Vacuum adsorption fixing device for quartz piece

Abstract

The application discloses a quartz piece vacuum adsorption fixing device and relates to the technical field of quartz piece processing. The quartz piece vacuum adsorption fixing device comprises an adsorption table, the adsorption table comprises a pedestal, a funnel cavity formed in the interior of the pedestal, a table plate fixedly connected to the top end of the pedestal, a mosquito coil-shaped spiral channel formed in the interior of the table plate, a catheter fixedly connected to the side surface of the table plate and in communication with the outer end port of the spiral channel, rubber through strips inserted into the spiral channel and the catheter, and a plurality of air channels uniformly formed in the interior of the table plate along the spiral path of the spiral channel, and the middle part of each air channel is in communication with the spiral channel. By selectively blocking or opening some air channels through the movement of the rubber through strips, the size range of the quartz piece to be fixed can be matched with the unblocked air channels, the type changing time of the adsorption table is greatly shortened, the equipment investment cost is reduced, and the production efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of quartz part processing technology, and more specifically, to a vacuum adsorption and fixing device for quartz parts. Background Technology

[0002] In the field of quartz component processing, vacuum clamping or adsorption fixing is a key step in ensuring processing accuracy. Quartz components are brittle, have high hardness, and are easily scratched. Traditional mechanical clamping methods can easily generate clamping stress, leading to workpiece deformation or surface damage. Vacuum adsorption, on the other hand, achieves non-contact fixing through atmospheric pressure, which can ensure uniform force on the workpiece, effectively avoid mechanical damage, and at the same time ensure accurate workpiece positioning. Therefore, it is widely used in various high-precision processing procedures for quartz components and is one of the core supporting technologies for achieving high-quality processing of quartz components.

[0003] Existing vacuum adsorption fixing devices for quartz parts generally suffer from poor size adaptability in practical applications, making it difficult to meet the processing needs of quartz parts of various specifications. Currently, the mainstream vacuum adsorption devices are mainly divided into two categories: one type adopts a fixed air channel layout design, where the position and opening range of the air channels on the surface of the adsorption stage are fixed, and it can only adapt to quartz parts of a single size or a few similar sizes. When processing quartz parts of different specifications, it is necessary to disassemble and replace the corresponding adsorption stage, which is not only cumbersome and time-consuming, but also requires the use of adsorption stages of various specifications, which greatly increases the equipment investment cost and production preparation time; the other type controls the air channel opening and closing through zoned solenoid valves to adapt to different sizes, but this type of device has a relatively complex structure, requiring a large number of solenoid valves, air pipes and control systems, which not only increases the equipment manufacturing cost, but also has the problems of difficult debugging and inconvenient maintenance.

[0004] To address the aforementioned issues, a vacuum adsorption fixing device for quartz components is proposed. Summary of the Invention

[0005] To solve the above-mentioned technical problems, a vacuum adsorption fixing device for quartz parts is provided. This technical solution solves the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention can be implemented using the following technical solutions:

[0007] This invention provides a vacuum adsorption fixing device for quartz parts, comprising:

[0008] An adsorption stage includes a base, a funnel cavity inside the base, a platform fixedly connected to the top of the base, a mosquito coil-shaped spiral channel inside the platform, a conduit fixedly connected to the side of the platform and communicating with the outer port of the spiral channel, a rubber strip inserted in the spiral channel and the conduit, and multiple air passages evenly opened inside the platform along the spiral path of the spiral channel, with the middle of each air passage intersecting and communicating with the spiral channel.

[0009] The drive assembly includes a bracket fixedly connected to the side of the base, an upper pressure roller rotatably connected to the bracket, a lower pressure roller rotatably connected to the bracket and located below the upper pressure roller, a motor whose drive end is fixedly connected to the upper pressure roller, and a shaft-mounted rotary encoder whose input end is fixedly connected to the lower pressure roller. The bottom of the upper pressure roller and the top of the lower pressure roller press against the upper and lower sides of the rubber strip, respectively.

