Vacuum cavity and x-ray source comprising a vacuum cavity having a

Abstract

Embodiments include an apparatus comprising: a vacuum chamber comprising a housing comprising a first sealable opening and a second sealable opening separate from the first sealable opening; a first compressible seal disposed adjacent the first sealable opening and configured to form at least a portion of a vacuum seal on the first sealable opening when compressed; and the second sealing piece is used for sealing the second sealable opening.

Description

Brief descriptions of several views in the attached diagram.

[0001] Figure 1 This is a block diagram of a vacuum chamber with a compressible seal according to some embodiments.

[0002] Figure 2 According to some embodiments Figure 1 A block diagram of the sealable opening of the vacuum chamber shown.

[0003] Figure 3 For those with screws according to some embodiments Figure 1 A block diagram of the sealable opening of the vacuum chamber shown.

[0004] Figures 4A to 4C For example, according to some embodiments, a countersunk hole with multiple types of holes Figure 1 A block diagram of the sealable opening of the vacuum chamber shown.

[0005] Figures 5A to 5B For alternative compression structures according to some embodiments Figure 1 A block diagram of the sealable opening of the vacuum chamber shown.

[0006] Figure 6 This is a block diagram of an X-ray source according to some embodiments.

[0007] Figure 7 This is a block diagram of an X-ray imaging system according to some embodiments. Detailed Implementation

[0008] The embodiments include a vacuum chamber and an X-ray source comprising a vacuum chamber having multiple sealable openings. Treatment of the vacuum chamber, particularly for a vacuum chamber used as an X-ray source, may include purging the vacuum chamber with a gas (e.g., nitrogen (N2) or an inert gas (e.g., argon (Ar)). The gas may be used to pressurize the vacuum chamber. The gas may cause other substances (e.g., adsorbed substances, such as water (H2O)) to detach from the surfaces of the vacuum chamber and internal encapsulated components, becoming suspended in the gas. The gas may be vented to remove these substances.

[0009] The embodiments described herein may include a sealable opening separate from the gas supply opening. Gases containing these substances can escape through the sealable opening (or vent), thereby removing these substances. The embodiments described herein can also be applied to pressurized containers rather than vacuum chambers. However, a vacuum chamber will be used as an example below.

[0010] Figure 1This is a block diagram of a vacuum chamber with a compressible seal according to some embodiments. In some embodiments, the device includes a vacuum chamber 100, which includes a housing 104, the housing including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112. The vacuum chamber 100 separates an interior 103 from an exterior 101. When the vacuum chamber 100 is sealed, a vacuum can be formed within the interior 103. The housing 104 may include a vacuum-compatible material or metal, such as stainless steel.

[0011] The device may include any device having a vacuum chamber 100. For example, as will be described in detail below, the vacuum chamber 100 may be part of an X-ray source or an X-ray tube.

[0012] Examples of the first sealable opening 112 include a cylindrical hole penetrating the housing 104. In other embodiments, the first sealable opening 112 may have different shapes, such as a rectangular cross-section, an elliptical cross-section, etc.

[0013] Examples of the second sealable opening 108 include metal pipes, such as copper pipes.

[0014] Figure 2 According to some embodiments Figure 1 A block diagram of the sealable opening of a vacuum chamber is shown. (Refer to...) Figure 1 and Figure 2 In some embodiments, region 116 is the region that includes the first sealable opening 112.

[0015] A first compressible seal 120 is disposed at least around a first sealable opening 112 and configured to form at least a portion of a vacuum seal over the first sealable opening 112 when compressed. The first compressible seal 120 may comprise a compressible and vacuum-compatible material, such as copper, stainless steel, oxygen-free high thermal conductivity (OFHC) material, oxygen-free electronic (OFE) copper, etc. The first compressible seal 120 may comprise a material with a hardness (e.g., indentation hardness) lower than that of the housing 104.

[0016] In some embodiments, the first compressible seal 120 may include a sphere. A sphere will be used as an example; however, the first compressible seal 120 may take other shapes, such as a cylinder, a rectangular prism, an ellipsoid, a torus, a washer, etc. The first compressible seal 120 may be matched to the shape of the first sealable opening 112.

