Coating jig and coating apparatus

Abstract

This application provides a coating fixture and coating equipment. The coating fixture includes a mask assembly and a magnet assembly. The mask assembly includes an annular base plate, a mask plate covering the upper side of the base plate, and a pressure plate. The mask plate has an array of patterned openings in its center, and first and second connecting holes are respectively provided on its two side edges in a first direction. The base plate has bosses that respectively engage with the first and second connecting holes. The inner diameter of the first connecting hole matches the outer diameter of the corresponding boss, and the second connecting hole is an elongated hole extending along the first direction, with the width of the elongated hole matching the outer diameter of the corresponding boss. The pressure plate is disposed around the upper side of the base plate, forming a substrate placement groove in its central region, with the mask plate serving as the bottom of the substrate placement groove. The magnet assembly covers the upper opening of the substrate placement groove and is detachably fixedly connected to the mask assembly. This application enables the mask plate to fully adhere to the substrate, improving the coating quality.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more particularly to a coating fixture and coating equipment. Background Technology

[0002] In semiconductor manufacturing, a series of processes are performed on the substrate, many of which involve applying thin films or coatings to the substrate. For example, in the manufacturing of OLED panels, thin films of organic materials need to be deposited on the surface of the glass substrate; similarly, in the chip manufacturing process, coatings need to be applied to the surface of the wafer.

[0003] In all these coating processes for producing thin films or coatings, a photomask is typically required to obtain a film or coating with a specific pattern. During the process, the substrate to be coated must be fixed together with the photomask in the coating apparatus, ensuring that the photomask has minimal sag to allow for a more thorough fit between the photomask and the substrate.

[0004] Previously, to reduce mask sag and ensure optimal adhesion between the mask and substrate, the mask was stretched taut using a mesh tensioning method and then welded to a mask frame. However, this mesh tensioning process required complex equipment, resulting in high production costs and low efficiency. Furthermore, the problem of poor substrate adhesion caused by mask sag could not be effectively resolved, especially since the mask could experience increased sag or localized deformation due to temperature increases during use.

[0005] Given the practical need for good bonding between the mask and the substrate in existing technologies, there is an urgent need to provide a new solution. Summary of the Invention

[0006] In order to solve or improve the above-mentioned technical problems in the prior art, this application provides a coating fixture and coating equipment, which can be applied to at least the manufacturing process of OLED panels or chips. By using the coating fixture to apply a thin film or coating to the substrate, the mask can be fully attached to the substrate, thereby improving the processing accuracy of the thin film or coating.

[0007] The first aspect of this application provides a coating fixture, the coating fixture including a mask assembly and a magnet plate assembly; The mask assembly includes an annular base plate, a mask plate covering the upper surface of the base plate, and a pressure plate; The mask has patterned openings arranged in an array in the middle, and the two sides of the mask in the first direction are respectively provided with a first connecting hole and a second connecting hole; The base plate is provided with bosses that respectively engage with the first connecting hole and the second connecting hole. The inner diameter of the first connecting hole matches the outer diameter of the corresponding boss. The second connecting hole is an elongated slotted hole extending along the first direction, and the width of the elongated slotted hole is consistent with the outer diameter of the corresponding boss. A pressure plate is placed around the mask plate on the upper side of the base plate, and a substrate placement groove is formed in the middle area, with the mask plate serving as the bottom of the substrate placement groove; The magnet plate assembly covers the upper opening of the substrate placement slot and is detachably and fixedly connected to the mask plate assembly.

[0008] In the aforementioned technical solution, when the substrate is placed in the substrate placement slot, the substrate is directly supported by the mask plate. At this time, the mask plate is magnetically applied from the top of the substrate by the provided magnet plate assembly, which can restore the mask plate from the drooping state to a flat state and fully fit with the substrate.

[0009] Furthermore, the mask plate is connected to the base plate by relying on the first and second connecting holes and the boss. When installing the mask plate, it is only necessary to fit the corresponding connecting holes onto the corresponding bosses, eliminating the need for mesh stretching and welding of the mask plate. As a result, the complex mesh stretching process is eliminated, and the manufacturing efficiency of the mask plate assembly is significantly improved.

[0010] Furthermore, by designing the matching method between the connecting hole of the mask plate and the boss of the base plate, the mask plate can extend outward with the first connecting hole as the fixed point. During the process of the mask plate being attracted by the magnet plate to reduce sagging and restore flatness, the stress generated in the mesh surface of the mask plate can be eliminated by extending in the first direction and extending to both sides of the extension direction, so that the mask plate can fit more smoothly with the substrate.

[0011] Furthermore, in the first direction, the first connecting hole is tightly fitted with the corresponding boss, and the second connecting hole is tightly fitted with the corresponding boss in the width direction, which can achieve the purpose of positioning the mask assembly position. Moreover, when the mask undergoes deformation, it will not deviate from the first direction before the deformation, thus having high alignment accuracy.

[0012] Furthermore, the arrayed patterned openings are configured as follows: The pattern openings are arranged in multiple rows along the second direction and in multiple columns along a third direction perpendicular to the second direction; and The pattern has a circular opening. Alternatively, the pattern opening may be rectangular, with two sets of opposite sides of the rectangle parallel to the second and third directions respectively, and one of the diagonals of the rectangle aligning with the first direction.

[0013] In the aforementioned technical solution, if the mask plate expands and deforms due to temperature rise, the long side and short side of the rectangular mask opening will have similar deformation, thus reducing or avoiding distortion of the rectangular shape of the pattern opening.

[0014] Optionally, the mask plate has a plurality of adjacent first connection holes, and the base plate is provided with a plurality of bosses that are respectively inserted into the plurality of adjacent first connection holes; Alternatively, the mask plate has a plurality of adjacent second connection holes, and the base plate is provided with a plurality of bosses that are respectively inserted into the plurality of adjacent second connection holes; Alternatively, the mask plate has a plurality of adjacent first connecting holes and a plurality of adjacent second connecting holes, and the base plate is provided with a plurality of bosses that are respectively inserted into the plurality of adjacent first connecting holes and the plurality of adjacent second connecting holes.

[0015] It should be understood that a certain degree of machining error is unavoidable when machining bosses and connecting holes, which can lead to inaccurate fit between the bosses and connecting holes. The aforementioned technical solution can reduce the deviation of the mask from its predetermined position caused by inaccurate fit between the bosses and connecting holes, that is, it can reduce or eliminate the positional deviation of the mask when installing the mask and improve the positioning accuracy of the mask on the base plate.

[0016] Furthermore, the edge of the mask plate is also provided with a plurality of third connecting holes, which are distributed on the mask plate at positions different from the first connecting holes and the second connecting holes; The base plate is provided with a boss that is inserted into the third connecting hole, and the outer diameter of the boss is smaller than the inner diameter of the third connecting hole.

