A metallized optical window side electrode plating adjustable tooling and method of use thereof

Abstract

The application relates to a metalized optical window side electrode plating adjustable tool and a use method thereof, and belongs to the technical field of optical part manufacturing. The adjustable tool comprises a support frame, a clamping sleeve and an adjustable bottom plate assembly. The clamping sleeve is composed of a plurality of fan-shaped clamping petals which are installed on support columns through radial adjusting structures and can adapt to different size windows by adjusting the radial positions of the clamping petals and jointly limit the side electrode plating height; the adjustable bottom plate assembly adjusts the shielding gap between the bottom plate and the window bottom surface through a threaded pair; the adjustable tool is also provided with an elastic leveling and pressing mechanism for fine adjustment of the window posture and buffer pressing. The application realizes control of the side electrode height of different specifications of inverted conical optical windows, the overlapping and coinciding area of the electrode and the transparent conductive film layer, effectively prevents pollution of the light transmission area caused by electrode plating, ensures conduction between the electrode and the transparent conductive film layer, is stable in clamping and has strong universality, and is suitable for batch production.

Description

Technical Field

[0001] This invention belongs to the field of optoelectronic component manufacturing technology, specifically relating to an adjustable tooling for plating side electrodes of metallized optical windows. Background Technology

[0002] Metallized optical windows, as core functional components of modern optoelectronic systems, typically have a transparent conductive film coated on their bottom surface to achieve functions such as electromagnetic shielding, microwave protection, or window heating, while ensuring that the core optical transmittance performance remains unaffected. In practical engineering applications, to achieve a stable and reliable electrical connection and mechanical fixation between the transparent conductive film layer and external circuits (such as heating wires or metal frames), metal electrodes of a specific height need to be plated on the inverted conical side of the metallized optical window.

[0003] For the plating process of the aforementioned metal electrodes, the clamping fixtures must meet the following stringent requirements:

[0004] First, ensure the reliability of electrical connections: the metal electrodes need to form a precisely controllable overlap area with the bottom transparent conductive film layer to ensure good conductivity between the two;

[0005] Second, ensure that the optical performance is not damaged: the light-transmitting area on the bottom surface (working surface) of the optical window must not be contaminated by the vapor-deposited metal material, otherwise it will lead to irreversible degradation of optical performance such as decreased light transmittance and increased scattering.

[0006] Third, ensure the uniformity and adjustability of the plated electrodes: On the one hand, it is necessary to ensure the stability of the metallized optical window within the tooling during the plating process, providing a basis for uniform electrode plating; on the other hand, since the height of the side metal electrodes directly affects the assembly firmness of the optical window, and this height needs to be precisely controlled according to design requirements, the tooling must have the function of precise electrode height adjustment to achieve side electrode plating that meets design specifications.

[0007] However, existing common electrode plating fixtures (such as clamping sleeve and pad matching schemes, high-temperature resistant tape fixing schemes, or universal adjustment frame schemes) are mainly designed for surface coating of flat or simple curved substrates. When applied to the partial electrode plating of the side of an inverted conical optical window, the following problems often exist: 1) It is difficult to accurately and quantitatively control the plating height of the side electrode; 2) The light-transmitting area of ​​the bottom surface of the optical window is easily contaminated during the coating process; 3) The clamping and positioning of the conical side is unstable and unreliable; 4) Poor versatility and difficulty in adapting to windows of different sizes.

[0008] In view of the above, the present invention is hereby proposed. Summary of the Invention

[0009] The purpose of this invention is to overcome the shortcomings of the prior art and provide an adjustable tooling for metallized optical window side electrode deposition and its usage method. It is mainly used to solve the problems of difficulty in accurately controlling electrode height, easy contamination of the window light transmission area during the deposition process, insufficient clamping stability, and poor tooling versatility when depositing electrodes on the side of inverted conical optical windows.