[0017] In one specific example, the first compressible seal 120 is a copper ball that matches a cylindrical hole that serves as a first sealable opening 112. The diameter of the copper ball may be, for example, 20%, 50%, or more larger than the first sealable opening 112.

[0018] As will be described in detail below, the second seal can seal the second sealable opening 108. For example, the second seal may include a pinched copper tube.

[0019] In some embodiments, the first compressible seal 120 is disposed over the entire first sealable opening 112 when compressed. The aforementioned copper ball is an example of a first compressible seal 120 that covers the entire first sealable opening 112. However, in other embodiments, the first compressible seal 120 may include an annular body or a washer. The annular body or washer may be disposed around the first sealable opening 112. The compression structure 124 may include a structure that also forms part of a complete vacuum seal over the first sealable opening 112 when used to compress the first compressible seal 120. In contrast, in some embodiments, the first compressible seal 120 may form a complete vacuum seal over the first sealable opening 112 when compressed, without relying on the compression structure 124. The compression structure 124 may include a region or shape corresponding to the opening of the recess 126, such as a cylinder or a rectangular prism.

[0020] In some embodiments, the compression structure 124 can be attached to the housing 104 in a variety of ways. In one example, the compression structure 124 can be welded to the housing 104 while compressing the first compressible seal 120. In another example, the compression structure 124 can be forged while compressing the first compressible seal 120 to attach the compression structure 124 to the housing 104.

[0021] In some embodiments, the housing 104 includes a raised region 104a. The raised region 104a allows the first compressible seal 120 to deform around the raised region 104a, thereby forming a vacuum seal.

[0022] When a vacuum seal is formed on the first sealable opening 112, the leakage rate of the vacuum seal can be less than 1×10⁻⁶. -11 millibar-liters per second (mbar * L / sec) or 7.50 × 10⁻⁶ -12 Torr * L / sec.

[0023] In some embodiments, the first compressible seal 120 may be replaced by a first seal 120 that achieves a seal in a manner that does not involve compression.

[0024] In some embodiments, the first compressible seal 120 may include a tubular structure that achieves a seal by compressing the tubular body. For example, a copper tube may be used as the first compressible seal 120, and a seal is achieved by compressing the copper tube wall.

[0025] In some embodiments, the compression structure 124 may be omitted. The first compressible seal 120 may be forged to both compress the first compressible seal 120 to form a vacuum seal on the first sealable opening 112 and attach the first compressible seal 120 to the housing 104.

[0026] Figure 3 For those with screws according to some embodiments Figure 1 A block diagram showing a sealable opening in a vacuum chamber. In some embodiments, the components may be... Figure 2 The components shown are similar. However, the compression structure 124 may include a screw 124a. The screw 124a is configured to compress the first compressible seal 120. In some embodiments, the screw 124a may include a headless set screw, while in other embodiments, the screw 124a may include a head. The screw 124a may have sufficient length such that its head does not contact the housing 104 within the compression range sufficient to form a vacuum seal on the first compressible seal 120. Therefore, the head of the screw 124a does not restrict the compression of the compressible seal 120. The region of the housing 104 adjacent to the first sealable opening 112 (e.g., within the recess 126) includes threads 125a that engage with the threads 125b of the screw 124a. In some embodiments, the engagement of the threads 125a may also form an additional portion of the vacuum seal on the first sealable opening 112.

[0027] In some embodiments, a first sealable opening 112 is disposed within a groove 126 in the outer wall of the housing 104. The groove 126 causes the wall of the housing 104 to extend into the interior 103 of the vacuum chamber 100. When compressed, the metal ball contacts the periphery of the first sealable opening and the sidewall 126a of the groove 126 at region 104a.

[0028] In some embodiments, the thread 125a on the housing 104 does not extend fully into the recess 126. The thread 125a may terminate at a position such that the first compressible seal 120 may deform on the sidewall 126a without the thread 125a. In some embodiments, the screw 124a extends beyond the end of the thread 125 within the recess 126. Therefore, even if the first compressible seal 120 deforms around the screw 124a, it will not contact the thread 125a.

