A dismounting mechanism, a dismounting device and a plasma enhanced chemical vapor deposition device

Abstract

The application relates to the technical field of plasma enhanced chemical vapor deposition equipment, in particular to a dismounting mechanism, a dismounting device and plasma enhanced chemical vapor deposition equipment. The dismounting mechanism comprises an auxiliary trolley, an X-axis moving module, a Z-axis moving module and an auxiliary positioning device. The auxiliary trolley comprises a base, a trolley body, a top and a moving pulley installed on the base, and the base and the top are connected through the trolley body; the Z-axis moving module comprises Z-axis guide rails arranged on the two sides of the trolley body and Z-axis sliding assemblies in sliding connection with the Z-axis guide rails; the X-axis moving module comprises a bottom plate installed on the Z-axis sliding assemblies and X-axis sliding assemblies arranged on the bottom plate; and the auxiliary positioning device comprises a first positioning assembly arranged on the base and a second positioning assembly arranged on the top, so that the technical problems that the existing manual dismounting mode has large operation difficulty and high safety risk are solved.

Description

Technical Field

[0001] This invention relates to the field of plasma-enhanced chemical vapor deposition (PECVD) equipment technology, specifically to a disassembly and assembly mechanism, disassembly and assembly equipment, and PECVD equipment. Background Technology

[0002] In the manufacturing process of solar cells, plasma-enhanced chemical vapor deposition (PECVD) equipment serves as a key process tool, undertaking the core task of preparing anti-reflective thin films. With the photovoltaic industry's continuous increasing demands for equipment capacity and cell efficiency, the structure of PCVD equipment has undergone significant evolution. The size of the quartz tubes and the load per tube have increased rapidly, and the equipment layout has upgraded from a dual-tube design to a multi-tube architecture. This trend has led to a significant increase in the physical size and weight of the quartz tubes, and a corresponding increase in the overall height and floor space of the equipment.

[0003] Currently, the cleaning and maintenance of the furnace body and the quartz tubes installed inside it mainly rely on manual labor. However, manual disassembly and assembly has the problems of high difficulty and high safety risks due to the large physical size and weight of the quartz tubes. This can easily affect the downtime of plasma-enhanced chemical vapor deposition equipment and impact the normal production of solar cell production lines. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a disassembly and assembly mechanism, disassembly and assembly equipment, and plasma-enhanced chemical vapor deposition equipment, which solves the technical problems of high operational difficulty and high safety risks in the existing manual disassembly and assembly methods.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: The present invention provides a disassembly and assembly mechanism for a plasma-enhanced chemical vapor deposition (PECVD) apparatus. The PECVD apparatus includes a furnace frame, a furnace body installed within the furnace frame, and a quartz tube installed within the furnace body. It also includes an auxiliary trolley, an X-axis moving module, a Z-axis moving module, and an auxiliary positioning device.

[0006] The auxiliary trolley includes a base, a main body, a top, and movable casters mounted on the base. The base and the top are connected via the main body. The Z-axis moving module includes Z-axis guide rails on both sides of the main body and Z-axis sliding components slidably connected to the Z-axis guide rails. The Z-axis sliding components are used to support the furnace body or the quartz tube to move along the Z-axis direction. The X-axis moving module includes a base plate mounted on the Z-axis sliding components and an X-axis sliding component mounted on the base plate. The X-axis sliding components are used to support the furnace body or the quartz tube to move along the X-axis direction. The auxiliary positioning device includes a first positioning component mounted on the base and a second positioning component mounted on the top. The disassembly and assembly mechanism is detachably connected to the bottom of the furnace frame via the first positioning component and detachably connected to the top of the furnace frame via the second positioning component.

[0007] In one possible implementation, the disassembly and assembly mechanism further includes a support assembly comprising a bracket disposed on the X-axis moving module, the bracket having a roller assembly for supporting the quartz tube.

[0008] In one possible implementation, the bracket includes a bracket body and two placement platforms disposed on the bracket body, the two placement platforms being inclined along the length direction of the bracket body, and the inclined surfaces of the two placement platforms being arranged opposite each other.

[0009] In one possible implementation, the roller assembly includes a mounting base disposed on the inclined surface of the placement platform, and a roller mounted on the mounting base, the rolling direction of the roller being perpendicular to the setting direction of the roller.

