Electric heating water washing type tail gas treatment equipment
By designing a three-dimensional cross-spray network in the electric heating water-washing exhaust gas treatment equipment, one-way and two-way nozzles ensure uniform water-washing, the problem of uneven water washing is solved and the treatment efficiency and effect are improved.
Patent Information
- Application Number
- CN202420560023.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-21
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-03-21
AI Technical Summary
In the electric heating water-washed semiconductor exhaust treatment, there is a problem of uneven water washing, resulting in poor exhaust treatment effect.
An electric heating water-washing exhaust gas treatment equipment is designed, using multiple water jet pipes to form a three-dimensional cross-over spray network, including one-way nozzles and two-way nozzles, ensuring that the exhaust gas can be washed evenly and comprehensively from which direction it enters the water tank. It can increase the contact area between gas and water.
It realizes uniform water washing of exhaust gas, improves the dissolution of harmful substances and the chemical reaction speed and effect, and improves the treatment efficiency.
Smart Images
Figure CN222151538U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductor tail gas treatment, in particular to an electric heating water washing type tail gas treatment device. Background Art
[0002] Many chemicals and process gases used in the semiconductor production process are highly toxic, flammable or explosive. For example, VOCs, SiH4, SiF, HF, etc., directly discharged into the atmosphere will threaten the lives of workers and surrounding residents. If these harmful gases are not treated, they may cause acute or chronic poisoning and cause serious damage to the respiratory system, skin and eyes. For example, VOCs participate in atmospheric photochemical reactions to form ozone and secondary organic aerosols, exacerbating air pollution problems. Therefore, local environmental protection departments have formulated strict industrial waste gas emission standards, requiring enterprises to purify the waste gas they emit and only discharge it into the atmosphere after reaching the prescribed emission limit.
[0003] Semiconductor tail gas treatment technology can be divided into combustion tail gas treatment technology, plasma tail gas treatment technology and electric heating tail gas treatment technology. Among them, combustion tail gas treatment technology mainly includes direct combustion and catalytic combustion. In the direct combustion method, the tail gas is sent into a high-temperature combustion chamber to fully burn the organic matter in it and convert it into harmless substances such as carbon dioxide and water. Catalytic combustion is to achieve the same oxidation process by lowering the reaction temperature in the presence of a catalyst, which is energy-saving and easier to control. Plasma tail gas treatment technology is a method of treating tail gas by using high-voltage discharge to generate non-equilibrium plasma. The electrons and active particles (such as ions and free radicals) in the plasma have extremely high energy and can efficiently crack and oxidize organic pollutants and some inorganic pollutants in the tail gas. The electric heating water washing semiconductor tail gas treatment is a tail gas purification technology for acidic, alkaline gases and other harmful organic pollutants generated in the semiconductor manufacturing process. Generally, the exhaust gas entering the tail gas processor is preheated by an electric heating device so that the harmful components therein are more easily chemically reacted or physically adsorbed with water or other solvents. Subsequently, the preheated exhaust gas is contacted with the heated scrubbing liquid (usually deionized water or a solution with added chemicals) through a spray system, and the pollutants dissolve under high temperature conditions or react with the chemical reagents in the scrubbing liquid to produce treatable byproducts. After water washing, the mixture will further pass through the equipment to separate the liquid from the gas, ensuring that most of the harmful components remain in the water, while the clean gas can be discharged.
[0004] However, in the electrically heated water-washing type semiconductor tail gas treatment, there is a problem of uneven water washing.
[0005] Therefore, the prior art needs to be solved urgently. Utility Model Content
[0006] The purpose of the utility model is to provide an electric heating water washing type exhaust gas treatment device to address the deficiencies of the prior art. Based on the above problems, the utility model proposes an electric heating water washing type exhaust gas treatment device, so that the exhaust gas after high temperature decomposition can be evenly and comprehensively washed by water no matter from which direction it enters the water tank.
