IBAD equipment for preparing superconducting tape MgO film layer

Abstract

The invention discloses IBAD equipment for preparing a superconducting tape MgO film layer, belongs to the technical field of superconducting material preparation equipment, and aims to solve the technical problems that existing IBAD equipment is low in MgO film layer preparation efficiency, poor in operation stability, dependent on manpower in detection and the like. The equipment comprises a vacuum system, a tape conveying system, an ion source system, a tape detection system and a control system, and all the systems work cooperatively: the vacuum system constructs a gradient vacuum environment in which a coating main cavity is 0.01-0.04 Pa and an ear cavity is less than or equal to 0.005 Pa, so as to prevent gas pollution; the belt conveying system adopts an integrated guide wheel and flange structure, tension closed-loop control and speed self-diagnosis compensation are combined, tension fluctuation is smaller than or equal to 3%, tension difference fluctuation is smaller than or equal to 5%, and forward and reverse rotation reciprocating coating is supported. According to the method, the preparation efficiency and quality of the MgO film layer are greatly improved, the process adaptability is high, the batch production requirement of the second-generation high-temperature superconducting REBCO strip is met, and the method is suitable for superconducting material preparation in a high-intensity magnetic field application scene.

Description

Technical Field

[0001] This invention relates to the field of superconducting material preparation equipment technology, specifically an IBAD device for preparing MgO films in superconducting tapes. Background Technology

[0002] As is well known, second-generation high-temperature superconducting REBCO tapes have become key materials for applications in strong magnetic field environments due to their significant advantages such as high superconducting transition temperature, high current carrying capacity, high irreversible field and inexpensive raw materials. Driven by the demand for fusion magnets, we attach great importance to breakthroughs in the mass production technology of this type of superconducting tape.

[0003] IBAD technology, as the mainstream technology for baseband fabrication, uses ion beams to bombard a target, causing the target to evaporate and deposit onto a metal substrate. Simultaneously, an auxiliary ion beam controls the grain growth direction, forming a biaxial textured seed layer, which is the core step in REBCO tape fabrication. However, existing IBAD equipment faces numerous technical bottlenecks in the fabrication of MgO films, severely restricting the production efficiency and product quality of superconducting tapes. After each coating, the strip needs to be replaced and vacuumed again, which is time-consuming and difficult to meet the needs of mass production. During the tape feeding process, the tension and speed fluctuate significantly, resulting in an unstable coating structure and poor consistency in film thickness and texture. The strip and cooling structure do not fit tightly, and the temperature fluctuation in the coating area is large, affecting the crystallization quality of the MgO film. When multiple strips are driven on the reciprocating pulley, relative slippage is likely to occur, causing abnormal fluctuations in the strip in the coating area, resulting in scratches or uneven film thickness. After coating, the surface quality of the strip needs to be judged manually, which has low inspection efficiency, high missed detection rate, and cannot achieve real-time quality control.

[0004] The aforementioned problems result in MgO films prepared by existing IBAD equipment having insufficient purity, disordered texture, and high defect rate, making it difficult to meet the high-performance requirements of second-generation high-temperature superconducting tapes. Therefore, it is urgent to develop a multi-dimensional optimized IBAD equipment to overcome the pain points of existing technologies. Summary of the Invention

[0005] (a) Technical problems to be solved To address the issues of insufficient purity, disordered texture, and high defect rate in MgO films prepared by existing IBAD equipment, this invention provides an IBAD device for preparing MgO films on superconducting tapes. Through gradient control of the vacuum system, precise regulation of the tape-carrying system, modular design of the ion source, online upgrade of the detection system, and innovation of the reciprocating coating structure, this invention achieves efficient, high-precision, and highly stable preparation of MgO films.

