Gas distribution device of magnetron sputtering equipment

Abstract

The invention relates to the technical field of semiconductor manufacturing, and provides a gas distribution device of magnetron sputtering equipment, which comprises a gas inlet pipe, a gas distribution unit and a gas outlet pipe, one end of the air inlet pipe is an air inlet end, and the other end of the air inlet pipe is communicated with the air distribution unit; the air outlet pipe is provided with an air outlet end; the gas distribution unit comprises a primary gas distribution module and a secondary gas distribution module; the primary gas distribution module is provided with a first input end and two first output ends; the secondary gas dividing module is provided with a gas combining end, a second input end, two second output ends, a third input end, two third output ends and two sixth output ends; the two first output ends are respectively communicated with the second input end and the third input end; one second output end is communicated with the gas combining end, and the other second output end is communicated with the gas outlet pipe; one third output end is communicated with the gas combining end, and the other third output end is communicated with the gas outlet pipe; and the two sixth output ends are respectively communicated with the air outlet pipe. And the mass flow of each air outlet end is stable through reasonable pipeline arrangement.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a magnetic control sputtering equipment gas distribution device. BACKGROUND

[0002] As a mainstream physical vapor deposition technology, magnetic control sputtering has been widely used in the preparation of high-quality thin films in the fields of microelectronics and optical coating. The process is usually carried out in a low-pressure vacuum environment filled with argon or reaction gas, and the core goal is to create a controllable, stable and spatially uniform reaction gas environment in the vacuum chamber. Therefore, the uniform distribution and stable delivery of gas in magnetic control sputtering is one of the key factors determining the quality of thin films.

[0003] To achieve relatively uniform gas distribution, the core relies on setting a high-efficiency and precise gas distribution device between the gas inlet and the vacuum chamber. The core function of this device is to convert a concentrated single gas stream into a spatially uniformly distributed multi-micro gas stream. Its performance directly determines the final gas distribution effect. For example, CN118166328A discloses a reaction gas control system and debugging method for reaction magnetic control sputtering, which controls gas distribution through a flow valve to improve the uniformity of gas distribution. However, the structure of the above patent relies heavily on the control system.

[0004] Based on this, the technical problem to be solved by the present application is how to solve the problem of uneven gas distribution in magnetic control sputtering. SUMMARY

[0005] To solve the above technical problems, the present application provides a magnetic control sputtering equipment gas distribution device, which can improve the mass flow stability of each gas outlet through reasonable pipe arrangement, and is conducive to creating a controllable, stable and spatially uniform reaction gas environment.

[0006] The technical solution of the present application is:

[0007] A magnetic control sputtering equipment gas distribution device, comprising a gas inlet pipe, a gas distribution unit and a gas outlet pipe; one end of the gas inlet pipe is a gas inlet end, and the other end of the gas inlet pipe is in communication with the gas distribution unit;

[0008] The gas outlet pipe is a plurality of gas outlet pipes arranged at intervals; the gas distribution unit is in communication with the plurality of gas outlet pipes; and the gas outlet pipe is provided with a gas outlet end;

[0009] The gas distribution unit comprises a primary gas distribution module and a secondary gas distribution module; the primary gas distribution module has a first input end and two first output ends; the secondary gas distribution module has a gas mixing end, a second input end, two second output ends, a third input end, two third output ends and two sixth output ends; the two first output ends are respectively communicated with the second input end and the third input end; one of the second output ends is communicated with the gas mixing end, and the other second output end is communicated with an air outlet pipe; one of the third output ends is communicated with the gas mixing end, and the other third output end is communicated with the air outlet pipe; the two sixth output ends are respectively communicated with the air outlet pipe.

[0010] Preferably, the air outlet pipe comprises a central air outlet pipe, a left air outlet pipe and a right air outlet pipe; the central air outlet pipe, the left air outlet pipe and the right air outlet pipe are a pair of each; the left air outlet pipe and the right air outlet pipe are symmetrically arranged on the two sides of the central air outlet pipe.

