Photoresist supply system
By designing an automated photoresist supply system, the residual capacity of photoresist bottles is detected and managed in real time, the problem of difficulty in time replacement of photoresist bottles is solved, and the automation of the semiconductor manufacturing process and the improvement of production efficiency is achieved.
Patent Information
- Application Number
- CN202323041193.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-11-09
- Publication Date
- 2024-12-06
- Estimated Expiration
- 2033-11-09
AI Technical Summary
In semiconductor device manufacturing, the remaining capacity of the photoresist bottle is difficult to monitor in real time, resulting in the inability to replace the photoresist in time, affecting product quality.
Design a photoresist supply system, including supply devices, storage devices and transportation devices, to detect the remaining capacity in real time through capacity detection components, and automatically transmit information through supply information processing components and storage information processing components to ensure the photoresist bottle Replace it in time. The system is also equipped with alarm components, RFID information tags and transportation information processing components to realize automated operations and information verification.
It realizes the automated operation of photoresist supply, saves manpower, reduces the production risks brought about by photoresist replacement, ensures timely and correctly replaces photoresist bottles, and avoids manual operation errors.
Smart Images
Figure CN222117826U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a photoresist supply system. Background Art
[0002] In the manufacture of semiconductor devices, photoresist is often needed. Photoresist is a photosensitive material used in many processes. Photoresist is a photosensitive medium, so the photoresist bottles used to carry the photoresist are all opaque plastic bottles or glass bottles. Therefore, during the use of the photoresist leveling and developing equipment, it is difficult for the staff to observe the remaining amount of each bottle of photoresist, and it is impossible to monitor the remaining state of the photoresist in the photoresist bottle. It is necessary to monitor and observe manually at any time, which brings inconvenience to production. Moreover, the photoresist is consumed as it is used. If the photoresist cannot be replaced in time, it will cause serious problems in product quality. Therefore, a solution is needed to replace the photoresist bottle with insufficient remaining capacity in time. Utility Model Content
[0003] In view of this, the utility model provides a photoresist supply system to solve the problem that a photoresist bottle with insufficient remaining capacity is difficult to be replaced in time.
[0004] In one aspect of the utility model, a photoresist supply system is provided, comprising: a supply device, suitable for carrying photoresist bottles; the supply device has a capacity detection component, suitable for detecting in real time the remaining capacity of the photoresist bottle that is supplying photoresist; the supply device also has a supply information processing component, suitable for sending remaining capacity information to the storage device; a storage device, which is arranged away from the supply device and is suitable for storing photoresist bottles encapsulated with different types of photoresists; the storage device has a storage information processing component, suitable for receiving the remaining capacity information sent by the supply information processing component, and providing photoresist bottles of the photoresist type corresponding to the photoresist bottles with insufficient remaining capacity according to the remaining capacity information; a transportation device, suitable for receiving the photoresist bottles provided by the storage device, and transporting them to the supply device.
[0005] The photoresist supply system provided by the utility model detects the remaining capacity of the photoresist bottle in real time through the capacity detection component of the supply device, and sends the remaining capacity information to the storage device. The storage device provides a photoresist bottle of a corresponding type to the photoresist bottle with insufficient remaining capacity according to the remaining capacity information, and the photoresist bottle is transported to the supply device by the transportation device. In this way, the automatic operation of the photoresist supply is realized, and no manual supervision is required at any time, which saves manpower and reduces the production risk caused by the failure to replace the photoresist in time.
[0006] Furthermore, the supply device includes a supply box, in which a base is provided, and the base is suitable for accommodating the photoresist bottle to provide a photoresist supply position for the photoresist bottle; the supply device is provided with an alarm component, and the alarm component is communicatively connected with the supply information processing component, and is suitable for issuing an alarm signal according to the remaining capacity information issued by the supply information processing component; the alarm component includes an execution component, which is suitable for executing an alarm action according to the alarm signal; the execution component includes a buzzer, an alarm light, a computer and / or an intelligent communication device.
