Quartz injection pipe laser drilling device and method

Abstract

The invention discloses a laser drilling device and method for a quartz injection pipe, and relates to the field of workshop devices. Comprising an equipment workbench, a plurality of injection pipe placing jigs are fixedly and linearly arranged on the upper surface of the equipment workbench, an air blowing assembly is movably installed on the equipment workbench and comprises an upper air path assembly and a lower air path assembly, the upper air path assembly is connected with a magnetic attraction fixing clamp through a right-angle bent quartz air blowing pipe fixing support, and the lower air path assembly is connected with a magnetic attraction fixing clamp through a right-angle bent quartz air blowing pipe fixing support. The upper gas path assembly and the lower gas path assembly are connected through a rubber hose. And through the arrangement of the air blowing assembly, scraps and heat generated by punching can be quickly blown away, and the quality problems such as flaws of the quartz injection pipe product are not prone to being caused. And the yield can be effectively improved, so that the production cost of a single quartz injection pipe is reduced.

Description

Technical Field

[0001] This invention relates to the field of material surface evaporation treatment, and specifically to a quartz jet tube laser drilling device and method. Background Technology

[0002] During the laser processing of quartz jet tubes, high levels of heat and gas are generated on the inner wall of the jet tube. Currently, the main approach is to adjust parameters such as the power and gas pressure of the laser equipment to mitigate this. However, the heat and gas still cannot be completely expelled, and the appearance problems at the bottom of the holes on the inner wall of the jet tube, such as gas marks and halos, remain quite serious and cannot be effectively and fundamentally solved. As a result, the scrap rate of the jet tubes is relatively high, leading to significant cost pressure.

[0003] The patent document with announcement number CN213507187U discloses "a fusion-type spray tube", which involves welding two spray tubes together after processing them into semi-holes. Although this reduces the difficulty of drilling, it also reduces the precision of the product and is not suitable for high-precision photolithography or high-temperature atomization spraying. Summary of the Invention

[0004] The purpose of this invention is to introduce compressed air into the air blowing assembly, which can blow out the debris from the quartz jet tube during laser drilling and quickly remove the residual heat of the laser, thus preventing the debris from melting and sticking to the quartz jet tube and causing it to be scrapped.

[0005] A further objective of this invention is that one end of the quartz jet tube connected to the air blowing assembly is a closed opening, while the other end is an open opening. Therefore, when drilling near the air blowing assembly, the high static pressure of compressed air can directly blow the debris and heat generated by laser drilling outwards. When drilling at a more distant location, the static pressure is weaker than that at the near end due to the greater distance. Setting an open opening allows the high-speed compressed air flow to directly blow the debris and heat out of the open opening.

[0006] The present invention achieves the above objectives through the following technical means: A quartz jet tube laser drilling device includes a worktable. Several jet tube placement fixtures are fixedly arranged linearly on the upper surface of the worktable. An air blowing assembly is movably installed on the worktable. The air blowing assembly includes an upper air passage assembly and a lower air passage assembly. The upper air passage assembly is connected to a magnetic fixing clamp through a right-angle bent quartz air blowing tube fixing bracket. The upper air passage assembly and the lower air passage assembly are connected by a rubber hose.

[0007] Furthermore, the upper air path assembly includes an air blowing nozzle and a right-angle bent quartz air blowing tube, wherein the air blowing nozzle and the right-angle bent quartz air blowing tube are in airtight communication.

[0008] Furthermore, the lower air path assembly includes a compressed air filter, one end of which is connected to a compressed air inlet pipe via a second compressed air vacuum connector, and the other end of which is connected to a compressed air pressure regulating valve via a first compressed air connecting pipe.

[0009] Preferably, a laser moving frame is movably coupled to the worktable of the equipment, and a laser is fixedly installed at one end of the laser moving frame. The laser moving frame moves independently of the worktable of the equipment.

[0010] A method for laser drilling of quartz jet tubes, applied to a laser drilling device for quartz jet tubes, includes the following steps: S1: Assemble the air blowing assembly and fix it on the equipment workbench.

[0011] S2: Fix the jet pipe placement fixture on the equipment workbench and place the quartz jet pipe on the jet pipe placement fixture.

