X-ray multi-channel high-speed tomography apparatus and method

Abstract

An X-ray multi-channel high-speed tomography device and method, the device includes a carrier, an X-ray generator and a plurality of detectors. The carrier includes a moving unit to carry and move a to-be-detected object, the carrier has a block, the block includes a plurality of imaging areas, the X-ray generator is arranged on one side of the carrier to emit X-rays towards the block of the carrier, and a plurality of detectors are arranged on the other side of the carrier and within the scattering angle range of the X-rays, the detectors are respectively arranged corresponding to the imaging areas to receive X-rays passing through the corresponding imaging areas at different angles to obtain a plurality of images, wherein when the to-be-detected object moves in the block, a plurality of to-be-measured areas of the to-be-detected object sequentially pass through the imaging areas, and the detectors obtain images of each to-be-measured area of the to-be-detected object.

Description

Technical Field

[0001] This invention relates to an X-ray multi-channel high-speed tomography device and method, and more particularly to an X-ray multi-channel high-speed tomography device and method applied in the semiconductor field. Background Technology

[0002] With the rapid development of technology, semiconductor components have been widely used in consumer electronics, communication equipment, electric vehicles, artificial intelligence, and high-performance computing, and are an indispensable core technology in various critical systems. However, as manufacturing processes continue to advance, the structure of semiconductor components is becoming increasingly complex, leading to a decrease in yield. Therefore, effectively detecting internal structural defects in semiconductor components and improving detection efficiency has become a crucial issue in semiconductor manufacturing and quality control.

[0003] However, conventional X-ray computed tomography (CT) devices typically employ a single X-ray source paired with a single two-dimensional detector. The scanning method usually involves a sample scanning mechanism driving the sample to rotate, or the sample and detector moving in a circular motion, or the source and detector moving at different angles while the sample remains stationary, to obtain two-dimensional images of the sample from different angles. Specifically, at any given time, conventional techniques can only acquire images of a single specific region of the sample from a single angle using a single set of two-dimensional detectors. Furthermore, the sample scanning mechanism must move the sample sequentially to different angles to acquire multiple images of the same specific region from different angles. Only after these are completed can another specific region of the sample be scanned, and this process is repeated. Assuming the exposure time is T1 and the time it takes for the sample to move from one angle to the next is T2, then when acquiring X images of a specific region from different angles for 3D reconstruction, the image acquisition time is T = X(T1 + T2). Therefore, to complete the acquisition of complete images of a sample from different angles in multiple regions, it is necessary not only to wait repeatedly for the sample scanning mechanism to be positioned, but also to repeatedly acquire images from different angles for each specific region. This increases the overall scanning time and causes the sample to be subjected to a higher cumulative radiation dose, making it difficult to apply radiation-sensitive semiconductor devices to X-ray tomography analysis in practice.

[0004] Therefore, there is an urgent need for a new type of X-ray multi-channel high-speed tomography device to solve the problems of conventional technology. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to provide an X-ray multi-channel high-speed tomography scanning device and method, which can overcome the defects of the prior art, shorten the image acquisition time, thereby reducing the cumulative radiation dose of the object to be detected, ensuring that it is not damaged after detection, and also obtaining more images and improving the three-dimensional reconstruction effect.

[0006] To achieve the above objectives, the present invention discloses an X-ray multi-channel high-speed tomographic scanning device, characterized in that it comprises:

[0007] A stage includes a moving unit for carrying an object to be tested and moving the object to be tested. The stage has a block containing multiple imaging areas.

[0008] An X-ray generator, disposed on one side of the stage, is used to emit an X-ray toward that area of ​​the stage; and

[0009] Multiple detectors are arranged on the other side of the stage and within the scattering angle range of the X-ray. These detectors are respectively arranged for the imaging areas to receive the X-ray passing through the corresponding imaging areas at different angles to obtain multiple images.

[0010] The moving unit moves the object to be detected from outside the imaging area into the block by scanning and moving within the block. When the object to be detected moves within the block, multiple test areas of the object to be detected pass through the imaging areas in sequence, and the detectors acquire images of each of the test areas of the object to be detected.

[0011] The detectors are arranged in an array. When the object to be detected moves in the block, a first detector among the detectors acquires images of the area to be detected from the same angle at multiple time points, and the detectors acquire images of the area to be detected from different angles at the same time point.