[0029] Although the end of the screw 124a that contacts the first compressible seal 120 is illustrated as planar, this shape may differ in other embodiments. For example, the shape may be a convex cone, a concave cone, a convex sphere, or a concave sphere, etc.

[0030] Figures 4A to 4C For example, according to some embodiments, a countersunk hole with multiple types of holes Figure 1 A block diagram of a sealable opening in a vacuum chamber is shown. In some embodiments, the housing 104 of the vacuum chamber 100 includes a countersunk hole 127 as a recess 126. A first sealable opening 112 is disposed at the bottom of the countersunk hole 127.

[0031] The bottom of the countersunk hole 127 can include various shapes. For example, the bottom of the countersunk hole 127 can include, for example, the shape of the bottom of the countersunk hole 127. Figure 2 The plane shown, such as Figure 4B The surface shown, such as Figure 4A The concave conical surface shown, such as Figure 4C Examples include convex conical surfaces. Each of these shapes may still have a region 104a around which the first compressible seal 120 may deform. In some embodiments, the angle 127a of the countersunk hole 127 may be about 118 ± 10 degrees. The angle 127b of the countersunk hole 127 may be about 62 ± 10 degrees. Although a specific angle or angle range has been used as an example, the angle may vary in other embodiments.

[0032] Figures 5A to 5B For alternative compression structures according to some embodiments Figure 1 A block diagram of the sealable opening of a vacuum chamber is shown. (Refer to...) Figure 5A In some embodiments, the compression structure 124b may include a portion 124b-1 that contacts the first compressible seal 120. A second portion 124b-2 may be maintained at a sufficient distance from portion 124b-1 such that when the second portion 124b-2 is attached to the housing 104 by fastener 129, the second portion 124b-2 does not contact the housing 104. Therefore, the first compressible seal 120 can be compressed with the required force before the second portion 124b-2 contacts the housing 104, thereby forming a vacuum seal. When Figure 3 If the screw 124a or other compression structure 124 shown cannot maintain a sufficient seal, the alternative compression structure shown in Figure 5 may be used.

[0033] Reference Figure 5B In some embodiments, the compression structure 124b may be associated with Figure 5A The structure shown is similar. However, unlike the use of multiple fasteners 129, the compression structure 124b can be attached to the housing 104 at an anchor point 131. Examples of anchor points 131 include hinges, rods attached to the housing 104 and engaging with corresponding grooves of the compression structure 124b, and slots engaging with corresponding lugs of the compression structure 124b. The figure illustrates an example of an anchor point 131 using a hinge.

[0034] Anchor point 131 allows the compression structure 124b to rotate about anchor point 131. In some embodiments, anchor point 131 is configured to resist rotation of the compression structure 124b when the fastener 129 and the first compressible seal 120 apply force to the compression structure 124b. That is, when the fastener 129 is tightened, anchor point 131 causes at least a portion of the force to be applied to the first compressible seal 120.

[0035] Figure 6 This is a block diagram of an X-ray source according to some embodiments. In some embodiments, the X-ray source 200 includes a vacuum chamber 100 as described above. The X-ray source 200 may include an electron source 140 configured to generate an electron beam 160. A target 156 is disposed on an anode assembly within the vacuum chamber and configured to generate radiation in response to the electron beam 160. Examples of the target 156 include materials configured to generate X-rays in response to the electron beam 160, such as tungsten (W), molybdenum (Mo), rhodium (Rh), silver (Ag), rhenium (Re), palladium (Pd), etc.

[0036] In some embodiments, the target 156 is disposed on the shortest gas path between the first sealable opening 112 and the second sealable opening 108. Therefore, gas entering the second sealable opening 108 is more likely to flow through the target 156 as it exits through the first sealable opening 112.

