Detection tool for detecting sealing performance of cold disc

Abstract

The detection tool comprises a vacuum cavity, an air injection opening is formed in the vacuum cavity, a cold disc body is connected in the vacuum cavity, the air injection opening is covered with the cold disc body, the vacuum cavity is connected with a vacuum cover plate, a detection cavity is formed between the vacuum cavity and the vacuum cover plate, and the detection cavity is connected with the vacuum cover plate. The cold disc body is arranged in the detection cavity, the cold disc body is in sealed connection with the vacuum cavity, the detection cavity is divided into an air injection cavity and a vacuum cavity by the cold disc body, a detection unit capable of detecting air in the vacuum cavity is connected in the vacuum cavity, and the air injection cavity is communicated with the air injection opening. According to the detection tool for detecting the sealing performance of the cold disc, the sealing performance of the cold disc can be rapidly and accurately detected, and the detection efficiency is improved.

Description

A testing fixture for detecting the sealing performance of cold plates Technical Field

[0001] This invention relates to the field of refrigeration plate technology, and in particular to a testing fixture for detecting the sealing performance of refrigeration plates. Background Technology

[0002] In the application of wafer cooling pads, there are scenarios where they are used in a vacuum environment (maintaining a vacuum environment inside the cooling pad cavity). The surface of the cooling pad needs to have an air vent that connects to the bottom of the cooling pad, and a stainless steel air pipe needs to be welded to the bottom.

[0003] For example, publication number "CN215896344U" discloses a "semiconductor process equipment and its wafer storage chamber." The wafer storage chamber includes: a chamber with an internal accommodating space; a cooling pad located within the accommodating space, the cooling pad including opposing first and second surfaces, the first surface capable of supporting the wafer; a lifting ring surrounding the cooling pad, configured to move in a first direction perpendicular to the first surface; a first support assembly; and a second support assembly, both connected to the lifting ring. Both the first and second support assemblies include support portions for supporting the wafer, and the support portions of the first and second support assemblies are spaced apart in the first direction. In practical applications, welding at the solder joints poses a risk of leakage, and the machining accuracy of the plane at the bottom of the cold pad and the sealing groove can affect the sealing effect. Summary of the Invention

[0004] In view of the problem mentioned in the background art that the existing technology requires testing the sealing performance of cold plates, the present invention provides a testing fixture for testing the sealing performance of cold plates, which can quickly and accurately test the sealing performance of cold plates and improve testing efficiency.

[0005] To achieve the above objectives, the present invention adopts the following technical solution.

[0006] A testing fixture for detecting the sealing performance of a cold plate includes a vacuum chamber with an air jet opening inside. A cold plate body is connected to the vacuum chamber and covers the air jet opening. A vacuum cover plate is connected to the vacuum chamber, forming a testing chamber between the vacuum chamber and the vacuum cover plate. The cold plate body is disposed within the testing chamber and is sealed to the vacuum chamber. The cold plate body divides the testing chamber into an air jet chamber and a vacuum chamber. A detection unit capable of detecting gas in the vacuum chamber is connected inside the vacuum chamber, and the air jet chamber is connected to the air jet opening. In the application of wafer cooling pads, there are scenarios where they are used in a vacuum environment (maintaining a vacuum environment inside the cooling pad cavity). The surface of the cooling pad needs to have vent holes connected to the bottom, and a stainless steel gas pipe needs to be welded to the bottom. This welding poses a risk of leakage. Furthermore, the machining accuracy of the flat surface and sealing groove on the bottom of the cooling pad affects the sealing effect. To solve these problems, this application provides a vacuum cavity and vacuum cover structure that can form a detection chamber. During use, the vacuum cover is placed and connected to the vacuum cavity to form the detection chamber. During detection, the cooling pad body is placed in the vacuum cavity, and the vacuum cover is placed over it. A gas vent is located at the bottom of the vacuum cavity. When placing the cooling pad body in the vacuum cavity, it needs to cover the gas vent to ensure proper gas flow. The testing chamber is divided into a jet chamber connected to the jet opening, and a vacuum chamber on the other side of the cold plate body away from the jet opening. The vacuum cover plate is equipped with a vacuum evacuation port. During the testing process, the vacuum chamber is evacuated. Since the vacuum chamber and the jet chamber are separated by the cold plate body, when the jet is injected, the gas (usually helium) will fill the jet chamber. If there is a leak at the connection between the cold plate body and the vacuum chamber or at the welding point of the cold plate body itself, the gas in the jet chamber will leak into the vacuum chamber. A detection unit is connected in the vacuum chamber. The detection unit can detect the gas in the vacuum chamber. When helium is injected into the jet chamber, the detection unit's detection data is the helium leakage rate value, thereby determining the sealing performance of the cold plate body. The above structure enables rapid detection of the airtightness and connection status of the cold plate body, making the detection method faster and more accurate. By evacuating the vacuum chamber, the detection accuracy in subsequent testing processes can be improved. Furthermore, a pressure difference can be created on both sides of the cold plate body, allowing the gas in the jet chamber to enter the vacuum chamber more quickly through the leak point (if a leak point exists), thereby ensuring the accuracy of the detection.

