Ultrasonic gluing device and gluing method

Abstract

The invention provides an ultrasonic gluing device and method, and the device comprises a cavity which is used for accommodating a coating medium; the ultrasonic generating device comprises a plurality of ultrasonic generators arranged on the outer side of the cavity, the ultrasonic generators are used for outputting high-frequency ultrasonic waves capable of being independently adjusted to the containing cavity, and the output frequency range of the ultrasonic waves is 80 kHz to 150 kHz; the nozzle is communicated with an outlet in the bottom of the cavity; and the pressure device is used for directionally spraying out the coating medium subjected to ultrasonic treatment through a nozzle. The ultrasonic generation device is integrated in the ultrasonic gluing device, high-frequency ultrasonic waves generated by the ultrasonic generation device act on a coating medium (such as photoresist, a biocompatible material or functional ink) in the cavity containing cavity, and bubbles in the coating medium can be effectively broken and refined by utilizing shock waves and microjet generated by an ultrasonic cavitation effect; and instant defoaming before coating is realized, so that the quality of the coating is improved. And the method is particularly suitable for application scenes such as photoresist coating, biological printing and ink-jet printing.

Description

Technical Field

[0001] This application relates to the field of ultrasonic adhesive coating technology, specifically to an ultrasonic adhesive coating device and adhesive coating method. Background Technology

[0002] In semiconductor manufacturing processes, the uniformity of photoresist coating directly determines the accuracy of subsequent pattern transfer and linewidth control, which is a key prerequisite for ensuring the performance and yield of semiconductor devices. By uniformly coating photoresist onto the wafer surface, a precise patterning basis is provided for subsequent exposure, development, and other processes. It is widely used in the manufacturing processes of various semiconductor products such as logic chips, memory devices, and power semiconductors. Especially in advanced processes (such as 7nm and below nodes), as the aspect ratio of devices increases and the linewidth shrinks, the requirements for bubble-free and highly uniform photoresist coating become even more stringent.

[0003] However, traditional photoresist coating processes (such as spin coating) have long been plagued by bubble problems. These bubbles mainly originate from photoresist storage and transfer, pre-coating pretreatment, and fluid disturbances in the initial stage of spin coating. In devices with high aspect ratios, bubbles are more likely to become trapped in micro-grooves or cavities, leading to pattern defects, linewidth deviations, and other problems, thus affecting device yield. Furthermore, bioprinting and inkjet printing technologies, which have been attempted for fine coating in recent years, also face bubble problems. These bubbles, adhering to the wafer surface or becoming embedded in microstructures with droplets, can also cause coating defects, making it difficult to meet the high-precision requirements of advanced processes.

[0004] Therefore, existing technologies have shortcomings and need to be improved and developed. Summary of the Invention

[0005] The purpose of this invention is to provide an ultrasonic adhesive coating device and method to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] An ultrasonic adhesive coating device, comprising:

[0008] The cavity has a hollow receiving cavity for containing the coating medium;

[0009] An ultrasonic generator includes multiple ultrasonic generators disposed on the outside of a cavity. The multiple ultrasonic generators are distributed along the height direction of the cavity. The multiple ultrasonic generators are used to output individually adjustable high-frequency ultrasonic waves into the cavity. The output frequency range of the ultrasonic waves is 80kHz-150kHz.

[0010] The nozzle has an inlet that connects to the outlet at the bottom of the cavity.

[0011] A pressure device is used to apply pressure to the cavity, so that the ultrasonically treated coating medium is directionally ejected through a nozzle.

[0012] The coating medium includes photoresist, biocompatible materials, or functional inks.

[0013] The system comprises multiple independent cavities, each equipped with an independent receiving chamber, nozzle, and ultrasonic generator. The outlet at the bottom of each cavity is connected to the inlet of the corresponding nozzle, which is used to directionally eject the coating medium after ultrasonic treatment. The outer side of each cavity is equipped with a corresponding ultrasonic generator, which is used to output high-frequency ultrasonic waves to the corresponding receiving chamber. The output frequency range of the ultrasonic waves includes 80kHz-150kHz.

[0014] The nozzles corresponding to the multiple cavities have different outlet orifice diameters, and the outlet orifice diameter ranges from 50μm to 200μm.

[0015] The ultrasonic generating device includes a first ultrasonic generator array and a second ultrasonic generator array, wherein:

[0016] The first and second ultrasonic generator arrays are symmetrically arranged on both sides of the cavity.