[0007] The technical solution of the utility model is achieved in this way:
[0008] An electrically heated water-washed exhaust gas treatment device comprises an air intake pipe, a main cavity, a heating rod, a reaction cavity, a cooling cavity, a water tank and a gas-liquid separation cavity, wherein the air intake pipe is connected to the main cavity, the heating rod is arranged on the main cavity and extends into the reaction cavity, the main cavity is connected to the reaction cavity, the lower end of the reaction cavity is connected to the cooling cavity, the cooling cavity is connected to the water tank, and the water tank is connected to the gas-liquid separation cavity; the water tank is provided with a water intake pipe, a first water spray pipe, a second water spray pipe and a third water spray pipe, and the water intake pipe is connected to the first water spray pipe, the second water spray pipe and the third water spray pipe respectively; the first water spray pipe and the third water spray pipe are provided with a plurality of one-way nozzles, and the second water spray pipe is provided with a plurality of two-way nozzles.
[0009] As described above, the electrically heated water-washed exhaust gas treatment equipment, the gas-liquid separation chamber includes a first exhaust chamber, a second exhaust chamber and an acid exhaust pipe; the first exhaust chamber and the second exhaust chamber are fixedly connected by a flange; the second exhaust chamber and the acid exhaust pipe are fixedly connected by a flange.
[0010] As described above, in the electrically heated water-washed exhaust gas treatment equipment, the reaction chamber is provided with a first cavity layer, a second cavity layer and a third cavity layer in sequence from the outside to the inside, a sealed inner cavity is formed between the first cavity layer and the second cavity layer, and circulating cooling water enters the sealed inner cavity under the action of a circulating pump.
[0011] As described above, in the electrically heated water-washed exhaust gas treatment equipment, the interior of the third cavity layer is coated with a high temperature resistant and corrosion resistant material.
[0012] As described above, in the electrically heated water-washing exhaust gas treatment equipment, the first water spray pipe and the third water spray pipe are arranged horizontally and perpendicular to each other; the second water spray pipe and the third water spray pipe are arranged horizontally and perpendicular to each other; the first water spray pipe, the second water spray pipe and the third water spray pipe are in the same plane.
[0013] In the electrically heated water-washing exhaust gas treatment equipment as described above, the heights of the first water spray pipe, the second water spray pipe and the third water spray pipe are lower than the upper cover plate of the water tank.
[0014] In the electrically heated water-washed exhaust gas treatment equipment as described above, a ball ring filler is arranged in the second exhaust chamber.
[0015] In the electrically heated water-washing exhaust gas treatment equipment as described above, the air intake pipes are evenly arranged on the sides of the main cavity.
[0016] Compared with the prior art, the utility model has the following advantages and beneficial effects:
[0017] 1. The electric heating water-washing exhaust gas treatment equipment provided by the utility model has a plurality of one-way nozzles arranged on the first and third water spray pipes. The one-way nozzles have the characteristics of strong directionality and strong impact force, and can effectively decompose water into fine water mist to enhance the effect of mixing with the exhaust gas. The second water spray pipe is provided with a plurality of two-way nozzles, which can spray not only to the left but also to the right, forming a left-right staggered spray array, so that the exhaust gas after high-temperature decomposition can be evenly and comprehensively washed by water no matter from which direction it enters the water tank.
[0018] 2. In the electric heating water-washing exhaust gas treatment equipment provided by the utility model, the first water spray pipe, the second water spray pipe and the third water spray pipe are in the same plane, forming a three-dimensional cross-spraying network. Such a three-dimensional layout ensures that the exhaust gas can be in full contact with the spray water after entering the water tank, further improving the uniform effect of water washing, increasing the contact area between gas and water, and thus improving the speed and effect of the dissolution or chemical reaction of harmful substances. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solution of the utility model or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, what is described below is only one embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0020] Figure 1 This is a schematic diagram of the structure of an electric heating water-washing tail gas treatment equipment proposed by the utility model;
[0021] Figure 2 This is a schematic diagram of the three-dimensional structure of the reaction chamber of the utility model;
[0022] Figure 3 This is a schematic diagram of the front structure of the reaction chamber of the utility model;
[0023] Figure 4 for Figure 3 AA section view;
[0024] Figure 5 This is a schematic diagram of the water tank structure of the utility model;
[0025] Figure 6 This is a schematic diagram of the front structure of the water tank of the utility model;
[0026] Figure 7 for Figure 6 BB cross-section diagram;
[0027] Figure 8 This is a schematic diagram of the structure of the first water spray pipe of the utility model;
[0028] Fig. 9 This is a schematic diagram of the structure of the second water spray pipe of the utility model;
[0029] Fig.10 This is a schematic diagram of the structure of the third water spray pipe of the utility model.