[0012] The invention further includes a construction module connected to the detectors, which is used to receive the images from the detectors and construct a three-dimensional tomographic image of each of the test areas of the object to be detected based on the images.

[0013] Among these detectors, a second detector includes a first sensing surface and a second sensing surface. The first sensing surface and the second sensing surface receive the X-ray at different angles to generate images at different angles. The first sensing surface and the second sensing surface are formed by dividing a sensing surface of the second detector through software.

[0014] The construction module includes at least one artificial intelligence model, which is used to perform noise reduction processing on the images to generate a high-quality two-dimensional image, perform sparse solution three-dimensional reconstruction processing on the high-quality two-dimensional image to generate a full-view three-dimensional image, and perform super-resolution processing on the full-view three-dimensional image to generate a high-resolution three-dimensional tomographic image. The training dataset used to train the at least one artificial intelligence model includes datasets of long-exposure images and short-exposure images of different sample types, datasets of a large number of angled images and a small number of angled images, and datasets of images captured by partitioning and not partitioning the imaging area.

[0015] The imaging areas are arranged in an array, and adjacent imaging areas contain at least one interval.

[0016] The device further includes a mask module disposed between the X-ray generator and the stage and corresponding to the at least one gap, for blocking the X-ray emitted by the X-ray generator from penetrating the at least one gap.

[0017] A method for high-speed X-ray multi-channel tomography is also disclosed, characterized by the following steps:

[0018] An object to be inspected is placed on a moving unit of a stage to move the object, wherein the stage has a block and the block contains multiple imaging areas; and

[0019] Multiple detectors are placed on one side of the stage and within the scattering angle range of an X-ray emitted by an X-ray generator. These detectors are respectively positioned to correspond to the imaging areas, so that the detectors receive the X-ray passing through the corresponding imaging areas at different angles to obtain multiple images.

[0020] The moving unit moves the object to be detected from outside the imaging area into the block by scanning and moving within the block. When the object to be detected moves within the block, multiple test areas of the object to be detected pass through the imaging areas in sequence, and the detectors acquire images of each of the test areas of the object to be detected.

[0021] The detectors are arranged in an array. When the object to be detected moves in the block, a first detector among the detectors acquires images of multiple fields of view in the area to be detected at the same angle at multiple time points, and the detectors acquire images of the area to be detected at different angles at the same time point.

[0022] This further includes the following steps:

[0023] A construction module receives these images and constructs a three-dimensional tomographic image of each of the test areas of the object to be inspected based on these images.

[0024] Among these detectors, a second detector includes a first sensing surface and a second sensing surface. The first sensing surface and the second sensing surface receive the X-ray at different angles to generate images at different angles. The first sensing surface and the second sensing surface are formed by dividing a sensing surface of the second detector through software.

[0025] This further includes the following steps:

[0026] The module receives the images generated by the detectors and performs noise reduction processing on the images according to at least one artificial intelligence model in the module to generate a high-quality image. It then performs sparse de-3D reconstruction processing on the high-quality image to generate a full-view image and performs super-resolution processing on the full-view image to generate a high-resolution image.

[0027] The training dataset used to train the at least one artificial intelligence model includes datasets of long-exposure images and short-exposure images of different sample types, datasets of a large number of angled images and a small number of angled images, and datasets of images taken in sections and images taken without sections.

[0028] The imaging areas are arranged in an array, and adjacent imaging areas contain at least one interval.

[0029] This further includes the following steps:

[0030] A mask module is used to block the X-ray emitted by the X-ray generator from penetrating the at least one gap, wherein the mask module is disposed between the X-ray generator and the stage and corresponds to the at least one gap.

[0031] In summary, this invention does not merely image a single test area, but rather uses multiple detectors to simultaneously image multiple test areas from different angles based on the movement of the object on the stage. This shortens the imaging time, thereby reducing the cumulative radiation dose to the object and ensuring no damage is caused after detection. Furthermore, this invention can perform multiple rounds of repeated scanning by adjusting the imaging area of ​​the stage and the corresponding detector positions to obtain more images, thus improving the subsequent 3D reconstruction effect. In addition, the detectors of this invention can be segmented by software to generate more images from different angles, facilitating subsequent 3D reconstruction. Moreover, this invention further includes an image processing module that uses at least one artificial intelligence model to perform 3D reconstruction of multiple images and identify and eliminate artifacts to generate a high-resolution 3D tomographic image. Attached Figure Description

[0032] Figure 1 A schematic diagram of an X-ray multichannel high-speed tomography apparatus according to a specific embodiment of the present invention is shown.