[0010] The objective of this invention is achieved through the following technical solution:

[0011] On one hand, the present invention provides an adjustable fixture for depositing side electrodes on a metallized optical window. The adjustable fixture is suitable for depositing side electrodes on an inverted conical metallized optical window whose bottom surface is coated with a transparent conductive film, and includes:

[0012] The support frame has multiple support columns arranged in a circular array around the same center;

[0013] The clamping collar, composed of multiple fan-shaped clamping segments, forms a clamping space to accommodate and position the metallized optical window. Each fan-shaped clamping segment is mounted on a corresponding support column via a radial adjustment structure. By adjusting the radial position of each fan-shaped clamping segment, it can be adapted to metallized optical windows of different sizes, and together they define the axial height of the electrode to be plated on the side of the metallized optical window. ;

[0014] An adjustable base plate assembly, located below the clamping collar, is used to adjust the blocking gap between the upper surface of the metallized optical window and the bottom surface of the metallized optical window after the window is clamped. .

[0015] Furthermore, the clamping space is a tapered inner hole adapted to the outer contour of the metallized optical window, and the taper of the tapered inner hole is... The lateral taper of the metallized optical window is greater than or equal to that of the metallized optical window. .

[0016] Furthermore, the radial adjustment structure includes a strip-shaped mounting hole formed on the fan-shaped clamp and arranged radially, and a fastener passing through the strip-shaped mounting hole. The fastener is threadedly connected to the corresponding support column, and the radial position of the fan-shaped clamp is adjusted by loosening the fastener and then locked in place.

[0017] Furthermore, the clamping collar also includes an elastic leveling and clamping mechanism mounted on each sector-shaped clamping segment, the elastic leveling and clamping mechanism comprising:

[0018] A push rod is radially movably mounted on the fan-shaped clamp, and one end of the push rod extending out of the fan-shaped clamp is used to abut against the side of the metallized optical window;

[0019] A drive screw is threadedly connected to the sector-shaped clamp, and the operating handle of the drive screw is located outside the sector-shaped clamp;

[0020] An elastic element is disposed within the fan-shaped clamping petals and located between the push rod and the drive screw.

[0021] Furthermore, the adjustable base plate assembly includes:

[0022] A support ring, which is fixedly connected to the support frame;

[0023] The base plate has an external thread on its outer side, and the thread and the internal thread on the inner side of the support ring form a threaded pair.

[0024] Furthermore, the upper surface edge of the base plate is provided with an upwardly protruding annular flange, the inner diameter of which is... The outer diameter of the annular flange is greater than or equal to the aperture of the metallized optical window. Smaller than the diameter of the transparent conductive film area coated on the bottom surface of the metallized optical window .

[0025] Furthermore, the diameter With outer diameter The difference ranges from 0.3mm to 3mm.

[0026] Furthermore, the blocking gap between the top surface of the annular flange and the bottom surface of the metallized optical window The range is 0.1mm to 0.5mm.

[0027] On the other hand, the present invention also provides a method for depositing side electrodes of a metallized optical window using the above-mentioned adjustable fixture, comprising the following steps:

[0028] Step 1: Based on the axial height of the electrode to be plated on the side of the metallized optical window. Side taper and the diameter of the area coated with the transparent conductive film on the bottom surface. Calculate the inner diameter of the clamping space. ;

[0029] Step 2: Adjust the radial position of each of the fan-shaped clamping segments so that the inner diameter of the clamping ring reaches the specified value. Then, the metallized optical window is installed into the clamping sleeve, so that its bottom surface is suspended in the air;

[0030] Step 3: Level and clamp the metallized optical window so that its bottom surface is parallel to the upper surface of the adjustable base plate assembly;

[0031] Step 4: Adjust the adjustable base plate assembly to adjust the shielding gap δ to the target value;

[0032] Step 5: Place the entire assembly with the metallized optical window in a vacuum coating apparatus to coat the side electrodes.

[0033] In step 1, the inner diameter of the clamping space The calculation formula is as follows:

[0034]

[0035] in, The diameter of the area where the transparent conductive film is coated on the bottom surface of the metallized optical window. The axial height of the electrode to be plated on the side of the metallized optical window. The side taper of the metallized optical window.

[0036] Compared with the prior art, the present invention has the following beneficial effects:

[0037] 1. Controllable electrode height: By radially adjusting the position of each fan-shaped clamping petal, the axial position of the clamped optical window can be directly and quantitatively limited, thereby achieving control over the plating height of the side electrodes. Precise control.

