Anti-sputtering spray-washing equipment for workpieces

Abstract

The invention relates to the technical field of workpiece cleaning, in particular to anti-sputtering spray-washing equipment for workpieces, which comprises a spray-washing cabinet, a spray-washing mechanical arm for automatic cleaning is arranged in the spray-washing cabinet, and the upper end and the lower end of an opening of the spray-washing cabinet are fixedly connected with gas spray curtains. The outer table is used for loading and unloading workpieces, the inner table synchronously carries out cleaning operation, the two stations are switched and connected through an upper rail groove and an inner rail groove, and are positioned through a lower electric telescopic cylinder and a guide rod, so that accurate butt joint of the upper rail groove and the inner rail groove is ensured, and after switching is completed, the two stations can be continuously used. The structure can avoid and shield the core area of the gas spraying curtain, does not block the continuity of up-and-down opposite blowing airflow, ensures that the splash-proof barrier is continuous and effective, eliminates the waiting interval of traditional single-station equipment, greatly improves the equipment utilization rate and the production takt, keeps the advantage of convenient operation of an open type spray washing cabinet, and gives consideration to both the production efficiency and the field environment protection.

Description

Technical Field

[0001] This invention relates to the field of workpiece cleaning technology, and in particular to a splash-proof spray cleaning device for workpieces. Background Technology

[0002] During the production process, the cavity of semiconductor manufacturing equipment may become contaminated, resulting in plating or damage, which can affect product yield or cause production accidents. It is necessary to periodically disassemble the cavity components for cleaning and regeneration. After cleaning and sandblasting, aluminum electroplating is performed, followed by a coating, and then the components are reused. This can achieve the same effect as new parts, improve equipment efficiency, and reduce the cost of purchasing new parts. The existing process is: chemical or physical cleaning - pure water cleaning - surface treatment (grinding or polishing) - sandblasting - electroplating - ultrasonic cleaning - drying - dust-free packaging.

[0003] In the process of cleaning parts in semiconductor manufacturing equipment, the equipment adopts an open spray cabinet structure with a built-in multi-angle high-pressure spray system. It achieves all-round rinsing of complex-shaped workpieces by directional spraying of cleaning media. The core of the system is the air curtain anti-splash design, which forms a continuous high-speed airflow barrier at the opening of the spray area. This effectively blocks liquid splashing and atomization diffusion during the cleaning process, protecting the cleanliness of the working environment and avoiding waste and pollution caused by cleaning agent overflow. Moreover, the air curtain anti-splash method makes the equipment suitable for cleaning large, irregularly shaped parts, while avoiding the risk of solvent evaporation and accumulation that may occur in a confined space, thus improving the safety of the working environment.

[0004] However, existing air curtain anti-splash spray cleaning cabinets have significant limitations in actual production. Because the air curtain needs to continuously cover the entire open surface to maintain the anti-splash effect, the workpiece table cannot be moved out of the air curtain coverage area during the cleaning process. This makes it impossible for the equipment to achieve a dual-station alternating operation mode with one workpiece on standby and one in use. Operators can only load and unload workpieces during cleaning intervals, which limits the effective operating time of the equipment and makes it difficult to meet the needs of continuous production. If a partition structure is forcibly set to separate the inner and outer workpiece tables, it will directly block the continuity of the air curtain airflow, destroy the integrity of the anti-splash barrier, and cause the cleaning fluid to overflow and pollute the working environment. This contradiction makes it impossible to balance production efficiency and protective effect, which restricts the application efficiency of air curtain spray cleaning equipment in batch cleaning scenarios.

