Vacuum pressure-bearing alignment platform
By designing a vacuum pressure alignment platform, the problem of the stacking platform being unable to guarantee a vacuum environment is solved, achieving high-precision stacking and extending equipment life, while avoiding air bubbles and positional errors during the stacking process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
- Filing Date
- 2026-01-30
- Publication Date
- 2026-05-01
AI Technical Summary
Existing stacking platforms cannot guarantee a vacuum environment during stacking, which may result in air bubbles between green ceramic sheets. The pressure is also difficult to control, and positional errors are prone to occur during multiple stacking operations, affecting the stacking accuracy.
A vacuum pressure alignment platform is adopted, including an alignment mechanism and a vacuum pressure mechanism. The upper plate is moved by the X, Y and θ drive mechanisms. Combined with a vacuum hood and ceramic stage, high-precision stacking in a vacuum environment is achieved. Pressure sensors and disc springs are used to reduce the pressure on the alignment mechanism and improve its service life.
Achieve high-precision alignment and stacking in a vacuum environment, avoid air bubbles, improve stacking accuracy, and extend equipment life.
Smart Images
Figure CN121969079A_ABST
Abstract
Description
A vacuum pressure-bearing alignment platform Technical Field
[0001] This application relates to the field of lamination equipment, and in particular to a vacuum pressure alignment platform. Background Technology
[0002] In semiconductor fabrication, the green ceramic wafer stacking platform consists of a base plate and coarse positioning screws. To ensure the integrity of the stacked product and achieve higher precision stacking, after coarse positioning, microscopic observation is performed, using the alignment on the green ceramic wafer as a marker. This allows for manual alignment of the coarse positioning accuracy and coarse pressure alignment during stacking, thereby ensuring the integrity of the stacking and improving the stacking precision to a certain extent.
[0003] Existing stacking platforms cannot guarantee a vacuum environment during stacking, there is a high possibility of air bubbles between green ceramic tiles, the pressure level cannot be directly reflected during pressure application, it is inconvenient to control, and stacking position errors may occur during multiple stacking operations. All of the above factors affect the stacking accuracy. Summary of the Invention
[0004] This application provides a vacuum pressure alignment platform that enables high-precision alignment and high-quality stacking of products in a vacuum environment.
[0005] This application provides a vacuum pressure-bearing alignment platform, including an alignment mechanism and a vacuum pressure-bearing mechanism; the alignment mechanism includes stacked X-axis driving mechanism, Y-axis driving mechanism and θ-axis driving mechanism, and an upper plate is provided on the θ-axis driving mechanism; the X-axis driving mechanism, the Y-axis driving mechanism and the θ-axis driving mechanism can drive the upper plate to translate along the X-axis, Y-axis and θ-axis; the vacuum pressure-bearing mechanism includes a connecting plate for fixed connection with the upper plate, a vacuum hood is provided above the connecting plate, at least two lifting cylinders connected to the vacuum hood are provided below the connecting plate, a ceramic stage is provided inside the vacuum hood, and the ceramic stage is connected to the connecting plate through a ceramic stage lifting mechanism; a lower pressure block is provided on the lower surface of the connecting plate; a groove for accommodating the lower pressure block is provided in the middle of the X-axis driving mechanism, the Y-axis driving mechanism, the θ-axis driving mechanism and the upper plate, and the lower pressure block can translate along the X-axis, Y-axis and θ-axis within the groove.
[0006] In a preferred embodiment, the X-axis drive mechanism includes an X-axis base, an X-axis guide rail slider assembly, an X-axis motor, and an X-axis transmission mechanism; the X-axis guide rail slider assembly and the X-axis motor are disposed on the X-axis base, and the X-axis motor is connected to the slider of the X-axis guide rail slider assembly through the X-axis transmission mechanism.
