Chip wet etching machine convenient to adjust

Abstract

A chip wet etching machine convenient to adjust disclosed by the present invention comprises a mounting base, a bearing plate and a wet etching machine body, one end of the mounting base is provided with a cavity, a lead screw is rotatably connected in the cavity, the lead screw is fixedly sleeved with a first gear, and a second gear engaged with the first gear is arranged in the cavity. The second gear is rotationally connected with the inner wall of the cavity through a rotating rod, and one end of the rotating rod penetrates through the inner wall of the cavity and is fixedly connected with a knob; a supporting column is fixedly connected to the top of the mounting base, a sliding groove is formed in the side, close to the bearing plate, of the supporting column, the top of the lead screw penetrates through the inner wall of the cavity and extends into the sliding groove, the end, located in the sliding groove, of the lead screw is sleeved with a sliding block in a threaded mode, one end of the sliding block is fixedly connected with the bearing plate, and a plurality of guide grooves are symmetrically formed in the top of the mounting base. According to the invention, through the arrangement of multiple adjusting mechanisms, the wet etching machine can be freely adjusted according to actual installation requirements, so that the installation efficiency of the wet etching machine is effectively improved.

Description

Technical Field

[0001] This invention relates to the field of chip processing technology, and in particular to a chip wet etching machine that is easy to adjust. Background Technology

[0002] Wafers are the basic material for manufacturing semiconductor chips. Wet etching removes the surface material of silicon wafers using chemical reagents. Generally, wet etching is performed on a wet etching machine, which mainly includes an etching unit, a washing unit, and a drying unit. However, current etching units use a suction cup to pick up and fix the wafer before spraying the etching solution. When the wafer is in place, the suction cup rises to pick up the wafer and sprays the etching solution from above. After etching, the wafer is sent out of the cavity. During operation, the wafer above the suction cup often breaks, causing a large amount of etching solution to enter the vacuum pipe, solenoid valve, etc., which can cause serious damage to the equipment. After etching, the wafer needs to be washed with water. Currently, the water washing equipment mainly involves spraying the surface of the wafer with spray nozzles inside the water washing chamber after the wafer enters the water washing chamber. The wafer is washed during the transportation process.

[0003] However, the existing wet etching machine has a relatively simple external structure, and it cannot be freely adjusted according to the actual installation environment, thus affecting the installation efficiency of the wet etching machine. Summary of the Invention

[0004] The purpose of this invention is to solve the problem that the external structure of existing wet etching machines is relatively simple and that wet etching machines cannot be freely adjusted according to the actual installation environment, and to propose an easily adjustable chip wet etching machine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: An easily adjustable chip wet etching machine includes a mounting base, a load-bearing plate, and a wet etching machine body. One end of the mounting base has a cavity, and a lead screw is rotatably connected inside the cavity. A first gear is fixedly sleeved on the lead screw. A second gear that meshes with the first gear is provided inside the cavity. The second gear and the inner wall of the cavity are rotatably connected through a rotating rod. One end of the rotating rod passes through the inner wall of the cavity and is fixedly connected to a knob. The top of the mounting base is fixedly connected to a support column. The support column has a sliding groove on the side near the load-bearing plate. The top of the lead screw penetrates the inner wall of the cavity and extends into the sliding groove. A slider is threaded onto one end of the lead screw located in the sliding groove. One end of the slider is fixedly connected to the load-bearing plate. The top of the mounting base has multiple guide grooves arranged symmetrically. A guide mechanism is fixedly connected in the guide groove. The top of the load-bearing plate is provided with a mounting groove corresponding to the wet etching machine body. The bottom of the mounting groove is slidably connected to a pad through multiple damping shock absorbers. Multiple symmetrically arranged locking blocks are fixedly connected to the outer wall of the wet etching machine body. The top of the load-bearing plate is provided with a fixing groove, and a locking mechanism corresponding to the locking block is fixedly connected in the fixing groove.