[0010] In one possible implementation, the Z-axis sliding assembly includes a Z-axis sliding adapter that is slidably connected to the Z-axis guide rail, and a support plate mounted on the Z-axis sliding adapter, with the base plate mounted on the support plate.

[0011] In one possible implementation, the X-axis sliding assembly includes an X-axis guide rail disposed on the base plate, an X-axis sliding adapter slidably connected to the X-axis guide rail, and a transverse plate connected to the X-axis sliding adapter, with the bracket mounted on the transverse plate.

[0012] In one possible implementation, the first positioning component includes a positioning post and a telescopic positioning component. The positioning post is disposed on the side of the base away from the vehicle body, and positioning portions extend from opposite sides of the base. The telescopic positioning component is installed within the positioning portions. The positioning post and the telescopic positioning component respectively abut against the bottoms of the two furnace body frames located on opposite sides of the auxiliary trolley.

[0013] In one possible implementation, mounting cavities are formed on opposite sides of the top, and the second positioning assembly includes a telescopic arm, a rotating arm, and a positioning bracket. One end of the telescopic arm is telescopically mounted in the mounting cavity, the other end of the telescopic arm is rotatably connected to the rotating arm, the end of the rotating arm away from the telescopic arm is rotatably connected to the positioning bracket, and the end of the positioning bracket away from the rotating arm abuts against the top of the furnace frame.

[0014] The present invention also provides a disassembly and assembly device, including the disassembly and assembly mechanism described above.

[0015] The present invention also provides a plasma-enhanced chemical vapor deposition apparatus, including the above-described disassembly and assembly equipment.

[0016] The beneficial effects of this invention are that, compared with the prior art, it achieves mechanized operation of the entire furnace body and quartz tube disassembly and assembly process through the mobility of the auxiliary trolley, the height adjustment capability of the Z-axis moving module, the horizontal movement / feeding capability of the X-axis moving module, and the stable fixing capability of the auxiliary positioning device. This not only reduces the labor intensity of operators and avoids the risks of manually carrying heavy objects, but also improves the efficiency and accuracy of disassembly and assembly operations, shortens equipment downtime, and solves the technical problems of high operational difficulty and high safety risks associated with existing manual disassembly and assembly methods. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of a disassembly and assembly mechanism provided by the present invention.

[0018] Figure 2 This is a schematic diagram of the structure of an auxiliary vehicle provided by the present invention.

[0019] Figure 3 for Figure 1 A magnified view of a portion of position A in the diagram.

[0020] Figure 4 This is a schematic diagram of the assembly structure of a support component provided by the present invention.

[0021] Figure 5 This is a schematic diagram illustrating the usage state of the disassembly and assembly structure provided by the present invention in an application environment.

[0022] Figure 6 This is a schematic diagram of the assembly structure of a furnace body and a quartz tube provided by the present invention.

[0023] Attached image labels: 1. Assembly / disassembly mechanism; 11. Auxiliary trolley; 111. Base; 1111. Positioning part; 112. Car body; 113. Top; 1131. Mounting cavity; 114. Moving pulley; 12. X-axis moving module; 121. Base plate; 122. X-axis sliding assembly; 1221. X-axis guide rail; 1222. X-axis sliding adapter; 1223. Transverse plate; 13. Z-axis moving module; 131. Z-axis guide rail; 132. Z-axis pulley assembly; 1 321. Z-axis sliding adapter; 1322. Pallet; 14. Auxiliary positioning device; 1411. Positioning column; 1412. Telescopic positioning assembly; 1421. Telescopic arm; 1422. Rotating arm; 1423. Positioning bracket; 15. Support assembly; 151. Bracket; 1511. Bracket body; 1512. Placement platform; 152. Roller assembly; 1521. Mounting base; 1522. Roller; 21. Furnace frame; 22. Furnace body; 23. Quartz tube. Detailed Implementation

[0024] To address the aforementioned technical problems, this invention provides a disassembly and assembly mechanism, disassembly and assembly equipment, and plasma-enhanced chemical vapor deposition equipment. The technical solutions and embodiments of this invention will now be described in detail with reference to the accompanying drawings.

