Dynamic control method, device and equipment for ports in semiconductor conveying system

Abstract

The invention relates to a dynamic control method, device and equipment for a port in a semiconductor conveying system. The method comprises the following steps: acquiring the state of each port in each semiconductor conveying system; obtaining the number of effective ports in the semiconductor conveying system based on the state of each port in the semiconductor conveying system; the flow in the input direction and the flow in the output direction of the semiconductor conveying system are obtained; and controlling the direction of each effective port in the semiconductor conveying system based on the number of the effective ports and the flow in the input direction and the flow in the output direction of the semiconductor conveying system. By adopting the method, the carrying efficiency can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a method, apparatus and device for dynamic control of ports in a semiconductor delivery system. Background Technology

[0002] Automated Material Handling Systems (AMHS) are a critical component of wafer fab production in the semiconductor industry, improving production efficiency and product yield through automated material handling. With the continuous advancement of domestic semiconductor manufacturing processes, the importance of automated handling systems is becoming increasingly prominent.

[0003] In conventional technology, automated handling systems include several semiconductor storage devices, each of which includes several ports, including input ports and output ports. The input ports are used by semiconductor handling equipment to move goods into the semiconductor storage devices, and the output ports are used to remove the goods stored in the semiconductor storage devices.

[0004] However, current automated handling systems are large in scale and have a large number of handling tasks. Furthermore, ports in semiconductor storage devices may also malfunction. When ports in semiconductor storage devices malfunction and there are a large number of handling tasks, congestion may occur at the semiconductor storage devices with faulty ports, leading to reduced handling efficiency.

[0005] Automated material handling system, semiconductor conveying system Summary of the Invention

[0006] Therefore, it is necessary to provide a dynamic control method, apparatus, and device for ports in a semiconductor transport system that can improve handling efficiency, addressing the aforementioned technical problems.

[0007] In a first aspect, this application provides a method for dynamic control of a port in a semiconductor delivery system, the method comprising:

[0008] Obtain the status of each port in each semiconductor delivery system;

[0009] Based on the status of each port in the semiconductor delivery system, the number of valid ports in the semiconductor delivery system is obtained;

[0010] Determine the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system;

[0011] The direction of each effective port in the semiconductor delivery system is controlled based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system.

[0012] In one embodiment of the semiconductor delivery system, controlling the direction of each of the effective ports in the semiconductor delivery system based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system includes:

[0013] If, based on the state of each port in the semiconductor delivery system, it is determined that there is only one valid port left in the semiconductor delivery system, the semiconductor delivery system controls the direction of the valid port to switch between the input direction and the output direction based on the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system.

[0014] In one embodiment, controlling the direction of the effective port to switch between the input and output directions based on the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system includes:

[0015] When the flow rate in one direction of the semiconductor delivery system is greater than the flow rate in another direction, the direction of the effective port is controlled to be the direction of the greater flow rate.

[0016] If the effective time of the direction of the effective port being the direction of high flow reaches the first threshold time, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are reacquired.

[0017] When the direction of the large flow rate in the semiconductor delivery system changes, the direction of the effective port is controlled to change.

[0018] If the direction of the large flow rate in the semiconductor delivery system remains unchanged, the direction of the effective port remains unchanged.

[0019] In one embodiment, the method further includes:

[0020] Obtain the historical time periods corresponding to the input and output directions of each port in each of the semiconductor delivery systems;

[0021] Mathematical statistics are performed on the historical time periods corresponding to the input and output directions of each port in each semiconductor delivery system to determine the first target time period corresponding to the input direction and the second target time period corresponding to the output direction of each port in the semiconductor delivery system.

[0022] The direction of each port of the semiconductor delivery system is controlled to be the input direction during the first target time period and the output direction during the second target time period.

[0023] In one embodiment, controlling the direction of each of the effective ports in the semiconductor delivery system based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system includes:

[0024] Based on the state of each port in the semiconductor delivery system, if it is determined that the semiconductor delivery system also includes at least two valid ports, the semiconductor delivery system calculates the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system.

[0025] If the difference is greater than the start-up threshold, the direction of each effective port in the semiconductor delivery system is controlled to be the direction of high flow rate.

[0026] In one embodiment, after controlling the direction of each effective port in the semiconductor delivery system to be the direction of high flow, the method further includes:

[0027] If the effective time of each effective port in the semiconductor delivery system in the direction of high flow reaches the second threshold time, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are reacquired.

[0028] If the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system is less than the shutdown threshold, the direction of each effective port of the semiconductor delivery system is restored to the default direction.

[0029] In one embodiment, the calculation method for the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system includes:

[0030] Determine the flow rate in the input direction and the flow rate in the output direction of each effective port in the semiconductor delivery system;

[0031] Based on the flow rate in the input direction and the flow rate in the output direction of each effective port, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are obtained.