[0010] A vacuum assembly, which is connected to the funnel cavity, is used to provide a stable negative pressure to the funnel cavity;

[0011] The drive assembly moves the rubber strip within the spiral channel. The rubber strip can selectively block or leave the junction between the air passage and the spiral channel, allowing the air passage not blocked by the rubber strip to form an adsorption force to fix quartz parts of different sizes.

[0012] Furthermore, the axial direction of the catheter is consistent with the tangential direction of the outer port of the spiral channel, and the inner diameter of the catheter is consistent with the inner diameter of the spiral channel.

[0013] Furthermore, the rubber tube includes a support core and a rubber sleeve fixedly fitted outside the support core. The support core is made of a tough material, and the rubber sleeve is made of fluororubber or silicone rubber.

[0014] Furthermore, the diameter of the rubber sleeve is larger than the inner diameter of the spiral channel and the conduit.

[0015] Furthermore, the inner walls of the spiral channel and the conduit are coated with PTFE or UHMWPE.

[0016] Furthermore, the drive assembly also includes a winch reel rotatably connected to one end of the bracket, and a second motor fixedly connected to the winch reel at the drive end. The first motor, the shaft-mounted rotary encoder, and the second motor are all fixedly installed on the side of the bracket. The end of the rubber strip away from the platform passes through between the upper and lower pressure rollers and is wound on the winch reel.

[0017] Furthermore, the vacuum assembly includes a support base fixedly connected to the bottom of the platform, a vacuum pump fixedly installed inside the support base, a control valve fixedly connected to the air inlet of the vacuum pump, and an air extraction nozzle fixedly connected to the air inlet of the control valve. The air extraction nozzle is fixedly installed at the bottom of the platform and connected to the funnel cavity.

[0018] Furthermore, it also includes a foolproof component, which includes a light fixture fixedly installed at the bottom of the base and located at the center of the bottom of the funnel cavity, and a reflective coating disposed on the inner wall of the funnel cavity and the inner wall of the airway. The reflective coating is a vacuum-compatible high-reflective coating. The light emitted by the light fixture is reflected by the reflective coating and can be emitted from the top port of the airway to indicate whether the airway is in a normal ventilation state.

[0019] Furthermore, the reflective coating material is vacuum-sputtered aluminum film.

[0020] As described above, the features and advantages of the quartz component vacuum adsorption fixing device of the present invention are:

[0021] This invention achieves flexible adaptation and efficient fixation of quartz parts of different sizes through a core structural design of "mosquito coil-shaped spiral channel + retractable rubber strip + precise measurement of drive component". The mosquito coil-shaped spiral channel is evenly distributed along the platform, making the air passages arranged in a ring-shaped diffusion pattern. Combined with the precise measurement of the retraction length by the shaft-mounted rotary encoder, the air passages can be selectively blocked or opened by moving the rubber strip. There is no need to replace the adsorption platform or adjust the overall structure. Only the position of the rubber strip needs to be adjusted so that the air passages are exactly matched to the size range of the quartz parts to be fixed. This structure effectively solves the problem of poor adaptability of traditional quartz adsorption devices. Traditional devices mostly use fixed air passage layout or zoned solenoid valve control, which can only adapt to a single size of quartz part. When changing the type, it is necessary to disassemble and replace the adsorption platform or readjust the solenoid valve, which is cumbersome and time-consuming. This invention significantly shortens the changeover time, reduces equipment investment costs, and improves production efficiency.

[0022] This invention, through a synergistic structure of "elastic sealing with a rubber sleeve + visual detection with a foolproof component + stable negative pressure with a vacuum component," ensures the reliability of adsorption fixation and operational safety. The rubber sleeve achieves a tight seal through elastic deformation, preventing vacuum leakage. Combined with the stable negative pressure provided by the vacuum component, the air passage forms a uniform and firm adsorption force on the quartz part, preventing displacement or detachment of the quartz part during processing. Simultaneously, the illumination lamp of the foolproof component and the highly reflective coating form an optical indication path. Operators can quickly determine whether the air passage is properly connected and whether the quartz part completely covers the connected air passage by observing the illumination. This invention combines light indication with the spiral channel, air passage, and rubber strip, and through structural synergy, it not only improves adsorption stability but also lowers the operational threshold, ensuring processing quality and efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of the quartz component vacuum adsorption fixing device shown in this invention;

[0024] Figure 2 for Figure 1 A schematic diagram of the structure from another perspective;

[0025] Figure 3 This is an exploded structural diagram of the adsorption stage of the quartz component vacuum adsorption fixing device shown in this invention.

