LED incoming material detection platform and platform mechanism compatible with multiple sizes of incoming materials, detection equipment

Abstract

The application discloses a kind of LED incoming material detection platform and compatible multiple size incoming material's platform mechanism, detection equipment, it is related to LED production equipment;Detection platform includes: including detection platform body, detection platform body is used to bear and connect the LED substrate to be detected;Detection platform body middle part is provided with detection process through hole, and detection platform body is provided with multiple positioning recesses;In working condition, detection platform body can be installed on platform base, and positioning is carried out by multiple positioning recesses and corresponding positioning convex portion cooperation, can be quickly disassembled and installed, satisfy product demand, while LED platform mechanism is in a plane, guarantee the stability of equipment, to reduce the time required for repair LED.Suitable for multiple size incoming material's platform mechanism, including the aforementioned LED incoming material detection platform and platform base, detection platform body is attached on platform base in working condition.Suitable for multiple size incoming material's detection equipment is equipped with the aforementioned suitable for multiple size incoming material's platform mechanism.

Description

Technical Field

[0001] This invention relates to the field of display technology, specifically to an LED incoming material inspection platform and a platform mechanism and inspection equipment compatible with multiple sizes of incoming materials. Background Technology

[0002] Micro-LEDs possess advantages such as high brightness, small size, low power consumption, long lifespan, and faster response time, and are considered the next-generation display technology. The micro-LED transfer process requires the use of EL (Electroluminescence) equipment (contact electroluminescence equipment), which is a key component for incoming LED inspection.

[0003] Combination Figure 1 and Figure 2 The current equipment uses a single-size platform, which can only inspect substrates of the corresponding size (e.g., 4-inch substrates). If it is necessary to inspect substrates of other sizes (e.g., 6-inch or 8-inch substrates), the entire platform mechanism needs to be replaced and the level needs to be recalibrated. Moreover, after each replacement of the platform mechanism, it is necessary to perform back-and-forth switching and debugging verification, which is not conducive to the stable operation of the equipment and seriously affects the production TT (Takt Time, which is the time consumed by the production line to respond to customer demand, also known as the production cycle time), resulting in the production capacity being unable to meet market demand. Summary of the Invention

[0004] To address the technical problem that existing LED incoming material inspection equipment platform mechanisms cannot be compatible with LED substrates of various specifications, this invention provides an LED incoming material inspection platform and a platform mechanism and inspection equipment compatible with multiple sizes of incoming materials. It can be quickly disassembled and installed to meet product requirements. At the same time, the platform mechanism is on a single plane, which ensures the stability of the equipment, reduces the time required for LED inspection, improves maintenance efficiency, and ensures that production capacity meets market demand.

[0005] This invention is achieved through the following technical solution:

[0006] In a first aspect, the present invention provides an LED incoming material inspection platform, including an inspection platform body, the inspection platform body being used to support and connect the LED substrate to be inspected; the inspection platform body is provided with inspection process through holes and multiple positioning recesses; in the working state, the inspection platform body can be mounted on a platform base and positioned by the multiple positioning recesses cooperating with corresponding positioning protrusions on the platform base.

[0007] It should be noted that in the Micro-LED transfer process, EL equipment (contact electroluminescent device) is required for LED incoming material inspection. However, the current EL equipment uses a single-size stage, which can only inspect substrates of the corresponding size (e.g., 4-inch substrates). If it is necessary to inspect substrates of other sizes (e.g., 6-inch or 8-inch substrates), the entire stage mechanism of the equipment needs to be replaced and the level recalibrated. Moreover, after each replacement of the stage mechanism, it is necessary to perform back-and-forth switching mechanism debugging and verification, which is not conducive to the stable operation of the equipment and seriously affects the production TT (Takt Time, which is the time consumed by the production line to respond to customer demand, also known as the production cycle time), resulting in the production capacity being unable to meet market demand.