[0011] Preferably, the primary gas distribution module comprises a first three-way joint and a first gas distribution pipe;

[0012] One end of the first three-way joint is the first input end, and the other two ends of the first three-way joint are the first output ends, and the two first output ends are symmetrically arranged on the two sides of the first input end; the first gas distribution pipe is two, and the two first gas distribution pipes are respectively communicated with the two first output ends.

[0013] Preferably, the secondary gas distribution module comprises a second three-way joint, a second gas distribution pipe, a first gas mixing pipe, a third three-way joint, a third gas distribution pipe, a second gas mixing pipe and a first four-way joint;

[0014] One end of the second three-way joint is the second input end, and the other two ends of the second three-way joint are the second output ends, and the two second output ends are symmetrically arranged on the two sides of the second input end, one of the second output ends is communicated with the second gas distribution pipe, and the other second output end is communicated with the first gas mixing pipe; the second gas distribution pipe is communicated with the left air outlet pipe;

[0015] One end of the third three-way joint is the third input end, and the other two ends of the third three-way joint are the third output ends, and the two third output ends are symmetrically arranged on the two sides of the third input end, one of the third output ends is communicated with the third gas distribution pipe, and the other third output end is communicated with the second gas mixing pipe; the third gas distribution pipe is communicated with the right air outlet pipe;

[0016] The two ends of the first four-way joint are the gas mixing ends, one of which is in communication with the first gas mixing pipe, and the other of which is in communication with the second gas mixing pipe; the other two ends of the first four-way joint are the sixth output ends, which are symmetrically arranged on the two sides of the gas mixing ends, and the sixth output ends are in communication with a pair of the central gas outlet pipes.

[0017] Preferably, the second gas distribution pipe and the first gas mixing pipe are of the same length; and the third gas distribution pipe and the second gas mixing pipe are of the same length.

[0018] Preferably, the secondary gas distribution module further comprises a fourth three-way joint and a fifth three-way joint.

[0019] One end of the fourth three-way joint is the fourth input end, and the two ends of the fourth three-way joint are the fourth output ends, which are symmetrically arranged on the two sides of the fourth input end, and the fourth output ends are in communication with the left gas outlet pipe;

[0020] One end of the fifth three-way joint is the fifth input end, and the two ends of the fifth three-way joint are the fifth output ends, which are symmetrically arranged on the two sides of the fifth input end, and the fifth output ends are in communication with the right gas outlet pipe.

[0021] The above technical solutions of the present application have at least one of the following advantages or beneficial effects:

[0022] The present application inputs gas at a constant pressure from the gas inlet end, and divides the gas at the gas inlet end to each gas outlet end through the primary gas distribution module and the secondary gas distribution module of the gas distribution unit, so that the mass flow of each gas outlet end is the same. One of the two second output ends of the secondary gas distribution module converges the gas into one gas mixing end. This design not only improves the stability of the mass flow of each gas outlet end, but also is beneficial to creating a controllable, stable and uniformly distributed reaction gas environment, and saves space in pipeline layout. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a schematic diagram of the stereoscopic structure of embodiment 1 of the present application;

[0024] Figure 2 is a schematic diagram of the top view of embodiment 1 of the present application;

[0025] Figure 3 is a schematic diagram of the side view of embodiment 1 of the present application;

[0026] Figure 4 is a connection diagram of embodiment 1 of the present application.

[0027] The reference signs are as follows:

[0028] Inlet pipe 1; Outlet pipe 2; Left outlet pipe 21; Center outlet pipe 22; Right outlet pipe 23; Primary air distribution module 3; First tee connector 31; First air distribution pipe 32; Secondary air distribution module 4; Second tee connector 41; Second air distribution pipe 42; First combining pipe 43; Third tee connector 44; Third air distribution pipe 45; Second combining pipe 46; First four-way connector 47; Fourth tee connector 48; Fifth tee connector 49; Inlet end A; Outlet end B; First direction X; Second direction Y. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0030] Example 1

[0031] like Figures 1-4 As shown, a gas distribution device for a magnetron sputtering equipment has a first direction and a second direction, including an inlet pipe 1, a gas distribution unit and an outlet pipe 2; one end of the inlet pipe 1 is the inlet end A, and the other end of the inlet pipe 1 is connected to the gas distribution unit.