[0007] In a preferred embodiment, the Y-axis drive mechanism includes a Y-axis base, a Y-axis guide rail slider assembly, a Y-axis motor, and a Y-axis transmission mechanism; the Y-axis base is disposed on the slider of the X-axis guide rail slider assembly, the Y-axis guide rail slider assembly and the Y-axis motor are disposed on the Y-axis base, and the Y-axis motor is connected to the slider of the Y-axis guide rail slider assembly through the Y-axis transmission mechanism.
[0008] In a preferred embodiment, the θ-direction drive mechanism includes an θ-direction base, an θ-direction guide rail slider assembly, an θ-direction motor, and an θ-direction transmission mechanism; the θ-direction base is disposed on the slider of the Y-direction guide rail slider assembly, the θ-direction guide rail slider assembly and the θ-direction motor are disposed on the θ-direction base, and the θ-direction motor is connected to the slider of the θ-direction guide rail slider assembly through the θ-direction transmission mechanism; the upper plate is connected to the slider of the θ-direction guide rail slider assembly.
[0009] In a preferred embodiment, the alignment mechanism further includes a locking mechanism; the locking mechanism includes locking cylinders disposed at each corner of the X-direction base, the upper surface of the locking cylinders being connected to a vertical top plate via spring sheets; after the locking cylinders rise, the vertical top plate can abut against the lower surface of the connecting plate.
[0010] In a preferred embodiment, the locking cylinder is further provided with a universal ball for receiving the vertical top plate.
[0011] In a preferred embodiment, the lifting cylinder is connected to the lower edge of the vacuum shroud via a screw, and the connecting plate is further provided with a plurality of vacuum shroud guide shafts for guiding the lifting and lowering movement of the vacuum shroud.
[0012] In a preferred embodiment, the ceramic platform is mounted on a ceramic platform fixing plate, and the ceramic platform lifting mechanism includes a plurality of vertically arranged precision guide shafts, which provide vertical guidance for the ceramic platform; the ceramic platform fixing plate is provided with a plurality of needle-shaped cylinders, which are used to drive the ceramic platform to lift.
[0013] In a preferred embodiment, the pressure sensor is disposed on the connecting plate, and the lower surface of the ceramic stage fixing plate is in contact with the pressure sensor.
[0014] In a preferred embodiment, the connecting plate and the lower bearing block are connected by a plurality of butterfly springs.
[0015] This application has the following advantages: It adopts a vacuum hood structure, which can be used for lamination in a vacuum environment, avoiding air bubbles between layers during the lamination process and improving the accuracy of lamination; the vacuum pressure bearing mechanism is connected to the alignment mechanism, which can make position adjustments in the X, Y and θ directions.
[0016] The alignment mechanism is equipped with a lower pressure block, which can withstand the downward pressure during stacking. This improves accuracy while reducing the pressure applied to the guide rail sliders of each layer in the alignment mechanism, thus increasing the service life of the overall structure. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 is a schematic diagram of the overall structure of the vacuum pressure-bearing alignment platform provided in the embodiment of this application; Figure 2 is a first-view schematic diagram of the alignment mechanism provided in the embodiment of this application; Figure 3 is a second-view schematic diagram of the alignment mechanism provided in the embodiment of this application; Figure 4 is a first-view schematic diagram of the vacuum pressure-bearing mechanism provided in the embodiment of this application; Figure 5 is a second-view schematic diagram of the vacuum pressure-bearing mechanism provided in the embodiment of this application; Figure 6 is a schematic diagram of the internal structure of the vacuum pressure-bearing mechanism provided in the embodiment of this application from a second-view perspective; Reference numerals in the figures: 1-X-axis base; 2-Y-axis base; 3-θ-axis base; 4- 5-Motor; 6-Coupling; 7-Guide rail slider assembly; 8-Lead screw; 9-Lead screw nut; 10-Mounting base; 11-Locking cylinder; 12-Vertical top plate; 13-Spring; 14-Universal ball; 15-Lower pressure table base plate; 16-Upper mounting plate; 17-Pressure sensor; 18-Precision guide shaft; 19-Ceramic table fixing plate; 20-Ceramic table; 21-Sealing strip; 22-Lifting cylinder; 23-Screw; 24-Sealing ring pressure strip; 25-Butterfly spring; 26-Needle cylinder; 27-Lower bearing block; 28-Vacuum hood; 29-Vacuum hood guide shaft; 30-Sealing ring. Detailed Implementation
[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and labeled in the accompanying drawings can generally be arranged and designed in various different configurations.