[0017] Both the first and second ultrasonic generator arrays include N ultrasonic generators arranged at equal intervals along the height direction of the cavity.

[0018] The ultrasonic generator includes a ring-shaped piezoelectric ceramic transducer.

[0019] The adhesive applicator includes a motion control device for driving the cavity and its connected nozzle to move synchronously. The motion includes lifting motion along the height direction and rotational motion around the central axis of the cavity.

[0020] A method for applying adhesive, used in the ultrasonic adhesive application apparatus described above, the method comprising:

[0021] S1, Bubble excitation stage: The coating medium is injected into the cavity at a flow rate of 0.5 mL / min-5 mL / min, and the ultrasonic generator is started to output high-frequency ultrasonic waves with a frequency of 80 kHz-120 kHz and a power density of 5 W / cm²-10 W / cm² to the cavity. The duration of the bubble excitation stage is 10 ms-100 ms.

[0022] S2, Bubble migration stage: The multiple ultrasonic generators of the ultrasonic generator are adjusted to ensure that the ultrasonic output frequency of each ultrasonic generator is within the range of 100kHz-150kHz, and the ultrasonic output frequency of the multiple ultrasonic generators decreases from bottom to top along the height of the cavity. The duration of the bubble migration stage is 20ms-150ms.

[0023] S3, Bubble elimination phase: Turn off the ultrasonic generator or switch the ultrasonic generator to the maintenance mode with a power density of 1W / cm²-3W / cm². The duration of the bubble elimination phase is 10ms-50ms.

[0024] S4, Coating medium output stage: A pressure of 0.1 bar to 0.5 bar is applied to the containment cavity through a pressure device, and the coating medium after the bubble elimination stage is directionally sprayed out to the target substrate through the nozzle.

[0025] The coating medium includes photoresist, biocompatible materials, or functional inks.

[0026] The coating medium includes photoresist, and after the coating medium output stage, it also includes:

[0027] S5, Spin Coating Stage: Spin coating is performed on the coating medium sprayed onto the target substrate.

[0028] The beneficial effects of the above-described technical solution of the present invention are as follows:

[0029] By integrating an ultrasonic generator into an ultrasonic coating apparatus, the high-frequency ultrasonic waves generated act on the coating medium (such as photoresist, biocompatible materials, or functional inks) within the cavity. Utilizing the shock waves and microjets generated by the ultrasonic cavitation effect, air bubbles in the coating medium can be effectively broken and refined, achieving immediate debubbling before coating and thus improving coating quality. This is particularly suitable for applications such as photoresist coating, bioprinting, and inkjet printing. Attached Figure Description

[0030] The above and other objects, features, and advantages of exemplary embodiments of the present invention will become readily apparent upon reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of the invention are illustrated by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0031] Figure 1 This is a schematic diagram of the structure of an ultrasonic coating device provided in an embodiment of the present invention;

[0032] Figure 2 This is a schematic flowchart of an adhesive application method provided in an embodiment of the present invention.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1. Cavity; 2. Ultrasonic generator; 21. First ultrasonic generator array; 22. Second ultrasonic generator array; 211. Ultrasonic generator; 3. Nozzle; 4. Pressure device; 5. Medium delivery pipeline. Detailed Implementation

[0035] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Those skilled in the art should understand that the embodiments described below are only some, not all, of the embodiments disclosed. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0036] Furthermore, the directional terms used in this invention, such as [up], [down], [front], [back], [left], [right], [inside], [outside], and [side], are merely for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding this invention, and not for limiting it. In the various figures, structurally similar units are represented by the same reference numerals. For clarity, the various parts in the figures are not drawn to scale. Additionally, some well-known parts may not be shown in the figures.

[0037] The following disclosure provides numerous different embodiments or examples for implementing various structures of the invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0038] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings.

[0039] like Figure 1 The diagram shown is a structural schematic of an ultrasonic coating device provided in an embodiment of the present invention. This ultrasonic coating device is suitable for photoresist coating, bioprinting, and inkjet printing, and includes:

[0040] Cavity 1 has a hollow receiving cavity for containing the coating medium;

[0041] The ultrasonic generator 2 includes multiple ultrasonic generators 211 disposed outside the cavity 1. The multiple ultrasonic generators 211 are distributed along the height direction of the cavity 1. The multiple ultrasonic generators 211 are used to output individually adjustable high-frequency ultrasonic waves to the cavity. The output frequency range of the ultrasonic waves is 80kHz-150kHz.