[0007] The photoresist supply system provided by the utility model can give an alarm according to the remaining capacity information through the setting of the alarm component to remind the staff. After receiving the alarm information, the staff can go to the supply device to observe in time or replace the photoresist bottle transported by the transportation device.
[0008] Further, the capacity detection component includes a weight sensor, which is arranged on the base and is suitable for weighing the weight of the photoresist bottle located on the base in real time, and sending the weight information to the supply information processing component, and the supply information processing component converts the weight information into remaining capacity information and sends it to the storage device; and / or, the capacity detection component includes a capacity sensor or a capacity scanning device, which is arranged in the supply box and is suitable for detecting the remaining capacity of the photoresist bottle arranged on the base, and sending the remaining capacity information to the supply information processing component; and / or, the capacity detection component includes a timing device, which is suitable for timing the start of supply of the photoresist bottle and sending the time information to the supply information processing component, and the supply information processing component converts the time information into remaining capacity information and sends it to the storage device.
[0009] The photoresist supply system provided by the utility model can detect the weight or capacity of the photoresist bottle in real time through the above arrangement, and send the remaining capacity information in time. It can also monitor the time to assist in monitoring the remaining capacity.
[0010] Furthermore, an RFID information tag is provided on the surface of the photoresist bottle, and the RFID information tag stores the photoresist type, empty bottle weight, and empty bottle capacity of the photoresist bottle; the supply device is provided with an RFID information scanning component for scanning the RFID information tag and sending the information stored in the RFID information tag to the supply information processing component.
[0011] The photoresist supply system provided by the utility model can timely obtain various relevant information of the photoresist in the photoresist bottle and the information of the photoresist bottle through the setting of the RFID information tag and the RFID information scanning component, so as to provide a basis for judging the supply information processing component, so as to perform correct replacement and avoid manual operation errors.
[0012] Furthermore, the supply device is provided with a docking nozzle, which is suitable for docking with the bottle mouth of the photoresist bottle; the docking nozzle includes a nozzle body and a delivery tube, the docking nozzle is suitable for docking with the bottle mouth when the photoresist bottle is located at the base, and the delivery tube is fixedly connected to and extends out of the nozzle body, and is suitable for inserting the photoresist bottle when the nozzle body is docked with the bottle mouth.
[0013] The photoresist supply system provided by the utility model has a delivery tube provided on the docking nozzle, which is suitable for inserting the photoresist bottle when the nozzle body is docked with the bottle mouth. The delivery tube enters the photoresist bottle first during docking, which can prevent the photoresist from being damaged or internally contaminated due to operating errors or deviations when the nozzle is docked or when the delivery tube is inserted after the nozzle is docked.
[0014] Furthermore, an RFID information tag is provided on the surface of the photoresist bottle, and the RFID information tag at least stores the photoresist type of the photoresist bottle; the storage device is provided with an RFID information scanning component for scanning the RFID information tag and sending the information stored in the RFID information tag to the storage information processing component; the storage device is suitable for locating different types of photoresist bottles according to the information stored in the RFID information tag.
[0015] In the photoresist supply system provided by the utility model, the storage device can conveniently position different types of photoresist bottles in the storage device through the cooperation of the RFID information tag and the RFID information scanning component, so as to facilitate storage and taking out.
[0016] Furthermore, the storage device includes a tallying component, which includes a movable track and a first picking component arranged on the movable track, the first picking component is suitable for moving along the track, and is suitable for picking up the corresponding photoresist bottle according to the positioning information provided by the storage information processing component, and moving the photoresist bottle to the cargo outlet of the storage device; the first picking component is also suitable for picking up the photoresist bottle located at the cargo entrance of the storage device and moving it to a preset storage position according to the positioning information provided by the storage information processing component.
[0017] The photoresist supply system provided by the utility model can cooperate with the storage information component through the setting of the tally component to provide photoresist bottles according to the remaining capacity information or place the put-in photoresist bottles at a preset position for storage.