[0012] S3: Connect the closed end of the quartz jet tube to the air nozzle, adjust the shape of the air circuit assembly by using the magnetic fixing clip, and introduce compressed air into the quartz jet tube.

[0013] S4: Activate the laser moving frame, move the laser to the corresponding position of the quartz jet tube, start the laser to drill, and move to the next position.

[0014] Furthermore, S1 includes an air blowing assembly comprising an upper air path assembly and a lower air path assembly. The upper air path assembly is installed in a position that can be adjusted by a magnetic mounting bracket, and the lower air path assembly is fixedly installed on the equipment workbench.

[0015] Furthermore, the upper and lower air passage components are connected by a rubber hose.

[0016] Furthermore, S2 includes the following: before placing the quartz jet tube on the jet tube placement fixture, it needs to be cleaned to remove dust and debris, dried, and then placed on the jet tube placement fixture, with a graphite sheet inserted inside the quartz jet tube.

[0017] Preferably, S4 further includes a quartz jet tube connected to the air blowing nozzle, with one end closed and the other end open.

[0018] Furthermore, the laser drilling direction is selected to feed from the open end to the closed end.

[0019] The present invention has the following beneficial effects: Compared to the welding nozzle in the prior art, this invention, by incorporating an air-blowing component, can quickly remove drilling debris and heat, making it less prone to defects and other quality issues in the quartz jet tube products. This effectively improves the yield rate, thereby reducing the production cost per quartz jet tube. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the device structure of the present invention.

[0021] Figure 2 This is a flowchart of the present invention.

[0022] In the diagram, 1-quartz jet tube, 2-jet tube placement fixture, 3-equipment workbench, 4-magnetic clamp, 5-right-angle bent quartz blowing tube fixing bracket, 6-blowing nozzle, 7-right-angle bent quartz blowing tube, 8-rubber hose, 9-compressed air adapter, 10-first compressed air connection pipe, 11-compressed air pressure regulating valve, 12-second compressed air connection pipe, 13-first compressed air vacuum connector, 14-compressed air filter, 15-second compressed air vacuum connector, 16-compressed air inlet pipe, 17-laser, 18-laser moving frame. Detailed Implementation

[0023] Example 1: like Figure 1 As shown, a quartz jet tube laser drilling device applies a quartz jet tube laser drilling method, including a worktable 3. Several jet tube placement fixtures 2 are linearly arranged on the upper surface of the worktable 3. An air blowing assembly is movably installed on the worktable 3. The air blowing assembly includes an upper air path assembly and a lower air path assembly. The upper air path assembly is connected to a magnetic fixing clamp 4 through a right-angle bent quartz air blowing tube fixing bracket 5. The upper air path assembly and the lower air path assembly are connected by a rubber hose 8.

[0024] This embodiment discloses a quartz jet tube laser drilling device, the main body of which is mounted on the equipment worktable 3. The equipment worktable 3 is equipped with processing components other than an air compressor and a laser moving frame 18. These include an air blowing assembly, a quartz jet tube 1, and a jet tube placement fixture 2.

[0025] The upper space of the equipment workbench 3 is arranged in a vertically intersecting pattern. The quartz jet tube 1 is placed horizontally on the jet tube placement fixture 2, while the laser moving frame 18 and the laser 17 are located directly above the quartz jet tube 1, perpendicular to the axial direction of the quartz jet tube 1.

[0026] To stabilize and position the quartz jet tube 1, and to prevent the quartz jet tube 1 from deflecting during processing and causing a significant reduction in drilling accuracy, several jet tube placement fixtures 2 arranged linearly are fixedly installed on the upper surface of the equipment workbench 3. The number of jet tube placement fixtures 2 is at least three.

[0027] The upper part of the jet tube placement fixture 2 is machined with a positioning groove that matches the outer diameter of the quartz tube. The quartz jet tube 1 is embedded in the positioning groove. Since laser processing actually only applies negligible pressure to the quartz jet tube, the main source of offset force is the air blowing assembly. Compressed air is blown into the quartz jet tube 1. Because the quartz jet tube 1 has a relatively large length-to-diameter ratio, the compressed air blowing into the quartz jet tube 1 easily causes significant vibration. Therefore, it is necessary to increase the friction between the jet tube placement fixture 2 and the quartz jet tube 1, and to fix the jet tube placement fixture 2 and the quartz jet tube 1 during processing, in order to eliminate vibration and improve processing accuracy.

