Air bath device and optical measurement equipment

Abstract

The invention relates to the technical field of photoetching, in particular to an air bath device and optical measuring equipment, the air bath device comprises a box body, a flow guide plate and a filter, an inner cavity is formed in the box body, an air inlet and an air outlet which are both communicated with the inner cavity are formed in the box body, an angle is formed between the orientation of the air inlet and the orientation of the air outlet, and the flow guide plate is arranged in the inner cavity. The flow guide plate is located in the inner cavity, acute angles are formed between the direction of the air inlet and the plate face of the flow guide plate and between the direction of the air outlet and the plate face of the flow guide plate, and the filter is installed at the air outlet. The invention aims to provide an air bath device and optical measurement equipment aiming at at least one technical problem related in the background technology.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photolithography, in particular to a gas bath device and an optical measurement device. BACKGROUND

[0002] In a precision motion system, the optical measurement device has extremely strict requirements on the test environment, and it is necessary to strictly ensure that the flow rate and pressure distribution of the gas in the test light path have high uniformity and stability, and the temperature is constant and accurately controlled, so as to avoid optical measurement errors caused by environmental fluctuations. Based on this core requirement, a gas bath device is usually introduced to provide a constant temperature and stable working environment for optical elements through its precise temperature adjustment and airflow control function. However, in actual application, the existing gas bath device has the problem of relatively large noise during operation, which needs to be improved. SUMMARY

[0003] The purpose of the present application is to provide a gas bath device and an optical measurement device to solve at least one technical problem in the background art.

[0004] In order to achieve the above-mentioned purpose, the following technical solutions are adopted in the present application: One aspect of the present application provides a gas bath device, comprising a box body, a flow guide plate and a filter, an inner cavity is arranged in the box body, an air inlet and an air outlet which are both in communication with the inner cavity are arranged on the box body, the direction of the air inlet and the direction of the air outlet are arranged at an angle, the flow guide plate is located in the inner cavity, the direction of the air inlet and the direction of the air outlet are both at an acute angle with the surface of the flow guide plate, and the filter is installed on the air outlet.

[0005] Optionally, the included angle between the direction of the air inlet and the surface of the flow guide plate is α, and 30°≤α≤45°, and the direction of the air inlet is perpendicular to the direction of the air outlet.

[0006] The beneficial effects of this technical solution are that the flow guide plate can more effectively guide the airflow, reduce the airflow impact, and reduce the sudden turning of the airflow in the inner cavity, thereby reducing the formation of vortex and achieving the purpose of reducing noise.

[0007] Optionally, the gas bath device provided by the present application further comprises a first connecting piece and a plurality of second connecting pieces installed on the inner wall of the box body, the first connecting piece is arranged close to the air inlet, each first connecting piece is arranged close to the air outlet, each second connecting piece is uniformly arranged in the direction of the air outlet, one end of the flow guide plate is hinged to the first connecting piece, and the other end of the flow guide plate is used for detachable connection with one of the second connecting pieces.

[0008] The beneficial effects of the technical scheme are that the flow guide plate can be rotated relative to the first connecting piece in the inner cavity, and the flow guide plate can be connected with any second connecting piece, and then the included angle between the orientation of the air inlet and the orientation of the air outlet and the flow guide plate can be changed according to the actual situation, so that the air flow speed and the noise size can be better controlled.

[0009] Optionally, the first connecting piece is a hinge, the second connecting piece is a hanging ring, a hook is installed on the flow guide plate, and the hook is hung with the hanging ring.

[0010] The beneficial effects of the technical scheme are that the connection and disconnection between the flow guide plate and the second connecting piece are facilitated.

[0011] Optionally, the flow guide plate comprises a first flow guide section, the first flow guide section is arranged close to the air inlet, the first flow guide section is arc-shaped, and the first flow guide section is tangent to the orientation of the air inlet.

[0012] The beneficial effects of the technical scheme are that the air flow entering the inner cavity can be more smoothly introduced to the center of the cavity, and the noise near the air inlet can be reduced.

