Probe and electronic connection device

Abstract

The invention provides a probe. The probe comprises a first contact end, an elastic deformation part, a blocking part and a second contact end, the elastic deformation part is connected with the first contact end and is provided with a first section and a second section, the stopping part is connected with the elastic deformation part, the second contact end is connected with the stopping part, the area of the first section is different from that of the second section, or the shape of the first section is different from that of the second section.

Description

Technical Field

[0001] This invention relates to a probe and electronic connection device, particularly a probe and electronic connection device for measuring the electrical characteristics of integrated circuits and other test objects on semiconductor wafers. Background Technology

[0002] A probe is used to contact, measure, or test the electrical signals of various integrated circuits on a wafer under test. It utilizes an electronic connection device with a probe that contacts the object being tested and a probe tip that holds the probe. Probes are typically made of conductive metal and have a flexible or pointed design, allowing for precise contact with test points, solder pads, or component leads on a circuit board. The function of a probe is to transmit electrical signals from the wafer under test to the electronic connection device without damaging the electrode pads of the semiconductor circuit, thereby forming temporary electrical contacts for functional testing, signal detection, or quality inspection.

[0003] During the test, the elastic deformation part of the probe increases with the amount of deformation, which is accompanied by high structural stress. When the accumulated stress exceeds the yield point of the probe structure, plastic deformation will occur, causing the test head to fail. Therefore, it is necessary to avoid the accumulated stress exceeding the yield point of the probe structure.

[0004] Currently, micro-pitch testing of less than 80 micrometers mainly uses two types of probes: wire probes and microelectromechanical systems (MEMS) probes. Both are assembled to pre-deform and generate elasticity to meet the needle pressure required for testing.

[0005] Because wire probes are mostly manufactured as a single piece, they are typically cylindrical with a circular cross-section. When the wire probe deforms within the probe head during the testing process, a stop is needed. This structure often requires additional processing or the use of non-homogeneous materials, thus increasing the probe's cost. Wire probes usually rely on the pressure generated by different probe diameters, but the increase in probe diameter is limited. It is impossible to increase the elasticity solely by increasing the probe diameter to meet the fine-pitch and current-resistance requirements of advanced packaging.

[0006] Microelectromechanical (MEMS) probes, due to their manufacturing processes often employing square cross-sections for their elastic deformation sections, experience greater stress during deformation compared to circular cross-sections. This elasticity increases with the test stroke, but excessive pressure can damage the microstructure pads used in advanced packaging. Furthermore, the excessive elasticity of square-section probes can cause chips to form upon contact with the guide plate during probe tip deformation, leading to increased structural stress, fatigue creep, and cracking, ultimately affecting the probe's lifespan. Therefore, MEMS probes often utilize multi-layered metal sheet stacks with spacing between them in MEMS processes to reduce structural stress. This increases the photomask cost of fabricating multi-layered probe structures, and the complex manufacturing process further significantly increases the already expensive production cost of MEMS probes.

[0007] Therefore, a probe that can be adjusted according to requirements so that its elasticity does not exceed the yield point, and at the same time does not have excessive elasticity that would damage the microstructure pads, and can be used for micro-pitch testing, is the problem that those skilled in the art wish to solve. Summary of the Invention

[0008] One objective of this invention is to provide a probe with a mixed cross-section, which utilizes different areas within the elastic deformation section to adjust the stress that the probe can withstand. Furthermore, through the design of the guide plate inside the probe head, the probe can maintain and ensure that the elastic force performance meets expectations during elastic deformation. The predictable probe deformation allows the overall elastic force to be smoothly transmitted from the electrode pad under test to the circuit board, without excessive interference between the probe and the guide plate causing the probe head guide plate to deform and increase the overall horizontal amplitude, thus affecting the test yield performance.

[0009] To achieve the aforementioned objectives, the present invention provides a probe with a hybrid cross-section, comprising: a first contact end, an elastically deformable portion, a stop portion, and a second contact end. The elastically deformable portion is connected to the first contact end and has a first cross-section and a second cross-section. The stop portion is connected to the elastically deformable portion, and the second contact end is connected to the stop portion. The first cross-section has a first area, and the second cross-section has a second area, which are different from each other. This allows the stress that the probe can withstand to be adjusted by the area of ​​the elastically deformable portion. The staggered distribution of the cross-sections effectively controls the stress from exceeding the yield point, thereby avoiding excessive interference between the probe and the guide plate, which could cause deformation of the probe tip guide plate, increasing the overall horizontal amplitude and affecting the test yield.