[0006] Preferably, the guiding mechanism includes a guide rod, on which a support block is slidably sleeved. The support block is connected to the bottom of the load-bearing plate via a connecting rod, and the two ends of the connecting rod are rotatably connected to the support block and the load-bearing plate, respectively.

[0007] Preferably, a first spring is sleeved on the guide rod, and the two ends of the first spring are fixedly connected to the support block and the inner wall of the guide groove, respectively.

[0008] Preferably, the locking mechanism includes a crossbar, on which an L-shaped locking rod is slidably sleeved, and the locking block is provided with a locking groove corresponding to the L-shaped locking rod.

[0009] Preferably, a second spring is sleeved on the crossbar, and the two ends of the second spring are fixedly connected to the L-shaped clamp and the inner wall of the fixing groove, respectively.

[0010] Preferably, one end of the knob is rotatably connected to an arc-shaped insert rod via a rotating shaft, and the outer wall of the mounting base is provided with multiple slots corresponding to the arc-shaped insert rod.

[0011] Preferably, the bottom of the mounting base is fixedly connected with a plurality of locking blocks, and the locking blocks are provided with locking holes.

[0012] Preferably, the inner wall of the mounting groove is provided with a support groove corresponding to the pad, a fixing rod is fixedly connected in the support groove, and the pad is provided with a through opening corresponding to the fixing rod.

[0013] Preferably, a vertical rod is fixedly connected inside the slide groove, and the slider is provided with a sliding opening corresponding to the vertical rod. Multiple balls are slidably connected inside the sliding opening, and the edges of the balls are in contact with the vertical rod. Beneficial effects

[0014] 1. In this invention, the rotating rod is driven to rotate by the knob, and then the lead screw is driven to rotate by the meshing action between the first gear and the second gear, thereby driving the load-bearing plate to move up and down through the slider, adjusting the height of the wet etching machine body. At the same time, the setting of the L-shaped clamp and the clamp block can facilitate the disassembly and maintenance of the wet etching machine body. 2. In this invention, the wet etching machine can be freely adjusted according to actual installation needs by setting multiple adjustment mechanisms, thereby effectively improving the installation efficiency of the wet etching machine; 3. In this invention, the locking block facilitates the fixing of the mounting base, while the support block and connecting rod prevent the load-bearing plate from shaking. Additionally, the damping shock absorber and pad provide a certain degree of shock absorption and buffering for the wet etching machine body. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a chip wet etching machine that is easy to adjust, as proposed in this invention. Figure 2 This is a top view of the support plate of a chip wet etching machine that is easy to adjust, as proposed in this invention. Figure 3 for Figure 1 A schematic diagram of the structure at point A; Figure 4 for Figure 1 A schematic diagram of the structure at point B.

[0016] In the diagram: 1 Mounting base, 2 Load-bearing plate, 3 Wet etching machine body, 4 Lead screw, 5 First gear, 6 Second gear, 7 Rotating rod, 8 Knob, 9 Support column, 10 Slider, 11 Damping shock absorber, 12 Pad, 13 Clamping block, 14 Guide rod, 15 Support block, 16 Connecting rod, 17 First spring, 18 Crossbar, 19 L-shaped clamping rod, 20 Second spring, 21 Rotating shaft, 22 Arc-shaped insert rod, 23 Locking block, 24 Fixing rod, 25 Vertical rod, 26 Ball bearing. Detailed Implementation