[0037] In some embodiments, the target 156 is disposed on the rotor assembly 144 (or bearing assembly or anode assembly). For simplicity, the rotor assembly, bearing assembly, or anode assembly will be collectively referred to herein as rotor 144. Rotor 144 may be configured to drive the bearing assembly to rotate during operation. A first sealable opening is disposed on a first side of rotor 144, and a second sealable opening 108 is disposed on a second side of rotor 144, opposite to the first side of rotor 144. Therefore, gas flowing from the second sealable opening 108 to the first sealable opening 112 is more likely to flow through rotor 144. As used herein, "side" refers to a plane formed by the main surface of the target region. The first side of rotor 144 refers to the side facing the electron source 140, and the second side of rotor 144 refers to the side facing away from the electron source 140 (facing the stator or heat sinks 148 and 152).

[0038] In some embodiments, rotor 144 includes a first radiator 148 located on the side of rotor 144 opposite to target 156. Housing 104' includes a second radiator 152 that engages with the first radiator 148. A gap may exist between radiators 148 and 152 to allow rotor 144 to move relative to housing 104'. This gap may be relatively small to accommodate multiple fins of radiators 148 and 152, increase energy transfer from rotor 144 to housing 104', etc. Therefore, it may be difficult to remove adsorbed material from radiators 148 and 152 simply by pressurizing and evacuating housing 104' with gas as used in conventional purging processes. However, if the shortest gas path between the first sealable opening 112 and the second sealable opening 108 includes the space between the engaging portions of the first radiator 148 and the second radiator 152, the gas flowing along this path is more likely to flow over the surface with adsorbed material, thereby removing the adsorbed material from housing 104'.

[0039] In some embodiments, a plurality of sealable openings similar to the first sealable opening 112 may be provided on the housing 104'. For example, the housing 104' of the vacuum chamber of the X-ray source 200 includes a third sealable opening 116' separate from the first sealable opening 112 and the second sealable opening 108. A third compressible seal (not numbered) is provided at least around the third sealable opening 116' and is configured to form at least a portion of a vacuum seal on the third sealable opening 116' when compressed, similar to the first compressible seal 120 described above.

[0040] Some embodiments include a method for evacuating a vacuum chamber. Various vacuum chambers 100 and X-ray sources 200 and their components will be used as examples for illustration. In some embodiments, a vacuum chamber 100 is provided, comprising a housing 104 including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 108. Gas is allowed to flow from the second sealable opening 108 through the vacuum chamber 100 to the first sealable opening 112 until a threshold condition is reached. For example, a vacuum / gas source 111 may be configured to supply nitrogen to the interior of the housing 104 / 104'.

[0041] The threshold condition can be various. For example, the threshold can be a certain time. Therefore, gas can be supplied by the vacuum / gas source 111 for a predetermined time, which is determined to be sufficient to remove the required amount of substance from the vacuum chamber 100, thereby achieving the desired vacuum level, for example, about 10 seconds. -7 Up to 10 -9A vacuum level on the order of Torr or similar. In another example, the threshold may include a characteristic of the gas discharged from the first sealable opening 112 that indicates that a sufficient amount of substance has been removed. The threshold condition may be any condition that indicates that a sufficient amount of substance has been removed.

[0042] Once this condition occurs, the first compressible seal 120 can be compressed at the first sealable opening 112 to form a vacuum seal on the first sealable opening 112. Compression can be achieved according to the various compression structures 124 described above. In some embodiments, the sealing operation can be repeated for all sealable openings except those that can be used to evacuate the housing 104 / 104'. In some embodiments, a cover layer is formed on the first compressible seal 120. For example, after the first compressible seal 120 is compressed using a screw 124a or other compression structure 124, a cover layer, such as epoxy resin, a press-fit cap, etc., can be provided on the screw 124a or other compression structure 124.

[0043] Gas can be extracted from the vacuum chamber 100 by a vacuum / gas source 111. Once the desired vacuum level is reached, after the gas has been extracted from the vacuum chamber 100, the second sealable opening can be sealed to form a vacuum seal on the second sealable opening 108. For example, the second sealable opening 108 can be an opening of a copper tube. The copper tube can be compressed or clamped to form a vacuum-compatible seal at the opening of the copper tube.

