MEMS device packaging auxiliary clamping device and method

Abstract

According to the MEMS device packaging auxiliary clamping device and method, a core body is arranged on a base and is connected through a plurality of elastic pieces, a shell is fixed to the base, the core body and the elastic pieces are arranged in the shell, the shell is provided with a plurality of guide columns, the guide columns are inserted into guide grooves of the core body to limit left-right movement of the core body under the action of the elastic pieces, and the core body is fixed to the base through the elastic pieces. The core body structure is in contact with the inner wall of the top of the shell under the action of the elastic piece, a groove is formed after the core body and the shell are assembled, and the tube shell is arranged in the groove; a plurality of elastic plungers are arranged on the shell in the circumferential direction of the inner wall of the shell. The left overturning plate and the right overturning plate are symmetrically and rotatably arranged on the shell, a pressing plate structure is formed after the left overturning plate and the right overturning plate are rotationally closed, a central groove is formed in the center of the pressing plate structure, high-elasticity structures are arranged on the bottom face of the pressing plate structure and the inner wall of the central groove in the circumferential direction, and after the left overturning plate and the right overturning plate are closed, the high-elasticity structures below the left overturning plate and the right overturning plate tightly press the tube shell; and the cover plate is placed in the central groove and is in contact with the tube shell.

Description

Technical Field

[0001] This invention belongs to the field of MEMS device packaging technology, and in particular to a MEMS device packaging auxiliary clamping device and method. Background Technology

[0002] MEMS devices, manufactured using micro- and nano-scale processes, offer advantages such as small size, weight, power consumption, high integration, resistance to harsh environments, and low cost. They are widely used in fields such as autonomous driving and consumer electronics, becoming one of the current mainstream development directions. They mainly consist of two parts: the structure / circuit chip and the package. The structure / circuit chip is primarily used for physical sensing of external inputs and the conversion and processing of weak signals, while the package provides physical protection and electrical interconnection for the chip, and is a key factor in ensuring its operation in a stable and clean environment.

[0003] Eutectic bonding, a highly reliable hermetic sealing technology, utilizes a sealing ring formed by the melting of gold-tin solder to provide excellent hermeticity and reliability for MEMS devices, making it the preferred choice in aerospace, weaponry, and other fields. In existing technologies, a cover plate is typically placed manually in the center of the housing, followed by applying pressure with a heavy object to provide the necessary sealing pressure. Since there is no limit to the position between the cover plate and the housing, manual operation can lead to frictional damage between them, resulting in poor hermeticity. Furthermore, variations in placement each time can cause inconsistencies in quality between products from the same batch. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art.

[0005] Therefore, this invention provides an auxiliary clamping device and method for MEMS device packaging. The solution of this invention can accurately position the relative position of the casing and the cover plate and clamp them stably, ensuring sealing quality while improving work efficiency.

[0006] The technical solution of the present invention is as follows:

[0007] According to one aspect, a MEMS device packaging auxiliary clamping device is provided. The clamping device includes a base, a housing, multiple elastic elements, multiple elastic plungers, a core, a tube shell, a cover plate, a left-flipping plate, a right-flipping plate, and a highly elastic structure, wherein:

[0008] The core is mounted on the base and connected to it by multiple elastic elements. The outer shell is fixedly mounted on the base. Both the core and the elastic elements are disposed within the outer shell. The outer shell has multiple guide posts, and the core has multiple guide grooves along the vertical direction. The guide posts are inserted into the corresponding guide grooves to limit the left and right movement of the core under the action of the elastic elements, while allowing the core to move up and down under the action of the elastic elements. The core structure contacts the inner wall of the top of the outer shell under the action of the elastic elements to limit the maximum effective displacement of the elastic elements along the vertical direction. After the core and the outer shell are assembled, they form a groove. The tube shell is disposed in the groove and extends above the groove by a set distance. The outer shell has multiple elastic plungers arranged circumferentially along its inner wall to ensure that the tube shell in the groove is stably clamped in a fixed position.

[0009] The left and right flip plates are symmetrically and rotatably mounted on the outer shell. When they are rotated and closed, they form a pressure plate structure. The center of this pressure plate structure is a central groove. The bottom surface of the pressure plate structure and the inner wall of the central groove are both provided with highly elastic structures. When the left and right flip plates are closed, the highly elastic structures under the left and right flip plates press against the tube shell. The cover plate is placed in the central groove and contacts the tube shell. The pressure plate structure composed of the core, the outer shell, and the left and right flip plates is generally closed on three sides and semi-open on one side around the tube shell, with the semi-open direction remaining consistent.

[0010] Furthermore, the elastic element is a spring.

[0011] Furthermore, the set distance is 0.05mm.

[0012] Furthermore, the elastic plunger is a spring plunger.

