A rotating material platform system and its sealing method under high temperature and high corrosion environment

Abstract

This invention provides a rotating feed platform system and its sealing method for high-temperature and high-corrosion environments. The system, located in an external furnace cavity, includes a graphite plate, a rotating graphite shaft, a rotating metal shaft, an inverted "convex"-shaped double-layer jacketed furnace cover, insulation felt, a labyrinth seal device, an air curtain seal device, a magnetohydrodynamic seal, and a drive component. The furnace cover is fitted onto the rotating metal shaft to form a cavity, within which the insulation felt, labyrinth seal device, and air curtain seal device are installed sequentially from top to bottom. This invention achieves decoupling of high-temperature load-bearing capacity and precision transmission through a segmented graphite-metal shaft; it uses gradient insulation formed by the cooling of the insulation felt and the furnace cover jacket to control the temperature of the sealing area to ≤60℃; and it achieves zero intrusion of corrosive gases through a three-stage series seal composed of a labyrinth seal, a reverse inert gas curtain, and a magnetohydrodynamic seal. Therefore, this invention effectively solves the technical problems existing in the prior art of rotating feed platform systems under high-temperature and high-corrosion environments.

Description

Technical Field

[0001] This invention belongs to the field of industrial furnace rotary transmission and dynamic sealing technology, specifically relating to a material platform rotation system and its sealing method under high temperature and high corrosion environment. Background Technology

[0002] Rotary dynamic seals in industrial furnaces are key components for ensuring a stable process environment within the furnace. Commonly used sealing methods include labyrinth seals, packing seals, mechanical seals, and magnetohydrodynamic (MHD) seals. MHD seals are frequently used in precision rotating equipment due to their high sealing accuracy, low wear, and long service life.

[0003] In high-temperature industrial furnace applications such as silicon carbide vapor deposition (CVD / CVI), the rotating platform needs to operate continuously in an environment with temperatures above 1200℃ and strong corrosive gases such as hydrogen chloride and trichloromethylsilane. Existing dynamic sealing technology has the following defects: (1) The sealing device is directly attached to the inner wall of the furnace cavity without an independent heat insulation structure, and the sealing element directly bears the high temperature radiation inside the furnace; (2) Heat is dissipated only through circulating water cooling on the outer wall of the furnace shell without a heat insulation layer, the high temperature conduction path is short, and the temperature of the sealing area is difficult to control; (3) The sealing form is simple (mostly labyrinth seals or packing seals), without inert gas protection, and strong corrosive gases can easily enter along the gap of the drive shaft; (4) The drive shaft is an integral metal shaft, which is in direct contact with the high temperature and corrosive environment inside the furnace, and is prone to deformation and corrosion, affecting the rotation accuracy; (5) The transmission and sealing systems are designed independently without a collaborative protection mechanism, and cannot be adapted to the harsh working conditions of high temperature, corrosion and high precision.

[0004] Chinese patent CN102864437A discloses a rotating device for a reaction chamber, employing an integral metal spindle and a single magnetohydrodynamic seal. Nitrogen gas is introduced into the reaction chamber through an axial through-hole inside the spindle for cooling. In this design, the nitrogen gas is introduced into the reaction chamber (process gas supply direction), without forming a reverse purge gas curtain facing the furnace cavity side. Furthermore, no pre-installed physical seal or independent heat insulation layer is provided, and the magnetohydrodynamic seal directly faces the high-temperature environment inside the reaction chamber. Under highly corrosive conditions above 1000℃, the magnetohydrodynamic seal is prone to gelation failure, and the metal shaft is easily corroded, making it difficult to meet the requirements for long-term stable operation.

[0005] Chinese patent CN118499478A discloses a hollow shaft magnetohydrodynamic sealing device and a high-temperature vacuum heat treatment equipment, which uses a double-layer hollow rotating shaft and an integral water-cooled jacket to improve the high-temperature resistance of the magnetohydrodynamic seal. This solution still uses a single metal shaft and passively blocks heat conduction only through structural optimization and external cooling; it does not consider the protection against highly corrosive gases, nor does it include any pre-installed physical seal or inert gas active purging system, thus failing to solve the problem of corrosive gases intruding along the shaft gap and causing corrosion failure of components such as bearings and motors. Summary of the Invention

[0006] The technical problem to be solved by this invention is to overcome the defects of existing material platform rotation systems in high-temperature and high-corrosion environments, such as high-temperature sealing failure, corrosive gas intrusion, insufficient cooling, and poor coordination between transmission and sealing. The invention provides a material platform rotation system and its sealing method that can achieve low-temperature stability of the sealing area, zero intrusion of corrosive gases, long-term reliable transmission and sealing, and high-precision and stable operation of the material platform rotation.

