Method for preparing low-oxygen titanium cast ingot from recycled high-purity titanium residual target

Abstract

The invention provides a method for preparing a low-oxygen titanium cast ingot from a recycled high-purity titanium residual target. The method comprises the following steps: (1) separating the high-purity titanium residual target into residual titanium and a back plate; (2) ultrasonically cleaning the residual titanium plate; (3) electron beam surface polishing; (4) superheated molten titanium uptakes oxygen; (5) electron beam smelting purification and ingot casting forming; and (6) detecting and analyzing titanium ingot blank components. According to the method, the process is simple, efficient and environmentally friendly, gas in the electron beam cold bed melting process is fully absorbed by adding overheated molten titanium, the oxygen content in the high-purity titanium ingot is remarkably reduced, inclusions in residual titanium are further removed under electron beam melting purification, and the high-quality high-yield recycled titanium ingot is obtained.

Description

Technical Field

[0001] This invention belongs to the field of high-purity metal material recycling and preparation technology, specifically relating to a method for preparing low-oxygen titanium ingots from recycled high-purity titanium residue targets. Background Technology

[0002] Driven by the digital economy, the semiconductor industry's sustained high growth and accelerated domestic substitution have led to a continuous increase in demand for various high-purity metal materials and sputtering targets in the integrated circuit industry. However, due to limitations in sputtering thin film processes, the average utilization rate of high-purity metal targets is less than 30%, resulting in a significant waste of high-purity metal resources. High-purity metals, as a scarce and valuable resource, are often several times or even dozens of times more valuable than ordinary metals, making them highly valuable for recycling. Therefore, the recycling of high-purity metal targets has significant social and economic implications.

[0003] High-purity titanium metal possesses excellent corrosion resistance and adhesion, making it widely used in integrated circuit wafer manufacturing and advanced packaging. High-purity titanium sputtering targets are generally used without alloying elements. After magnetron sputtering, a large amount of target residue remains, making its recycling economically beneficial. Currently, recycled high-purity titanium target residue is mainly used for titanium powder production. The method involves mechanically removing the backplate from the high-purity titanium target residue and cutting it into small pieces. These pieces are then surface-washed with acid and deionized water, followed by hydrogenation and crushing into powder. Finally, dehydrogenation treatment produces high-purity titanium powder. However, this recycling process is lengthy and complex, and the resulting high-purity titanium powder requires further processing to produce titanium ingots. Furthermore, while directly melting high-purity titanium target residue in a vacuum process is shorter, it often significantly increases the gas content, especially the oxygen content, of the titanium ingot, and reduces the purity of the produced ingot, limiting its use to alloying materials. Summary of the Invention

[0004] In view of the problem that the existing technology has a short process for recycling high-purity titanium residues but the oxygen content of the prepared titanium ingots is too high, the inventors have carefully studied and provided a method for preparing low-oxygen titanium ingots from recycled high-purity titanium residues. This method can realize the batch recycling of high-purity titanium residues, and the oxygen content of the titanium ingots prepared after recycling is less than 0.02%.

[0005] To achieve the above objectives, the technical solution of the present invention is as follows: A method for preparing low-oxygen titanium ingots from recycled high-purity titanium target residues includes the following steps: The residual titanium plate and backing plate material in the high-purity titanium target were separated by sawing. The residual titanium plate after separation in step (1) was cleaned with ultrasonic cleaning to remove surface oil and dust, and then dried. After the residual titanium plate processed in step (2) is flattened, electron beam surface polishing is used to remove volatile substances on the surface, so that the surface of the residual titanium plate is brightened. The bright residual titanium plate after step (3) is placed in a water-cooled crucible for deoxygenation, and the titanium is kept in a molten state by using a large electron beam power to further reduce the residual gas in the furnace body in order to obtain a higher vacuum. After the residual titanium plate processed in step (4) is bundled, it is pushed into the water-cooled crucible for melting and purification in the electron beam melting furnace. A certain electron beam power is applied to it for melting. Then, the molten high-purity titanium melt flows into the crystallizer. Electron beam power is applied to keep the surface of the titanium melt at a certain level of overheating. Under the action of the traction ingot pulling system, the lower titanium melt gradually solidifies to obtain the purified and recycled high-purity titanium ingot. The high-purity titanium ingot obtained in step (5) was subjected to compositional analysis.