[0017] In the aforementioned technical solution, by providing a third connecting hole and a corresponding boss, the corresponding edge of the mask will not detach from the base plate when subjected to external force. Furthermore, due to the clearance fit between the third connecting hole and the corresponding boss, the corresponding edge of the mask with the third connecting hole can freely contract inward or freely expand outward to a certain extent. Therefore, when the mask deforms due to temperature changes or attraction from the magnet assembly, it can freely expand outward, avoiding undulating deformation caused by unreleased local stress, and allowing the mask to adhere more smoothly to the substrate.

[0018] Furthermore, the pressure plate covers the upper end of the boss to restrict the mask plate from the upper end of the boss, so that the mask plate will not easily detach from the boss on the base plate.

[0019] Furthermore, the pressure plate is a single, ring-shaped unit; or it has multiple pressure plates arranged in a ring-shaped area. When there are multiple pressure plates, the pressure plates can be connected end-to-end to form a ring, or they can be arranged in a ring-shaped manner with their ends not connected.

[0020] Furthermore, the base plate is provided with a mask slot, and the boss is disposed in the mask slot; The edge of the mask plate is accommodated in the mask slot.

[0021] In the aforementioned technical solution, by setting a mask slot, on the one hand, it can make way for the mask plate, so that the pressure plate will not press the mask plate tightly, ensuring that the mask plate can freely extend outward and retract inward to a certain extent; on the other hand, after the edge of the mask plate is received in the mask slot, no gap will be generated between the edge of the mask plate and the inner wall of the mask slot (i.e., the inner wall of the pressure plate), which can avoid the situation of material leakage from the gap during coating, and can also prevent the mask plate from undergoing unacceptable deformation due to being obstructed by the inner wall of the mask slot when extending outward.

[0022] Furthermore, the mask slot is provided with multiple connection slots, and the boss is respectively disposed in each connection slot; The outer edge of the mask plate extends outward to form multiple connecting portions, each of which is accommodated in a corresponding connecting slot and connected to a corresponding boss. It should be understood that the connecting portions are connected to the corresponding bosses via connecting holes, including a first connecting hole, a second connecting hole, and a third connecting hole.

[0023] In the aforementioned technical solution, by setting an extended connecting part to connect with the boss, the influence of the connection on the internal stress of the mask mesh can be reduced, thereby reducing the possibility of unacceptable deformation of the mask.

[0024] Furthermore, the coating fixture also includes multiple adjustment components arranged around the substrate placement groove; The adjustment assembly includes a base, a top block, a first connecting screw, a first spring, and an adjustment knob; The base is connected to the pressure plate or the bottom plate. The bottom of the base is provided with a top block groove, which extends at least to one side surface of the base, and the one side surface faces the substrate placement groove. The top block is at least partially accommodated in the top block groove, and the end of the top block facing away from the substrate placement groove has a slope, and the end facing the substrate placement groove has a first countersunk hole, which extends to the through slope. The first connecting screw is disposed in the first countersunk hole and extends to connect with the inner wall of the top block groove on the side away from the substrate placement groove; The first spring is disposed in the first countersunk hole and is fitted in the middle of the first connecting screw; The base has a threaded hole at the top, which extends into the top block groove. An adjustment knob is installed in the threaded hole, and the lower end of the adjustment knob extends to abut against the inclined surface.

[0025] In the aforementioned technical solution, by setting an adjustment component, the position of the substrate in the substrate placement groove can be adjusted to avoid the substrate being misaligned in the substrate placement groove and to improve the alignment accuracy between the substrate and the mask.

[0026] Furthermore, the coating fixture also includes multiple locking assemblies, which are arranged around the substrate placement groove; The locking assembly includes a pressure member, a second connecting screw, and a second spring; The pressure piece is provided with a second countersunk hole, which penetrates both ends of the pressure piece. A fastener is provided in the middle of the pressure piece, and the fastener extends outward along the radial direction of the second countersunk hole. The second connecting screw is located in the second countersunk hole and extends to connect with the surface of the pressure plate or base plate; The second spring is disposed in the second countersunk hole and is fitted in the middle of the second connecting screw; The fastener is pressed against the edge of the magnet plate assembly.

[0027] In the aforementioned technical solution, by setting up a locking assembly, the mask plate assembly and the magnet plate assembly can be quickly assembled, greatly improving the convenience of loading and unloading the substrate and significantly increasing production efficiency.

[0028] Furthermore, the magnet plate assembly includes a back plate, a plurality of magnets, and a cover plate, wherein: A cover plate groove is provided on the side surface of the back plate away from the substrate placement groove, and multiple sinks are arrayed at the bottom of the cover plate groove. Multiple magnets are arranged one-to-one in multiple sinks; The cover plate covers and is fixed in the cover plate groove.

[0029] In the aforementioned technical solution, by designing the structure of the magnet plate assembly, the assembly difficulty of the magnet plate assembly itself is reduced, and the production and processing are more convenient.

[0030] Furthermore, the back plate has a plurality of protrusions arranged in an array on the side facing the substrate placement groove. By providing an array of protrusions that contact the substrate, it can provide uniform support to the substrate surface. On the other hand, when the substrate and the back plate are bonded, the gas between them can be discharged in time, avoiding poor bonding in localized areas due to the inability to discharge gas in time. This not only improves the quality of the coating but also reduces the possibility of substrate damage. In addition, by providing protrusions, the heat flow during coating can be distributed more evenly on the substrate, which helps to reduce defects caused by excessively high local temperatures on the substrate.

[0031] Furthermore, the mask plate has multiple parallel longitudinal ribs and multiple parallel transverse ribs; The plurality of magnets are projected orthogonally onto the intersection of the longitudinal ribs and the transverse ribs, respectively.

[0032] In the aforementioned technical solution, the magnetic force of the magnet acts on the intersection of the longitudinal and transverse ribs of the mask, effectively avoiding the pattern opening of the mask, so that the mask can be more evenly attached to the substrate surface under the action of the magnet.

[0033] Furthermore, the coating fixture also includes multiple adjusting components and multiple locking components, which are distributed on the mask assembly. The back plate has multiple first notches for the locking components and multiple second notches for the adjusting components. This prevents interference between the adjusting components, locking components, and the magnet plate assembly when multiple adjusting components and multiple locking components are installed, ensuring that the magnet plate assembly can be assembled more smoothly with the mask assembly.

[0034] Optionally, the adjustment components or the locking components are non-uniformly distributed around the mask assembly. The purpose of this design is to assemble the magnet plate assembly with the mask assembly in a uniquely mating manner, thereby aligning the magnets in the magnet plate assembly with the mask in a predetermined manner, ensuring that the magnets provide uniform and effective adhesion to the mask.