[0032] In one embodiment, determining the flow rate in the input direction and the flow rate in the output direction of each effective port in the semiconductor delivery system includes:

[0033] For each valid port, determine the flow parameter values ​​corresponding to the input direction and output direction of the valid port respectively. The flow parameter values ​​include at least one of the number of tasks, the sum of priorities, and the sum of target priorities.

[0034] Based on the flow parameter values ​​corresponding to the input and output directions of the effective port and the weights corresponding to each flow parameter value, the flow corresponding to the input and output directions of the effective port is determined; wherein the weights corresponding to each flow parameter value are configured with different values ​​in different task scenarios.

[0035] Secondly, this application also provides a dynamic control device for a port in a semiconductor delivery system, the device comprising:

[0036] The status acquisition module is used to acquire the status of each port in each semiconductor delivery system;

[0037] A quantity acquisition module is used to acquire the number of valid ports in the semiconductor delivery system based on the status of each port in the semiconductor delivery system; the semiconductor delivery system is a semiconductor delivery system.

[0038] A flow acquisition module is used to acquire the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system;

[0039] A control module is used to control the direction of each of the effective ports in the semiconductor delivery system based on the number of effective ports and the flow rates in the input and output directions of the semiconductor delivery system. (Semiconductor delivery system)

[0040] Thirdly, this application also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method in any of the above embodiments.

[0041] Fourthly, this application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the methods in any of the above embodiments.

[0042] Fifthly, this application also provides a computer program product, including a computer program that, when executed by a processor, implements the steps of the method in any of the above embodiments.

[0043] The aforementioned dynamic control method, apparatus, and equipment for ports in a semiconductor transport system acquires the status of each port in the semiconductor transport system; based on the status of each port in the semiconductor transport system, acquires the number of effective ports in the semiconductor transport system; acquires the flow rate in the input direction and the flow rate in the output direction of the semiconductor transport system; and based on the number of effective ports and the flow rate in the input and output directions of the semiconductor transport system, controls the direction of each effective port in the semiconductor transport system. This allows for control of the direction of the effective ports based on the flow rate and the number of effective ports, avoiding potential congestion at semiconductor storage devices with faulty ports and improving transport efficiency. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the drawings used in the description of the embodiments of this application or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0045] Figure 1 This is an application environment diagram of a dynamic control method for ports in a semiconductor delivery system in one embodiment;

[0046] Figure 2 This is a flowchart illustrating a dynamic control method for a port in a semiconductor delivery system in one embodiment.

[0047] Figure 3 This is a schematic diagram of port switching in one embodiment;

[0048] Figure 4 This is a flowchart illustrating a dynamic control method for a port in a semiconductor delivery system, as described in another embodiment.

[0049] Figure 5 This is a structural block diagram of a dynamic control device for a port in a semiconductor delivery system in one embodiment;

[0050] Figure 6 This is an internal structural diagram of a computer device in one embodiment. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0052] It should be noted that the terms "first," "second," etc., used in this application can be used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish the first element from the second element. The terms "comprising" and "having," and any variations thereof, used in this application, are intended to cover non-exclusive inclusion. The term "multiple" used in this application refers to two or more. The term "and / or" used in this application refers to one of the embodiments, or any combination of multiple embodiments.

[0053] The dynamic control method for ports in a semiconductor delivery system provided in this application embodiment can be applied to, for example... Figure 1 The illustrated Automated Material Handling System (AMHS) includes an MCS (Material Control System) and various semiconductor conveying systems. The MCS can communicate with each semiconductor conveying system, which includes at least one port. The MCS can obtain the status of each port in each semiconductor conveying system. The semiconductor conveying system includes a semiconductor storage device stocker, a cleanroom conveyor, and a semiconductor handling device ALP.

[0054] Based on the status of each port in the semiconductor transport system, the number of effective ports in the semiconductor transport system is obtained, and the flow rate in the input direction and the flow rate in the output direction of the semiconductor transport system are determined. Based on the number of effective ports and the flow rate in the input and output directions of the semiconductor transport system, the direction of each effective port in the semiconductor transport system is controlled. The direction of the effective ports can be controlled based on the flow rate and the number of effective ports, avoiding potential congestion at semiconductor storage devices with faulty ports, improving handling efficiency, and maintaining equipment availability.

[0055] In one exemplary embodiment, such as Figure 2 As shown, a dynamic control method for ports in a semiconductor delivery system is provided, which can be applied to... Figure 1 Taking the MCS as an example, the explanation includes the following steps S202 to S206. Wherein:

[0056] S202: Obtain the status of each port in each semiconductor delivery system.