[0005] Therefore, a splash-proof spray washing device for workpieces is proposed to solve the above problems. Summary of the Invention

[0006] The purpose of this invention is to address the shortcomings of the prior art by proposing an anti-splash spraying device for workpieces.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a splash-proof spray cleaning device for workpieces, comprising a spray cleaning cabinet, wherein a spray cleaning robotic arm for automatic cleaning is provided inside the spray cleaning cabinet, air spray curtains are fixedly connected to both the upper and lower ends of the opening of the spray cleaning cabinet, an inner platform is fixedly connected to the inner side of the spray cleaning cabinet, an outer platform is provided on the front side of the spray cleaning cabinet, a flipping frame is provided below the outer platform, the bottom of the outer platform is rotatably connected to the inner side of the flipping frame, a lower platform is provided below the flipping frame, a cleaning rack for placing workpieces is provided on both the outer platform and the inner platform, a pair of upper rail grooves are provided at the top of the outer platform, a lower rail groove is provided at the top of the lower platform, a pair of inner rail grooves are provided on the inner platform, a pair of upper sliders are fixedly connected to the bottom of the cleaning rack, a pair of lower sliders are fixedly connected to the bottom of the flipping frame and slidably connected in the lower rail groove, a limiting structure is provided on both the lower platform and the outer platform, a replacement mechanism for replacing the cleaning rack is provided on the inner platform, and a movable frame is provided below the lower platform.

[0008] In the above technical solution, when it is externally mounted, the upper slider on the cleaning rack is slidably connected to the inner side of one of the upper rail grooves; when it is internally mounted, the upper slider on the cleaning rack is slidably connected to the inner side of the inner rail groove.

[0009] In the above technical solution, further, an upper drive motor is fixedly connected to the bottom end of the movable frame, a disc is rotatably connected to the top end of the movable frame, the output end of the upper drive motor passes through the inside of the movable frame and is fixedly connected to the bottom end of the disc, a rotating shaft is fixedly connected to the bottom end of the lower platform, the rotating shaft is rotatably connected to the disc, an arc groove is formed through the top end of the disc, a lower rod is fixedly connected to the bottom end of the lower platform and inserted into the inner side of the arc groove, and guide springs are fixedly connected between the outer sides of the lower rod and the inner side of the arc groove.

[0010] In the above technical solution, the replacement mechanism further includes an upper electric telescopic cylinder, which is fixedly connected to the inside of the spray washing cabinet and is located above the inner platform. An electromagnet is fixedly connected to the output end of the upper electric telescopic cylinder. The washing rack and the flipping frame are both made of iron. A lower electric telescopic cylinder is fixedly connected to the inside of the inner platform. A guide rod is fixedly connected to the output end of the lower electric telescopic cylinder. The front end of the guide rod is set as a smooth arc surface, and a release plate is fixedly connected to the top end of the guide rod.

[0011] In the above technical solution, the limiting structure further includes a push rod, and a horizontal groove is provided on the inner side of both the upper and lower rail grooves. A limiting plate is slidably connected to the inner side of each horizontal groove. An inclined groove is provided through the top of the limiting plate. A U-shaped cavity is provided through the side walls of the horizontal grooves. A U-shaped plate is slidably connected vertically to the inner side of the U-shaped cavity. Insert rods inserted into the inclined grooves are fixedly connected to both ends of the bottom of the U-shaped plate. Three push rods are provided. The three insert rods are fixedly connected to the side walls of the U-shaped plate, and the insert rods are slidably connected to the outer platform and the lower platform, respectively. A limiting groove is provided at the bottom end of both the upper and lower sliders.

[0012] In the above technical solution, a pair of limiting springs are fixedly connected between the inner side of the transverse groove and the side wall of the limiting plate, and the limiting plate is inserted into the inner side of the corresponding limiting groove.

[0013] In the above technical solution, the outer platform is provided with upper T-shaped grooves on both the front and rear sides, and the lower platform is provided with a lower T-shaped groove on the rear side. Both ends of the upper T-shaped groove and the lower T-shaped groove are fixedly connected with right-angled plates with inclined surfaces.

[0014] In the above technical solution, a lower drive motor is fixedly connected to the side wall of the flip frame, and the output end of the lower drive motor passes through the inner side of the flip frame and is fixedly connected to the outer side wall. A lifting device is fixedly connected to the front side of the spray washing cabinet, and the moving frame is fixedly connected to the lifting end of the lifting device. A waterproof battery is fixedly connected through the front side of the flip frame, and the waterproof battery provides power to the lower drive motor.