[0006] (II) Technical Solution To achieve the above objectives, the present invention provides the following technical solution: an IBAD device for preparing MgO films on superconducting tapes, comprising a vacuum system, a tape-carrying system, an ion source system, a tape detection system, and a control system. Each system works collaboratively through signal connections and mechanical coordination. The vacuum system can maintain a vacuum level of 0.01~0.04 Pa in the main deposition cavity and a vacuum level better than 0.005 Pa in the left and right ear cavities. The tape-carrying system adopts an integrated guide wheel and edge-blocking structure, achieving tape tension fluctuation ≤3% and tension difference fluctuation ≤5%, and supports forward and reverse reciprocating deposition. The ion source system includes a sputtering ion source assembly and an etching ion source assembly. The distance and angle between the sputtering ion source and the target are adjustable, and the target assembly supports vertical and horizontal adjustment. The distance and angle between the etching ion source and the tape are adjustable, and an arc-shaped water-cooled plate is configured for the tape. The tape detection system integrates a RHEED system and a CCD vision inspection system to achieve film texture detection and online recording of surface defects. The control system regulates the operating parameters of each system.

[0007] Furthermore, the vacuum measurement system of the vacuum system is configured as follows: one resistance gauge and one ionization gauge are installed in each of the left and right ear canals, and one resistance gauge, one ionization gauge and one thin film gauge are installed in the main coating cavity; the detection data of each vacuum gauge is fed back to the valve system in real time, and the pumping speed is controlled by adjusting the opening of the pneumatic valve to maintain a gradient vacuum environment and prevent the gas in the ear canal from diffusing into the main cavity.

[0008] Furthermore, the tension control of the conveyor system adopts a closed-loop control mechanism: tension data is collected in real time by a tension sensor, and the strip lead-out radius is calculated by combining the strip coil count record, which is then fed back to the magnetic powder clutch to dynamically adjust the tension; the tension is set... , Data is fed back to the control system and linked to the water-cooled plate height adjustment to ensure... Fluctuation ≤5% ensures stable bonding between the strip and the water-cooled plate.

[0009] Furthermore, the arc-shaped strip water-cooled plate of the ion source system is closely fitted with the strip, and the arc surface is machined with a 2mm groove to separate the strip and prevent it from sticking together; the water-cooled plate integrates a temperature sensor, and the temperature is precisely controlled by the PID adjustment of the chilled water flow valve, so that the temperature fluctuation of the strip coating is controlled within ±5℃.

[0010] Furthermore, the ion source support frame of the ion source system includes a vertical adjustment rod and an angle adjustment seat; the vertical adjustment rod realizes the vertical adjustment of the ion source through a threaded structure, and the angle adjustment seat realizes the angle adjustment within the range of 30~60° through a damping rotating shaft.

[0011] Furthermore, the conveyor belt system achieves stable speed control through a triple speed monitoring system consisting of servo motor drive, strip reel count recording, and dual-sided meter counter speed measurement; the meter counter is connected to the strip reel count monitoring device to achieve self-diagnosis of conveyor belt speed and meter count, and when the speed deviation exceeds ±2%, the control system automatically triggers the servo motor for error compensation.

[0012] Furthermore, the RHEED system of the strip inspection system includes an adjustable sample stage. The sample stage can be adjusted in the range of 0~50mm through an external adjustment mechanism, which can adapt to different specifications of strips and ensure that the best imaging angle is obtained during inspection.

[0013] Furthermore, in the target assembly of the ion source system, the target size is 200mm×400mm, and the distance between the target and the baseband can be adjusted within the range of 70~170mm; the target is equipped with a water-cooled plate with a built-in circulating cooling water channel, and the target temperature is stabilized within the range of room temperature to 80℃ through cooling water circulation.

[0014] Furthermore, in the visual inspection system of the strip inspection system, a CCD industrial camera is installed in the left and right ear canals, with a shooting frame rate of ≥25fps; the defect detection accuracy of the visual recognition system is ≤0.1mm, and it can record the defect location in real time and store it in the control system.

[0015] Furthermore, the integrated guide wheel flange height of the conveyor system is 5~8mm, and the spacing between adjacent flanges is adapted to the width of the conveyor belt with a spacing error of ≤0.1mm, which enables multiple conveyor belts to be arranged in parallel on the guide wheel without relative slippage.