[0025] In the description of this application, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0026] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation", "connection" and "joining" should be interpreted broadly, for example, they can refer to fixed connection, detachable connection, or integral connection; for those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0027] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0028] like Figure 1 , Figure 2 , Figure 3 and Figure 6 As shown, the present invention provides a disassembly and assembly mechanism 1 for a plasma enhanced chemical vapor deposition (PECVD) equipment. The PECVD equipment includes a furnace frame 21, a furnace body 22 installed in the furnace frame 21, and a quartz tube 23 installed in the furnace body 22. It also includes an auxiliary trolley 11, an X-axis moving module 12, a Z-axis moving module 13, and an auxiliary positioning device 14.

[0029] The auxiliary trolley 11 includes a base 111, a trolley body 112, a top 113, and movable pulleys 114 mounted on the base 111. The base 111 and the top 113 are connected by the trolley body 112. The Z-axis moving module 13 includes Z-axis guide rails 131 on both sides of the trolley body 112 and Z-axis sliding components slidably connected to the Z-axis guide rails 131. The Z-axis sliding components are used to support the furnace body 22 or the quartz tube 23 to move along the Z-axis direction. The X-axis moving module 12 includes a base plate 121 mounted on the Z-axis sliding components and an X-axis sliding component 122 mounted on the base plate 121. The X-axis sliding component 122 is used to support the furnace body 22 or the quartz tube 23 to move along the X-axis direction. The auxiliary positioning device 14 includes a first positioning component mounted on the base 111 and a second positioning component mounted on the top 113. The disassembly and assembly mechanism 1 is detachably connected to the bottom of the furnace body frame 21 through the first positioning component and detachably connected to the top of the furnace body frame 21 through the second positioning component.

[0030] Specifically, the auxiliary trolley 11 is the basic support platform for the entire assembly / disassembly mechanism 1, and its structure includes a base 111, a main body 112, and a top 113. The base 111 serves as the bottom support for the trolley, and movable casters 114 are installed on it, allowing the trolley to move on the ground. The main body 112 connects the base 111 and the top 113, forming the overall frame structure of the trolley, providing a mounting base for the X-axis moving module 12, the Z-axis moving module 13, and the auxiliary positioning device 14. For example, the movable casters 114 can be a combination of omnidirectional wheels or directional wheels to adapt to different movement requirements. In one implementation, the movable casters 114 can be fixed to the four corners of the base 111, allowing the trolley to move manually by pushing and pulling.

[0031] The Z-axis moving module 13 is responsible for the vertical movement of the furnace body 22 or the quartz tube 23. This module includes Z-axis guide rails 131 mounted on both sides of the vehicle body 112, and Z-axis sliding components slidably connected to these guide rails 131. The Z-axis guide rails 131 can be linear guides or ball screw guides, providing a vertical movement path for the Z-axis sliding components. The Z-axis sliding components are designed to support the furnace body 22 or the quartz tube 23 and move vertically along the Z-axis. For example, the Z-axis sliding components can be a slider structure, driven by an external drive device (such as a hydraulic cylinder or electric push rod) to move up and down along the guide rails.

[0032] The X-axis moving module 12 is responsible for the horizontal movement of the furnace body 22 or the quartz tube 23. This module is mounted on a base plate 121 on the Z-axis sliding assembly and includes an X-axis sliding assembly 122 disposed on the base plate 121. The X-axis sliding assembly 122 carries the furnace body 22 or the quartz tube 23 and moves laterally along the X-axis. For example, the X-axis sliding assembly 122 can consist of a pair of parallel guide rails and a slider that slides on them, achieving horizontal displacement by manual pushing / pulling or motor drive. The base plate 121 serves as the mounting base for the X-axis moving module 12, ensuring the integration of X-axis and Z-axis movements.

[0033] The auxiliary positioning device 14 is used to connect and fix the disassembly / assembly mechanism 1 to the furnace frame 21 of the PECVD equipment during the disassembly / assembly process. This device includes a first positioning component mounted on the base 111 and a second positioning component mounted on the top 113. The first positioning component is detachably connected to the bottom of the furnace frame 21, providing bottom support and positioning. The second positioning component is detachably connected to the top of the furnace frame 21, providing top 113 fixation and stability. For example, the first positioning component can be a set of height-adjustable support feet that screw into or out of the furnace frame 21. The second positioning component can be a set of retractable clamps that clamp the top of the furnace frame 21 manually or pneumatically. These positioning components prevent the disassembly / assembly mechanism 1 from moving or shaking during operation, thereby ensuring operational accuracy and safety.