[0015] In the above technical solution, the top of the outer platform is provided with a number of threaded holes, and two pairs of threaded holes are threaded with positioning pins on their inner sides.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. The automatic workpiece switching structure on the inner and outer platforms of this invention realizes a dual-station continuous operation mode with one standby and one active station. The outer platform is used for loading and unloading workpieces, while the inner platform performs cleaning operations simultaneously. The two stations are connected by the upper and inner rail grooves and positioned by the lower electric telescopic cylinder and guide rod to ensure accurate docking of the upper and inner rail grooves. After the switching is completed, it can avoid obstructing the core area of ​​the air spray curtain without interrupting the continuity of the upper and lower airflow, ensuring the continuous effectiveness of the splash barrier. This structure eliminates the waiting interval of traditional single-station equipment, greatly improves equipment utilization and production cycle, while maintaining the advantages of convenient operation of open spray washing cabinets, taking into account both production efficiency and on-site environmental protection.

[0017] 2. This invention further integrates lifting and flipping functions into the outer platform, enabling automatic feeding and cleaning of ultra-large workpieces. During operation, the outer platform is raised to a high position to align the lower platform with the inner platform. Then, the outer platform is flipped as a whole, and after the workpiece is installed, it is automatically sent into the spray cleaning cabinet. No manual intervention is required throughout the process. This extended function breaks through the load-bearing size limitation of open spray cleaning cabinets, enabling the equipment to adapt to the cleaning needs of large shell and frame-type workpieces, significantly expanding the applicable scenarios and processing capabilities of the equipment. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the front of the spray washing equipment of the present invention; Figure 2 Appendix of the present invention Figure 1 A magnified view of the structure at point A in the middle; Figure 3 This is a three-dimensional structural diagram of the front of the spray washing cabinet of the present invention; Figure 4 This is a three-dimensional structural diagram of the outer platform and the lifting device of the present invention; Figure 5 This is a schematic diagram of a partial cross-section of the inner platform side of the present invention. Figure 6 This is a schematic diagram of the overall appearance structure of the lifting device of the present invention; Figure 7 This is a bottom-view perspective view of the cleaning rack and the upper electric telescopic cylinder of the present invention. Figure 8 This is a schematic diagram of the overall appearance structure of the mobile frame and the upper drive motor of the present invention; Figure 9 This is a bottom-view three-dimensional structural diagram of the outer platform, flip frame, and lower platform of the present invention. Figure 10 This is a schematic diagram of the three-dimensional structure of the outer platform of the present invention, partially cut out. Figure 11 This is a schematic diagram of the three-dimensional structure of the outer platform of the present invention, partially cut out. Figure 12 This is a schematic diagram of the three-dimensional structure of the separated U-shaped plate and limiting plate of the present invention; Figure 13 This is a schematic diagram of the three-dimensional structure of the lower platform and the flip frame of the present invention, viewed from below.

[0019] In the diagram: 1. Spray washing cabinet; 2. Spray washing robotic arm; 3. Air spray curtain; 4. Inner platform; 5. Outer platform; 6. Tilting frame; 7. Lower platform; 8. Washing rack; 9. Upper rail groove; 10. Lower rail groove; 11. Inner rail groove; 12. Upper slider; 13. Lower slider; 14. Moving frame; 15. Upper drive motor; 16. Disc; 17. Rotating shaft; 18. Arc groove; 19. Lower rod; 20. Guide spring; 21. Upper electric telescopic arm 21. Cylinder; 22. Electromagnet; 23. Lower electric telescopic cylinder; 24. Guide rod; 25. Release plate; 26. Push rod; 27. Limiting plate; 28. Inclined groove; 29. ​​U-shaped plate; 30. Insert rod; 31. Limiting groove; 32. Limiting spring; 33. Upper T-slot; 34. Lower T-slot; 35. Right angle plate; 36. Lower drive motor; 37. Lifting device; 38. Threaded hole; 39. Positioning pin; 40. Waterproof battery. Detailed Implementation

[0020] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Numerous specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the invention is not limited to the specific embodiments disclosed below.