[0044] In some embodiments, as described above, the first compressible seal 120 can be compressed using a screw 124a. For example, a copper ball can be placed on the first sealable opening 112 while gas escapes through it. The set screw 124a can be inserted into the threaded groove 126. In other embodiments, the copper ball and set screw 124a can be installed before gas is supplied, but gas is still allowed to escape through the first sealable opening 112. The set screw 124a can be tightened while gas escapes until the desired level of compression is achieved, thereby obtaining a vacuum seal of the desired quality. Sealing the first sealable opening 112 with a copper ball is an example of compressing the first compressible seal 120 over the entire first sealable opening 112. As part of compressing the copper ball, it can be pressed into the sidewall 126a of the groove 126.

[0045] Compared to tubular seals (such as clamps or compressed copper tubes used to seal the second sealable opening 108), the first compressible seal 120 may have advantages. For example, the first compressible seal 120 is reusable, meaning it can be unsealed and resealed. When forces are applied to the seal, the first compressible seal 120 may be more durable than a tubular seal, which may break, open, and leak under stress. The first compressible seal 120 may be safer to handle because it does not have the sharp edges that could cut or scratch operators or users found in tubular seals.

[0046] As described above, the vacuum chamber 100 or X-ray source 200 may include a plurality of sealable openings. Gas may flow through each of these sealable openings from the second sealable opening 108. Each of these sealable openings may be sealed in the manner described above with respect to the first sealable opening 112.

[0047] In some embodiments, the vacuum chamber 100 includes an electron source 140 and a rotor 144. Flowing gas from a second sealable opening 108 through the vacuum chamber 100 to a first sealable opening 112 includes flowing gas between the rotor 144 and the housing 104' along a path from the second sealable opening 108 to the first sealable opening 112. As described above, this path may include the space between heat sinks 148 and 152.

[0048] Some embodiments include means for containing a vacuum, such as housing 104 / 104'. Some embodiments include means for generating X-rays disposed within the means for containing a vacuum, such as electron source 140 and target 156. Some embodiments include a first means for penetrating the means for containing a vacuum, such as a first sealable opening 112 or a third sealable opening 116'. Some embodiments include a second means for penetrating the means for containing a vacuum, such as a second sealable opening 108. Some embodiments include a first compressible means for sealing the first means for penetrating the means for containing a vacuum, such as a first compressible seal 120. Some embodiments include a second means for sealing the second means for penetrating the means for containing a vacuum, such as a seal for a copper tube. Some embodiments include means for compressing the first compressible means, such as screw 124a.

[0049] Figure 7This is a block diagram of an X-ray imaging system according to some embodiments. The X-ray imaging system 700 includes an X-ray source 702 and a detector 710. The X-ray source 702 may include an X-ray source 200 or similar device as described above. In some embodiments, the X-ray source 702 includes a plurality of field emitters (FE) 724. Electron beams from the field emitters 724 may be directed to an anode 726 to generate X-rays 720. The X-ray source 702 is positioned relative to the detector 710 such that X-rays 720 may be generated to penetrate a sample 722 and be detected by the detector 710. In some embodiments, the detector 710 is part of a medical imaging system. In other embodiments, the X-ray imaging system 700 may include a portable vehicle scanning system as part of a cargo scanning system. The system 700 may be any system that includes the X-ray source 702.

[0050] Some embodiments include an apparatus comprising: a vacuum chamber 100 including housings 104, 104', the housings including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112; a first compressible seal 120 disposed adjacent to the first sealable opening 112 and configured to form at least a portion of a vacuum seal on the first sealable opening 112 when compressed; and a second seal for sealing the second sealable opening 108.

[0051] In some embodiments, the first compressible seal 120 is disposed over the entire first sealable opening 112 when compressed.

[0052] In some embodiments, the device further includes a screw 124a that compresses the first compressible seal 120; wherein the area in the housings 104, 104' adjacent to the first sealable opening 112 includes threads that engage with the threads of the screw 124a.

