floating seat, and the lower section of the screw is threadedly connected to the screw mounting hole on the support arm.

[0016] Secondly, this application also provides a chip testing apparatus, which includes: The chip test slot as described above; A chip test fixture is detachably inserted into the chip test slot, and the chip test fixture is provided with test contacts; When the chip test fixture is inserted into the chip test slot, the spring in the chip test slot contacts and connects with the test contact.

[0017] Thirdly, this application also provides a chip testing system, which includes the chip testing apparatus as described above.

[0018] In summary, compared with the prior art, the technical solutions conceived in this application have the following main technical advantages: 1. The chip test slot provided in this application integrates power application, pressure application, heating, and light absorption functions within the slot, combining the functions of a traditional drawer unit and a mounting port. Eliminating the drawer unit significantly simplifies the structure of the aging test equipment, and the lightweight design significantly reduces equipment costs. Integrating key components that provide the testing environment for the chip (such as heat sink components) inside the test slot simplifies the drawer's structure and reduces its size, not only reducing the mechanical load of a single insertion / removal but also increasing its flexibility for use across multiple devices, thereby improving the overall throughput efficiency and equipment utilization of the aging test.

[0019] 2. The chip test slot provided in this application achieves electrical connection through the pressure contact between the spring contacts within the test slot and the test contacts on the chip test fixture. This is suitable for the insertion and removal operations of robotic arms in automated equipment, thereby avoiding damage to the probes in the traditional drawer unit caused by insertion and removal operations within the test slot. After the chip test fixture is loaded, the spring contacts exert a downward pressing force on the chip test fixture, ensuring that the bottom surface of the chip is tightly fitted with the heating plate, maintaining good thermal contact.

[0020] 3. The chip test slot provided in this application integrates a lifting structure for spring lifting. Based on the structure of the floating seat and pin, when the chip test fixture is loaded or unloaded, the spring can move up and down with the floating seat under the action of the pusher on the external handling device. During the entire process of assembling and disassembling the chip test fixture (including the process of inserting the chip test fixture into the chip test slot and pulling it out of the chip test slot), the spring can be lifted first to avoid sliding contact with the test contacts on the chip test fixture. This will not cause wear to the spring and test contacts, nor will it generate dust and debris due to contact friction to contaminate the chip and chip test fixture, thus ensuring the normal conduction of aging tests.

[0021] 4. The chip test slot provided in this application has a lifting structure with screws and springs. The screws securely connect the floating seat to the base. By using the springs, the floating seat moves slowly under force, preventing the test board from breaking due to sudden force.

[0022] 5. The chip test slot provided in this application has a heating plate that is electrically connected to the test board via an adapter cable. The test board supplies power to the heating plate, avoiding the need to set up a separate power supply for the heating plate and saving equipment costs. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the chip test slot described in this application; Figure 2 for Figure 1 A schematic diagram of the chip's test slot from another perspective; Figure 3 for Figure 1 The front view of the chip test slot shown; Figure 4 for Figure 1 The right view of the chip test slot shown; Figure 5 This is another structural schematic diagram of the light-receiving PD board inside the chip test slot described in this application; Figure 6 This is a schematic diagram of another embodiment of the chip test slot described in this application; Figure 7 for Figure 6A schematic diagram of the chip test slot from another perspective; Figure 8 for Figure 6 The right view of the floating seat in the chip test slot before it is lifted; Figure 9 for Figure 8 The diagram shows a cross-sectional view of the floating seat after it has been raised. Figure 10 A schematic diagram of the local structure under force when the pin and pusher are in contact; Figure 11 for Figure 6 The front cross-sectional view of the chip test slot before the pin is pushed up. Figure 12 for Figure 6 The front cross-sectional view of the chip test slot after the pin is pushed up. Figure 13 This is a schematic diagram of the chip testing device described in this application.

[0024] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein: 10. Heating plate; 20. Test board; 21. Test station; 22. Spring; 23. Adapter cable; 30. Base; 31. Test through hole; 32. Light-receiving PD board; 34. Support arm; 40. Floating seat; 41. Pin; 42. Screw; 43. Spring; 60. Push claw; 70. Groove mounting plate. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0026] The following is in conjunction with the appendix Figure 1 - Appendix Figure 13 This application will be described in further detail.

[0027] Implementation Method 1: This application provides a chip test slot for inserting a chip test fixture to test a chip. It includes a heating plate 10 and a test plate 20. The test plate 20 is disposed above the heating plate 10. A test station 21 for accommodating the chip test fixture is formed between the test plate 20 and the heating plate 10. At least one spring 22 is provided at a position opposite to the test station 21 on the test plate 20. When the chip test fixture is placed in the test station 21, the spring 22 is elastically pressed against the test contacts on the upper surface of the chip test fixture.