[0042] Nozzle 3, the inlet of nozzle 3 is connected to the outlet at the bottom of cavity 1;

[0043] Pressure device 4 is used to apply pressure to the cavity and spray the ultrasonically treated coating medium out through nozzle 3 in a directional manner.

[0044] In this embodiment of the invention, cavity 1 is a cylindrical resonant cavity 1, the interior of which is a hollow receiving cavity (not shown in the figure) that can accommodate the coating medium. The diameter of the cylindrical resonant cavity 1 is 1-5 mm, and the height is 3-10 mm.

[0045] The ultrasonic generator 2 includes a first ultrasonic generator array 21 and a second ultrasonic generator array 22, wherein:

[0046] The first ultrasonic generator array 21 and the second ultrasonic generator array 22 are symmetrically arranged on both sides of the cavity 1;

[0047] The first ultrasonic generator array 21 and the second ultrasonic generator array 22 both include N ultrasonic generators 211 arranged at equal intervals along the height direction of the cavity 1.

[0048] The ultrasonic generator 211 includes an annular piezoelectric ceramic transducer.

[0049] like Figure 1 As shown, the ultrasonic generator 2 includes 2N ultrasonic generators 211 with identical structures. The first ultrasonic generator array 21 and the second ultrasonic generator array 22 are symmetrically arranged on both sides of the cavity 1. Each ultrasonic generator array includes N ultrasonic generators 211 arranged at equal intervals along the height direction of the cavity 1.

[0050] It should be noted that N is a positive integer and can be flexibly set according to the height of cavity 1, the amount of coating medium to be processed, and the defoaming requirements. Preferably, the ultrasonic generator 2 covers the cavity 1 in the height direction to ensure that the ultrasonic energy is uniformly radiated to the coating medium at different heights within the cavity, avoiding blind spots in the sound field coverage. Preferably, the value of N is in the range of 3-6. In addition, the spacing between two adjacent ultrasonic generators 211 is adapted to the length of the ultrasonic wave and the diameter of cavity 1 to ensure that the ultrasonic wave forms a uniformly covering sound field within the cavity, avoiding blind spots in the sound field. The ultrasonic generator 211 adopts a ring-shaped piezoelectric ceramic transducer, whose ring structure matches the cylindrical shape of cavity 1. The inner diameter of the transducer is slightly larger than the outer diameter of cavity 1, and the vibration surface of the transducer is perpendicular to the axis of cavity 1, which can efficiently convert high-frequency electrical signals into mechanical vibrations and radiate them into the coating medium within cavity 1 in the form of ultrasonic waves.

[0051] It should be noted that the multiple ultrasonic generators 211 can be adjusted individually, meaning that they can produce the same ultrasonic output frequency or different ultrasonic output frequencies. For example, the multiple ultrasonic generators 211 of the ultrasonic generating device 2 can be individually adjusted so that the ultrasonic output frequency of each ultrasonic generator 211 is within the range of 100kHz-150kHz, and the ultrasonic output frequency of the multiple ultrasonic generators 211 decreases gradually from bottom to top along the height direction of the cavity. Through the above-mentioned gradient setting of ultrasonic output frequency, a sound pressure gradient is formed from bottom to top in the cavity. The ultrasonic frequency is higher and the sound pressure is stronger at the lower part of the cavity 1, while the ultrasonic frequency is lower and the sound pressure is relatively weaker at the upper part of the cavity 1. The directional driving force generated by the sound pressure gradient accelerates the movement of bubbles in the coating medium and guides the bubbles to migrate towards the cavity wall. When the bubbles migrate to the upper surface of the coating medium, they expand and burst under the action of local pressure changes, ultimately achieving efficient elimination of bubbles in the coating medium.

[0052] In this embodiment of the invention, multiple ultrasonic generators 211 with identical structures and symmetrical distribution are used, which can stably output ultrasonic waves in the working frequency band of 80kHz-150kHz. When the two sets of symmetrical ultrasonic generator arrays work together, they can form a superimposed sound field in the cavity, further enhancing the intensity and uniformity of the ultrasonic cavitation effect, which is beneficial to the removal of bubbles in the coating medium.