[0013] Furthermore, the highly elastic structure is a highly elastic three-dimensional rubber.

[0014] Furthermore, both the left and right flip plates are rotatably connected to the outer casing via hinges.

[0015] Furthermore, the clamping device also includes multiple silicone rubbers, which are evenly arranged on the lower surface of the base for bottom anti-slip purposes.

[0016] According to another aspect, a MEMS device packaging auxiliary clamping method based on the above-mentioned clamping device is provided, the method comprising:

[0017] Step 1: First, rotate and open the left and right flip panels;

[0018] Step 2: Pick up the tube shell to be sealed and place it in the groove formed after the outer shell and core are assembled;

[0019] Step 3: Gently press the edge of the tube shell to make it sink, and the elastic plungers around it will hold the tube shell in place.

[0020] Step 4: Close the left and right flip plates, so that the highly elastic structure under the left and right flip plates presses the tube shell tightly;

[0021] Step 5: Place the cover plate into the central groove formed after the left and right flip plates are closed;

[0022] Step 6: Insert the clamp into the semi-open opening and hold the center of the tube shell;

[0023] Step 7: Open the left and right flip panels and remove the clamps and the tube cover.

[0024] The above technical solution provides a MEMS device packaging auxiliary clamping device. It utilizes a bottom spring and a top high-elasticity three-dimensional rubber structure to design a flexible clamping mechanism. Combined with the surrounding spring plungers, it can ensure that the position of the tube shell is stable and accurate, and will not be scratched (that is, under the conditions of lower spring support, upper high-elasticity three-dimensional rubber clamping, and surrounding spring plunger limiting, the tube shell is flexibly clamped and its position is unique). At the same time, the groove formed by the left and right flip plates limits the position of the cover plate, ensuring that its position is in the center of the tube shell. Combined with the clamps, the tube shell and the cover plate are directly clamped, avoiding the scratches and low efficiency caused by manually adjusting the position of the cover plate. Attached Figure Description

[0025] The accompanying drawings, which form part of this specification, are provided to further illustrate embodiments of the invention and, together with the textual description, explain the principles of the invention. It is obvious that the drawings described below are merely some embodiments of the invention, and those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0026] Figure 1 This is a schematic diagram of a MEMS device packaging auxiliary clamping device provided by the present invention;

[0027] Figure 2 This is a cross-sectional view of a MEMS device packaging auxiliary clamping device provided by the present invention;

[0028] Among them, 1. base, 2. outer shell, 3. elastic element, 4. core, 501. tube shell, 502. cover plate, 601. left flip plate, 602. right flip plate, 6. high elasticity structure. Detailed Implementation

[0029] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0031] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0032] like Figure 1-2As shown, in one embodiment of the present invention, a MEMS device packaging auxiliary clamping device is provided. The clamping device includes a base 1, a housing 2, multiple elastic elements 3, multiple elastic plungers, a core 4, a tube shell 501, a cover plate 502, a left flip plate 601, a right flip plate 602, and a highly elastic structure 6. The core 4 is disposed on the base 1 and connected to it by multiple elastic elements 3. The housing 2 is fixedly mounted on the base 1. The core 4 and the elastic elements 3 are both disposed within the housing 2. The housing 2 has multiple guide posts, and the core 4 has multiple guide grooves formed along the vertical direction. The guide posts are inserted into the corresponding guide grooves to restrict the left and right movement of the core 4 under the action of the elastic elements 3, while retaining the up and down movement of the core 4 under the action of the elastic elements 3. The core 4 structure contacts the inner top wall of the housing 2 under the action of the elastic elements 3 to restrict the maximum effective displacement of the elastic elements 3 along the vertical direction. After assembly with the outer shell 2, a groove is formed. The tube shell 501 is placed in the groove and extends a predetermined distance above the groove. Multiple elastic plungers are arranged circumferentially along the inner wall of the outer shell 2 to ensure that the tube shell 501 in the groove is stably clamped in a fixed position. The left flip plate 601 and the right flip plate 602 are symmetrically and rotatably arranged on the outer shell 2. After they are rotated and closed, they form a pressure plate structure. The center of the pressure plate structure is a central groove. The bottom surface of the pressure plate structure and the inner wall of the central groove are both provided with highly elastic structures 6. After the left flip plate 601 and the right flip plate 602 are closed, the highly elastic structures 6 under the left and right flip plates 602 press the tube shell 501. The cover plate 502 is placed in the central groove and contacts the tube shell 501. The pressure plate structure composed of the core 4, the outer shell 2, and the left and right flip plates is generally closed on three sides and semi-open on one side around the tube shell 501, with the semi-open direction remaining consistent.

[0033] Preferably, the elastic element 3 is a spring; the elastic plunger is a spring plunger; and the highly elastic structure 6 is a highly elastic three-dimensional rubber.