[0057] The semiconductor conveying systems include at least one port for exchanging materials with the external environment. The port can have both an input and an output direction, or it can be multiplexed. The input port is used for material entering the semiconductor conveying system, and the output port is used for material exiting the semiconductor conveying system.

[0058] Port status includes normal status and fault status. Ports in the normal status are valid ports, and ports in the fault status are faulty ports. The fault status can be a physical failure of the port or a user-defined failure, such as a software configuration that the port is unavailable. No specific limitation is made here.

[0059] The MCS can communicate with each semiconductor delivery system and obtain the number of external ports of the semiconductor delivery system through a preset function. The number of external ports refers to the total number of ports of the semiconductor delivery system, including active and faulty ports. Subsequently, based on the number of external ports, the ports of the semiconductor delivery system are traversed to obtain the port status. This preset function can be an SECS Stream Function or other related algorithms; no specific limitation is made here. This preset function obtains the number of external ports of the semiconductor delivery system, and the status of each port of the semiconductor delivery system can be determined through SECS Events.

[0060] S204: Based on the status of each port in the semiconductor delivery system, obtain the number of valid ports in the semiconductor delivery system.

[0061] After the MCS obtains the status of each port, it determines the number of valid ports based on the status of each port. The determination of the number of valid ports can include at least one of the following: when the semiconductor delivery system only reports ports in normal status, the number of ports in normal status is directly obtained as the number of valid ports based on the port status; when the semiconductor delivery system only reports fault status, the number of ports in fault status is obtained, and then the number of valid ports is determined based on the difference between the number of external ports of the semiconductor delivery system and the number of ports in fault status, for example; when the semiconductor delivery system reports both ports in normal status and ports in fault status, the number of valid ports can be determined based on the above two methods, and then the two are cross-verified to determine the number of valid ports.

[0062] S206: Determine the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system. The flow rate refers to the task measurement parameter values ​​for both directions of the semiconductor delivery system, and can be determined based on at least one of the task volume, task priority, and target priority for both directions of the semiconductor delivery system.

[0063] A semiconductor delivery system has two directions: an input direction and an output direction. Therefore, the tasks in the input and output directions of the semiconductor delivery system can be determined first based on the task direction. Based on the tasks determined in each direction, the flow rate corresponding to each direction can be determined by the task volume and priority.

[0064] S208: Based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system, control the direction of each effective port in the semiconductor delivery system.

[0065] When only one effective port remains, this application can control the direction of the effective port to switch between the input and output directions based on the flow rate in the input and output directions of the semiconductor delivery system, so as to consume the tasks in both directions as much as possible and avoid congestion.

[0066] When there are at least two effective ports, the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system can be used to determine whether to control the direction of each effective port in the semiconductor delivery system to the direction with the larger flow rate, so as to consume the task in the direction with the larger flow rate as soon as possible and avoid congestion.

[0067] The aforementioned dynamic control method for ports in a semiconductor transport system acquires the status of each port in the semiconductor transport system; based on the status of each port in the semiconductor transport system, it acquires the number of effective ports in the semiconductor transport system; it acquires the flow rate in the input direction and the flow rate in the output direction of the semiconductor transport system; and based on the number of effective ports and the flow rate in the input and output directions of the semiconductor transport system, it controls the direction of each effective port in the semiconductor transport system. This allows for control of the direction of the effective ports based on the flow rate and the number of effective ports, avoiding potential congestion at semiconductor storage devices with faulty ports and improving transport efficiency.

[0068] In some optional embodiments, controlling the direction of each effective port in the semiconductor delivery system based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system includes: when it is determined that there is only one effective port left in the semiconductor delivery system based on the state of each port in the semiconductor delivery system, controlling the direction of the effective port to switch between the input and output directions based on the flow rate in the input and output directions of the semiconductor delivery system.

[0069] When there is only one effective port, the semiconductor conveying system cannot interact with the outside world through just one port. Therefore, MCS provides redundancy and fault tolerance for the semiconductor conveying system so that it can still handle materials in two directions.

[0070] Once the flow rate is determined, the direction of the valid port can be switched between the input and output directions. For example, the direction with higher flow rate can be determined, and then the direction of the valid port can be set to the direction with higher flow rate. Subsequently, the flow rate in both directions is calculated periodically. If the direction with higher flow rate changes, the direction of the valid port is changed to the other direction, similar to the traffic light pattern.

[0071] For ease of understanding, when the input flow is large, the direction of the effective port is configured as the input direction and maintained for a first threshold time, such as 5 minutes. After the first threshold time is reached, the flow in both directions is recalculated. If the output flow is large at this time, the direction of the effective port is configured as the output direction. This continues until the number of effective ports is greater than 1. Then, the direction corresponding to the port is reallocated. For example, the ratio of the number of ports in the two directions is determined based on the flow of the semiconductor delivery system. Finally, the number of ports in the two directions is determined based on the number of effective ports and this ratio.