[0033] Figure 2 A head-up view of an X-ray multichannel high-speed tomography apparatus according to a specific embodiment of the present invention is shown.

[0034] Figure 3 A top view schematic diagram of an X-ray multichannel high-speed tomography apparatus according to a specific embodiment of the present invention is shown.

[0035] Figure 4 A head-up view of an X-ray multichannel high-speed tomography apparatus according to another specific embodiment of the present invention is shown.

[0036] Figure 5 A top view schematic diagram of an X-ray multichannel high-speed tomography apparatus according to another specific embodiment of the present invention is shown.

[0037] Figure 6 A top view schematic diagram of an X-ray multichannel high-speed tomography apparatus according to another specific embodiment of the present invention is shown.

[0038] Figure 7 A schematic diagram of an X-ray multichannel high-speed tomography apparatus according to another specific embodiment of the present invention is shown.

[0039] Figure 8 A flowchart illustrating the steps of a multi-channel high-speed X-ray computed tomography method according to a specific embodiment of the present invention is shown.

[0040] Figure 9 A flowchart illustrating the steps of a multi-channel high-speed X-ray computed tomography method according to another specific embodiment of the present invention is shown.

[0041] Figure 10 A flowchart illustrating the steps of a multi-channel high-speed X-ray computed tomography method according to another specific embodiment of the present invention is shown. Detailed Implementation

[0042] To make the advantages, spirit, and features of the present invention easier and clearer to understand, detailed descriptions and discussions will follow with reference to specific embodiments and the accompanying drawings. It is important to note that these specific embodiments are merely representative examples of the present invention, and the specific methods, apparatuses, conditions, materials, etc., exemplified are not intended to limit the invention or the corresponding specific embodiments. Furthermore, the devices in the figures are only used to illustrate their relative positions and are not drawn to scale; this is to be stated beforehand.

[0043] In the description of this specification, references to terms such as "one embodiment," "another embodiment," or "part of an embodiment," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment is included in at least one embodiment of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments.

[0044] Please see Figure 1 as well as Figure 2 . Figure 1 A schematic diagram of an X-ray multi-channel high-speed tomography device 1 according to a specific embodiment of the present invention is shown. Figure 2 A head-up view of an X-ray multi-channel high-speed tomography apparatus 1 according to a specific embodiment of the present invention is shown. Figure 3 A top view schematic diagram of an X-ray multi-channel high-speed tomography device 1 according to a specific embodiment of the present invention is shown. Figures 1 to 3 As shown, in this specific embodiment, the X-ray multi-channel high-speed tomography scanning device includes a stage 10, an X-ray generator 12, multiple detectors 14, and a construction module 16. The stage 10 includes a moving unit 100, which carries the object to be detected 2 and moves the object 2. The stage 10 has a block 101, and the block 101 includes multiple imaging regions 1011, such as... Figure 3 As shown, the imaging areas 1011 can be arranged in an array within the block 101. An X-ray generator 12 is positioned on one side of the stage 10 to emit X-rays toward the block 101 of the stage 10. Multiple detectors 14 are positioned on the other side of the stage 10 and within the X-ray scattering angle range. These detectors 14 are respectively positioned corresponding to the imaging areas 1011 to receive X-rays passing through the corresponding imaging areas 1011 at different angles to obtain multiple images. The moving unit 100 moves the object to be tested 2 from outside the imaging area 1011 into the block 101 in a scanning motion and moves within the block 101. As the object to be tested moves within the block 101, multiple test areas 21 of the object to be tested 2 sequentially pass through the imaging areas 1011. X-rays emitted by the X-ray generator 12 pass through the test areas 21 of the object to be tested 2 on the imaging areas 1011, and the detectors 14 respectively receive these X-rays passing through the test areas 21 to obtain images of each of the test areas 21 of the object to be tested 2. The construction module 16 is connected to the detectors 14 and is used to receive these images from the detectors 14 to construct a three-dimensional tomographic image of each test area 21 of the object to be tested 2 based on these images.