[0038] 2. Effectively protects the optical surface and ensures electrical conductivity: The adjustable base plate assembly and its annular flange allow for precise control of the blocking gap. and the outer diameter of the annular flange This not only strictly prevents the coating material from contaminating the light-transmitting area of ​​the window, but also ensures that the side electrodes and the bottom transparent conductive film form a reliable overlap area with controllable dimensions, guaranteeing good electrical conductivity.

[0039] 3. Stable and reliable clamping: The fit between the tapered inner hole and the tapered surface of the workpiece provides stable axial positioning, while the elastic leveling and clamping mechanism provides radial flexible clamping force, which can compensate for tolerances and thermal deformation, and level the workpiece to ensure coating uniformity and clamping reliability.

[0040] 4. High versatility and efficiency: The combination of the radially adjustable design of the clamping ring and the height adjustable design of the base plate assembly enables the tooling to quickly adapt to a series of inverted conical metallized optical windows of different sizes and specifications, significantly improving production flexibility and efficiency. Attached Figure Description

[0041] The accompanying drawings are incorporated in and form part of this specification, and together with the description serve to explain the principles of the invention.

[0042] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 Schematic diagram of the overall structure of the adjustable tooling for coating the side electrodes of the metallized optical window of this invention. Figure 1 ;

[0044] Figure 2 Schematic diagram of the overall structure of the adjustable tooling for coating the side electrodes of the metallized optical window of this invention. Figure 2 :

[0045] Figure 3 A top view schematic diagram of the adjustable tooling used for coating the side electrodes of the metallized optical window of the present invention.

[0046] Figure 4 for Figure 3 Sectional view of AA.

[0047] in:

[0048] 1 represents the support frame; 11 represents the support column;

[0049] 2 is the clamping collar; 21 is the fan-shaped clamping petal; 22 is the adjusting structure; 23 is the elastic leveling and clamping mechanism; 221 is the strip-shaped mounting hole; 222 is the fastener; 231 is the push rod; 232 is the drive screw; 233 is the elastic element;

[0050] 3 is an adjustable base plate assembly; 31 is a support ring; 32 is a base plate; 321 is an annular flange. Detailed Implementation

[0051] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatuses consistent with some aspects of the invention as detailed in the appended claims.

[0052] To enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0053] Example

[0054] Please see Figures 1 to 4This invention provides an adjustable fixture for plating side electrodes of a metallized optical window. It is primarily applicable to the plating of side electrodes on an inverted conical metallized optical window with a transparent conductive film coated on the bottom surface. The adjustable fixture consists of a support frame 1, a clamping ring 2, and an adjustable base plate assembly 3. The functions of each component are as follows: The support frame 1 serves as the basic support for the entire fixture, forming a stable structure through three support columns 11 in a ring array (the support columns 11 can be support columns with lifting functions), providing an installation reference for the clamping ring 2 and the adjustable base plate assembly 3. The clamping ring 2 is installed on the top of the support frame 1 and is formed by multiple radially adjustable fan-shaped clamping lobes 21, which can both stably support the workpiece to be plated and limit the axial height of the side electrode plating according to design requirements. It can also accommodate inverted conical optical windows of different sizes; the adjustable base plate assembly 3 is located below the clamping collar 2 and is assembled and connected to the support frame 1, and its obstruction gap with the bottom surface of the workpiece is controlled by the height adjustment structure. This can both prevent electrode material from contaminating the end face of the optical window during coating and prevent the base plate assembly from damaging the workpiece surface due to thermal expansion.

[0055] In this embodiment, the clamping collar 2 is preferably formed by three identical fan-shaped clamping segments 21 (the number of segments can be adjusted according to the requirements of clamping stability and adjustment accuracy). The central angle of each segment is 120°. After being enclosed, they form a clamping space that matches the outer contour of the inverted conical workpiece, so that the bottom of the workpiece is suspended. Each fan-shaped clamping segment 21 is installed on the support column 11 in a one-to-one correspondence through the radial adjustment structure 22. By adjusting the radial extension and retraction position of the clamping segments, the clamping requirements of workpieces with different taper parameters can be adapted. At the same time, the fan-shaped clamping segments 21 and the radial adjustment structure 22 work together to precisely limit the axial height of the electrode to be plated. That is, the vertical distance from the bottom surface of the fan-shaped clamping petal 21 to the bottom surface of the workpiece.