[0072] In some alternative embodiments, the acquisition of the number of valid ports and the setting of the direction of the valid ports can be processed in parallel by two threads, that is, the two are independent and do not affect each other. For example, the first thread is used to calculate the number of valid ports of the semiconductor delivery system, and the second thread is used to determine the direction of the valid ports.

[0073] When the first thread determines that the number of valid ports is greater than 1, it notifies the second thread. The second thread can first calculate the flow rate in both directions of the semiconductor delivery system, and then calculate the ratio of the flow rate in the two directions. Based on this ratio, the valid ports are divided into directions. For example, if the ratio of the flow rate in the output direction to the flow rate in the input direction is 2:1, then there are 3 valid ports, with 1 port corresponding to the input direction and 2 ports corresponding to the output direction.

[0074] The aforementioned dynamic control method for ports in a semiconductor transport system acquires the status of each port in the semiconductor transport system. Based on the status of each port, and determining that only one valid port remains, the method acquires the flow rate in the input and output directions of the semiconductor transport system. Based on the flow rate in the input and output directions, the method controls the direction of the valid port to switch between the input and output directions. This allows for the switching of the valid port's direction between the input and output directions based on flow rate control when only one valid port remains, improving transport efficiency while maintaining equipment availability.

[0075] In some optional embodiments, controlling the direction of the effective port to switch between the input and output directions based on the flow rate in the input and output directions of the semiconductor delivery system includes: controlling the direction of the effective port to be the direction with the larger flow rate when the flow rate in one direction of the semiconductor delivery system is greater than the flow rate in the other direction; re-acquiring the flow rate in the input and output directions of the semiconductor delivery system when the effective time of the direction with the larger flow rate of the effective port reaches a first threshold time; controlling the direction of the effective port to change when the direction with the larger flow rate of the semiconductor delivery system changes; and keeping the direction of the effective port unchanged when the direction with the larger flow rate of the semiconductor delivery system does not change.

[0076] In the case where the number of effective ports in the semiconductor delivery system is 1, that effective port needs to switch between the input and output directions so that the semiconductor delivery system can support both input and output simultaneously to avoid congestion.

[0077] First, the direction of higher flow rate in the semiconductor delivery system is determined. Then, the direction of the effective port is controlled to be the direction of higher flow rate, and this is maintained for a first threshold time. That is, when the effective time of the effective port being in the direction of higher flow rate reaches the first threshold time, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are reacquired. If the direction of higher flow rate in the semiconductor delivery system changes, the direction of the effective port is changed; if the direction of higher flow rate in the semiconductor delivery system does not change, the direction of the effective port remains unchanged.

[0078] For ease of understanding, when the input flow is high, the direction of the valid port is configured as the input direction, and the valid time is longer than a first threshold time, such as 5 minutes. After the first threshold time is reached, the flow in both directions is recalculated (the specific calculation of the flow can be found below). If the output flow is high at this time, the direction of the valid port is configured as the output direction. If the input flow is still high at this time, the direction of the valid port remains the input direction. This continues until the number of valid ports is greater than 1, at which point the direction corresponding to the port is reallocated. For example, the ratio of the number of ports in the two directions is determined based on the flow of the semiconductor delivery system. Finally, the number of ports in the two directions is determined based on the number of valid ports and this ratio. In the above embodiment, in the redundancy fault tolerance mode, the trigger condition is that there is only one port left. One port needs to serve the commands in both directions, so a traffic light-like mode is adopted. After calculation, the port direction is switched to the direction with the higher weight for a period of time. After the time is up, the calculation is recalculated, the current state is checked, and the direction is re-determined. This continues until other ports come online again, and the port redundancy fault tolerance mode is turned off. Furthermore, the port direction can be switched, so that the device can support basic use even when there is only one port to the outside world. The device's functionality will not be greatly reduced because there is only one inlet / outlet.

[0079] In some optional embodiments, the method further includes: obtaining historical time periods corresponding to the input direction and output direction of each port in each semiconductor delivery system; performing mathematical statistics on the historical time periods corresponding to the input direction and output direction of each port in each semiconductor delivery system to determine a first target time period corresponding to the input direction and a second target time period corresponding to the output direction of each port in the semiconductor delivery system; and controlling the direction of each port in the semiconductor delivery system to be the input direction in the first target time period and the output direction in the second target time period.

[0080] In this embodiment, the historical time periods corresponding to the input and output directions of each port in the semiconductor delivery system can be periodically acquired. This is because users may have certain requirements at specific times that the input and output directions of each port in the semiconductor delivery system must meet certain requirements, thus resulting in a regularity in the input and output directions of each port in the semiconductor delivery system.