[0007] To achieve the above objectives, the present invention provides a rotating material platform system for high-temperature and high-corrosion environments. This system is located in an external furnace cavity and includes: The graphite plate is used to support the workpiece to be processed and rotates synchronously with the drive shaft. A rotating graphite shaft, whose upper end is fixedly connected to a graphite plate and passes through the high-temperature zone of the external furnace cavity, is made of graphite. It is used to adapt to the high-temperature corrosive environment inside the external furnace cavity and to transmit torque, thus avoiding direct contact between the rotating metal shaft and the high-temperature medium. A rotating metal shaft, the upper end of which is coaxially connected to the lower end of a rotating graphite shaft, is made of stainless steel and is used to transmit motor torque and support the rotating graphite shaft and graphite plate to ensure rotational coaxiality. The furnace cover has an inverted "convex" shaped double-layered jacket structure. The inner cavity of the jacket is connected to the external cooling medium conveying mechanism. The furnace cover is fitted onto a rotating metal shaft, forming a cavity with the outside of the rotating metal shaft. Inside this cavity, from top to bottom, are installed an insulation felt, a labyrinth sealing device, and an air curtain sealing device, wherein: The insulation felt is located at the top of the cavity and is attached to the outer periphery of the rotating metal shaft to block the conduction of high temperature; The labyrinth sealing device is located in the middle of the cavity and is fitted to the outside of the rotating metal shaft to form a physical barrier to prevent dust and large particles from entering the furnace. The air curtain sealing device includes an air inlet pipe, which is located at the bottom of the furnace cover and communicates with the inside of the cavity. The end of the air inlet pipe away from the furnace cover is connected to an external inert gas supply pipeline to introduce inert gas and form a positive pressure air curtain. Magnetohydrodynamic seal, located below the air curtain sealing device and sleeved on the lower end of the rotating metal shaft, is used to achieve zero-leakage sealing in a low-temperature stable environment; A drive component, which is connected to a rotating metal shaft, is used to drive the rotating metal shaft to rotate.

[0008] Preferably, the system further includes bearings, which are disposed between the labyrinth seal device and the air curtain seal device and between the air curtain seal device and the magnetohydrodynamic seal, for supporting the rotating metal shaft, ensuring rotational coaxiality, and reducing rotational frictional resistance.

[0009] Preferably, the system further includes a coupling, through which the drive component is connected to a rotating metal shaft to compensate for coaxiality errors, transmit torque, and buffer rotational impacts.

[0010] Preferably, the pressure of the inert gas introduced through the inlet pipe is 0.02-0.05 MPa, and the inert gas is nitrogen or argon. This pressure range has been experimentally verified to be the optimal window for balancing the sealing effect and the stability of the flow field inside the furnace.

[0011] Preferably, the driving component is a drive motor, more preferably a servo motor, with an adjustable speed of 0.5-10 r / min.

[0012] Preferably, the insulation felt has a thickness of 100-150 mm and is made of rigid carbon felt or alumina fiber felt. This thickness range has been experimentally verified to be a key threshold for reducing the temperature of the sealed area to below 60°C.

[0013] The present invention also provides a sealing method for a rotating platform system under the above-mentioned high temperature and high corrosion environment, the method comprising: Power transmission steps: The driving component drives the rotating metal shaft to rotate, which in turn drives the rotating graphite shaft and graphite material plate to rotate synchronously in the external furnace cavity, so as to achieve uniform rotation of the workpiece; Gradient insulation steps: The heat insulation felt installed inside the furnace cover blocks the high temperature inside the external furnace cavity from being conducted to the labyrinth sealing device. At the same time, the cooling medium in the jacket of the furnace cover is used to control the temperature on the lower side of the labyrinth sealing device to ≤60℃. Multi-level protection steps: The labyrinth sealing device physically blocks dust, while inert gas is continuously introduced into the cavity through the air inlet pipe to form a reverse air curtain from bottom to top to actively block corrosive gases. Terminal sealing procedure: In a low-temperature clean environment of ≤60℃, the system achieves zero-leakage dynamic sealing through a magnetohydrodynamic seal.

[0014] The present invention also provides a high-temperature, high-corrosion industrial furnace, which includes the material platform rotation system described in any of the above claims.