[0034] Preferably, both the left flip plate 601 and the right flip plate 602 are rotatably connected to the outer casing 2 via hinges.

[0035] Preferably, the clamping device further includes a plurality of silicone rubbers, which are evenly arranged on the lower surface of the base 1 for bottom anti-slip.

[0036] Preferably, the set distance is 0.05 mm.

[0037] For example, the base has three evenly distributed silicone rubber strips for bottom anti-slip; four springs are installed between the core and the base; a guide post is designed between the core and the outer shell to limit the lateral displacement of the spring to zero while retaining the longitudinal (spring) displacement; the tube shell is placed in the groove formed after the outer shell and the core are assembled; the cover plate is placed in the groove formed after the left and right flip plates are aligned; the left and right flip plates are made of a high-elasticity three-dimensional rubber structure bonded to a single-layer structure, and the central area is also bonded with a high-elasticity three-dimensional rubber structure; the left and right flip plates can be opened along the center and rotated around the hinge at the outer shell; each side of the outer shell is designed with two threaded holes for placing spring plungers; the pressure plate structure composed of the core, outer shell, and left and right flip plates is three-sided closed and one-sided semi-open around the tube shell, with the semi-open direction remaining consistent.

[0038] As can be seen, the embodiments of the present invention provide a MEMS device packaging auxiliary clamping device. The flexible clamping mechanism is designed using a bottom spring and a top high-elasticity three-dimensional rubber structure. With the help of the surrounding spring plungers, the position of the tube shell can be ensured to be stable and accurate, and it will not be scratched (that is, under the conditions of lower spring support, upper high-elasticity three-dimensional rubber clamping, and surrounding spring plunger limiting, the tube shell is flexibly clamped and the position is unique). At the same time, the groove formed by the left and right flip plates limits the position of the cover plate, ensuring that the position is in the center of the tube shell. With the help of the clamps, the tube shell and the cover plate are directly clamped, avoiding the scratches and low efficiency caused by manually adjusting the position of the cover plate.

[0039] According to another embodiment, a MEMS device packaging auxiliary clamping method based on the above-mentioned clamping device is provided, the method comprising:

[0040] Step 1: First, rotate and open the left and right flip panels;

[0041] Step 2: Pick up the tube shell to be sealed and place it in the groove formed after the outer shell and core are assembled;

[0042] Step 3: Gently press the edge of the tube shell to make it sink, and the elastic plungers around it will hold the tube shell in place.

[0043] Step 4: Close the left and right flip plates, so that the highly elastic structure under the left and right flip plates presses the tube shell tightly;

[0044] Step 5: Place the cover plate into the central groove formed after the left and right flip plates are closed;

[0045] Step 6: Insert the clamp into the semi-open opening and hold the center of the tube shell;

[0046] Step 7: Open the left and right flip panels and remove the clamps and the tube cover.

[0047] To gain a further understanding of the present invention, a specific embodiment will be described in detail below.

[0048] like Figure 1 As shown, this embodiment of the invention provides a MEMS device packaging auxiliary clamping device, including a base 1, a housing 2, a spring, a core 4, a tube shell 501, a cover plate 502, a left flip plate 601, a right flip plate 602, and a highly elastic three-dimensional rubber, wherein:

[0049] The base 1 is the basic structure of the whole. The base 1 and the core 4 are simply connected by a spring. The outer shell 2 is installed on the base 1 and tightened by the bottom screw. The guide post on the outer shell 2 is inserted into the guide groove on the core 4, which restricts the left and right movement of the core 4 structure under the action of the spring, while allowing the up and down movement of the core 4 structure under the action of the spring. At the same time, the core 4 structure contacts the inner wall of the top of the outer shell 2 under the action of the spring, which limits the maximum effective displacement of the spring. In this state, the depth of the groove formed after the core 4 and the outer shell 2 are assembled should be slightly less than the height of the tube shell 501. In this invention, the height difference is 0.05mm. After the left and right flip plates are closed, a pressure plate structure is formed. The existence of the height difference makes the tube shell 501 to be sealed in close contact with the highly elastic three-dimensional rubber structure. Spring plungers are set around the tube shell 501 to ensure that the tube shell 501 is stably clamped in a fixed position. With the lower spring support, the upper high-elasticity three-dimensional rubber compression, and the surrounding spring plunger limiting conditions, the tube shell 501 is flexibly clamped and its position is unique. In addition, after the left and right flip plates are closed, a pressure plate structure is formed. The structure includes a high-elasticity three-dimensional rubber structure around its perimeter. Due to size constraints, only one cover plate 502 can be placed, ensuring that the cover plate 502 can be stably placed in the exact center of the tube shell 501. This effectively avoids problems such as misalignment, low efficiency, and easy scratching that occur when manually adjusting the cover plate 502. Moreover, in order to facilitate the gripping of tweezers and the clamping of the packaging clips, slots are made on the side of the pressure plate structure composed of the outer shell 2, the core 4, and the left and right flip plates 602, ensuring that tweezers and clips can freely enter and ensuring that the tube shell 501 and the cover plate 502 can be stably clamped after precise alignment.