[0018] Furthermore, the transport device is provided with an RFID information scanning component for scanning the RFID information tag and sending the information stored in the RFID information tag to a transport information processing component; the transport device includes a carrying platform, the carrying platform is provided with a carrying seat, suitable for accommodating the photoresist bottle; the carrying platform is also provided with a second picking component, suitable for picking up the photoresist bottle at the cargo outlet of the storage device and placing it on the carrying seat; the carrying seat includes warning lights of different colors corresponding to different types of photoresists; the transport information processing component is suitable for judging whether the photoresist bottle is placed on the correct carrying seat according to the information stored in the RFID information tag, and sending judgment information to the warning light according to whether it is correct, and the warning light is suitable for continuously lighting or flashing according to whether the judgment information is correct.
[0019] The photoresist supply system provided by the utility model can timely check the information of the transported photoresist bottles through the cooperation of the RFID scanning component of the transport device and the prompt light on the bearing seat and the transport information processing component to ensure that the transported photoresist bottles are correct.
[0020] Furthermore, the transport device is also provided with a display component, and the display component is suitable for displaying the information of the photoresist bottle provided by the transport information processing component and / or the remaining capacity information provided by the supply information processing component.
[0021] The photoresist supply system provided by the utility model can provide transportation information in time for reference by the staff through the setting of the display component of the transportation device, so as to ensure that the transported photoresist bottles are correct.
[0022] Furthermore, the photoresist supply system also includes: a computing server, which is communicatively connected to each of the information processing components, suitable for receiving information sent by each information processing component, performing computing processing and data aggregation, and sending it to the corresponding information processing component or communication terminal that needs to receive it. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0024] Figure 1 It is a schematic diagram of the photoresist supply system of the utility model;
[0025] Figure 2 It is a partial schematic diagram of a supply device in one embodiment of the photoresist supply system of the utility model;
[0026] Figure 3 A schematic diagram of the docking of a photoresist bottle and a docking nozzle in one embodiment of the photoresist supply system of the utility model;
[0027] Figure 4 A schematic diagram of a storage device in an embodiment of a photoresist supply system of the present invention;
[0028] Figure 5 A schematic diagram of a storage device including a tally assembly in an embodiment of a photoresist supply system of the present invention;
[0029] Figure 6 This is a schematic diagram of a photoresist supply system according to an embodiment of the present invention, in which the tallying component is a robot;
[0030] Figure 7 A schematic diagram of a transport device in an embodiment of a photoresist supply system of the utility model; utility model;
[0031] Figure 8 It is a schematic diagram of the process of the photoresist supply method of the utility model. DETAILED DESCRIPTION
[0032] As mentioned above, in the prior art, it is difficult to replace a photoresist bottle with insufficient remaining capacity in time. To solve this problem, the present invention provides a photoresist supply system and a photoresist supply method.
[0033] The utility model provides a photoresist supply system, comprising: a supply device, suitable for carrying photoresist bottles; the supply device has a capacity detection component, suitable for real-time detection of the remaining capacity of the photoresist bottle that is supplying photoresist; the supply device also has a supply information processing component, suitable for sending remaining capacity information to the storage device; a storage device, which is arranged away from the supply device and is suitable for storing photoresist bottles encapsulated with different types of photoresists; the storage device has a storage information processing component, suitable for receiving the remaining capacity information sent by the supply information processing component, and providing photoresist bottles of the photoresist type corresponding to the photoresist bottles with insufficient remaining capacity according to the remaining capacity information; a transportation device, suitable for receiving the photoresist bottles provided by the storage device, and transporting them to the supply device. The photoresist supply system provided by the utility model can replace photoresist bottles with insufficient capacity in a timely manner.