[0053] In this embodiment of the invention, an ultrasonic generator 2 is disposed on the outside of the cavity 1 to generate high-frequency ultrasonic waves and transmit these high-frequency ultrasonic waves to the coating medium inside the cavity 1. The ultrasonic generator 2 can generate high-frequency ultrasonic waves with an output frequency of 80kHz-150kHz. The high-frequency ultrasonic waves generated by the ultrasonic generator 2 can be conducted to the coating medium inside the cavity 1. Utilizing the shock waves and microjets generated by the ultrasonic cavitation effect, air bubbles in the coating medium can be effectively broken and refined, achieving immediate defoaming before coating, thereby improving the quality of the coating.

[0054] In this embodiment of the invention, the nozzle 3 has an inlet and an outlet. The inlet of the nozzle 3 is connected to the receiving cavity, and the coating medium in the receiving cavity is directionally ejected through the outlet of the nozzle 3. The orifice diameter of the outlet of the nozzle 3 is 50μm-200μm.

[0055] The ultrasonic coating device includes a motion control device for driving the cavity 1 and its connected nozzle 3 to move synchronously. The motion includes lifting motion along the height direction and rotational motion around the central axis of the cavity 1.

[0056] like Figure 1 As shown, the ultrasonic coating apparatus also includes a media delivery pipeline 5, which is connected to components such as the pressure device 4, the cavity 1, and the nozzle 3, for directional transmission of the coating medium. Furthermore, the ultrasonic coating apparatus includes a power modulation system, a pressure regulation system, and a glue supply system. The power modulation system controls the output frequency of the ultrasonic waves, the pressure regulation system controls the output pressure of the pressure device 4, and the glue supply system controls the flow rate of the coating medium injected into the cavity. The pressure output range of the pressure device 4 is 0.1 bar to 0.5 bar. Additionally, the ultrasonic coating apparatus includes a motion control device (not shown in the figure) for driving the cavity 1 and its connected nozzle 3 to move synchronously. The motion includes vertical movement along the height direction and rotational movement around the central axis of the cavity 1.

[0057] The coating medium includes photoresist, biocompatible materials, or functional inks.

[0058] In semiconductor manufacturing processes, the uniformity of photoresist coating directly determines the accuracy of subsequent pattern transfer and linewidth control. In traditional spin coating processes, bubble formation has long been a technical challenge. These bubbles primarily originate from the storage and transfer processes of the photoresist itself, as well as the initial stages of spin coating. Especially on high aspect ratio structures, bubbles are more likely to become trapped within micro-trenches, leading to pattern defects and degraded device performance.

[0059] In some embodiments, methods such as solvent pre-wetting, vacuum degassing, and static degassing can improve the bubble problem during the photoresist coating process. However, these methods may have certain limitations. For example, solvent pre-wetting may alter the chemical properties of the photoresist, vacuum degassing requires additional equipment and has a long processing cycle, while static degassing can take several hours or even 1-2 days, severely impacting production efficiency. Furthermore, in some embodiments, while ultrasonic atomization spraying can improve the bubble problem and uniformity to some extent, it suffers from uneven spraying particles and accumulation at the bottom of the trenches.

[0060] In this embodiment of the invention, the coating medium can be flexibly adapted according to specific application scenarios, including but not limited to photoresists commonly used in the semiconductor manufacturing field (such as positive photoresists, negative photoresists, etc.), biocompatible materials in the biomedical field (such as alginate hydrogels, gelatin-based composite materials, polylactic acid-glycolic acid copolymer (PLGA) dispersions, etc.), and functional inks in the electronics manufacturing field (such as conductive nanoparticle inks, photosensitive resin inks, thermally conductive pastes, fluorescent functional inks, etc.). All of the above coating media possess flowability and are sensitive to air bubbles during the coating process; the presence of air bubbles can directly lead to coating defects or functional failure.

[0061] In terms of effectiveness, by integrating an ultrasonic generator 2 into the ultrasonic coating device, the high-frequency ultrasonic waves generated by the ultrasonic generator 2 act on the coating medium, enabling bubble removal to be completed in a short time (generally only a few minutes or even less), thus improving production efficiency and meeting the demands of high-speed semiconductor manufacturing. Regarding cost, although the ultrasonic generator 2 requires some equipment investment, in the long run, its high efficiency and excellent bubble removal effect reduce product scrap and production delays caused by bubble problems, lowering overall production costs and offering higher cost-effectiveness.