[0028] Because graphite has excellent vibration absorption properties, it can effectively absorb minute vibrations during processing. Furthermore, it can absorb laser light and is stable enough not to react with the quartz jet tube 1. Therefore, before the quartz jet tube 1 is airtightly connected to the air blowing assembly, a large graphite sheet with an outer radius equal to the inner diameter of the quartz jet tube 1 needs to be pre-inserted into the quartz jet tube 1 and fitted against the bottom of the inner wall. This graphite rod is positioned directly opposite the upward laser beam path, acting as a sacrificial pad. Utilizing graphite's extremely high light absorption and heat resistance, it prevents the laser from penetrating the upper wall of the quartz jet tube 1 and continuing to penetrate the entire quartz jet tube 1 after drilling. Simultaneously, the presence of the graphite sheet narrows the internal airflow channel of the quartz jet tube 1, increasing the gas velocity inside and improving the efficiency of debris blowing and heat dissipation.

[0029] Because traditional laser drilling suffers from localized heat accumulation and poor surface quality of the hole due to delayed debris removal, one end of the quartz jet tube 1 is connected to the air blowing assembly.

[0030] Because the air blowing assembly connected to the quartz jet tube 1 needs to be adjusted according to the installation position of the quartz jet tube 1, and to reduce the complexity of adjusting the position of the air blowing assembly, it is mainly divided into an upper air path assembly and a lower air path assembly, which are connected by a rubber hose 8. Since the generation of compressed air inevitably brings about significant vibration, the vibration generated by the air compressor cannot be eliminated for the laser drilling of this invention. Therefore, in this embodiment, the gas generating device is not connected to the equipment worktable, and there is a significant physical distance between them.

[0031] Generally, the airflow originates from an air compressor installed in another area, and the air from the air compressor flows into the lower air path assembly through the compressed air intake pipe 16. The lower air path assembly is rigidly fixed to the lower part of the frame outside the worktable 3 by a bracket, away from the laser 17 and the quartz jet tube 1, to avoid mechanical vibration interference that could affect the drilling operation of the laser 17 on the quartz jet tube 1. The compressed air intake pipe 16 is connected to the compressed air filter 14 through the second compressed air vacuum connector 15, thereby inputting the compressed air generated by the air compressor into the compressed air filter 14.

[0032] During the process of compressed air entering the compressed air filter 14, moisture, oil mist and fine solid particles in the compressed air are filtered out, ensuring that the air entering the quartz tube is high-purity dry and clean air. This avoids compressed air contamination that could cause unnecessary reflection or refraction of the laser inside the quartz jet tube 1, resulting in irregular burns on the inner wall of the quartz jet tube. At the same time, it prevents oil stains from adhering to the inside of the quartz jet tube 1 and causing contamination of the quartz jet tube 1, or even prevents debris and dust from reacting with the quartz jet tube 1 under the action of the laser.

[0033] The filtered clean air is led out from the first compressed air vacuum connector 13 and delivered to the compressed air pressure regulating valve 11 through the first compressed air connecting pipe 10. The air pressure regulating valve 11 can be used to set a specific static pressure value at this location according to the diameter, length, and wall thickness of the quartz jet tube 1, ensuring that the airflow can carry away the molten slag without causing significant vibration of the quartz jet tube 1 due to excessive wind force.

[0034] After leaving the lower air path assembly, the airflow passes through the second compressed air connection pipe 12 and the compressed air adapter 9, and enters the rubber hose 8 used for flexibly connecting the upper and lower air path assemblies. Due to the good damping effect of rubber, it can isolate the upper air path assembly from high-frequency vibrations transmitted from the air compressor and valve body, ensuring a smooth airflow into the perforation area. The end of the rubber hose 8 is connected to the upper air path assembly, which is attached to the surface of the equipment workbench 3 by an adjustable magnetic clamp 4. The end of the magnetic clamp 4 is locked to the right-angle bent quartz air blowing tube fixing bracket 5. By adjusting the position of the magnetic clamp and the angle of the right-angle bent quartz air blowing tube fixing bracket 5, the air blowing nozzle 6 can be aligned with the quartz injection tube 1.