[0026] Figure 4 for Figure 3 A schematic diagram of the structure from another perspective;

[0027] Figure 5 This is a simplified schematic diagram showing the structural fit between the spiral channel, air passage, and rubber strip of the quartz component vacuum adsorption fixing device of the present invention.

[0028] Figure 6 This is a schematic diagram of the structure of the rubber strip in the vacuum adsorption fixing device for quartz parts shown in this invention;

[0029] Figure 7 for Figure 1 Enlarged structural diagram at point A;

[0030] Figure 8 This is a schematic diagram of the vacuum assembly of the quartz component vacuum adsorption fixing device shown in this invention.

[0031] The reference numerals in the appendix of this invention are as follows:

[0032] 11. Base; 12. Funnel cavity; 13. Platform; 14. Spiral channel; 15. Air passage; 16. Tube; 17. Rubber strip; 171. Support core strip; 172. Rubber sleeve;

[0033] 21. Support frame; 22. Upper pressure roller; 23. Lower pressure roller; 24. Winch disc; 25. Motor 1; 26. Shaft-mounted rotary encoder; 27. Motor 2;

[0034] 31. Suction nozzle; 32. Vacuum pump; 33. Control valve; 34. Support base;

[0035] 41. Lighting lamp. Detailed Implementation

[0036] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0037] See Figures 1-8 As shown, a vacuum adsorption fixing device for quartz parts provided by an embodiment of the present invention will be described in detail below:

[0038] See Figures 1-6As shown, a vacuum adsorption fixing device for quartz parts includes an adsorption stage, which comprises a base 11, a funnel cavity 12 formed inside the base 11, a platform 13 fixedly connected to the top of the base 11, a mosquito coil-shaped spiral channel 14 formed inside the platform 13, a conduit 16 fixedly connected to the side of the platform 13 and communicating with the outer port of the spiral channel 14, a rubber strip 17 inserted in the spiral channel 14 and the conduit 16, and a plurality of air passages 15 uniformly formed inside the platform 13 along the spiral path of the spiral channel 14. The air passages 15 penetrate the spiral channel 14 vertically, and the middle of each air passage 15 intersects and communicates with the spiral channel 14. The outer port of the spiral channel 14 penetrates the side of the platform 13 and communicates with the conduit 16, which communicates with the outside.

[0039] See Figure 1 and Figure 7 As shown, the quartz vacuum adsorption fixing device also includes a drive assembly, which includes a bracket 21 fixedly connected to the side of the base 11, an upper pressure roller 22 rotatably connected to the bracket 21, a lower pressure roller 23 rotatably connected to the bracket 21 and located below the upper pressure roller 22, a motor 25 whose drive end is fixedly connected to the upper pressure roller 22, and a shaft-mounted rotary encoder 26 whose input end is fixedly connected to the lower pressure roller 23. The bracket 21 is installed beside the output end of the guide tube 16, and the bottom of the upper pressure roller 22 and the top of the lower pressure roller 23 press against the upper and lower sides of the rubber strip 17, respectively.

[0040] Furthermore, in this embodiment, the drive assembly also includes a winch 24 rotatably connected to one end of the bracket 21, and a second motor 27 whose drive end is fixedly connected to the winch 24. The first motor 25, the shaft-mounted rotary encoder 26, and the second motor 27 are all fixedly mounted on the side of the bracket 21. The end of the rubber strip 17 away from the platform 13 passes between the upper pressure roller 22 and the lower pressure roller 23 and is wound around the winch 24. The displacement length of the rubber strip 17 can be calculated by the shaft-mounted rotary encoder 26 in conjunction with the device's own controller.