[0062] The ultrasonic coating device of this invention is applicable to applications such as photoresist coating, bioprinting, and inkjet printing, and can improve the bubble problem during the coating process. In the semiconductor manufacturing field, it can achieve real-time debubbling for different types of photoresists, improving device yield and performance. In the biomedical field, it can remove microbubbles in biocompatible materials, avoiding structural defects in 3D printed scaffolds caused by bubbles. In the electronics manufacturing field, it can effectively eliminate bubbles in functional inks, ensuring the density and stability of conductive, thermally conductive, and other functional coatings, avoiding problems such as circuit breaks and uneven thermal conductivity caused by bubbles. Furthermore, there is no need to design dedicated equipment for different coating media; adaptation to different application scenarios can be achieved by adjusting parameters such as ultrasonic frequency and power density.

[0063] The cavity 1 is multiple and each cavity 1 is independent of each other. Each cavity 1 is equipped with an independent receiving cavity, a nozzle 3, and an ultrasonic generator 2. The outlet at the bottom of each cavity 1 is connected to the inlet of the corresponding nozzle 3 for directional spraying of the coating medium after ultrasonic treatment. The ultrasonic generator 2 is set on the outside of each cavity 1 for outputting high-frequency ultrasonic waves to the corresponding receiving cavity. The output frequency range of the ultrasonic waves includes 80kHz-150kHz.

[0064] In this embodiment of the invention, the coating device adopts a multi-cavity parallel design, with each cavity 1 equipped with an independent and complete set of functional components, including an independent receiving cavity, a nozzle 3, and an ultrasonic generator 2. It can directionally output high-frequency ultrasonic waves into the corresponding receiving cavity. The output frequency range of the ultrasonic waves covers 80kHz-150kHz, and the frequency, power, and other parameters of each ultrasonic generator 2 can be independently adjusted. It can adjust the ultrasonic output parameters in a targeted manner according to the type of coating medium (such as photoresist, biocompatible materials, etc.), viscosity characteristics, and bubble distribution in the corresponding cavity 1, so as to achieve efficient defoaming of different media and greatly improve the multi-condition adaptability and processing efficiency of the device.

[0065] It should be noted that, for the case of a multi-cavity parallel design, a single pressure device 4 can be independently connected to multiple cavities 1 to control the pressure of each cavity 1. Alternatively, multiple pressure devices 4 can be used, each corresponding to one cavity 1 to control the pressure of that corresponding cavity 1.

[0066] Among them, the orifice diameters of the nozzles 3 corresponding to the multiple cavities 1 are different, and the orifice diameter range of the nozzles 3 is 50μm-200μm.

[0067] In this embodiment of the invention, multiple nozzles 3 with different outlet orifice diameters can respectively process coating media of different materials and different viscosities, thereby improving defoaming efficiency.

[0068] like Figure 2 The diagram shown is a flowchart illustrating a glue-coating method provided in an embodiment of the present invention, applied in the ultrasonic glue-coating apparatus described above. The glue-coating method includes:

[0069] S1, Bubble excitation stage: The coating medium is injected into the cavity at a flow rate of 0.5 mL / min-5 mL / min, and the ultrasonic generator 2 is started to output high-frequency ultrasonic waves with a frequency of 80 kHz-120 kHz and a power density of 5 W / cm²-10 W / cm² to the cavity. The duration of the bubble excitation stage is 10 ms-100 ms.

[0070] S2, Bubble migration stage: The multiple ultrasonic generators 211 of the ultrasonic generator 2 are adjusted so that the ultrasonic output frequency of each ultrasonic generator 211 is in the range of 100kHz-150kHz, and the ultrasonic output frequency of the multiple ultrasonic generators 211 decreases from bottom to top along the height direction of the cavity. The duration of the bubble migration stage is 20ms-150ms.

[0071] S3, Bubble elimination phase: Turn off ultrasonic generator 2 or switch ultrasonic generator 2 to the maintenance mode with a power density of 1W / cm²-3W / cm². The duration of the bubble elimination phase is 10ms-50ms.

[0072] S4, Coating medium output stage: The pressure device 4 applies a pressure of 0.1 bar to 0.5 bar to the receiving cavity, and the coating medium after the bubble elimination stage is sprayed out directionally to the target substrate through the nozzle 3.