[0045] In this specific embodiment, the image-capturing area 1011 in the stage 10 refers to the area where the X-ray generator 12 emits X-rays which are received by the detector 14 to obtain an image. The image-capturing areas 1011 are arranged in an array as follows: Figure 3 As shown, but not limited to Figure 3 The detectors 14 are also arranged in an array and correspond to the imaging areas 1011 respectively. Therefore, X-rays passing through the imaging areas 1011 can be received by the corresponding detectors 14 and imaged. The number of detectors 14 and the number of imaging areas 1011 are 9, but in practice, they are not limited to this. The number of detectors and the number of imaging areas can be adjusted according to the user's needs. The moving unit 100 moves the object to be detected 2 sequentially through the imaging areas 1011 in a scanning movement manner. Specifically, the object to be detected 2 can move row by row along a moving direction starting from one diagonal position of the stage 10, and the moving direction can be changed alternately between adjacent rows to form a moving path, sequentially passing through the imaging areas 1011 to the other diagonal position of the stage 10. However, in practice, it is not limited to this. It can also include a scanning method in which the moving direction is not changed between adjacent rows.

[0046] In this specific embodiment, when the object to be tested 2 moves within block 101, a single detector among the multiple detectors 14 acquires multiple images of the multiple test areas 21 from the same angle at multiple time points. Furthermore, since an X-ray generator 12 simultaneously emits X-rays to multiple imaging areas 1011, the multiple detectors 14 acquire images of the multiple test areas 21 of the object to be tested 2 within their respective imaging areas 1011 from different angles at the same time point. Specifically, when the object to be tested 2 is placed on the moving unit 100 and the moving unit 100 is located within block 101 of the stage 10, during the process of moving from one diagonal position to another diagonal position, the object to be tested 2 will traverse multiple imaging areas 1011 at the same time point. In the above situation, the multiple detectors 14 can operate synchronously to acquire images of different angles of different test areas 21 of the object to be tested 2 at the same time point. Furthermore, each time the moving unit 100 moves, a test area 21 of the object to be tested 2 will enter the imaging area 1011 corresponding to the next detector 14. This allows the same test area 21 to be imaged from different angles by different detectors 14 at different points in time during the movement, and the same detector 14 can sequentially acquire images of multiple test areas 21 at the same angle. In other words, compared to the conventional technology, which requires first acquiring images of a single test area of ​​the object to be tested from multiple different angles before performing the same multiple-angle imaging procedure on another test area and repeating this process until all test areas are imaged, this invention can simultaneously image multiple test areas 21. As the object to be tested 2 moves, not only have different detectors 14 acquired images of the same test area 21 of the object to be tested from different angles, but each test area 21 has also acquired images from multiple different angles, effectively shortening the imaging time of the object to be tested 2.

[0047] Please see Figure 4 as well as Figure 5 . Figure 4 A head-up view of an X-ray multi-channel high-speed tomography device 1' according to another specific embodiment of the present invention is shown. Figure 5 A top view schematic diagram of an X-ray multi-channel high-speed tomography scanning apparatus 1' according to another specific embodiment of the present invention is shown. Figure 4 as well as Figure 5As shown, the difference between the above-described specific embodiment and this specific embodiment lies in that, in this specific embodiment, the imaging area 1011 of the stage 10 further includes a gap 1012. In practice, the gap 1012 is based on the size of one imaging area, but can also be 0.8 or 0.9 imaging areas to facilitate three-dimensional image reconstruction. The size of the gap 1012 depends on the user's needs. The gap 1012 is used to solve the problem that when adjacent imaging areas 1011 are in contact with each other, the detector 14's outer shell cannot receive images, resulting in an imaging blind zone at the two ends of the imaging areas 1011. It should be noted that the other components in the X-ray multi-channel high-speed tomography scanning device 1' of this specific embodiment are largely the same as the corresponding components in the X-ray multi-channel high-speed tomography scanning device 1 of the aforementioned specific embodiment, and have been described in detail in the aforementioned specific embodiments, so they will not be repeated here.