[0041] The following is a detailed description of the drive components to achieve automated and high-precision traction of the rubber strip 17. The winch 24 is used to wind up the excess part of the rubber strip 17, avoiding jamming or damage caused by loose winding of the rubber strip 17. The second motor 27 works in conjunction with the first motor 25. The first motor 25 provides the driving force for clamping and conveying, while the second motor 27 provides the winding traction force, improving the pulling efficiency. By fixing the first motor 25, the shaft-mounted rotary encoder 26, and the second motor 27 to the side of the bracket 21, the drive components can be integrated, reducing the overall space occupied by the device, while ensuring the transmission accuracy of each component and ensuring the accuracy of the measurement of the pulling length by the shaft-mounted rotary encoder 26.

[0042] See Figure 2 and Figure 8As shown, the quartz vacuum adsorption fixing device also includes a vacuum component. The vacuum component is connected to the funnel cavity 12 and is used to provide a stable negative pressure to the funnel cavity 12. In this embodiment, the vacuum component includes a support base 34 fixedly connected to the bottom of the base 11, a vacuum pump 32 fixedly installed inside the support base 34, a control valve 33 fixedly connected to the air inlet of the vacuum pump 32, and an air extraction nozzle 31 fixedly connected to the air inlet of the control valve 33. The air extraction nozzle 31 is fixedly installed at the bottom of the base 11 and connected to the funnel cavity 12.

[0043] The above provides a specific implementation of the vacuum assembly, ensuring the stability and controllability of the negative pressure supply. The support base 34 provides fixation and protection for the vacuum pump 32, preventing vibration of the vacuum pump 32 during operation from affecting the stability of the adsorption stage. The control valve 33 is used to adjust the negative pressure, and can flexibly adjust the adsorption force according to the different sizes and thicknesses of the quartz parts, preventing excessive adsorption force from damaging the quartz parts or insufficient adsorption force from causing insecure fixation. Preferably, in this embodiment, the control valve 33 is a vacuum regulating valve. The suction nozzle 31 is directly connected to the funnel cavity 12, which can quickly extract air from the cavity to form a negative pressure in the funnel cavity 12. It has a simple structure and is easy to install and maintain. In addition, this structure supports the modular design of the vacuum assembly. If it is necessary to adapt to different working scenarios, it can be achieved by changing the model of the vacuum pump 32 or adjusting the parameters of the control valve 33, thereby improving the versatility of the device. Of course, according to actual usage requirements, the vacuum assembly can also be set independently, that is, the control valve 33 and the suction nozzle 31 can be connected by a long flexible hose. In this way, the volume of the adsorption stage can be reduced and the installation adaptability can be improved.

[0044] For further details, please refer to [link / reference]. Figure 3 As shown, the quartz component vacuum adsorption fixing device also includes a foolproof component. This component includes a lighting lamp 41 fixedly installed at the bottom of the base 11 and located at the center of the bottom of the funnel cavity 12, and a reflective coating disposed on the inner wall of the funnel cavity 12 and the inner wall of the air passage 15. The reflective coating is a vacuum-compatible high-reflectivity coating with a visible light reflectivity ≥85%, and it does not release low-molecular-weight volatiles in a vacuum environment, thus preventing contamination of the vacuum cavity and avoiding a decrease in vacuum level. The light emitted by the lighting lamp 41 is reflected by the reflective coating and emitted from the top port of the air passage 15 to indicate whether the air passage 15 is in a normal ventilation state.

[0045] Preferably, the material of the reflective coating is a vacuum sputtered aluminum film.

[0046] Through an optical design combining illumination and reflection, the ventilation status of the air passage 15 is visualized, solving the problem that traditional adsorption devices cannot quickly determine whether the air passage 15 is unobstructed. The illumination lamp 41 is located inside the funnel cavity 12 and can emit light uniformly in all directions; the reflective coating uses a vacuum-compatible high-reflective material to ensure efficient reflection of light within the sealed funnel cavity 12 and air passage 15, avoiding light attenuation; the requirements of "reflectivity ≥ 85%" and "no low-molecular-weight volatiles" respectively ensure the clarity of the light indication effect and the cleanliness of the vacuum cavity. By observing the luminescence at the top of the air passage 15, the operator can quickly identify whether the quartz component completely covers the air passage 15 that should be opened, avoiding adsorption failure due to incomplete coverage, and improving the safety and efficiency of the operation. When the quartz component completely covers the opened air passage 15, the luminescence cannot be seen from the outside. Furthermore, this embodiment clarifies the specific material selection range for the reflective coating, taking into account reflective effect, environmental adaptability and processing feasibility. Vacuum sputtered aluminum film has extremely high reflectivity (≥90%), and is vacuum resistant and free of volatiles, making it the preferred material for this device.