[0020] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.
[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0022] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0023] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0024] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0025] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0026] As shown in Figure 1, this application provides a vacuum pressure alignment platform, including an alignment mechanism and a vacuum pressure mechanism.
[0027] As shown in Figures 2 and 3, the alignment mechanism includes stacked X-axis drive mechanism, Y-axis drive mechanism and θ-axis drive mechanism, and an upper plate (not shown in the figure) is set on the θ-axis drive mechanism; the X-axis drive mechanism, Y-axis drive mechanism and θ-axis drive mechanism can drive the upper plate to translate along the X-axis, Y-axis and θ-axis.
[0028] Specifically, the X-axis drive mechanism includes an X-axis base 1, a guide rail slider assembly 6 along the X-axis, an X-axis motor 4, an X-axis coupling 5, and an X-axis transmission mechanism. The X-axis transmission mechanism includes a lead screw 7, a lead screw nut 8, and a mounting base 9.
[0029] The guide rail slider assembly 6 and the motor 4 are mounted on the X-axis base 1. The output end of the motor 4 is connected to the lead screw 7 through a reducer and a coupling 5. The lead screw nut 8 is connected to the slider of the guide rail slider assembly 6, so that the power of the motor 4 can be transmitted to the guide rail slider assembly 6, thereby driving the X-axis slider to perform X-axis reciprocating motion.
[0030] The Y-axis drive mechanism includes a Y-axis base 2, a Y-axis guide rail slider assembly, a Y-axis motor, a Y-axis coupling, and a Y-axis transmission mechanism; the Y-axis transmission mechanism is the same as the X-axis transmission mechanism and will not be described in detail.
[0031] The Y-axis base 2 is mounted on the slider of the X-axis guide rail slider assembly. The Y-axis guide rail slider assembly and the Y-axis motor are mounted on the Y-axis base 2. The Y-axis motor is connected to the slider of the Y-axis guide rail slider assembly through the Y-axis transmission mechanism, thereby driving the Y-axis slider to perform reciprocating motion in the Y-axis direction.
[0032] The θ-direction drive mechanism includes an θ-direction base 3, a guide rail slider assembly along the θ direction, an θ-direction motor, and an θ-direction transmission mechanism; the θ-direction transmission mechanism can adopt a gear and rack structure.
[0033] The θ-axis base 3 is mounted on the slider of the Y-axis guide rail slider assembly. The θ-axis guide rail slider assembly and the θ-axis motor are mounted on the θ-axis base 3. The θ-axis motor is connected to the slider of the θ-axis guide rail slider assembly via an θ-axis transmission mechanism, thereby driving the θ-axis slider to perform θ-axis rotational motion. The upper plate is connected to the slider of the θ-axis guide rail slider assembly.
[0034] Therefore, the X-axis drive mechanism, Y-axis drive mechanism, and θ-axis drive mechanism can drive the upper plate to translate in the X and Y directions, and rotate in the θ direction.
[0035] As shown in Figures 4-6, the vacuum pressure bearing mechanism includes a connecting plate for fixed connection with the upper plate. The connecting plate includes a lower pressure plate 15 and an upper mounting plate 16 that are stacked and connected by screws. The lower pressure plate 15 has a smaller area to avoid surrounding space and is fixedly connected to the upper plate by screws.
[0036] The upper mounting plate 16 has a large area, with a vacuum hood 28 mounted on top of it. At least two lifting cylinders 22 connected to the lower edge of the vacuum hood 28 are arranged around the lower pressure plate 15 below it. The lifting cylinders 22 can drive the vacuum hood 28 to move up and down. Several vacuum hood guide shafts 29 are also provided on the upper mounting plate 16 to guide the lifting and lowering movement of the vacuum hood 28.