[0048] To elaborate, such as Figure 4As shown, in this specific embodiment, detectors 14 are spaced apart from each other along the moving direction of the object to be detected 2 and are arranged corresponding to the imaging areas 1011, so as to receive X-rays passing through the corresponding imaging areas at different angles to obtain multiple images. The object to be detected 2 has multiple test areas 21 arranged sequentially along the moving direction, including a first test area, a second test area, a third test area, a fourth test area, and a fifth test area. When the first test area (the rightmost test area 21) of the object to be tested 2 moves into the leftmost imaging area 1011 of block 101, the leftmost detector 14 can receive the X-rays passing through the imaging area 1011 and obtain an image of the first test area at a first angle. When the object to be tested 2 moves again, the first test area of ​​the object to be tested 2 enters the interval 1012 between the imaging areas 1011, and the second test area (the second test area 21 on the right) enters the leftmost imaging area 1011, so that the leftmost detector 14 can receive the X-rays passing through the imaging area 1011 and obtain an image of the second test area at the first angle. When the object to be tested 2 continues to move, the first test area enters the middle imaging area 1011, the second test area enters the interval 1012 between the imaging areas 1011, and the third test area (the central test area 21) enters the leftmost imaging area 1011. At this point, the middle detector 14 acquires an image of the first test area at the second angle, and the leftmost detector acquires an image of the third test area at the first angle. Then, as the first test area continues to move into the rightmost imaging area 1011, the rightmost detector 14 acquires an image of the first test area at the third angle, the middle detector 14 acquires an image of the third test area at the second angle, and the leftmost detector acquires an image of the fifth test area at the first angle. This continues until the five test areas of the object 2 move out of block 101, resulting in multiple images of the five test areas of the object 2 at different angles. It should be noted that these various angles refer to a central angle of each detector relative to the light source. The actual image range is extended outward from this central angle by a predetermined angle. For example… Figure 4 The detector and imaging area located in the center are at a 90-degree angle to the center of the light source. The image acquired by the central detector is located within a range extending to both sides of the 90-degree angle by a specific angle (e.g., 5 degrees or 10 degrees). The number of intervals 1012 between adjacent imaging areas 1011 can be 1, 2, or 3, etc., but is not limited to this in practice.

[0049] In another specific embodiment, the X-ray multi-channel high-speed tomography device 1' may further selectively include a mask module (not shown) disposed between the X-ray generator 12 and the stage 10 and corresponding to at least one interval 1012, to block the X-ray emitted by the X-ray generator 12 from penetrating the interval 1012, thereby reducing the accumulation of radiation dose in the object to be detected 2.

[0050] Furthermore, the present invention can switch between this specific embodiment and the above specific embodiment by adjusting the imaging area 1011 of the stage 10 and the corresponding height of the detector 14, so that the present invention can generate multiple images of the object to be detected 2 in this specific embodiment and the images of the above specific embodiment, and use them together for the reconstruction of three-dimensional images, so as to obtain more images and improve the effect of three-dimensional reconstruction.

[0051] Please see Figure 6 . Figure 6 A top view schematic diagram of an X-ray multi-channel high-speed tomography scanning apparatus 1' according to another specific embodiment of the present invention is shown. Figure 6 As shown, the difference between this specific embodiment and the above specific embodiments is that the detectors are not arranged in an array, but can be arranged arbitrarily according to the user's needs. Therefore, the detectors in this specific embodiment can obtain images from different angles than those in the above specific embodiments. In addition, as the arrangement of the detectors 14 is different, the image-capturing areas 1011 in the corresponding stage 10 are also different. That is, the number of intervals 1012 between multiple image-capturing areas 1011 can also be different.

[0052] Please see Figure 7 . Figure 7 A schematic diagram of an X-ray multi-channel high-speed tomography apparatus 1'' according to another specific embodiment of the present invention is shown. Figure 7 As shown, the difference between this specific embodiment and the above specific embodiments lies in that the construction module 16 of the X-ray multi-channel high-speed tomography scanning device 1'' in this specific embodiment further includes an artificial intelligence model 161, and the detector 14 may include at least one of a first detector 141 and a second detector 143. It should be noted that the other components in the X-ray multi-channel high-speed tomography scanning device 1'' of this specific embodiment are substantially the same as the corresponding components in the X-ray multi-channel high-speed tomography scanning device 1 of the aforementioned specific embodiments, and have been described in detail in the aforementioned specific embodiments, so they will not be repeated here.