[0015] Compared with the prior art, the present invention has the following beneficial technical effects: (1) By decoupling the functions of the high-temperature rotating graphite shaft and the precision transmission rotating metal shaft, the rotating graphite shaft directly withstands the high-temperature corrosion environment, while the rotating metal shaft is far away from the high-temperature zone, thus fundamentally solving the problem of thermal deformation and chemical corrosion of a single metal shaft in a high-temperature corrosion environment.

[0016] (2) By setting up insulation felt and furnace cover jacket, and combining the insulation felt gradient heat insulation and jacket water cooling, the heat inside the external furnace cavity can be efficiently blocked before reaching the sealing area, forming a heat management method of "heat insulation as the main function and cooling as the auxiliary function", thereby stabilizing the working area temperature of the magnetic fluid seal to ≤60℃, so that the magnetic fluid seal can work stably for a long time in the high temperature furnace.

[0017] (3) By setting up a three-level sealing structure of labyrinth seal, inert gas positive pressure purging and magnetohydrodynamic seal, the present invention forms a gradient protection chain of "physical barrier → gas curtain purging → precision sealing". The labyrinth seal physically blocks large particles to protect the magnetohydrodynamic fluid from contamination, the positive pressure gas curtain blocks corrosive gas molecules to reduce chemical damage to the magnetohydrodynamic fluid, and the magnetohydrodynamic fluid achieves zero leakage to compensate for the leakage of the labyrinth seal, thus realizing a complete protection chain from coarse to precise and from passive to active.

[0018] (4) By setting bearings between the labyrinth seal and the air curtain seal and between the air curtain seal and the magnetohydrodynamic seal, the present invention ensures that the bearings are within the air curtain protection range, avoiding corrosion and grease failure, while ensuring high coaxiality and low frictional resistance of the rotating metal shaft, thus extending the life of the bearings and the entire transmission system. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is a cross-sectional view of a material platform rotation system under high temperature and high corrosion environment according to the present invention; Figure 2 This is a front view of a rotating material platform system for high-temperature and high-corrosion environments according to the present invention.

[0021] In the diagram: 1. Material plate, 2. Rotating graphite shaft, 3. Rotating metal shaft, 4. Furnace cover, 5. Insulation felt, 6. Labyrinth seal device, 7. Air inlet pipe, 8. Magnetohydrodynamic seal, 9. Drive component, 10. Bearing, 11. Coupling. Detailed Implementation

[0022] To make the objectives, technical solutions, and technical effects of this invention clearer, the invention will be described in detail below with reference to the accompanying drawings, multiple embodiments, and comparative examples. In the following description, the same components are referred to by the same reference numerals.

[0023] Example 1 like Figure 1 , Figure 2 As shown, this embodiment provides a rotating material platform system for high-temperature and high-corrosion environments. This system is located in an external furnace cavity and includes: Graphite plate 1; A rotating graphite shaft 2, the upper end of which is fixedly connected to the graphite material plate 1 and penetrates the high-temperature zone of the external furnace cavity; The upper end of the rotating metal shaft 3 is coaxially connected to the lower end of the rotating graphite shaft 2; The furnace cover 4 has an inverted "convex" double-layer jacket structure. The inner cavity of the jacket of the furnace cover 4 is connected to the external cooling medium conveying mechanism. The external cooling medium is circulating cooling water with an inlet temperature of 25℃±2℃, an outlet temperature of 35℃±2℃, and a flow rate of 10±1L / min. The furnace cover 4 is fitted onto the rotating metal shaft 3 and forms a cavity with the outside of the rotating metal shaft 3. Inside this cavity, from top to bottom, are installed a heat insulation felt 5, a labyrinth sealing device 6, and an air curtain sealing device, wherein: The thermal insulation felt 5 is located at the top of the cavity and is attached to the outer periphery of the rotating metal shaft 3 to block the conduction of high temperature. The thermal insulation felt 5 is 100mm thick and is multi-layered composite (inner soft felt + outer hard felt), with a thermal conductivity ≤0.15W / (m·K) (1000℃). The labyrinth sealing device 6 is located in the middle of the cavity and is fitted and connected to the outside of the rotating metal shaft 3. It has a 5-stage tortuous labyrinth with a radial clearance of 0.3±0.05mm. The gas curtain sealing device includes an air inlet pipe 7, which is located at the lower part of the furnace cover 4 and communicates with the inside of the cavity. The end of the air inlet pipe 7 away from the furnace cover 4 is connected to an external inert gas supply pipeline. The air inlet pipe 7 is a Φ8mm stainless steel pipe with four radial purge holes (Φ1.5mm). The outlet direction is at an angle of 30° with the center line of the axis and faces the furnace cavity side to form a reverse gas curtain from bottom to top. High-purity nitrogen is introduced at a pressure of 0.03MPa and a flow rate of 5L / min. The magnetic fluid seal 8 is located below the air curtain sealing device and sleeved on the lower end of the rotating metal shaft 3. The permanent magnet is neodymium iron boron with 8 pole teeth, and the magnetic fluid is diester-based Fe3O4 nano magnetic fluid. The drive component 9 is connected to the rotating metal shaft 3 to drive the rotating metal shaft 3 to rotate. The drive component 9 is a servo motor with a power of 400W and an adjustable speed of 0.5-10r / min.