[0034] The utility model also provides a photoresist supply method, which uses the photoresist supply system provided by the utility model, including the following steps: the supply device detects the remaining capacity of the photoresist bottle in the supply device in real time; and sends the remaining capacity information to the storage device; the storage device provides a photoresist bottle of a photoresist type corresponding to the photoresist bottle with insufficient remaining capacity according to the remaining capacity information; the transport device receives the photoresist bottle from the storage device and transports it to the supply device. The photoresist supply method provided by the utility model can replace the photoresist bottle with insufficient capacity in time.
[0035] The technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. In the description of the utility model, it should be noted that the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.
[0036] Example 1
[0037] refer to Figure 1-Figure 7 This embodiment provides a photoresist supply system. Figure 1 : is a schematic block diagram of the photoresist supply system of the utility model, wherein the dotted arrows indicate the information transmission process and direction, and the solid arrows indicate the moving direction of the photoresist bottle; the photoresist supply system of this embodiment includes:
[0038] The supply device 100 is suitable for carrying a photoresist bottle; the supply device 100 has a capacity detection component, which is suitable for real-time detection of the remaining capacity of the photoresist bottle being supplied with photoresist; the supply device 100 also has a supply information processing component 110, which is suitable for sending remaining capacity information to the storage device 200;
[0039] The storage device 200 is arranged away from the supply device 100 and is suitable for storing photoresist bottles encapsulated with different types of photoresists; the storage device has a storage information processing component 210, which is suitable for receiving the remaining capacity information sent by the supply information processing component 110, and providing a photoresist bottle of a photoresist type corresponding to the photoresist bottle with insufficient remaining capacity according to the remaining capacity information;
[0040] The transport device 300 is suitable for receiving the photoresist bottles provided by the storage device 200 and transporting them to the supply device 100 .
[0041] The photoresist supply system provided in this embodiment detects the remaining capacity of the photoresist bottle in real time through the capacity detection component of the supply device 100, and sends the remaining capacity information to the storage device 200. The storage device 200 provides a photoresist bottle of a corresponding type of the photoresist bottle with insufficient remaining capacity according to the remaining capacity information, and the photoresist bottle is transported to the supply device 100 by the transportation device 300. In this way, the automatic operation of the photoresist supply is realized, and there is no need for manual supervision at any time, which saves manpower and reduces the production risk caused by the failure to replace the photoresist in time. In addition, the system automatically provides the corresponding photoresist bottle according to the remaining capacity information, which can more accurately identify the correct corresponding photoresist bottle and avoid manual processing errors.
[0042] For further reference, Figure 2 In this embodiment, the supply device 100 includes a supply box, and a base 120 is provided in the supply box. The base 120 is suitable for accommodating the photoresist bottle 1 to provide a glue supply position for the photoresist bottle 1; during the glue supply process, the photoresist bottle 1 is continuously in the glue supply position to provide stable glue supply. The supply information processing component 110 can be arbitrarily set at any position in the supply box, as long as it does not block the glue supply process and the replacement action. The supply information processing component 110 can be, for example, an information operation processor and a controller with a signal receiving and sending function.
[0043] In this embodiment, the supply device 100 is provided with an alarm component, which is communicatively connected with the supply information processing component 110 and is suitable for issuing an alarm signal according to the remaining capacity information issued by the supply information processing component 110; the alarm component includes an execution component, which is suitable for executing an alarm action according to the alarm signal; the execution component includes a buzzer, an alarm light, a computer and / or an intelligent communication device.
[0044] The buzzer can be arranged outside the box, for example, to sound a buzzer alarm. The alarm light can be arranged outside the box, and alarm prompts by changing color or flashing. The alarm light can also include an alarm prompt light arranged on the base 120, such as an LED light, to prompt the position corresponding to the photoresist bottle with insufficient capacity. The computer can be, for example, a control computer of an external operating system, or a computing computer of an external server. The intelligent communication device can be, for example, a mobile phone, a laptop computer or a tablet computer. The photoresist supply system provided in this embodiment can alarm and remind the staff according to the remaining capacity information through the setting of the alarm component. In this way, the staff can receive the alarm information whether they are in front of the operating system or not, and can go to the supply device to observe or replace the photoresist bottle delivered by the transport device in time.