[0053] In some embodiments, the housing 104, 104' of the vacuum chamber 100 includes a countersunk hole; a first sealable opening 112 is disposed at the bottom of the countersunk hole.

[0054] In some embodiments, the bottom of the countersunk hole includes: a plane, a curved surface, a concave conical surface, or a convex conical surface.

[0055] In some embodiments, the first compressible seal 120 is a metal ball before compression.

[0056] In some embodiments, a first sealable opening 112 is disposed in a groove in the outer wall of the housing 104, 104'; when compressed, the metal ball contacts the periphery of the first sealable opening 112 and the sidewall of the groove.

[0057] In some embodiments, the housings 104, 104' of the vacuum chamber 100 include a third sealable opening 116' separate from the first sealable opening 112 and the second sealable opening 108; the device also includes a third compressible seal 120 disposed at least around the third sealable opening 116' and configured to form at least a portion of a vacuum seal on the third sealable opening 116' when compressed.

[0058] In some embodiments, the device further includes compression structures 124, 124b configured to compress the first compressible seal 120; and fastener 129 configured to apply a force to the compression structures 124, 124b to compress the first compressible seal 120.

[0059] In some embodiments, the device further includes an anchor point 131 attached to housings 104, 104' and coupling a compression structure to housings 104, 104'.

[0060] In some embodiments, the device further includes an electron source 140 disposed within a vacuum chamber 100 and configured to generate an electron beam 160; and a target 156 disposed within a vacuum chamber 100 and configured to generate radiation in response to the electron beam 160, wherein the device is a radiation tube or an X-ray source.

[0061] In some embodiments, the target 156 is disposed on the shortest gas path between the first sealable opening 112 and the second sealable opening 108.

[0062] In some embodiments, the target 156 is disposed on the rotor assembly 144; a first sealable opening 112 is located on a first side of the target; and a second sealable opening 108 is located on a second side of the target, which is opposite to the first side of the target 156.

[0063] In some embodiments, the target 156 is disposed on the rotor assembly 144; the rotor assembly 144 includes a first radiator 148 located on the side of the rotor assembly 144 opposite to the target; the housings 104, 104' include a second radiator 152 that engages with the first radiator 148; the shortest gas path between the first sealable opening 112 and the second sealable opening 108 includes the space between the engaging portions of the first radiator 148 and the second radiator 152.

[0064] Some embodiments include a method comprising: providing a vacuum chamber 100, the vacuum chamber including housings 104, 104', the housings including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112; allowing gas to flow from the second sealable opening 108 through the vacuum chamber 100 to the first sealable opening 112 until a threshold condition is reached; and compressing a first compressible seal 120 at the first sealable opening 112 to form a vacuum seal on the first sealable opening 112.

[0065] In some embodiments, the method further includes: extracting gas from the vacuum chamber 100; and after extracting gas from the vacuum chamber 100, sealing the second sealable opening 108 to form a vacuum seal on the second sealable opening 108.

[0066] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes compressing the first compressible seal 120 using a screw 124a.

[0067] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes compressing the first compressible seal 120 over the entire first sealable opening 112.

[0068] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes compressing a metal ball onto the first sealable opening 112.

[0069] In some embodiments, compressing the first compressible seal 120 at the first sealable opening 112 includes pressing a metal ball into the sidewall of the housing 104, 104' that includes the first sealable opening 112.

[0070] In some embodiments, the housings 104, 104' of the vacuum chamber 100 include a third sealable opening 116' separate from the first sealable opening 112 and the second sealable opening 108; and the method further includes: allowing gas to flow from the second sealable opening 108 through the vacuum chamber 100 to the third sealable opening 116' until a threshold condition is reached; and compressing a third compressible seal 120 at the third sealable opening 116' to form a vacuum seal on the third sealable opening 116'.

[0071] In some embodiments, the vacuum chamber 100 includes an electron source and a rotor; allowing gas to flow from the second sealable opening 108 through the vacuum chamber 100 to the first sealable opening 112 includes: allowing gas to flow between the rotor 144 and the housings 104, 104' along a path from the second sealable opening 108 to the first sealable opening 112.