[0007] Preferably, a diaphragm is detachably connected to the jet opening, and the diaphragm can elastically deform towards or away from the cold plate body. The diaphragm on the jet opening, through its connection to the jet opening, allows the injected gas to quickly fill the jet chamber, reducing the proportion of gas overflowing from the jet chamber, improving the detection accuracy of subsequent detection units, and increasing the gas filling efficiency. Furthermore, by setting the diaphragm, operators can compress the internal gas through it, helping the internal gas to diffuse and expand. When there is a leak point on the cold plate body, during the compression of the diaphragm, under the vacuum negative pressure of the vacuum chamber, the gas can quickly enter the vacuum chamber through the leak point. The compression of the diaphragm can simulate the impact effect of the gas, thereby increasing the leakage amount and leakage efficiency even in the presence of a leak point, thus ensuring the detection accuracy of the detection unit.

[0008] Preferably, a rigid base is provided on the tympanic membrane, and the rigid base has an air outlet and an air inlet. Rubber outlet plugs and inlet plugs are respectively connected to the air outlet and inlet. The rigid base on the tympanic membrane provides support, and the air inlet and outlet on the rigid base allow the air injected into the helium to be expelled from the air chamber through the air inlet and outlet during use, ensuring the purity of the helium in the air chamber and improving detection accuracy. Placing the air inlet and outlet on the rigid base improves stability during subsequent operation. The rubber inlet plug on the air inlet and the rubber outlet plug on the air outlet allow the internal helium to be preserved by blocking the air inlet and outlet after the air injection is completed. Furthermore, squeezing the tympanic membrane increases the internal gas movement, improving the detection efficiency and accuracy of the detection unit.

[0009] Preferably, the cold plate body includes a welding section, on which a welding tube is welded. The welding tube extends from the air jet opening, and the diaphragm is provided with a clearance opening through which the welding tube can pass. The clearance opening and the welding tube are sealed together. A connecting tube is needed on the cold plate body, and it is connected to the cold plate body by welding. The connection point is the welding section, and the welded tube is the welding pipe. Because the two are welded together, leakage points are prone to occur during the welding process. Due to the relatively long structure of the welding tube, a clearance opening is provided on the diaphragm. The sealing performance in the air jet chamber is improved through the sealing connection between the clearance opening and the welding tube.

[0010] Preferably, a sealing membrane is provided on the clearance opening, and a clamp is fitted onto the sealing membrane. The clamp and the welded pipe hold the sealing membrane together, and the deformable deformation of the sealing membrane is greater than the elastic deformation of the diaphragm. By providing a sealing membrane on the clearance opening, the sealing membrane can be fitted onto the welded pipe. A clamp is fitted onto the outside of the sealing membrane, and the clamp holds the sealing membrane onto the welded pipe. Furthermore, by setting the deformable deformation of the sealing membrane to be greater than the elastic deformation of the diaphragm, excessive tensile force can be avoided at the connection between the sealing membrane and the welded pipe during the expansion and contraction of the diaphragm, ensuring the stability of the connection between the welded pipe and the sealing membrane.

[0011] Preferably, the tympanic membrane includes a sealing edge, and the air jet opening has a stepped bottom edge. A locking edge is detachably connected to the stepped bottom edge, and the sealing edge is clamped between the stepped bottom edge and the locking edge. The sealing edge on the tympanic membrane is adapted to the shape of the air jet opening, and the stepped bottom edge on the air jet opening forms a stepped structure. During connection, the sealing edge of the tympanic membrane is mated to the stepped bottom edge, and the locking edge is connected. The sealing edge is clamped between the locking edge and the stepped bottom edge, and the connection is secured by bolts to ensure stability, thereby improving the stability and reliability of the connection.