[0022] In practical use, it was found that the existing air curtain anti-splash spray cleaning cabinet 1 has significant limitations in actual production. Since the air curtain needs to continuously cover the entire open surface to maintain the anti-splash effect, the workpiece table cannot be moved out of the air curtain coverage area during the cleaning process. This makes it impossible for the equipment to achieve a dual-station alternating operation mode with one workpiece in standby mode. Operators can only load and unload workpieces during cleaning intervals, which limits the effective operating time of the equipment and makes it difficult to meet the needs of continuous production. If a partition structure is forcibly set to separate the inner and outer workpiece tables, it will directly block the continuity of the air curtain airflow, destroy the integrity of the anti-splash barrier, and cause the cleaning liquid to overflow and pollute the working environment. This contradiction makes it impossible to balance production efficiency and protective effect, which restricts the application efficiency of air curtain spray cleaning equipment in batch cleaning scenarios. To solve the above problems, the following structure is invented.

[0023] like Figures 1-13The illustrated anti-splash spray cleaning device for workpieces includes a spray cleaning cabinet 1. The spray cleaning cabinet 1 houses a spray cleaning robotic arm 2 for automatic cleaning. The robotic arm 2 achieves spatial posture adjustment through a multi-joint rotating structure, driving a high-pressure nozzle to perform three-dimensional motion around the workpiece. The arm body has built-in rotating joints and swing mechanisms, allowing the nozzle to be aimed at the workpiece surface from multiple angles and directions. Combined with the cleaning medium delivered by the high-pressure pump, it achieves all-round, thorough cleaning of workpieces with complex shapes. Air spray curtains 3 are fixedly connected to both the upper and lower ends of the opening of the spray cleaning cabinet 1. An inner platform 4 is fixedly connected to the inside of the spray cleaning cabinet 1, and an outer platform 5 is located at the front of the spray cleaning cabinet 1. A flip frame 6 is provided below, and the bottom of the outer platform 5 is rotatably connected to the inner side of the flip frame 6. A lower platform 7 is provided below the flip frame 6. Both the outer platform 5 and the inner platform 4 are provided with cleaning racks 8 for placing workpieces. A pair of upper rail grooves 9 are provided at the top of the outer platform 5, a lower rail groove 10 is provided at the top of the lower platform 7, and a pair of inner rail grooves 11 are provided on the inner platform 4. A pair of upper sliders 12 are fixedly connected to the bottom of the cleaning rack 8, and a pair of lower sliders 13 are fixedly connected to the bottom of the flip frame 6 and slidably connected in the lower rail grooves 10. Both the lower platform 7 and the outer platform 5 are provided with limiting structures. The inner platform 4 is provided with a replacement mechanism for replacing the cleaning rack 8. A movable frame 14 is provided below the lower platform 7.

[0024] When externally mounted, the upper slider 12 on the cleaning rack 8 is slidably connected to the inside of one of the upper rail grooves 9. When internally mounted, the upper slider 12 on the cleaning rack 8 is slidably connected to the inside of the inner rail groove 11.

[0025] The bottom of the movable frame 14 is fixedly connected to an upper drive motor 15, and the top of the movable frame 14 is rotatably connected to a disc 16. The output end of the upper drive motor 15 passes through the interior of the movable frame 14 and is fixedly connected to the bottom of the disc 16. The bottom of the lower platform 7 is fixedly connected to a rotating shaft 17, which is rotatably connected to the disc 16. The top of the disc 16 has a circular arc groove 18. The bottom of the lower platform 7 is fixedly connected to a lower rod 19, which is inserted into the inner side of the circular arc groove 18. Guide springs 20 are fixedly connected between the outer sides of the lower rod 19 and the inner side of the circular arc groove 18.

[0026] The replacement mechanism includes an upper electric telescopic cylinder 21, which is fixedly connected to the inside of the spray washing cabinet 1. The upper electric telescopic cylinder 21 is located above the inner platform 4. An electromagnet 22 is fixedly connected to the output end of the upper electric telescopic cylinder 21. The washing rack 8 and the flipping frame 6 are both made of iron. A lower electric telescopic cylinder 23 is fixedly connected to the inside of the inner platform 4. A guide rod 24 is fixedly connected to the output end of the lower electric telescopic cylinder 23. The front end of the guide rod 24 is set as a smooth arc surface. A release plate 25 is fixedly connected to the top end of the guide rod 24.