[0050] This invention also provides a MEMS device packaging auxiliary clamping method based on the above-mentioned clamping device, adapted for preparation work before eutectic bonding, and the specific steps are as follows:

[0051] Step 1: Prepare the tube shell and cover plate to be sealed, and open the left and right flip plates;

[0052] Step 2: Use tweezers to pick up the edge of the tube shell to be sealed and gently place it into the groove formed after the outer shell and core are assembled;

[0053] Step 3: Gently press the edge of the tube shell with tweezers to make the tube shell sink, and the spring plungers around the perimeter will hold the tube shell in place.

[0054] Step 4: Close the left and right flip plates, so that the rubber structure under the left and right flip plates presses the tube shell tightly;

[0055] Step 5: Use a suction pen or tweezers to pick up the cover plate and gently place it in the groove formed after the left and right flip plates are closed. Gently tap the cover plate to ensure that the cover plate is in contact with the tube shell.

[0056] Step Six: Insert the clamp into the semi-open opening and hold the center of the tube shell;

[0057] Step 7: Open the left and right flip panels and remove the clamps and tube cover.

[0058] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0059] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0060] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A MEMS device packaging auxiliary clamping device, characterized in that, The clamping device includes a base, a housing, multiple elastic elements, multiple elastic plungers, a core, a tube shell, a cover plate, a left-flipping plate, a right-flipping plate, and a highly elastic structure, wherein: The core is mounted on the base and connected to it by multiple elastic elements. The outer shell is fixedly mounted on the base. Both the core and the elastic elements are disposed within the outer shell. The outer shell has multiple guide posts, and the core has multiple guide grooves along the vertical direction. The guide posts are inserted into the corresponding guide grooves to limit the left and right movement of the core under the action of the elastic elements, while allowing the core to move up and down under the action of the elastic elements. The core structure contacts the inner wall of the top of the outer shell under the action of the elastic elements to limit the maximum effective displacement of the elastic elements along the vertical direction. After the core and the outer shell are assembled, they form a groove. The tube shell is disposed in the groove and extends above the groove by a set distance. The outer shell has multiple elastic plungers arranged circumferentially along its inner wall to ensure that the tube shell in the groove is stably clamped in a fixed position. The left and right flip plates are symmetrically and rotatably mounted on the outer shell. When they are rotated and closed, they form a pressure plate structure. The center of this pressure plate structure is a central groove. The bottom surface of the pressure plate structure and the inner wall of the central groove are both provided with highly elastic structures. When the left and right flip plates are closed, the highly elastic structures under the left and right flip plates press against the tube shell. The cover plate is placed in the central groove and contacts the tube shell. The pressure plate structure composed of the core, the outer shell, and the left and right flip plates is generally closed on three sides and semi-open on one side around the tube shell, with the semi-open direction remaining consistent.

2. The MEMS device packaging auxiliary clamping device according to claim 1, characterized in that, The elastic element is a spring.

3. The MEMS device packaging auxiliary clamping device according to claim 1, characterized in that, The set distance is 0.05mm.

4. A MEMS device packaging auxiliary clamping device according to any one of claims 1-3, characterized in that, The elastic plunger is a spring plunger.

5. A MEMS device packaging auxiliary clamping device according to any one of claims 1-4, characterized in that, The highly elastic structure is a highly elastic three-dimensional rubber.

6. The MEMS device packaging auxiliary clamping device according to claim 1, characterized in that, Both the left and right flip plates are rotatably connected to the outer casing via hinges.

7. The MEMS device packaging auxiliary clamping device according to claim 1, characterized in that, The clamping device also includes multiple silicone rubbers, which are evenly arranged on the lower surface of the base for bottom anti-slip.

8. A MEMS device packaging auxiliary clamping method based on the clamping device according to any one of claims 1-7, characterized in that, The method includes: Step 1: First, rotate and open the left and right flip panels; Step 2: Pick up the tube shell to be sealed and place it in the groove formed after the outer shell and core are assembled; Step 3: Gently press the edge of the tube shell to make it sink, and the elastic plungers around it will hold the tube shell in place. Step 4: Close the left and right flip plates, so that the highly elastic structure under the left and right flip plates presses the tube shell tightly; Step 5: Place the cover plate into the central groove formed after the left and right flip plates are closed; Step 6: Insert the clamp into the semi-open opening and hold the center of the tube shell; Step 7: Open the left and right flip panels and remove the clamps and the tube cover.

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