[0010] Another objective of this invention is to provide a probe with a mixed cross-section, which utilizes different shapes designed within the elastic deformation section to adjust the stress that the probe can withstand. Furthermore, through the design of the guide plate inside the probe head, the probe can maintain and ensure that the elastic force performance meets expectations during elastic deformation. The predictable probe deformation allows the overall elastic force to be smoothly transmitted from the electrode pad under test to the circuit board, without excessive interference between the probe and the guide plate causing the probe head guide plate to deform and increase the overall horizontal amplitude, thus affecting the test yield performance.

[0011] To address the aforementioned objectives, the present invention provides a probe with a hybrid cross-section, comprising: a first contact end, an elastically deformable portion, a stop portion, and a second contact end. The elastically deformable portion is connected to the first contact end and has a first cross-section and a second cross-section. The stop portion is connected to the elastically deformable portion, and the second contact end is connected to the stop portion. The first cross-section has a first shape, and the second cross-section has a second shape, which are different from each other. This allows the stress that the probe can withstand to be adjusted through the shape of the elastically deformable portion. The staggered distribution of the cross-sections effectively controls the stress from exceeding the yield point, thereby avoiding excessive interference between the probe and the guide plate, which could cause deformation of the probe tip guide plate, increasing the overall horizontal amplitude and affecting the test yield.

[0012] To address this problem, a probe with a mixed cross-section is provided. This invention utilizes a probe structure with an alternating distribution of mixed cross-section structures to reduce the overall stress of the probe. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the probe structure according to the first embodiment of the present invention; Figure 2 This is a cross-sectional schematic diagram of the probe structure according to the first embodiment of the present invention; Figure 3 This is a schematic diagram of the probe structure according to the second embodiment of the present invention; Figure 4 This is a schematic diagram of the probe structure according to the third embodiment of the present invention; Figure 5 This is a schematic diagram of the probe structure according to the fourth embodiment of the present invention; Figure 6 This is a schematic diagram of the probe structure according to the fifth embodiment of the present invention; Figure 7 This is a schematic diagram of the probe structure according to the sixth embodiment of the present invention; Figure 8 This is a schematic diagram of the probe structure according to the seventh embodiment of the present invention; and Figure 9 This is a schematic diagram of an electronic connection device according to an embodiment of the present invention. [Figure Number Reference Guide] 1 probe 10 First contact end 20 Elastic Deformation Section 22 First Deformation Section 24 Second Deformation 26 Third Deformation 28 Fourth Deformation Part 30 Stop section 40 Second contact end 100 Substrate Electrode 110 First guide plate 120 Second guide plate 130 Third guide plate 200 wafers to be tested C1 First Axis C2 Second Axis C3 Third Axis Detailed Implementation

[0014] To provide a better understanding of the structural features and effects achieved by the present invention, preferred embodiments and detailed descriptions are provided below:

[0015] Since most of the wire probes currently used are integrally formed round rods, the needle pressure required for advanced packaging and current resistance can only be solved by changing the probe diameter. However, an excessively large diameter cannot make proper contact with the solder pads, so the adjustable needle pressure is quite limited. Furthermore, MEMS probes can cause excessively strong probe elasticity, which may damage the circuit board solder pads.

[0016] This invention adjusts the elastic force of the probe by designing multiple elastic deformation sections with different cross-sections. This allows the elastic force of the probe to be designed according to requirements, so that the elastic force generated when the probe bends can make the probe make stable contact with the electrode pad. At the same time, the invention has multiple geometric cross-sections distributed in an alternating manner, so that the elastic deformation can be designed by utilizing the length of different cross-sections. This makes it easier to design the deformation and stress, thereby better preventing the probe from failing due to stress exceeding the yield point, and also avoiding chipping caused by excessive elastic force.

[0017] The invention will be described in detail below by way of the various embodiments illustrated in the drawings. However, the concept of the invention may be embodied in many different forms and should not be construed as being limited to the exemplary embodiments set forth herein.