[0073] The coating medium includes photoresist, and after the coating medium output stage, it also includes:

[0074] S5, Spin Coating Stage: Spin coating is performed on the coating medium sprayed onto the target substrate.

[0075] The adhesive application method of this invention, based on the controllable utilization of ultrasonic cavitation effect and optimization of bubble dynamics, achieves bubble excitation and elimination:

[0076] In S1, the bubble induction stage, the coating medium is injected into the receiving cavity at a flow rate of 0.5 mL / min-5 mL / min, and the ultrasonic generator 2 is activated to output high-frequency ultrasound waves with a frequency of 80 kHz-120 kHz and a power density of 5 W / cm²-10 W / cm² into the receiving cavity. This stage lasts for 10 ms-100 ms. Through the action of ultrasound waves with specific frequencies (80 kHz-120 kHz) and power (5-15 W / cm²), bubble aeration is induced, with aeration mainly occurring in the central region of cavity 1, forming micron-sized bubble nuclei.

[0077] In S2, the bubble migration stage, the multiple ultrasonic generators of the ultrasonic generating device are individually adjusted so that the ultrasonic output frequency of each generator is within the range of 100kHz-150kHz, and the ultrasonic output frequency of the multiple ultrasonic generators decreases gradually from bottom to top along the height direction of the cavity. This stage lasts for 20ms-150ms. Through the above-mentioned gradient setting of ultrasonic output frequency, a sound pressure gradient is formed from bottom to top in the cavity. The ultrasonic frequency is higher and the sound pressure is stronger in the lower part of cavity 1, while the ultrasonic frequency is lower and the sound pressure is relatively weaker in the upper part of cavity 1. The directional driving force generated by the sound pressure gradient accelerates the movement of bubbles in the coating medium and guides the bubbles to migrate towards the cavity wall.

[0078] In S3, the bubble elimination stage, the ultrasonic generator 2 is turned off or switched to a maintenance mode with a power density of 1W / cm²-3W / cm² for 10ms-50ms. During this process, the bubbles migrate to the upper surface of the coating medium and expand and rupture under the action of local pressure changes, ultimately achieving efficient elimination of bubbles in the coating medium.

[0079] In S4, the coating medium output stage, a pressure of 0.1 bar to 0.5 bar is applied to the containment cavity through the pressure device 4, and the coating medium (such as photoresist) after the bubble elimination stage is directionally sprayed out through the nozzle 3 to the target substrate (such as a wafer). The sprayed photoresist then enters the subsequent spin coating process.

[0080] The coating medium includes photoresist, and after the coating medium output stage, it also includes:

[0081] S5, the spin coating stage, spin coating the photoresist sprayed onto the target substrate, spreading the photoresist evenly on the surface of the target substrate, and removing excess photoresist from the edge of the substrate, forming a continuous and flat initial coating, providing a high-quality coating for subsequent exposure, development and other processes.

[0082] The coating medium includes photoresist, biocompatible materials, or functional inks.

[0083] The ultrasonic coating method of this invention is applicable to applications such as photoresist coating, bioprinting, and inkjet printing, and can improve the bubble problem during the coating process. In the semiconductor manufacturing field, it can achieve real-time debubbling for different types of photoresists, improving device yield and performance. In the biomedical field, it can remove microbubbles in biocompatible materials, avoiding structural defects in 3D printed scaffolds caused by bubbles. In the electronics manufacturing field, it can effectively eliminate bubbles in functional inks, ensuring the density and stability of conductive, thermally conductive, and other functional coatings, avoiding problems such as circuit breaks and uneven thermal conductivity caused by bubbles.

[0084] As can be seen from the above, the embodiments of the present invention provide an ultrasonic coating device and a coating method. By integrating an ultrasonic generator into the ultrasonic coating device, the high-frequency ultrasonic waves generated by the generator act on the coating medium (such as photoresist, biocompatible materials, or functional inks) within the cavity. Utilizing the shock waves and microjets generated by the ultrasonic cavitation effect, air bubbles in the coating medium can be effectively broken and refined, achieving immediate debubbling before coating, thereby improving the quality of the coating. It is particularly suitable for applications such as photoresist coating, bioprinting, and inkjet printing.

