Imprint correction system and method

Abstract

An imprint correction system includes an imprint device, a measuring unit, a calculation unit, three height adjusting devices and a control unit, the imprint device includes a carrier plate and a template which are opposite to each other, the carrier plate is used for bearing a press-fit object, and the template is used for adjusting the height of the press-fit object. The pressing object comprises a base plate and a high polymer material layer coated on the surface of the base plate, the template is movably arranged above the carrier plate and is used for applying pressure to the high polymer material layer, and the measuring unit is used for measuring the thicknesses of three preset measuring positions before and after the pressing object is pressed. The calculation unit can generate a plurality of compensation values through the thickness change operation of the three measuring positions before and after the pressing object is pressed, and the height adjusting devices can respectively operate to change the heights of the three adjusting positions on the carrier plate. The control unit can receive the compensation value information transmitted by the calculation unit to drive a preset height adjusting device to operate so as to adjust and correct the Z-axis direction deviation of the carrier plate relative to the template.

Description

TECHNICAL FIELD

[0001] The present invention relates to an imprinting apparatus, and more particularly to an imprinting correction system and method. BACKGROUND

[0002] The existing nano-imprinting apparatus uses the imprinting concept of printing to press a mold with a nano-pattern on a polymer material coated on the surface of a substrate (such as silicon or glass) by mechanical force to imprint and copy the nano-pattern in a proportional manner. The substrate is placed on a carrier plate, and the nano-imprinting apparatus has the characteristics of high processing resolution, fast speed, and low cost, and can be applied to biomedical products, ultra-high-density disk, optical components, organic electronics, molecular electronics, and other fields. The application field is quite extensive. Common imprinting apparatuses include thermal imprinting apparatus and ultraviolet hardening imprinting apparatus, and the detailed structures and operation methods of the two are not described here.

[0003] The carrier plate of the imprinting apparatus will inevitably have a horizontal deviation relative to the mold after long-term operation, causing errors in the size of subsequent pattern transfer. Therefore, as shown in Chinese Patent No. I527676, 'Nano-level optical alignment and imprinting strip apparatus', it uses laser feedback and piezoelectric platform technology to correct the thickness control and horizontal correction. That is, the technology disclosed in the patent is a correction of the mechanism of the apparatus itself, and does not take into account the variables caused by the thickness changes of the substrate and the polymer material before and after being pressed by the imprinting. This will lead to a gradual decrease in the precision and yield of the imprinting, and only then will the problem of the correction of the mechanism of the apparatus itself be found.

[0004] Therefore, based on years of research and development experience in this technical field, the present invention 'imprinting correction system and method' is invented to solve the problem of the decrease in the precision and yield of the imprinting of the existing imprinting apparatuses after long-term use. SUMMARY

[0005] The main purpose of the present invention is to provide an imprinting correction system and method that can balance the carrier plate in the imprinting apparatus at any time, improve the imprinting precision of the compression material and the yield of the subsequent product, and has great effect improvement and practical value.

[0006] To achieve the foregoing objective, the present application provides a system for correcting imprinting, comprising an imprinting device, the imprinting device comprising a substrate and a template, the substrate being used for supporting a compression product, the compression product comprising a substrate and a polymer material layer coated on the surface of the substrate, the template being movably arranged above the substrate and being used for pressing the polymer material layer so that a default pattern on the template is transferred to the polymer material layer; further comprising: a measuring unit arranged on one side of the imprinting device, the measuring unit comprising a fixing seat used for fixing the edge of the compression product, a plurality of measuring devices arranged on one side of the fixing seat and corresponding to the compression product, the measuring devices being used for measuring the thickness of the compression product at three predetermined measuring positions before and after the compression product is pressed, the three measuring positions being selected from the part around the polymer material layer which is not pressed to form a pattern; a calculation unit connected to the measuring unit, the calculation unit being used for receiving the information of the thickness of the compression product at the three measuring positions before and after the compression product is pressed and calculating a plurality of compensation values through the change of the thickness of the compression product at the three measuring positions before and after the compression product is pressed; three height adjusting devices arranged on the imprinting device and connected to three adjusting positions of the substrate, the compression product being placed on the substrate so that the three measuring positions correspond to the three adjusting positions, each of the height adjusting devices being used for changing the height of each adjusting position of the substrate; and a control unit arranged on the imprinting device and connected to the calculation unit and each of the height adjusting devices, the control unit being used for receiving the compensation value information transmitted by the calculation unit to drive the predetermined height adjusting device to operate so as to adjust and correct the height of the predetermined adjusting position of the substrate.