[0012] Preferably, the tympanic membrane includes several staggered layers, each staggered layer comprising a fixing layer and a compression layer, the fixing layer and the compression layer being staggered and connected by an elastic fold layer. Several staggered layers are provided on the tympanic membrane, each staggered with the others. Each staggered layer includes a fixing layer and a compression layer. The fixing layer is connected to the jet opening and remains fixed, while the compression layer can be compressed. The compression effect of the compression layer compresses the space within the jet cavity. The elastic fold layer between the compression layer and the fixing layer ensures the free movement of the compression layer relative to the fixing layer. Furthermore, when there are no leaks in the jet cavity, the elastic deformation of the elastic fold layer adapts to the flow of gas.

[0013] Preferably, the compression layer comprises several sub-layers, with elastic folds between each sub-layer. The dimensions of each sub-layer decrease sequentially in the direction away from the fixed layer, and the central sub-layer is compressed to form a tower-like structure. The compression layer includes multiple sub-layers, each with different dimensions. The dimensions of the sub-layers decrease sequentially in the direction away from the fixed layer, thus forming a ripple-like structure with outer rings surrounding inner rings. Elastic folds are also provided between each sub-layer, allowing each sub-layer to move relatively independently. Furthermore, when the compression amplitude is large, the elastic folds can also drive adjacent sub-layers to move synchronously. Therefore, after the central sub-layer is compressed, it can sequentially drive adjacent sub-layers to move to different degrees. The sub-layers farther from the center have smaller movements, while those closer to the center have larger movements, thus forming a tower-like structure. The above-described operational settings in this application enable a smooth compression effect during the compression of the gas inside the jet chamber. Initially, the central split layer is compressed. Since the compression amplitude of the central split layer is insufficient to drive the elastic pleats to apply elastic force to the adjacent split layers, only the central split layer is displaced, resulting in a small compression amount. Subsequently, as the central split layer is continuously compressed, the adjacent split layers are sequentially driven to move, thus gradually producing a progressive compression effect. This reduces the frequent expansion of the elastic pleats caused by large-area rapid compression, which affects the service life of the tympanic membrane, while ensuring the progressiveness of the compression effect. Preferably, the jet opening is set as a circular hole structure, so the fixed layer and each split layer are annular structures. After the central split layer is compressed, a tower-shaped compression layer structure is formed with staggered arrangement in the axial direction. The individual split layers within the compression layer are also staggered in the radial direction, presenting an outer ring enclosing an inner ring arrangement.

[0014] Preferably, the vacuum chamber is provided with several connection holes, and the cold plate body is provided with through holes. A screw rod capable of passing through the through holes and connecting to the connection holes is also provided on the cold plate body. By providing connection holes in the vacuum chamber, where the screw rod can be connected, and the screw rod can pass through the through holes in the cold plate body, the cold plate body is fixedly connected to the vacuum chamber by the screw rod, ensuring the stability of the connection.

[0015] Preferably, both the cold plate body and the vacuum cover are provided with sealing grooves capable of accommodating the sealing ring. The sealing grooves on both the cold plate body and the vacuum cover ensure a tight seal at the connection point, thereby improving the accuracy of the detection.

[0016] The beneficial effects of the present invention are as follows: (1) It can improve the detection accuracy and detection efficiency of the cold plate body, and at the same time, the gas flow can be guaranteed by the pressure difference generated between the vacuum chamber and the jet chamber; (2) By setting the diaphragm and the split layer, the gas flow in the jet chamber can be further improved, and the gas compression can be guaranteed to show a gradually increasing effect. Attached Figure Description

[0017] Figure 1 is an exploded view of the present invention.

[0018] Figure 2 is a cross-sectional axonometric view of the present invention.

[0019] Figure 3 is a partial cross-sectional view of Example 2.

[0020] Figure 4 is a partial cross-sectional view of Example 3.

[0021] Figure 5 is a partial isometric view of Example 4.