[0016] Furthermore, the servo motor of the conveyor system supports forward and reverse rotation control. After the strip completes a single coating, the control system can reverse the servo motor according to the coating process settings, so that the strip runs in the opposite direction to achieve a second coating, without the need to re-clamp the strip and vacuum.

[0017] (III) Beneficial Effects Compared with the prior art, the present invention provides an IBAD device for the preparation of MgO films in superconducting tapes, which has the following advantages: The IBAD equipment for preparing MgO films on superconducting tapes features a design that allows for two coatings to be completed in a single setup by reversing the tape rotation, significantly reducing the time required for tape replacement and vacuuming. At the same time, the optimized compatibility between the target and the ion source improves sputtering efficiency and meets the needs of mass production. The tension closed-loop control and speed self-diagnosis compensation mechanism of the conveyor belt system, combined with the anti-slip design of the integrated guide wheel and edge guard, effectively avoids the fluctuation of the belt running and ensures the stability of the coating process; the gradient vacuum environment prevents gas contamination, and the multi-dimensional precise adjustment of the ion source makes the ion beam focus uniform, ensuring that the MgO film has a consistent texture and uniform thickness. The composite temperature control of the target material water-cooled plate and the strip ensures that the temperature of both the target material and the strip remains stable, avoiding film defects caused by temperature fluctuations; the gradient vacuum environment blocks interference from impurity gases, significantly improving the purity and density of the film. By integrating the RHEED system and the CCD vision inspection system, real-time detection of film microstructure and online identification of surface defects are achieved, replacing manual inspection, improving inspection efficiency by more than 5 times, and reducing the defect miss rate to almost zero. At the same time, the defect data is recorded to provide support for process optimization. Key components such as the ion source, target material, and sample stage all support multi-dimensional adjustment, which can adapt to the preparation needs of MgO films with different specifications of strips and different thicknesses (5~10nm), making operation flexible and convenient. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the present invention from a first perspective; Figure 3 This is a schematic diagram of the internal structure of the present invention from a second perspective; Figure 4 This is a schematic internal front view of the structure of the present invention; Figure 5 This is a top view of the structure of the present invention; Figure 6 This is a schematic diagram of the structure of the present invention from the left.

[0019] In the diagram: 1. Main cavity; 2. Left ear cavity; 3. Right ear cavity; 4. RHEED cavity; 5. Ion source system; 6. Visual inspection system; 7. External adjustment mechanism; 8. Strip reel; 9. Meter counter; 10. Tension sensor.

[0020] Note: The accompanying drawings are all drawn in a simplified form and are only used to illustrate the basic structure of the present invention. Therefore, they only show the components closely related to the present invention. The shape, size and proportion of each component in the drawings are exemplary and do not constitute a limitation on the scope of protection of the present invention. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] Please see Figures 1 to 6 This invention relates to an IBAD device for preparing MgO films on superconducting tapes, comprising a vacuum system, a tape-carrying system, an ion source system 5, a tape detection system, and a control system. Each system works collaboratively via signal connections and mechanical coordination. The vacuum system maintains a vacuum level of 0.01~0.04 Pa in the main deposition chamber 1 and a vacuum level better than 0.005 Pa in the left and right ear chambers 2 and 3. The tape-carrying system employs an integrated guide wheel and edge-blocking structure, achieving tape tension fluctuation ≤3% and tension difference fluctuation ≤5%, and supports reciprocating deposition in both forward and reverse directions. The ion source system 5 includes a sputtering ion source assembly and an etching ion source assembly. The distance and angle between the sputtering ion source and the target are adjustable, and the target assembly supports vertical and horizontal adjustment. The distance and angle between the etching ion source and the tape in the ion source system 5 are adjustable, and an arc-shaped water-cooled plate is configured for the tape. The tape detection system integrates a RHEED system and a CCD vision inspection system 6 to achieve film texture detection and online recording of surface defects. The control system regulates the operating parameters of each system. In this embodiment, a gradient vacuum environment is constructed through a vacuum system to provide a pure foundation for coating; the conveyor belt system solves the slippage problem with an integrated guide wheel structure, and precise control of tension and speed ensures stable operation of the conveyor belt; the ion source system 5 adopts a multi-dimensional adjustable design to adapt to different process requirements; the conveyor belt detection system integrates texture detection and surface defect detection to form a closed-loop control; the control system coordinates the parameters of each module to achieve coordinated operation of the entire process. The core principle is to overcome the key technical pain points of existing equipment through structural innovation and precise parameter control, achieving efficient and high-precision preparation of MgO films. The reciprocating coating design reduces material change and vacuuming time, significantly improving preparation efficiency; precise control of tension and speed, and the integrated guide wheel anti-slip design avoid abnormal fluctuations in the conveyor belt, improving the stability of the coating structure; multi-dimensional adjustable ion source and precise temperature control ensure uniform film texture and consistent thickness; the online detection system replaces manual judgment, greatly improving detection efficiency and accuracy; the coordinated work of each system meets the mass production requirements of second-generation high-temperature superconducting REBCO conveyor belts, providing high-quality MgO biaxial textured films for strong magnetic field applications.