[0017] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0018] Reference Figure 1-4 An easily adjustable chip wet etching machine includes a mounting base 1, a load-bearing plate 2, and a wet etching machine body 3. Multiple locking blocks 23 are fixedly connected to the bottom of the mounting base 1. The locking blocks 23 are provided with locking holes to facilitate fixing the mounting base 1. One end of the mounting base 1 is provided with a cavity. A lead screw 4 is rotatably connected in the cavity to drive the slider 10 to move up and down. A first gear 5 is fixedly sleeved on the lead screw 4. A second gear 6 that meshes with the first gear 5 is provided in the cavity to drive the first gear 5 to rotate. The second gear 6 and the inner wall of the cavity are rotatably connected through a rotating rod 7. One end of the rotating rod 7 passes through the inner wall of the cavity and is fixedly connected to a knob 8 to drive the rotating rod 7 to rotate. In this embodiment, one end of the knob 8 is rotatably connected to an arc-shaped plug 22 via a rotating shaft 21 to facilitate fixing the knob 8. The outer wall of the mounting base 1 is provided with multiple slots corresponding to the arc-shaped plug 22. The top of the mounting base 1 is fixedly connected to a support column 9 for supporting the load-bearing plate 2. The support column 9 is provided with a sliding groove on the side near the load-bearing plate 2. The top of the lead screw 4 penetrates the inner wall of the cavity and extends into the sliding groove. The sliding groove is fixedly connected to a vertical rod 25 for supporting the slider 10. The slider 10 is provided with a sliding opening corresponding to the vertical rod 25. Multiple balls 26 are slidably connected in the sliding opening. The edges of the balls 26 contact the vertical rod 25 to reduce the friction between the vertical rod 25 and the inner wall of the sliding opening. The end of the lead screw 4 located in the sliding groove is threadedly connected to the slider 10. One end of the slider 10 is fixedly connected to the load-bearing plate 2. In this embodiment, the top of the mounting base 1 is provided with a plurality of symmetrically arranged guide grooves. A guide mechanism is fixedly connected in the guide grooves. The guide mechanism includes a guide rod 14 for supporting the support block 15. The support block 15 is slidably sleeved on the guide rod 14 for supporting the connecting rod 16. The support block 15 is connected to the bottom of the load-bearing plate 2 through the connecting rod 16 for supporting the load-bearing plate 2. The two ends of the connecting rod 16 are rotatably connected to the support block 15 and the load-bearing plate 2 respectively. A first spring 17 is sleeved on the guide rod 14. The two ends of the first spring 17 are fixedly connected to the support block 15 and the inner wall of the guide groove respectively, providing a certain elastic support for the support block 15. In this embodiment, the top of the load-bearing plate 2 is provided with an installation groove corresponding to the wet etching machine body 3. The bottom of the installation groove is slidably connected to a pad 12 through multiple damping shock absorbers 11, which plays a certain role in shock absorption and buffering for the wet etching machine body 3. The inner side wall of the installation groove is provided with a support groove corresponding to the pad 12. A fixing rod 24 is fixedly connected in the support groove. The pad 12 is provided with a through hole corresponding to the fixing rod 24. Multiple symmetrically arranged clips 13 are fixedly connected to the outer wall of the wet etching machine body 3 for fixing the wet etching machine body 3. In this embodiment, the top of the load-bearing plate 2 is provided with a fixing groove, and a locking mechanism corresponding to the locking block 13 is fixedly connected in the fixing groove. The locking mechanism includes a horizontal bar 18, and an L-shaped locking rod 19 is slidably sleeved on the horizontal bar 18 for fixing the locking block 13. The locking block 13 is provided with a locking groove corresponding to the L-shaped locking rod 19. A second spring 20 is sleeved on the horizontal bar 18. The two ends of the second spring 20 are fixedly connected to the L-shaped locking rod 19 and the inner wall of the fixing groove, respectively, providing a certain elastic support for the L-shaped locking rod 19.

[0019] In this embodiment, the knob 8 drives the rotating rod 7 to rotate, and then the meshing action between the first gear 5 and the second gear 6 drives the lead screw 4 to rotate, thereby driving the load-bearing plate 2 to move up and down through the slider 10, adjusting the height of the wet etching machine body 3. At the same time, the L-shaped locking rod 19 and the locking block 13 can facilitate the disassembly and maintenance of the wet etching machine body 3.