[0006] Furthermore, in step (1), the purity of the high-purity titanium target residue is 99.99-99.9995%, and the sawing can be done by a sawing machine or by electrical discharge sawing.

[0007] Further, in step (2), the cleaning medium used for ultrasonic cleaning is, in order, ultrapure water, anhydrous ethanol, and ultrapure water.

[0008] Furthermore, in step (3), the line power density used during electron beam surface polishing is 30 kW / m to 60 kW / m, and the electron beam moving scanning speed is... ν The speed is 0.1~0.5 m / s (preferably 0.18~0.3 m / s), and the scanning frequency is 10 kHz. This step, using electron beam surface polishing, is more environmentally friendly than chemical polishing.

[0009] Further, in step (4), the electron beam power of the water-cooled crucible for oxygen reduction is 100~200 kW, the electron beam scanning pattern is a serpentine scan, and the corresponding size of the water-cooled crucible is 300 mm × 300 mm. The obtained vacuum degree is less than 8 × 10⁻⁶. -4 Pa. At this point, the water-cooled crucible is a copper crucible.

[0010] Furthermore, in step (5), the electron beam power of the water-cooled crucible used for melting and purification is 150~200 kW, corresponding to a crucible size of 300 mm × 800 mm, and the molten titanium is kept for 1~5 min of refining time (preferably 2~4 min) to facilitate the flow of the melt.

[0011] Furthermore, in step (5), the electron beam scanning pattern applied to the water-cooled crucible for melting and purification is a combined rectangular scan (i.e., a combination of wide rectangle and long rectangle). The wide rectangle part of the combined rectangle is used to melt titanium, and the long rectangle part is used to purify impurities through volatilization and adsorption during the flow of the titanium melt.

[0012] Furthermore, in step (5), to keep the titanium melt at a certain superheat on the inner surface of the crystallizer, an electron beam power of 50-300kW needs to be applied. At this time, the electron beam scanning pattern in the crystallizer is a "multi-concentric circle" scan, and the diameter of the high-purity titanium ingot obtained is Φ100-600 mm.

[0013] Furthermore, in step (5), when the titanium melt no longer flows into the crystallizer, the electron beam power of the crystallizer is gradually reduced to 0 kW. The specific process of gradually reducing the electron beam power of the crystallizer is to reduce the original maximum power by 10% every minute, and the electron beam power is reduced to 0 kW after 10 minutes.

[0014] By gradually reducing the electron beam power of the crystallizer, the quality of the upper part of the ingot can be maintained, thereby reducing the porosity and shrinkage cavities of the ingot.

[0015] A low-oxygen titanium ingot, which is a low-oxygen titanium ingot obtained by the above-described method of preparing low-oxygen titanium ingots from recycled high-purity titanium residues.

[0016] The chemical composition of the low-oxygen titanium ingot by weight percentage includes: Ti≥99.995%, O≤0.02%.

[0017] Beneficial effects of the present invention The method for preparing low-oxygen titanium ingots from recycled high-purity titanium residues according to the present invention, compared with the traditional hydrogenation powder recovery of titanium and direct vacuum melting preparation of ingots, adopts the residue sawing separation, ultrasonic cleaning and electron beam surface polishing. For the first time, electron beam surface polishing instead of chemical polishing is used to obtain clean residue titanium raw materials after separation. The process is more environmentally friendly. Furthermore, the inclusions in the residue titanium are further removed under electron beam melting to obtain high-quality recycled titanium ingot billets.

[0018] The present invention discloses a method for preparing low-oxygen titanium ingots from recycled high-purity titanium residue targets. This method involves adding an oxygen-reducing water-cooled copper crucible during electron beam melting. This operation causes the superheated molten titanium to undergo an absorption reaction, thereby increasing the absorption of gases during the electron beam cold bed melting process. This significantly reduces the oxygen content in the high-purity titanium ingot. Furthermore, the electron beam melting purification process further removes inclusions from the residue titanium, resulting in high-quality recycled titanium ingots. The process is simple and easy to implement, and the titanium in the absorption device can be reused multiple times. It can also be used for oxygen and nitrogen reduction during the melting of other active metals.