[0047] In the above, the drive component moves the rubber strip 17 within the spiral channel 14. The rubber strip 17 can selectively block or leave the junction of the spiral channel 14 and the air passage 15, so that the air passage 15 not blocked by the rubber strip 17 forms an adsorption force. The number of air passages 15 is opened according to the size of the quartz piece, so as to achieve the purpose of fixing quartz pieces of different sizes.

[0048] Furthermore, the axial direction of the conduit 16 is aligned with the tangential direction of the outer port of the spiral channel 14, and the inner diameter of the conduit 16 is the same as the inner diameter of the spiral channel 14. This is to eliminate the movement resistance and sealing gap of the rubber strip 17 at the connection between the spiral channel 14 and the conduit 16. The alignment of the axial direction of the conduit 16 with the tangential direction of the outer port of the spiral channel 14 allows the rubber strip 17 to transition smoothly from the spiral channel 14 into the conduit 16, avoiding jamming or wear of the rubber strip 17 due to abrupt changes in the turning angle. The matching inner diameter of the conduit 16 with the spiral channel 14 ensures uniform contact between the rubber strip 17 and the inner wall of the channel, preventing sealing dead angles caused by abrupt changes in the inner diameter and ensuring stable sealing in the vacuum environment.

[0049] Furthermore, the rubber tube 17 includes a support core 171 and a rubber sleeve 172 fixedly fitted outside the support core 171. The rubber sleeve 172 is made of either fluororubber or silicone rubber. The support core 171 (e.g., a metal strip made of tough stainless steel or titanium alloy, or a non-metallic material such as polyoxymethylene or glass fiber reinforced nylon) provides axial support for the rubber tube 17, preventing the rubber tube 17 from bending and deforming during the pulling process. Through the composite structure design of "rigid support + elastic sealing", the smooth sliding of the rubber tube 17 and the reliability of the sealing are taken into account. Fluororubber or silicone rubber is selected for the rubber sleeve 172 because both have excellent elasticity, vacuum resistance (no low molecular weight volatiles) and wear resistance, which can be adapted to the clean vacuum environment of quartz part processing, while ensuring the sealing effect after elastic deformation.

[0050] Furthermore, the diameter of the rubber sleeve 172 is slightly larger than the inner diameter of the spiral channel 14 and the conduit 16, with a difference ranging from 0.05 to 0.2 mm. Therefore, when the rubber sleeve 172 is located within the spiral channel 14 and the conduit 16, it will be slightly compressed in the radial direction and undergo elastic deformation. The elastic deformation of the rubber sleeve 172 achieves a seal on the spiral channel 14 and the conduit 16, while ensuring that the rubber strip 17 can slide smoothly along the spiral channel 14 and the conduit 16. Quantifying the dimensional fit between the rubber sleeve 172 and the channel is a key parameter for achieving the combined requirement of "sealing + sliding". The difference range of 0.05-0.2 mm is based on the elastic characteristics of the rubber sleeve 172: if the difference is too small, the rubber deformation will be insufficient, and an effective seal cannot be achieved; if the difference is too large, the sliding resistance will surge, making it difficult to pull the rubber strip 17 and causing the sleeve to wear easily. By limiting the size, the reliability of the seal and the smoothness of the sliding can be precisely balanced, ensuring no leakage in vacuum adsorption, while extending the service life of the rubber strip 17.