[0022] In the diagram: 1. Vacuum chamber, 11. Jet opening, 111. Step bottom edge, 112. Locking edge, 12. Connecting hole; 2. Cold plate body, 21. Welding part, 22. Welding tube, 23. Perforation, 24. Screw; 3. Vacuum cover plate, 31. Ejection hole; 4. Detection chamber, 41. Jet chamber, 42. Vacuum chamber; 5. Drum, 51. Rigid seat, 511. Air outlet, 512. Air inlet, 513. Rubber air outlet plug, 514. Rubber air inlet plug, 52. Clearance opening, 53. Sealing membrane, 54. Clamp, 55. Edge sealing, 56. Misaligned layering, 561. Fixed layer, 562. Compression layer, 563. Elastic pleated layer, 564. Split layer; 6. Sealing groove. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0024] Example 1: As shown in Figures 1 and 2, a testing fixture for detecting the sealing performance of a cold plate includes a vacuum chamber 1, an air jet opening 11 inside the vacuum chamber 1, a cold plate body 2 connected inside the vacuum chamber 1, the cold plate body 2 covering the air jet opening 11, a vacuum cover plate 3 connected to the vacuum chamber 1, and a testing chamber 4 formed between the vacuum chamber 1 and the vacuum cover plate 3. The cold plate body 2 is disposed inside the testing chamber 4 and is sealed to the vacuum chamber 1. The cold plate body 2 divides the testing chamber 4 into an air jet chamber 41 and a vacuum chamber 42. A detection unit capable of detecting the gas in the vacuum chamber 42 is connected inside the vacuum chamber 42, and the air jet chamber 41 is connected to the air jet opening 11. In the application of wafer cooling pads, there are scenarios where they are used in a vacuum environment (maintaining a vacuum environment inside the cooling pad cavity). The surface of the cooling pad needs to have vent holes connected to the bottom, and a stainless steel gas pipe needs to be welded to the bottom. This welding poses a risk of leakage. Furthermore, the machining accuracy of the flat surface of the bottom of the cooling pad and the sealing groove 6 will affect the sealing effect. To solve these problems, this application provides a vacuum chamber 1 and a vacuum cover plate 3 structure that can form a detection chamber 4. During use, the vacuum cover plate 3 is placed and connected to the vacuum chamber 1 to form the detection chamber 4. During detection, the cooling pad body 2 is placed in the vacuum chamber 1, and the vacuum cover plate 3 is placed over it. A gas outlet 11 is provided at the bottom of the vacuum chamber 1. When the cooling pad body 2 is placed in the vacuum chamber 1, it needs to cover the gas outlet 11, thus dividing the detection chamber 4 into a gas outlet chamber 41 connected to the gas outlet 11. The measuring chamber 4 is a vacuum chamber 42 on the other side of the cold plate body 2 away from the jet opening 11. The vacuum cover plate 3 is provided with a vacuum evacuation hole 31. During the detection process, the vacuum chamber 42 is evacuated. Since the vacuum chamber 42 and the jet chamber 41 are separated by the cold plate body 2, when the jet opening 11 is sprayed, the gas (usually helium) will fill the jet chamber 41. If there is a leak at the connection between the cold plate body 2 and the vacuum chamber 1 or at the welding point of the cold plate body 2 itself, the gas in the jet chamber 41 will leak into the vacuum chamber 42. A detection unit is connected in the vacuum chamber 42 (in this embodiment, the detection unit is connected to the vacuum chamber 42 through the evacuation hole 31). The detection unit can detect the gas in the vacuum chamber 42. When helium is injected into the jet chamber 41, the detection data of the detection unit is the helium leakage rate value, thereby determining the sealing performance of the cold plate body. The above structure enables rapid detection of the airtightness and connection status of the cold plate body 2, making the detection method faster and more accurate. By evacuating the vacuum chamber 42, the detection accuracy in subsequent detection processes can be improved. Furthermore, a pressure difference can be formed on both sides of the cold plate body 2, allowing the gas in the jet chamber 41 to enter the vacuum chamber 42 more quickly through the leak point (if a leak point exists), thereby ensuring the accuracy of the detection.

[0025] As shown in Figures 1 and 2, the vacuum chamber 1 has several connecting holes 12, and the cold plate body 2 has through holes 23. A screw 24, capable of passing through the through holes 23 and connecting to the connecting holes 12, is also provided on the cold plate body 2. The connecting holes 12 on the vacuum chamber 1 allow the screw 24 to be connected, and the screw 24 can pass through the through holes 23 on the cold plate body 2. This allows the cold plate body 2 to be fixedly connected to the vacuum chamber 1 via the screw 24, ensuring the stability of the connection.

[0026] As shown in Figures 1 and 2, both the cold plate body 2 and the vacuum cover plate 3 are provided with sealing grooves 6 that can accommodate the sealing ring. The sealing grooves 6 on the cold plate body 2 and the vacuum cover plate 3 ensure the sealing effect at the connection point through the connection between the sealing grooves 6 and the sealing ring, thereby improving the accuracy of the detection.