[0019] The titanium ingots prepared after recycling are particularly high in purity and low in oxygen content, so they can be directly used for the preparation of titanium targets for integrated circuits or other devices. This achieves a short-process recycling of residual titanium targets, enabling the efficient recovery of valuable high-purity titanium resources and resulting in significant economic benefits. Attached Figure Description

[0020] Figure 1 A schematic diagram of a titanium target with surface polishing by an electron beam is shown. Figure 2 A schematic diagram of electron beam recovery for preparing low-oxygen titanium ingots is shown; Symbol Explanation 1-Electron gun, 2-Residual titanium plate, 3-Electron gun, 4-Electron gun, 5-Electron gun, 6-Water-cooled crucible for deoxygenation, 7-Water-cooled crucible for smelting and purification, 8-Water-cooled crystallizer, 9-High-purity titanium ingot. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0022] A method for preparing low-oxygen titanium ingots from recycled high-purity titanium target residues includes the following steps: (1) Select high-purity titanium residue targets with a purity of 99.99%-99.995% and use a sawing method to separate the residual titanium plate and backing plate material in the high-purity titanium residue targets; (2) The residual titanium plate after separation in step (1) is cleaned by ultrasonic cleaning to remove oil, dust and other contaminants from the surface. The cleaning media are ultrapure water, anhydrous ethanol and ultrapure water in sequence, and then dried. (3) Reference Figure 1 After the residual titanium plate 2 from step (2) is flattened, it is polished by electron beam. The surface polishing is performed by using the electron beam of electron gun 1 to remove volatile substances from the surface. The line power density of electron beam polishing is 30 kW / m~60 kW / m and the electron beam moving scanning speed is ν With a scanning speed of 0.1~0.5 m / s and a scanning frequency of 10 kHz, the surface of the residual titanium plate was brightened. (4) Reference Figure 2The residual titanium plate after step (3) is placed in a water-cooled crucible 6 for oxygen reduction. The water-cooled crucible is a copper crucible with dimensions of 300 mm × 300 mm. A large electron beam power is applied by an electron gun 3 to maintain the titanium in a superheated molten state so that it absorbs the gas (mainly oxygen) during the electron beam cold bed melting process. The electron beam power is 100~200 kW, and the electron beam scanning pattern is a serpentine scan, thereby further reducing the residual gas in the furnace body and obtaining a higher vacuum degree (less than 8 × 10⁻⁶). -4 Pa); (5) Reference Figure 2 After obtaining a high vacuum, the residual titanium plate processed in step (4) is bundled and pushed into an electron beam melting furnace for melting and purification in a water-cooled crucible 7. The crucible size is 300 mm × 800 mm. Electron gun 4 is used to apply an electron beam power of 150~200 kW for melting, and the refining time is maintained for 1~5 min. The electron beam scanning pattern is a combined rectangular scan. The wide rectangular part of the combined rectangle is used to melt the high-purity residual titanium, and the slender rectangular part is used to purify impurities through volatilization and adsorption during the flow of the titanium melt. The purified high-purity titanium melt flows into a Φ100~600 mm crystallizer 8. An electron beam power of 50~300 kW is applied in the crystallizer 8 to keep the surface of the titanium melt at a certain level of superheat. The electron beam scanning pattern of electron gun 5 in the crystallizer is a multi-concentric circular scan. Under the action of the traction and ingot pulling system, the lower titanium melt gradually solidifies. When the titanium material is completely fed and the titanium melt no longer flows into the crystallizer 8, the maximum power of the electron beam of the original crystallizer is reduced by 10% per minute until the power is 0kW, and the purified and recycled high-purity titanium ingot 9 is obtained. (6) The high-purity titanium ingot obtained in step (5) is subjected to compositional analysis.

[0023] The following examples provide a more detailed description.