[0023] The strip with alumina and yttrium oxide coatings is fixed between the take-up and unload strip reels, passed through the guide rollers, tension sensor, and coating area, and the integrated guide rollers are adjusted to ensure the strip is parallel and secure. All chamber valves are closed, and the dry pump and molecular pump group are started to pump air. The vacuum level of each chamber is monitored in real time through the control system. When the vacuum level of the main coating chamber reaches 0.01~0.04 Pa and the vacuum levels of the left and right ear chambers are better than 0.005 Pa, the pumping is stopped and the vacuum environment is maintained. The control system sets the MgO film thickness (5~10nm), tape speed (0.5~2m / min), target tension value (set according to tape specifications), tension difference Fx threshold (fluctuation ≤5%), and tape coating temperature (±5℃); adjust the position and angle of the ion source so that the distance between the sputtering ion source and the target is 300mm±50mm and the angle is 30~60°, and the distance between the etching ion source and the tape is 250mm±50mm and the angle is 30~60°; set the target temperature control range (room temperature~80℃). The ion source sputtering and etching systems are activated, and the working gas Ar is introduced to maintain a working pressure of 1×10⁻² Pa. The target and strip water-cooled plates are activated in temperature control mode, and the temperature of the target and strip is kept stable within the set range through PID regulation of cooling water circulation and chilled water flow. The servo motor is activated, driving the strip at a set speed. The tension sensor collects tension data in real time and feeds it back to the magnetic powder clutch for dynamic adjustment, ensuring tension fluctuation ≤3% and Fx fluctuation ≤5%, and tight adhesion between the strip and the water-cooled plate. The RHEED system monitors the microstructure of the MgO film in real time. If an abnormality is detected, the control system automatically adjusts the ion source angle and sputtering power. A CCD industrial camera captures images of the strip surface at a frame rate of ≥25fps, and a vision recognition system identifies defects in real time (detection accuracy ≤0.1mm), records the defect location, and stores it. The meter counter and strip coil count monitoring device compare data in real time; if the speed deviation exceeds ±2%, the servo motor automatically performs error compensation. After the strip completes a single coating, the control system controls the ear cavity motor to reverse, and the strip runs in the opposite direction to achieve a second coating. After the coating is completed, the ion source and all actuators are turned off, the vacuum chamber pressure is slowly released, the strip is removed, and the MgO film preparation is completed.

[0024] The MgO film prepared by the above-described method was tested and found to have a thickness uniformity error of ≤ ±2 nm, good microstructure consistency, surface defect rate of ≤ 0.3%, and preparation efficiency of more than 60% compared with existing equipment, fully meeting the performance requirements of second-generation high-temperature superconducting REBCO tape.