[0035] Furthermore, a buckle slot is provided at the first notch on the back plate. Rotating the pressure member in the locking assembly until its buckle engages with the buckle slot can prevent unnecessary rotation of the pressure member on the magnet plate assembly, thereby preventing the magnet plate assembly from detaching from the locking assembly.

[0036] Furthermore, the magnet plate assembly also includes a mounting base and at least one handle. The mounting base is used for connection to the external coating equipment; the handle is for easy gripping by the operator, thereby facilitating the assembly of the vapor deposition fixture or the magnet plate assembly therein into the coating equipment.

[0037] The second aspect of this application provides a coating apparatus in which a coating fixture as described in the first aspect of this application is disposed.

[0038] Using the coating equipment described in this application, there is no need for screen tensioning or welding, which enables rapid loading and unloading of substrates and ensures uniform bonding and precise alignment between the substrate and the mask, thereby improving production efficiency and product quality to a certain extent.

[0039] Furthermore, other additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the coating fixture in an embodiment of this application; Figure 2This is a schematic diagram of the coating fixture in the open state in an embodiment of this application, showing the substrate contained therein; Figure 3 This is a schematic diagram illustrating the change in the drooping state of the mask plate before and after being attracted by the magnetic force of the magnet plate assembly in an embodiment of this application. Figure 4 This is an exploded view showing the structure of the mask assembly in an embodiment of this application. The view also shows the adjustment assembly and locking assembly installed on the mask assembly. Figure 5 This is a schematic diagram of the structure of the base plate and the mask plate assembled therein in the embodiments of this application; Figure 6 This is a schematic diagram of the structure of the adjustment component in an embodiment of this application; Figure 7 This is a schematic diagram in an embodiment of the present application, used to show that the substrate placed in the substrate placement groove is adjusted from a state biased to one side to an aligned state. Figure 8 This is a partial structural schematic diagram of the coating fixture in the position of the adjustment component in an embodiment of this application; Figure 9 It is along Figure 8 Sectional view of line AA in the middle; Figure 10 It is along Figure 8 Sectional view of the middle BB line; Figure 11 This is a schematic diagram of the structure of the magnet plate assembly in an embodiment of this application; Figure 12 This is a schematic diagram of the locking assembly in an embodiment of this application; Figure 13 This is a partial structural diagram of the coating fixture at the position of the locking assembly in an embodiment of this application; Figure 14 It is along Figure 13 A cross-sectional view of the CC line; Figure 15 This is a schematic diagram used in this embodiment to show the corresponding positions of the mask plate and the magnet; The image is labeled as follows: 1: Mask assembly; 11: Base plate; 111: Mask slot; 112: Connecting slot; 113: Boss; 12: Mask; 121: Pattern opening; 122: First connecting part; 123: Second connecting part; 124: Third connecting part; 125: First connecting hole; 126: Second connecting hole; 127: Third connecting hole; 128: Longitudinal rib; 129: Transverse rib; 13: Pressure plate; 14: Fastening screw; 100: Substrate placement slot; 2: Magnet plate assembly; 21: Back plate; 211: Cover plate groove; 212: Recessed groove; 213: First notch; 214: Buckle slot; 215: Second notch; 216: Protrusion; 22: Magnet; 23: Cover plate; 24: Handle; 25: Mounting base; 3: Adjustment component; 31: Base; 311: Top block groove; 312: Threaded hole; 32: Top block; 321: Clearance notch; 322: Bevel; 323: First countersunk hole; 33: First connecting screw; 34: First spring; 35: Adjustment knob; 4: Locking assembly; 41: Pressure member; 411: Second countersunk hole; 412: Buckle body; 42: Second connecting screw; 43: Second spring; 5: Substrate. Detailed Implementation

[0041] This application will now be described more fully below with reference to the accompanying drawings. However, this application can be implemented in many different ways, and the terms "embodiments" and "implementations" as used herein are interchangeable and are non-limiting examples of the fixtures or devices disclosed herein. Therefore, the scope of protection of this application should not be construed as limited to the embodiments described herein. For the purpose of this application, these embodiments are provided herein to make the application more detailed and complete, and to fully convey the scope of the application to those skilled in the art.

[0042] It should be noted that in this document, when terms with directional indications such as "above," "upper side," "lower," and "lower side" are used, these terms are only used to explain the relative positional relationship between elements or structures in a specific orientation (as shown in the attached figures). If the specific orientation changes, the directional indication will also change accordingly. However, when an element is said to be "above" another element, to have a structure, or when an element is said to be "on" another element, the term "above" does not necessarily have directional indication. It may only be used to indicate that there is a connection between the two elements (direct connection, or the presence of an intermediary element), or to indicate that the structure is part of the element.

[0043] When terms such as “first” and “second” are used, although these terms can be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. Therefore, without departing from the teachings of this disclosure, the first element discussed below may be referred to as the second element.

[0044] When referring to an element having “one end” and “the other end”, the terms “one end” and “the other end” may refer to the two ends of an element in its length direction, such as a strip or rod, or may be used simply to distinguish two different parts of the element, and should not be limited to the understanding that the element must have a similar shape to a strip or rod.

[0045] When terms such as "first direction," "second direction," and "third direction" are used, they do not indicate a single direction, but rather two opposite directions. See Appendix for example. Figure 5 As shown, the first direction includes not only the direction indicated by the arrow in the diagram, but also the opposite direction. Furthermore, "consistent with the first direction" should be understood as being the same as or parallel to that "first direction".

[0046] When terms such as "ring" or "encircle" are used, the "ring" referred to is not limited to a circular ring; it can also be a rectangular ring, and so on.

[0047] In this application, "long hole" can refer to a long hole that is distinct from a round hole and a regular polygonal hole, and the length of the hole is significantly greater than its width.

[0048] In this application, "pattern opening" can refer to a single through opening or a patterned area containing several through openings. Correspondingly, "mask" in this application can represent various types of masks. For example, when the "mask" is a general-purpose mask (CMM) used to fabricate a common layer on an OLED display panel, "pattern opening" represents a single through opening. As another example, when the "mask" is a precision mask (FMM) used to fabricate pixels on an OLED display panel, "pattern opening" represents a patterned area containing several pixel openings. Meanwhile, "vertical rib" and "lateral rib" represent the portions between adjacent patterned areas, not the portions between adjacent pixels.

[0049] Furthermore, the technical solutions of the various embodiments of this application can be combined with each other, but only if they are based on the ability of a person skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by this application.

[0050] Unless otherwise specified, the same reference numerals are used throughout this document to denote the same objects.

[0051] In view of the aforementioned state of the prior art and considering its various shortcomings, and not wishing to be bound by any theory, this application provides an embodiment of a coating fixture in its first aspect. This coating fixture can be applied at least to depositing functional films on the surface of a substrate in a chemical vapor deposition process. The substrate referred to includes, but is not limited to, glass substrates used to fabricate OLED display panels, and wafers used to fabricate chips, etc.