[0013] Optionally, the flow guide plate further comprises a second flow guide section, the second flow guide section is arranged close to the air outlet, the second flow guide section is arc-shaped, and the second flow guide section is tangent to the orientation of the air outlet.

[0014] The beneficial effects of the technical scheme are that the air flow flowing to the air outlet can be more smoothly guided to the air outlet, and the noise generated by the air flow at the air outlet can be reduced.

[0015] Optionally, the air bath device provided by the application further comprises a uniform air hole plate, the uniform air hole plate is installed on the air outlet, the uniform air hole plate is located on the side of the filter facing the inner cavity, the uniform air hole plate is arranged perpendicular to the orientation of the air outlet, and the diameter of the hole arranged close to the air inlet on the uniform air hole plate is greater than the diameter of the hole arranged away from the air inlet.

[0016] The beneficial effects of the technical scheme are that the hole diameter of the hole close to the air inlet is larger, the air flow resistance can be reduced, and the local high-speed area can be avoided; the hole diameter of the hole away from the air inlet is smaller, the air flow distribution can be balanced, and the air flow can be prevented from being deflected or forming a vortex in the box, which can significantly improve the uniformity of the air flow distribution; and the uniform air hole plate converts the dynamic pressure of the high-speed air flow into static pressure through the throttling effect of the small hole, so that the air flow speed is reduced, the turbulent flow and impact noise are reduced, the aerodynamic noise can be effectively reduced, and the working environment can be improved; at the same time, the uniform air hole plate can also maintain the structural stability of the box, and prevent vibration or deformation caused by air flow impact.

[0017] Optionally, the uniform air hole plate comprises a first hole area, a second hole area and a third hole area arranged in sequence from the direction close to the air inlet to the direction away from the air inlet, a plurality of first through holes are uniformly distributed on the first hole area, a plurality of second through holes are uniformly distributed on the second hole area, and a plurality of third through holes are uniformly distributed on the third hole area, and the diameters of the first through holes, the second through holes and the third through holes decrease in sequence.

[0018] The beneficial effects of the technical solution are that a plurality of through holes can be machined in each hole area at a time, and the production efficiency is improved.

[0019] Optionally, the air bath device provided in the application further comprises filter cloth, the filter cloth is located on the side of the filter away from the inner cavity, and the filter cloth covers the surface of the filter.

[0020] The beneficial effects of the technical solution are that the filter cloth can further uniformize the air and control the air speed.

[0021] Another aspect of the application provides an optical measurement device comprising the air bath device provided in the application.

[0022] The technical solution provided in the application can achieve at least one of the following beneficial effects: The air bath device and the optical measurement device provided in the application can guide the airflow to pass through the inner cavity more smoothly by setting the guide plate and making the direction of the air inlet and the direction of the air outlet form an acute angle with the plate surface of the guide plate, reduce airflow impact and turbulence, thereby reducing aerodynamic noise, and setting the guide plate can improve the airflow distribution in the inner cavity, reduce the impact of the airflow on the wall surface of the box, and further reduce the structural noise caused by the vibration of the box.

[0023] The additional technical features of the application and their advantages will be more apparent in the following description or can be understood through the specific practice of the application. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the specific embodiments of the application, the following will briefly introduce the drawings needed to be used in the description of the specific embodiments. Obviously, the drawings in the following description are some embodiments of the application, and those skilled in the art can also obtain other drawings according to these drawings without any creative effort.

[0025] Figure 1 Part of the main view structure schematic diagram of one embodiment of the air bath device provided in the application; Figure 2 Part of the main view structure schematic diagram of one embodiment of the air bath device provided in the application; Figure 3 Part of the perspective structure schematic diagram of one embodiment of the air bath device provided by the embodiment of the present application; Figure 4 Part of the perspective structure schematic diagram of one embodiment of the air bath device provided by the embodiment of the present application; Figure 5 Part of the perspective structure schematic diagram of one embodiment of the air bath device provided by the embodiment of the present application.