[0025] In this scheme, the vacuum measurement system of the vacuum system is configured as follows: each of the left ear cavity 2 and the right ear cavity 3 is equipped with one resistance gauge and one ionization gauge, and the main coating cavity 1 is equipped with one resistance gauge, one ionization gauge, and one thin film gauge. The detection data of each vacuum gauge is fed back to the valve system in real time. The pumping speed is controlled by adjusting the opening of the pneumatic valves to maintain a gradient vacuum environment and prevent gas from diffusing from the ear cavity to the main cavity 1. By configuring differentiated vacuum measuring instruments for each cavity (resistance gauge + ionization gauge for the ear cavity, and thin film gauge added to the main cavity 1), real-time and accurate monitoring of the vacuum degree of each cavity is achieved. The monitoring data is fed back to the pneumatic valve system, and the pumping speed is dynamically adjusted by adjusting the valve opening to make the vacuum degree of the ear cavity higher than that of the main cavity 1, forming a gradient vacuum environment of ear cavity ≤0.005Pa + main cavity 0.01~0.04Pa, thus blocking the gas diffusion path. It completely solves the problem of gas diffusion from the ear cavity to the main cavity 1 of the coating, providing a stable and pure vacuum environment for the coating process of the main cavity 1; it avoids excessive impurities in the film layer caused by vacuum fluctuations, significantly improving the purity and density of the MgO film layer; multi-gauge combined monitoring and valve linkage control ensure that the vacuum level is stable within the set range for a long time, improves process repeatability, and reduces product defect rate.

[0026] In this scheme, the tension control of the conveyor system adopts a closed-loop control mechanism: tension data is collected in real time by tension sensor 10, and the strip lead-out radius is calculated by combining the 8 turns of the strip reel, which is then fed back to the magnetic powder clutch to dynamically adjust the tension; the tension is set... , Data is fed back to the control system and linked to the water-cooled plate height adjustment to ensure... Fluctuations ≤5% ensure stable bonding between the strip and the water-cooled plate. Tension sensor 10 collects strip tension data in real time, providing basic feedback; combined with the 8-turn count record of the strip reel, the strip lead-out radius is calculated in real time to correct the tension calculation value and improve control accuracy; a tension difference parameter is introduced. ,Will Data is fed back to the control system, which in turn adjusts the height of the water-cooled plate to achieve dynamic balance of the tension difference. These three elements work together to form a closed-loop control system, ensuring that the tension and tension difference remain stable within the set range. This achieves high-precision control of strip tension fluctuation ≤3% and tension difference fluctuation ≤5%; the strip and water-cooled plate are tightly and stably bonded, avoiding uneven heat transfer caused by bonding gaps, significantly improving the stability of the coating temperature field; effectively solving problems such as uneven film thickness and texture disorder caused by tension fluctuations, improving the uniformity of MgO film deposition, and enhancing product quality consistency.

[0027] In this solution, the arc-shaped water-cooled plate of the ion source system 5 is tightly fitted to the strip, and a 2mm groove is machined on the arc surface to separate the strip and prevent adhesion. The water-cooled plate integrates a temperature sensor, and precise temperature control is achieved through PID regulation of the chilled water flow valve, keeping the strip coating temperature fluctuation within ±5℃. The arc-shaped structure tightly fits the strip, maximizing the heat exchange area; the 2mm groove on the arc surface physically separates multiple strips, structurally preventing coating adhesion; the integrated temperature sensor collects temperature data in real time, and the PID regulation of the chilled water flow valve dynamically controls the water-cooled plate temperature, thereby indirectly and precisely controlling the strip temperature. The strip coating temperature fluctuation is strictly controlled within ±5℃, significantly improving temperature stability and ensuring consistent film texture growth; the 2mm groove effectively prevents adhesion of multiple strips, reducing product scrap rate; the arc-shaped fit design improves heat exchange efficiency, avoids film defects caused by local overheating or overcooling, and significantly improves etching uniformity and film quality.

