Vibration self-sensing device based on piezoelectric effect and working method

Abstract

The invention discloses a vibration self-sensing device based on a piezoelectric effect and a working method, relates to the technical field of vibration isolation, and solves the problems that a traditional control system is low in integration level, large in size and weight, serious in sensing and driving signal coupling interference and difficult to realize high-frequency response closed-loop control. The lower end of a piezoelectric actuator is connected with a connecting copper block, and a piezoelectric sensor is arranged in a groove in the bottom of the connecting copper block; the piezoelectric actuator comprises an actuator rotor, an actuator shell and a piezoelectric plate pile, the actuator shell is of a cylindrical structure, the actuator rotor and the piezoelectric plate pile are arranged in the actuator shell, and the piezoelectric plate pile is arranged below the actuator rotor and drives the actuator rotor to move up and down; and the piezoelectric patch stack is in signal connection with the piezoelectric sensor. According to the invention, the piezoelectric sensor and the piezoelectric actuator are deeply fused, so that a single piezoelectric element has dual functions of execution and sensing. When the actuator applies acting force, the sensor can synchronously detect micro-deformation or counter-acting force of the system in situ, and vibration isolation is better carried out.

Description

A vibration self-sensing device based on the piezoelectric effect and its working method Technical Field

[0001] This invention relates to the field of vibration isolation technology, specifically to a vibration self-sensing device and its working method based on the piezoelectric effect. Background Technology

[0002] In cutting-edge fields such as high-end equipment manufacturing, precision instruments, aerospace, and intelligent robotics, the demand for high-precision, high-bandwidth active control and condition monitoring is becoming increasingly urgent. Traditional control systems typically design sensors and actuators separately. This discrete structure has inherent limitations such as low system integration, large size and weight, severe coupling interference between sensing and drive signals, and difficulty in achieving high-frequency response closed-loop control within a limited space. Summary of the Invention

[0003] To address the problems mentioned above, such as low system integration, large size and weight, severe coupling interference between sensing and driving signals, and difficulty in achieving high-frequency response closed-loop control caused by the separation of sensors and actuators in traditional control systems, this invention proposes a vibration self-sensing device and its operating method based on the piezoelectric effect. This invention deeply integrates a piezoelectric sensor and a piezoelectric actuator through a unified structure, enabling a single piezoelectric element to simultaneously possess the dual functions of "actuation" and "sensing." When the actuator applies force, the sensor can synchronously and in-situ detect the system's micro-deformation or reaction force, thus achieving better vibration isolation.

[0004] This invention proposes a vibration self-sensing device based on the piezoelectric effect, specifically including a piezoelectric actuator, a connecting copper block, and a piezoelectric sensor. The lower end of the piezoelectric actuator is connected to the connecting copper block, and the piezoelectric sensor is disposed in a groove at the bottom of the connecting copper block. The piezoelectric actuator includes an actuator mover, an actuator housing, and a piezoelectric sheet stack. The actuator housing has a cylindrical structure, and the actuator mover and the piezoelectric sheet stack are disposed inside the actuator housing. The piezoelectric sheet stack is disposed below the actuator mover and drives the actuator mover to move up and down. The piezoelectric sheet stack and the piezoelectric sensor are connected by a signal.

[0005] Furthermore, the actuator mover is provided with a cylindrical pin, and a copper sheet is provided at the upper end of the cylindrical pin.

[0006] Furthermore, the actuator mover is provided with a through hole, a cylindrical pin is slidably disposed in the through hole, and several springs are disposed between the copper sheet and the upper surface of the actuator mover.

[0007] Furthermore, the piezoelectric sheet stack includes several piezoelectric structures and several flexible material sheets, with the piezoelectric structures and flexible material sheets arranged alternately.

[0008] Furthermore, the piezoelectric structure includes a combined ring and two double-sided piezoelectric sheets. The combined ring has a ring structure, and the two double-sided piezoelectric sheets are arranged in parallel inside the combined ring, with opposite polarization directions.

[0009] Furthermore, the double-sided piezoelectric sheet includes two piezoelectric sheets and a second copper sheet. The two piezoelectric sheets are symmetrically arranged on the upper and lower surfaces of the second copper sheet, and the polarization directions of the two piezoelectric sheets are the same.