[0028] The chip test slot described in this application achieves electrical connection through the pressure contact between the spring 22 inside the test slot and the test contacts on the chip test fixture. This adapts to the insertion and removal operations of the robotic arm in automated equipment, thereby avoiding damage to the probes caused by insertion and removal operations within the test slot. Simultaneously, the spring 22 applies a downward pressure to the chip test fixture after loading, ensuring a tight fit between the bottom surface of the chip test fixture and the heating plate 10 for good thermal contact.

[0029] The chip test slot described in this application enables the chip test fixture to be powered and pressurized by setting a spring in the slot; and enables the heating function by setting a heating plate in the slot. It combines the functions of the traditional drawer unit and the mounting port. This application eliminates the drawer unit, which greatly simplifies the structure of the aging test equipment, and the lightweight design significantly reduces the equipment cost.

[0030] The following section will provide a detailed description of the specific structure of each part of the chip test slot described in this application, as well as the position and connection relationship between each part.

[0031] The chip test slot includes a test board 20 and a heating plate 10, such as Figure 1 and Figure 2 As shown, the test plate 20 and the heating plate 10 are arranged vertically opposite each other and parallel to each other. In this embodiment, the test plate 20 and the heating plate 10 are connected by a base 30. The bottom surface of the base 30 is fixedly installed on the rear end of the upper side of the heating plate 10, and the top surface of the base 30 is fixedly installed on the lower side of the test plate 20.

[0032] A test station 21 with an opening facing forward is formed between the test board 20, the heating plate 10 and the base 30. The test station 21 is used to place the chip test fixture, which is loaded or unloaded by insertion or extraction.

[0033] A spring 22 is provided on the lower side of the test board 20 corresponding to the position of the test station 21. The spring 22 is used for electrical connection with the chip test fixture. The upper side of the chip test fixture has at least one test contact that is conductive to the chip. When the chip test fixture is placed in the test station 21, the spring 22 is pressed into contact with the test contact on the chip test fixture to achieve electrical connection. In addition, since the spring 22 has a certain elastic deformation, when the chip test fixture is inserted laterally into the test station 21, the spring 22 is compressed and deformed, thereby forming a soft contact with the chip test fixture. After loading, the spring 22 exerts a downward pressing force on the chip test fixture, so that the bottom surface of the chip test fixture is tightly attached to the heating plate 10 to maintain good thermal contact.

[0034] Better, such as Figure 2 As shown, in this embodiment, a row of springs 22 is arranged on the test board 20 corresponding to the test station 21. Multiple springs 22 are spaced apart along the length of the heating plate 10. Each spring 22 is independent of the others and corresponds one-to-one with multiple test contacts on the upper surface of the chip test fixture. The number and arrangement of the springs 22 can be set according to the number and arrangement of the test contacts on the chip test fixture, and no specific limitation is made here.

[0035] According to one embodiment of this application, such as Figure 4 As shown, the test board 20 is electrically connected to the heating plate 10 via an adapter cable 23 to supply power to the heating plate 10. The heat from the heating plate 10 is transferred to the chip through the chip test fixture, providing a high-temperature testing environment for the chip. The adapter cable 23 avoids the need for a separate power supply for the heating plate 10, saving equipment costs.

[0036] According to one embodiment of this application, such as Figures 3 to 5 As shown, at least one test through hole 31 is provided on the base 30. The test through hole 31 is arranged opposite to the chip slot on the chip test fixture for placing the chip. At least one light-receiving PD board 32 is provided on the side of the base 30 facing away from the test station 21. The light-receiving PD board 32 is arranged opposite to the test through hole 31 so as to receive the light emitted by the chip through the test through hole 31 during the test.

[0037] In an optional embodiment, such as Figure 3 As shown, a long, narrow test through-hole 31 is horizontally formed on the base 30. Multiple light-receiving PD boards 32 are arranged on the side of the base 30 facing away from the test station 21. The number and position of the light-receiving PD boards 32 correspond one-to-one with the chip slots on the chip test fixture. During testing, the light emitted by the chip shines through the long, narrow through-hole onto the corresponding light-receiving PD board 32. The light-receiving PD board 32 is electrically connected to the test system, transmitting the detected optical power to the test system.

[0038] In another optional embodiment, the base 30 is provided with a plurality of test through holes 31 spaced apart, each test through hole 31 corresponding to a plurality of chip slots on the chip test fixture; on the side of the base 30 facing away from the test station 21, each test through hole 31 is provided with a light-receiving PD board 32. The light emitted by each chip passes through the corresponding test through hole 31 and illuminates the corresponding light-receiving PD board 32. The light-receiving PD board 32 is electrically connected to the test system and transmits the detected optical power to the test system.