[0007] Preferably, the fixing seat comprises a plurality of bases and a plurality of clamping fixing devices, the clamping fixing devices being arranged on the bases and being used for clamping the edge of the compression product.

[0008] Preferably, the measuring devices are non-contact optical measuring devices arranged above or / and below the fixing seat to correspond to the compression product.

[0009] Preferably, the calculation unit is used for performing average value calculation on the thickness of the compression product at the three measuring positions before and after the compression product is pressed, comparing the thickness of each of the measuring positions with a target value thickness, and if the thickness of two of the three measuring positions is greater than or less than the target value thickness at the same time, the compensation value is the difference between the thickness of the other measuring position and the average value of the thickness of the three measuring positions, and the control unit is used for driving the height adjusting device corresponding to the other measuring position to operate.

[0010] Preferably, the calculation unit is used for performing average value calculation on the thickness of the compression product at the three measuring positions before and after the compression product is pressed, comparing the thickness of each of the measuring positions with a target value thickness, and if the thickness of the three measuring positions is greater than or less than the target value thickness at the same time, the difference between the thickness of each of the measuring positions and the average value of the thickness of each of the measuring positions is the compensation value, and the control unit is used for driving each of the height adjusting devices to operate at the same time.

[0011] Preferably, when the compensation value is positive, each height adjustment device lowers the end of the carrier plate corresponding to the measurement position, and when the compensation value is negative, each height adjustment device raises the end of the carrier plate corresponding to the measurement position.

[0012] In addition, the present application further provides a method for correcting a stamping device, wherein the stamping device comprises a carrier plate and a template, the carrier plate is used to support a stamping material, the stamping material comprises a substrate and a polymer layer coated on the substrate, the template is movably arranged above the carrier plate and is used to press the polymer layer so that a default pattern on the template is transferred to the polymer layer; the method for correcting the stamping device comprises the following steps: first measuring the thickness of the stamping material at three predetermined measurement positions around the stamping material before the stamping material is pressed, the three measurement positions are selected from the portions around the polymer layer which are not pressed to form the pattern; first calculating compensation values, the compensation values are calculated by comparing the differences between the thicknesses of the three measurement positions and an average value before the stamping material is pressed and a target thickness, the target thickness is a thickness of the stamping material after the stamping material is pressed and is preset by the stamping device; first correcting, the compensation values are input into the stamping device so that the stamping device adjusts the heights of the predetermined positions of the carrier plate corresponding to the three measurement positions of the stamping material, thereby correcting the deviation of the Z-axis direction of the carrier plate relative to the template and performing a first correction operation; second measuring the thickness of the stamping material at the three measurement positions after the stamping material is pressed; second calculating compensation values, the compensation values are calculated by comparing the differences between the thicknesses of the three measurement positions and an average value after the stamping material is pressed and the target thickness; and second correcting, the compensation values are fed back to the stamping device so that the stamping device adjusts the heights of the predetermined positions of the carrier plate corresponding to the three measurement positions of the stamping material, thereby performing a second correction operation.

[0013] Preferably, in the steps of first measuring the thickness of the stamping material and second measuring the thickness of the stamping material, the measurement device is a non-contact optical measurement device, the measurement device measures the upper surface or / and the lower surface of the stamping material, when the stamping material is transparent, the measurement device measures the upper surface or the lower surface of the stamping material, and when the stamping material has poor reflectivity or the light of the measurement device cannot penetrate the stamping material, the measurement device measures the upper surface and the lower surface of the stamping material.

[0014] Preferably, in the steps of the first and second measurements of the thickness of the pressed compound, the average thickness of the three measurement positions before and after the pressing is calculated, and then the thickness of the measurement position is compared with the target thickness. If the thickness of two of the three measurement positions is simultaneously greater than or less than the target thickness, the compensation value is the difference between the thickness of the other measurement position and the average thickness of the three measurement positions. This allows the imprinting equipment to adjust the height of the other measurement position of the pressed compound corresponding to the imprinting.