[0010] Furthermore, the piezoelectric sensor includes a housing, a sensor copper block, a flexible material ring, a single-sided piezoelectric sheet, and a sensor outer shell; the housing is fastened into a groove on the upper surface of the sensor outer shell, and the sensor copper block is disposed in the cavity formed by the housing and the sensor outer shell; a flexible material ring is disposed between the outer ring of the sensor copper block and the housing; the single-sided piezoelectric sheet is disposed at the bottom of the groove at the upper end of the sensor outer shell, and the boss on the lower surface of the sensor copper block contacts the single-sided piezoelectric sheet.

[0011] Furthermore, several springs are provided between the upper surface of the sensor copper block and the cover.

[0012] Furthermore, a flexible material ring is provided on the protrusion on the lower surface of the sensor copper block.

[0013] A method for operating the above-mentioned vibration self-sensing device based on the piezoelectric effect includes the following steps: Step 1, the sensor housing receives vibration and moves relative to the sensor copper block; Step 2, the sensor copper block applies force to the single-sided piezoelectric sheet due to inertia, and the single-sided piezoelectric sheet generates a voltage signal; Step 3, the voltage signal is processed into a control signal and transmitted to the piezoelectric sheet stack, and the piezoelectric sheet stack deforms to drive the actuator mover to move up and down.

[0014] The beneficial effects of the vibration self-sensing device and working method based on the piezoelectric effect described in this invention are as follows: (1) The vibration self-sensing device and working method based on the piezoelectric effect described in this invention integrates sensing and driving functions into a single compact unit, which greatly simplifies the system structure, reduces space occupation, and provides a core hardware foundation for achieving high-performance closed-loop active vibration isolation in a small space. Since sensing and execution occur at the same physical location, the delay and path coupling of signal transmission in the traditional discrete structure are eliminated, and the system response speed is significantly improved. The obtained feedback signal is collected in situ at the point of action, which can more realistically reflect the actual action effect of the actuator and the instantaneous state of the controlled object, thereby effectively suppressing external interference and achieving higher precision control and more stable system performance.

[0015] (2) The vibration self-sensing device and working method based on the piezoelectric effect described in this invention has the advantage of high integration: the piezoelectric sensor and the piezoelectric actuator are directly connected through a connecting copper block, which is compact and conducive to realizing the integrated function of sensing and driving in a limited space.

[0016] (3) The vibration self-sensing device and working method based on piezoelectric effect described in this invention has the advantage of fast response speed: the piezoelectric material itself has millisecond-level response characteristics, and the integrated design can further reduce the signal transmission path and improve the overall dynamic performance of the system.

[0017] (4) The vibration self-sensing device and working method based on piezoelectric effect described in this invention have the advantages of high stiffness and good accuracy: the connecting copper block serves as a connecting part and has both structural support and force transmission functions, and the stacking design of the piezoelectric sheet stack can provide higher output force and displacement resolution.

[0018] (5) The vibration self-sensing device and working method based on the piezoelectric effect described in this invention has the advantage of self-sensing capability: the dual functions of driving and sensing are realized through the same piezoelectric unit, avoiding the coupling error of traditional separate sensors and actuators, which is conducive to realizing closed-loop control. Attached Figure Description