[0072] Some embodiments include an X-ray apparatus comprising: means for containing a vacuum; means for generating X-rays disposed within the means for containing the vacuum; a first means for penetrating the means for containing the vacuum; a second means for penetrating the means for containing the vacuum; a first compressible means for sealing the first means for penetrating the first means for containing the vacuum; and a second means for sealing the second means for penetrating the second means for containing the vacuum.

[0073] In some embodiments, the X-ray device further includes means for compressing the first compressible device.

[0074] Some embodiments include an apparatus comprising: a vacuum chamber 100 including housings 104, 104', the housings including a first sealable opening 112 and a second sealable opening 108 separate from the first sealable opening 112; a first seal disposed at least around the first sealable opening 112 and configured to form at least a portion of a vacuum seal over the first sealable opening 112 upon sealing; and a second seal for sealing the second sealable opening 108.

[0075] Although structures, apparatuses, methods, and systems have been described with reference to specific embodiments, those skilled in the art will readily recognize that many variations may be made to the specific embodiments, and therefore any variations should be considered to be within the spirit and scope of the disclosure herein. Consequently, many modifications can be made by those skilled in the art without departing from the spirit and scope of the appended claims.

[0076] The claims following this disclosure are hereby expressly incorporated into this disclosure, each claim existing independently as a separate embodiment. This disclosure includes all permutations of the independent claims and their dependent claims. Furthermore, additional embodiments that can be derived from the subsequent independent and dependent claims are also expressly incorporated into this specification. These additional embodiments are determined by replacing the dependency relationship of a given dependent claim with the phrase “any one of the claims beginning with claim [x] and ending with the claim immediately preceding this claim,” where the term “[x]” in parentheses is replaced with the number of the most recently cited independent claim. For example, in the first set of claims beginning with independent claim 1, claim 4 may be dependent on any one of claims 1 and 3, these individual dependencies yielding two different embodiments; claim 5 may be dependent on any one of claims 1, 3, or 4, these individual dependencies yielding three different embodiments; claim 6 may be dependent on any one of claims 1, 3, 4, or 5, these individual dependencies yielding four different embodiments; and so on.

[0077] The term "first" used in the claims to refer to a feature or element does not necessarily imply the presence of a "second" or other such feature or element. Elements specifically described in the form of a component plus function (if any) should be interpreted, pursuant to 35 U.S.C., 112(f), to cover the corresponding structure, material, or action described herein and its equivalents. Embodiments of the exclusive or proprietary rights claimed by this invention are defined as follows.

Claims

1. An apparatus comprising: A vacuum chamber includes a housing, the housing including a first sealable opening and a second sealable opening separate from the first sealable opening; A first compressible seal is disposed adjacent to the first sealable opening and is configured to form at least a portion of a vacuum seal over the first sealable opening when compressed; as well as The second seal seals the second sealable opening.

2. The apparatus according to claim 1, wherein: The first compressible seal is positioned over the entire first sealable opening when compressed.

3. The apparatus according to claim 1, further comprising: The screw compresses the first compressible seal. The area of ​​the housing adjacent to the first sealable opening includes threads that engage with the threads of the screw.

4. The apparatus according to claim 1, wherein: The housing of the vacuum chamber includes a countersunk hole; and The first sealable opening is located at the bottom of the countersunk hole.

5. The apparatus according to claim 4, wherein, The bottom of the countersunk hole includes: flat; Curved surface; Concave conical surface; or Convex cone surface.

6. The apparatus according to claim 1, wherein: The first compressible seal is a metal ball before compression.

7. The apparatus according to claim 6, wherein: The first sealable opening is disposed within a groove in the outer wall of the housing; and When compressed, the metal ball comes into contact with the periphery of the first sealable opening and the sidewall of the groove.

8. The apparatus according to claim 1, wherein: The housing of the vacuum chamber includes a third sealable opening, which is separate from the first sealable opening and the second sealable opening; and The device further includes a third compressible seal, which is disposed at least around the third sealable opening and configured to form at least a portion of a vacuum seal over the third sealable opening when compressed.