[0032] In this embodiment, there are three vent pipes 2, which are arranged at intervals along a first direction, and the length of each vent pipe 2 extends along a second direction. Specifically, each vent pipe 2 includes a central vent pipe 22, a left vent pipe 21, and a right vent pipe 23. The central vent pipe 22, the left vent pipe 21, and the right vent pipe 23 are each a pair. The left vent pipe 21 and the right vent pipe 23 are symmetrically arranged on both sides of the central vent pipe 22. Both ends of the central vent pipe 22, the left vent pipe 21, and the right vent pipe 23 are vent ends B.

[0033] The gas distribution unit includes a primary gas distribution module 3 and a secondary gas distribution module 4.

[0034] In this embodiment, the primary gas distribution module 3 includes a first tee connector 31 and a first gas distribution pipe 32; the length direction of the first gas distribution pipe 32 extends along a first direction.

[0035] One end of the first tee connector 31 is the first input end, and the other two ends of the first tee connector 31 are the first output ends. The two first output ends are symmetrically arranged on both sides of the first input end. There are two first air distribution pipes 32, and the two first air distribution pipes 32 are respectively connected to the two first output ends.

[0036] In the embodiment, the secondary gas distribution module 4 comprises a second tee joint 41, a second gas distribution pipe 42, a first gas combination pipe 43, a third tee joint 44, a third gas distribution pipe 45, a second gas combination pipe 46 and a first cross joint 47; the length directions of the second gas distribution pipe 42, the third gas distribution pipe 45, the first gas combination pipe 43 and the second gas combination pipe 46 all extend along the first direction;

[0037] One end of the second tee joint 41 is a second input end, the second input end is communicated with one of the first gas distribution pipes 32, the other two ends of the second tee joint 41 are second output ends, the two second output ends are symmetrically arranged on the two sides of the second input end, one of the second output ends is communicated with the second gas distribution pipe 42, and the other second output end is communicated with the first gas combination pipe 43; the second gas distribution pipe 42 is communicated with the left gas outlet pipe 21.

[0038] One end of the third tee joint 44 is a third input end, the third input end is communicated with the other first gas distribution pipe 32; the other two ends of the third tee joint 44 are third output ends, the two third output ends are symmetrically arranged on the two sides of the third input end, one of the third output ends is communicated with the third gas distribution pipe 45, and the other third output end is communicated with the second gas combination pipe 46; the third gas distribution pipe 45 is communicated with the right gas outlet pipe 23.

[0039] In the embodiment, the secondary gas distribution module 4 further comprises a fourth tee joint 48 and a fifth tee joint 49.

[0040] One end of the fourth tee joint 48 is the fourth input end, the other two ends of the fourth tee joint 48 are the fourth output ends, the two fourth output ends are symmetrically arranged on the two sides of the fourth input end, and the fourth output ends are communicated with the left gas outlet pipe 21.

[0041] One end of the fifth tee joint 49 is the fifth input end, the other two ends of the fifth tee joint 49 are the fifth output ends, the two fifth output ends are symmetrically arranged on the two sides of the fifth input end, and the fifth output ends are communicated with the right gas outlet pipe 23.

[0042] The two ends of the first cross joint 47 are gas combination ends, one of the gas combination ends is communicated with the first gas combination pipe 43, and the other gas combination end is communicated with the second gas combination pipe 46; the other two ends of the first cross joint 47 are sixth output ends, the two sixth output ends are symmetrically arranged on the two sides of the gas combination ends, and the two sixth output ends are respectively communicated with a pair of central gas outlet pipes 22.

[0043] In the embodiment, the lengths of the second gas distribution pipe 42 and the first gas combination pipe 43 are the same; the lengths of the third gas distribution pipe 45 and the second gas combination pipe 46 are the same.

[0044] It should be noted that in other embodiments, the left gas outlet pipe 21 can be one, and the left gas outlet pipe 21 can be directly communicated with the second branch gas pipe 42 through welding, and the welding point is located at the midpoint of the left gas outlet pipe 21, at this time, both ends of the left gas outlet pipe 21 are gas outlet ends B; the right gas outlet pipe 23 can also be one, and the right gas outlet pipe 23 can be directly communicated with the third branch gas pipe 45 through welding.