[0018] First, please refer to Figure 1 , Figure 1This is a schematic diagram of the probe structure according to the first embodiment of the present invention. As shown in the figure, the cross-sections described in the present invention are all sections perpendicular to a central axis of the probe, and will not be repeated hereafter. A probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastic deformation portion 20, a stopping portion 30, and a second contact end 40. The elastic deformation portion 20 is connected to the first contact end 10. The elastic deformation portion 20 has a first cross-section and a second cross-section. The elastic deformation portion 20 includes a first deformation portion 22 and a second deformation portion 24. One end of the first deformation portion 22 is connected to the first contact end 10, and the first deformation portion 22 has a first cross-section. One end of the second deformation portion 24 is connected to the other end of the first deformation portion 22, and the second deformation portion 24 has a second cross-section. The stopping portion 30 is connected to the other end of the second deformation portion 24, and the second contact end 40 is connected to the stopping portion 30. The first area of ​​the first cross-section is different from the second area of ​​the second cross-section. Figure 1 In this process, the first area of ​​the first cross section of the first deformable part 22 is different from the second area of ​​the second cross section of the second deformable part 24, thereby controlling the elasticity of the probe 1 with the mixed cross section by adjusting the first deformable part 22 and the second deformable part 24.

[0019] Following on from the above, please refer to Figure 2 , Figure 2 The figure shows a cross-sectional schematic diagram of the probe structure according to the first embodiment of the present invention. As shown, the first cross-section A1 of the first deformable part 22 is circular in this embodiment, and the second cross-section A2 of the second deformable part 24 is rectangular in this embodiment, thereby illustrating that the cross-sectional shapes of the first deformable part 22 and the second deformable part 24 are different.

[0020] Continuing from the above, in this embodiment, the first cross-section of the entire first deformable portion 22 is a circle with a uniform diameter. The first deformable portion 22 can also be a circle with a diameter varying with its length, such as a circle whose diameter gradually increases or decreases from the first deformable portion 22 near the first contact end 10 to the first deformable portion 24. In this embodiment, the second cross-section of the entire second deformable portion 24 is a rectangle with a uniform length and width. In other embodiments, the second deformable portion 24 can also be a rectangle with a length and width varying with its length, such as a rectangle whose length and width increase or decrease with its length from the second deformable portion 24 near the first deformable portion 22 to the second deformable portion 24 near the stop portion 30.

[0021] Continuing from the above, in this embodiment, the first deformable part 22 occupies half the length of the elastic deformable part 20, and the second deformable part 24 occupies the other half of the length of the elastic deformable part 20. This is just an example. Since the stress is greater when the cross-section is rectangular, the above-described embodiment of the present invention can adjust the elasticity of the probe 1 with the mixed cross-section by adjusting the length ratio of the rectangular and circular cross-sections.

[0022] Continuing from the above, in this embodiment, the first contact end 10 has a circular cross-section, which is merely an example; in other embodiments, the first contact end 10 may also have a rectangular cross-section. Figure 1 In this example, the stop portion 30 has a rectangular cross-section, which is merely an example; in this invention, the stop portion 30 may also have a circular cross-section. Figure 1 In this example, the second contact end 40 has a circular cross-section, which is only an example. In other embodiments, the second contact end 40 may also have a rectangular cross-section.

[0023] Another embodiment will then be described; see also [link to previous document]. Figure 1 As shown in the figure, a probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastically deformable portion 20, a stopping portion 30, and a second contact end 40. The elastically deformable portion 20 is connected to the first contact end 10 and has a first cross-section and a second cross-section. The elastically deformable portion 20 includes a first deformable portion 22 and a second deformable portion 24. One end of the first deformable portion 22 is connected to the first contact end 10 and has a first cross-section. One end of the second deformable portion 24 is connected to the other end of the first deformable portion 22 and has a second cross-section. The stopping portion 30 is connected to the other end of the second deformable portion 24, and the second contact end 40 is connected to the stopping portion 30. A first shape of the first cross-section differs from a second shape of the second cross-section. Continuing from the above, in... Figure 1 In the first deformation part 22, the first shape is a circle, and the second shape of the second deformation part 24 is a rectangle. The first deformation part 22 can also be a triangle, a rectangle, a pentagon, or other shapes, and the second deformation part 24 can also be a triangle, a circle, a pentagon, or other shapes.