[0027] Example 2: As shown in Figure 3, a diaphragm 5 is detachably connected to the jet opening 11. The diaphragm 5 can elastically deform towards or away from the cold plate body 2. The diaphragm 5 on the jet opening 11, through its connection to the jet opening 11, allows the injected gas to quickly fill the jet chamber 41, reducing the proportion of gas overflowing from the jet chamber 41, improving the detection accuracy of subsequent detection units, and increasing the gas filling efficiency. Furthermore, by setting the diaphragm 5, operators can compress the internal gas through the diaphragm 5, helping the internal gas to diffuse and expand. When there is a leak point on the cold plate body 2, during the compression of the diaphragm 5, under the vacuum negative pressure of the vacuum chamber 42, the gas can quickly enter the vacuum chamber 42 through the leak point. The compression of the diaphragm 5 can simulate the impact effect of the gas, thereby increasing the leakage amount and leakage efficiency even with a leak point, thus ensuring the detection accuracy of the detection unit.

[0028] As shown in Figure 3, a rigid seat 51 is provided on the tympanic membrane 5. An air outlet 511 and an air inlet 512 are provided on the rigid seat 51. A rubber air outlet plug 513 and a rubber air inlet plug 514 are respectively connected to the air outlet 511 and the air inlet 512. A rigid base 51 is provided on the diaphragm 5, the material of which provides a certain support effect. An air inlet 512 and an air outlet 511 are provided on the rigid base 51. Since the diaphragm 5 blocks the air jet opening 11, during use, the injected helium gas is discharged from the air jet chamber 41 through the air inlet 512 and the air outlet 511, ensuring the purity of the helium gas in the air jet chamber 41 and improving the detection accuracy. The placement of the air inlet 512 and the air outlet 511 on the rigid base 51 can improve the stability in subsequent working processes. A rubber air inlet plug 514 is provided on the air inlet 512 and a rubber air outlet plug 513 is provided on the air outlet 511. After the air jet is finished, the internal helium gas can be preserved by blocking the air inlet 512 and the air outlet 511, and the gas flow inside can be improved by squeezing the diaphragm 5, thereby improving the detection efficiency and accuracy of the detection unit.

[0029] As shown in Figure 3, the cold plate body 2 includes a welding part 21, on which a welding tube 22 is welded. The welding tube 22 extends out of the jet opening 11. The diaphragm 5 is provided with a clearance opening 52 through which the welding tube 22 can pass, and the clearance opening 52 is sealed to the welding tube 22. A connecting tube is needed on the cold plate body 2, and it is connected to the cold plate body 2 by welding. The connection point is the welding part 21, and the welded tube is the welding tube 22. Since the two are welded together, leakage points are prone to occur during the welding process. Because the welding tube 22 has a relatively long structure, a clearance opening 52 is provided on the diaphragm 5. The sealing connection between the clearance opening 52 and the welding tube 22 improves the sealing performance of the jet chamber 41.

[0030] As shown in Figure 3, a sealing membrane 53 is provided on the clearance opening 52, and a clamp 54 is fitted onto the sealing membrane 53. The clamp 54 and the welded pipe 22 clamp the sealing membrane 53. The deformable deformation of the sealing membrane 53 is greater than the elastic deformation of the diaphragm 5. By providing a sealing membrane 53 on the clearance opening 52, the sealing membrane 53 can be fitted onto the welded pipe 22. The clamp 54 is fitted onto the outside of the sealing membrane 53, clamping the sealing membrane 53 onto the welded pipe 22. The fact that the deformable deformation of the sealing membrane 53 is greater than the elastic deformation of the diaphragm 5 prevents excessive tensile force from being generated at the connection between the sealing membrane 53 and the welded pipe 22 during the expansion and contraction of the diaphragm 5, thus ensuring the stability of the connection between the welded pipe 22 and the sealing membrane 53.

[0031] As shown in Figure 3, the tympanic membrane 5 includes a sealing edge 55, and a stepped bottom edge 111 is provided on the air jet opening 11. A locking edge 112 is detachably connected to the stepped bottom edge 111, and the sealing edge 55 is clamped between the stepped bottom edge 111 and the locking edge 112. The sealing edge 55 is provided on the tympanic membrane 5, and the shape of the sealing edge 55 is adapted to the shape of the air jet opening 11. The stepped bottom edge 111 is provided on the air jet opening 11, thus forming a stepped structure. During connection, the sealing edge 55 of the tympanic membrane 5 is mated to the stepped bottom edge 111, and the locking edge 112 is connected. The sealing edge 55 is clamped between the locking edge 112 and the stepped bottom edge 111, and the connection is secured by bolts to ensure the stability of the connection, thereby improving the stability and reliability of the connection.