[0056] In this embodiment, the clamping space is a circular tapered hole adapted to the outer contour of the workpiece, which also accommodates a circular inverted conical optical window. To ensure clamping stability, the taper of this circular tapered hole is... It must be greater than or equal to the taper of the workpiece side. The tapered fit ensures that the workpiece is reliably positioned by being clamped and held at the bottom by the clamping ring 2 after it is loaded.

[0057] In this embodiment, the radial adjustment structure 22 includes a strip-shaped mounting hole 221 radially opened along the fan-shaped clamping petals 21, and a fastener 222 (such as a fastening screw, bolt, etc.) adapted to pass through the strip-shaped mounting hole 221. The fastener 222 is threadedly connected to the threaded hole pre-opened in the corresponding support column 11. By loosening the fastener 222, the restriction on the fan-shaped clamping petals 21 is released, and the radial extension position of the fan-shaped clamping petals 21 is adjusted along the extension direction of the strip-shaped mounting hole 221. After adjusting to the target position, the fastener 222 is locked to fix the fan-shaped clamping petals 21. Preferably, a scale mark is provided radially on the upper surface of each fan-shaped clamping petal 21. The scale mark indicates the radial adjustment amount so that the operator can quickly read the adjustment value, realize the synchronous and consistent adjustment of the radial position of each fan-shaped clamping petal 21, and further improve the clamping positioning accuracy and operation efficiency. In addition, to enhance the load-bearing capacity of the clamping ring 2, multiple fasteners 222 can be provided between each fan-shaped clamping petal 21 and the support column 11, and the contact area between the top of the support column 11 and the fan-shaped clamping petal 21 can also be expanded.

[0058] It should be noted that the radial adjustment achieved through the strip-shaped mounting hole 221 and the fastener 222 described above is only one specific implementation. In other optional embodiments, to achieve synchronous adjustment of the clamping space inside the clamping ring 2, a drive structure similar to a three-jaw chuck can also be used, that is, the three sector-shaped clamping segments 21 are driven to move radially synchronously through a common bevel gear or a flat threaded disc. This method is beneficial to improving adjustment efficiency and ensuring the consistency of movement of each clamping segment.

[0059] To ensure the stability and reliability of the metallized optical window during the plating process, the clamping ring 2 is equipped with at least one elastic leveling and clamping mechanism 23 on each sector 21. This mechanism is arranged radially and staggered from the radial adjustment structure 22, as shown in the attached figure of this embodiment. Figure 3 , 4 As shown, an elastic leveling and clamping mechanism 23 is provided radially on each fan-shaped clamp 21 and on both sides of each fan-shaped clamp 21.

[0060] Specifically, the elastic leveling and clamping mechanism 23 consists of a push rod 231, a drive screw 232, and an elastic element 233. The push rod 231 is radially movably mounted on the fan-shaped clamp 21. One end of the push rod 231 extends out of the fan-shaped clamp 21 to flexibly abut against the side of the metallized optical window. Preferably, the abutting end can be made of a protective pad or coating of a high-temperature resistant flexible material (such as polyimide, special high-temperature resistant rubber, or soft metal) to avoid scratching the workpiece surface and enhance the uniformity of contact. The other end is engaged in the preset mounting hole of the fan-shaped clamp 21 to achieve axial limiting. The drive screw 232 is threadedly connected to the fan-shaped clamp 21. The operating handle of the drive screw 232 is located outside the fan-shaped clamp 21 for easy manual adjustment by the operator. Its other end is also engaged in the preset mounting hole of the fan-shaped clamp 21. The elastic element 233 (preferably a high-temperature resistant spring) is embedded in the preset mounting hole of the fan-shaped clamp 21 and axially abuts between the push rod 231 and the drive screw 232, providing a continuous and uniform clamping force through elastic deformation.