[0027] The limiting structure includes a push rod 26, and horizontal grooves are provided on the inner sides of the upper rail groove 9 and the lower rail groove 10. Limiting plates 27 are slidably connected to the inner sides of the horizontal grooves. An inclined groove 28 is provided through the top of the limiting plate 27. A U-shaped cavity is provided through the side walls of the horizontal grooves. A U-shaped plate 29 is slidably connected vertically to the inner side of the U-shaped cavity. Insert rods 30 inserted into the inclined grooves 28 are fixedly connected to both ends of the bottom of the U-shaped plate 29. Three push rods 26 are provided. The three insert rods 30 are fixedly connected to the side walls of the U-shaped plate 29. The insert rods 30 are slidably connected to the outer platform 5 and the lower platform 7 respectively. Limiting grooves 31 are provided at the bottom ends of the upper slider 12 and the lower slider 13.

[0028] A pair of limiting springs 32 are fixedly connected between the inner side of the transverse groove and the side wall of the limiting plate 27, and the limiting plate 27 is inserted into the inner side of the corresponding limiting groove 31.

[0029] The outer platform 5 has upper T-shaped grooves 33 on both the front and rear sides, and the lower platform 7 has a lower T-shaped groove 34 on the rear side. Both ends of the upper T-shaped groove 33 and the lower T-shaped groove 34 are fixedly connected to right-angle plates 35 with inclined surfaces.

[0030] When cleaning the workpiece, the workpiece is first placed on the cleaning rack 8. Then, the upper drive motor 15 is started to drive the disc 16 to rotate. At this time, under the elastic force of the guide spring 20, the lower rod 19, the lower platform 7, the flipping frame 6 and the outer platform 5 will be pushed to rotate, thereby rotating the cleaning rack 8 filled with workpieces to the front of the spray cleaning cabinet 1. Then, the upper drive motor 15 can be stopped. Then, the lower electric telescopic cylinder 23 is started to drive the guide rod 24 to extend. At this time, the guide rod 24 will be inserted into the upper T-slot 33. (If there is a deviation between the position of the outer platform 5 and the inner platform 4 at this time, the arc surface at the front end of the guide rod 24 will press the inclined surface of one of the right angle plates 35, push the outer platform 5, the flipping frame 6 and the lower platform 7 to rotate, and drive the lower rod 19 to rotate in the arc groove 18, and press and stretch the guide springs 20 on both sides until the guide rod 24 is accurately inserted into the upper T-slot 33, thereby ensuring the accurate docking between the upper rail groove 9 and the inner rail groove 11). The movement of the guide rod 24 will cause the release plate 25 to move together. After the guide rod 24 is inserted into the upper T-slot 33, it will move the release plate 25 to the side of the push rod 26, pushing the push rod 26 to move. This will cause the U-shaped plate 29 to move. Since the limiting plate 27 can only slide laterally in the transverse groove, when the U-shaped plate 29 and the insert rod 30 move, the insert rod 30 will press the inclined surface of the inclined groove 28, causing the two limiting plates 27 to slide towards the middle and compress the limiting spring 32, so that the limiting plate 27 slides out of the limiting groove 31, thereby releasing the limitation on the upper slider 12. Then, the upper electric telescopic cylinder 21 can be started to drive the electromagnet 22 to move to the side of the cleaning rack 8. The electromagnet 22 is energized to attract and fix the cleaning rack 8. Then, the upper electric telescopic cylinder 21 is reset, which in turn drives the cleaning rack 8 and the upper slider 12 to gradually slide out of the upper rail groove 9 and gradually slide into the inner rail groove 11 until the cleaning rack 8 with the workpiece is completely moved to the inner platform 4. Then, the lower electric telescopic cylinder 23 is reset, and the air spray curtain 3 is started to protect the outlet of the spray washing cabinet 1. Then, the spray washing robot arm 2 is started to perform high-pressure rinsing on the workpiece on the cleaning rack 8. At this point, the next batch of cleaning tools can be placed on the cleaning rack 8 on the outer platform 5. After the workpieces on the inner platform 4 are cleaned, first control the lower electric telescopic cylinder 23 to start, position the outer platform 5, and press the position of the limiting plate 27. Then control the upper electric telescopic cylinder 21 to push the electromagnet 22 and the cleaning rack 8 to reset. Finally, control the upper drive motor 15 to start, and rotate the cleaning rack 8 filled with workpieces to the front of the spray cleaning cabinet 1. Repeat the above operation.