[0051] Furthermore, the inner walls of both the spiral channel 14 and the conduit 16 are coated with PTFE (polytetrafluoroethylene) or UHMWPE (ultra-high molecular weight polyethylene). This coating provides auxiliary friction reduction to ensure smooth sliding of the rubber strip 17. Both PTFE and UHMWPE have extremely low coefficients of friction, which can significantly reduce the sliding friction between the rubber sleeve 172 and the inner wall of the channel, reducing energy loss and component wear during the pulling process. Simultaneously, both possess vacuum resistance, wear resistance, and strong chemical stability, and will not produce volatile substances that contaminate the quartz component, making them suitable for the clean vacuum working environment of this device. Among these, the PTFE coating is easy to process and cost-effective, suitable for scenarios requiring conventional precision; the UHMWPE coating has superior wear resistance, suitable for mass production scenarios involving high-frequency pulling. In this embodiment, the PTFE coating is preferred, as this design is relatively easier to process. Furthermore, as... Figure 3-4As shown, in this embodiment, for the sake of structural feasibility, the entire platform 13 is divided into two parts from the middle. Specifically, it is horizontally cut along the middle position of the spiral channel 14. Thus, the upper part of the platform 13 has the upper part of the air passage 15, the upper part of the spiral channel 14, and the upper part of the conduit 16. The lower part of the platform 13 has the lower part of the air passage 15, the lower part of the spiral channel 14, and the lower part of the conduit 16. Dividing the platform 13 into two parts facilitates the processing of the spiral channel 14 and the maintenance of the fit between the rubber strip 17 and the spiral channel 14 and the conduit 16, such as lubrication and cleaning.

[0052] Working principle:

[0053] The core working logic of this quartz component vacuum adsorption fixing device is the synergistic effect of "precise control of the 17 rubber strip holes + negative pressure adsorption + error-proof detection", and the specific process is as follows:

[0054] Preparation stage: Based on the size of the quartz part to be fixed, determine the range of the air passage 15 to be opened (i.e., the area of ​​air passage 15 that does not need to be blocked by the rubber strip 17); at the same time, check whether the lighting 41 of the foolproof component is working properly and whether the reflective coating is peeling off or contaminated.

[0055] Rubber strip 17 position adjustment: The drive assembly is activated, and motor 25 drives the upper pressure roller 22 to rotate, cooperating with the lower pressure roller 23 to clamp and convey the rubber strip 17. The end of the rubber strip 17 away from the platform 13 moves along the spiral channel 14 under the traction of the winch 24 (if motor 27 is used, automated winding can be achieved, improving adjustment efficiency; in simple scenarios, manual traction can be used). During this process, the shaft-mounted rotary encoder 26 measures the pulling length of the rubber strip 17 through the rotation of the lower pressure roller 23, ensuring that the rubber strip 17 moves to the preset position. When the rubber strip 17 moves to the preset position, it precisely blocks the intersection of the air passage 15 (exceeding the size range of the quartz piece) and the spiral channel 14, while the air passage 15 within the quartz piece's coverage area remains unblocked.

[0056] Vacuum adsorption start-up: The vacuum assembly is started, and the vacuum pump 32 draws air from the funnel cavity 12 through the air extraction nozzle 31. The control valve 33 adjusts the negative pressure to the preset range. Since the funnel cavity 12 and the spiral channel 14 are connected through the unblocked air passages 15, the negative pressure is transmitted through these air passages 15 to the quartz part bonding surface at the top of the platform 13, forming a uniform adsorption force and firmly fixing the quartz part.

[0057] Mistake-proof test verification: During the vacuum adsorption process, turn on the lighting 41 of the mistake-proof component. After being reflected by the highly reflective coating on the inner wall of the funnel cavity 12 and the inner wall of the air passage 15, the light shines out from the top of all air passages 15 that are not blocked by the rubber strip 17. Before the quartz piece is placed on the platform 13, the operator can quickly determine whether the air passage 15 is properly connected by observing the light emission at the top of the air passage 15. It should be noted that after the quartz piece is placed on the platform 13, if the quartz piece does not completely cover the air passage 15 that should be open, the light at the top of the corresponding air passage 15 will be blocked or weakened. At this time, the placement position of the quartz piece needs to be adjusted to avoid insufficient adsorption force or displacement of the quartz piece due to incomplete coverage.