[0015] Preferably, in the steps of the first and second measurements of the thickness of the pressed compound, the average thickness of the three measurement positions before and after the pressing is calculated, and then the thickness of the measurement position is compared with the target thickness. If the thickness of the three measurement positions is simultaneously greater than or less than the target thickness, the difference between the thickness of the measurement position and the average thickness of each measurement position is a compensation value, which causes the imprinting equipment to adjust the height of the carrier plate corresponding to the three measurement positions of the pressed compound.

[0016] The beneficial effects of the present invention are as follows: The imprinting correction system and method of the present invention can adjust the balance of the carrier plate in the imprinting equipment at any time, which can improve the imprinting precision of the imprinted compound and the yield of subsequent products, and has great efficacy enhancement and practical value. Attached Figure Description

[0017] Figure 1 This is a system schematic diagram of a preferred embodiment of the present invention.

[0018] Figure 2 This is a schematic diagram of some of the imprinting equipment, carrier plate, template, imprinted material, and height adjustment device in a preferred embodiment of the present invention.

[0019] Figure 3 This is a perspective view of some of the imprinting equipment, carrier plate, and height adjustment device in a preferred embodiment of the present invention.

[0020] Figure 4 This is a schematic diagram of a measuring device in a preferred embodiment of the present invention measuring a compressible with good reflectivity or that is light-transmittable.

[0021] Figure 5 This is a schematic diagram of a measuring device in a preferred embodiment of the present invention measuring a compressible with poor reflectivity or impermeable light.

[0022] Figure 6 This is a top-side schematic diagram of the three measurement positions of the compressible in a preferred embodiment of the present invention.

[0023] Figure 7 This is a side view of the press-impregnated compound in a preferred embodiment of the present invention.

[0024] Figure 8A , Figure 8B , Figure 8C , Figure 8D , Figure 8E , Figure 8F This is an explanation of various correction methods for excessive single-point deviation values ​​according to a preferred embodiment of the present invention. Figure 8G , Figure 8H This is an explanation of the correction method for overall deviation from the upper and lower limits in a preferred embodiment of the present invention.

[0025] Figure 9 This is a flowchart of a preferred embodiment of the method of the present invention.

[0026] Imprint calibration system 10 Measurement unit 12

[0027] Calculation unit 14 Height adjustment device 16

[0028] Control unit 18 Mounting bracket 22

[0029] Measuring device 24, base 26

[0030] Clamping and fixing device 28 Imprinting correction method 100

[0031] First measurement of compressible thickness: 110; First calculation of compensation value: 120.

[0032] First calibration 130; second measurement of compressible thickness 140.

[0033] Second calculation compensation value: 150; Second correction value: 160 Detailed Implementation

[0034] The following is a detailed description of a preferred embodiment of the present invention, in conjunction with the accompanying drawings:

[0035] First, please refer to Figures 1 to 7As shown, a preferred embodiment of the imprinting correction system 10 of the present invention includes an imprinting device (not shown in the figure). The imprinting device can be an existing hot-press or ultraviolet-cured imprinting device, but is not limited thereto. It includes a carrier plate 1 and a template 2 facing each other. The carrier plate 1 is the lower module platform of the existing imprinting device, and the template 2 is the upper module core of the existing imprinting device, for supporting an imprint 3. The imprint 3 includes a substrate 4 and a polymer material layer 5 coated on the surface of the substrate 4. The substrate 4 can be made of glass, wafer, or plastic, but is not limited thereto. The polymer material layer 5 can be a resin or other adhesive, but is not limited thereto. (When the imprinting device is a hot-press imprinting device, the polymer material layer 5 is a photoresist polymer material; when the imprinting device is an ultraviolet-cured imprinting device...) When using a hardening imprinting device, the polymer material layer 5 is a photosensitive polymer material (but not limited to photoresist or photosensitive polymer material). The template 2 is movably disposed above the carrier plate 1 for applying pressure to the polymer material layer 5 (when the imprinting device is a hot-press imprinting device, the carrier plate 1 is connected to a heat source to heat the pressed compound 2, so that the polymer material layer 5 can be deformed under pressure), so that the default pattern on the template 2 is transferred to the polymer material layer 5. The imprinting device can be used for nanoimprinting of the pressed compound 3. The aforementioned components of the carrier plate 1, template 2, pressed compound 3, and imprinting device are all existing and are not the focus of this invention. The detailed structure and operation of each component will not be described here. The focus of this invention is that it further includes:

[0036] A measurement unit 12, disposed on one side of the imprinting device, includes a fixing base 22 and a measurement device 24. The fixing base 22 includes two bases 26 for placing the edge of the imprinted compound 3 between them, and two clamping and fixing devices 28, respectively disposed on each of the bases 22, for clamping the edge of the imprinted compound 3. The type of device is not limited, as long as it can clamp the edge of the imprinted compound 3. The measurement device 24 is a non-contact laser optical measurement device, but it is not limited. It is movably disposed above or below the imprinted compound 3. In this embodiment, it is disposed above, for measuring the thickness of the imprinted compound 3 at three predetermined measurement positions Z0, Z1, Z2, Z0', Z1', and Z2' before and after being imprinted by the template 2. Each of the three measurement positions Z0, Z1, Z2, Z0', Z1', and Z2' is selected from the part around the polymer material layer 5 that has not been imprinted by the template 2 to form a pattern. The aforementioned fixing base 22 is not limited to being composed of two bases 26 and two clamping fixing devices 28. It only needs to be able to fix the compressible 3 for measurement by the measuring device 24 to meet the requirements of the present invention. Furthermore, the measurement unit 12 is not limited to including only a single measurement device 24, but may also include three measurement devices 24, which can simultaneously measure the thickness of the composite material 3 at three measurement positions Z0, Z1, Z2, Z0', Z1', and Z2' before and after imprinting without needing to move. In addition, the position of the measurement device 24 on the composite material 3 depends on the optical reflectivity of the composite material 3. Specifically, when the composite material 3 is a transparent material (e.g., glass), the measurement device 24 is positioned above or below the composite material 3 for measurement, as shown in Figure 4. When the composite material 3 is a material with poor reflectivity or where the light from the measurement device cannot penetrate (e.g., a wafer), the measurement device 24 simultaneously measures both above and below the composite material 3 (e.g., using a clamp-on thickness laser measurement device), as shown in Figure 5.

[0037] A calculation unit 14 is installed in a computer device (not shown in the figure) and connected to the measurement unit 12. It can be a software or AI unit that includes calculation and logical judgment functions, but is not limited to that. It receives the thickness information of the compressible 3 at three measurement positions Z0, Z1, Z2, Z0', Z1', and Z2' before and after the compression is transmitted by the measurement device 24, and generates a number of compensation values ​​through calculations based on the changes in the thickness of the compressible 3 at the three measurement positions Z0, Z1, Z2, Z0', Z1', and Z2' before and after the compression is transmitted. In detail, the calculation unit 14 averages the thicknesses of the compound 3 at three measurement positions Z0, Z1, Z2, Z0', Z1', and Z2' before and after compression to obtain an average value Avg. Then, it compares the thicknesses at each measurement position Z0, Z1, Z2, Z0', Z1', and Z2' with the target thickness ZT (the thickness of the compound 3 after compression, preset by the imprinting equipment for subsequent product manufacturing) to determine the type of deviation in the thicknesses at each measurement position Z0, Z1, Z2, Z0', Z1', and Z2'. This deviation type includes various types such as single-point deviation (the thickness at only one measurement position deviates significantly from the target thickness ZT) and overall deviation (the thickness at all three measurement positions deviates significantly from the target thickness ZT). Figures 8A to 8H The types shown (a, b, and c in the diagram are correction parameters, a corresponds to Z0, b to Z1, and c to Z2) determine whether the compensation value is a single compensation value or a multiple compensation value by judging the type of deviation value. In short, if the thickness of two of the three measurement positions Z0, Z1, Z2 (Z0', Z1', Z2') is simultaneously greater than or less than the target thickness ZT, such as types A, B, C, D, E, and F, the compensation value is the difference between the thickness of the other measurement position (e.g., Z2, Z2') and the average thickness Avg of the three measurement positions Z0, Z1, Z2 (Z0', Z1', Z2'). (If the thickness deviation at a single measurement position is too large, single-point correction can be performed subsequently.) If the thicknesses at the three measurement locations Z0, Z1, and Z2 (Z0', Z1', Z2') are simultaneously greater than or less than the target thickness ZT, as in types G and H, it indicates that the thicknesses at each measurement location Z0, Z1, and Z2 (Z0', Z1', Z2') deviate from the target thickness ZT. In this case, all three measurement locations Z0, Z1, and Z2 (Z0', Z1', Z2') must be corrected. The difference between the thickness at each measurement location Z0, Z1, Z2, Z0', Z1', and Z2' and the average thickness Avg of each measurement location is the compensation value. The calculation of the average value and difference, and the judgment of the deviation type, are for reference above. Figures 8A to 8H As shown, the thicknesses at each measurement location Z0, Z1, Z2, Z0', Z1', and Z2' are for reference only.