[0081] To this end, mathematical statistics are performed on the historical time periods corresponding to the input and output directions of each port in each semiconductor delivery system. For example, the historical time periods corresponding to the input and output directions of each port in the semiconductor delivery system are statistically analyzed daily to determine the first target time period corresponding to the input direction and the second target time period corresponding to the output direction of each port in the semiconductor delivery system. For example, the direction of the semiconductor delivery system from 1:00 to 2:00 is the input direction, and the direction from 2:00 to 3:00 is the output direction. Therefore, the direction of each port in the semiconductor delivery system is controlled to be the input direction during the first target time period and the output direction during the second target time period.

[0082] In some optional embodiments, after calculating the first target time period and the second target time period based on historical time periods, the first target time period and the second target time period can be output. After the user adjusts and confirms them, the MCS will control each port of the semiconductor delivery system according to the adjusted and confirmed first target time period and the second target time period.

[0083] In other embodiments, the user can determine the time periods corresponding to the input and output directions of each port of the semiconductor delivery system and store them in the MCS. Subsequently, the MCS can control each port of the semiconductor delivery system based on the stored time periods corresponding to the input and output directions of each port of the semiconductor delivery system.

[0084] In the above embodiments, the historical behavior patterns of the semiconductor delivery system are learned, and then the direction of the ports of the semiconductor delivery system is set based on these patterns, which reduces the judgment process and improves processing efficiency.

[0085] In some optional embodiments, controlling the direction of each effective port in the semiconductor delivery system based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system includes: determining the flow rate in the input and output directions of the semiconductor delivery system when, based on the state of each port in the semiconductor delivery system, it is determined that the semiconductor delivery system still includes at least two effective ports; calculating the difference between the flow rate in the input and output directions of the semiconductor delivery system; and controlling the direction of each effective port in the semiconductor delivery system to be the direction with the larger flow rate when the difference is greater than a start-up threshold.

[0086] In this embodiment, when the semiconductor transport system includes at least two valid ports, it does not enter the redundancy fault-tolerant mode. To this end, the MCS continues to determine the flow rate in the input direction and the flow rate in the output direction of the semiconductor transport system, and calculates the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor transport system. For example, the difference is obtained by subtracting the flow rate in the output direction from the flow rate in the input direction. If the difference is greater than the start-up threshold, that is, the flow rate in one direction increases instantaneously, the direction of the port needs to be changed. For example, a direction change command is sent to the semiconductor transport system. For example, it can be all in or all out at one time to quickly digest the instantaneous high transport volume and reduce the ADT (average transport time).

[0087] The startup threshold can be configured by the user, and no specific restrictions are made here.

[0088] For ease of understanding, combined with Figure 3 As shown, Figure 3 This is a schematic diagram of port reversal in one embodiment, where 1 and 3 are inlets, and 2 and 4 are outlets. The semiconductor delivery system switches the port direction when the MCS issues a direction change command or when a direction change is selected on the device panel. Figure 3 In the process, the direction of port 1 was reversed, and port 1 was changed from the inlet to the outlet, that is, from the input direction to the output direction.

[0089] In some optional embodiments, after controlling the direction of each effective port in the semiconductor delivery system to be the direction with the larger flow rate, the method further includes: if the effective time of each effective port in the semiconductor delivery system being the direction with the larger flow rate reaches a second threshold time, reacquiring the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system; and if the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system is less than a shutdown threshold, restoring the direction of each effective port in the semiconductor delivery system to the default direction.

[0090] In this embodiment, the purpose of changing the port direction is to handle the instantaneous high throughput. Therefore, after the instantaneous high throughput is handled, the configuration needs to be restored.

[0091] Therefore, if the effective time of the direction with higher flow rate at the effective port reaches the second threshold time, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are reacquired. This second threshold time can be preset or dynamically adjusted according to user configuration; no specific limitation is made here.

[0092] If the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system is less than the shutdown threshold, the direction of each effective port of the semiconductor delivery system will be restored to the default direction. The shutdown threshold can also be dynamically adjusted according to user configuration, and is not specifically limited here.

[0093] In the instantaneous high-capacity mode, the MCS can be configured with two thresholds: a start threshold and a stop threshold. When the difference between the two thresholds is greater than the start threshold, the ports can be turned to the same direction to process the traffic. After a period of time, i.e., the second threshold time, the calculation is repeated, and the port direction is redefined until it falls below the stop threshold. Then, the port directionality is restored to the default value, and the instantaneous high-capacity mode is turned off.

[0094] In some optional embodiments, the calculation of the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system includes: determining the flow rate in the input direction and the flow rate in the output direction of each effective port in the semiconductor delivery system; and obtaining the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system based on the flow rate in the input direction and the flow rate in the output direction of each effective port.