[0053] In this specific embodiment, the first detector 141 in detector 14 includes only a single sensing surface, used to acquire images of multiple test areas at the same angle at multiple time points. Furthermore, the second detector 143 in detector 14 may include a first sensing surface and a second sensing surface. The first and second sensing surfaces receive X-rays at different angles to generate images at different angles, thereby obtaining images from more angles with the same number of detectors. The first and second sensing surfaces are segmented by software. However, in practice, the sensing surface is not limited to only two software-segmented partitions (i.e., the first and second sensing surfaces), and users can increase the segmented area according to actual detection needs.

[0054] In this specific embodiment, the construction module 16 includes at least one artificial intelligence model 161. This model 161 is used to perform noise reduction processing on the images to generate high-quality two-dimensional images, and to perform sparse resolution three-dimensional reconstruction processing on the high-quality two-dimensional images to generate full-view three-dimensional images. It can also perform super-resolution processing on the full-view three-dimensional images to generate high-resolution three-dimensional tomographic images. In a practical application, the process of at least one artificial intelligence model performing super-resolution processing on the full-view three-dimensional images to generate high-resolution three-dimensional tomographic images can specifically involve at least one artificial intelligence model re-slicing the full-view three-dimensional images into multi-layered two-dimensional distributed images, selecting necessary layer levels for super-resolution processing, and then generating high-resolution three-dimensional tomographic images. Performing super-resolution processing only on necessary layer levels, compared to performing super-resolution processing on all layer levels, can further reduce the computational load of at least one artificial intelligence model, thereby improving efficiency. However, in practice, whether to perform super-resolution processing on the full-view 3D image can be adjusted according to the user's needs. The training dataset used to train at least one artificial intelligence model 161 includes datasets of long-exposure images and short-exposure images of different sample types, datasets of a large number of off-angle images and a small number of off-angle images, and datasets of images taken in partitioned and unpartitioned areas.

[0055] Furthermore, at least one artificial intelligence model 161 may include an artifact removal model for generating high-resolution three-dimensional tomographic images through super-resolution processing of full-view 3D images. In other words, the artifact removal model can identify artifact structures based on the full-view 3D images and remove artifact structures to generate high-resolution three-dimensional tomographic images. The artifact removal model is trained based on a machine learning algorithm to learn the correspondence between a full-view 3D image constructed from T two-dimensional images of a standard object and a high-resolution three-dimensional tomographic image constructed from P two-dimensional images, where P > T. That is, the present invention can generate high-resolution three-dimensional tomographic images from a smaller number of images of the object to be detected using the artifact removal model, thereby reducing the number of images required, shortening the detection time, and improving overall imaging efficiency and accuracy.

[0056] Please see Figure 8 . Figure 8 A flowchart illustrating the steps of a multi-channel high-speed X-ray computed tomography method according to a specific embodiment of the present invention is shown. Figure 8 As shown in this specific embodiment, the X-ray multi-channel high-speed tomography method includes the following steps: Step S1: A test object is placed on a moving unit of a stage to move the test object, wherein the stage has a block and the block includes multiple imaging areas; Step S2: Multiple detectors are set on one side of the stage and within the scattering angle range of an X-ray emitted by an X-ray generator, the detectors are respectively set to correspond to the imaging areas, so that the detectors receive the X-ray passing through the corresponding imaging areas at different angles to obtain multiple images; Step S3: A construction module receives the images and constructs a three-dimensional tomographic image of each of the test areas of the test object based on the images. The moving unit moves the object to be detected from outside the imaging area into the block using a scanning movement method, and moves within the block. As the object moves within the block, multiple test areas of the object sequentially pass through the imaging areas, and the detectors acquire images of each of these test areas. Please note that... Figure 8 The method can be achieved through Figure 1 X-ray multi-channel high-speed tomography device 1 or Figure 4 The X-ray multi-channel high-speed tomography device 1' has been achieved.

[0057] Please see Figure 9 . Figure 9 A flowchart illustrating the steps of a multi-channel high-speed X-ray computed tomography method according to another specific embodiment of the present invention is shown. Figure 9As shown, the X-ray multi-channel high-speed tomography method of this specific embodiment differs from the X-ray multi-channel high-speed tomography method of the above specific embodiment in that step S2 further includes steps S21 to S23. Step S21: Multiple detectors are disposed on one side of the stage and within the scattering angle range of an X-ray emitted by an X-ray generator, each detector corresponding to a specific imaging area; Step S22: A mask module is used to block the X-ray emitted by the X-ray generator from penetrating the at least one gap, wherein the mask module is disposed between the X-ray generator and the stage and corresponds to the at least one gap; Step S23: The detectors receive the X-ray passing through the corresponding imaging areas at different angles to obtain multiple images. Please note that... Figure 9 The method can be achieved through Figure 4 The X-ray multi-channel high-speed tomography device 1' has been achieved.