[0035] The specific features of the air-blowing actuator consist of a right-angle bent quartz air-blowing tube 7 and an air-blowing nozzle 6. The right-angle bent quartz air-blowing tube 7, made of quartz material, not only has high cleanliness but also possesses a certain rigidity, ensuring that the nozzle position does not shift under the impact of high-speed airflow. The air-blowing nozzle 6 is located at the end of the entire air path, and its outer diameter is specially adapted to seal the air inlet opening of the quartz jet tube 1. When the nozzle 6 is inserted, this side of the tube forms a pressure-sealed end, while the other end of the quartz jet tube 1 remains open.

[0036] The laser moving frame 18 moves independently of the equipment worktable 3, and carries the laser 17. The laser moving frame 18 can be a high-precision gantry structure, capable of precise feeding in the horizontal plane. In actual operation, this embodiment adopts a feeding strategy from far to near. The laser 17 first moves to the open end away from the air nozzle 6 to perform the processing of the first hole. At this time, since the inside of the quartz tube is basically sealed except for the nozzle, the high static pressure maintained inside the tube means that the high-pressure air inside will gush out through the micro-holes the moment the laser penetrates the tube wall, forcibly ejecting the generated molten debris out of the tube, thereby preventing the debris from condensing and sticking to the inner wall. As the processing progresses, the laser moving frame 18, carrying the laser 17, continuously feeds towards the direction of the air nozzle 6, i.e., the direction of the air source. Although the sealing of the tube decreases as the number of holes increases, the airflow resistance decreases because the physical distance between the laser head and the air source becomes shorter and shorter. The air intake flow compensates for the leakage pressure, so that each drilling position can obtain sufficient slag removal power.

[0037] Example 2: The structure of this embodiment is the same as that of Embodiment 1, and the working method of the device of the present invention is further described.

[0038] like Figure 1 and Figure 2 As shown, a quartz jet tube laser drilling device applies a quartz jet tube laser drilling method. It includes a worktable, on the upper surface of which several jet tube placement fixtures are fixedly arranged linearly. An air blowing assembly is movably mounted on the worktable. The air blowing assembly includes an upper air path assembly and a lower air path assembly. The upper air path assembly is connected to a magnetic fixing clamp through a right-angle bent quartz air blowing tube fixing bracket. The upper air path assembly and the lower air path assembly are connected by a rubber hose.

[0039] This embodiment discloses a quartz jet tube laser drilling device, the main body of which is mounted on the equipment worktable. The equipment worktable is equipped with processing components other than an air compressor and a laser moving frame, including an air blowing assembly, a quartz jet tube, and a jet tube placement fixture.

[0040] The upper space of the equipment workbench is arranged in a vertically intersecting pattern. The quartz jet tube is placed horizontally on the jet tube placement fixture, while the laser moving frame and laser are located directly above the quartz jet tube, perpendicular to the axis of the quartz jet tube.

[0041] To stabilize and position the quartz jet tube, and to prevent deflection during processing that could significantly reduce drilling accuracy, several jet tube placement fixtures arranged linearly are fixedly installed on the upper surface of the equipment's worktable. The number of these fixtures is at least three.

[0042] The upper part of the jet tube placement fixture is machined with a positioning groove that matches the outer diameter of the quartz tube. The quartz jet tube is embedded in the positioning groove. Because laser processing actually only applies negligible pressure to the quartz jet tube, the main source of offset force is the air blowing assembly. Compressed air is blown into the quartz jet tube. Due to the relatively large length-to-diameter ratio of the quartz jet tube, the compressed air blowing into the quartz jet tube easily causes significant vibration. Therefore, it is necessary to increase the friction between the jet tube placement fixture and the quartz jet tube, and to fix the jet tube placement fixture to the quartz jet tube during processing, to eliminate vibration and improve processing accuracy.