[0019] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0020] In the accompanying drawings: Figure 1 is a cross-sectional structural schematic diagram of a vibration self-sensing device based on the piezoelectric effect according to the present invention; Figure 2 is a structural schematic diagram of a double-sided piezoelectric sheet of a vibration self-sensing device based on the piezoelectric effect according to the present invention; Figure 3 is a structural schematic diagram of a piezoelectric sheet stack of a vibration self-sensing device based on the piezoelectric effect according to the present invention; Figure 4 is a structural schematic diagram of a flexible material sheet of a vibration self-sensing device based on the piezoelectric effect according to the present invention; Figure 5 is a working principle diagram of a vibration self-sensing device based on the piezoelectric effect according to the present invention; Figure 6 is a structural schematic diagram of a vibration self-sensing device based on the piezoelectric effect according to the present invention. Figure 7 is a schematic diagram of the structure of the sensor copper block of the vibration self-sensing device based on the piezoelectric effect according to the present invention; wherein: 1-copper sheet one, 2-cylindrical pin, 3-spring one, 4-actuator mover, 5-actuator housing, 6-combination ring, 7-flexible material sheet, 8-connecting copper block, 9-spring two, 10-sensor copper block, 11-flexible material ring one, 12-flexible material ring two, 13-single-sided piezoelectric sheet, 14-sensor housing, 15-piezoelectric sheet, 16-copper sheet two, 17-polarization direction, 18-double-sided piezoelectric sheet. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the present invention can be combined with each other. The described embodiments are merely some embodiments of the present invention, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0022] Specific Implementation Method 1: Refer to Figures 1-7 for a detailed description of this implementation method. This implementation method for a vibration self-sensing device based on the piezoelectric effect specifically includes a piezoelectric actuator, a connecting copper block, and a piezoelectric sensor. The lower end of the piezoelectric actuator is connected to the connecting copper block, and the piezoelectric sensor is disposed in a groove at the bottom of the connecting copper block. The piezoelectric actuator includes an actuator mover 4, an actuator housing 5, and a piezoelectric sheet stack. The actuator housing 5 has a cylindrical structure. The actuator mover 4 and the piezoelectric sheet stack are disposed inside the actuator housing 5. The piezoelectric sheet stack is located at the bottom of the inner side of the actuator housing 5, and the actuator mover 4 is positioned above and in contact with the piezoelectric sheet stack. The piezoelectric sheet stack drives the actuator mover 4 to move up and down. The piezoelectric sheet stack and the piezoelectric sensor are signal-connected. The piezoelectric sensor senses vibration and transmits the signal to the piezoelectric sheet stack, causing the piezoelectric sheet stack to deform according to the control signal.

[0023] The actuator mover 4 is provided with a through hole, and the cylindrical pin 2 is slidably disposed in the through hole. A copper sheet 1 is provided at the upper end of the cylindrical pin 2. Several springs 3 are provided between the copper sheet 1 and the upper surface of the actuator mover 4. The cylindrical pin 2 is used to transmit displacement, and the two springs 3 on both sides enable the copper sheet 1 to change angle, avoiding friction and wear caused by direct collision.

[0024] The piezoelectric sheet stack includes several piezoelectric structures and several flexible material sheets 7. The flexible material sheets 7 are disposed between two adjacent piezoelectric structures, forming an alternating arrangement. A flexible material sheet 7 is also disposed between the uppermost piezoelectric structure and the actuator mover 4.

[0025] The piezoelectric structure includes a combination ring 6 and two double-sided piezoelectric sheets 18. The combination ring 6 is a ring structure, and the two double-sided piezoelectric sheets 18 are arranged in parallel on the inner side of the combination ring 6. A flexible material ring is arranged on the outer side of the combination ring 6, which contacts the actuator housing 5. As shown in Figure 2, the double-sided piezoelectric sheet 18 includes two piezoelectric sheets 15 and a copper sheet 16. The two piezoelectric sheets 15 are symmetrically arranged on the upper and lower surfaces of the copper sheet 16, and the polarization directions of the two piezoelectric sheets 15 are the same. When the same voltage is applied to the upper and lower surfaces, one layer of the upper and lower piezoelectric sheets 15 elongates while the other layer contracts. This asymmetrical deformation causes the double-sided piezoelectric sheet 18 to bend and displace as a whole. The two double-sided piezoelectric sheets 18 of the same piezoelectric structure have opposite polarization directions. When voltage is applied, the double-sided piezoelectric sheet 18 bends. The other double-sided piezoelectric sheet 18 connected by the combination ring 6 bends in the opposite direction because of its opposite polarization direction. The force and displacement are transmitted through the flexible material sheet 7 placed between the piezoelectric structures.