[0034] See Figure 5 The following example will provide a more detailed explanation of the above technical solution: Suppose that in a certain production workshop, the furnace body 22 of a PECVD equipment needs to be maintained or replaced regularly.

[0035] First, the operator moves the auxiliary trolley 11 to the front of the PECVD equipment. The casters 114 mounted on the base 111 of the auxiliary trolley 11 allow for easy movement on the ground without manual intervention. Once the trolley is positioned within the working area of ​​the PECVD equipment, the auxiliary positioning device 14 begins to function. Specifically, the first positioning component on the base 111 of the auxiliary trolley 11 is activated, detachably connecting it to the bottom of the furnace frame 21 of the PECVD equipment. Simultaneously, the second positioning component on the top 113 of the auxiliary trolley 11 is also activated, detachably connecting it to the top of the furnace frame 21. This two-point fixation securely anchors the disassembly / reassembly mechanism 1 to the side of the PECVD equipment, preventing potential movement or shaking of the trolley during subsequent operations, thus providing a stable platform for the safe disassembly / reassembly of the furnace body 22.

[0036] Next, the Z-axis moving module 13 is activated, with its Z-axis sliding assembly supporting the X-axis moving module 12. The operator controls the Z-axis moving module 13 to precisely adjust the height of the X-axis moving module 12, aligning it with the height of the furnace body 22 to be disassembled. For example, if the furnace body 22 is located in the middle layer of the PECVD equipment, the Z-axis moving module 13 will raise the supporting platform to the corresponding height. Once the height is aligned, the X-axis moving module 12 begins operation. The X-axis sliding assembly 122 is driven to stably move the furnace body 22 out of the PECVD equipment along the X-axis direction, or to stably insert the furnace body 22 into the equipment during installation. Throughout the process, the furnace body 22 is consistently supported and guided by the X-axis sliding assembly 122, avoiding the risks of tilting, collisions, or falls that may occur during manual handling.

[0037] Therefore, through the mobility of the auxiliary trolley 11, the height adjustment capability of the Z-axis moving module 13, the horizontal movement / feeding capability of the X-axis moving module 12, and the stable fixing capability of the auxiliary positioning device 14, the entire disassembly and assembly process of the furnace body 22 can be mechanized and automated. This not only reduces the labor intensity of operators and avoids the risks of manually handling heavy objects, but also improves the efficiency and accuracy of disassembly and assembly operations, shortens equipment downtime, and thus solves the problems of high maintenance costs, inconvenient operation, and high safety risks in existing technologies.

[0038] like Figure 4 As shown, the disassembly and assembly mechanism 1 further includes a support assembly 15, which includes a bracket 151 disposed on the X-axis moving module 12. The bracket 151 is provided with a roller assembly 152, which is used to support the quartz tube 23.

[0039] Through the above technical solution, the disassembly and assembly mechanism 1 is equipped with a support component 15. This support component 15 is mounted on the X-axis moving module 12 via a bracket 151 and has a roller assembly 152 for supporting the quartz tube 23. This structure allows the quartz tube 23 to be stably and smoothly supported during disassembly and assembly. The roller assembly 152 effectively reduces friction between the quartz tube 23 and the support structure, avoiding wear, scratches, or breakage caused by direct contact or sliding of the quartz tube 23. Especially during X-axis and Z-axis movement, the support component 15 can move accordingly, ensuring that the quartz tube 23 is always in a controlled state, greatly improving the safety, stability, and operational efficiency of the disassembly and assembly process of the quartz tube 23, and effectively solving the technical problems of easy damage and unstable support of the quartz tube 23 during movement.

[0040] See Figure 4Furthermore, the bracket 151 includes a bracket body 1511 and two placement platforms 1512 disposed on the bracket body 1511. The two placement platforms 1512 are inclined along the length direction of the bracket body 1511, and the inclined surfaces of the two placement platforms 1512 are arranged opposite to each other.