[0043] Because graphite has excellent vibration absorption properties, it can effectively absorb minute vibrations during processing. Furthermore, it can absorb laser light and is stable enough not to react with the quartz jet tube. Therefore, before the quartz jet tube is airtightly connected to the air blowing assembly, a large graphite sheet with an outer radius equal to the inner diameter of the quartz jet tube needs to be pre-inserted into the quartz jet tube and fitted against the bottom of the inner wall. This graphite rod is positioned directly opposite the upward laser beam path, acting as a sacrificial pad. Utilizing graphite's extremely high light absorption and heat resistance, it prevents the laser from penetrating the upper wall of the quartz jet tube and continuing downwards to penetrate the entire tube after drilling. Simultaneously, the presence of the graphite sheet narrows the internal airflow channel of the quartz jet tube, increasing the gas velocity inside and improving the efficiency of debris blowing and heat dissipation.

[0044] Because traditional laser drilling suffers from localized heat accumulation and poor surface quality of the hole due to delayed debris removal, one end of the quartz jet tube is connected to the air blowing assembly.

[0045] Because the air blowing assembly connected to the quartz jet tube needs to be adjusted according to the installation position of the quartz jet tube, and to reduce the complexity of adjusting the air blowing assembly, the air blowing assembly is mainly divided into two parts: an upper air path assembly and a lower air path assembly, which are connected by a rubber hose. Since the generation of compressed air inevitably brings about significant vibration, the vibration generated by the air compressor cannot be eliminated for the laser drilling of this invention. Therefore, in this embodiment, the gas generating device is not connected to the equipment worktable, and there is a significant physical distance between the two.

[0046] Generally, the airflow originates from an air compressor installed in another area. The air from the air compressor flows into the lower air path assembly through the compressed air intake pipe. The lower air path assembly is rigidly fixed to the lower part of the worktable frame by a bracket, away from the laser and the quartz jet tube, to avoid mechanical vibration interference that could affect the laser's drilling operation on the quartz jet tube. The compressed air intake pipe is then connected to a compressed air filter via a second compressed air vacuum connector, thereby inputting the compressed air produced by the air compressor into the compressed air filter.

[0047] During the process of compressed air entering the compressed air filter 14, moisture, oil mist and fine solid particles in the compressed air are filtered out, ensuring that the air entering the quartz tube is high-purity dry and clean air. This avoids compressed air contamination that could cause unnecessary reflection or refraction of the laser inside the quartz jet tube, resulting in irregular burns on the inner wall of the quartz jet tube. At the same time, it prevents oil stains from adhering to the inside of the quartz jet tube and causing contamination, or even prevents debris and dust from reacting with the quartz jet tube under the action of the laser.

[0048] The filtered clean air is drawn out from the first compressed air vacuum connector and delivered to the compressed air pressure regulating valve through the first compressed air connecting pipe. The air pressure regulating valve can be used to set a specific static pressure value at this location based on the diameter, length, and wall thickness of the quartz jet tube, ensuring that the airflow can carry away the molten slag without causing significant vibration of the quartz jet tube due to excessive wind force.

[0049] After leaving the lower air path assembly, the airflow passes through a second compressed air connection pipe and a compressed air adapter, entering a rubber hose used for flexibly connecting the upper and lower air path assemblies. Due to the excellent damping effect of rubber, it isolates the upper air path assembly from high-frequency vibrations transmitted from the air compressor and valve body, ensuring a smooth airflow into the perforation area. The end of the rubber hose connects to the upper air path assembly, which is attached to the surface of the equipment workbench via an adjustable magnetic clamp. The end of the magnetic clamp locks into a right-angle bent quartz air blowing tube mounting bracket. By adjusting the position of the magnetic clamp and the angle of the right-angle bent quartz air blowing tube mounting bracket, the air blowing nozzle can be aligned with the quartz injection tube.

[0050] The specific features of the air-blowing actuator consist of a right-angle bent quartz air-blowing tube and an air-blowing nozzle. The right-angle bent quartz air-blowing tube, made of quartz material, not only boasts high cleanliness but also possesses a certain rigidity, ensuring that the nozzle position does not shift under the impact of high-speed airflow. The air-blowing nozzle is located at the end of the entire air path, and its outer diameter is specially adapted to seal the air inlet opening of the quartz jet tube. Once the nozzle is inserted, this side of the tube forms a pressure-sealed end, while the other end of the quartz jet tube remains open.