[0039] Better, such as Figure 5 As shown, the light-receiving PD board 32 is connected to a driving mechanism (not shown in the figure), which is used to move the light-receiving PD board 32 relative to the base 30. During testing, the light-receiving PD board 32 moves sequentially to the corresponding position of each chip's light emission under the drive mechanism for light collection detection. The driving mechanism adopts a conventional two-axis or three-axis linear module, which can drive the light-receiving PD board 32 to move laterally and longitudinally.

[0040] According to one embodiment of this application, such as Figures 6 to 12 As shown, support arms 34 extend forward from both ends of the base 30, and a floating seat 40 is provided above the base 30. One end of the test plate 20 with a spring 22 is connected to the floating seat 40. A pin 41 is installed on the floating seat 40 corresponding to the support arm 34. The support arm 34 has a pin through hole corresponding to the position of the pin 41. The lower end of the pin 41 passes through the pin through hole and extends downward out of the support arm 34. The pin 41 can slide up and down in the pin through hole to drive the floating seat 40 and the test plate 20 to rise and fall.

[0041] Repeated insertion and removal of the chip test fixture can cause wear and debris to form between the spring 22 and the test contacts on the chip test fixture, contaminating the chip and the chip test fixture and affecting the chip test results. To improve this situation, this application designs a structure that can lift the test board 20 to avoid frictional contact between the spring 22 and the test contacts during the insertion and removal of the chip test fixture.

[0042] Specifically, support arms 34 extend forward from both ends of the base 30, and the support arms 34 are located above the outer sides of both ends of the heating plate 10 to form a cantilever structure; a floating seat 40 is provided above the base 30, and one end of the test plate 20 with a spring 22 is fixedly connected to the floating seat 40. Pins 41 are installed at both ends of the floating seat 40 corresponding to the support arms 34. Pin through holes are provided at the positions of the two support arms 34 corresponding to the pins 41. The upper section of the pin 41 is installed and fixed in the floating seat 40, and the lower section of the pin 41 passes through the pin through hole and extends out of the support arm 34. The pin 41 can slide up and down in the pin through hole. That is, in this embodiment, one end of the test plate 20 is mounted on the base 30 in a way that allows it to move up and down through the floating seat 40 and the pin 41.

[0043] Before loading the chip test fixture, the pusher 60 on the handling device (an external tool for loading or unloading the chip test fixture) pushes the pin 41 forward. The pin 41 is pushed upward by the force, which drives the floating seat 40 to move upward. The test board 20 is lifted upward by the floating seat 40, and the spring 22 moves upward. The pusher 60 stops moving after reaching the base 30. The bottom of the pin 41 abuts against the upper surface of the pusher 60, and the spring 22 is fixed in position.

[0044] Then, the gripper on the transport device places the chip test fixture on the test station 21 on the heating plate 10, with a certain distance between the upper surface of the chip test fixture and the lower end of the spring 22.

[0045] After the chip test fixture is placed, the pusher 60 on the transport device retracts and separates from the pin 41. The pin 41 loses its support and moves downward. The floating seat 40 moves downward accordingly, and the spring 22 moves downward and contacts the test contact on the upper surface of the chip test fixture to achieve electrical connection.

[0046] When disassembling the chip test fixture, the pusher 60 on the transport device pushes the pin 41 again to lift the spring 22. After the gripper removes the chip test fixture, the pusher 60 retracts and the spring 22 returns to its original position.

[0047] Throughout the entire process of assembling and disassembling the chip test fixture, the spring 22 does not come into contact with the test contacts, thus preventing dust and debris from being generated due to contact friction and contaminating the chip and chip test fixture. This ensures the normal operation of chip testing and also avoids wear on the spring 22 and the test contacts.

[0048] Better, such as Figure 10 As shown, the lower end of the pin 41 that contacts the pusher 60 is bead-shaped. When the pusher 60 slides into contact with the lower end of the pin 41, the forward thrust is converted into an upward thrust.

[0049] According to one embodiment of this application, such as Figure 8 and Figure 9 As shown, at least one side of the pin 41 is provided with a screw 42 for connecting the base 30 and the floating seat 40. The floating seat 40 and the support arm 34 are provided with screw mounting holes for mounting the screw 42. The upper part of the screw 42 is fitted with a spring 43 and passes through the screw mounting hole on the floating seat 40. The lower part of the screw 42 is threadedly connected to the screw mounting hole on the support arm 34.

[0050] When pin 41 is pushed upward, floating seat 40 moves upward, and spring 43 is compressed and tightened. When pin 41 moves downward, spring 43 is released, and floating seat 40 returns to its position of contact with base 30. Screw 42 securely connects floating seat 40 and base 30. Spring 43 allows floating seat 40 to move slowly under pressure, preventing test plate 20 from breaking due to sudden force. Simultaneously, spring 43 ensures that pin 41 can move smoothly downward after losing support, preventing obstruction of pin 41's downward movement and ensuring proper contact between spring 22 and test contact.