[0058] Adsorption complete: After the quartz part is processed, turn off the vacuum pump 32 and switch the control valve 33 to the pressure relief state. The negative pressure in the funnel cavity 12 disappears and the adsorption force is released. The quartz part can then be removed. If a different size quartz part needs to be replaced, repeat the above steps to adjust the position of the rubber strip 17.

[0059] It should be noted that, in this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0060] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum adsorption fixing device for quartz parts, characterized in that, include: The adsorption stage includes a base (11), a funnel cavity (12) inside the base (11), a platform (13) fixedly connected to the top of the base (11), a mosquito coil-shaped spiral channel (14) inside the platform (13), a conduit (16) fixedly connected to the side of the platform (13) and communicating with the outer port of the spiral channel (14), a rubber strip (17) inserted in the spiral channel (14) and the conduit (16), and multiple air passages (15) evenly opened inside the platform (13) along the spiral path of the spiral channel (14), each air passage (15) intersecting and communicating with the spiral channel (14) in the middle; The moving assembly includes a bracket (21) fixedly connected to the side of the base (11), an upper pressure roller (22) rotatably connected to the bracket (21), a lower pressure roller (23) rotatably connected to the bracket (21) and located below the upper pressure roller (22), a motor (25) whose drive end is fixedly connected to the upper pressure roller (22), and a shaft-mounted rotary encoder (26) whose input end is fixedly connected to the lower pressure roller (23). The bottom of the upper pressure roller (22) and the top of the lower pressure roller (23) press against the upper and lower sides of the rubber strip (17), respectively. The vacuum assembly is connected to the funnel cavity (12) and is used to provide a stable negative pressure to the funnel cavity (12). The axial direction of the catheter (16) is consistent with the tangential direction of the outer port of the spiral channel (14), and the inner diameter of the catheter (16) is consistent with the inner diameter of the spiral channel (14). The rubber tube (17) includes a support core (171) and a rubber sleeve (172) fixedly fitted outside the support core (171). The support core (171) is made of a tough material, and the rubber sleeve (172) is made of fluororubber or silicone rubber. The diameter of the rubber sleeve (172) is larger than the inner diameter of the spiral channel (14) and the conduit (16); It also includes a foolproof component, which includes a light (41) fixedly installed at the bottom of the base (11) and located at the center of the bottom of the funnel cavity (12), and a reflective coating provided on the inner wall of the funnel cavity (12) and the inner wall of the air passage (15). The reflective coating is a vacuum-compatible high reflective coating. The light emitted by the light (41) is reflected by the reflective coating and emitted from the top port of the air passage (15) to indicate whether the air passage (15) is in a normal ventilation state.

2. The vacuum adsorption and fixing device for quartz parts according to claim 1, characterized in that: The inner walls of the spiral channel (14) and the conduit (16) are coated with PTFE or UHMWPE.

3. The vacuum adsorption and fixing device for quartz parts according to claim 1, characterized in that: The drive assembly also includes a winch (24) rotatably connected to one end of the bracket (21) and a second motor (27) fixedly connected to the winch (24) at the drive end. The first motor (25), the shaft-mounted rotary encoder (26) and the second motor (27) are all fixedly installed on the side of the bracket (21). The end of the rubber strip (17) away from the platform (13) passes through the upper pressure roller (22) and the lower pressure roller (23) and is wound on the winch (24).

4. The vacuum adsorption fixing device for quartz parts according to claim 1, characterized in that: The vacuum assembly includes a support base (34) fixedly connected to the bottom of the base (11), a vacuum pump (32) fixedly installed inside the support base (34), a control valve (33) fixedly connected to the air inlet of the vacuum pump (32), and an air extraction nozzle (31) fixedly connected to the air inlet of the control valve (33). The air extraction nozzle (31) is fixedly installed at the bottom of the base (11) and connected to the funnel cavity (12).

5. The vacuum adsorption fixing device for quartz parts according to claim 4, characterized in that: The reflective coating is made of vacuum sputtered aluminum film.

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