[0052] See appendix Figure 1 As shown, the coating fixture provided in this application includes a mask assembly 1 and a magnet assembly 2, wherein: See appendix Figure 1 Appendix Figure 2 Appendix Figure 4 and attached Figure 5 As shown. The mask assembly 1 includes a base plate 11, a mask 12 and a pressure plate 13. The base plate 11 is annular, the mask 12 covers the upper side of the base plate 11, including covering the annular area surrounded by the base plate 11, and the pressure plate 13 is also disposed on the upper side of the base plate 11.

[0053] The mask plate 12 has patterned openings 121 arranged in an array in the middle. A first connecting hole 125 and a second connecting hole 126 are provided on both sides of the mask plate 12 in the first direction. The base plate 11 has bosses 113 that respectively engage with the first connecting holes 125 and the second connecting holes 126. The inner diameter of the first connecting hole 125 is the same as the outer diameter of the corresponding boss 113, ensuring a tight fit between the boss 113 and the first connecting hole 125. The second connecting hole 126 is an elongated hole extending along the first direction, and the width of the elongated hole is the same as the outer diameter of the corresponding boss 113. In other words, the length of the elongated hole is greater than the outer diameter of the corresponding boss 113. That is, the second connecting hole 126 fits tightly with the corresponding boss 113 in its width direction, but there is a large gap between it and the corresponding boss 113 in its length direction (i.e., the first direction), allowing relative movement between the two at the second connecting hole 126.

[0054] A pressure plate 13 is disposed on the upper side of the base plate 11, surrounding the mask plate 12. The central region surrounded by the pressure plate 13 forms a substrate placement groove 100, with the mask plate 12 serving as the bottom of the substrate placement groove 100. Preferably, the pressure plate 13 and the base plate 11 are detachably connected; for example, see the attached drawing. Figure 4 As shown, the pressure plate 13 and the base plate 11 are connected by a plurality of fastening screws 14.

[0055] The magnet plate assembly 2 covers the upper opening of the substrate placement groove 100, and the magnet plate assembly 2 and the mask plate assembly 1 are detachably fixedly connected, for example, the magnet plate assembly 2 and the mask plate assembly 1 are connected by screws or by clips, etc.

[0056] See appendix Figure 2 As shown, when loading the substrate 5, the magnet plate assembly 2 and the mask plate assembly 1 are first separated to expose the substrate placement groove 100 in the mask plate assembly 1. Then, the substrate 5 is placed horizontally in the substrate placement groove 100, and the distance between the substrate 5 and the inner sidewall of the substrate placement groove 100 is kept as consistent as possible. Then, the mask plate assembly 1 and the magnet plate assembly 2 are reassembled together.

[0057] The substrate 5, placed in the substrate placement slot 100, is directly supported by the mask plate 12. Then, the magnet plate assembly 2, located on the upper side of the substrate 5, applies magnetic force from the upper side of the substrate 5 to the mask plate 12, causing the mask plate 12 to return from a drooping state to a flat position and adhere to the surface of the substrate 5, as shown in the attached diagram. Figure 3 As shown in the diagram. Therefore, the mask 12 can fully adhere to the surface of the substrate 5, resulting in higher product quality when a thin film or coating is applied to the surface of the substrate 5.

[0058] See appendix Figure 4 and attached Figure 5 As shown, in the mask assembly 1, the mask 12 is connected to the corresponding boss 113 via the first connecting hole 125 and the second connecting hole 126, thereby connecting the mask 12 to the base plate 11. When installing the mask 12, it is only necessary to fit the corresponding connecting hole onto the corresponding boss 113; there is no need for mesh stretching and welding of the mask 12. Therefore, the complex mesh stretching process is eliminated, and the manufacturing efficiency of the mask assembly 1 is significantly improved.

[0059] By designing the engagement method of the first and second connecting holes and the boss 113, when the mask plate 12 is reduced in drooping due to the attraction of the magnet plate assembly 2, or when it expands or contracts due to temperature changes, the mask plate 12 can freely extend and retract outward in the first direction, and can also freely extend and retract to both sides of the extension direction. Therefore, it avoids the mask plate 12 from undulating and deforming due to the failure to release local stress, and ensures that the mask plate 12 can be more flatly attached to the substrate 5.

[0060] See appendix Figure 5 As shown, in the first direction, the first connecting hole 125 and the corresponding boss 113 are tightly fitted together, and the second connecting hole 126 is tightly fitted together with the corresponding boss 113 in its width direction. This can achieve the purpose of positioning the mask plate 12 on the base plate 11. Furthermore, when the mask plate 12 extends or retracts, the position of the first connecting hole 125 of the mask plate 12 on the base plate 11 remains basically unchanged, and the mask plate 12 does not deviate from the first direction before deformation. Therefore, it has high alignment accuracy.

[0061] In one embodiment, see Appendix Figure 5 As shown, the patterned openings 121 arranged in an array on the mask 12 are configured such that the patterned openings 121 are arranged in multiple rows along the second direction and in multiple columns along a third direction perpendicular to the second direction. Furthermore, the patterned openings 113 are rectangular, with two sets of opposite sides of the rectangle parallel to the second direction and the third direction, respectively, and one diagonal of the rectangle aligning with the first direction.

[0062] In the above embodiments, when the mask plate 12 expands and deforms due to temperature rise, the long side and short side of the rectangular mask opening 121 experience similar degrees of deformation, which can reduce or avoid distortion of the rectangular shape of the pattern opening 121. Therefore, when a thin film or coating is applied to the surface of the substrate 5 on the mask plate 12, the accuracy of the formed thin film pattern or coating pattern is higher.

[0063] In another embodiment, the pattern openings on the mask can also be circular. Similarly, the arrayed pattern openings are configured such that the pattern openings are arranged in multiple rows along the second direction and in multiple columns along a third direction perpendicular to the second direction. Since the width of the circular pattern openings is consistent in all radial directions, it is less likely to cause distortion of the circularity of the pattern openings when the mask expands naturally due to heat.

[0064] It should be understood that in the foregoing embodiments, setting the inner diameter of the first connecting hole 125 to match the outer diameter of the corresponding boss 113, and setting the width of the second connecting hole 126 to match the outer diameter of the corresponding boss 113, are both ideal results desired by the inventors. However, in actual production, errors are unavoidable when machining the boss 113 and the first and second connecting holes. Therefore, within the allowable error range, even if the inner diameter of the first connecting hole 125 and the width of the second connecting hole 126 are not consistent with the outer diameter of the corresponding boss 113, they should still be considered as covered within the scope of protection of this application.