[0045] Furthermore, in this embodiment, the capacity detection component includes:
[0046] The weight sensor is arranged on the base 120 and is suitable for weighing the weight of the photoresist bottle 1 located on the base 120 in real time, and sending the weight information to the supply information processing component 110. The supply information processing component 110 converts the weight information into remaining capacity information and sends it to the storage device 200.
[0047] and / or,
[0048] The capacity detection component includes a capacity sensor or a capacity scanning device, which is arranged in the supply box and is suitable for detecting the remaining capacity of the photoresist bottle 1 arranged on the base 120, and sending the remaining capacity information to the supply information processing component 110, and the supply information processing component 110 sends the remaining capacity information to the storage device 200.
[0049] and / or,
[0050] The capacity detection component includes a timing device, which is suitable for timing the start of supply of the photoresist bottle 1 and sending the time information to the supply information processing component 110. The supply information processing component 110 converts the time information into remaining capacity information and sends it to the storage device 200.
[0051] The photoresist supply system provided in this embodiment can detect the weight or capacity of the photoresist bottle 1 in real time through the above configuration, and send the remaining capacity information in time. The remaining capacity of the photoresist bottle can also be monitored through time monitoring.
[0052] Furthermore, in this embodiment, the surface of the photoresist bottle 1 is provided with an RFID information tag 11, and the RFID information tag 11 stores the photoresist type, empty bottle weight, and empty bottle capacity of the photoresist bottle; the supply device 100 is provided with an RFID information scanning component 130 for scanning the RFID information tag 11 and sending the information stored in the RFID information tag 11 to the supply information processing component 110. The RFID information scanning component 130 can be, for example, Figure 2 In some other embodiments, the RFID information scanning component 130 may also be arranged at other positions of the supply box, and those skilled in the art may make a selection according to actual needs.
[0053] The photoresist supply system provided by the utility model can timely obtain various relevant information of the photoresist in the photoresist bottle 1 and the information of the photoresist bottle 1 through the setting of the RFID information tag 11 and the RFID information scanning component 130, thereby providing a basis for judging the supply information processing component 110.
[0054] For example, according to the empty bottle weight stored in the RFID information tag 11, when the weight information is close to the empty bottle weight, it is an insufficient capacity state. The supply information processing component 110 converts the weight information into remaining capacity information, sends it to the storage device 200, and sends it to the alarm component to execute an alarm.
[0055] For example, according to the empty bottle capacity stored in the RFID information tag 11, when the weight information is close to the empty bottle capacity, it is an insufficient capacity state. The supply information processing component 110 sends the remaining capacity information to the storage device 200 and sends it to the alarm component to execute an alarm.
[0056] For example, based on the start time of glue supply, the elapsed supply time is timed. When it is close to the total time required for the preset total capacity supply, it is an insufficient capacity state. The supply information processing component 110 sends the remaining capacity information to the storage device 200 and sends it to the alarm component to execute an alarm.
[0057] For further reference, Figure 3 In this embodiment, the supply device 100 is provided with a docking nozzle 2, which is suitable for docking with the bottle mouth of the photoresist bottle 1; the docking nozzle 2 includes a nozzle body and a delivery tube 21, and the docking nozzle is suitable for docking with the bottle mouth when the photoresist bottle 1 is located on the base 120. The delivery tube 21 is fixedly connected and extends out of the nozzle body, and is suitable for inserting the photoresist bottle 1 when the nozzle body is docked with the bottle mouth.
[0058] In the photoresist supply system provided in this embodiment, the docking nozzle 2 is provided with a delivery tube 21, which is suitable for inserting the photoresist bottle 1 when the nozzle body is docked with the bottle mouth. When docking, the delivery tube 21 enters the photoresist bottle first, which can prevent the photoresist from being damaged or internally contaminated when the nozzle is docked or the delivery tube is inserted after the nozzle is docked due to operating errors or deviations.
