Air-cooling buffering backflow mechanism of vacuum coating equipment

Abstract

The invention relates to an air-cooling buffer backflow mechanism of vacuum coating equipment, which is structurally characterized in that air-cooling lifting components are arranged on two sides of one end of a backflow transplanting platform, backflow lifting components are arranged on two sides of the other end of the backflow transplanting platform, and a sheet guiding machine rack is arranged above the backflow lifting components. The air cooling lifting assembly serves as a hot metal boat cooling station coming out of the process cavity. The backflow transplanting platform is located on the lower side of the air cooling lifting assembly and the backflow lifting assembly, after the boat is cooled, the metal boat is descended from the air cooling lifting assembly to be placed on the backflow transplanting platform station, the backflow transplanting platform is transplanted to the backflow lifting assembly station, and the backflow lifting assembly lifts up the metal boat. The device has the advantages that the occupancy rate of the truss manipulator can be reduced, the boat is transplanted to the position of the backflow lifting assembly through the backflow transplanting platform, the occupied space of an air cooling station and a metal boat backflow buffering station can be reduced, and meanwhile when vacuum coating equipment is saturated and the boat is replaced, cooling boat transplanting is achieved without the truss manipulator; and the grabbing probability of entering and exiting a boat and a guide sheet of vacuum coating equipment is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of vacuum coating equipment air cooling buffer backflow mechanism, belong to vacuum coating equipment technical field. BACKGROUND

[0002] When vacuum coating equipment works, metal boat needs to be transplanted to vacuum coating cavity for process, and the metal boat after process is cooled and transplanted outward.

[0003] In the prior art, the metal boat after process needs to be transplanted to cooling buffer station by truss manipulator, which occupies truss manipulator, and affects other processes, reduces production efficiency, and the air cooling station and the metal boat backflow buffer station occupy larger space. SUMMARY

[0004] The present application proposes a kind of vacuum coating equipment air cooling buffer backflow mechanism, which aims to overcome the above-mentioned deficiencies in the prior art, reduce the occupation of truss manipulator and improve production efficiency.

[0005] The technical solution of the present application: a kind of vacuum coating equipment air cooling buffer backflow mechanism, its structure includes backflow lifting assembly, air cooling lifting assembly and backflow transplantation platform, wherein air cooling lifting assembly is arranged at both sides of one end of backflow transplantation platform, backflow lifting assembly is arranged at both sides of the other end of backflow transplantation platform, and backflow lifting assembly is above the rack of film guide machine. Air cooling lifting assembly is used as the cooling station of hot metal boat from process cavity. Backflow transplantation platform is located below air cooling lifting assembly and backflow lifting assembly, after the metal boat is cooled, the metal boat is placed on backflow transplantation platform station by descending from air cooling lifting assembly, backflow transplantation platform is transplanted to backflow lifting assembly station, and backflow lifting assembly holds up the metal boat. Backflow lifting assembly is above the rack of film guide machine, and the metal boat is grabbed from backflow lifting assembly station by truss manipulator assembly and placed on the film guide station. The hot metal boat after coating can be cooled by air cooling lifting assembly, and after cooling, it can be placed on backflow transplantation platform, avoiding the need to transplant the metal boat to the cooling buffer station by truss manipulator after cooling, reducing the occupation rate of truss manipulator, and backflow transplantation platform transplants the metal boat to backflow lifting assembly position. Compared with the prior art, it can reduce the occupation space of air cooling station and metal boat backflow buffer station, realize up-down double-layer movement, and when the vacuum coating equipment is saturated and the boat is replaced, avoid cooling boat transplantation by truss manipulator, and reduce the probability of grabbing by vacuum coating equipment.

[0006] Preferably, the air-cooled lifting assembly includes a pair of lifting frames, with a lifting machine mounted at the center of the bottom of each frame. Lifting guide rail sliders are mounted on both sides of the lifting frames. Two lifting guide rail sliders are connected to both sides of the module fixing plate. A lead screw for the lifting machine is connected to the center of the module fixing plate via a lead screw and nut. Two metal boat lifting welding plates are fixed to both ends of the module fixing plate. Hooks for placing hot metal boats are provided on the two metal boat lifting welding plates. A fan assembly is located at the top of the lifting frames. A servo motor is located between the two lifting machines. The output of the servo motor is connected to a bidirectional commutator, which connects to the two lifting machines respectively. The entire air-cooled lifting assembly is driven by a servo motor at the bottom connected to the bidirectional commutator, which moves the two lifting machines up and down, thereby raising and lowering the metal boats. When the hot metal boat is placed on the hook, the fan assembly on both sides is turned on for cooling.