[0095] The semiconductor delivery system includes at least one effective port. In order to determine the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system, the flow rate in the input direction and the flow rate in the output direction of each effective port can be determined first, and then summed to obtain the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system.

[0096] Still with Figure 3 For example, ports 1 and 3 are the input directions, and ports 2 and 4 are the output directions. We can first determine the flow rate in the input and output directions for each port. Since ports 1 and 3 are input directions, the output flow rate is 0; similarly, ports 2 and 4 are output directions, so the input flow rate is 0. Then, we calculate the flow rate in each of these directions. Finally, we sum the flow rates in the input directions from ports 1 to 4 to obtain the flow rate in the input direction of the semiconductor delivery system, and we sum the flow rates in the output directions from ports 1 to 4 to obtain the flow rate in the output direction of the semiconductor delivery system.

[0097] In some optional embodiments, determining the flow rate in the input direction and the flow rate in the output direction of each effective port in the semiconductor delivery system includes: for each effective port, determining the flow rate parameter values ​​corresponding to the input and output directions of the effective port, wherein the flow rate parameter values ​​include at least one of the number of tasks, the sum of priorities, and the sum of target priorities; determining the flow rate corresponding to the input and output directions of the effective port based on the flow rate parameter values ​​corresponding to the input and output directions of the effective port and the weights corresponding to each flow rate parameter value; wherein the weights corresponding to each flow rate parameter value are configured with different values ​​in different task scenarios.

[0098] Among them, based on the system configuration and device port status monitoring, the task volume and priority on both sides of the port are available from the MCS. The task volume and priority each have their own weights, and the port directionality is determined by the weight calculation.

[0099] The target priority is a high-level priority, such as the first-level priority, or the first-level priority and the second-level priority, etc. Those skilled in the art can set the priority corresponding to the target priority as needed.

[0100] Where flow rate = (α*P) + (β*D) + (γ*T)

[0101] Where α is the task quantity, P is the weight corresponding to the task quantity, β is the sum of priorities, D is the weight of the sum of priorities, γ is the sum of target priorities, and T is the weight of the sum of target priorities.

[0102] To make it easier to understand, let's take a task queue as an example, and consider whether to perform a redirection judgment on the two sets of ports of semiconductor storage device A.

[0103] Table 1 Task Queue

[0104]

[0105] To simplify the above queues, tasks with the same starting point are merged to obtain the sum of priorities and the main directions, as detailed in Table 2.

[0106] Table 2

[0107]

[0108] Then, taking the current port as an example, we process it to obtain the input and output traffic for each port, as shown in Table 3.

[0109] Table 3

[0110]

[0111] Therefore, MCS can know the total number, direction, and priority of tasks for port A in the task queue.

[0112] Subsequently, based on the task volume, direction, and priority of port A, the flow rate in the input direction and the flow rate in the output direction corresponding to port A are summed. Finally, the flow rates in the input direction and the flow rates in the output direction corresponding to each port of the semiconductor conveying system are used to obtain the flow rate in the input direction and the flow rate in the output direction of the semiconductor conveying system.

[0113] In the above embodiments, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are calculated based on at least one of the following: the number of tasks, the sum of priorities, and the sum of target priorities, so as to lay the foundation for the determination of the direction of the subsequent ports.

[0114] For ease of understanding, combined with Figure 4 As shown, Figure 4 The flowchart below shows a method for dynamic control of ports in a semiconductor delivery system in another embodiment. In this embodiment, the number of external ports of each semiconductor delivery system is first obtained, and then the status of each port in each semiconductor delivery system is determined.

[0115] Based on the status of each port in the semiconductor delivery system, determine whether the semiconductor delivery system has only one valid port left.

[0116] Based on the status of each port in the semiconductor delivery system, if it is determined that there is only one valid port left in the semiconductor delivery system, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are obtained. Then, based on the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system, the direction of the valid port is controlled to switch between the input direction and the output direction.

[0117] Based on the status of each port in the semiconductor delivery system, if it is determined that the semiconductor delivery system still has at least two valid ports, then the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are determined; the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system is calculated; if the difference is greater than a start-up threshold, the direction of each valid port in the semiconductor delivery system is controlled to be the direction with the larger flow rate; if the effective time of each valid port in the semiconductor delivery system being in the direction with the larger flow rate reaches a second threshold time, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are reacquired; if the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system is less than a stop-down threshold, the direction of each valid port in the semiconductor delivery system is restored to the default direction.

[0118] When only one effective port remains in the semiconductor transport system, the direction of the effective port can be switched between input and output directions based on flow control, avoiding congestion caused by either direction and improving transport efficiency. Under high instantaneous throughput conditions, the direction of all ports in the semiconductor transport system can be set to either all input or all output directions for a period of time to quickly handle the high instantaneous throughput and reduce ADT (Automatic Transfer Time).