9. The apparatus according to claim 1, further comprising: A compression structure configured to compress the first compressible seal; as well as Fasteners configured to apply force to the compression structure to compress the first compressible seal.

10. The apparatus according to claim 9, further comprising: An anchor point, which is attached to the housing and couples the compression structure to the housing.

11. The apparatus according to claim 1, further comprising: An electron source, disposed within the vacuum chamber, is configured to generate an electron beam; as well as A target material disposed within the vacuum cavity and configured to generate radiation in response to the electron beam, wherein the device is a radiation tube or an X-ray source.

12. The apparatus according to claim 11, wherein: The target is positioned on the shortest gas path between the first sealable opening and the second sealable opening.

13. The apparatus according to claim 11, wherein: The target material is disposed on the rotor assembly; The first sealable opening is located on the first side of the target material; and The second sealable opening is located on the second side of the target material, which is opposite to the first side of the target material.

14. The apparatus according to claim 11, wherein: The target material is disposed on the rotor assembly; The rotor assembly includes a first heat sink located on the side of the rotor assembly opposite to the target material. The housing includes a second radiator that engages with the first radiator; and The shortest gas path between the first sealable opening and the second sealable opening includes the space between the meshing portions of the first radiator and the second radiator.

15. A method comprising: A vacuum chamber is provided, the vacuum chamber including a housing, the housing including a first sealable opening and a second sealable opening, the second sealable opening being separate from the first sealable opening; Gas is allowed to flow from the second sealable opening through the vacuum chamber to the first sealable opening until a threshold condition is reached; The first compressible seal is compressed at the first sealable opening to form a vacuum seal on the first sealable opening.

16. The method of claim 15, further comprising: The gas is extracted from the vacuum chamber; as well as After the gas is extracted from the vacuum chamber, the second sealable opening is sealed to form a vacuum seal on the second sealable opening.

17. The method of claim 15, wherein: Compression of the first compressible seal at the first sealable opening includes compressing the first compressible seal using a screw.

18. The method of claim 15, wherein: Compression of the first compressible seal at the first sealable opening includes compression of the first compressible seal over the entire first sealable opening.

19. The method of claim 15, wherein: Compression of the first compressible seal at the first sealable opening includes compressing a metal ball onto the first sealable opening.

20. The method of claim 19, wherein: Compression of the first compressible seal at the first sealable opening includes pressing the metal ball into the sidewall of a groove in the housing that includes the first sealable opening.

21. The method of claim 15, wherein: The housing of the vacuum chamber includes a third sealable opening, which is separate from the first sealable opening and the second sealable opening; and The method further includes: The gas is allowed to flow from the second sealable opening through the vacuum chamber to the third sealable opening until the threshold condition is reached; as well as The third compressible seal is compressed at the third sealable opening to form a vacuum seal on the third sealable opening.

22. The method of claim 15, wherein: The vacuum chamber includes an electron source and a rotor; and The process of allowing the gas to flow from the second sealable opening through the vacuum chamber to the first sealable opening includes: allowing the gas to flow between the rotor and the housing along a path from the second sealable opening to the first sealable opening.

23. An X-ray device, comprising: Devices used to contain vacuum; A device for generating X-rays, disposed within the device for containing a vacuum; A first device for penetrating the apparatus for containing a vacuum; A second device for penetrating the device for containing a vacuum; as well as A first compressible device for sealing the first device for penetrating the first device for containing a vacuum; as well as A second device for sealing the second device for penetrating the device for containing a vacuum.

24. The X-ray apparatus according to claim 23, further comprising: A device for compressing the first compressible device.

25. An apparatus comprising: A vacuum chamber includes a housing, the housing including a first sealable opening and a second sealable opening separate from the first sealable opening; A first seal is disposed at least around the first sealable opening and configured to form at least a portion of a vacuum seal over the first sealable opening when sealed. as well as The second seal seals the second sealable opening.

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