[0008] In view of this, the LED incoming material inspection platform provided by the present invention includes an inspection platform body. In the working state, the inspection platform body can be installed on the platform base. The inspection platform body is provided with an inspection process through hole in the middle, so as to support and connect the LED substrate to be inspected through the inspection platform body, thereby realizing the fixation and connection of the LED substrate. At the same time, the inspection platform body is provided with multiple positioning recesses, which can be positioned by cooperating with the corresponding positioning protrusions on the platform base, which facilitates quick installation and disassembly. This allows for easy replacement of the corresponding inspection platform body according to production needs, meeting the requirements of multi-size incoming material inspection. Furthermore, the platform base does not need to be replaced during the entire production process, so that the platform mechanism is always on the same plane, which can shorten the equipment debugging cycle, avoid frequent manual switching, and ensure the stability of the equipment, thereby saving equipment maintenance costs and improving production efficiency.

[0009] Therefore, the LED incoming material inspection platform provided by this invention can be quickly disassembled and installed, and the equipment is suitable for rapid switching of different product size requirements. At the same time, the entire platform mechanism is on a plane, which ensures the stability of the equipment, reduces the time required for LED inspection, and improves maintenance efficiency, ensuring that production capacity can meet market demand.

[0010] In one optional embodiment of this application, the detection platform body has a polygonal structure to facilitate the production, processing, installation, and positioning of the detection platform body.

[0011] In one optional embodiment of this application, the number of positioning recesses is the same as the number of sides of the detection stage body, and each positioning recess is located at the corresponding corner of the detection stage body, so as to avoid the positioning recesses interfering with the processing of the detection process through holes and to minimize the size of the detection stage body as much as possible.

[0012] In one optional embodiment of this application, the detection stage body has a quadrilateral structure.

[0013] In one optional embodiment of this application, the detection stage body can be adsorbed onto the stage substrate by a negative pressure adsorption mechanism adapted to the stage substrate, so as to ensure the stability of the equipment by adsorbing the detection stage body onto the stage substrate through the negative pressure adsorption mechanism.

[0014] Secondly, the present invention provides a platform mechanism compatible with multiple sizes of incoming materials, comprising: the aforementioned LED incoming material inspection platform; a platform base, wherein a plurality of positioning protrusions are provided on the mounting surface of the platform base, each positioning protrusion corresponding to and adapted to the positioning recess; wherein, the inspection platform body is attached to the platform base in the working state, and each positioning protrusion is inserted into the corresponding positioning recess.

[0015] In other words, the multi-size incoming material compatible platform mechanism provided by this invention includes the aforementioned LED incoming material inspection platform and platform base. Multiple positioning protrusions are provided on the mounting surface of the platform base, each corresponding to and fitting a positioning recess. This allows the inspection platform body to adhere to the platform base during operation, and rapid positioning is achieved through the cooperation of the positioning protrusions and recesses. This facilitates the rapid installation and disassembly of the inspection platform body, enabling the replacement of the corresponding inspection platform body according to production needs, meeting the requirements for multi-size incoming material inspection. Furthermore, the platform base does not need to be replaced during the entire production process, ensuring the platform mechanism remains on the same plane. This shortens the equipment adjustment cycle, avoids frequent manual switching, and ensures equipment stability, thereby saving equipment maintenance costs and improving production efficiency.

[0016] In one optional embodiment of this application, a mounting groove is provided in the middle of the stage base, and the cross-sectional dimensions of the mounting groove are adapted to the cross-sectional dimensions of the detection stage body, so as to further improve the stability of the installation of the detection stage body by the cooperation between the detection stage body and the mounting groove.

[0017] In one optional embodiment of this application, the stage substrate is equipped with a negative pressure adsorption mechanism. The negative pressure adsorption mechanism can adsorb the corresponding detection stage body into the mounting groove, so that the detection stage body is adsorbed onto the stage substrate by the negative pressure adsorption mechanism. With the cooperation of the mounting groove, positioning notch and positioning protrusion, the stability of the installation of the detection stage body can be ensured, thus guaranteeing the stability of the equipment.

[0018] In one optional embodiment of this application, multiple detection stage bodies are provided, and the external dimensions of the multiple detection stage bodies are the same, while the external dimensions of the detection process through holes provided in the middle of the multiple detection stage bodies are different, so as to facilitate the quick placement of detection stage bodies of corresponding specifications on the stage base according to production needs.