[0024] In the above embodiment, the external furnace temperature is 1200℃, and the system also includes a bearing 10, which is disposed between the labyrinth sealing device 6 and the air curtain sealing device, and between the air curtain sealing device and the magnetohydrodynamic seal 8; it also includes a coupling 11, through which the drive component 9 is connected to the rotating metal shaft 3; its assembly and working principle are as follows: The furnace cover 4 is fitted onto the rotating metal shaft 3, forming a cavity between them. Inside the cavity, from top to bottom, the insulation felt 5, the labyrinth sealing device 6, and the air curtain sealing device (supplying air by the air inlet pipe 7) are installed sequentially. The magnetic fluid seal 8 is located below the air curtain sealing device. The drive component 9 drives the rotating metal shaft 3 to rotate through the coupling 11, which in turn drives the rotating graphite shaft 2 and the graphite material plate 1 to rotate synchronously in the furnace cavity. The high temperature in the external furnace cavity is blocked by the insulation felt 5, and the residual heat is carried away by the cooling water in the jacket of the furnace cover 4, controlling the temperature of the area under the labyrinth sealing device 6 and the magnetic fluid seal 8 to ≤60℃. The labyrinth sealing device 6 physically blocks dust, and the air inlet pipe 7 introduces 0.03MPa nitrogen to form a reverse air curtain from bottom to top, actively blocking corrosive gases. The magnetic fluid seal 8 achieves zero leakage in a low-temperature clean environment.

[0025] Example 2 It is largely the same as Example 1, except that the thickness of the insulation felt is 120 mm and the inert gas purging pressure in the air inlet pipe 7 is 0.02 MPa.

[0026] Example 3 It is largely the same as Example 1, except that the thickness of the insulation felt 5 is 150 mm and the inert gas purging pressure in the air inlet pipe 7 is 0.05 MPa.

[0027] Comparative Example 1 It is largely the same as Example 1, except that there is no insulation felt 5.

[0028] Comparative Example 2 It is largely the same as Example 1, except that the thickness of the thermal insulation felt 5 is 50 mm.

[0029] Comparative Example 3 It is largely the same as Example 1, except that the thickness of the insulation felt 5 is 80mm.

[0030] The steady-state temperature values ​​at the magnetohydrodynamic seal 8 in Examples 1-3 and Comparative Examples 1-3 were detected in real time, and the detection results are shown in Table 1.

[0031]

[0032] As can be seen from Table 1, the thickness of the thermal insulation felt 5 plays an important role in the temperature of the sealing area corresponding to the magnetic fluid seal 8. When the thickness of the thermal insulation felt 5 is ≥100mm, it can effectively ensure that the temperature of the sealing area corresponding to the magnetic fluid seal 8 is reduced to below 60℃.

[0033] Comparative Example 4 Similar to Example 1, except that: only a single magnetohydrodynamic seal 8 is installed, without the labyrinth seal device 6 and the air curtain seal device.

[0034] Comparative Example 5 It is largely the same as Example 1, except that no air curtain sealing device is installed.

[0035] Comparative Example 6 It is largely the same as Example 1, except that: no labyrinth sealing device is installed, and the air outlet of the air curtain sealing device faces the magnetohydrodynamic seal 8.

[0036] Comparative Example 7 It is largely the same as Example 1, except that: no labyrinth sealing device is installed, and the inert gas purging pressure in the intake pipe 7 is 0.01 MPa.

[0037] The corrosive gases and leakage rates of Examples 1 and Comparative Examples 4-7 were tested respectively, and the specific results are shown in Table 2.