[0024] Continuing from the above, in this embodiment, the first cross-section of the entire first deformable portion 22 is a circle with a uniform diameter, and the second cross-section of the entire second deformable portion 24 is a rectangle with a uniform length and width. The first deformable portion 22 can also be a circle with a diameter varying with its length, such as a circle whose diameter gradually increases or decreases from the first deformable portion 22 near the first contact end 10 to the first cross-section near the second deformable portion 24. In other embodiments, the second deformable portion 24 can also be a rectangle with a length and width varying with its length, such as a rectangle whose length and width increase or decrease with its length from the second deformable portion 24 near the first deformable portion 22 to the second cross-section near the stop portion 30, and is not limited to this.

[0025] Continuing from the above, in this embodiment, the first deformable part 22 occupies half the length of the elastic deformable part 20, and the second deformable part 24 occupies half the length of the elastic deformable part 20. This is just an example. Since the stress is greater when the cross-section is rectangular, the present invention can adjust the elasticity of the probe 1 with the mixed cross-section by adjusting the length ratio of the rectangular and circular cross-sections.

[0026] Continuing from the above, in this embodiment, the first contact end 10 has a circular cross-section, which is merely an example; in this invention, the first contact end 10 can also have a rectangular cross-section. Figure 1 In this example, the stop portion 30 has a rectangular cross-section, which is merely an example; in this invention, the stop portion 30 may also have a circular cross-section. Figure 1 In this example, the second contact end 40 has a circular cross-section, which is only an example. In this invention, the second contact end 40 can also have a rectangular cross-section.

[0027] Another embodiment will then be described; see also [link to previous document]. Figure 1 as well as Figure 2 In this embodiment, the first cross-section A1 of the first deformable portion 22 is circular, the second cross-section A2 of the second deformable portion 24 is rectangular, and the first area of ​​the first cross-section A1 is equal to the second area of ​​the second cross-section A2.

[0028] Another embodiment will be provided next; please refer to [link / reference]. Figure 3 This is a schematic diagram of the probe structure according to the second embodiment of the present invention. A probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastically deformable portion 20, a stop portion 30, and a second contact end 40. The elastically deformable portion 20 is connected to the first contact end 10. The elastically deformable portion 20 has a first cross-section and a second cross-section. The elastically deformable portion 20 includes a first deformable portion 22, a second deformable portion 24, and a third deformable portion 26. One end of the first deformable portion 22 is connected to the first contact end 10, and the first deformable portion 22 has a first cross-section. One end of the second deformable portion 24 is connected to the other end of the first deformable portion 22, and the second deformable portion 24 has a second cross-section. One end of the third deformable portion 26 is connected to the second deformable portion 24, and the other end is connected to the stop portion 30. The third deformable portion 26 is located between the second deformable portion and the stop portion, and the third deformable portion 26 has a third cross-section. The stop portion 30 is connected to the other end of the third deformable portion 26, and the second contact end 40 is connected to the stop portion 30.

[0029] Following on from the above, Figure 3In this example, the third area of ​​the third cross section of the third deformed part 26 is the same as the first area of ​​the first cross section of the first deformed part 22. This is just an example. In other implementations, the third area of ​​the third deformed part 26 may be different from the first area of ​​the first deformed part 22. In this way, the elasticity of the probe 3 with the mixed cross section can be controlled by adjusting the first deformed part 22, the second deformed part 24 and the third deformed part 26.

[0030] Following on from the above, Figure 3 In the middle, the third cross-section of the entire third deformed part 26 is a circle with the same diameter. The third deformed part 26 can also be a circle with a diameter that varies with the length. For example, the three cross-sections of the third deformed part 26 from the third deformed part 26 near the second deformed part 24 to the third deformed part 26 near the stop part 30 are circles with a diameter that gradually increases or decreases, and this is not limited to this. The first deformed part 22 and the second deformed part 24 have been described in detail in the aforementioned specification and will not be repeated here.

[0031] Another embodiment will be provided next; please refer to [link / reference]. Figure 4 This is a schematic diagram of the probe structure according to the third embodiment of the present invention. A probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastically deformable portion 20, a stop portion 30, and a second contact end 40. The elastically deformable portion 20 is connected to the first contact end 10. The elastically deformable portion 20 has a first cross-section and a second cross-section. The elastically deformable portion 20 includes a first deformable portion 22, a second deformable portion 24, and a third deformable portion 26. One end of the first deformable portion 22 is connected to the first contact end 10, and the first deformable portion 22 has a first cross-section. One end of the second deformable portion 24 is connected to the other end of the first deformable portion 22, and the second deformable portion 24 has a second cross-section. One end of the third deformable portion 26 is connected to the second deformable portion 24, and the other end is connected to the stop portion 30. The third deformable portion 26 is located between the second deformable portion and the stop portion, and the third deformable portion 26 has a third cross-section. The stop portion 30 is connected to the other end of the third deformable portion 26, and the second contact end 40 is connected to the stop portion 30.