[0026] The piezoelectric sensor includes a housing, a sensor copper block 10, a flexible material ring 11, a single-sided piezoelectric sheet 13, and a sensor shell 14. The housing is fastened to a groove on the upper surface of the sensor shell 14, and the sensor copper block 10 is disposed in the cavity formed by the housing and the sensor shell 14. A flexible material ring 11 is disposed between the outer ring of the sensor copper block 10 and the housing to limit the position of the sensor copper block 10 and ensure that the position of the sensor copper block 10 in the horizontal direction does not change relative to the sensor shell 14. The single-sided piezoelectric sheet 13 is disposed at the bottom of the groove at the upper end of the sensor shell 14, and the boss on the lower surface of the sensor copper block 10 contacts the single-sided piezoelectric sheet 13. When the piezoelectric sensor senses vibration, the sensor copper block 10 and the sensor shell 14 move relative to each other due to inertia, so that the sensor copper block 10 applies a certain force to the single-sided piezoelectric sheet 13.

[0027] Several springs 9 are provided between the upper surface of the sensor copper block 10 and the cover to ensure that the sensor copper block 10 can be displaced relative to the sensor piezoelectric sheet due to inertia, thereby applying force to the piezoelectric sheet.

[0028] A flexible material ring 12 is provided on the protrusion on the lower surface of the sensor copper block 10. The flexible material ring 12 contacts the single-sided piezoelectric sheet 13, protecting the single-sided piezoelectric sheet 13 and making the force exerted by the sensor copper block 10 on the single-sided piezoelectric sheet 13 gentler, thus providing buffering and protection. The flexible material rings 11 and 12 also prevent external dust, moisture, or other contaminants from entering the piezoelectric sensor, ensuring long-term stability and reliability.

[0029] A method for operating the aforementioned vibration self-sensing device based on the piezoelectric effect includes the following steps: Step 1: The ground vibration is directly transmitted to the sensor housing 14, which is in rigid contact with it. The sensor housing 14 receives the vibration, and the sensor copper block 10 moves relative to the sensor housing 14 due to inertia; Step 2: The sensor copper block 10 exerts a force on the single-sided piezoelectric sheet 13 due to inertia. Due to the positive piezoelectric effect, the single-sided piezoelectric sheet 13 is compressed, thereby generating a voltage signal that can reflect the vibration signal; Step 3: After processing, the voltage signal becomes a control signal for the actuator and is transmitted to the piezoelectric sheet stack. After receiving the control signal, the double-sided piezoelectric sheet 18 deforms to different degrees and drives the actuator mover 4 to move up and down. The generated force is transmitted through the cylindrical pin 2 and the copper sheet 1, thereby achieving the function of suppressing the vibration signal of the upper plate.

[0030] In summary, the piezoelectric effect-based vibration self-sensing device and its operating method described in this invention integrate sensing and actuation functions into a single compact unit, greatly simplifying the system structure and reducing space occupation. This provides a core hardware foundation for achieving high-performance closed-loop active vibration isolation in confined spaces. Since sensing and actuation occur at the same physical location, the signal transmission delay and path coupling inherent in traditional discrete structures are eliminated, significantly improving the system's response speed. The obtained feedback signal is acquired in situ at the point of application, more accurately reflecting the actual actuation effect of the actuator and the instantaneous state of the controlled object, thereby effectively suppressing external interference and achieving higher precision control and more stable system performance.

[0031] The vibration self-sensing device and working method based on the piezoelectric effect described in this invention have the advantage of high integration: the piezoelectric sensor and the piezoelectric actuator are directly connected through the connecting copper block 8, resulting in a compact structure that facilitates the integration of sensing and driving functions within a limited space.

[0032] The vibration self-sensing device and working method based on the piezoelectric effect described in this invention have the advantage of fast response speed: the piezoelectric material itself has millisecond-level response characteristics, and the integrated design can further reduce the signal transmission path and improve the overall dynamic performance of the system.

[0033] The vibration self-sensing device and working method based on the piezoelectric effect described in this invention have the advantages of high stiffness and good accuracy: the connecting copper block 8 serves as a connector and has both structural support and force transmission functions, and the stacking design of the piezoelectric sheet stack can provide high output force and displacement resolution.

[0034] The vibration self-sensing device and working method based on the piezoelectric effect described in this invention have the advantage of self-sensing capability: the dual functions of driving and sensing are realized through the same piezoelectric unit, avoiding the coupling error of traditional separate sensors and actuators, which is conducive to realizing closed-loop control.