[0119] It should be understood that although the steps in the flowcharts of the above embodiments are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the above embodiments may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages in other steps. For example, the order of steps S204 and S206 above can be changed. It is understood that the steps in different embodiments can be freely combined as needed, and all non-contradictory solutions formed by the combination are within the scope of protection of this application.

[0120] Based on the same inventive concept, this application also provides a dynamic control device for ports in a semiconductor transport system for implementing the dynamic control method for ports in the semiconductor transport system described above. The solution provided by this device is similar to the solution described in the above method. Therefore, the specific limitations in one or more embodiments of the dynamic control device for ports in a semiconductor transport system provided below can be found in the limitations of the dynamic control method for ports in a semiconductor transport system described above, and will not be repeated here.

[0121] In one exemplary embodiment, such as Figure 5 As shown, a dynamic control device for a port in a semiconductor delivery system is provided, comprising: a status acquisition module 501, a quantity acquisition module 502, a flow acquisition module 503, and a control module 504, wherein:

[0122] The status acquisition module 501 is used to acquire the status of each port in each semiconductor delivery system;

[0123] The quantity acquisition module 502 is used to acquire the number of valid ports in the semiconductor delivery system based on the status of each port in the semiconductor delivery system.

[0124] The flow acquisition module 503 is used to acquire the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system;

[0125] The control module 504 is used to control the direction of each effective port in the semiconductor delivery system based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system.

[0126] In some optional embodiments, the control module 504 is specifically configured to: control the direction of the effective port to be the direction of the greater flow when the flow rate in one direction of the semiconductor delivery system is greater than the flow rate in another direction; reacquire the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system when the effective time of the direction of the effective port being the direction of the greater flow rate reaches a first threshold time; control the direction of the effective port to change when the direction of the greater flow rate in the semiconductor delivery system changes; and keep the direction of the effective port unchanged when the direction of the greater flow rate in the semiconductor delivery system does not change.

[0127] In some optional embodiments, the above-mentioned apparatus further includes: a configuration module, configured to acquire historical time periods corresponding to the input direction and output direction of each port in each semiconductor delivery system; perform mathematical statistics on the historical time periods corresponding to the input direction and output direction of each port in each semiconductor delivery system to determine a first target time period corresponding to the input direction and a second target time period corresponding to the output direction of each port in the semiconductor delivery system; and control the direction of each port in the semiconductor delivery system to be the input direction in the first target time period and the output direction in the second target time period.

[0128] In some optional embodiments, the control module 504 is configured to determine the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system based on the state of each port in the semiconductor delivery system, and if the semiconductor delivery system includes at least two valid ports; calculate the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system; and if the difference is greater than a start-up threshold, control the direction of each valid port in the semiconductor delivery system to be the direction with the larger flow rate.

[0129] In some optional embodiments, the control module 504 is specifically used to reacquire the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system when the effective time of each effective port in the semiconductor delivery system being the direction with the larger flow rate reaches a second threshold time; and to restore the direction of each effective port in the semiconductor delivery system to the default direction when the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system is less than a shutdown threshold.

[0130] In some optional embodiments, the flow acquisition module 503 is specifically used to determine the flow rate in the input direction and the flow rate in the output direction of each effective port in the semiconductor delivery system; based on the flow rate in the input direction and the flow rate in the output direction of each effective port, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are obtained.

[0131] In some optional embodiments, the traffic acquisition module 503 is specifically used to determine the traffic parameter values ​​corresponding to the input and output directions of each valid port. The traffic parameter values ​​include at least one of the number of tasks, the sum of priorities, and the sum of target priorities. Based on the traffic parameter values ​​corresponding to the input and output directions of the valid port and the weights corresponding to each traffic parameter value, the traffic corresponding to the input and output directions of the valid port is determined. The weights corresponding to each traffic parameter value are configured with different values ​​in different task scenarios.

[0132] Each module in the dynamic control device of the port in the aforementioned semiconductor delivery system can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in the processor of a computer device in hardware form or independent of it, or stored in the memory of the computer device in software form, so that the processor can call and execute the operations corresponding to each module.

[0133] In one exemplary embodiment, a computer device is provided, which may be a server, and its internal structure diagram may be as follows: Figure 6 As shown, the computer device includes a processor, memory, input / output interfaces (I / O), and a communication interface. The processor, memory, and I / O interfaces are connected via a system bus, and the communication interface is also connected to the system bus via the I / O interfaces. The processor provides computational and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system, computer programs, and a database. The internal memory provides an environment for the operation of the operating system and computer programs stored in the non-volatile storage media. The database stores various types of data involved in the aforementioned methods. The I / O interfaces are used for exchanging information between the processor and external devices. The communication interface is used for communicating with external terminals via a network connection. When the computer program is executed by the processor, it implements a dynamic control method for ports in a semiconductor delivery system.

