Wide-temperature high-precision optical acceleration sensitive chip and acceleration sensor based on microcavity interferometer principle

The optical acceleration sensing chip based on the microcavity interferometer principle, using a three-wafer double-sprayed ultra-flat silicon wafer silicon-silicon bonding process and FP optical interferometer cavity structure, solves the accuracy and reliability problems of fiber optic accelerometers over a wide temperature range, achieving high-precision and shock-resistant acceleration measurement, suitable for inertial navigation and vibration measurement.

CN122084941APending Publication Date: 2026-05-26SHANGHAI BAIANTEK SENSING TECH CO LTD +1
2 Cites 0 Cited by

Patent Information

Application Number
CN202510467676.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-01-03
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

Existing fiber optic accelerometers lack accuracy over a wide temperature range, suffer from significant temperature cross-effects, and exhibit poor measurement repeatability and consistency, making industrial mass production impossible. Furthermore, optical accelerometers lack long-term reliability and tolerance at high temperatures.

Method used

The optical acceleration sensing chip, which adopts the principle of microcavity interferometer, uses three double-polished ultra-flat silicon wafers connected by silicon-silicon bonding to form an FP optical interferometer cavity. It uses a single-mode fiber optic assembly and a precision-ground cavity mirror structure, combined with laser interferometric signal demodulation, to achieve high-precision acceleration measurement. Furthermore, it suppresses nonlinear phenomena and improves stability by adjusting the depth of the upper and lower gaps and the optical anti-reflection coating.

Benefits of technology

It achieves high-precision acceleration measurement over a wide temperature range of -50℃ to 500℃, with a linear accuracy of 0.01% and a high resolution of 0.05%, reducing production costs, improving the sensor's shock resistance and consistency, and ensuring long-term reliability.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

The invention discloses a wide-temperature high-precision optical acceleration sensitive chip and an acceleration sensor based on the microcavity interferometer principle, the acceleration sensitive chip comprises a first substrate, a second substrate and a third substrate, and an optical fiber mounting seat and a light through hole are processed and formed on the first substrate; the optical fiber connector is characterized in that a single-mode optical fiber assembly is fixed on the optical fiber mounting seat, the end face of the single-mode optical fiber assembly is subjected to precision grinding and is perpendicular to the axial direction of an optical fiber core, and the optical fiber mounting seat is a stepped hole and is provided with a first stepped part and a second stepped part. The single-mode optical fiber assembly comprises a glass sleeve arranged on the outer layer and a single-mode optical fiber arranged on the core portion, the first step portion, the second step portion, the end face of the glass sleeve and the end face of the single-mode optical fiber are all perpendicular to a mandrel of the single-mode optical fiber, the first step portion and the end face of the glass sleeve form first matching, and the second step portion and the end face of the glass sleeve form second matching. And the second step part and the end face of the single-mode optical fiber form a second fit.
Need to check novelty before this filing date? Find Prior Art