[0065] Preferably, in one embodiment of this application, the one-sided fitting clearance between the first connecting hole 125 and the corresponding boss 113, and the one-sided fitting clearance between the second connecting hole 126 and the corresponding boss 113 in its width direction are both less than or equal to 0.015 mm.

[0066] To reduce or eliminate the adverse effects caused by machining errors in the connecting holes and boss 113, in one embodiment of this application, see the appendix. Figure 5 As shown, the mask plate 12 has a plurality of adjacent first connection holes 125 and a plurality of adjacent second connection holes 126, and the pressure plate 13 is provided with a plurality of bosses 113 that are respectively inserted into the plurality of adjacent first connection holes 125 and the plurality of adjacent second connection holes 126 shown.

[0067] As another optional embodiment, the mask plate 12 has a plurality of adjacent first connection holes 125, and the base plate 11 is provided with a plurality of bosses 113 that are respectively inserted into the plurality of adjacent first connection holes 125.

[0068] As another optional embodiment, the mask plate 12 has a plurality of adjacent second connection holes 126, and the base plate 11 is provided with a plurality of bosses 113 that are respectively inserted into the plurality of adjacent second connection holes 126.

[0069] In the above embodiments, by providing multiple first connecting holes 125 and / or multiple second connecting holes 126 to cooperate with multiple bosses 113, the situation where the mask plate 12 deviates from the first direction due to inaccurate cooperation between the bosses 113 and the connecting holes can be reduced or eliminated, thereby reducing or eliminating the positional deviation of the mask plate 12 during installation, improving the positioning accuracy of the mask plate 12 on the base plate 11, and ultimately improving the alignment accuracy between the substrate 5 and the mask plate 12.

[0070] In one embodiment, see Appendix Figure 5 As shown, the edge of the mask plate 12 is also provided with a plurality of third connecting holes 127. The third connecting holes 127 are distributed on the mask plate 12 at positions different from the first connecting holes 125 and the second connecting holes 126. The bottom plate 11 is provided with a boss 113 that is inserted into the third connecting holes 127, and the outer diameter of the boss 113 is smaller than the inner diameter of the third connecting holes 127.

[0071] It should be understood that the third connecting hole 127 is not located on either side of the mask plate 12 in the first direction, but rather as shown in the attached figure. Figure 5 The third connecting hole 127 is distributed on both sides of the first connecting hole 125 and the second connecting hole 126. When there are multiple first connecting holes 125 and second connecting holes 126, the third connecting hole 127 is distributed on both sides of the respective distribution areas of the first connecting hole 125 and the second connecting hole 126.

[0072] In the aforementioned embodiments, by providing a third connecting hole 127 and a corresponding boss 113, the corresponding edge of the mask plate 12 will not detach from the base plate 11 when subjected to external force. At the same time, based on the clearance fit between the third connecting hole 127 and the corresponding boss 113, the corresponding edge of the mask plate 12 with the third connecting hole 127 can freely contract inward or freely expand outward to a certain extent. Therefore, when the mask plate 12 deforms due to temperature changes or attraction from the magnet plate assembly 2, it can freely expand outward, avoiding undulating deformation of the mask plate 12 due to unreleased local stress, and making the mask plate 12 fit more smoothly against the substrate 5.

[0073] In one embodiment, see Appendix Figure 5As shown, the second connecting hole 126 extends along the first direction to penetrate the edge of the mask plate 12. When assembling the mask plate 12, the second connecting hole 126 can be first snapped onto the corresponding boss 113 from the broken edge, and then the connecting holes in other parts can be inserted into the corresponding boss 113. This operation makes it easier to assemble the mask plate 12 onto the base plate 11.

[0074] It should be noted that the boss 113 connected to the first connecting hole 125, the boss 113 connected to the second connecting hole 126, and the boss 113 connected to the third connecting hole 127 can be the same or different.

[0075] In one embodiment, the pressure plate 13 covers the upper end of the boss 113 to restrict the mask plate 12 from the upper end of the boss 113, so that the mask plate 12 will not easily detach from the boss 113 on the base plate 11.

[0076] As another alternative embodiment, the upper end of the boss 113 can be pressed down by the magnet plate assembly 2 mounted on the mask plate assembly 1, thereby preventing the mask plate 12 from easily detaching from the boss 113 on the base plate 11. For example, the boss 113 can be lengthened so that it abuts against the lower surface of the magnet plate assembly 2, or a protrusion extending towards the boss 113 can be provided at a corresponding position on the magnet plate assembly 2, through which the protrusion abuts against the upper end of the boss 113.

[0077] In one embodiment, see Appendix Figure 4 As shown, the pressure plate 13 is a ring-shaped integral unit. In this embodiment, the pressure plate 13 is set to be substantially the same size as the base plate 11, and is fitted and pressed onto the ring-shaped base plate 11.

[0078] As another alternative embodiment, the pressure plate 13 can also be composed of multiple segments, which surround to form a ring-shaped area. The multiple segments of the pressure plate 13 can be connected end to end to form a ring, or they can be distributed around each other without being connected end to end to form a ring.

[0079] In one embodiment, see Appendix Figure 4 As shown, a mask slot 111 is provided on the base plate 11, a boss 113 is provided in the mask slot 111, and the edge of the mask plate 12 is accommodated in the mask slot 111.

[0080] By setting the mask slot 111, on the one hand, it can make way for the mask plate 12, so that the pressure plate 13 will not press the mask plate 12 tightly, ensuring that the mask plate 12 can freely extend outward and retract inward to a certain extent; on the other hand, after the edge of the mask plate 12 is received in the mask slot 111, no gap will be generated between the edge of the mask plate 12 and the inner wall of the mask slot 111 (i.e., the inner wall of the pressure plate 13), which can prevent material leakage from the gap during coating. In addition, it can also prevent the mask plate 12 from being obstructed by the inner wall of the mask slot 111 when it extends outward, thus preventing unacceptable deformation of the mask plate 12.

[0081] See appendix Figure 4 As shown, the mask slot 111 is provided with a plurality of connection slots 112, and the bosses 113 are respectively disposed in each connection slot 112. The outer edge of the mask plate 12 extends outward to a plurality of connection parts, which are respectively accommodated in the corresponding connection slots 112 and connected to the corresponding bosses 113.

[0082] It should be understood that the aforementioned connecting part is connected to the corresponding boss 113 through connecting holes provided thereon. The connecting holes include a first connecting hole 125 and a second connecting hole 126. In some embodiments, a third connecting hole 127 may also be included.

[0083] For example, in one embodiment, such as Figure 5 As shown, the mask plate 12 is provided with a first connecting part 122, a second connecting part 123 and a plurality of third connecting parts 124, wherein a first connecting hole 125 is provided on the first connecting part 122, a second connecting hole 126 is provided on the second connecting part 123, and a third connecting hole 127 is provided on the third connecting part 124.