[0051] The laser moving frame moves independently of the equipment's worktable, carrying the laser unit. The laser moving frame can be a high-precision gantry structure, capable of precise feeding in the horizontal plane. In actual operation, this embodiment employs a feed strategy from far to near. The laser unit first moves to the open end furthest from the air nozzle 6 to process the first hole. At this time, because the interior of the quartz tube is basically sealed except at the nozzle, a high static pressure is maintained inside the tube. The moment the laser penetrates the tube wall, the high-pressure air inside will gush out through the micro-holes, forcibly ejecting the generated molten debris out of the tube, thus preventing debris from condensing and adhering to the inner wall. As processing progresses, the laser moving frame, carrying the laser unit, continuously feeds towards the direction of the air nozzle, i.e., the air source. Although the tube's sealing decreases as the number of holes increases, the decreasing physical distance between the laser head and the air source reduces airflow resistance, and the airflow compensates for the leaked pressure, ensuring sufficient slag removal power for each drilling position.

[0052] In the initial stage of implementing the method in this embodiment, the quartz jet tube to be processed is first cleaned. Since the quartz tube will face the high temperatures generated by the laser in subsequent processes, any grease or dust may react with the quartz substrate at high temperatures, forming permanent burn points. After cleaning, the quartz tube needs to be thoroughly dried to ensure no moisture remains on the inner wall, and then it is placed horizontally in the jet tube placement fixture on the equipment's worktable. At this time, it is necessary to check whether the placement of the jet tube is correct, ensuring that its axis is completely parallel to the feed path of the laser moving frame.

[0053] Once the position is confirmed, a pre-fabricated graphite sheet is inserted into the quartz jet tube. This ensures it adheres stably to the bottom of the inner wall, directly below the laser emitter. This not only absorbs excess laser energy after penetrating the first layer of the tube wall but also narrows the airflow channel within the tube and increases the local gas velocity.

[0054] The air path connection stage then begins. The operator adjusts the magnetic clamp to position the air nozzle at the end of the upper air path assembly to the air inlet opening of the quartz jet tube, ensuring an airtight connection. This connection creates a pressure-sealed end on the air inlet side of the quartz jet tube, while the other end remains open, constructing a unidirectional pressure field. At this point, the air compressor is activated. Compressed air passes through a filter in the lower air path assembly to remove oil mist, moisture, and impurities, and is then set to a preset static pressure value via a pressure regulating valve. The airflow is guided through a rubber hose to the air nozzle and into the quartz tube. After confirming that the airflow inside the tube is stable and does not cause resonance fluctuations in the quartz tube, the laser moving frame and laser are activated to begin the formal drilling operation. After drilling at each location, the laser head moves to the next preset point until all holes are processed.

[0055] Regarding the feed strategy for laser drilling, this embodiment can choose between two paths: from far to near and from near to far. This method preferably adopts the far-to-near feed method, where the laser first moves to the open end furthest from the air nozzle to perform the first hole machining. The advantage of this strategy is that, during the initial machining stage when the pipe wall integrity is highest, the static pressure accumulated after the airflow travels a long path achieves efficient slag removal. Although the far end is far from the air source, a high initial static pressure can be maintained inside the pipe when it is in a sealed state with only one open end depressurized.

[0056] As the processing moves towards the gas source, although the increase in the number of processed holes leads to increased pressure leakage in the later stages, the decreasing physical distance between the laser head and the gas source reduces the airflow resistance, allowing the intake flow to more directly and fully compensate for the leakage at the rear end. This ensures uniform slag removal power from the first hole to the last, effectively eliminating the halo effect at the bottom of the hole.