[0026] Reference signs: 01, air inlet; 02, sealing gasket; 03, test tube; 04, filter; 05, connector; 06, sensor adapter plate; 07, temperature sensor; 08, sensor connecting piece; 09, fixed bending plate; 10, heat insulation plate; 11, first hole area; 12, second hole area; 13, third hole area; 14, uniform wind hole plate; 15, box; 16, guide plate; 17, air outlet. DETAILED DESCRIPTION

[0027] The technical solutions of the present application will be described in detail below with reference to the drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0028] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0029] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] like Figures 1 to 5 As shown, in the prior art, when airflow is fed into the housing 15 of the air bath device, the airflow directly impacts the ice on the inner wall of the housing 15, forming high-speed turbulence, which in turn generates aerodynamic noise.

[0031] One aspect of this application provides an air bath device, including a housing 15, a baffle plate 16, and a filter 04. An inner cavity is provided inside the housing 15. An air inlet 01 and an air outlet 17, both communicating with the inner cavity, are provided on the housing 15. The orientation of the air inlet 01 and the orientation of the air outlet 17 are set at an angle. The baffle plate 16 is located in the inner cavity. The orientations of the air inlet 01 and the air outlet 17 are both at acute angles to the surface of the baffle plate 16. The filter 04 is installed at the air outlet 17.

[0032] In this embodiment of the application, the fact that the orientation of the air inlet 01 is set at an angle to the orientation of the air outlet 17 means that the orientation of the air inlet 01 and the orientation of the air outlet 17 are not on the same straight line.

[0033] The air bath device provided in this application, by setting a guide plate 16 and making the orientation of the air inlet 01 and the air outlet 17 both form an acute angle with the surface of the guide plate 16, can guide the airflow to pass through the inner cavity more smoothly, reduce airflow impact and turbulence, thereby reducing aerodynamic noise. Furthermore, setting the guide plate 16 can improve the airflow distribution in the inner cavity, reduce the impact of airflow on the wall of the housing 15, and thus reduce the structural noise caused by the vibration of the housing 15.

[0034] Optionally, the angle between the orientation of the air inlet 01 and the surface of the guide plate 16 is α, where 30°≤α≤45°. This allows the guide plate 16 to more effectively guide the airflow, reducing airflow impact and sudden changes in airflow direction within the cavity, thereby reducing vortex formation and ultimately lowering noise levels.

[0035] Optionally, the air bath device further comprises a first connecting member and a plurality of second connecting members installed on the inner wall of the box 15, the first connecting member is arranged close to the air inlet 01, each of the first connecting members is arranged close to the air outlet 17, each of the second connecting members is arranged uniformly in the direction of the air outlet 17, one end of the deflector 16 is hinged to the first connecting member, and the other end of the deflector 16 is used to be detachably connected to one of the second connecting members. In this way, the deflector 16 can be rotated relative to the first connecting member in the inner cavity, and the deflector 16 is connected to any second connecting member, so as to change the included angle between the deflector 16 and the direction of the air inlet 01 and the direction of the air outlet 17 according to the actual situation, and better control the air flow speed and noise size.

[0036] Optionally, the first connecting member is a hinge, the second connecting member is a hanging ring, a hook is installed on the deflector 16, and the hook is hung with the hanging ring. In this way, the connection and disconnection between the deflector 16 and the second connecting member are facilitated. Of course, the second connecting member can include a screw rod, a nut is arranged on the deflector 16, the deflector 16 is connected to the second connecting member by screwing the nut with the screw rod. Preferably, the hanging ring is fixed to the bottom plate of the box 15, and the hook is located at one end of the deflector 16 close to the air outlet 17.

[0037] Optionally, the deflector 16 comprises a first deflection section, the first deflection section is arranged close to the air inlet 01, the first deflection section is arc-shaped, and the first deflection section is tangent to the direction of the air inlet 01. This can make the air flow entering the inner cavity more smoothly into the center of the cavity, reducing the noise near the air inlet 01. Of course, the first deflection section can also be linear.