[0059] For further reference, Figure 4 The storage device 200 is provided with an RFID information scanning component 220 for scanning the RFID information tag 11 and sending the information stored in the RFID information tag 11 to the storage information processing component 210; the storage device 200 is suitable for locating different types of photoresist bottles 1 according to the information stored in the RFID information tag 11. The storage information processing component 210 can be arbitrarily arranged at any position in the storage device 200. The storage information processing component 210 can be, for example, an information operation processor and a controller with a signal receiving and sending function. The storage device 200 can be, for example, a storage container.
[0060] In the photoresist supply system provided in this embodiment, the storage device 200 can conveniently locate different types of photoresist bottles in the storage device 200 through the cooperation of the RFID information tag 11 and the RFID information scanning component 220, so as to facilitate storage and retrieval. Since the storage device 200 usually needs to store a large number of photoresist bottles 1, and usually does not store only one type of photoresist, the placement positions of different types of photoresist bottles 1 can be pre-set, and through the cooperation of the RFID information tag 11 and the RFID information scanning component 220, the corresponding position or the photoresist bottle 1 at the corresponding position can be quickly and timely located.
[0061] For further reference, Figure 5 The storage device 200 includes a tally component 230, and the tally component 230 includes a moving track 231 and a first picking component 232 arranged on the moving track. The first picking component 232 is suitable for moving along the moving track 231, and is suitable for picking up the corresponding photoresist bottle 1 according to the positioning information provided by the storage information processing component 110, and moving the photoresist bottle 1 to the cargo outlet 240 of the storage device 200; the first picking component 232 is also suitable for picking up and moving the photoresist bottle located at the cargo entrance of the storage device 200 to a preset storage position according to the positioning information provided by the storage information processing component 110. Figure 6 The first picking component 232 can be, for example, a manipulator or a manipulator arm or a picking robot. The cargo outlet 240 and the cargo inlet can be set at the same position, that is, the same structure is both the inlet and the outlet.
[0062] The photoresist supply system provided in this embodiment can cooperate with the storage information component through the setting of the tallying component 230 to provide photoresist bottles according to the remaining capacity information or place the put-in photoresist bottles at a preset position for storage.
[0063] The storage device may also include: a position calibration device 250 provided at the cargo outlet 240, which performs fine adjustment of the position when the position of the photoresist bottle 1 transported by the tallying component 230 deviates from the preset position, so that the photoresist bottle 1 can be smoothly placed in the cargo outlet 240 in the correct state. An exhaust system 260 prevents the photoresist bottle of the storage device from leaking due to collision damage and discharges volatile odors. A freezing component 270, since the photoresist needs to be stored at a specific temperature, the temperature in the storage device can be controlled by the freezing component 270 to maintain the specific temperature.
[0064] For further reference, Figure 7In this embodiment, the transport device 300 is provided with an RFID information scanning component 330 for scanning the RFID information tag 11 and sending the information stored in the RFID information tag 11 to the transport information processing component 310; the transport device 300 includes a carrying platform, and the carrying platform is provided with a carrying seat 320 suitable for accommodating the photoresist bottle 1; the carrying platform is optionally further provided with a second picking component (not shown in the figure), the structure of which refers to the aforementioned first picking component 232, suitable for picking up the photoresist bottle 1 at the cargo outlet 240 of the storage device 200 and placing it on the carrying seat 320; the carrying seat 320 includes prompt lights of different colors corresponding to different types of photoresists; the transport information processing component 310 is suitable for judging whether the photoresist bottle 1 is placed in the correct carrying seat 320 according to the information stored in the RFID information tag 11, and sending judgment information to the prompt light according to whether it is correct, and the prompt light is suitable for continuously lighting or flashing according to whether the judgment information is correct. The transport information processing component 310 can be arbitrarily arranged at any position in the transport device 300. The transport information processing component 310 can be, for example, an information operation processor and a controller with a signal receiving and sending function. The transport device 300 can be, for example, a transport cart.