[0038]

[0039] As can be seen from Table 2, whether it is the single magnetohydrodynamic seal in Comparative Example 4, or any combination of magnetohydrodynamic seal, air curtain seal, and labyrinth seal in Comparative Examples 5-7, HCl corrosive gas will be detected in the corresponding sealing area of ​​the magnetohydrodynamic seal 8; while in Example 1, when the labyrinth seal, air curtain seal, and magnetohydrodynamic seal are connected in series and the reverse air curtain pressure is in the range of 0.02-0.05 MPa, no HCl concentration can be detected in the corresponding sealing area of ​​the magnetohydrodynamic seal 8, that is, the leakage rate of Examples 1-3 is close to zero, and the corrosive gas is completely blocked.

[0040] Comparative Example 8 The integrated metal spindle and single magnetohydrodynamic seal structure disclosed in the background technology CN102864437A are adopted.

[0041] Comparative Example 9 The double-layer hollow rotating shaft and integral water-cooled jacket structure disclosed in CN118499478A in the background art are adopted.

[0042] The transmission accuracy and service life of the magnetohydrodynamic seals of Example 1 and Comparative Examples 8-9 were tested respectively, and the test results are shown in Table 3.

[0043]

[0044] As can be seen from Table 3, the segmented structure of rotating graphite shaft 2 and rotating metal shaft 3 adopted in Example 1 keeps rotating metal shaft 3 in a low-temperature clean environment. Compared with the integrated rotating shaft structure of Comparative Example 8 and Comparative Example 9, the runout of the corresponding graphite platform 1 is reduced by an order of magnitude, and corrosion is completely avoided.

[0045] Meanwhile, the service life of the magnetic fluid seal 8 in Comparative Examples 8 and 9 is less than 400 hours, while the service life of the magnetic fluid seal 8 in Example 1 exceeds 1200 hours. That is, the service life of the magnetic fluid seal 8 in Example 1 is more than 5.7 times that of Comparative Example 8 and more than 3.2 times that of Comparative Example 9.

[0046] Comparative Example 10 Similar to Example 1, except that the insulation felt 5 is replaced with alumina hollow sphere brick (Al2O3 content ≥99%, thickness 100mm).

[0047] Comparative Example 11 Similar to Example 1, except that the labyrinth sealing device 6 is replaced with an expansion ring seal (3 expansion rings).

[0048] Comparative Example 12 Similar to Example 1, except that the magnetohydrodynamic seal 8 is replaced with a high-temperature mechanical seal (silicon carbide end face, spring loaded).

[0049] Test results: Leakage rate <1×10 -8 Pa·m³ / s, higher than that of magnetohydrodynamic seals, but within an acceptable range, suitable for applications with slightly lower leakage rate requirements.

[0050] Comparative Example 13 The procedure is largely the same as in Example 1, except that the purge gas is replaced with argon (99.999% purity) at a pressure of 0.04 MPa.

[0051] Test results: Sealing zone temperature 54℃, leakage rate <1×10 -9 Pa·m³ / s, with an effect comparable to nitrogen.

[0052] The corrosive gases and leakage rates of comparative examples 10-13 were tested, and the specific results are shown in Table 4.

[0053] As can be seen from Table 4, replacing the multi-layer composite (inner soft felt + outer hard felt) insulation felt 5 in Example 1 with the alumina hollow spherical brick in Comparative Example 10 resulted in comparable sealing performance; replacing the labyrinth sealing device 6 in Example 1 with the expansion ring seal in Comparative Example 11 slightly reduced the final dust blocking effect, but still met the process requirements; replacing the magnetic fluid seal 8 in Example 1 with a high-temperature mechanical seal, although the final sealing effect was within an acceptable range, was still lower than that of the magnetic fluid seal 8; replacing the inert gas in the air inlet pipe 7 in Example 1 from nitrogen to argon resulted in comparable final sealing performance.

[0054] In summary, this invention fundamentally solves the problems of thermal deformation and chemical corrosion of a single metal shaft under high-temperature conditions by decoupling the high-temperature-bearing rotating graphite shaft 2 from the precision-driven rotating metal shaft 3. The rotating graphite shaft 2 directly withstands the high-temperature corrosive environment, while the rotating metal shaft 3 is kept away from the high-temperature zone. Simultaneously, by setting up the insulation felt 5 and the furnace cover jacket, combined with the gradient insulation of the insulation felt 5 and the water cooling of the jacket, heat from the external furnace cavity can be efficiently blocked before reaching the sealing area, forming a thermal management method of "insulation as the main function and cooling as a secondary function," thereby enhancing the performance of the magnetic fluid seal 8. The working area temperature is stably controlled at ≤60℃, enabling the magnetic fluid seal 8 to work stably for a long time in the high-temperature furnace. Moreover, based on the three-level sealing structure of labyrinth seal, inert gas positive pressure purging and magnetic fluid seal, a gradient protection chain of "physical barrier → gas curtain purging → precision sealing" is formed. The labyrinth seal physically blocks large particles to protect the magnetic fluid from contamination, the positive pressure gas curtain blocks corrosive gas molecules to reduce chemical damage to the magnetic fluid, and the magnetic fluid achieves zero leakage to compensate for the leakage of the labyrinth seal, realizing a complete protection chain from coarse to precise, from passive to active.