[0032] The system includes a vacuum chamber 1, with a jet opening 11 on one side. A cold plate body 2 is fixed inside the vacuum chamber 1, completely covering the jet opening 11. A vacuum cover plate 3 is connected to the side of the vacuum chamber 1 away from the jet opening 11, forming a detection chamber 4. The cold plate body 2 is placed inside the detection chamber 4, and a sealing connection is established between the cold plate body 2 and the vacuum chamber 1, with a sealing ring between them. The cold plate body 2 divides the detection chamber 4 into a jet chamber 41 and a vacuum chamber 42. A detection unit capable of detecting gas in the vacuum chamber 42 is connected inside the vacuum chamber 42. The jet chamber 41 is connected to the jet opening 11, and gas in the jet chamber 41 is blocked from entering the vacuum chamber 42 by the cold plate body 2. Multiple connection holes 12 are provided inside the vacuum chamber 1, and corresponding through holes 23 are provided on the cold plate body 2. A screw 24 that can pass through the through holes 23 and connect to the connection holes 12 is provided on the cold plate body 2. A sealing groove 6 is provided on the cold plate body 2, and a sealing groove 6 is also provided on the vacuum cover plate 3. A sealing ring is provided inside the sealing groove 6.

[0033] Example 3: As shown in Figure 4, the tympanic membrane 5 includes several staggered layers 56, each including a fixing layer 561 and a compression layer 562. The fixing layer 561 and the compression layer 562 are staggered, and an elastic pleat 563 connects the fixing layer 561 and the compression layer 562. Several staggered layers 56 are provided on the tympanic membrane 5, and each staggered layer 56 is staggered with the others. Each staggered layer 56 includes a fixing layer 561 and a compression layer 562. The fixing layer 561 is connected to the jet opening 11 and remains fixed. The compression layer 562 can be compressed. Through the compression effect of the compression layer 562, the space in the jet chamber 41 can be squeezed. Through the elastic pleat 563 between the compression layer 562 and the fixing layer 561, the free movement of the compression layer 562 relative to the fixing layer 561 can be ensured. Furthermore, when there is no leakage point in the jet chamber 41, the elastic deformation of the elastic pleat 563 can adapt to the flow of gas.

[0034] In addition to the above-described structure, the diaphragm 5 in this embodiment also includes a sealing edge 55. A stepped bottom edge 111 is provided on the air jet opening 11, and a locking edge 112 is threaded onto the stepped bottom edge 111. The sealing edge 55 is clamped between the stepped bottom edge 111 and the locking edge 112. Both the locking edge 112 and the stepped bottom edge 111 are annular structures. The diaphragm 5 is a disc structure overall, with the sealing edge 55 clamped between the annular stepped bottom edge 111 and the locking edge 112. The diaphragm 5 undergoes elastic deformation on the side facing or away from the cold plate body 2 and can self-reset through elasticity. A rigid seat 51 is provided on the diaphragm 5. An air outlet 511 and an air inlet 512 are provided on the rigid seat 51. A rubber air outlet plug 513 is connected to the air outlet 511, and a rubber air inlet plug 514 is connected to the air inlet 512. The cold plate body 2 includes a welding part 21, on which a welding tube 22 is welded. The welding tube 22 passes through the air jet opening 11. Therefore, an avoidance opening 52 is provided on the diaphragm 5, which can pass through the welding tube 22. Furthermore, a sealing membrane 53 is provided on the avoidance opening 52. The sealing membrane 53 has a leather-like structure. The sealing membrane 53 is connected to the welding tube 22 by a rear connecting clamp 54, and the deformable deformation of the sealing membrane 53 is controlled to be greater than the elastic deformation of the diaphragm 5.