[0024] Example 1: A method for preparing low-oxygen titanium ingots from recycled high-purity titanium target residues, comprising the following steps: (1) Select a high-purity titanium target with a purity of 99.99% and use a sawing method to separate the residual titanium plate and backing plate material in the high-purity titanium target; (2) The residual titanium plate after separation in step (1) is sequentially cleaned with ultrapure water, anhydrous ethanol, and ultrapure water using ultrasonic cleaning methods to remove surface oil, dust, etc., and then dried. (3) After the residual titanium plate processed in step (2) is flattened, the surface volatile substances are removed by electron beam surface polishing. The line power density of electron gun 1 is 40 kW / m, the electron beam moving scanning speed is 0.25 m / s, and the scanning frequency is 10 kHz, to obtain a brightened residual titanium plate 2 (reference). Figure 1 ); (4) Place the residual titanium plate 2 after step (3) in a water-cooled crucible 6 for deoxygenation. The water-cooled crucible is a copper crucible with dimensions of 300 mm × 300 mm. The electron gun 3 is powered by 200 kW to keep the titanium in a superheated molten state. The electron beam scanning pattern is a serpentine scan to further reduce the residual gas in the furnace body and obtain less than 8 × 10⁻⁶ ppm. -4 Vacuum degree in Pa; (5) After obtaining a high vacuum, the residual titanium plate processed in step (4) is bundled and pushed into the electron beam melting furnace for melting and purification in a water-cooled crucible 7. The crucible size is 300 mm × 800 mm. The power applied by the electron gun 4 is 170 kW, and the refining time is maintained for 2 min, so that the purified high-purity titanium melt flows into the crystallizer 8. The electron gun 5 above the Φ100 mm crystallizer applies a power of 50 kW to perform multi-concentric circular scanning, so that the surface of the titanium melt is kept at a certain level of overheating. Under the action of the traction ingot pulling system, the lower titanium melt gradually solidifies. When the titanium material is completely fed and the titanium melt no longer flows into the crystallizer, the electron beam power of the electron gun 5 will decrease by 5 kW per minute, and after 10 minutes it will decrease to 0 kW, thus obtaining the purified and recovered Φ100 mm diameter high-purity titanium ingot 9; (6) The high-purity titanium ingot 9 obtained in step (5) was subjected to compositional analysis. After testing and analysis, the chemical composition by weight percentage was: Ti≥99.995% (Fe:0.0008%, Cu:0.0005%, Ni:0.0002%, Si:0.0001%, Al:0.0001%, S:0.0001%), O:0.012%.

[0025] Example 2 (1) Select a high-purity titanium target with a purity of 99.99% and use an electrical discharge sawing method to separate the residual titanium plate and backing plate material in the high-purity titanium target; (2) The residual titanium plate after separation in step (1) is ultrasonically cleaned in sequence with ultrapure water, anhydrous ethanol, and ultrapure water to remove oil, dust and other substances on the surface. The cleaning medium is then dried. (3) After the residual titanium plate processed in step (2) is flattened, the surface volatile substances are removed by electron beam surface micro-melting polishing. The line power density of electron gun 1 is 55 kW / m, the electron beam moving scanning speed is 0.28 m / s, and the scanning frequency is 10 kHz, so as to obtain the brightened residual titanium plate 2. (4) Place the residual titanium plate 2 after step (3) in a water-cooled crucible 6 for deoxygenation. The water-cooled crucible is a copper crucible with dimensions of 300 mm × 300 mm. The electron gun 3 is powered by 180 kW to keep the titanium in a superheated molten state. The electron beam scanning pattern is a serpentine scan to further reduce the residual gas in the furnace body and obtain less than 8 × 10⁻⁶ ppm. -4 Vacuum degree in Pa; (5) After obtaining a high vacuum, the residual titanium processed in step (3) is bundled and pushed into the electron beam melting furnace for melting and purification in a water-cooled crucible 7. The crucible size is 300 mm × 800 mm. The power applied by the electron gun 4 is 160 kW, and the refining time is maintained for 3 min, so that the purified high-purity titanium melt flows into the crystallizer 8. The power of the electron gun 5 above the Φ500 mm crystallizer is 250 kW to perform multi-concentric circular scanning, so that the surface of the titanium melt is kept at a certain level of overheating. Under the action of the traction ingot pulling system, the lower titanium melt gradually solidifies. When the titanium material is completely fed and the titanium melt no longer flows into the crystallizer, the electron beam power of the electron gun 5 will decrease by 25 kW per minute, and after 10 minutes it will decrease to 0 kW, thus obtaining the purified and recovered Φ500 mm diameter high-purity titanium ingot 9. (6) The high-purity titanium ingot 9 obtained in step (5) was subjected to compositional analysis. After testing and analysis, the chemical composition by weight percentage was: Ti≥99.995% (Fe:0.0007%, Cu:0.0004%, Ni:0.0003%, Si:0.0001%, Al:0.0001%, S:0.0001%), O:0.014%.