[0055] The foregoing has provided a detailed description of a rotating material platform system and its sealing method under high temperature and high corrosion environments, as provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are merely for the purpose of helping to understand the core ideas of this application. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this application.

Claims

1. A rotating material platform system for high-temperature and high-corrosion environments, characterized in that, The system is located in the external furnace cavity and includes: Graphite plate (1); A rotating graphite shaft (2) is fixedly connected to a graphite plate (1) at its upper end and passes through the high-temperature zone of the external furnace cavity; A rotating metal shaft (3) has its upper end coaxially connected to the lower end of a rotating graphite shaft (2); The furnace cover (4) has an inverted "convex" double-layer jacket structure. The inner cavity of the jacket of the furnace cover (4) is connected to the external cooling medium conveying mechanism. The furnace cover (4) is fitted onto the rotating metal shaft (3) and forms a cavity with the outside of the rotating metal shaft (3). The cavity is equipped with a heat insulation felt (5), a labyrinth sealing device (6), and an air curtain sealing device from top to bottom. The heat insulation felt (5) is located at the top of the cavity and is attached to the outer periphery of the rotating metal shaft (3) to block the conduction of high temperature; The labyrinth sealing device (6) is located in the middle of the cavity and is fitted and connected to the outside of the rotating metal shaft (3); The air curtain sealing device includes an air inlet pipe (7), which is located at the bottom of the furnace cover (4) and communicates with the inside of the cavity. The end of the air inlet pipe (7) away from the furnace cover (4) is connected to an external inert gas supply pipeline. The magnetic fluid seal (8) is located below the air curtain sealing device and is sleeved on the lower end of the rotating metal shaft (3); The drive unit (9) is connected to the rotating metal shaft (3) for driving the rotating metal shaft (3) to rotate.

2. The material platform rotation system under high temperature and high corrosion environment according to claim 1, characterized in that, It also includes a bearing (10) disposed between the labyrinth sealing device (6) and the air curtain sealing device and between the air curtain sealing device and the magnetohydrodynamic seal (8).

3. The material platform rotation system under high temperature and high corrosion environment according to claim 1, characterized in that, It also includes a coupling (11), through which the drive (9) is connected to the rotating metal shaft (3).

4. The material platform rotation system under high temperature and high corrosion environment according to claim 1, characterized in that, The pressure of the inert gas introduced into the air inlet pipe (7) is 0.02-0.05 MPa, and the inert gas is nitrogen or argon.

5. The material platform rotation system under high temperature and high corrosion environment according to claim 1, characterized in that, The driving component (9) is a drive motor.

6. The material platform rotation system under high temperature and high corrosion environment according to claim 1, characterized in that, The insulation felt (5) has a thickness of 100-150mm and is made of hard carbon felt or alumina fiber felt.

7. A sealing method for a rotating material platform system under high temperature and high corrosion environment as described in any one of claims 1-6, characterized in that, The method includes: The rotating metal shaft (3) is driven to rotate by the drive component (9), which in turn drives the rotating graphite shaft (2) and the graphite plate (1) to rotate synchronously in the external furnace cavity; Based on the heat insulation felt (5) installed inside the furnace cover (4), the high temperature inside the external furnace cavity is blocked from being conducted to the labyrinth sealing device (6). At the same time, the cooling medium of the jacket of the furnace cover (4) is used to control the temperature of the lower side of the labyrinth sealing device (6) to ≤60℃. The labyrinth sealing device (6) physically blocks dust, while inert gas is continuously introduced into the cavity through the air inlet pipe (7) to form a reverse air curtain from bottom to top, so as to actively block corrosive gases. In a low-temperature clean environment of ≤60℃, the system achieves zero-leakage dynamic sealing through a magnetic fluid seal (8).

8. A high-temperature, high-corrosion industrial furnace, characterized in that, The material table rotation system includes any one of claims 1-6.

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