[0007] Preferably, the reflow transplanting platform includes a transplanting platform for placing a metal boat. A slider drive pad is connected to one end of the bottom of the transplanting platform, and another slider pad is connected to the center of the bottom of the transplanting platform and the other end. The slider drive pad and the slider pad are connected to a linear guide slider, which is mounted on a frame base. A reducer connecting plate is mounted on the outer end of the slider drive pad, and a reducer and a servo drive motor are mounted on the reducer connecting plate. A rack is also provided on the frame base between the two linear guide sliders, and the output end of the reducer is connected to the rack via a gear. The transplanting platform moves horizontally under the drive of the servo drive motor.

[0008] Preferably, the difference between the recirculation lifting assembly and the air-cooled lifting assembly is that the latter does not include a fan assembly.

[0009] Advantages of this invention: The structure is reasonably designed. The hot metal boat after coating can be cooled by the air-cooled lifting component. After cooling, it can be placed on the return transfer platform, avoiding the need for the gantry robot to transfer the boat to the cooling buffer station after cooling. This reduces the gantry robot's occupancy rate. The return transfer platform transfers the boat to the return lifting component position. Compared with the prior art, this can reduce the space occupied by the air-cooling station and the metal boat return buffer station, and realize double-layer movement. At the same time, when the vacuum coating equipment is saturated and boats are changed, the cooling boat transfer is avoided by using the gantry robot, reducing the chance of competing with the vacuum coating equipment for boats and guide sheets. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the air-cooled buffer reflux mechanism of the vacuum coating equipment of the present invention.

[0011] Figure 2 yes Figure 1 A schematic diagram of the structure of the wind-cooled lifting assembly.

[0012] Figure 3 yes Figure 1 Schematic diagram of the structure of the mid-flow transplanting platform. Figure 4 is Figure 1 Structure diagram of backflow lifting assembly.

[0013] 1 is a metal boat, 2 is a backflow lifting assembly, 3 is an air-cooled lifting assembly, 31 is a lifting frame, 32 is a lifting machine, 33 is a lifting rail slider, 34 is a module fixing plate, 35 is a screw nut, 36 is a metal boat lifting welding plate, 37 is a hook, 38 is a fan assembly, 39 is a servo motor, 310 is a bidirectional commutator, 4 is a sheet guide machine frame, 5 is a backflow transplanting platform, 5 is a backflow transplanting platform, 51 is a transplanting platform, 52 is a slider driving base plate, 53 is a slider base plate, 54 is a linear guide rail slider, 55 is a speed reducer connecting plate, 56 is a speed reducer, 57 is a servo drive motor, 58 is a frame base, 59 is a rack, and 510 is a gear. DETAILED DESCRIPTION

[0014] The application will be further described in detail below in combination with examples and specific embodiments.

[0015] As Figures 1-4 shown, an air-cooled buffer backflow mechanism of a vacuum coating equipment includes a backflow lifting assembly 2, an air-cooled lifting assembly 3, and a backflow transplanting platform 5. The air-cooled lifting assembly 3 is arranged at both sides of one end of the backflow transplanting platform 5, the backflow lifting assembly 2 is arranged at both sides of the other end of the backflow transplanting platform 5, and the backflow lifting assembly 2 is above a sheet guide machine frame 4.

[0016] The air-cooled lifting assembly 3 serves as a cooling station for hot metal boats coming out of a process cavity. The backflow transplanting platform 5 is located below the air-cooled lifting assembly 3 and the backflow lifting assembly 2. After the metal boats are cooled, the metal boats are lowered from the air-cooled lifting assembly 3 and placed on the backflow transplanting platform 5. The backflow transplanting platform 5 is transplanted to the backflow lifting assembly 2, and the backflow lifting assembly 2 holds up the metal boats. Above the backflow lifting assembly 2 is the sheet guide machine frame 4. A truss manipulator assembly grabs the metal boats from the backflow lifting assembly 2 and places them on the sheet guide.

[0017] As Figure 2 shown, the air-cooled lifting assembly 3 includes a pair of lifting frames 31. A lifting machine 32 is arranged at the bottom center of each lifting frame 31. Lifting rail sliders 33 are arranged at both sides of each lifting frame 31. Module fixing plates 34 are connected to the two lifting rail sliders 33 at both sides. Screw nuts 35 are arranged in the middle of each module fixing plate 34 to connect the lead screws of the lifting machine 32. Two metal boat lifting welding plates 36 are fixed at both ends of each module fixing plate 34. Hooks 37 for placing hot metal boats are arranged on the two metal boat lifting welding plates 36. Fan assemblies 38 are arranged at the top of each lifting frame 31. A servo motor 39 is arranged between the two lifting machines 32. A bidirectional commutator 310 is connected to the output end of the servo motor 39 and is connected to the two lifting machines 32.

[0018] The whole air-cooled lifting assembly 3 is connected with the bidirectional commutator 310 by the bottom servo motor 39, which drives the two side elevators 32 to rise and fall, so as to realize the rising and falling of the metal boat. When the hot metal boat is placed on the hook 37, the two side fan assemblies 38 are opened to cool.