[0085] The above-described preferred embodiments of the present invention are provided as examples, but it will be apparent to those skilled in the art that such embodiments are provided merely by way of example. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and intent of the invention. It should be understood that various alternatives to the embodiments of the invention described herein may be employed in the practice of the invention. The appended claims are intended to define the scope of protection of the invention and therefore cover the modular compositions, equivalents, or alternatives within the scope of these claims.

Claims

1. An ultrasonic adhesive coating device, characterized in that, include: A cavity having a hollow receiving cavity for containing a coating medium; An ultrasonic generating device includes multiple ultrasonic generators disposed outside the cavity. The multiple ultrasonic generators are distributed along the height direction of the cavity. The multiple ultrasonic generators are used to output individually adjustable high-frequency ultrasonic waves to the receiving cavity. The output frequency range of the ultrasonic waves is 80kHz-150kHz. A nozzle, the inlet of which is connected to the outlet at the bottom of the cavity; A pressure device is used to apply pressure to the cavity and spray the coating medium, which has been treated by the ultrasonic waves, out through the nozzle in a directional manner.

2. The ultrasonic adhesive coating device as described in claim 1, characterized in that, The coating medium includes photoresist, biocompatible materials, or functional inks.

3. The ultrasonic adhesive coating device as described in claim 1, characterized in that, The number of cavities is multiple and each cavity is independent of the others. Each cavity is equipped with an independent receiving cavity, a nozzle, and an ultrasonic generator. The outlet at the bottom of each cavity is connected to the inlet of the corresponding nozzle for directional spraying of the coating medium after ultrasonic treatment. A corresponding ultrasonic generator is provided on the outside of each cavity for outputting high-frequency ultrasonic waves to the corresponding receiving cavity. The output frequency range of the ultrasonic waves includes 80kHz-150kHz.

4. The ultrasonic adhesive coating device according to claim 3, characterized in that, The nozzles corresponding to the multiple cavities have different outlet diameters, and the outlet diameter of the nozzles ranges from 50μm to 200μm.

5. The adhesive applicator as described in claim 1, characterized in that, The ultrasonic generating device includes a first ultrasonic generator array and a second ultrasonic generator array, wherein: The first ultrasonic generator array and the second ultrasonic generator array are symmetrically arranged on both sides of the cavity; Both the first ultrasonic generator array and the second ultrasonic generator array include N ultrasonic generators arranged at equal intervals along the height direction of the cavity.

6. The ultrasonic adhesive coating device as described in claim 1, characterized in that, The ultrasonic generator includes an annular piezoelectric ceramic transducer.

7. The ultrasonic adhesive coating device as described in claim 1, characterized in that, The adhesive applicator includes a motion control device for driving the cavity and the nozzle connected thereto to move synchronously, the motion including lifting motion along the height direction and rotational motion about the central axis of the cavity.

8. A method for applying adhesive, used in the ultrasonic adhesive application apparatus as described in any one of claims 1-7, characterized in that, The adhesive application method includes: S1, Bubble excitation stage: The coating medium is injected into the receiving cavity at a flow rate of 0.5 mL / min-5 mL / min, and the ultrasonic generator is activated to output high-frequency ultrasonic waves with a frequency of 80 kHz-120 kHz and a power density of 5 W / cm²-10 W / cm² to the receiving cavity. The duration of the bubble excitation stage is 10 ms-100 ms. S2, Bubble migration stage: The multiple ultrasonic generators of the ultrasonic generating device are adjusted so that the ultrasonic output frequency of each ultrasonic generator is in the range of 100kHz-150kHz, and the ultrasonic output frequency of the multiple ultrasonic generators decreases from bottom to top along the height direction of the cavity. The duration of the bubble migration stage is 20ms-150ms. S3, Bubble elimination phase: The ultrasonic generator is turned off or switched to a maintenance mode with a power density of 1W / cm²-3W / cm². The duration of the bubble elimination phase is 10ms-50ms. S4, Coating medium output stage: The pressure device applies a pressure of 0.1 bar to 0.5 bar to the receiving cavity, and the coating medium after the bubble elimination stage is directionally sprayed out to the target substrate through the nozzle.

9. The adhesive application method as described in claim 8, characterized in that, The coating medium includes photoresist, biocompatible materials, or functional inks.

10. The adhesive application method as described in claim 8, characterized in that, The coating medium includes photoresist, and after the coating medium output stage, it further includes: S5, Spin coating stage: The coating medium sprayed onto the target substrate is spin coated.

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