[0035] The system also includes a vacuum chamber 1, with a jet opening 11 on one side. A cold plate body 2 is fixed inside the vacuum chamber 1, completely covering the jet opening 11. A vacuum cover plate 3 is connected to the side of the vacuum chamber 1 away from the jet opening 11, forming a detection chamber 4. The cold plate body 2 is placed inside the detection chamber 4, and a sealed connection is established between the cold plate body 2 and the vacuum chamber 1, with a sealing ring between them. The cold plate body 2 divides the detection chamber 4 into a jet chamber 41 and a vacuum chamber 42. A detection unit capable of detecting gas in the vacuum chamber 42 is connected inside the vacuum chamber 42. The jet chamber 41 is connected to the jet opening 11, and gas in the jet chamber 41 is blocked from entering the vacuum chamber 42 by the cold plate body 2. Multiple connection holes 12 are provided inside the vacuum chamber 1, and corresponding through holes 23 are provided on the cold plate body 2. A screw 24 that can pass through the through holes 23 and connect to the connection holes 12 is provided on the cold plate body 2. A sealing groove 6 is provided on the cold plate body 2, and a sealing groove 6 is also provided on the vacuum cover plate 3. A sealing ring is provided inside the sealing groove 6.

[0036] Example 4: As shown in Figure 5, the compression layer 562 includes several separate layers 564, and elastic pleats 563 are provided between each separate layer 564. The size of each separate layer 564 decreases sequentially in the direction away from the fixed layer 561, and the split layer 564 at the center is compressed to form a tower-shaped compression layer 562. The compression layer 562 includes multiple separate layers 564, each with different dimensions. The dimensions of the separate layers 564 decrease sequentially in the direction away from the fixed layer 561, thus forming a ripple-like structure with an outer ring enclosing an inner ring. Elastic folds 563 are also provided between each separate layer 564, allowing each separate layer 564 to move relatively independently. Furthermore, when the compression amplitude is large, the elastic folds 563 can also drive adjacent separate layers 564 to move synchronously. Therefore, after the central separate layer 564 is compressed, it can sequentially drive adjacent separate layers 564 to move to different degrees. The further away from the center, the smaller the movement amplitude of the separate layer 564; the closer to the center, the larger the movement amplitude of the separate layer 564, thus forming a tower-like structure in the compression layer 562. The above-described operational settings in this application enable a smooth compression effect during the compression of the gas inside the jet chamber 41. Initially, the central split layer 564 is compressed. Since the compression amplitude of the central split layer 564 is insufficient to cause the elastic pleats 563 to apply elastic force to the adjacent split layers 564, only the central split layer 564 experiences displacement, resulting in a small compression amount. Subsequently, as the central split layer 564 is continuously compressed, the adjacent split layers 564 are sequentially activated, gradually generating a smooth compression effect. The progressive compression effect reduces the frequent expansion of the elastic folds 563 caused by rapid compression over a large area, which affects the service life of the diaphragm 5, while ensuring the gradual compression effect. Preferably, the air jet opening 11 is set as a circular hole structure, so the fixed layer 561 and each split layer 564 are annular structures. When the split layer 564 at the center is compressed, a tower-shaped compression layer 562 structure is formed with the split layers 564 in the axial direction being staggered. The split layers 564 in the compression layer 562 are also staggered in the radial direction, presenting an outer ring enclosing an inner ring arrangement.

[0037] In addition to the above-described structure, the diaphragm 5 in this embodiment also includes a sealing edge 55. A stepped bottom edge 111 is provided on the air jet opening 11, and a locking edge 112 is threaded onto the stepped bottom edge 111. The sealing edge 55 is clamped between the stepped bottom edge 111 and the locking edge 112. Both the locking edge 112 and the stepped bottom edge 111 are annular structures. The diaphragm 5 is a disc structure overall, with the sealing edge 55 clamped between the annular stepped bottom edge 111 and the locking edge 112. The diaphragm 5 undergoes elastic deformation on the side facing or away from the cold plate body 2 and can self-reset through elasticity. A rigid seat 51 is provided on the diaphragm 5. An air outlet 511 and an air inlet 512 are provided on the rigid seat 51. A rubber air outlet plug 513 is connected to the air outlet 511, and a rubber air inlet plug 514 is connected to the air inlet 512. The cold plate body 2 includes a welding part 21, on which a welding tube 22 is welded. The welding tube 22 passes through the air jet opening 11. Therefore, an avoidance opening 52 is provided on the diaphragm 5, which can pass through the welding tube 22. Furthermore, a sealing membrane 53 is provided on the avoidance opening 52. The sealing membrane 53 has a leather-like structure. The sealing membrane 53 is connected to the welding tube 22 by a rear connecting clamp 54, and the deformable deformation of the sealing membrane 53 is controlled to be greater than the elastic deformation of the diaphragm 5.