[0031] In summary, through the design of the above structure, the automatic workpiece switching structure on the inner platform 4 and the outer platform 5 realizes a dual-station continuous operation mode with one station in standby mode. The outer platform 5 is used for loading and unloading workpieces, while the inner platform 4 performs cleaning operations simultaneously. The two stations are connected by the upper rail groove 9 and the inner rail groove 11, and positioned by the lower electric telescopic cylinder 23 and the guide rod 24 to ensure accurate docking of the upper rail groove 9 and the inner rail groove 11. After the switching is completed, it can avoid obstructing the core area of ​​the air spray curtain 3, without interrupting the continuity of the upper and lower airflow, ensuring the continuous effectiveness of the splash barrier. This structure eliminates the waiting interval of traditional single-station equipment, greatly improves equipment utilization and production cycle, while maintaining the advantage of convenient operation of the open spray cleaning cabinet 1, taking into account both production efficiency and on-site environmental protection.

[0032] Based on the above embodiments, it was found during use that although the above structure can achieve the functions of one spare cleaning rack 8 and not obstructing the air spray curtain 3, the air curtain spray cleaning equipment sometimes needs to clean larger semiconductor manufacturing equipment parts. The size of the cleaning rack 8 on the outer platform 5 in the above structure is limited, and it cannot be used when large workpieces need to be cleaned. In order to solve the above problems, the above structure has been further improved.

[0033] A lower drive motor 36 is fixedly connected to the side wall of the flip frame 6. The output end of the lower drive motor 36 passes through the inside of the flip frame 6 and is fixedly connected to the side wall of the outer platform 5. A lifting device 37 is fixedly connected to the front of the spray washing cabinet 1. The moving frame 14 is fixedly connected to the lifting end of the lifting device 37. A waterproof battery 40 is fixedly connected through the front of the flip frame 6. The waterproof battery 40 provides power to the lower drive motor 36.

[0034] The top of the outer platform 5 has several threaded holes 38, and two pairs of threaded holes 38 are threaded with locating pins 39 on their inner sides.