[0028] In this solution, the ion source support frame of the ion source system 5 includes a vertical adjustment rod and an angle adjustment seat. The vertical adjustment rod achieves vertical adjustment of the ion source through a threaded structure, while the angle adjustment seat achieves angle adjustment within a range of 30~60° through a damped rotating shaft. The vertical adjustment rod adopts a threaded structure, achieving vertical adjustment of the ion source through rotation, resulting in high adjustment precision. The angle adjustment seat adopts a damped rotating shaft design, allowing for arbitrary angle fixing within a range of 30~60° to meet different sputtering / etching angle requirements. The sputtering and etching systems adopt a unified adjustment structure to ensure operational consistency. The core principle is to achieve independent and precise control of the ion source position and angle through mechanical structure optimization. It can quickly adapt to the optimal process parameters for different specifications of strips and different film thickness requirements; the ion beam focusing accuracy is improved, the energy distribution in the sputtering / etching area is uniform, and the consistency of film texture and etching uniformity are improved; the modular design reduces the difficulty of operation, improves process switching efficiency, and significantly enhances equipment adaptability.

[0029] In this solution, the conveyor belt system achieves stable speed control through a triple speed monitoring system consisting of servo motor drive, 8-turn recording of the strip reel, and speed measurement by dual-sided meter counters 9. The meter counters 9 are signal-connected to the 8-turn monitoring device of the strip reel, enabling self-diagnosis of conveyor belt speed and meter count. When the speed deviation exceeds ±2%, the control system automatically triggers the servo motor for error compensation. The servo motor provides stable power output as the basis for speed control; the 8-turn recording of the strip reel and the speed measurement by the dual-sided meter counters 9 form dual speed monitoring, mutually verifying each other; by comparing the data from both, self-diagnosis of conveyor belt speed and meter count is achieved. When the speed deviation exceeds ±2%, the control system automatically triggers the servo motor for error compensation, forming a closed-loop control. The stability of the conveyor belt speed is significantly improved, with the speed error controlled within ±2%, effectively solving the problem of uneven film thickness caused by speed fluctuations; the meter count self-diagnosis function accurately records the conveyor belt length, meeting the metrological requirements of mass production; the conveyor belt speed can be adjusted to adapt to different film thicknesses (5~10nm) preparation requirements, improving process flexibility and production efficiency.

[0030] In this solution, the RHEED system of the strip inspection system includes an adjustable sample stage. The sample stage can be adjusted from 0 to 50 mm via an external adjustment mechanism 7, adapting to different strip specifications and ensuring the optimal imaging angle during inspection. The external adjustment mechanism 7 drives the sample stage to rise and fall within the 0-50 mm range, adjusting the relative position of the strip with the electron gun and fluorescent screen of the RHEED equipment according to the strip thickness, width, and other specifications, ensuring the electron beam enters the strip surface at the optimal angle to obtain a clear diffraction image. It can adapt to the inspection needs of superconducting strips of different specifications (thickness, width), offering strong versatility; the optimal imaging angle ensures the RHEED system can accurately capture the microstructure information of the MgO film, improving inspection accuracy; and it promptly detects texture anomalies, providing precise basis for process parameter adjustments and avoiding the generation of batches of defective products.

[0031] In this scheme, the target assembly of the ion source system 5 has a target size of 200mm × 400mm, and the distance between the target and the baseband can be adjusted within the range of 70~170mm. The target is equipped with a water-cooled plate with a built-in circulating cooling water channel, which stabilizes the target temperature within the range of room temperature to 80℃ through cooling water circulation. The target size is set at 200mm × 400mm to accommodate the sputtering range of a 6cm × 30cm ion source. The distance between the target and the baseband is designed to be adjustable from 70 to 170mm, and can be adjusted in four directions (front-to-back, up-and-down) through an external feedthrough mechanism to precisely control the sputtering distance. The target is equipped with a water-cooled plate with a built-in circulating cooling water channel, which removes the heat generated during sputtering through cooling water circulation to maintain a stable target temperature. The target temperature is stabilized within the range of room temperature to 80℃, effectively avoiding problems such as target deformation and unstable sputtering rate caused by overheating; the ion beam bombardment intensity can be precisely controlled, improving the uniformity of film thickness; the target size and ion source compatibility are optimized, sputtering efficiency is improved, and the MgO film deposition rate is stable.