[0038] The system also includes a vacuum chamber 1, with a jet opening 11 on one side. A cold plate body 2 is fixed inside the vacuum chamber 1, completely covering the jet opening 11. A vacuum cover plate 3 is connected to the side of the vacuum chamber 1 away from the jet opening 11, forming a detection chamber 4. The cold plate body 2 is placed inside the detection chamber 4, and a sealed connection is established between the cold plate body 2 and the vacuum chamber 1, with a sealing ring between them. The cold plate body 2 divides the detection chamber 4 into a jet chamber 41 and a vacuum chamber 42. A detection unit capable of detecting gas in the vacuum chamber 42 is connected inside the vacuum chamber 42. The jet chamber 41 is connected to the jet opening 11, and gas in the jet chamber 41 is blocked from entering the vacuum chamber 42 by the cold plate body 2. Multiple connection holes 12 are provided inside the vacuum chamber 1, and corresponding through holes 23 are provided on the cold plate body 2. A screw 24 that can pass through the through holes 23 and connect to the connection holes 12 is provided on the cold plate body 2. A sealing groove 6 is provided on the cold plate body 2, and a sealing groove 6 is also provided on the vacuum cover plate 3. A sealing ring is provided inside the sealing groove 6.

Claims

1. A testing fixture for detecting the sealing performance of cold plates, characterized in that, The device includes a vacuum chamber with a jet opening inside. A cold plate body is connected to the vacuum chamber and covers the jet opening. A vacuum cover plate is connected to the vacuum chamber, forming a detection chamber between the vacuum chamber and the vacuum cover plate. The cold plate body is disposed within the detection chamber and is sealed to the vacuum chamber. The cold plate body divides the detection chamber into a jet chamber and a vacuum chamber. A detection unit capable of detecting gas in the vacuum chamber is connected within the vacuum chamber. The jet chamber is connected to the jet opening.

2. The testing fixture for detecting the sealing performance of a cold plate according to claim 1, characterized in that, A diaphragm is detachably connected to the jet opening, and the diaphragm is capable of elastic deformation toward or away from the cold plate body.

3. The testing fixture for detecting the sealing performance of a cold plate according to claim 2, characterized in that, A rigid seat is provided on the tympanic membrane, and an air outlet and an air inlet are provided on the rigid seat. A rubber air outlet plug and a rubber air inlet plug are respectively connected to the air outlet and the air inlet.

4. The testing fixture for detecting the sealing performance of a cold plate according to claim 2, characterized in that, The cold plate body includes a welding part, on which a welding tube is welded. The welding tube extends out of the air jet opening. The diaphragm is provided with a clearance opening that allows the welding tube to pass through. The clearance opening is sealed to the welding tube.

5. The testing fixture for detecting the sealing performance of a cold plate according to claim 4, characterized in that, A sealing membrane is provided on the clearance opening, and a clamp is fitted on the sealing membrane. The clamp and the welded pipe hold the sealing membrane together. The deformable deformation of the sealing membrane is greater than the elastic deformation of the diaphragm.

6. The testing fixture for detecting the sealing performance of a cold plate according to claim 2, characterized in that, The tympanic membrane includes a sealing edge, and the air jet opening is provided with a stepped bottom edge. A locking edge is detachably connected to the stepped bottom edge, and the sealing edge is clamped between the stepped bottom edge and the locking edge.

7. The testing fixture for detecting the sealing performance of a cold plate according to claim 2, characterized in that, The tympanic membrane includes several misaligned layers, each misaligned layer including a fixing layer and a compression layer, the fixing layer and the compression layer being misaligned, and an elastic fold layer connecting the fixing layer and the compression layer.

8. The testing fixture for detecting the sealing performance of a cold plate according to claim 7, characterized in that, The compression layer includes several separate layers, with elastic folds between each separate layer. The dimensions of each separate layer decrease sequentially in the direction away from the fixed layer, and the separate layer at the center is compressed to form a tower-shaped compression layer.

9. A testing fixture for detecting the sealing performance of a cold plate according to any one of claims 1-8, characterized in that, The vacuum chamber is provided with several connection holes, the cold plate body is provided with through holes, and the cold plate body is provided with screws that can pass through the through holes and connect to the connection holes.

10. A testing fixture for detecting the sealing performance of a cold plate according to any one of claims 1-8, characterized in that, Both the cold plate body and the vacuum cover are provided with sealing grooves that can accommodate the sealing rings.

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