[0019] Thirdly, the present invention also provides an inspection device compatible with multiple sizes of incoming materials, which is equipped with the aforementioned platform mechanism compatible with multiple sizes of incoming materials.

[0020] That is, the multi-size incoming material inspection equipment provided by the present invention includes the above-mentioned multi-size incoming material platform mechanism. It can replace the corresponding inspection platform body according to production needs to meet the inspection needs of multi-size incoming materials. Moreover, it does not need to replace the platform base during the entire production process, so that the platform mechanism is always on the same plane. This can shorten the equipment debugging cycle, avoid frequent manual switching, and ensure the stability of the equipment, thereby saving equipment maintenance costs and improving production efficiency.

[0021] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0022] 1. The LED incoming material inspection platform provided by the present invention includes an inspection platform body. In the working state, the inspection platform body can be installed on the platform base. The inspection platform body is provided with an inspection process through hole in the middle, so as to support and connect the LED substrate to be inspected through the inspection platform body, thereby realizing the fixation and connection of the LED substrate. At the same time, the inspection platform body is provided with multiple positioning recesses, which can be positioned by cooperating with the corresponding positioning protrusions of the platform base, which facilitates quick installation and disassembly. Thus, it is convenient to replace the corresponding inspection platform body according to production needs, so as to meet the needs of multi-size incoming material inspection.

[0023] 2. The LED incoming material inspection platform provided by this invention does not require replacement of the platform base during the entire production process, ensuring that the platform mechanism is always on the same plane. This can shorten the equipment adjustment cycle, avoid frequent manual switching, and ensure the stability of the equipment, thereby saving equipment maintenance costs and improving production efficiency.

[0024] 3. The carrier mechanism compatible with multiple sizes of incoming materials provided by the present invention includes the aforementioned LED incoming material inspection carrier and carrier base. Multiple positioning protrusions are provided on the mounting surface of the carrier base, each corresponding to and fitting a positioning recess. This allows the inspection carrier body to adhere to the carrier base during operation, and rapid positioning is achieved through the cooperation of the positioning protrusions and positioning recesses. This facilitates the rapid installation and disassembly of the inspection carrier body, enabling the replacement of the corresponding inspection carrier body according to production needs, meeting the requirements for multi-size incoming material inspection. Furthermore, the carrier base does not need to be replaced during the entire production process, ensuring the carrier mechanism remains on the same plane. This shortens the equipment debugging cycle, avoids frequent manual switching, and ensures equipment stability, thereby saving equipment maintenance costs and improving production efficiency.

[0025] 4. The multi-size material inspection equipment provided by the present invention includes the above-mentioned multi-size material inspection platform mechanism. It can replace the corresponding inspection platform body according to production needs to meet the inspection needs of multi-size materials. Moreover, it does not need to replace the platform base during the entire production process, so that the mechanism is always on the same plane. This can shorten the equipment adjustment cycle, avoid frequent manual switching, and ensure the stability of the equipment, thereby saving equipment maintenance costs and improving production efficiency. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] In the attached diagram:

[0028] Figure 1 This is a top view of the 4-inch LED detection stage described in the background section of this invention.

[0029] Figure 2 This is a top view of the 6-inch LED detection stage described in the background section of this invention.

[0030] Figure 3 A top view of the 4-inch LED incoming material inspection platform provided in an embodiment of the present invention;

[0031] Figure 4 A top view of the 6-inch LED incoming material inspection platform provided in an embodiment of the present invention;

[0032] Figure 5 This is a top view of the platform mechanism compatible with multiple sizes of incoming materials provided in an embodiment of the present invention.

[0033] The attached diagram shows the markings and corresponding component names:

[0034] 10-Detection stage body, 11-Detection process through hole, 12-Positioning recess, 20-Stage base, 21-Positioning protrusion, 22-Mounting groove, 23-Negative pressure adsorption mechanism. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0037] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0038] In the description of this application, it should be noted that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this application is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0039] It should be noted that, where there is no conflict, different features in the embodiments of this application can be combined with each other.