[0032] In this solution, the visual inspection system 6 of the strip inspection system includes a CCD industrial camera installed in the left ear cavity 2 and right ear cavity 3, with a shooting frame rate ≥25fps; the defect detection accuracy of the visual recognition system is ≤0.1mm, capable of recording defect locations in real time and storing them in the control system. The CCD industrial camera and visual recognition system are configured in the left ear cavity 2 and right ear cavity 3: the CCD industrial camera captures the strip surface in real time at a frame rate ≥25fps, capturing minute defects; the visual recognition system sets a defect judgment threshold with an accuracy ≤0.1mm, automatically interprets surface defects and records their locations; the detection data is stored in real time in the control system, forming a quality traceability archive. The core principle is to replace manual labor with machine vision, achieving automated and high-precision defect detection. Detection efficiency is more than 5 times higher than manual labor, completely solving the problem of low efficiency in manual inspection; the defect detection accuracy is ≤0.1mm, with a near-zero missed detection rate, significantly improving detection accuracy; real-time recording of defect locations and types provides data support for subsequent process optimization, helping to continuously improve product quality; it reduces labor intensity and inspection costs, adapting to the needs of mass production.

[0033] In this solution, the integrated guide wheel of the conveyor system has a flange height of 5-8mm, and the spacing between adjacent flanges is adapted to the strip width with a spacing error of ≤0.1mm. This allows multiple strips to be arranged in parallel on the guide wheel without relative slippage. The flange height of 5-8mm ensures that the strip does not derail during operation; the spacing between adjacent flanges is precisely adapted to the strip width with a spacing error of ≤0.1mm, physically limiting the lateral displacement of the strip; the integrated guide wheel design allows the strip and the guide wheel to rotate synchronously, avoiding strip fluctuations caused by friction from relative slippage. This completely solves the problem of relative slippage between the strip and the guide wheel, significantly improving the consistency of the strip's running trajectory; multiple strips are arranged in parallel without mutual interference, and there are no abnormal fluctuations in the strip in the coating area; the uniformity and stability of film deposition are improved, product quality consistency is enhanced, and defects such as film scratches and uneven thickness caused by strip slippage are effectively reduced.

[0034] In this solution, the servo motor of the conveyor system supports forward and reverse rotation control. After the strip completes a single coating, the control system can reverse the servo motor according to the coating process settings, so that the strip runs in the opposite direction to achieve a second coating, without the need to re-clamp the strip and vacuum.