[0035] When it is necessary to feed and clean extra-large workpieces, first press the push rod 26 to squeeze the limiting plate 27 to slide towards the middle, release the limit on the cleaning frame 8, and take the two cleaning frames 8 out of the outer platform 5. Then, thread the corresponding positioning pin 39 into the corresponding threaded hole 38 (and the positioning pin 39 has threads, so after the positioning pin 39 is inserted into the workpiece, the position of the workpiece on the positioning pin 39 can be restricted by the nut, thereby stabilizing and fixing the position of the workpiece). Then, control the lifting device 37 to start the drive moving frame 14 to move upward, and drive the upper drive motor 15, lower platform 7, flipping frame 6 and outer platform 5 to move upward until the top of the lower platform 7 is aligned with the top of the inner platform 4 (it should be noted that the height alignment of the lower platform 7 and the inner platform 4 can be detected and controlled by a laser displacement sensor. The sensor is installed on the side wall of the spray cleaning cabinet 1 to monitor the lifting position of the lower platform 7 in real time. When it is detected that the lower platform 7 and the inner platform 4 are on the same horizontal plane, a signal is fed back to the control system to automatically lock the lifting mechanism, ensuring that the two platforms are smoothly connected and the workpiece is reliably transferred). Then, control the lower drive motor 36 to start and drive the outer platform 5 to rotate forward 90 degrees, so that the outer platform 5 is in a vertical state and the workpiece is in a vertical state. Then, control the lower electric telescopic cylinder 23 to start and drive the guide rod 24 to insert into the lower T-slot 34. If there is a deviation between the position of the lower platform 7 and the inner platform 4 at this time, the inclined surface of one of the right angle plates 35 will be squeezed by the arc surface at the front end of the guide rod 24, pushing the lower platform 7 to rotate and driving the lower rod 19 to rotate in the arc groove 18, and squeezing and stretching the guide springs 20 on both sides until the guide rod 24 is accurately inserted into the lower T-slot 34, thereby ensuring the accurate docking between the lower rail groove 10 and the inner rail groove 11. The movement of the guide rod 24 will cause the release plate 25 to move together. After the guide rod 24 is inserted into the lower T-slot 34, it will move the release plate 25 to the push rod 26 on the lower platform 7, pushing the push rod 26 to move. This will cause the U-shaped plate 29 to move. Since the limiting plate 27 can only slide laterally in the transverse groove, when the U-shaped plate 29 and the insert rod 30 move, the insert rod 30 will squeeze the inclined surface of the inclined groove 28, causing the two limiting plates 27 to slide towards the middle and compress the limiting spring 32, so that the limiting plate 27 slides out of the limiting groove 31 of the lower slider 13, thereby releasing the limitation on the lower slider 13. Then, the upper electric telescopic cylinder 21 can be started to move the electromagnet 22 to the side of the flipping frame 6. The electromagnet 22 is energized to attract and fix the flipping frame 6. Then, the upper electric telescopic cylinder 21 is reset, which in turn drives the flipping frame 6 and the lower slider 13 to gradually slide out of the lower rail groove 10 and into the inner rail groove 11 until the outer platform 5 after flipping is completely moved onto the inner platform 4. Then, the lower electric telescopic cylinder 23 is reset. Then, the air spray curtain 3 is started to protect the outlet of the spray washing cabinet 1. Then, the spray washing robot arm 2 is started to perform high-pressure washing on the workpiece on the outer platform 5.

[0036] In summary, through the design of the above structure, the outer platform 5 is further integrated with lifting and flipping functions, which can automatically feed and clean ultra-large workpieces. During operation, the outer platform 5 is raised to a high position so that the lower platform 7 is aligned with the inner platform 4. Then, the outer platform 5 is flipped as a whole, and after the workpiece is installed, it is automatically sent into the spray cleaning cabinet 1. No manual intervention is required throughout the process. This extended function breaks through the load-bearing size limitation of the open spray cleaning cabinet 1, enabling the equipment to adapt to the cleaning needs of large shell and frame-type workpieces, and significantly broadening the applicable scenarios and processing capabilities of the equipment.

[0037] The foregoing has shown and described the basic principles, main features, and advantages of the present invention.

[0038] Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely the principles of the present invention. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A splash-proof spray cleaning device for workpieces, comprising a spray cleaning cabinet (1), wherein a spray cleaning robot arm (2) for automatic cleaning is provided inside the spray cleaning cabinet (1), and air spray curtains (3) are fixedly connected to both the upper and lower ends of the opening of the spray cleaning cabinet (1), characterized in that: The spray cleaning cabinet (1) is fixedly connected to an inner platform (4) on its inner side. An outer platform (5) is provided on the front side of the spray cleaning cabinet (1). A flip frame (6) is provided below the outer platform (5). The bottom of the outer platform (5) is rotatably connected to the inner side of the flip frame (6). A lower platform (7) is provided below the flip frame (6). Cleaning racks (8) for placing workpieces are provided on both the outer platform (5) and the inner platform (4). A pair of upper rail grooves (9) are opened at the top of the outer platform (5). A lower platform (7) is opened at the top. There is a lower rail groove (10), and a pair of inner rail grooves (11) are provided on the inner platform (4). A pair of upper sliders (12) are fixedly connected to the bottom end of the cleaning rack (8). A pair of lower sliders (13) that are slidably connected in the lower rail groove (10) are fixedly connected to the bottom end of the flip frame (6). Limiting structures are provided on both the lower platform (7) and the outer platform (5). A replacement mechanism for replacing the cleaning rack (8) is provided on the inner platform (4). A movable frame (14) is provided below the lower platform (7).