[0032] Following on from the above, Figure 4 In this design, the cross-sections of the first deformable portion 22, the second deformable portion 24, and the third deformable portion 26 are all circular. The cross-section of the first deformable portion 22 connected to the second deformable portion 24 is a gradually narrowing circle, and the cross-section of the second deformable portion 24 connected to the third deformable portion 26 is a gradually widening circle, thereby controlling the elasticity of the probe 5 with the mixed cross-section.

[0033] Another embodiment will be provided next; please refer to [link / reference]. Figure 5This is a schematic diagram of the probe structure according to the fourth embodiment of the present invention. A probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastic deformation portion 20, a blocking portion 30, and a second contact end 40. An elastically deformable portion 20 is connected to the first contact end 10. The elastically deformable portion 20 has a first cross-section and a second cross-section. The elastically deformable portion 20 includes a first deformable portion 22, a second deformable portion 24, a third deformable portion 26, and a fourth deformable portion 28. One end of the first deformable portion 22 is connected to the first contact end 10, and the first deformable portion 22 has a first cross-section. One end of the second deformable portion 24 is connected to the other end of the first deformable portion 22, and the second deformable portion 24 has a second cross-section. One end of the third deformable portion 26 is connected to the other end of the second deformable portion 24, and the third deformable portion 26 is located between the second deformable portion and the stop portion. The third deformable portion 26 has a third cross-section. One end of the fourth deformable portion 28 is connected to the other end of the third deformable portion 26, and the other end of the fourth deformable portion 28 is connected to the stop portion 30. The fourth deformable portion 28 has a fourth cross-section. The stop portion 30 is connected to the other end of the fourth deformable portion 28, and the second contact end 40 is connected to the stop portion 30.

[0034] Following on from the above, Figure 5 In this design, the cross-sections of the first deformable portion 22, the second deformable portion 24, the third deformable portion 26, and the fourth deformable portion 28 are all rectangular. The cross-sections of the first deformable portion 22 and the second deformable portion 24 are rectangular with varying widths, and the cross-sections of the second deformable portion 24 and the third deformable portion 26 are rectangular with varying lengths. This is used to control the elasticity of the probe 1 with the mixed cross-section.

[0035] Another embodiment will be provided next; please refer to [link / reference]. Figure 6 This is a schematic diagram of the probe structure according to the fifth embodiment of the present invention. A probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastically deformable portion 20, a stop portion 30, and a second contact end 40. The elastically deformable portion 20 is connected to the first contact end 10. The elastically deformable portion 20 has a first cross-section and a second cross-section. The elastically deformable portion 20 includes a first deformable portion 22, a second deformable portion 24, and a third deformable portion 26. One end of the first deformable portion 22 is connected to the first contact end 10, and the first deformable portion 22 has a first cross-section. One end of the second deformable portion 24 is connected to the other end of the first deformable portion 22, and the second deformable portion 24 has a second cross-section. One end of the third deformable portion 26 is connected to the second deformable portion 24, and the other end is connected to the stop portion 30. The third deformable portion 26 is located between the second deformable portion and the stop portion, and the third deformable portion 26 has a third cross-section. The stop portion 30 is connected to the other end of the third deformable portion 26, and the second contact end 40 is connected to the stop portion 30.

[0036] Following on from the above, Figure 6In this embodiment, the cross-sections of the first deformable portion 22, the second deformable portion 24, and the third deformable portion 26 are all rectangular. However, the first axis C1 of the first deformable portion 22 and the second axis C2 of the second deformable portion 24 are not coaxial. In this embodiment, the third axis C3 of the third deformable portion 26 is coaxial with the first axis C1. However, this is only an example and is not a limitation. The third axis C3 may also be non-coaxial with the first axis C1.

[0037] Following on from the above, Figure 6 In the first deformation portion 26, the third deformation portion 26 includes the third axis C3, which is coaxial with the first axis C1 of the first deformation portion 22. However, this is not a limitation. The elastic deformation portion 20 of the present invention may also include only the first deformation portion 22 and the second deformation portion 24, and the first axis C1 and the second axis C2 of the two are not coaxial.