[0037] A ceramic stage fixing plate 19 is installed inside the vacuum chamber 28, and a ceramic stage 20 is installed on the ceramic stage fixing plate 19. The ceramic stage fixing plate 19 is connected to the upper mounting plate 16 through a ceramic stage lifting mechanism. A lower pressure block 27 is installed on the lower surface of the lower pressure plate 15. A sealing ring 30 is installed between the upper mounting plate 16 and the vacuum chamber 28. The upper mounting plate 16 is designed with an air passage that communicates with the internal space of the vacuum chamber 28, which can create a vacuum environment inside the vacuum chamber 28 during operation. The upper mounting plate 16 is also equipped with an air passage system that communicates with the ceramic stage 20. By using the vacuum chamber 28, lamination can be carried out in a vacuum environment, avoiding air bubbles between layers during the lamination process and improving the accuracy of lamination.
[0038] A through-type square groove is provided in the middle of the X-axis base 1, Y-axis base 2, θ-axis base 3, and upper plate. A lower pressure block 27 is disposed in this groove, with gaps between the lower pressure block 27 and the side walls of the groove, allowing the lower pressure block 27 to move slightly relative to the X-axis base 1, Y-axis base 2, and θ-axis base 3. The lower pressure table base plate 15 is connected to the lower pressure block 27 by multiple butterfly springs 25. The lower pressure block 27 can withstand the downward pressure during lamination, improving accuracy while reducing the pressure applied to the guide rail slider assemblies 6 in the alignment mechanism, thus increasing the service life of the overall structure.
[0039] Locking mechanisms are respectively installed at each corner of the X-axis base 1. Each locking mechanism includes a locking cylinder 10, the upper surface of which is connected to the vertical top plate 12 via a spring 13. When the locking cylinder rises, it allows the vertical top plate 12 to abut against the lower surface of the upper mounting plate 16, locking the vacuum pressure mechanism in all directions via the spring 13. The locking cylinder 10 is also equipped with a steel universal ball 14 for supporting the vertical top plate 12, allowing for fine-tuning of the vertical top plate 12 and improving its precision.
[0040] The ceramic table lifting mechanism includes multiple vertically arranged precision guide shafts 18, which provide vertical guidance for the ceramic table 20. Several needle-type cylinders 26 are installed on the ceramic table fixing plate 19. The ceramic table 20 and the ceramic table fixing plate 19 have through holes to allow the needle-type cylinders 26 to move up and down, thereby achieving coarse positioning of the height of the ceramic table 20 and ensuring the integrity of the product during the stacking process.
[0041] Pressure sensor 17 is mounted on upper mounting plate 16, and the lower surface of ceramic stage mounting plate 19 is in contact with pressure sensor 17. The direct contact between ceramic stage mounting plate 19 and pressure sensor 19 enables precise pressure control.
[0042] This application utilizes the automatic extension and retraction of a needle-type cylinder to achieve coarse positioning, ensuring the integrity of the product during the stacking process. The alignment mechanism is connected to the vacuum pressure-bearing mechanism, and the lower pressure block can withstand the downward pressure during stacking, which not only meets the requirement of improved accuracy during the stacking process but also ensures that the guide rails in all directions of the platform are not subjected to pressure, thereby improving the service life of the overall structure. The vacuum hood is raised by a lifting cylinder and can form a vacuum chamber inside, enabling stacking in a vacuum environment, avoiding air bubbles between layers during the stacking process, and improving the accuracy of stacking. The ceramic stage fixing plate is in direct contact with the pressure sensor, enabling precise control of the stacking pressure in a vacuum environment.
[0043] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.