[0065] The photoresist supply system provided in this embodiment can timely verify the information of the transported photoresist bottle 1 through the cooperation of the RFID scanning component 330 of the transport device 300 and the indicator light on the support seat 320 and the transport information processing component 310 to ensure that the transported photoresist bottle 1 is correct.
[0066] Furthermore, the transport device 300 is also provided with a display component 340 , and the display component 340 is suitable for displaying the information of the photoresist bottle 1 provided by the transport information processing component 310 and / or the remaining capacity information provided by the supply information processing component 110 .
[0067] The photoresist supply system provided in this embodiment can provide transportation information in time for the staff to refer to, through the setting of the display component 340 of the transportation device 300, so as to ensure that the transported photoresist bottle 1 is correct.
[0068] Further, in some embodiments, the photoresist supply system also includes a computing server, which is communicatively connected with the supply information processing component 110, the storage information processing component 210 and the transportation information processing component 310, and is suitable for receiving information sent by the above-mentioned information processing components, performing computing and data aggregation, and sending it to the corresponding information processing components that need to be received. In addition, it is also suitable for sending information to other information receiving terminals, such as smart phones and laptops. The photoresist supply system provided in this embodiment, through the setting of the computing server, aggregates, computes and controls all information, and sends it to the corresponding receiving terminal, so that the operator can understand all the information in time for management and control.
[0069] Example 2
[0070] In another aspect of the present invention, a photoresist supply method is also provided. The photoresist supply system provided by the present invention is used. Figure 8 , including the following steps:
[0071] The supply device detects the remaining capacity of the photoresist bottle in the supply device in real time; and sends the remaining capacity information to the storage device;
[0072] The storage device provides a photoresist bottle of a photoresist type corresponding to the photoresist bottle with insufficient remaining capacity according to the remaining capacity information;
[0073] The transport device receives the photoresist bottle from the storage device and transports it to the supply device.
[0074] The photoresist supply method provided in this embodiment uses the photoresist supply system provided in the above-mentioned embodiment 1, and detects the remaining capacity of the photoresist bottle in real time through the capacity detection component of the supply device, and sends the remaining capacity information to the storage device. The storage device provides the photoresist bottle of the type corresponding to the photoresist bottle with insufficient remaining capacity according to the remaining capacity information, and transports it to the supply device by the transportation device. In this way, the automatic operation of the photoresist supply is realized, and there is no need for manual supervision at all times, which saves manpower and reduces the production risk caused by the failure to replace the photoresist in time. In addition, the system can automatically determine whether the replaced photoresist bottle is correct, or the setting of other components can assist the staff in determining whether it is correct, which can effectively reduce the risk of incorrect replacement of the photoresist bottle.
[0075] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.
Claims
1. A photoresist supply system, characterized in that: include: A supply device adapted to carry a photoresist bottle; The supply device has a capacity detection component, which is suitable for real-time detection of the remaining capacity of the photoresist bottle that is supplying photoresist; The supply device also has a supply information processing component adapted to send remaining capacity information to the storage device; A storage device is arranged away from the supply device and is suitable for storing photoresist bottles encapsulating different types of photoresists; the storage device has a storage information processing component, which is suitable for receiving the remaining capacity information sent by the supply information processing component and providing a photoresist bottle of a photoresist type corresponding to the photoresist bottle with insufficient remaining capacity according to the remaining capacity information; The transport device is suitable for receiving the photoresist bottles provided by the storage device and transporting them to the supply device.
2. The photoresist supply system according to claim 1, characterized in that: The supply device comprises a supply box, wherein a base is arranged in the supply box, and the base is suitable for accommodating the photoresist bottle and providing a photoresist supply position for the photoresist bottle; the supply device is provided with an alarm component, and the alarm component is in communication connection with the supply information processing component and is suitable for issuing an alarm signal according to the remaining capacity information issued by the supply information processing component; The alarm component includes an execution component, which is suitable for executing an alarm action according to the alarm signal; the execution component includes a buzzer, an alarm light, a computer and / or an intelligent communication device.