[0020] In this embodiment, the wet etching machine can be freely adjusted according to actual installation needs by setting multiple adjustment mechanisms, thereby effectively improving the installation efficiency of the wet etching machine.

[0021] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An easily adjustable chip wet etching machine, comprising a mounting base (1), a load-bearing plate (2), and a wet etching machine body (3), characterized in that: One end of the mounting base (1) is provided with a cavity, and a lead screw (4) is rotatably connected in the cavity. A first gear (5) is fixedly sleeved on the lead screw (4). A second gear (6) meshes with the first gear (5) in the cavity. The second gear (6) and the inner wall of the cavity are rotatably connected through a rotating rod (7). One end of the rotating rod (7) passes through the inner wall of the cavity and is fixedly connected with a knob (8). The top of the mounting base (1) is fixedly connected to a support column (9). The support column (9) is provided with a sliding groove on the side near the load-bearing plate (2). The top of the lead screw (4) penetrates the inner wall of the cavity and extends into the sliding groove. A slider (10) is threaded onto one end of the lead screw (4) located in the sliding groove. One end of the slider (10) is fixedly connected to the load-bearing plate (2). The top of the mounting base (1) is provided with a plurality of symmetrically arranged guide grooves. A guide mechanism is fixedly connected in the guide groove. The top of the load-bearing plate (2) is provided with an installation groove corresponding to the wet etching machine body (3). The bottom of the installation groove is slidably connected to a pad (12) through multiple damping shock absorbers (11). Multiple symmetrically arranged locking blocks (13) are fixedly connected to the outer wall of the wet etching machine body (3). The top of the load-bearing plate (2) is provided with a fixing groove. A locking mechanism corresponding to the locking block (13) is fixedly connected in the fixing groove.

2. The easily adjustable chip wet etching machine according to claim 1, characterized in that: The guiding mechanism includes a guide rod (14), on which a support block (15) is slidably sleeved. The support block (15) is connected to the bottom of the load-bearing plate (2) via a connecting rod (16), and the two ends of the connecting rod (16) are rotatably connected to the support block (15) and the load-bearing plate (2) respectively.

3. The easily adjustable chip wet etching machine according to claim 2, characterized in that: A first spring (17) is sleeved on the guide rod (14), and the two ends of the first spring (17) are fixedly connected to the support block (15) and the inner wall of the guide groove, respectively.

4. The easily adjustable chip wet etching machine according to claim 1, characterized in that: The locking mechanism includes a crossbar (18), on which an L-shaped locking rod (19) is slidably sleeved, and the locking block (13) is provided with a locking groove corresponding to the L-shaped locking rod (19).

5. The easily adjustable chip wet etching machine according to claim 4, characterized in that: A second spring (20) is sleeved on the crossbar (18), and the two ends of the second spring (20) are fixedly connected to the L-shaped clamp (19) and the inner wall of the fixing groove, respectively.

6. The easily adjustable chip wet etching machine according to claim 1, characterized in that: One end of the knob (8) is rotatably connected to an arc-shaped plug (22) via a rotating shaft (21), and the outer wall of the mounting base (1) is provided with multiple slots corresponding to the arc-shaped plug (22).

7. The easily adjustable chip wet etching machine according to claim 1, characterized in that: The bottom of the mounting base (1) is fixedly connected to a plurality of locking blocks (23), and the locking blocks (23) are provided with locking ports.

8. The easily adjustable chip wet etching machine according to claim 1, characterized in that: The inner wall of the mounting groove is provided with a support groove corresponding to the pad (12), and a fixing rod (24) is fixedly connected in the support groove. The pad (12) is provided with a through hole corresponding to the fixing rod (24).

9. The easily adjustable chip wet etching machine according to claim 1, characterized in that: A vertical rod (25) is fixedly connected inside the groove. The slider (10) is provided with a sliding opening corresponding to the vertical rod (25). Multiple balls (26) are slidably connected inside the sliding opening. The edges of the balls (26) are in contact with the vertical rod (25).

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