[0041] Specifically, the bracket body 1511 is the core structure of the support assembly 15, and its function is to provide a stable base for installing and supporting other components, such as the placement platform 1512 and the roller assembly 152. The bracket body 1511 can be designed as a plate-like, frame-like, or box-like structure with sufficient strength and rigidity, and is usually made of metal materials such as stainless steel or aluminum alloy to ensure stability and safety when supporting the quartz tube 23.

[0042] The placement stage 1512 is a component that directly contacts and supports the quartz tube 23. It is typically designed as a planar or curved structure with a specific shape and size to bear the weight of the quartz tube 23 and guide its positioning. The placement stage 1512 can be made of various materials, such as metal, engineering plastics, or composite materials, depending on the material and weight of the quartz tube 23, as well as the requirements for properties such as friction and wear resistance.

[0043] The placement platform 1512 is inclined along the length of the bracket body 1511, meaning there is a non-zero angle between the surface of the placement platform 1512 and the horizontal plane of the bracket body 1511. The purpose of this inclination is to form a V-shaped or U-shaped support groove to better accommodate and fix the cylindrical quartz tube 23. The choice of inclination angle affects the self-weight positioning effect and stability of the quartz tube 23, and is usually optimized according to the diameter and weight of the quartz tube 23.

[0044] The inclined surfaces of the two placement platforms 1512 are arranged opposite each other, meaning that the inclined surfaces of the two placement platforms 1512 face each other, thus forming a groove between them to support the quartz tube 23. This relative arrangement is the key to realizing the V-shaped or U-shaped support groove, which can utilize the gravity of the quartz tube 23 itself to automatically center it in the groove and keep it stable, effectively preventing the quartz tube 23 from sliding or rolling laterally during assembly and disassembly.

[0045] By providing two inclined platforms 1512 along the length of the bracket body 1511 with opposing slopes on the bracket 151 of the support assembly 15, a V-shaped or U-shaped support structure is formed. When the cylindrical quartz tube 23 is placed on this support structure, its own weight will cause it to naturally slide into the lowest point formed by the two inclined platforms 1512, thereby achieving automatic centering and stable positioning of the quartz tube 23. This structure effectively prevents the quartz tube 23 from rolling or shifting laterally during assembly and disassembly.

[0046] Based on this, the roller assembly 152 is mounted on the placement platform 1512, enabling the quartz tube 23 to move smoothly along its axial direction while maintaining a stable lateral position. This, in conjunction with the X-axis moving module 12 and the Z-axis moving module 13, achieves precise, safe, and efficient positioning and movement of the quartz tube 23 during assembly and disassembly. This design significantly improves the stability and ease of operation of the quartz tube 23 during assembly and disassembly, solving the problems of easy rolling and difficult positioning of the quartz tube 23 under traditional load-bearing methods.

[0047] like Figure 4 As shown, the roller assembly 152 further includes a mounting base 1521 disposed on the inclined surface of the placement platform 1512, and a roller 1522 mounted on the mounting base 1521, wherein the rolling direction of the roller 1522 is perpendicular to the setting direction of the roller 1522.

[0048] Specifically, the axis of roller 1522 is configured to be parallel to the inclined surface of the placement platform 1512 and perpendicular to the length direction of the bracket 151 (i.e., the axial direction of the quartz tube 23). When the quartz tube 23 is placed in the V-shaped groove formed by the two placement platforms 1512, its own weight will cause it to fall stably into the lowest point of the V-shaped groove and contact the roller 1522. Since the rolling direction of roller 1522 is perpendicular to the setting direction of roller 1522, the quartz tube 23 can only roll along its own axial direction (i.e., the length direction of the bracket 151) on roller 1522, thereby realizing the axial movement of quartz tube 23 during assembly and disassembly. At the same time, this arrangement of roller 1522, combined with the inclined surface of placement platform 1512, effectively restricts the lateral sliding of quartz tube 23, ensuring the stability and accuracy of quartz tube 23 during load-bearing and movement.

[0049] This structure allows the quartz tube 23 to be stably supported and precisely positioned during disassembly and assembly, avoiding positioning deviations or the risk of falling due to lateral sliding, and significantly improving the stability and operational safety of the quartz tube 23 disassembly and assembly process.