[0026] Example 3. The difference between this example and Example 1 is that the line power density of electron gun 1 in step (2) is 30kW / m, the electron beam moving scanning speed is 0.18 m / s, and the scanning frequency is 10 kHz. The other steps and parameter settings are the same as in Example 1.

[0027] After testing and analysis, the chemical composition of the high-purity titanium ingot by weight percentage is: Ti≥99.995% (Fe: 0.0007%, Cu: 0.0004%, Ni: 0.0002%, Si: 0.0001%, Al: 0.0001%, S: 0.0001%), O: 0.012%.

[0028] Example 4. The difference between this example and Example 1 is that the electron beam power in the water-cooled crucible for oxygen reduction in step (4) is 100 kW, and the other steps and parameter settings are the same as in Example 1.

[0029] After testing and analysis, the chemical composition of the high-purity titanium ingot by weight percentage is: Ti≥99.995% (Fe: 0.0008%, Cu: 0.0005%, Ni: 0.0002%, Si: 0.0001%, Al: 0.0001%, S: 0.0001%), O: 0.016%.

[0030] Example 5. The difference between this example and Example 1 is that the power applied to the electron gun 4 above the water-cooled crucible 7 in step (5) is 190 kW. The other steps and parameter settings are the same as in Example 1.

[0031] After testing and analysis, the chemical composition of the high-purity titanium ingot by weight percentage is: Ti≥99.995% (Fe: 0.0005%, Cu: 0.0004%, Ni: 0.0002%, Si: 0.0001%, Al: 0.0001%, S: 0.0001%), O: 0.011%.

[0032] Comparative Example 1 The difference between this comparative example and Example 1 is that step 3 was not implemented, while the remaining steps and parameter settings are the same as in Example 1.

[0033] After testing and analysis, the chemical composition of the high-purity titanium ingot by weight percentage is: Ti≥99.995% (Fe: 0.0009%, Cu: 0.0004%, Ni: 0.0002%, Si: 0.0001%, Al: 0.0001%, S: 0.0003%), O: 0.035%.

[0034] Comparative Example 2 The difference between this comparative example and Example 1 is that step (4) was not performed, and the vacuum degree of the electron beam furnace at this time is 8×10⁻⁶. -3 Pa, the remaining steps and parameter settings are the same as in Example 1.

[0035] After testing and analysis, the chemical composition of the high-purity titanium ingot by weight percentage is: Ti≥99.995% (Fe: 0.0008%, Cu: 0.0004%, Ni: 0.0003%, Si: 0.0001%, Al: 0.0001%, S: 0.0002%), O: 0.024%.

[0036] The results of the test analysis of the high-purity titanium ingots obtained by Examples 1-5 and Comparative Examples 1-2 above show that the oxygen content of the high-purity titanium ingots obtained by the preparation method of the present invention in Examples 1-5 is less than 0.02%, while the oxygen content of Comparative Examples 1 and 2, which are different from the preparation method of the present invention, is higher than 0.02%.

[0037] Specifically, Comparative Example 1 did not implement step (3), and the rest was the same as Example 1. That is, Comparative Example 1 did not use electron beam surface polishing, that is, it did not perform electron beam surface polishing to further remove surface contamination in the residual titanium plate, but instead had a residual titanium plate with surface impurities, etc. In contrast, in Example 1 of the present invention, after electron beam surface polishing, the inclusions in the residual titanium were further removed under electron beam melting, thereby obtaining a high-purity titanium ingot. As a result, it is obvious that the oxygen content of the high-purity titanium ingot prepared by Comparative Example 1 is high, which of course does not meet the practical standard.

[0038] For Comparative Example 2, step (4) was not implemented, and the vacuum level of its electron beam furnace was 8 × 10⁻⁶. -3 Pa, which is much higher than the vacuum degree of the preparation method of this invention, which is less than 8 × 10⁻⁶. -4 Pa is due to the use of an oxygen-reducing water-cooled copper crucible during electron beam melting. This operation increases the absorption of gases (mainly oxygen) during the electron beam cold bed melting process by the superheated molten titanium, significantly reducing the oxygen content in the residual titanium. Furthermore, the electron beam melting purification process can further remove inclusions from the residual titanium, thereby obtaining high-quality recycled titanium ingots. In contrast, in Comparative Example 2, which did not perform this step, there was no gas absorption operation or further removal of inclusions from the residual titanium, so the oxygen content and purity of the high-purity titanium ingots obtained did not meet practical standards.