[0084] By setting the protruding connecting part to connect with the corresponding boss 113, the influence of the connection on the internal stress of the mask plate 12 can be reduced, and the possibility of unacceptable deformation of the mask plate 12 can be reduced.

[0085] In one embodiment, see Appendix Figure 1 As shown, the coating fixture of this application also includes a plurality of adjustment components 3, which are arranged around the substrate placement groove 100.

[0086] See appendix Figure 6 and appendix Figures 8 to 10 As shown, the adjustment assembly 3 includes a base 31, a top block 32, a first connecting screw 33, a first spring 34, and an adjustment knob 35, wherein: The bottom of the base 31 is provided with a top block groove 311, which extends at least to one side surface of the base 31, and the side surface faces the substrate placement groove 100.

[0087] The top block 32 is at least partially accommodated within the top block groove 311. The end of the top block 32 facing away from the substrate placement groove 100 has a bevel 322, and the end facing the substrate placement groove 100 has a first countersunk hole 323, which extends through the bevel 322.

[0088] The first connecting screw 33 is disposed in the first countersunk hole 323 and extends to connect with the inner wall of the top block groove 311 on the side away from the substrate placement groove 100.

[0089] The first spring 34 is disposed in the first countersunk hole 323 and is sleeved in the middle of the first connecting screw 33.

[0090] The base 31 has a threaded hole 312 at its top, which extends into the top block groove 311. An adjusting knob 35 is installed in the threaded hole 312, and its lower end extends to abut against the inclined surface 322. It should be understood that the middle part of the adjusting knob 35 is threadedly connected to the threaded hole 312.

[0091] like Figure 7 As shown, after the substrate 5 is placed in the substrate placement groove 100, the substrate 5 tends to be biased to one side of the substrate placement groove 100, which makes it impossible to align with the mask plate 12.

[0092] After the adjustment component 3 is installed, when the substrate 5 in the substrate placement groove 100 is biased to one side as described above, the position of the substrate can be adjusted by using the adjustment component 3 near that side, so that the substrate 5 returns to the center of the substrate placement groove 100, thus achieving the desired effect. Figure 7 The image shows the mating state of the substrate 5 and the substrate placement groove 100 to the right of the arrow. Furthermore, by adjusting all the adjustment components 3 to abut against the edge of the substrate 5, the position of the substrate 5 can be restricted, preventing the substrate 5 from shifting towards one side of the substrate placement groove 100 again.

[0093] When operating the adjustment component 3, rotating the adjustment knob 35 causes it to move downwards. The lower end of the adjustment knob 35 presses against the inclined surface 322 of the top block 32, causing the top block 32 to move towards the substrate placement groove 100 and push the substrate 5 towards the center of the substrate placement groove 100. When the top block 32 moves towards the substrate placement groove 100, the first spring 34 is compressed by the bottom of the first countersunk hole 323 and the head of the first connecting screw 33, resulting in elastic deformation.

[0094] To return the substrate 5 to the center of the substrate placement slot 100, one adjustment component 3 can be operated, or multiple adjustment components 3 can be operated separately.

[0095] When it is necessary to remove the substrate 5, rotate the adjustment knob 35 in the opposite direction to move it upward. The lower end of the adjustment knob 35 is about to disengage from the inclined surface 322 of the top block 32. At this time, the first spring 34 rebounds and causes the top block 32 to retract into the top block groove 311 and no longer press against the substrate 5. Therefore, it is easier to remove the substrate 5 from the substrate placement groove 100.

[0096] Furthermore, to ensure that the substrate 5 is unrestricted during the coating process, the adjustment assembly 3 can be adjusted so that the top block 32 does not contact the substrate 5 before coating. However, it should be noted that this operation should be performed after the substrate 5 has been properly positioned.

[0097] By setting the adjustment component 3, misalignment of the substrate 5 in the substrate placement groove 100 can be avoided, thereby improving the alignment accuracy between the substrate 5 and the mask plate 12. Therefore, the quality of products produced by coating using the coating fixture of this application can be improved.

[0098] Optional, see appendix Figure 4 As shown, the base 31 is fixed on the pressure plate 13, so that the adjustment assembly 3 is fixedly connected to the mask assembly 1.

[0099] In addition, in some cases, such as when the pressure plate 13 is divided into multiple sections and the position of the fixed adjustment component 3 is not occupied by the pressure plate 13, the base 31 can be directly fixed to the base plate 11.

[0100] The connection between the base 31 and the pressure plate 13 or the bottom plate 11 is preferably a detachable fixed connection, for example, by means of screws.

[0101] Furthermore, the top block 32 may be provided with one or more sets of cooperating first connecting screws 33 and first springs 34. For example, in one embodiment, see Appendix Figure 6 As shown, the top block 32 has two parallel first countersunk holes 323, and the first connecting screw 33 and the first spring 34 are provided in both first countersunk holes 323.

[0102] In one embodiment, refer to Appendix Figure 9 As shown, the top block 32 has a clearance notch 321 at the end away from the substrate placement groove 100, and a slope 322 is disposed within the clearance notch 321. The lower end of the adjustment knob 35 extends to abut against the slope 322 within the clearance notch 321. The top block 32 is provided with two first countersunk holes 323, which are distributed on both sides of the clearance notch 321. The first connecting screw 33 and the first spring 34 are disposed in each of the two first countersunk holes 323.

[0103] In one embodiment, see Appendix Figure 1 and attached Figure 2As shown, the coating fixture of this application also includes a plurality of locking components 4, which are arranged around the substrate placement groove 100.

[0104] See appendix Figure 12 To be continued Figure 14 As shown, the locking assembly 4 includes a pressure member 41, a second connecting screw 42, and a second spring 43, wherein: The pressure member 41 is provided with a second countersunk hole 411, which penetrates both ends of the pressure member 41. A buckle body 412 is provided in the middle of the pressure member 41, which extends outward along the radial direction of the second countersunk hole 411.

[0105] The second connecting screw 42 is disposed within the second countersunk hole 411 and extends to connect with the surface of the pressure plate 13. The second spring 43 is disposed within the second countersunk hole 411 and is sleeved on the middle of the second connecting screw 42.

[0106] The buckle 412 on the pressure member 41 is pressed against the edge of the magnet plate assembly 2.

[0107] In the above embodiments, the mask assembly 1 is fixedly connected to the magnet assembly 2 by the locking assembly 4. When the substrate 5 needs to be assembled, the mask assembly 1 and the magnet assembly 2 are first separated to expose the substrate placement groove 100 in the mask assembly 1. The operation method is as follows: i. Pull the pressure piece 41 upward to disengage the buckle 412 from the magnet plate assembly 2, and at the same time rotate the pressure piece 41 to rotate the buckle 412 away from the magnet plate assembly 2, and then release the pressure piece 41. ii. Operate in the manner described in step i above, so that the pressing parts 41 of all locking components 4 are disengaged from the magnet plate assembly 2; iii. After completing steps i and ii above, separate the mask assembly 1 from the magnet assembly 2.