[0038] Please see Figure 7 This is a schematic diagram of the probe structure according to the sixth embodiment of the present invention. A probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastically deformable portion 20, a stop portion 30, and a second contact end 40. The elastically deformable portion 20 is connected to the first contact end 10 and has a first cross-section. One end of the elastically deformable portion 20 is connected to the first contact end 10, and the other end is connected to the stop portion 30. The second contact end 40 is connected to the stop portion 30 and has a second cross-section, wherein the first cross-section and the second cross-section have different shapes or areas. As shown in the figure, the first cross-section of the elastically deformable portion 20 is rectangular, and the second cross-section of the second contact end 40 is circular, and the shapes of the first and second cross-sections are different. In another embodiment, both the first and second cross-sections are rectangular or circular, but the areas of the first and second cross-sections are different. Additionally, the cross-section of the stop portion 30 can be circular or rectangular.

[0039] Please see Figure 8 This is a schematic diagram of the probe structure according to the seventh embodiment of the present invention. A probe 1 with a mixed cross-section according to the present invention includes a first contact end 10, an elastically deformable portion 20, a stopping portion 30, and a second contact end 40. The elastically deformable portion 20 is connected to the first contact end 10 and has a first cross-section. One end of the elastically deformable portion 20 is connected to the first contact end 10, and the other end is connected to the stopping portion 30. The second contact end 40 is connected to the stopping portion 30 and has a second cross-section, wherein the shape or area of ​​the first cross-section and the second cross-section are different. As shown in the figure, the first cross-section of the elastically deformable portion 20 is circular, the second cross-section of the second contact end 40 is rectangular, and the shapes of the first and second cross-sections are different. The cross-sectional shape of the stopping portion 30 is the same as the shape of either the first or the second cross-section.

[0040] Please see Figure 9This is a schematic diagram of an electronic connection device according to an embodiment of the present invention. The electronic connection device includes a substrate electrode 100, a first guide plate 110, a second guide plate 120, and a third guide plate 130. The electronic connection device is connected to a probe 1, through which electrical tests are performed on a wafer 200 under test. The signal is transmitted from the wafer 200 under test back to the substrate electrode 100 via the probe 1 for testing. The probe 1 is the probe described in the above embodiment of the present invention, and the probe 1 includes a first contact end, an elastically deformable portion, a stop portion, and a second contact end. The substrate electrode 100 is coupled to the second contact end of the probe 1, the first guide plate 110 is coupled to the stop portion, and the probe 1 is engaged in a first guide hole of the first guide plate 110 through the stop portion. The second guide plate 120 is coupled to one end of the elastically deformable portion adjacent to the second contact end, and a portion of the elastically deformable portion of the probe 1 is engaged in a second guide hole of the second guide plate 120. The third guide plate 130 is coupled to one end of the elastically deformable portion adjacent to the first contact end, and the other portion of the elastically deformable portion of the probe 1 is engaged in a third guide hole of the third guide plate 130. The electronic connection device can fix the position of the probe 1 through the first guide plate 110, the second guide plate 120, and the third guide plate 130. During the test, the probe 1 is engaged in the guide hole of the first guide plate 110, the second guide plate 120, and the third guide plate 130, which can control the deformation generated during the test and avoid damage to the probe 1 during the test.

[0041] The embodiments described above provide a probe with a hybrid cross-section. By designing elastic deformation portions of different areas or shapes, the stress of the probe is controlled, preventing the probe from being permanently damaged due to excessive stress exceeding the probe's structural yield point during the testing stroke. This also reduces the risk of solder pad cutting caused by excessive elasticity, thereby providing better probe testing yield. The probe head used in electronic connection devices has a plurality of guide plates with a plurality of through-holes and air gaps between them. The probe passes through the through-holes formed in the guide plates and is held in place by the probe head through the air gaps.

[0042] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. All equivalent variations and modifications made in accordance with the shape, structure, features and spirit described in the claims of the present invention should be included within the scope of the claims of the present invention.

Claims

1. A probe, characterized in that, The probe contains: First contact end; An elastically deformable portion is connected to the first contact end, and the elastically deformable portion has a first cross-section and a second cross-section. A stop portion, which connects to the elastically deformable portion; and A second contact end is connected to the stop portion, wherein the first cross-section has a first area, the second cross-section has a second area, and the first area is different from the second area.