[0058] Please see Figure 10 . Figure 10 A flowchart illustrating the steps of a multi-channel high-speed X-ray computed tomography method according to another specific embodiment of the present invention is shown. Figure 10 As shown, the X-ray multi-channel high-speed tomography method of this specific embodiment differs from the X-ray multi-channel high-speed tomography method of the above specific embodiment in that step S3 further includes step S31: receiving the images generated by the detectors using the construction module, performing noise reduction processing on the images according to at least one artificial intelligence model in the construction module to generate a high-quality image, performing sparse resolution 3D reconstruction processing on the high-quality image to generate a full-view image, and performing super-resolution processing on the full-view image to generate a high-resolution image. The training dataset used to train the at least one artificial intelligence model includes datasets of long-exposure images and short-exposure images of different sample types, datasets of a large number of skewed images and a small number of skewed images, and datasets of images captured in partitioned and unpartitioned areas. The X-ray multi-channel high-speed tomography method of this specific embodiment can generate high-resolution 3D tomographic images from at least one artificial intelligence model using only a small number of images of the object to be detected, thereby improving efficiency and image accuracy. Please note that... Figure 10 The method can be achieved through Figure 7 The X-ray multi-channel high-speed tomography scanning device 1'' has been achieved.

[0059] In summary, this invention does not merely image a single test area, but rather uses multiple detectors to simultaneously image multiple test areas from different angles based on the movement of the object on the stage. This shortens the imaging time, thereby reducing the cumulative radiation dose to the object and ensuring no damage is caused after detection. Furthermore, this invention can perform multiple rounds of repeated scanning by adjusting the imaging area of ​​the stage and the corresponding detector positions to obtain more images, thus improving the subsequent 3D reconstruction effect. In addition, the detectors of this invention can be segmented by software to generate more images from different angles, facilitating subsequent 3D reconstruction. Moreover, this invention further includes an image processing module that uses at least one artificial intelligence model to perform 3D reconstruction of multiple images and identify and eliminate artifacts to generate a high-resolution 3D tomographic image.

[0060] It should be noted that the words “including,” “having,” and “containing,” as well as other similar forms, in this work are intended to be equivalent in meaning and are open-ended. One or more items following any of these words do not imply an exhaustive list of such items or that they are limited to only the listed items.

[0061] The detailed description of the preferred embodiments above is intended to more clearly describe the features and spirit of the present invention, and is not intended to limit the scope of the invention to the preferred embodiments disclosed above. Rather, the aim is to cover various modifications and equivalent arrangements within the scope of the patent claims made by this invention. Therefore, the scope of the patent claims made by this invention should be interpreted in the broadest possible sense based on the foregoing description, so as to cover all possible modifications and equivalent arrangements.

Claims

1. A multi-channel high-speed X-ray tomography device, characterized in that... Include: A stage includes a moving unit for carrying an object to be tested and moving the object to be tested. The stage has a block containing multiple imaging areas. An X-ray generator, disposed on one side of the stage, is used to emit an X-ray toward that area of ​​the stage; and Multiple detectors are arranged on the other side of the stage and within the scattering angle range of the X-ray. These detectors are respectively arranged for the imaging areas to receive the X-ray passing through the corresponding imaging areas at different angles to obtain multiple images. The moving unit moves the object to be detected from outside the imaging area into the block by scanning and moving within the block. When the object to be detected moves within the block, multiple test areas of the object to be detected pass through the imaging areas in sequence, and the detectors acquire images of each of the test areas of the object to be detected.

2. The X-ray multi-channel high-speed tomography scanning device as described in claim 1, characterized in that, These detectors are arranged in an array. When the object to be detected moves in the block, a first detector among these detectors acquires images of the area to be detected from the same angle at multiple time points, and the detectors acquire images of the area to be detected from different angles at the same time point.