[0050] See Figure 1 and Figure 3 Furthermore, the Z-axis sliding assembly includes a Z-axis sliding adapter 1321 that is slidably connected to the Z-axis guide rail 131, and a support plate 1322 mounted on the Z-axis sliding adapter 1321, with the base plate 121 mounted on the support plate 1322.

[0051] Specifically, the Z-axis sliding adapter 1321 is slidably connected to the Z-axis guide rail 131, enabling the entire load-bearing structure to move smoothly along the Z-axis. The support plate 1322, as an intermediate load-bearing component, is firmly mounted on the Z-axis sliding adapter 1321, precisely transmitting Z-axis movement to itself. The base plate 121 of the X-axis moving module 12 is directly mounted on the support plate 1322, meaning that the X-axis moving module 12, as a whole, can perform Z-axis lifting and lowering movements together with the support plate 1322 and the Z-axis sliding adapter 1321. This layered and tight connection method ensures the integrity and stability of the X-axis moving module 12 during Z-axis movement, avoiding the shaking or inaccurate positioning problems that may occur with traditional single connections.

[0052] With this structure, the Z-axis moving module 13 can not only support the vertical movement of the furnace body 22 or the quartz tube 23, but also provide a solid and synchronously movable platform for the X-axis moving module 12. This allows the furnace body 22 or the quartz tube 23 to achieve precise Z-axis and X-axis composite positioning and movement during disassembly and assembly, greatly improving the accuracy and reliability of disassembly and assembly operations.

[0053] like Figure 3 As shown, the X-axis sliding assembly 122 further includes an X-axis guide rail 1221 disposed on the base plate 121, an X-axis sliding adapter 1222 slidably connected to the X-axis guide rail 1221, and a transverse plate 1223 connected to the X-axis sliding adapter 1222, with the bracket 151 mounted on the transverse plate 1223.

[0054] Specifically, the X-axis sliding assembly 122 is designed to include an X-axis guide rail 1221 mounted on a base plate 121, and an X-axis sliding adapter 1222 slidably connected to the X-axis guide rail 1221. The X-axis sliding adapter 1222 is further connected to a transverse plate 1223, and the bracket 151 supporting the quartz tube 23 is directly mounted on the transverse plate 1223. When the quartz tube 23 needs to be moved along the X-axis, a drive mechanism (e.g., a ball screw or timing belt driven by a motor) causes the X-axis sliding adapter 1222 to slide smoothly on the X-axis guide rail 1221, thereby allowing the transverse plate 1223 and the bracket 151 connected thereto to perform precise lateral displacement together.

[0055] This structure ensures that the bracket 151 and the quartz tube 23 it supports move with high precision and good stability in the X-axis direction, avoiding damage to the quartz tube 23 due to shaking or inaccurate positioning during loading and unloading. This effectively solves the problem of achieving stable and precise lateral movement of the support assembly 15 on the X-axis moving module 12.

[0056] See Figure 1 , Figure 2 and Figure 5 Furthermore, the first positioning component includes a positioning post 1411 and a telescopic positioning component 1412. The positioning post 1411 is located on the side of the base 111 away from the main body 112. Positioning portions 1111 extend from opposite sides of the base 111, and the telescopic positioning component 1412 is installed inside the positioning portions 1111. The positioning post 1411 and the telescopic positioning component 1412 abut against the bottom of the two furnace body frames 21 located on opposite sides of the auxiliary trolley 11.

[0057] Specifically, when the auxiliary trolley 11 moves to the vicinity of the furnace frame 21, the positioning post 1411 first abuts against the corresponding structure at the bottom of the furnace frame 21, providing initial centering and support. The positioning post 1411 is located on the side of the base 111 away from the main body 112 and abuts against the bottom of the two furnace frames 21 located on opposite sides of the auxiliary trolley 11. This helps to roughly position the auxiliary trolley 11 in the horizontal direction and bear part of the vertical load. Subsequently, the telescopic positioning assembly 1412 installed in the positioning parts 1111 extending from both sides of the base 111 is activated, and its telescopic parts extend out to abut against the bottom of the furnace frame 21.