[0061] In this embodiment, the adjustable base plate assembly 3 includes a support ring 31 and a base plate 32. The support ring 31 is fixedly connected to the support frame 1 and has an internal thread. The base plate 32 is circular, with its axis coaxial with the axis of the clamping ring 2. Its outer side has an external thread that mates with the internal thread of the support ring 31. The bottom of the base plate 32 has a cross, slotted, or hexagonal groove to facilitate adjustment of the obstruction gap between it and the bottom surface of the metallized optical window using appropriate tools. .

[0062] Specifically, the upper surface of the base plate 32 is provided with an annular flange 321 with a height of 0.1mm to 3mm, and its inner diameter is... ≥ outer diameter of the light-transmitting aperture of the workpiece <Diameter of the transparent conductive film area on the bottom surface of the workpiece . and The difference is controlled within 0.3mm to 3mm, and the specific size is determined by the designed overlap distance between the electrode and the conductive film. For example, when the overlap distance is 1mm, This ensures good conductivity between the electrode and the conductive film. The shielding gap between the top surface of the annular flange 321 and the bottom surface of the workpiece. The range is 0.1mm to 0.5mm, which can effectively avoid wear on the workpiece surface and contamination of the light-transmitting area by the vapor-deposited material.

[0063] The support frame 1, clamping collar 2, and adjustable base plate assembly 3 in the adjustable tooling of this invention can be made of materials such as 40Cr, 45# steel, titanium alloy, and stainless steel.

[0064] This invention also provides a method for using the above-mentioned adjustable tooling, which is described below in conjunction with specific workpiece parameters:

[0065] Parameters of the workpiece to be plated: Diameter of the conductive film area on the bottom surface of the metallized optical window Total height 10mm, side taper ; Clamping ring 2 tapered inner hole taper Design requirements: Metal electrodes are plated on the sides, communicating with the conductive film on the bottom surface; the axial height of the electrodes... The overlap distance between the electrode and the conductive film is 0.5 mm.

[0066] The specific operating steps are as follows:

[0067] Step 1: Calculate the inner diameter of the clamping space According to the formula Substituting the parameters yields (This is the bottom inner diameter of clamping ring 2).

[0068] Step 2: Adjusting the clamping ring and loading the workpiece: Adjust the radial position of each sector clamping petal 21 so that the inner diameter of the clamping ring 2 reaches 51.06mm, load the workpiece into the clamping ring 2, and ensure that the bottom surface of the workpiece is suspended.

[0069] Step 3: Leveling and clamping: By tightening the drive screws 232 on each sector clamping segment 21, the elastic element 233 is pushed to make the top rod 231 press against the side of the workpiece, thereby fine-tuning and finally keeping the bottom surface of the workpiece parallel to the upper surface of the adjustable base plate assembly 3, thus completing the clamping.

[0070] Step 4: Adjusting the shielding gap: Determine the outer diameter of the annular flange 321 based on the overlap distance of 0.5mm. Adjust the base plate 32 to block the gap. Adjust to the target value of 0.2mm.

[0071] Step 5: Coating operation: Place the workpiece clamped in the vacuum coating equipment to complete the side electrode coating.

[0072] The above description is merely a specific embodiment of the present invention, intended to enable those skilled in the art to understand and implement the present invention. Various modifications to these embodiments without creative effort will be readily apparent to those skilled in the art; the basic principles defined herein can be applied to other embodiments without departing from the spirit and scope of the present invention.

[0073] It should be understood that this invention is not limited to the specific content described above, and various equivalent modifications or substitutions can be made without departing from its scope of protection. The scope of protection of this invention is defined only by the appended claims.