[0051] Implementation Method Two: This application also provides a chip testing device, which includes: a chip testing slot as described in Embodiment 1; a chip testing fixture that is detachably inserted into the chip testing slot, the chip testing fixture being provided with test contacts; wherein, when the chip testing fixture is inserted into the chip testing slot, the spring 22 in the chip testing slot is in contact with the test contacts.

[0052] The specific structure and technical effects of the chip test slot have been described in detail in Implementation Method 1, and will not be repeated here. The overall structure of the chip test fixture is similar to that of the existing chip test fixture. The difference is that it not only has test contacts for electrical connection with the spring 22, but also the chip test fixture is directly used as an independent unit for loading and unloading chips for chip aging tests. The specific structure of the chip test fixture is not limited here.

[0053] Preferably, the chip testing device integrates multiple sets of chip test fixtures and chip test slots to achieve batch testing of chips; such as Figure 13 As shown, the chip testing device includes an upright slot mounting plate 70, which has multiple chip testing slots arranged in a matrix. Each chip testing slot has a testing station 21 in which a corresponding chip testing fixture can be inserted.

[0054] Implementation Method 3: This application also provides a chip testing system, which includes the chip testing apparatus as described in Embodiment 2. The specific structure and technical effects of the chip testing slot in the chip testing system have been described in detail in Embodiment 1, and will not be repeated here.

[0055] It should be understood that expressions such as "comprising" and "may include" as used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as "comprising" and / or "having" may be interpreted as indicating a specific characteristic, number, operation, constituent element, component, or combination thereof, but should not be interpreted as excluding the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0056] It should be understood that the terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0057] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0058] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0059] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A chip test slot for inserting a chip test fixture to test a chip, characterized in that, include: Heating plate (10); Test board (20), the test board (20) is located above the heating plate (10), a test station (21) for accommodating the chip test fixture is formed between the test board (20) and the heating plate (10), and at least one spring (22) is provided at the position opposite to the test station (21) of the test board (20). When the chip test fixture is placed in the test station (21), the spring (22) is elastically pressed against the test contact on the upper surface of the chip test fixture.

2. The chip test slot according to claim 1, characterized in that, The chip test slot also includes a base (30), which is located between the heating plate (10) and the test plate (20), and the test plate (20) is mounted above the heating plate (10) via the base (30).

3. The chip test slot according to claim 1 or 2, characterized in that, The test board (20) is electrically connected to the heating plate (10) via an adapter cable (23) to supply power to the heating plate (10).

4. The chip test slot according to claim 2, characterized in that, At least one test through hole (31) is provided on the base (30). The test through hole (31) is arranged opposite to the chip slot on the chip test fixture for placing the chip. At least one light receiving PD board (32) is provided on the side of the base (30) facing away from the test station (21). The light receiving PD board (32) is arranged opposite to the test through hole (31) so as to receive the light emitted by the chip through the test through hole (31) during the test.

5. The chip test slot according to claim 4, characterized in that, The base (30) has a test through hole (31) with a long cross section; or, the base (30) has a plurality of test through holes (31) spaced apart, and each test through hole (31) corresponds one-to-one with a plurality of chip slots on the chip test fixture.

6. The chip test slot according to claim 4 or 5, characterized in that, The light-receiving PD board (32) is connected to a driving mechanism, which is used to drive the light-receiving PD board (32) to move relative to the base (30).

7. The chip test slot according to claim 1, characterized in that, A base (30) is fixedly connected to the upper side of the heating plate (10). Support arms (34) extend from both ends of the base (30). A floating seat (40) is provided above the base (30). One end of the test plate (20) with the spring (22) is connected to the floating seat (40). A pin (41) is installed on the floating seat (40) corresponding to the support arm (34). A pin through hole is provided on the support arm (34) corresponding to the position of the pin (41). The lower end of the pin (41) passes through the pin through hole and extends downward out of the support arm (34). The pin (41) can slide up and down in the pin through hole to drive the floating seat (40) and the test plate (20) to rise and fall.

8. The chip test slot according to claim 7, characterized in that, At least one side of the pin (41) is provided with a screw (42) for connecting the base (30) and the floating seat (40). The floating seat (40) and the support arm (34) are provided with screw mounting holes for installing the screw (42). The upper part of the screw (42) is fitted with a spring (43) and passes through the screw mounting hole on the floating seat (40). The lower part of the screw (42) is threadedly connected to the screw mounting hole on the support arm (34).

9. A chip testing device, characterized in that, include: Chip test slot as described in any one of claims 1-8; A chip test fixture is detachably inserted into the chip test slot, and the chip test fixture is provided with test contacts; When the chip test fixture is inserted into the chip test slot, the spring (22) in the chip test slot is in contact with the test contact.

10. A chip testing system, characterized in that, Includes the chip testing apparatus as described in claim 9.

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