[0108] After the mask assembly 1 is separated from the magnet assembly 2, the substrate 5 is taken out and placed in the substrate placement slot 100 of the mask assembly 1. Then, the mask assembly 1 containing the substrate 5 is reassembled with the magnet assembly 2. During operation, the pressure member 41 is pulled upward and rotated at the same time to rotate the buckle 412 to be located on the magnet assembly 2. Then the pressure member 41 is released. Under the action of the second spring 43, the pressure member 41 presses down to lock the edge of the magnet assembly 2. After all the pressure members 41 of the locking assemblies 4 are pressed against the edge of the magnet assembly 2, the reassembly of the mask assembly 1 and the magnet assembly 2 is completed.

[0109] Following the aforementioned operating method, the mask assembly 1 and the magnet assembly 2 can be quickly assembled, greatly improving the convenience of loading and unloading the substrate 5 and significantly increasing production efficiency.

[0110] Optionally, in some cases, such as when the pressure plate 13 is divided into multiple segments and the position of the locking assembly 4 is not occupied by the pressure plate 13, the second connecting screw 42 of the locking assembly 4 may also extend to connect with the base plate 11.

[0111] In one embodiment, see Appendix Figure 11 As shown, the magnet plate assembly 2 includes a back plate 21, a plurality of magnets 22, and a cover plate 23. A cover plate groove 211 is provided on the surface of the back plate 21 away from the substrate placement groove 100. A plurality of recesses 212 are arrayed at the bottom of the cover plate groove 211. The plurality of magnets 22 are correspondingly disposed within each of the recesses 212. The cover plate 23 covers and is fixed within the cover plate groove 211. The cover plate 23 is used to encapsulate the magnets 22 within the recesses 212.

[0112] Preferably, the cover plate 23 and the back plate 21 are detachably fixedly connected, for example by screws.

[0113] In the aforementioned magnet plate assembly 2, since an independent recess 212 is provided on the back plate 21, the repulsion or attraction between the magnets 22 can be reduced when assembling the magnets 22. Therefore, it is easier to snap the magnets 22 into the back plate 21. This design reduces the assembly difficulty of the magnet plate assembly 2 itself and makes production and processing more convenient.

[0114] See appendix Figure 14 As shown, a protrusion 216 is provided on the side surface of the back plate 21 facing the substrate placement groove 100, and a plurality of protrusions 216 are arranged in an array on the surface of the back plate 21.

[0115] By setting an array of protrusions 216 to contact the substrate 5, on the one hand, uniform support can be provided to the surface of the substrate 5; on the other hand, when the substrate 5 is attached to the back plate 21, the gas between the two can be discharged in time, avoiding poor adhesion between the two in local positions due to the inability of local gas to be discharged in time. This not only improves the quality of the coating, but also reduces the possibility of damage to the substrate 5.

[0116] Furthermore, by providing the protrusion 216, heat flow can be distributed more evenly on the surface of the substrate 5 during coating, which helps to reduce defects caused by excessively high local temperatures on the substrate 5.

[0117] See appendix Figure 15 As shown, the mask plate 12 has a plurality of parallel longitudinal ribs 128 and a plurality of parallel transverse ribs 129, and a plurality of magnets 22 in the magnet plate assembly 2 are projected onto the intersections of the longitudinal ribs 128 and the transverse ribs 129 respectively.

[0118] In this way, the magnetic force of the magnet 22 is concentrated at the intersection of the longitudinal and transverse ribs of the mask 12, effectively avoiding the pattern opening 121 of the mask 12. This allows the mask 12 to adhere more evenly to the surface of the substrate 5 under the action of the magnet 22. Therefore, during the coating process, a higher precision film pattern can be obtained on the surface of the substrate 5.

[0119] In one embodiment, see Appendix Figure 1 and attached Figure 2 As shown, the coating fixture of this application includes multiple adjustment components 3 and multiple locking components 4, which are distributed on the mask assembly 1. The adjustment components 3 and locking components 4 are the same as those in the previous embodiments.

[0120] Furthermore, see Appendix Figure 11 As shown, the back plate 21 of the magnet plate assembly 2 has multiple first notches 213 for the latching assembly 4 and multiple second notches 215 for the adjusting assembly 3. The first notches 213 and the second notches 215 are used to avoid the adjusting assembly 3 and the latching assembly 4 mounted on the mask plate assembly 1, respectively, so as to avoid interference between the adjusting assembly 3, the latching assembly 4 and the magnet plate assembly 2, and ensure that the magnet plate assembly 2 can be assembled with the mask plate assembly 1 more smoothly.

[0121] To ensure that the magnet plate assembly 2 is assembled with the mask plate assembly 1 in a unique mating manner. In one embodiment, see Appendix Figure 1 As shown, the latching components 4 surrounding the mask assembly 1 are non-uniformly distributed.

[0122] The non-uniformly distributed locking components 4 match the similarly non-uniformly distributed first notches 213 on the back plate 21 of the magnet plate assembly 2, achieving a unique mating between the two. When assembling the mask plate assembly 1 and the magnet plate assembly 2, the operator can easily determine the assembly direction by identifying the locking components 4 and the corresponding first notches 213, facilitating assembly. After assembly, the magnets 22 in the magnet plate assembly 2 are aligned with the mask plate 12, with the alignment method referred to in the appendix. Figure 15 As shown, magnet 22 can provide uniform and effective adsorption to mask plate 12.

[0123] To achieve the same objective as in the previous embodiment, optionally, the adjustment components 3 surrounding the mask assembly 1 are non-uniformly distributed.

[0124] Furthermore, it should be understood that positioning structures or positioning marks can also be provided on the mask assembly 1 and the magnet assembly 2 to enable the mask assembly 1 and the magnet assembly 2 to be assembled in a unique mating manner.

[0125] In one embodiment, see Appendix Figure 11As shown, a buckle slot 214 is provided on the back plate 21 at the first notch 213. Rotating the pressure member 41 in the locking assembly 4 so that its buckle body 412 is engaged in the buckle slot 214 can prevent the pressure member 41 from rotating unnecessarily on the magnet plate assembly 2, thereby preventing the magnet plate assembly 2 from accidentally disengaging from the locking assembly 4.

[0126] In one embodiment, see Appendix Figure 1 Appendix Figure 2 and attached Figure 11 As shown, the magnet plate assembly 2 also includes a mounting base 25, which is used for connecting to an external coating equipment.