[0038] Optionally, the deflector 16 further comprises a second deflection section, the second deflection section is arranged close to the air outlet 17, the second deflection section is arc-shaped, and the second deflection section is tangent to the direction of the air outlet 17. This can make the air flow flowing to the air outlet 17 more smoothly guide to the air outlet 17, reducing the noise generated by the air flow at the air outlet 17. Of course, the second deflection section can also be linear. Understandably, in the embodiment of the present application, the arc-shaped concave side faces the air inlet 01 and / or the air outlet 17.

[0039] As Figure 2 and Figure 3Optionally, the air bath device provided by the embodiment of the present application further comprises a uniform air hole plate 14, the uniform air hole plate 14 is installed at the air outlet 17, the uniform air hole plate 14 is located at the side of the filter 04 facing the inner cavity, the uniform air hole plate 14 is arranged vertically to the direction of the air outlet 17, and the diameter of the hole on the uniform air hole plate 14 close to the air inlet 01 is greater than the diameter of the hole far from the air inlet 01. The hole close to the air inlet 01 has a larger hole diameter, which can reduce the air flow resistance and avoid local high-speed area; the hole far from the air inlet 01 has a smaller hole diameter, which can balance the air flow distribution and prevent the air flow from being deflected or forming vortex in the box 15, which can significantly improve the uniformity of the air flow distribution; and the uniform air hole plate 14 converts the dynamic pressure of high-speed air flow into static pressure through the small hole throttling effect, thereby reducing the air flow speed, reducing the turbulence and impact noise, effectively reducing the aerodynamic noise and improving the working environment; at the same time, the uniform air hole plate 14 can also maintain the structural stability of the box 15 and prevent vibration or deformation caused by air flow impact.

[0040] Optionally, the uniform air hole plate 14 comprises a first hole area 11, a second hole area 12 and a third hole area 13 arranged in sequence from the direction close to the air inlet 01 to the direction far from the air inlet 01, a plurality of first through holes are uniformly distributed on the first hole area 11, a plurality of second through holes are uniformly distributed on the second hole area 12, and a plurality of third through holes are uniformly distributed on the third hole area 13, and the diameters of the first through holes, the second through holes and the third through holes decrease in sequence. In this way, a plurality of through holes can be machined at one time in each hole area, thereby improving the production efficiency. Preferably, the diameter of the first through hole is 6 mm, the diameter of the second through hole is 4.5 mm, and the diameter of the third through hole is 4 mm. Of course, the uniform air hole plate 14 can also comprise the first hole area 11 and the second hole area 12, or a fourth hole area is arranged on the uniform air hole plate 14, and the diameter of the fourth through hole on the fourth hole area is smaller than the diameter of the third through hole.

[0041] Optionally, the air bath device provided by the embodiment of the present application further comprises filter cloth, the filter cloth is located at the side of the filter 04 away from the inner cavity, and the filter cloth covers the surface of the filter 04. Preferably, the filter cloth is pasted on the filter 04. In this way, the filter cloth can further uniform the air and control the air speed. In the embodiment of the present application, the filter 04 preferably adopts a high-efficiency filter 04 which can be customized according to needs; and the filter cloth can be selected in different specifications according to needs.

[0042] In the embodiment of the present application, the flow guide plate 16 can adopt a sheet group form; and the filter cloth can be replaced by filter paper. The air bath device further comprises an RS air bath adapter, a sealing gasket 02, a test tube 03, an insulation plate 10, a fixed bending plate 09, a sensor connecting piece 08, a temperature sensor 07, a sensor adapter plate 06, a connector 05, an insulation plate and insulation cotton and the like.

[0043] In the embodiments of the present application, the flow guide plate 16 can preliminarily control the direction and intensity of the clean air blown into the air bath box 15, and control the wind noise; the uniform air hole plate 14 can effectively control the wind speed and direction of the clean air, and control the wind noise. Compared with the single box 15, the setting of the flow guide plate 16 and the appropriate uniform air hole plate 14 has obvious improvement effect, the wind speed is more uniform, and the wind noise does not increase obviously, which shows that the flow guide plate 16 and the appropriate uniform air hole plate 14 play a significant role in effectively controlling the wind noise and uniform air.