[0038] The three height adjustment devices 16 are linear motors, installed in the imprinting equipment and connected to the three adjustment positions of the carrier plate 1. These three adjustment positions correspond to the three measurement positions Z0, Z1, and Z2 (Z0', Z1', Z2') when the press 3 is placed on the carrier plate 1. Each height adjustment device 16 can operate individually or simultaneously to change the height of each adjustment position on the carrier plate 1 (by corresponding the three measurement positions of the press 3 to the three adjustment positions of the carrier plate 1; when the press 3 undergoes single-point deviation correction, only one height adjustment device 16 operates; when the press 3 undergoes overall deviation correction, all height adjustment devices 16 operate simultaneously). This allows adjustment of the Z-axis deviation of the carrier plate 1 corresponding to the template 2. When the compensation value is positive, each height adjustment device 16 lowers one end of the carrier plate 1 at the corresponding measurement position; when the compensation value is negative, each height adjustment device 16 raises one end of the carrier plate 1 at the corresponding measurement position.

[0039] A control unit 18 is disposed in the imprinting equipment and connected to the calculation unit 14 and each height adjustment device 16. It is the control unit / controller of the imprinting equipment, but not limited thereto. It continuously receives the compensation value information transmitted by the calculation unit 14 to drive the predetermined height adjustment device 16 to operate before and after the imprint 3 is pressed. It can also store the compensation value information to continuously adjust and correct the deviation of the carrier plate 1 relative to the template 2 Z-axis direction using each height adjustment device 16.

[0040] Therefore, through the cooperation of the measurement unit 12, the calculation unit 14, the height adjustment device 16, and the control unit 18, the present invention can provide the following imprinting correction method 100, such as... Figure 9 As shown, the first step is to measure the thickness 110 of the compressible for the first time: after fixing the compressible 3 to the fixing base 22, the thickness of the compressible 3 at three predetermined measurement positions Z0, Z1, and Z2 around the compressible 3 before it is compressed is measured using the measuring device 24. The three measurement positions Z0, Z1, and Z2 refer to the part around the polymer material layer 5 that will not be compressed to form a pattern.

[0041] The second step of this invention is the first calculation of the compensation value 120: This involves using the calculation unit 14 to calculate the difference between the thickness of the compressible 3 at the three measurement positions Z0, Z1, and Z2 transmitted by the measurement unit 12 and the average value Avg. Then, the calculation unit 14 determines the type of deviation value between the thickness of the three measurement positions Z0, Z1, and Z2 and the target thickness ZT. Figures 8A to 8H As shown, after determining the type of deviation (single-point deviation or overall deviation), the difference between the thickness of each measurement position Z0, Z1, Z2 of the compressible 3 and the average thickness Avg of each measurement position is the compensation value.

[0042] The third step of the present invention is the first correction 130: the compensation value is transmitted to the control unit 18, which then causes one or all of the height adjustment devices 16 provided on the bottom side of the carrier plate 1 to operate (to raise or lower the adjustment position of the carrier plate 1), thereby adjusting the height of one or all of the three measurement positions Z0, Z1, Z2 of the carrier plate 1 corresponding to the press 3, in order to correct the Z-axis deviation of the carrier plate 1 relative to the template 2 and perform the first correction action.

[0043] The fourth step of the present invention is to measure the thickness of the compact 140 for the second time: after the compact 3 is pressed by the pressing device, the compact 3 is moved to the fixed seat 22 so that the thickness of the compact 3 at three measuring positions Z0', Z1' and Z2' after being pressed can be measured by the measuring device 24.