[0040] Please refer to Figure 1 and Figure 2 In the fabrication of Micro-LEDs, EL equipment is required for incoming LED inspection. However, current EL equipment uses a single-size stage, which can only inspect substrates of that size. If substrates of other sizes need to be inspected, the entire stage mechanism needs to be replaced and the level recalibrated. Moreover, after each replacement of the stage mechanism, repeated switching and debugging verification are required, which is detrimental to stable equipment operation, seriously affects production time, and results in production capacity failing to meet market demand.

[0041] To address the aforementioned problems, the inventors have innovatively designed the following technical solutions, which will be described in detail below with reference to the accompanying drawings. It should be noted that the deficiencies in the existing solutions are the result of the inventors' practical experience and careful research. Therefore, the discovery process of the aforementioned technical problems and the solutions proposed in the embodiments below are contributions made by the inventors to this application during the invention process, and should not be construed as technical content known to those skilled in the art.

[0042] Example 1

[0043] Combination Figure 3 and Figure 4 This embodiment provides an LED incoming material inspection platform, including an inspection platform body 10, which is used to support and connect the LED substrate to be inspected; the inspection platform body 10 is provided with an inspection process through hole 11 in the middle, and the inspection platform body 10 is provided with a plurality of positioning recesses 12; in the working state, the inspection platform body 10 can be mounted on a platform base 20, and is positioned by the plurality of positioning recesses 12 cooperating with the corresponding positioning protrusions 21 on the platform base 20.

[0044] Specifically, in this embodiment, the structure used to support and connect the LED substrate being tested is manufactured as a separate component to form the testing platform body 10. Simultaneously, a testing process through-hole 11 is provided in the center of the testing platform body 10. The size of the testing process through-hole 11 is determined according to the LED substrate being tested supported by the testing platform body 10; that is, the size of the testing process through-hole 11 in the center of each testing platform body 10 is different. Generally, testing platform bodies 10 are provided for supporting 4-inch, 6-inch, and 8-inch LED substrates respectively.

[0045] In this embodiment, the detection platform body 10 has a polygonal structure to facilitate the manufacturing, processing, and installation positioning of the detection platform body. Compared to a circular structure, it allows for faster positioning and installation. Typically, the detection platform body 10 has a quadrilateral structure, such as a square or rectangular structure.

[0046] The detection platform body 10 can be adsorbed onto the platform base 20 by a negative pressure adsorption mechanism 23 adapted to the platform base 20. It is understood that the bottom surface of the detection platform body 10 should be adapted to the corresponding top surface of the platform base 20, so that when the negative pressure adsorption mechanism 23 draws negative pressure onto the platform base 20, it can adsorb the detection platform body 10 onto the platform base 20. This can be achieved by simultaneously making the bottom surface of the detection platform body 10 and the top surface of the platform base 20 flat, or by providing a sealing ring between the bottom surface of the detection platform body 10 and the top surface of the platform base 20, and the cavity formed by the sealing ring being connected to the negative pressure output end of the negative pressure adsorption mechanism 23. This ensures the stability of the equipment by adsorbing the detection platform body 10 onto the platform base 20 through the negative pressure adsorption mechanism 23.

[0047] The positioning recess 12 can be a countersunk hole, stepped hole, blind hole, or groove provided on the bottom surface of the detection stage body 10. In this embodiment, the positioning recess 12 is a through hole that penetrates the detection stage body 10, which facilitates the processing of the positioning recess 12 and ensures that the detection stage body 10 can be completely fitted onto the stage substrate.

[0048] Furthermore, the number of positioning recesses 12 is the same as the number of sides of the detection stage body 10, and each positioning recess 12 is located at the corresponding corner of the detection stage body 10, so as to avoid interference with the processing of the detection process through hole 11 caused by the positioning recesses 12, and to minimize the size of the detection stage body 10 as much as possible. In this embodiment, the number of positioning recesses 12 is four.

[0049] In summary, the LED incoming material inspection stage provided in this embodiment includes an inspection stage body 10, an inspection process through hole 11 is provided in the middle of the inspection stage body 10, and a plurality of positioning recesses 12 are provided in the inspection stage body 10.

[0050] In use, the inspection platform body 10 is attached to the platform base 20, and is positioned by the cooperation of multiple positioning recesses 12 with the corresponding positioning protrusions 21, which facilitates quick installation and disassembly, so that the corresponding inspection platform body 10 can be replaced according to production needs to meet the needs of multi-size incoming material inspection.