[0045] Although the embodiments of the present application have been shown and described, it should be understood by those ordinary skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A gas distribution device for a magnetron sputtering equipment, characterized in that, It includes an air intake pipe, an air distribution unit, and an air outlet pipe; one end of the air intake pipe is the air intake end, and the other end of the air intake pipe is connected to the air distribution unit; There are multiple air outlet pipes, and the multiple air outlet pipes are arranged at intervals; the air distribution unit is connected to the multiple air outlet pipes; the air outlet pipes are provided with air outlet ends; The gas distribution unit includes a primary gas distribution module and a secondary gas distribution module; the primary gas distribution module has a first input terminal and two first output terminals; the secondary gas distribution module has a gas combining terminal, a second input terminal, two second output terminals, a third input terminal, two third output terminals, and two sixth output terminals; the two first output terminals are respectively connected to the second input terminal and the third input terminal; one of the second output terminals is connected to the gas combining terminal, and the other second output terminal is connected to the gas outlet pipe; one of the third output terminals is connected to the gas combining terminal, and the other third output terminal is connected to the gas outlet pipe; the two sixth output terminals are respectively connected to the gas outlet pipe.

2. The gas distribution device for magnetron sputtering equipment according to claim 1, characterized in that, The vent pipe includes a central vent pipe, a left vent pipe, and a right vent pipe; the central vent pipe, the left vent pipe, and the right vent pipe are all a pair; the left vent pipe and the right vent pipe are symmetrically arranged on both sides of the central vent pipe.

3. The gas distribution device for magnetron sputtering equipment according to claim 2, characterized in that, The primary gas distribution module includes a first tee connector and a first gas distribution pipe; One end of the first tee connector is the first input end, and the other two ends of the first tee connector are the first output ends. The two first output ends are symmetrically arranged on both sides of the first input end. There are two first air distribution pipes, and the two first air distribution pipes are respectively connected to the two first output ends.

4. The gas distribution device for magnetron sputtering equipment according to claim 3, characterized in that, The secondary gas distribution module includes a second three-way connector, a second gas distribution pipe, a first gas combining pipe, a third three-way connector, a third gas distribution pipe, a second gas combining pipe, and a first four-way connector; One end of the second three-way connector is the second input end, and the other two ends of the second three-way connector are the second output ends. The two second output ends are symmetrically arranged on both sides of the second input end. One of the second output ends is connected to the second air distribution pipe, and the other second output end is connected to the first air combination pipe. The second air distribution pipe is connected to the left air outlet pipe. One end of the third tee connector is the third input terminal, and the other two ends of the third tee connector are the third output terminals. The two third output terminals are symmetrically arranged on both sides of the third input terminal. One of the third output terminals is connected to the third air distribution pipe, and the other third output terminal is connected to the second air combination pipe. The third air distribution pipe is connected to the right air outlet pipe. The two ends of the first four-way connector are the gas-combining ends, one of which is connected to the first gas-combining pipe and the other is connected to the second gas-combining pipe; the other two ends of the first four-way connector are the sixth output ends, and the two sixth output ends are symmetrically arranged on both sides of the gas-combining ends, and the sixth output ends are connected to a pair of central gas outlet pipes.

5. The gas distribution device for magnetron sputtering equipment according to claim 4, characterized in that, The second gas splitting pipe and the first gas combining pipe have the same length; the third gas splitting pipe and the second gas combining pipe have the same length.

6. The gas distribution device for magnetron sputtering equipment according to claim 4, characterized in that, The secondary gas distribution module also includes a fourth three-way connector and a fifth three-way connector; One end of the fourth three-way connector is the fourth input end, and the two ends of the fourth three-way connector are the fourth output ends. The two fourth output ends are symmetrically arranged on both sides of the fourth input end, and the fourth output ends are connected to the left air outlet pipe. One end of the fifth tee connector is the fifth input terminal, and both ends of the fifth tee connector are the fifth output terminals. The two fifth output terminals are symmetrically arranged on both sides of the fifth input terminal, and the fifth output terminals are connected to the right air outlet pipe.

Images