3. The X-ray multi-channel high-speed tomography scanning device as described in claim 1, characterized in that, It further includes a construction module connected to the detectors, the construction module being used to receive the images from the detectors and construct a three-dimensional tomographic image of each of the test areas of the object to be detected based on the images.

4. The X-ray multi-channel high-speed tomography scanning device as described in claim 1, characterized in that, One of the detectors, the second detector, includes a first sensing surface and a second sensing surface. The first sensing surface and the second sensing surface receive the X-ray at different angles to generate images at different angles. The first sensing surface and the second sensing surface are divided into a sensing surface of the second detector by software.

5. The X-ray multi-channel high-speed tomography scanning device as described in claim 3, characterized in that, The construction module includes at least one artificial intelligence model, which is used to perform noise reduction processing on the images to generate a high-quality two-dimensional image, perform sparse solution three-dimensional reconstruction processing on the high-quality two-dimensional image to generate a full-view three-dimensional image, and perform super-resolution processing on the full-view three-dimensional image to generate a high-resolution three-dimensional tomographic image. The training dataset used to train the at least one artificial intelligence model includes datasets of long-exposure images and short-exposure images of different sample types, datasets of a large number of angled images and a small number of angled images, and datasets of images captured by partitioning and not partitioning the imaging area.

6. The X-ray multi-channel high-speed tomography scanning device as described in claim 1, characterized in that, The imaging areas are arranged in an array, and adjacent imaging areas contain at least one interval.

7. The X-ray multi-channel high-speed tomography scanning device as described in claim 6, characterized in that, It further includes a mask module disposed between the X-ray generator and the stage and corresponding to the at least one gap, for blocking the X-ray emitted by the X-ray generator from penetrating the at least one gap.

8. A method for high-speed X-ray multi-channel tomography, characterized in that... Includes the following steps: An object to be inspected is placed on a moving unit of a stage to move the object, wherein the stage has a block and the block contains multiple imaging areas; and Multiple detectors are placed on one side of the stage and within the scattering angle range of an X-ray emitted by an X-ray generator. These detectors are respectively positioned to correspond to the imaging areas, so that the detectors receive the X-ray passing through the corresponding imaging areas at different angles to obtain multiple images. The moving unit moves the object to be detected from outside the imaging area into the block by scanning and moving within the block. When the object to be detected moves within the block, multiple test areas of the object to be detected pass through the imaging areas in sequence, and the detectors acquire images of each of the test areas of the object to be detected.

9. The X-ray multi-channel high-speed tomography method as described in claim 8, characterized in that, These detectors are arranged in an array. When the object to be detected moves in the block, a first detector among these detectors acquires images of multiple fields of view in the area to be detected at the same angle at multiple time points, and the detectors acquire images of the area to be detected at different angles at the same time points.

10. The X-ray multi-channel high-speed tomography method as described in claim 8, characterized in that, Further steps include: A construction module receives these images and constructs a three-dimensional tomographic image of each of the test areas of the object to be inspected based on these images.

11. The X-ray multi-channel high-speed tomography method as described in claim 8, characterized in that, One of the detectors, the second detector, includes a first sensing surface and a second sensing surface. The first sensing surface and the second sensing surface receive the X-ray at different angles to generate images at different angles. The first sensing surface and the second sensing surface are divided into a sensing surface of the second detector by software.

12. The X-ray multi-channel high-speed tomography method as described in claim 10, characterized in that, Further steps include: The module receives the images generated by the detectors and performs noise reduction processing on the images according to at least one artificial intelligence model in the module to generate a high-quality image. It then performs sparse de-3D reconstruction processing on the high-quality image to generate a full-view image and performs super-resolution processing on the full-view image to generate a high-resolution image. The training dataset used to train the at least one artificial intelligence model includes datasets of long-exposure images and short-exposure images of different sample types, datasets of a large number of angled images and a small number of angled images, and datasets of images taken in sections and images taken without sections.

13. The X-ray multi-channel high-speed tomography method as described in claim 8, characterized in that, The imaging areas are arranged in an array, and adjacent imaging areas contain at least one interval.

14. The X-ray multi-channel high-speed tomography method as described in claim 13, characterized in that, Further steps include: A mask module is used to block the X-ray emitted by the X-ray generator from penetrating the at least one gap, wherein the mask module is disposed between the X-ray generator and the stage and corresponds to the at least one gap.

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