[0051] Throughout the entire production process, there is no need to replace the carrier base 20. Only the corresponding detection carrier body 10 needs to be replaced according to the size of the incoming LED, so that the mechanism is always on the same plane. This can shorten the equipment adjustment cycle, avoid frequent manual switching, and ensure the stability of the equipment, thereby saving equipment maintenance costs and improving production efficiency.

[0052] In summary, the LED incoming material inspection mechanism provided in this embodiment can be quickly disassembled and installed, and the equipment is suitable for rapid switching to meet the needs of products of different sizes. At the same time, the platform mechanism of the EL equipment used for LED incoming material inspection is on a plane, which ensures the stability of the equipment, reduces the time required for LED inspection, improves maintenance efficiency, and ensures that production capacity meets market demand.

[0053] Example 2

[0054] Combination Figure 5 This embodiment provides a platform mechanism compatible with multiple sizes of incoming materials, including: the LED incoming material inspection platform described in Embodiment 1; a platform base 20, wherein a plurality of positioning protrusions 21 are provided on the mounting surface of the platform base 20, and each positioning protrusion 21 corresponds to and is adapted to the positioning recess 12; wherein, the inspection platform body 10 is attached to the platform base in the working state, and each positioning protrusion 21 is inserted into the corresponding positioning recess 12.

[0055] Specifically, the stage base 20 is a base for mounting the LED incoming material inspection stage described in Example 1. After the inspection stage body 10 is mounted on the stage base 20, a stage mechanism for the existing EL equipment for LED incoming material inspection can be formed.

[0056] The platform base 20 has a mounting groove 22 in the middle. The cross-sectional dimensions of the mounting groove 22 are adapted to the cross-sectional dimensions of the detection platform body 10, so that after the detection platform body 10 is installed on the platform base, the top surface of the detection platform body 10 can be flush with the top surface of the platform base (so that the detection platform body 10 is completely located within the mounting groove 22). Through the cooperation between the detection platform body and the mounting groove 22, the installation stability of the detection platform body 10 is further improved.

[0057] Correspondingly, the positioning protrusion 21 is provided at the bottom of the mounting groove 22, and its shape is adapted to the cross-sectional shape of the positioning recess 12, usually a cylindrical pin.

[0058] Based on this, the stage base 20 is equipped with a negative pressure adsorption mechanism 23, which can adsorb the corresponding detection stage body 10 into the mounting groove 22. The detection stage body 10 is adsorbed onto the stage base 20 by the negative pressure adsorption mechanism 23. Through the cooperation of the mounting groove 22, the positioning recess 12 and the positioning protrusion 21, the stability of the installation of the detection stage body 10 can be ensured, thus guaranteeing the stability of the equipment.

[0059] It is understood that the negative pressure adsorption mechanism 23 includes an adsorption channel or adsorption cavity disposed inside the stage substrate, and both the adsorption channel and adsorption cavity are connected to the mounting groove 22 so that the negative pressure adsorption mechanism 23 can adsorb the detection stage body 10. At the same time, the negative pressure adsorption mechanism 23 also includes corresponding connecting pipes, control valves (solenoid valves) and negative pressure sources, so as to control the vacuum at the bottom of the stage through the solenoid valve, thereby quickly adsorbing the detection stage body 10.

[0060] In addition, multiple testing platform bodies 10 are provided. These multiple testing platform bodies 10 have the same external dimensions, but the external dimensions of the testing process through holes 11 located in the middle of each of the multiple testing platform bodies 10 are different. This allows for the rapid placement of testing platform bodies 10 of the appropriate specifications onto the platform base 20 according to production requirements. In this embodiment, testing platform bodies 10 suitable for both 4-inch and 6-inch sizes are provided.

[0061] In summary, the carrier mechanism compatible with multiple sizes of incoming materials provided in this embodiment includes the LED incoming material detection carrier described in Embodiment 1 and the carrier base 20 described in Embodiment 2. Multiple positioning protrusions 21 are provided on the mounting surface of the carrier base 20, and each positioning protrusion 21 corresponds to and is adapted to the positioning recess 12.