[0127] After the mounting base 25 of the magnet plate assembly 2 is assembled with the connection part in the coating equipment, the magnet plate assembly 2 does not need to be removed from the coating equipment except when necessary maintenance and repair are required. When the substrate 5 needs to be replaced, only the mask plate assembly 1 containing the substrate 5 needs to be removed from the magnet plate assembly 2. Therefore, loading and unloading the substrate 5 is very convenient, and production efficiency is improved.

[0128] In one embodiment, see Appendix Figure 1 Appendix Figure 2 and attached Figure 11 As shown, the magnet plate assembly 2 also includes at least one handle 24, which is used to facilitate the operator's gripping and thereby facilitates the assembly of the vapor deposition fixture or the magnet plate assembly 2 therein into the coating equipment.

[0129] A second aspect of this application provides an embodiment of a coating apparatus, wherein the coating apparatus is configured with the coating fixture described in the foregoing embodiment.

[0130] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the embodiments of this application should be included within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A coating fixture, comprising a mask assembly and a magnet plate assembly, characterized in that, The mask assembly includes an annular base plate, a mask plate covering the upper surface of the base plate, and a pressure plate; The mask plate has patterned openings arranged in an array in the middle, and a first connecting hole and a second connecting hole are respectively provided on the two sides of the first direction; The base plate is provided with bosses that respectively engage with the first connecting hole and the second connecting hole. The inner diameter of the first connecting hole matches the outer diameter of the corresponding boss. The second connecting hole is an elongated slotted hole extending along the first direction, and the width of the elongated slotted hole is consistent with the outer diameter of the corresponding boss. A pressure plate is placed around the mask plate on the upper side of the base plate, and a substrate placement groove is formed in the middle area, with the mask plate serving as the bottom of the substrate placement groove; The magnet plate assembly covers the upper opening of the substrate placement slot and is detachably and fixedly connected to the mask plate assembly.

2. The coating fixture according to claim 1, characterized in that, The array of patterned openings is configured as follows: The pattern openings are arranged in multiple rows along the second direction and in multiple columns along a third direction perpendicular to the second direction; and The pattern has a circular opening. Alternatively, the pattern opening may be rectangular, with two sets of opposite sides of the rectangle parallel to the second and third directions respectively, and one of the diagonals of the rectangle aligning with the first direction.

3. The coating fixture according to claim 1, characterized in that, The mask plate has a plurality of adjacent first connection holes, and the base plate is provided with a plurality of bosses that are respectively inserted into the plurality of adjacent first connection holes; and / or The mask plate has a plurality of adjacent second connection holes, and the base plate is provided with a plurality of bosses that are respectively inserted into the plurality of adjacent second connection holes.

4. The coating fixture according to claim 1, characterized in that, The edge of the mask plate is also provided with a plurality of third connection holes, which are distributed on the mask plate at positions different from the first connection holes and the second connection holes; The base plate is provided with a boss that is inserted into the third connecting hole, and the outer diameter is smaller than the inner diameter of the third connecting hole.

5. The coating fixture according to claim 1 or 4, characterized in that, The pressure plate covers the upper end of the boss.

6. The coating fixture according to claim 1, characterized in that, The pressure plate is a single ring-shaped unit; Alternatively, it may have multiple pressure plates arranged in a ring shape.

7. The coating fixture according to claim 1 or 4, characterized in that, The base plate is provided with a mask slot, and the boss is disposed in the mask slot; The edge of the mask plate is accommodated in the mask slot.

8. The coating fixture according to claim 7, characterized in that, The mask slot is provided with multiple connection slots, and the protrusions are respectively disposed in each connection slot. The outer edge of the mask plate extends outward to form multiple connecting parts, which are respectively accommodated in corresponding connecting slots and connected to corresponding bosses.

9. The coating fixture according to claim 1, characterized in that, It also includes multiple adjustment components arranged around the substrate placement slot; The adjustment assembly includes a base, a top block, a first connecting screw, a first spring, and an adjustment knob; The bottom of the base is provided with a top block groove, which extends at least to one side surface of the base, and the one side surface faces the substrate placement groove; The top block is at least partially accommodated in the top block groove, and the end of the top block facing away from the substrate placement groove has a slope, and the end facing the substrate placement groove has a first countersunk hole, which extends to the through slope. The first connecting screw is disposed in the first countersunk hole and extends to connect with the inner wall of the top block groove on the side away from the substrate placement groove; The first spring is disposed in the first countersunk hole and is fitted in the middle of the first connecting screw; The base has a threaded hole at the top, which extends into the top block groove. An adjustment knob is installed in the threaded hole, and the lower end of the adjustment knob extends to abut against the inclined surface.

10. The coating fixture according to claim 1, characterized in that, It also includes multiple locking components arranged around the substrate placement slot; The locking assembly includes a pressure member, a second connecting screw, and a second spring; The pressure piece is provided with a second countersunk hole, which penetrates both ends of the pressure piece. A fastener is provided in the middle of the pressure piece, and the fastener extends outward along the radial direction of the second countersunk hole. The second connecting screw is located in the second countersunk hole and extends to connect with the surface of the pressure plate or base plate; The second spring is disposed in the second countersunk hole and is fitted in the middle of the second connecting screw; The fastener is pressed against the edge of the magnet plate assembly.

11. The coating fixture according to claim 1, characterized in that, The magnet plate assembly includes a back plate, multiple magnets, and a cover plate, wherein: A cover plate groove is provided on the side surface of the back plate away from the substrate placement groove, and multiple sinks are arrayed at the bottom of the cover plate groove. Multiple magnets are arranged one-to-one in multiple sinks; The cover plate covers and is fixed in the cover plate groove.

12. The coating fixture according to claim 11, characterized in that, The back plate has a plurality of protrusions arranged in an array on the side surface facing the substrate placement groove.

13. The coating fixture according to claim 11, characterized in that, The mask plate has multiple parallel longitudinal ribs and multiple parallel transverse ribs. The plurality of magnets are projected orthogonally onto the intersection of the longitudinal ribs and the transverse ribs, respectively.

14. The coating fixture according to claim 11, characterized in that, It also includes multiple adjustment components and multiple locking components, which are distributed on the mask plate assembly. The back plate has multiple first notches that accommodate the locking components and multiple second notches that accommodate the adjustment components.

15. The coating fixture according to claim 14, characterized in that, The adjustment components are non-uniformly distributed around the mask assembly. Alternatively, the latching components may be non-uniformly distributed around the mask assembly.

16. The coating fixture according to claim 14, characterized in that, A buckle slot is provided on the back plate at the first notch.

17. The coating fixture according to claim 11, characterized in that, The magnet plate assembly also includes a mounting base and at least one handle.

18. A coating apparatus, characterized in that, It is equipped with a coating fixture as described in any one of claims 1-17.

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