3. The photoresist supply system according to claim 2, characterized in that: The capacity detection component includes a weight sensor, which is arranged on the base and is suitable for weighing the weight of the photoresist bottle located on the base in real time and sending the weight information to the supply information processing component, and the supply information processing component converts the weight information into remaining capacity information and sends it to the storage device; and / or, The capacity detection component includes a capacity sensor or a capacity scanning device, which is arranged in the supply box and is suitable for detecting the remaining capacity of the photoresist bottle arranged on the base, and sending the remaining capacity information to the supply information processing component; and / or, The capacity detection component includes a timing device, which is suitable for timing the start of supply of the photoresist bottle and sending the time information to the supply information processing component. The supply information processing component converts the time information into remaining capacity information and sends it to the storage device.
4. The photoresist supply system according to claim 2, characterized in that: The surface of the photoresist bottle is provided with an RFID information tag, and the RFID information tag stores the photoresist type, empty bottle weight, and empty bottle capacity of the photoresist bottle; The supply device is provided with an RFID information scanning component for scanning the RFID information tag and sending the information stored in the RFID information tag to the supply information processing component.
5. The photoresist supply system according to claim 2, characterized in that: The supply device is provided with a docking nozzle, which is suitable for docking with the bottle mouth of the photoresist bottle; the docking nozzle includes a nozzle body and a delivery tube, the docking nozzle is suitable for docking with the bottle mouth when the photoresist bottle is located at the base, and the delivery tube is fixedly connected to and extends out of the nozzle body, and is suitable for inserting the photoresist bottle when the nozzle body is docked with the bottle mouth.
6. The photoresist supply system according to claim 1, characterized in that: The surface of the photoresist bottle is provided with an RFID information tag, and the RFID information tag at least stores the photoresist type of the photoresist bottle; The storage device is provided with an RFID information scanning component for scanning the RFID information tag and sending the information stored in the RFID information tag to the storage information processing component; The storage device is suitable for locating different types of photoresist bottles according to the information stored in the RFID information tag.
7. The photoresist supply system according to claim 6, characterized in that: The storage device includes a tallying component, which includes a moving track and a first picking component arranged on the moving track. The first picking component is suitable for moving along the moving track and is suitable for picking up the corresponding photoresist bottle according to the positioning information provided by the storage information processing component, and moving the photoresist bottle to the cargo outlet of the storage device; the first picking component is also suitable for picking up the photoresist bottle located at the cargo entrance of the storage device and moving it to a preset storage position according to the positioning information provided by the storage information processing component.
8. The photoresist supply system according to claim 7, characterized in that: The transport device is provided with an RFID information scanning component for scanning the RFID information tag and sending the information stored in the RFID information tag to the transport information processing component; The transport device comprises a carrying platform, and the carrying platform is provided with a carrying seat suitable for accommodating the photoresist bottle; The carrying platform is also provided with a second picking component, which is suitable for picking up the photoresist bottle at the cargo outlet of the storage device and placing it on the carrying seat; The support seat includes warning lights of different colors corresponding to different types of photoresists; the transportation information processing component is suitable for judging whether the photoresist bottle is placed on the correct support seat according to the information stored in the RFID information tag, and sending the judgment information to the warning light according to whether it is correct or not, and the warning light is suitable for continuously lighting or flashing according to the correctness of the judgment information.
9. The photoresist supply system according to claim 8, characterized in that: The transport device is further provided with a display component, which is suitable for displaying the information of the photoresist bottle provided by the transport information processing component and / or the remaining capacity information provided by the supply information processing component.
10. The photoresist supply system according to any one of claims 1 to 9, characterized in that: Also includes: The computing server is connected to the information processing components for communication, and is suitable for receiving information sent by each information processing component, performing computing processing and data aggregation, and sending the information to the corresponding information processing component or communication terminal that needs to receive the information.