[0058] This telescopic adjustment function eliminates any minor gaps that may exist between the positioning column 1411 and the furnace frame 21, achieving a tight lock between the disassembly / assembly mechanism 1 and the bottom of the furnace frame 21, thereby greatly enhancing the stability of the entire disassembly / assembly mechanism 1. Through the coarse positioning of the positioning column 1411 and the precise positioning and locking of the telescopic positioning assembly 1412, it is ensured that the auxiliary trolley 11 will not shake or shift during the X-axis and Z-axis movement of the furnace body 22 or the quartz tube 23, providing a solid foundation for subsequent precise disassembly / assembly operations.

[0059] like Figure 2 and Figure 5 As shown, further, mounting cavities 1131 are provided on opposite sides of the top 113. The second positioning assembly includes a telescopic arm 1421, a rotating arm 1422, and a positioning bracket 1423. One end of the telescopic arm 1421 is telescopically mounted in the mounting cavity 1131, and the other end of the telescopic arm 1421 is rotatably connected to the rotating arm 1422. The end of the rotating arm 1422 away from the telescopic arm 1421 is rotatably connected to the positioning bracket 1423, and the end of the positioning bracket 1423 away from the rotating arm 1422 abuts against the top of the furnace frame 21.

[0060] When the disassembly / assembly mechanism 1 moves to the vicinity of the furnace frame 21, the telescopic arm 1421 can extend from the mounting cavity 1131, providing the necessary linear distance adjustment to allow it to approach the top of the furnace frame 21. Subsequently, the rotating arm 1422, through its rotatable connection with the telescopic arm 1421 and the positioning bracket 1423, allows the positioning bracket 1423 to be angularly adjusted, thereby enabling precise alignment and smooth contact with the top of the furnace frame 21. This combined linear and angular adjustment capability allows the top 113 of the disassembly / assembly mechanism 1 to flexibly adapt to various positional deviations, dimensional tolerances, or structural shape differences that may exist on the top of the furnace frame 21, ensuring a stable, reliable, and adjustable connection between the disassembly / assembly mechanism 1 and the top of the furnace frame 21. This, together with the first positioning component at the bottom, provides stable support and positioning for the entire disassembly / assembly mechanism 1 at both ends, greatly enhancing the overall stability and operational safety of the mechanism when carrying the furnace body 22 or the quartz tube 23 for X-axis and Z-axis movement.

[0061] Through the above technical solution, the positioning of the top 113 of the disassembly and assembly mechanism 1 is no longer a simple fixed connection, but has dual adjustment capabilities of linearity and angle. This allows the disassembly and assembly mechanism 1 to connect more flexibly and precisely to the top of the furnace frame 21, effectively solving the problem of unstable positioning caused by differences in the top structure of the furnace frame 21 or installation errors. This solution significantly improves the overall stability and safety of the disassembly and assembly mechanism 1 when performing disassembly and assembly operations on the furnace body 22 or quartz tube 23, avoiding shaking or tilting that may be caused by a loose connection of the top 113, thereby ensuring the accuracy and efficiency of the operation.

[0062] The present invention also provides a disassembly and assembly device, including the disassembly and assembly mechanism 1 described above.

[0063] By integrating the disassembly and assembly mechanism 1 into the disassembly and assembly equipment through the above technical solution, the disassembly and assembly process of the plasma-enhanced chemical vapor deposition equipment becomes more systematic, efficient, and safe. As a complete solution, this disassembly and assembly equipment not only provides the necessary operating environment and support for the disassembly and assembly mechanism 1, but also simplifies the operation process, reduces manual intervention, thereby significantly improving the efficiency and accuracy of disassembly and assembly operations, reducing operational risks, and extending the service life of the equipment.

[0064] The present invention also provides a plasma-enhanced chemical vapor deposition apparatus, including the above-described disassembly and assembly equipment.

[0065] By integrating the aforementioned disassembly and assembly equipment into the plasma-enhanced chemical vapor deposition (PECVD) apparatus, this application significantly improves the overall maintainability and ease of operation of the PCVD apparatus. This integrated design allows for the direct use of the equipment's own specialized tools during the disassembly, installation, and maintenance of key components such as the furnace body 22 or quartz tube 23, avoiding the reliance on large external auxiliary equipment or extensive manual operation as in traditional methods. This not only significantly shortens the maintenance cycle and reduces labor costs, but also, due to the precise X-axis and Z-axis movement capabilities and stable positioning function provided by the disassembly and assembly equipment, effectively reduces the risk of damage to delicate and fragile components during disassembly and assembly, thereby improving the reliability and safety of equipment operation and extending the equipment's service life.