[0134] Those skilled in the art will understand that Figure 6 The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.

[0135] In one embodiment, a computer device is also provided, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps in the above method embodiments.

[0136] In one embodiment, a computer-readable storage medium is provided having a computer program stored thereon that, when executed by a processor, implements the steps in the above method embodiments.

[0137] In one embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the steps in the above method embodiments.

[0138] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, data stored, data displayed, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of the relevant data must comply with relevant regulations.

[0139] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, artificial intelligence (AI) processors, etc., and are not limited to these.

[0140] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0141] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A dynamic control method for a port in a semiconductor delivery system, characterized in that, The method includes: Obtain the status of each port in each semiconductor delivery system; Based on the status of each port in the semiconductor delivery system, the number of valid ports in the semiconductor delivery system is obtained; Determine the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system; The direction of each effective port in the semiconductor delivery system is controlled based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system.

2. The method according to claim 1, characterized in that, The control of the direction of each effective port in the semiconductor delivery system based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system includes: If, based on the state of each port in the semiconductor delivery system, it is determined that there is only one valid port left in the semiconductor delivery system, the direction of the valid port is controlled to switch between the input direction and the output direction based on the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system.

3. The method according to claim 2, characterized in that, The control of switching the direction of the effective port between the input and output directions based on the flow rate in the input and output directions of the semiconductor delivery system includes: When the flow rate in one direction of the semiconductor delivery system is greater than the flow rate in another direction, the direction of the effective port is controlled to be the direction with the greater flow rate. If the effective time of the direction of the effective port being the direction of high flow reaches the first threshold time, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are reacquired; When the direction of the large flow rate in the semiconductor delivery system changes, the direction of the effective port is controlled to change. If the direction of the large flow rate in the semiconductor delivery system remains unchanged, the direction of the effective port remains unchanged.

4. The method according to claim 2, characterized in that, The method further includes: Obtain the historical time periods corresponding to the input and output directions of each port in each of the semiconductor delivery systems; Mathematical statistics are performed on the historical time periods corresponding to the input and output directions of each port in each semiconductor delivery system to determine the first target time period corresponding to the input direction and the second target time period corresponding to the output direction of each port in the semiconductor delivery system. The direction of each port of the semiconductor delivery system is controlled to be the input direction during the first target time period and the output direction during the second target time period.

5. The method according to claim 1, characterized in that, The control of the direction of each effective port in the semiconductor delivery system based on the number of effective ports and the flow rate in the input and output directions of the semiconductor delivery system includes: If, based on the state of each port in the semiconductor delivery system, it is determined that the semiconductor delivery system also includes at least two valid ports, the semiconductor delivery system calculates the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system. If the difference is greater than the start-up threshold, the direction of each effective port in the semiconductor delivery system is controlled to be the direction with the larger flow rate.

6. The method according to claim 5, characterized in that, After controlling the direction of each effective port in the semiconductor delivery system to be the direction of high flow rate, the method further includes: If the effective time of each effective port in the semiconductor delivery system in the direction of high flow reaches the second threshold time, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are reacquired. If the difference between the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system is less than the shutdown threshold, the direction of each effective port of the semiconductor delivery system is restored to the default direction.

7. The method according to any one of claims 1 to 6, characterized in that, The calculation methods for the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system include: Determine the flow rate in the input direction and the flow rate in the output direction of each effective port in the semiconductor delivery system; Based on the flow rate in the input direction and the flow rate in the output direction of each effective port, the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system are obtained.

8. The method according to claim 7, characterized in that, Determining the flow rate in the input direction and the flow rate in the output direction of each effective port in the semiconductor delivery system includes: For each valid port, determine the flow parameter values ​​corresponding to the input and output directions of the valid port. The flow parameter values ​​include at least one of the following: number of tasks, total priority, and total target priority. Based on the flow parameter values ​​corresponding to the input and output directions of the effective port and the weights corresponding to each flow parameter value, the flow corresponding to the input and output directions of the effective port is determined; wherein the weights corresponding to each flow parameter value are configured with different values ​​in different task scenarios.

9. A dynamic control device for a port in a semiconductor delivery system, characterized in that, The device includes: The status acquisition module is used to acquire the status of each port in each semiconductor delivery system; The quantity acquisition module is used to acquire the number of valid ports in the semiconductor delivery system based on the status of each port in the semiconductor delivery system. A flow acquisition module is used to acquire the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system; A semiconductor delivery system control module is used to control the direction of each of the effective ports in the semiconductor delivery system based on the number of effective ports and the flow rate in the input direction and the flow rate in the output direction of the semiconductor delivery system.

10. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the method according to any one of claims 1 to 8, and further converts the computer program into a computer program product.

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