Claims

1. An adjustable tooling for coating the side electrodes of a metallized optical window, characterized in that, The adjustable fixture is suitable for depositing side electrodes on an inverted conical metallized optical window with a transparent conductive film coated on the bottom surface, including: The support frame (1) has multiple support columns (11) arranged in a circular array along the same center. The clamping collar (2) is composed of multiple fan-shaped clamping lobes (21) forming a clamping space to accommodate and position the metallized optical window. Each fan-shaped clamping lobe (21) is mounted on a corresponding support column (11) via a radial adjustment structure (22). The radial position of each fan-shaped clamping lobe (21) is adjusted to accommodate metallized optical windows of different sizes, and together they define the axial height of the electrode to be plated on the side of the metallized optical window. ; An adjustable base plate assembly (3), which is disposed below the clamping collar (2), is used to adjust the blocking gap between the upper surface of the metallized optical window and the bottom surface of the metallized optical window after the metallized optical window is clamped. .

2. The adjustable tooling according to claim 1, characterized in that, The clamping space is a tapered inner hole adapted to the outer contour of the metallized optical window, and the taper of the tapered inner hole is... The lateral taper of the metallized optical window is greater than or equal to that of the metallized optical window. .

3. The adjustable tooling according to claim 1, characterized in that, The radial adjustment structure (22) includes a strip-shaped mounting hole (221) opened on the fan-shaped clamp (21) and arranged radially, and a fastener (222) passing through the strip-shaped mounting hole (221). The fastener (222) is threadedly connected to the corresponding support column (11). The radial position of the fan-shaped clamp (21) is adjusted by loosening the fastener (222) and then locked and fixed.

4. The adjustable tooling according to claim 1, characterized in that, The clamping collar (2) further includes an elastic leveling and clamping mechanism (23) mounted on each sector clamp (21), the elastic leveling and clamping mechanism (23) comprising: A top rod (231) is radially mounted on the fan-shaped clamp (21), and one end of the top rod (231) extends out of the fan-shaped clamp (21) to abut against the side of the metallized optical window; A drive screw (232) is threadedly connected to the sector-shaped clamp (21), and the operating handle of the drive screw (232) is located outside the sector-shaped clamp (21); An elastic element (233) is disposed within the fan-shaped clamp (21) and located between the top rod (231) and the drive screw (232).

5. The adjustable tooling according to claim 1, characterized in that, The adjustable base plate assembly (3) includes: A support ring (31) is fixedly connected to the support frame (1); The base plate (32) has an external thread on its outer side, and the thread and the internal thread opened on the inner side of the support ring (31) form a thread pair.

6. The adjustable tooling according to claim 5, characterized in that, The upper surface edge of the base plate (32) is provided with an upwardly protruding annular flange (321), the inner diameter of which is... The outer diameter of the annular flange (321) is greater than or equal to the aperture of the metallized optical window. Smaller than the diameter of the transparent conductive film area coated on the bottom surface of the metallized optical window .

7. The adjustable tooling according to claim 6, characterized in that, The diameter With outer diameter The difference ranges from 0.3mm to 3mm.

8. The adjustable tooling according to claim 6, characterized in that, The shielding gap between the top surface of the annular flange (321) and the bottom surface of the metallized optical window The range is 0.1mm to 0.5mm.

9. A method for depositing side electrodes of a metallized optical window using the adjustable fixture described in any one of claims 1 to 8, characterized in that, Includes the following steps: Step 1: Based on the axial height of the electrode to be plated on the side of the metallized optical window. Side taper and the diameter of the area coated with the transparent conductive film on the bottom surface. Calculate the inner diameter of the clamping space. ; Step 2: Adjust the radial position of each of the fan-shaped clamping petals (21) so that the inner diameter of the clamping ring (2) reaches the specified value. Then, the metallized optical window is inserted into the clamping ring (2) so that its bottom surface is suspended in the air; Step 3: Level and clamp the metallized optical window so that its bottom surface is parallel to the upper surface of the adjustable base plate assembly (3); Step 4: Adjust the adjustable base plate assembly (3) to reduce the blocking gap. Adjust to the target value; Step 5: Place the entire assembly with the metallized optical window in a vacuum coating apparatus to coat the side electrodes.

10. The method according to claim 9, characterized in that, In step 1, the inner diameter of the clamping space The calculation formula is as follows: in, The diameter of the area where the transparent conductive film is coated on the bottom surface of the metallized optical window. The axial height of the electrode to be plated on the side of the metallized optical window. The side taper of the metallized optical window.

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