[0044] Another aspect of the present application provides an optical measurement device comprising the air bath device provided in the embodiments of the present application.

[0045] The optical measurement device provided in the present application is realized by using the air bath device provided in the present application. By setting the flow guide plate 16 and making the orientation of the air inlet 01 and the orientation of the air outlet 17 both form an acute angle with the plate surface of the flow guide plate 16, the airflow can be guided to pass through the inner cavity more smoothly, the airflow impact and turbulence are reduced, thereby reducing the aerodynamic noise. In addition, the setting of the flow guide plate 16 can improve the airflow distribution in the inner cavity, reduce the impact of the airflow on the wall surface of the box 15, and further reduce the structural noise caused by the vibration of the box 15.

[0046] The air bath device provided in the present application, when in use, the airflow enters the inner cavity through the air inlet 01 of the box 15, and is sequentially sent out through the uniform air hole plate 14, the filter 04 and the air outlet 17. When the airflow enters between the flow guide plate 16 and the uniform air hole plate 14, adjusting the position of the flow guide plate 16 can adjust the wind speed and airflow direction, and further control the wind noise. Compared with the existing air bath device, the air bath device provided in the present application can better control the wind noise.

[0047] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. An air bath device, characterized in that, The device includes a housing, a baffle plate, and a filter. The housing has an inner cavity, and the housing has an air inlet and an air outlet, both of which communicate with the inner cavity. The air inlet and the air outlet are oriented at an angle. The baffle plate is located in the inner cavity, and the orientations of the air inlet and the air outlet are both at acute angles to the surface of the baffle plate. The filter is installed at the air outlet.

2. The air bath device according to claim 1, characterized in that, The angle between the orientation of the air inlet and the surface of the guide plate is α, where 30°≤α≤45°.

3. The air bath device according to claim 1, characterized in that, It also includes a first connector and a plurality of second connectors installed on the inner wall of the housing. The first connector is located near the air inlet, and each first connector is located near the air outlet. The second connectors are evenly arranged in the direction of the air outlet. One end of the guide plate is hinged to the first connector, and the other end of the guide plate is used for detachable connection with one of the second connectors.

4. The air bath device according to claim 3, characterized in that, The first connector is a hinge, the second connector is a hanging ring, and a hook is installed on the guide plate, the hook being attached to the hanging ring.

5. The air bath device according to claim 1, characterized in that, The guide plate includes a first guide section, which is located close to the air inlet. The first guide section is arc-shaped and tangent to the orientation of the air inlet.

6. The air bath device according to claim 5, characterized in that, The guide plate also includes a second guide section, which is located close to the air outlet. The second guide section is arc-shaped and tangent to the orientation of the air outlet.

7. The air bath apparatus according to any one of claims 1 to 6, characterized in that, It also includes an air distribution plate, which is installed at the air outlet. The air distribution plate is located on the side of the filter facing the inner cavity. The air distribution plate is arranged perpendicular to the orientation of the air outlet. The diameter of the holes on the air distribution plate that are close to the air inlet is larger than the diameter of the holes that are far away from the air inlet.

8. The air bath device according to claim 7, characterized in that, The uniform airflow plate includes a first hole area, a second hole area, and a third hole area arranged sequentially from near the air inlet to away from the air inlet. A plurality of first through holes are evenly distributed in the first hole area, a plurality of second through holes are evenly distributed in the second hole area, and a plurality of third through holes are evenly distributed in the third hole area. The diameters of the first through holes, the second through holes, and the third through holes decrease sequentially.

9. The air bath apparatus according to any one of claims 1 to 6, characterized in that, It also includes a filter cloth located on the side of the filter opposite to the inner cavity, and the filter cloth covers the surface of the filter.

10. An optical measuring device, characterized in that, Includes the air bath device as described in any one of claims 1 to 9.

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