[0019] As shown in Figure 3 , the backflow transplanting platform 5 includes a transplanting platform 51 for placing the metal boat, one end of the bottom of the transplanting platform 51 is connected with the sliding block driving pad plate 52, the center and the other end of the bottom of the transplanting platform 51 are connected with the sliding block pad plate 53, the sliding block driving pad plate 52 and the sliding block pad plate 53 are connected on the linear guide rail sliding block 54, the linear guide rail sliding block 54 is installed on the rack base 58, the outer end of the sliding block driving pad plate 52 is installed with the speed reducer connecting plate 55, the speed reducer 56 and the servo driving motor 57 are installed on the speed reducer connecting plate 55, the rack 59 is further arranged on the rack base 58 between the two linear guide rail sliding blocks 54, and the output end of the speed reducer 56 is connected with the rack 59 through the gear 510.

[0020] The transplanting platform 51 moves horizontally under the driving of the servo driving motor 57.

[0021] As shown in Figure 4 , the backflow lifting assembly 2 is different from the air-cooled lifting assembly 3 in that it does not include the fan assembly 38, and the rest of the structure is the same.

[0022] The metal hot boat after coating can be cooled by the air-cooled lifting assembly 3, and after cooling, it can be placed on the backflow transplanting platform 5, avoiding the need for the metal boat to be transplanted to the cooling buffer station by the truss manipulator after cooling, reducing the occupancy rate of the truss manipulator, the backflow transplanting platform 5 transplants the boat to the position of the backflow lifting assembly 2, compared with the prior art, it can reduce the space occupied by the air-cooled station and the metal boat backflow buffer station, realize the up and down double-layer movement, and when the vacuum coating equipment is saturated and the boat is replaced, avoid the cooling boat transplantation by the truss manipulator, and reduce the probability of grabbing the boat and the guide piece of the vacuum coating equipment.

[0023] When the vacuum coating equipment needs to be maintained and all the metal boats need to be discharged, the air-cooled lifting assembly 3, the backflow transplanting platform 5 and the backflow lifting assembly 2 can simultaneously place one metal boat, and the buffer interaction platform and the guide piece machine can each place a set of metal boat, which can realize the temporary buffer position of 5 sets of metal without manual boat moving.

[0024] The above-mentioned components are all prior art, and those skilled in the art can use any model and existing design that can realize their corresponding functions.

[0025] The above merely describes the preferred embodiments of the present application, and it should be noted that, for those skilled in the art, without departing from the concept of the present application, several modifications and improvements can be made, which all belong to the protection scope of the present application.

Claims

1. A vacuum coating equipment air-cooled buffer reflow mechanism, characterized in that, Including backflow lifting assembly (2), air cooling lifting assembly (3) and backflow transplanting platform (5), wherein air cooling lifting assembly (3) is arranged at both sides of one end of backflow transplanting platform (5), backflow lifting assembly (2) is arranged at both sides of the other end of backflow transplanting platform (5), and the top of backflow lifting assembly (2) is guide piece machine frame (4).Air cooling lifting assembly (3) is used as the cooling station of hot metal boat from the process cavity.

2. The air-cooled buffer reflow mechanism of claim 1, wherein, The air cooling lifting assembly (3) includes a pair of lifting frames (31), the bottom center of the lifting frame (31) is provided with a lifting machine (32), lifting guide rail sliders (33) are arranged on both sides of the lifting frame (31), a module fixing plate (34) is connected with the two lifting guide rail sliders (33) on both sides, a screw nut (35) is connected with the lead screw of the lifting machine (32) in the middle of the module fixing plate (34), two metal boat lifting welding plates (36) are fixed at both ends of the module fixing plate (34), hooks (37) for placing hot metal boats are arranged on the two metal boat lifting welding plates (36), a fan assembly (38) is arranged at the top of the lifting frame (31), a servo motor (39) is arranged between the two lifting machines (32), the output end of the servo motor (39) is connected with a bidirectional commutator (310), and the bidirectional commutator (310) is connected with the two lifting machines (32) respectively.

3. The air-cooled buffer reflow mechanism of claim 1, wherein, The backflow transplanting platform (5) includes a transplanting platform (51) for placing metal boats, one end of the bottom of the transplanting platform (51) is connected with a sliding block driving pad plate (52), the center and the other end of the bottom of the transplanting platform (51) are connected with sliding block pad plates (53), the sliding block driving pad plate (52) and the sliding block pad plates (53) are connected with linear guide rail sliders (54), the linear guide rail sliders (54) are installed on a machine frame base (58), a reduction gear connecting plate (55) is installed on the outer end of the sliding block driving pad plate (52), a reduction gear (56) and a servo driving motor (57) are installed on the reduction gear connecting plate (55), and a rack (59) is further arranged on the machine frame base (58) between the two linear guide rail sliders (54). The output end of the reduction gear (56) is connected with the rack (59) through a gear (510).

4. The air-cooled buffer reflow mechanism of claim 2, wherein, The backflow lifting assembly (2) is different from the air cooling lifting assembly (3) in that it does not include a fan assembly (38).

Images