[0057] In contrast, the near-to-far feeding method has the advantage of starting the processing point close to the air nozzle, resulting in an extremely short airflow path, extremely strong local air pressure at the initial drilling stage, and a laser head feed path consistent with the airflow direction, making the operation logic simple and intuitive. However, it has significant limitations for drilling longer quartz jet tubes. As the drilling point moves further away, the holes already drilled at the near end form dense pressure relief ports, causing significant airflow loss before reaching the far drilling position. Due to the longer resistance path at the far end, coupled with the pressure relief effect at the front, the positive pressure environment at the end of the tube collapses rapidly, preventing debris from being effectively ejected. This easily leads to slag buildup, molten adhesion, and internal wall burns due to insufficient heat dissipation in the last few holes.

[0058] This combination of spatial layout and process sequence solves the problems of vapor halo and gas marks caused by heat accumulation in quartz processing. The high-speed airflow curtain not only removes physical debris but also carries away ultrafine quartz fumes generated by laser ablation, preventing them from condensing and forming frost on the inner wall of the tube. This ensures both the geometric accuracy of the drilling and improves flexibility, effectively increasing the yield of quartz jet tubes and reducing production costs.

Claims

1. A laser drilling device for quartz jet tubes, characterized in that, The equipment includes a workbench (3), on the upper surface of the workbench (3) are a number of jet pipe placement fixtures (2) arranged linearly. An air blowing assembly is movably installed on the workbench (3). The air blowing assembly includes an upper air path assembly and a lower air path assembly. The upper air path assembly is connected to a magnetic fixing clamp (4) through a right-angle bent quartz air blowing pipe fixing bracket (5). The upper air path assembly and the lower air path assembly are connected by a rubber hose (8).

2. The quartz jet tube laser drilling device according to claim 1, characterized in that, The upper air path assembly includes an air blowing nozzle (6) and a right-angle bent quartz air blowing tube (7), wherein the air blowing nozzle (6) and the right-angle bent quartz air blowing tube (7) are in airtight communication.

3. A quartz jet tube laser drilling device according to claim 1 or 2, characterized in that, The lower air path assembly includes a compressed air filter (14), one end of which is connected to a compressed air inlet pipe (16) via a second compressed air vacuum connector (15), and the other end of which is connected to a compressed air pressure regulating valve (11) via a first compressed air connecting pipe (10).

4. A quartz jet tube laser drilling device according to claim 1 or 2, characterized in that, The equipment workbench (3) is equipped with a moving laser frame (18), and a laser (17) is fixedly installed at one end of the laser frame (18). The laser frame (18) moves independently of the equipment workbench (3).

5. A method for laser drilling of a quartz jet tube, applied to the laser drilling apparatus for a quartz jet tube as described in any one of claims 1 to 4, characterized in that, Includes the following steps: S1: Assemble the air blowing assembly and fix it on the equipment workbench; S2: Fix the jet pipe placement fixture on the equipment workbench and place the quartz jet pipe on the jet pipe placement fixture; S3: Connect the closed end of the quartz jet tube to the air nozzle, adjust the shape of the air circuit assembly by magnetic fixing clip, and introduce compressed air into the quartz jet tube. S4: Activate the laser moving frame, move the laser to the corresponding position of the quartz jet tube, start the laser to drill, and move to the next position.

6. The method for laser drilling of a quartz jet tube according to claim 5, characterized in that, S1 includes an air blowing assembly comprising an upper air path assembly and a lower air path assembly. The upper air path assembly is installed in a position that can be adjusted by a magnetic mounting bracket, while the lower air path assembly is fixedly installed on the equipment workbench.

7. The method for laser drilling of a quartz jet tube according to claim 6, characterized in that, The upper and lower air passage components are connected by a rubber hose.

8. A method for laser drilling of a quartz jet tube according to claim 5, 6, or 7, characterized in that, S2 includes a quartz jet tube that needs to be cleaned before being placed in the jet tube placement fixture to remove dust and debris. After drying, it is placed on the jet tube placement fixture, and a graphite sheet is inserted inside the quartz jet tube.

9. A method for laser drilling of a quartz jet tube according to claim 5, 6, or 7, characterized in that, The S4 also includes a quartz jet tube connected to the air blowing nozzle, with one end closed and the other end open.

10. The method for laser drilling of a quartz jet tube according to claim 9, characterized in that, The laser drilling direction is selected to feed from the open end to the closed end.

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