[0066] The above description is merely a preferred embodiment of the present invention, and the specific embodiments described above are not intended to limit the present invention. Various modifications and variations can be made within the scope of the technical concept of the present invention. All refinements, modifications, or equivalent substitutions made by those skilled in the art based on the above description are within the scope of protection of the present invention.

Claims

1. A disassembly and assembly mechanism for a plasma-enhanced chemical vapor deposition (PECVD) apparatus, the PECVD apparatus comprising a furnace frame, a furnace body installed within the furnace frame, and a quartz tube installed within the furnace body, characterized in that, It includes an auxiliary trolley, an X-axis moving module, a Z-axis moving module, and an auxiliary positioning device; The auxiliary trolley includes a base, a trolley body, a top, and movable casters mounted on the base. The base and the top are connected by the trolley body. The Z-axis moving module includes Z-axis guide rails disposed on both sides of the vehicle body, and a Z-axis sliding assembly slidably connected to the Z-axis guide rails. The Z-axis sliding assembly is used to support the furnace body or the quartz tube to move along the Z-axis direction. The X-axis moving module includes a base plate mounted on the Z-axis sliding assembly, and an X-axis sliding assembly disposed on the base plate. The X-axis sliding assembly is used to support the furnace body or the quartz tube to move along the X-axis direction. The auxiliary positioning device includes a first positioning component disposed on the base and a second positioning component disposed on the top. The disassembly and assembly mechanism is detachably connected to the bottom of the furnace frame through the first positioning component and detachably connected to the top of the furnace frame through the second positioning component.

2. The disassembly and assembly mechanism according to claim 1, characterized in that, The disassembly and assembly mechanism also includes a support component, which includes a bracket disposed on the X-axis moving module. The bracket is provided with a roller assembly for supporting the quartz tube.

3. The disassembly and assembly mechanism according to claim 2, characterized in that, The bracket includes a bracket body and two placement platforms disposed on the bracket body. The two placement platforms are inclined along the length direction of the bracket body, and the inclined surfaces of the two placement platforms are arranged opposite each other.

4. The disassembly and assembly mechanism according to claim 3, characterized in that, The roller assembly includes a mounting base disposed on the inclined surface of the placement platform, and rollers mounted on the mounting base, wherein the rolling direction of the rollers is perpendicular to the setting direction of the rollers.

5. The disassembly and assembly mechanism according to claim 1, characterized in that, The Z-axis sliding assembly includes a Z-axis sliding adapter that is slidably connected to the Z-axis guide rail, and a support plate mounted on the Z-axis sliding adapter, with the base plate mounted on the support plate.

6. The disassembly and assembly mechanism according to claim 2, characterized in that, The X-axis sliding assembly includes an X-axis guide rail disposed on the base plate, an X-axis sliding adapter slidably connected to the X-axis guide rail, and a transverse plate connected to the X-axis sliding adapter, with the bracket mounted on the transverse plate.

7. The disassembly and assembly mechanism according to any one of claims 1 to 6, characterized in that, The first positioning component includes a positioning post and a telescopic positioning component. The positioning post is disposed on the side of the base away from the vehicle body. Positioning portions are respectively extended on opposite sides of the base. The telescopic positioning component is installed in the positioning portion. The positioning column and the telescopic positioning assembly respectively abut against the bottom of the two furnace body frames located on opposite sides of the auxiliary trolley.

8. The disassembly and assembly mechanism according to any one of claims 1 to 6, characterized in that, The top has mounting cavities on opposite sides, and the second positioning component includes a telescopic arm, a rotating arm, and a positioning bracket. One end of the telescopic arm is telescopically installed in the mounting cavity, the other end of the telescopic arm is rotatably connected to the rotating arm, the end of the rotating arm away from the telescopic arm is rotatably connected to the positioning bracket, and the end of the positioning bracket away from the rotating arm abuts against the top of the furnace frame.

9. A disassembly and assembly device, characterized in that, Includes the disassembly and assembly mechanism as described in any one of claims 1 to 8.

10. A plasma-enhanced chemical vapor deposition apparatus, characterized in that, Includes the disassembly and assembly equipment as described in claim 9.

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