2. The probe as described in claim 1, characterized in that, The elastic deformation portion includes a first deformation portion and a second deformation portion. The first deformation portion is connected to the first contact end and has the first cross-section. The second deformation portion is connected to the first deformation portion and has the second cross-section.

3. The probe as described in claim 2, characterized in that, The first area decreases or increases along one end of the first deformed portion to the other end.

4. The probe as described in claim 2, characterized in that, The second area decreases or increases along one end of the second deformed portion to the other end.

5. The probe as described in claim 1, characterized in that, The first cross-section has a first shape, and the second cross-section has a second shape, the first shape being the same as the second shape.

6. The probe as described in claim 2, characterized in that, The elastic deformation portion further includes a third deformation portion located between the second deformation portion and the stop portion. The third deformation portion has a third cross-section, and the third cross-section has a third area and a third shape.

7. The probe as described in claim 6, characterized in that, The third area is equal to the first area.

8. The probe as described in claim 6, characterized in that, The third area decreases or increases along one end of the third deformed portion to the other.

9. The probe as described in claim 6, characterized in that, Wherein, at least one of the third axis of the third deformed part and the first axis of the first deformed part and the second axis of the second deformed part is not Coaxial.

10. A probe, characterized in that, The probe contains: First contact end; An elastically deformable portion is connected to the first contact end, and the elastically deformable portion has a first cross-section and a second cross-section. A stop portion, which connects to the elastically deformable portion; and A second contact end is connected to the stop portion, wherein the first cross-section has a first shape, the second cross-section has a second shape, and the first shape is different from the second shape.

11. The probe as claimed in claim 10, characterized in that, The elastic deformation portion includes a first deformation portion and a second deformation portion. The first deformation portion is connected to the first contact end and has the first cross-section. The second deformation portion is connected to the first deformation portion and has the second cross-section.

12. The probe as claimed in claim 11, characterized in that, The area of ​​the first cross section decreases or increases along the first deformed portion from one end to the other.

13. The probe as claimed in claim 11, characterized in that, The area of ​​the second cross section gradually decreases or increases from one end to the other along the second deformed portion.

14. The probe as claimed in claim 11, characterized in that, The first axis of the first deformed part is not coaxial with the second axis of the second deformed part.

15. The probe with a mixed cross-section as described in claim 11, characterized in that, The first area of ​​the first cross-section is the same as the second area of ​​the second cross-section.

16. The probe as claimed in claim 11, characterized in that, The elastic deformation portion further includes a third deformation portion located between the second deformation portion and the stop portion. The third deformation portion has a third cross-section and a third shape.

17. The probe as claimed in claim 14, characterized in that, The third shape of the third cross section is different from at least one of the first shape of the first cross section and the second shape of the second cross section.

18. The probe as claimed in claim 14, characterized in that, The third cross section gradually decreases or increases from one end to the other along the third deformed portion.

19. The probe as claimed in claim 14, characterized in that, Wherein, at least one of the third axis of the third deformed part and the first axis of the first deformed part and the second axis of the second deformed part is not Coaxial.

20. A probe, characterized in that, The probe contains: First contact end; An elastically deformable portion is connected to the first contact end, and the elastically deformable portion has a first cross-section. A stop portion, which connects to the elastically deformable portion; and A second contact end is connected to the stop portion, the second contact end having a second cross-section, wherein the shape or area of ​​the first cross-section is different from that of the second cross-section.

21. The probe as claimed in claim 20, characterized in that, The stop portion has a third cross section, the shape of which is different from the first or second cross section.

22. An electrical connection device, characterized in that, Coupled to a probe, the probe including a first contact end, an elastically deformable portion, a stop portion, and a second contact end, the electrical connection device includes: A substrate electrode is coupled to the second contact terminal; A first guide plate is coupled to the stop portion, and the probe is engaged in a first guide hole of the first guide plate through the stop portion; A second guide plate is coupled to one end of the elastically deformable portion adjacent to the second contact end, and a portion of the elastically deformable portion of the probe is engaged in a second guide hole of the second guide plate; as well as A third guide plate is coupled to one end of the elastically deformable portion adjacent to the first contact end, and another portion of the elastically deformable portion of the probe is engaged in a third guide hole of the third guide plate.

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