Claims
1. A vacuum pressure-bearing alignment platform, characterized in that, The system includes an alignment mechanism and a vacuum pressure-bearing mechanism. The alignment mechanism comprises stacked X-axis, Y-axis, and θ-axis driving mechanisms, with an upper plate mounted on the θ-axis driving mechanism. The X-axis, Y-axis, and θ-axis driving mechanisms can drive the upper plate to translate along the X, Y, and θ axes, respectively. The vacuum pressure-bearing mechanism includes a connecting plate for fixed connection with the upper plate. A vacuum hood is mounted above the connecting plate, and at least two lifting cylinders connected to the vacuum hood are mounted below the connecting plate. A ceramic platform is mounted inside the vacuum hood, and the ceramic platform is connected to the connecting plate via a ceramic platform lifting mechanism. A lower pressure-bearing block is mounted on the lower surface of the connecting plate. A groove for accommodating the lower pressure-bearing block is provided in the middle of the X-axis, Y-axis, θ-axis driving mechanisms, and the upper plate, and the lower pressure-bearing block can translate within the groove along the X, Y, and θ axes.
2. The vacuum pressure-bearing alignment platform according to claim 1, characterized in that, The X-axis drive mechanism includes an X-axis base, an X-axis guide rail slider assembly, an X-axis motor, and an X-axis transmission mechanism; the X-axis guide rail slider assembly and the X-axis motor are mounted on the X-axis base, and the X-axis motor is connected to the slider of the X-axis guide rail slider assembly through the X-axis transmission mechanism.
3. The vacuum pressure-bearing alignment platform according to claim 2, characterized in that, The Y-axis drive mechanism includes a Y-axis base, a Y-axis guide rail slider assembly, a Y-axis motor, and a Y-axis transmission mechanism. The Y-axis base is disposed on the slider of the X-axis guide rail slider assembly. The Y-axis guide rail slider assembly and the Y-axis motor are disposed on the Y-axis base. The Y-axis motor is connected to the slider of the Y-axis guide rail slider assembly through the Y-axis transmission mechanism.
4. The vacuum pressure-bearing alignment platform according to claim 3, characterized in that, The θ-direction drive mechanism includes an θ-direction base, an θ-direction guide rail slider assembly, an θ-direction motor, and an θ-direction transmission mechanism. The θ-direction base is disposed on the slider of the Y-direction guide rail slider assembly. The θ-direction guide rail slider assembly and the θ-direction motor are disposed on the θ-direction base. The θ-direction motor is connected to the slider of the θ-direction guide rail slider assembly through the θ-direction transmission mechanism. The upper plate is connected to the slider of the θ-direction guide rail slider assembly.
5. The vacuum pressure-bearing alignment platform according to claim 2, characterized in that, The alignment mechanism further includes a locking mechanism; the locking mechanism includes locking cylinders disposed at each corner of the X-axis base, the upper surface of the locking cylinders being connected to the vertical top plate via spring sheets; after the locking cylinders rise, they can cause the vertical top plate to abut against the lower surface of the connecting plate.
6. The vacuum pressure-bearing alignment platform according to claim 5, characterized in that, The locking cylinder is also equipped with a universal ball for supporting the vertical top plate.
7. The vacuum pressure-bearing alignment platform according to claim 1, characterized in that, The lifting cylinder is connected to the lower edge of the vacuum shroud via a screw, and the connecting plate is also provided with several vacuum shroud guide shafts for guiding the lifting and lowering movement of the vacuum shroud.
8. The vacuum pressure-bearing alignment platform according to claim 1, characterized in that, The ceramic platform is mounted on a ceramic platform fixing plate. The ceramic platform lifting mechanism includes multiple vertically arranged precision guide shafts, which provide vertical guidance for the ceramic platform. Several needle-shaped cylinders are mounted on the ceramic platform fixing plate, which are used to drive the ceramic platform to lift.
9. The vacuum pressure-bearing alignment platform according to claim 8, characterized in that, The pressure sensor is mounted on the connecting plate, and the lower surface of the ceramic platform fixing plate is in contact with the pressure sensor.
10. The vacuum pressure-bearing alignment platform according to claim 1, characterized in that, The connecting plate and the lower bearing block are connected by multiple butterfly springs.