[0039] Furthermore, the preparation method of the present invention enables a short-process recycling of residual titanium targets, resulting in the efficient recovery of valuable high-purity titanium resources and significant economic benefits.

[0040] The foregoing descriptions have outlined some exemplary embodiments of the present invention. It is understood that these embodiments are merely illustrative and do not constitute a limitation on the scope of protection of the present invention. Features in these embodiments can be rearranged in suitable ways, and the resulting solutions remain within the scope of protection claimed by the present invention. All other embodiments obtained by those skilled in the art based on the foregoing embodiments without inventive effort, i.e., all modifications, equivalent substitutions, and improvements made within the spirit and principles of this application, fall within the scope of protection claimed by the present invention.

Claims

1. A method for preparing low-oxygen titanium ingots from recycled high-purity titanium target residues, characterized in that, Includes the following steps: The residual titanium plate and backing plate material in the high-purity titanium target were separated by sawing. The residual titanium plate after separation in step (1) was cleaned with ultrasonic cleaning to remove surface oil and dust, and then dried. After the residual titanium plate processed in step (2) is flattened, electron beam surface polishing is used to remove volatile substances on the surface, so that the surface of the residual titanium plate is brightened. The bright residual titanium plate after step (3) is placed in a water-cooled crucible for deoxygenation, and the titanium is kept in a molten state by using a large electron beam power to further reduce the residual gas in the furnace body in order to obtain a higher vacuum. After the residual titanium plate processed in step (4) is bundled, it is pushed into the melting and purification water-cooled crucible in the electron beam melting furnace. A certain electron beam power is applied to it for melting. Then, the molten high-purity titanium melt flows into the crystallizer. Electron beam power is applied to keep the surface of the titanium melt at a certain level of overheating. Under the action of the traction ingot pulling system, the lower titanium melt gradually solidifies to obtain the purified and recycled high-purity titanium ingot. The high-purity titanium ingot obtained in step (5) was subjected to compositional analysis.

2. The method according to claim 1, characterized in that, In step (2), the cleaning media used for ultrasonic cleaning are, in order, ultrapure water, anhydrous ethanol, and ultrapure water.

3. The method according to claim 1, characterized in that, In step (3), the line power density used for electron beam surface polishing is 30 kW / m to 60 kW / m, the electron beam moving scanning speed is 0.1 to 0.5 m / s, and the scanning frequency is 10 kHz.

4. The method according to claim 1, characterized in that, In step (4), the electron beam power of the water-cooled crucible for oxygen reduction is 100~200 kW, the electron beam scanning pattern is a serpentine scan, and the obtained vacuum degree is less than 8×10⁻⁶. -4 Pa.

5. The method according to claim 1, characterized in that, In step (5), the electron beam power applied to the water-cooled crucible for melting and purification is 150~200 kW, corresponding to the size of the water-cooled crucible being 300 mm × 800 mm, and the molten titanium is kept for a refining time of 1~5 min.

6. The method according to claim 5, characterized in that, The scanning pattern of the applied electron beam is a combined rectangular scan consisting of a wide rectangle and a narrow rectangle. The wide rectangle is used to melt titanium, while the narrow rectangle is used to purify impurities through volatilization and adsorption during the flow of the titanium melt.

7. The method according to claim 1, characterized in that, In step (5), the electron beam power required to maintain a certain overheat on the surface of the titanium melt is 50-300 kW. At this time, the electron beam scanning pattern is a "multi-concentric circle" scan, and the diameter of the high-purity titanium ingot is Φ100-600 mm.

8. The method according to claim 1, characterized in that, In step (5), when the titanium melt no longer flows into the crystallizer, the electron beam power applied to the surface of the titanium melt is gradually reduced at a rate of 10% per minute, and reduced to 0 kW after 10 minutes.

9. A low-oxygen titanium ingot, which is a low-oxygen titanium ingot obtained by the method of preparing a low-oxygen titanium ingot from a recycled high-purity titanium target according to any one of claims 1-8.

10. The low-oxygen titanium ingot according to claim 9, characterized in that, Its chemical composition by weight percentage includes: Ti≥99.995%, O≤0.02%.

Images