[0062] In use, the detection platform body 10 is attached to the platform base 20, and is quickly positioned by the cooperation of the positioning protrusion 21 and the positioning recess 12. It is then fixed by the negative pressure adsorption mechanism 23, which facilitates the quick installation and disassembly of the detection platform body 10. This allows for easy replacement of the corresponding detection platform body 10 according to production needs, meeting the requirements for inspection of multiple sizes of incoming materials. Furthermore, the platform base 20 does not need to be replaced during the entire production process, ensuring that the platform mechanism is always on the same plane. This shortens the equipment debugging cycle, avoids frequent manual switching, and ensures the stability of the equipment, thereby saving equipment maintenance costs and improving production efficiency.

[0063] Example 3

[0064] This embodiment provides an inspection device compatible with multiple sizes of incoming materials, which is equipped with the multi-size compatible platform mechanism described in Embodiment 2. It is understood that the multi-size compatible inspection device provided in this embodiment remains unchanged except that the existing platform mechanism is replaced with the multi-size compatible platform mechanism provided in Embodiment 2.

[0065] That is, the multi-size incoming material inspection equipment provided in this embodiment includes the multi-size incoming material platform mechanism described in Embodiment 2. It can replace the corresponding inspection platform body 10 according to production needs to meet the inspection needs of multi-size incoming materials. Moreover, it does not need to replace the platform base 20 during the entire production process, so that the platform mechanism is always on the same plane. This can shorten the equipment debugging cycle, avoid frequent manual switching, and ensure the stability of the equipment, thereby saving equipment maintenance costs and improving production efficiency.

[0066] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An LED incoming material inspection platform, characterized in that, Includes a testing stage body (10), which is used to support and connect the LED substrate to be tested; The detection stage body (10) is provided with a detection process through hole (11) and multiple positioning recesses (12) in the middle; In the working state, the detection stage body (10) can be installed on the stage base (20) and positioned by the cooperation of the multiple positioning recesses (12) with the corresponding positioning protrusions (21) on the stage base (20).

2. The LED incoming material inspection platform according to claim 1, characterized in that, The detection platform body (10) has a polygonal structure.

3. The LED incoming material inspection platform according to claim 2, characterized in that, The number of positioning recesses (12) is the same as the number of sides of the detection stage body (10), and each positioning recess (12) is located at the corresponding corner of the detection stage body (10).

4. The LED incoming material inspection platform according to claim 2, characterized in that, The detection platform body (10) has a quadrilateral structure.

5. The LED incoming material inspection platform according to claim 1, characterized in that, The detection stage body (10) can be adsorbed onto the stage substrate (20) by a negative pressure adsorption mechanism (23) adapted to the stage substrate (20).

6. A platform mechanism compatible with multiple sizes of incoming materials, characterized in that, include: The LED incoming material inspection platform according to any one of claims 1 to 5; The platform base (20) has a plurality of positioning protrusions (21) on its mounting surface, and each positioning protrusion (21) corresponds to and is adapted to the positioning recess (12). In the working state, the detection stage body (10) is attached to the stage base (20), and each of the positioning protrusions (21) is inserted into the corresponding positioning recess (12).

7. The platform mechanism compatible with multiple sizes of incoming materials according to claim 6, characterized in that, The platform base (20) is provided with a mounting groove (22) in the middle, and the cross-sectional dimensions of the mounting groove (22) are adapted to the cross-sectional dimensions of the detection platform body (10).

8. The platform mechanism compatible with multiple sizes of incoming materials according to claim 7, characterized in that, The stage substrate (20) is equipped with a negative pressure adsorption mechanism (23), which can adsorb the corresponding detection stage body (10) into the mounting groove (22).

9. The platform mechanism compatible with multiple sizes of incoming materials according to claim 6, characterized in that, Multiple detection stage bodies (10) are provided. The external dimensions of the multiple detection stage bodies (10) are the same, and the external dimensions of the detection process through holes (11) provided in the middle of the multiple detection stage bodies (10) are different.

10. A testing device compatible with multiple sizes of incoming materials, characterized in that, The equipment is equipped with a platform mechanism compatible with multiple sizes of incoming materials as described in any one of claims 6 to 9.

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