[0044] The fifth step of the present invention is to calculate the compensation value 150 for the second time: the calculation unit 14 calculates the difference between the thickness of the three measurement positions Z0', Z1', and Z2' of the pressed compound 3 transmitted by the measurement unit 12 and the average value Avg. Then, the calculation unit 14 determines which type of deviation value the relationship between the thickness of the three measurement positions Z0', Z1', and Z2' and the target thickness ZT belongs to. After determining the type of deviation value, the difference between the thickness of each measurement position Z0', Z1', and Z2' of the pressed compound 3 and the average value Avg of the thickness of each measurement position is the compensation value.

[0045] The final step of the present invention is the second correction 160: the compensation value of the aforementioned step is fed back to the imprinting equipment, so that the height adjustment devices 16 of the imprinting equipment adjust the adjustment position height of the carrier plate 1 corresponding to the three measurement positions Z0', Z1', and Z2' of the compact 3, and perform the second correction action.

[0046] Therefore, the embossing correction system and method of this invention can perform three-point thickness measurements on each embossed material before and after embossing to monitor the thickness change of the embossed material and feed this thickness change information back to the embossing equipment to continuously adjust the height of the carrier plate at a predetermined adjustment position and correct the Z-axis deviation of the carrier plate relative to the template. Thus, even if the embossing equipment has a deviation of the carrier plate relative to the template (not parallel to the template), the technology of this invention can still perform balance control of the carrier plate at any time, so that the thickness of the embossed material after embossing approaches the target thickness, ensuring that the embossed material is usable for subsequent product processes. Compared with the correction technology of existing embossing equipment, this invention can further improve the embossing precision of the embossed material and the yield of subsequent products, demonstrating significant efficiency improvement and practical value.

[0047] Secondly, it must be explained that the purpose of the present invention in measuring the thickness of the composite material before and after pressure printing at three locations is that these three points can form a virtual plane. By observing the changes in the tilt of the virtual plane (such as the aforementioned deviation of a single measurement position) or the changes in the thickness (such as the aforementioned deviation of the overall measurement position), it is possible to know whether the flatness of the carrier plate relative to the template or the pressure of the template has changed. Therefore, the present invention is not limited to three points for measuring the thickness of the composite material before and after pressure printing; more than three measurement positions are also possible. The number of height adjustment devices corresponding to the measurement positions of the composite material is not limited to three.

[0048] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Anyone skilled in the art can make some modifications, alterations and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. An imprinting correction system comprising an imprinting apparatus, the imprinting apparatus including a carrier plate and a template opposite each other, the carrier plate for supporting an imprint, the imprint comprising a substrate and a polymer material layer coated on the surface of the substrate, the template being movably disposed above the carrier plate and applying pressure to the polymer material layer, thereby transferring a default pattern on the template onto the polymer material layer; characterized in that... It also includes: A measurement unit is provided on one side of the imprinting equipment, including a fixing base for fixing the edge of the imprint, and several measuring devices are provided on one side of the fixing base and corresponding to the imprint for measuring the thickness of the imprint at three predetermined measuring positions before and after the imprint is pressed. The three measuring positions are selected from the part around the polymer material layer that is not pressed to form a pattern. and A calculation unit is connected to the measurement unit, receives and stores the thickness information of the three measurement positions of the compound before and after the compression transmitted by the measurement unit, and calculates and compares the difference between the thickness of the compound before and after the compression and the average value, and compares it with a target thickness to generate several compensation values. The target thickness is the thickness of the compound after compression preset by the imprinting equipment. Three height adjustment devices are installed on the imprinting equipment and connected to three adjustment positions of the carrier plate respectively. When the imprinted material is placed on the carrier plate, the three measuring positions correspond to the three adjustment positions. Each height adjustment device can operate individually or simultaneously to change the height of each adjustment position on the carrier plate; and A control unit, located in the imprinting equipment and connected to the calculation unit and each of the height adjustment devices, continuously receives the compensation value information transmitted by the calculation unit, so as to drive the predetermined height adjustment device to operate before and after the imprint is pressed, thereby continuously adjusting the height of the predetermined adjustment position of the carrier plate and correcting the Z-axis deviation of the carrier plate relative to the template.

2. The imprinting correction system as described in claim 1, characterized in that, The fixing base includes several bases and several clamping and fixing devices, which are disposed on the bases to clamp the edge of the press-up.