[0035] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the invention. They can also be reasonable combinations of the features described in the above embodiments. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A vibration self-sensing device based on the piezoelectric effect, characterized in that: The device includes a piezoelectric actuator, a connecting copper block, and a piezoelectric sensor. The lower end of the piezoelectric actuator is connected to the connecting copper block, and the piezoelectric sensor is located in a groove at the bottom of the connecting copper block. The piezoelectric actuator includes an actuator mover (4), an actuator housing (5), and a piezoelectric sheet stack. The actuator housing (5) has a cylindrical structure. The actuator mover (4) and the piezoelectric sheet stack are located inside the actuator housing (5). The piezoelectric sheet stack is located below the actuator mover (4) and drives the actuator mover (4) to move up and down. The piezoelectric sheet stack and the piezoelectric sensor are connected by a signal.

2. The vibration self-sensing device based on the piezoelectric effect according to claim 1, characterized in that: The actuator mover (4) is provided with a cylindrical pin (2), and a copper sheet (1) is provided at the upper end of the cylindrical pin (2).

3. The vibration self-sensing device based on the piezoelectric effect according to claim 2, characterized in that: The actuator mover (4) is provided with a through hole, and the cylindrical pin (2) is slidably disposed in the through hole. Several springs (3) are disposed between the copper sheet (1) and the upper surface of the actuator mover (4).

4. The vibration self-sensing device based on the piezoelectric effect according to claim 1, characterized in that: The piezoelectric sheet stack includes several piezoelectric structures and several flexible material sheets (7), with the piezoelectric structures and flexible material sheets (7) arranged alternately.

5. The vibration self-sensing device based on the piezoelectric effect according to claim 4, characterized in that: The piezoelectric structure includes a combination ring (6) and two double-sided piezoelectric sheets (18). The combination ring (6) is a ring structure, and the two double-sided piezoelectric sheets (18) are arranged in parallel inside the combination ring (6). The polarization directions of the two double-sided piezoelectric sheets (18) are opposite.

6. The vibration self-sensing device based on the piezoelectric effect according to claim 5, characterized in that: The double-sided piezoelectric sheet (18) includes two piezoelectric sheets (15) and a copper sheet (16). The two piezoelectric sheets (15) are symmetrically arranged on the upper and lower surfaces of the copper sheet (16), and the polarization directions of the two piezoelectric sheets (15) are the same.

7. The vibration self-sensing device based on the piezoelectric effect according to claim 1, characterized in that: The piezoelectric sensor includes a housing, a sensor copper block (10), a flexible material ring (11), a single-sided piezoelectric sheet (13), and a sensor housing (14). The housing is fastened to a groove on the upper surface of the sensor housing (14), and the sensor copper block (10) is disposed in the cavity formed by the housing and the sensor housing (14). A flexible material ring (11) is disposed between the outer ring of the sensor copper block (10) and the housing. The single-sided piezoelectric sheet (13) is disposed at the bottom of the groove at the upper end of the sensor housing (14), and the boss on the lower surface of the sensor copper block (10) contacts the single-sided piezoelectric sheet (13).

8. The vibration self-sensing device based on the piezoelectric effect according to claim 7, characterized in that: Several springs (9) are provided between the upper surface of the sensor copper block (10) and the cover.

9. The vibration self-sensing device based on the piezoelectric effect according to claim 7, characterized in that: A flexible material ring (12) is provided on the protrusion on the lower surface of the sensor copper block (10).

10. A method for operating the vibration self-sensing device based on the piezoelectric effect as described in claim 7, characterized in that: The process includes the following steps: Step 1, the sensor housing (14) receives vibration and moves relative to the sensor copper block (10); Step 2, the sensor copper block (10) applies force to the single-sided piezoelectric sheet (13) due to inertia, and the single-sided piezoelectric sheet (13) generates a voltage signal; Step 3, the voltage signal is processed into a control signal and transmitted to the piezoelectric sheet stack, and the piezoelectric sheet stack generates deformation to drive the actuator mover (4) to move up and down.

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