2. The anti-splash spray cleaning equipment for workpieces according to claim 1, characterized in that: When externally mounted, the upper slider (12) on the cleaning rack (8) is slidably connected to the inside of one of the upper rail grooves (9). When internally mounted, the upper slider (12) on the cleaning rack (8) is slidably connected to the inside of the inner rail groove (11).

3. The anti-splash spray washing equipment for workpieces according to claim 1, characterized in that: The bottom end of the movable frame (14) is fixedly connected to an upper drive motor (15), and the top end of the movable frame (14) is rotatably connected to a disc (16). The output end of the upper drive motor (15) passes through the inside of the movable frame (14) and is fixedly connected to the bottom end of the disc (16). The bottom end of the lower platform (7) is fixedly connected to a rotating shaft (17), and the rotating shaft (17) is rotatably connected to the disc (16). The top end of the disc (16) is provided with an arc groove (18). The bottom end of the lower platform (7) is fixedly connected to a lower rod (19) inserted into the inner side of the arc groove (18). Guide springs (20) are fixedly connected between the outer sides of the lower rod (19) and the inner side of the arc groove (18).

4. The anti-splash spray washing equipment for workpieces according to claim 1, characterized in that: The replacement mechanism includes an upper electric telescopic cylinder (21), which is fixedly connected to the inside of the spray washing cabinet (1). The upper electric telescopic cylinder (21) is set above the inner platform (4). An electromagnet (22) is fixedly connected to the output end of the upper electric telescopic cylinder (21). The washing rack (8) and the flipping frame (6) are both made of iron. A lower electric telescopic cylinder (23) is fixedly connected to the inside of the inner platform (4). A guide rod (24) is fixedly connected to the output end of the lower electric telescopic cylinder (23). The front end of the guide rod (24) is set as a smooth arc surface. A release plate (25) is fixedly connected to the top end of the guide rod (24).

5. The anti-splash spray cleaning equipment for workpieces according to claim 1, characterized in that: The limiting structure includes a push rod (26), and a horizontal groove is provided on the inner side of the upper rail groove (9) and the lower rail groove (10). A limiting plate (27) is slidably connected to the inner side of the horizontal groove. An inclined groove (28) is provided through the top of the limiting plate (27). A U-shaped cavity is provided through the side wall of the horizontal groove. A U-shaped plate (29) is slidably connected to the inner side of the U-shaped cavity. Insert rods (30) inserted into the inclined groove (28) are fixedly connected to both ends of the bottom of the U-shaped plate (29). There are three push rods (26). The three insert rods (30) are fixedly connected to the side wall of the U-shaped plate (29). The insert rods (30) are slidably connected to the outer platform (5) and the lower platform (7) respectively. A limiting groove (31) is provided at the bottom of the upper slider (12) and the lower slider (13).

6. The anti-splash spray washing equipment for workpieces according to claim 5, characterized in that: A pair of limiting springs (32) are fixedly connected between the inner side of the transverse groove and the side wall of the limiting plate (27), and the limiting plate (27) is inserted into the inner side of the corresponding limiting groove (31).

7. The anti-splash spray washing equipment for workpieces according to claim 1, characterized in that: The outer platform (5) has an upper T-shaped groove (33) on both the front and rear sides, and the lower platform (7) has a lower T-shaped groove (34) on the rear side. Both ends of the upper T-shaped groove (33) and the lower T-shaped groove (34) are fixedly connected with right-angled plates (35) with inclined surfaces.

8. The anti-splash spray cleaning equipment for workpieces according to claim 1, characterized in that: A lower drive motor (36) is fixedly connected to the side wall of the flip frame (6). The output end of the lower drive motor (36) passes through the inside of the flip frame (6) and is fixedly connected to the side wall of the outer platform (5). A lifter (37) is fixedly connected to the front side of the spray washing cabinet (1). The moving frame (14) is fixedly connected to the lifting end of the lifter (37). A waterproof battery (40) is fixedly connected through the front side of the flip frame (6). The waterproof battery (40) provides power to the lower drive motor (36).

9. The anti-splash spray washing equipment for workpieces according to claim 1, characterized in that: The top of the outer platform (5) has several threaded holes (38), and two pairs of threaded holes (38) are threaded with positioning pins (39) inside.

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