[0035] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An IBAD device for preparing MgO films on superconducting tapes, characterized in that, The system includes a vacuum system, a conveyor belt system, an ion source system (5), a strip inspection system, and a control system. Each system works in coordination through signal connection and mechanical cooperation. The vacuum system can maintain a vacuum level of 0.01~0.04Pa in the main coating cavity (1) and a vacuum level of better than 0.005Pa in the left ear cavity (2) and right ear cavity (3). The conveyor belt system adopts an integrated guide wheel and edge-blocking structure to achieve strip tension fluctuation ≤3% and tension difference fluctuation ≤5%, and supports forward and reverse reciprocating coating. The ion source system (5) includes a sputtering ion source assembly and an etching ion source assembly. The distance and angle between the sputtering ion source and the target are adjustable, and the target assembly supports up and down and forward and backward adjustment. The distance and angle between the etching ion source and the strip in the ion source system (5) are adjustable, and an arc-shaped strip water-cooling plate is configured. The strip inspection system integrates a RHEED system and a CCD vision inspection system (6) to realize film texture detection and online recording of surface defects. The control system regulates the operating parameters of each system. The vacuum measurement system of the vacuum system is configured as follows: a resistance gauge and an ionization gauge are installed in the left ear cavity (2) and the right ear cavity (3), and a resistance gauge, an ionization gauge and a thin film gauge are installed in the coating main cavity (1); the detection data of each vacuum gauge is fed back to the valve system in real time, and the pumping speed is controlled by adjusting the opening of the pneumatic valve to maintain the gradient vacuum environment and prevent the gas in the ear cavity from diffusing into the main cavity (1). The tension control of the conveyor system adopts a closed-loop control mechanism: tension data is collected in real time by the tension sensor (10), and the strip lead-out radius is calculated by combining the number of turns recorded by the strip disc (8), which is then fed back to the magnetic powder clutch to dynamically adjust the tension; the tension is set. , Data is fed back to the control system and linked to the water-cooled plate height adjustment to ensure... Fluctuation ≤5%, ensuring stable bonding between the strip and the water-cooled plate; The arc surface of the arc-shaped strip water-cooled plate of the ion source system (5) is closely attached to the strip, and the arc surface is machined with a 2mm groove to separate the strip and prevent it from sticking. The water-cooled plate integrates a temperature sensor, and the temperature is precisely controlled by the PID adjustment of the chilled water flow valve, so that the temperature fluctuation of the strip coating is controlled within ±5℃. The conveyor belt system achieves stable speed control through a triple speed monitoring system consisting of servo motor drive, tape reel (8) rotation count recording, and double-sided meter counter (9) speed measurement. The meter counter (9) is connected to the tape reel (8) rotation count monitoring device to achieve self-diagnosis of conveyor belt speed and meter count. When the speed deviation exceeds ±2%, the control system automatically triggers the servo motor for error compensation.

2. The IBAD device for preparing MgO films in superconducting tapes according to claim 1, characterized in that, The ion source support frame of the ion source system (5) includes a vertical adjustment rod and an angle adjustment seat; the vertical adjustment rod realizes the up and down adjustment of the ion source through a threaded structure, and the angle adjustment seat realizes the angle adjustment within the range of 30~60° through a damping rotating shaft.

3. The IBAD device for preparing MgO films in superconducting tapes according to claim 1, characterized in that, The RHEED system of the strip inspection system includes an adjustable sample stage. The sample stage is adjusted by an external adjustment mechanism (7) to adapt to different specifications of strips and ensure the best imaging angle during inspection.

4. The IBAD device for preparing MgO films in superconducting tapes according to claim 1, characterized in that, In the target assembly of the ion source system (5), the target size is 200mm×400mm, and the distance between the target and the baseband can be adjusted in the range of 70~170mm; the target is equipped with a water-cooled plate with a built-in circulating cooling water channel, and the target temperature is stabilized in the range of room temperature to 80℃ through the circulation of cooling water.

5. The IBAD device for preparing MgO films in superconducting tapes according to claim 1, characterized in that, In the visual inspection system (6) of the strip inspection system, a CCD industrial camera is installed in the left ear cavity (2) and the right ear cavity (3), with a shooting frame rate ≥25fps; the defect detection accuracy of the visual recognition system is ≤0.1mm, and it can record the defect location in real time and store it in the control system.

6. The IBAD device for preparing MgO films in superconducting tapes according to claim 1, characterized in that, The integrated guide wheel of the conveyor system has a flange height of 5~8mm, and the spacing between adjacent flanges is adapted to the width of the strip with a spacing error of ≤0.1mm, which enables multiple strips to be arranged in parallel on the guide wheel without relative slippage.

7. The IBAD apparatus for preparing MgO films in superconducting tapes according to claim 1, characterized in that, The servo motor of the conveyor system supports forward and reverse rotation control. After the strip completes a single coating, the control system can reverse the servo motor according to the coating process settings, so that the strip runs in the opposite direction to achieve a second coating, without the need to re-clamp the strip and vacuum.

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