3. The imprint correction system as described in claim 1 or 2, characterized in that, The measuring device is a non-contact optical measuring device, which is positioned above and / or below the mounting base to correspond to the pressurized material.

4. The imprint correction system as described in claim 1, characterized in that, The calculation unit calculates the average thickness of the compound at three measurement locations before and after compression, and then compares the thickness at each measurement location with the target thickness. If the thickness at two of the three measurement locations is simultaneously greater than or less than the target thickness, the compensation value is the difference between the thickness at the other measurement location and the average thickness of the three measurement locations. The control unit drives the height adjustment device corresponding to the other measurement location to operate.

5. The imprint correction system as described in claim 1, characterized in that, The calculation unit calculates the average thickness of the compound at three measurement locations before and after compression, and then compares the thickness at each measurement location with the target thickness. If the thickness at each of the three measurement locations is greater than or less than the target thickness, the difference between the thickness at each measurement location and the average thickness at each measurement location is a compensation value. The control unit simultaneously drives each height adjustment device to operate.

6. The imprint correction system as described in claim 4 or 5, characterized in that, When the compensation value is positive, each height adjustment device lowers one end of the carrier plate at the corresponding measurement position; when the compensation value is negative, each height adjustment device raises one end of the carrier plate at the corresponding measurement position.

7. An imprinting correction method, applied to an imprinting apparatus, the imprinting apparatus comprising a carrier plate and a template opposing each other, the carrier plate supporting an imprint, the imprint comprising a substrate and a polymer material layer coated on the surface of the substrate, the template being movably disposed above the carrier plate for applying pressure to the polymer material layer, thereby transferring a default pattern on the template to the polymer material layer; the imprinting correction method includes at least the following steps: First measurement of the thickness of the compressible: The thickness of the compressible at three predetermined measurement positions around the compressible before it is compressed is measured using several measuring devices. These three measurement positions are selected from the parts around the polymer material layer that will not be compressed to form a pattern. First calculation of compensation value: Calculate the difference between the thickness of the three measurement positions of the compound before it is compressed and the average value, and compare it with the target thickness to generate several compensation values. The target thickness is the thickness of the compound after compression preset by the imprinting equipment. First calibration: Input the compensation value into the imprinting equipment to adjust the height of the carrier plate relative to the predetermined positions of the three measurement positions of the imprinted material, so as to correct the Z-axis deviation of the carrier plate relative to the pressure plate and perform the first calibration action. Second measurement of the thickness of the compact: After the compact is indented, the thickness of the compact is measured at the same three measurement positions using the measuring device; The second calculation of compensation values ​​involves calculating the difference between the thickness at three measurement locations and the average value of the compressible after compression, and comparing this difference with the target thickness to generate several compensation values; and Second calibration: The compensation value from the previous step is fed back to the imprinting equipment, causing the imprinting equipment to adjust the height of the carrier plate at the predetermined positions of the three measurement locations of the imprinted material, and perform a second calibration operation.

8. The imprinting correction method as described in claim 7, characterized in that, In the steps of measuring the thickness of the first and second composite material, the measuring device is a non-contact optical measuring device that measures the top and / or bottom of the composite material. When the composite material is transparent, the measuring device measures the top or bottom of the composite material. When the composite material has poor reflectivity or is a material that the light from the measuring device cannot penetrate, the measuring device measures both the top and bottom of the composite material.

9. The imprinting correction method as described in claim 7, characterized in that, In the first and second measurements of the thickness of the composite, the average thickness of the composite at three measurement locations before and after compression is calculated, and then the thickness at each measurement location is compared with the target thickness. If the thickness at two of the three measurement locations is simultaneously greater than or less than the target thickness, the compensation value is the difference between the thickness at the other measurement location and the average thickness of the three measurement locations. This allows the imprinting equipment to adjust the height of the carrier plate relative to the other measurement location of the composite.

10. The imprinting correction method as described in claim 7, characterized in that, In the first and second steps of measuring the thickness of the pressed compound, the average thickness of the three measurement positions before and after the pressing is calculated, and then the thickness of the measurement position is compared with the target thickness. If the thickness of the three measurement positions is simultaneously greater than or less than the target thickness, the difference between the thickness of the measurement position and the average thickness of the measurement positions is a compensation value, which causes the imprinting equipment to adjust the height of the carrier plate corresponding to the three measurement positions of the pressed compound.

Images