[0030] In the figure, 1-inlet pipe, 2-main cavity, 3-reaction cavity, 4-cooling cavity, 5-water tank, 6-gas-liquid separation cavity, 301-first cavity layer, 302-second cavity layer, 303-third cavity layer, 501-water inlet pipe, 502-first water spray pipe, 503-second water spray pipe, 504-third water spray pipe, 601-first exhaust cavity, 602-second exhaust cavity, 603-acid discharge pipe. DETAILED DESCRIPTION
[0031] In the following description, it should be understood that the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the statement "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same similar parts between the embodiments can be referred to each other. The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the internal connection of two elements, it can be a direct connection, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances. In this document, unless otherwise specified, the term "plurality" means two or more.
[0032] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0033] like Figure 1As shown, an electrically heated water-washed exhaust gas treatment equipment comprises an air intake pipe 1, a main cavity 2, a heating rod, a reaction cavity 3, a cooling cavity 4, a water tank 5 and a gas-liquid separation cavity 6, wherein the air intake pipe 1 is connected to the main cavity 2, the heating rod is arranged on the main cavity 2 and extends into the reaction cavity 3, the main cavity 2 is connected to the reaction cavity 3, the lower end of the reaction cavity 3 is connected to the cooling cavity 4, the cooling cavity 4 is connected to the water tank 5, and the water tank 5 is connected to the gas-liquid separation cavity 6; the water tank 5 is provided with a water inlet pipe 501, a first water spray pipe 502, a second water spray pipe 503 and a third water spray pipe 504, and the water inlet pipe 501 is respectively connected to the first water spray pipe 502, the second water spray pipe 503 and the third water spray pipe 504. The water inlet pipe 501 serves as a water source access point, and introduces clean circulating water or fresh water into the water tank 5, and further distributes it to the first water spray pipe 502, the second water spray pipe 503 and the third water spray pipe 504. The first water spray pipe 502 and the third water spray pipe 504 are provided with a plurality of one-way nozzles. Preferably, the first water spray pipe 502 and the third water spray pipe 504 are provided with two or three one-way nozzles. The one-way nozzle has the characteristics of strong directionality and strong impact force, and can effectively decompose water into fine water mist, thereby enhancing the effect of mixing with the exhaust gas. The second water spray pipe 503 is provided with a plurality of two-way nozzles. Preferably, the second water spray pipe 503 is provided with two two-way nozzles. The two-way nozzles can not only spray to the left, but also spray to the right, forming a left-right staggered spray array, so that the exhaust gas after high-temperature decomposition can be subjected to uniform and comprehensive water washing no matter from which direction it enters the water tank.
[0034] Preferably, the gas-liquid separation chamber 6 comprises a first exhaust chamber 601, a second exhaust chamber 602 and an acid exhaust pipe 603; the first exhaust chamber 601 and the second exhaust chamber 602 are fixedly connected via a flange; the second exhaust chamber 602 and the acid exhaust pipe 603 are fixedly connected via a flange.
[0035] like Figure 2-4 As shown, preferably, the reaction chamber 3 is provided with a first cavity layer 301, a second cavity layer 302 and a third cavity layer 303 from the outside to the inside, and a sealed inner cavity is formed between the first cavity layer 301 and the second cavity layer 302, and circulating cooling water enters the sealed inner cavity under the action of a circulating pump.
[0036] Preferably, the interior of the third cavity layer 303 is coated with a high temperature resistant and corrosion resistant material.
[0037] like Figure 5-10As shown, preferably, the first water spray pipe 502 and the third water spray pipe 504 are arranged horizontally and perpendicular to each other; the second water spray pipe 503 and the third water spray pipe 504 are arranged horizontally and perpendicular to each other; the first water spray pipe 502, the second water spray pipe 503 and the third water spray pipe 504 are in the same plane. The first water spray pipe 502, the second water spray pipe 503 and the third water spray pipe 504 are in the same plane, forming a three-dimensional cross-spraying network. Such a three-dimensional layout ensures that the exhaust gas can be in full contact with the spray water after entering the water tank 5, further improving the uniform water washing effect, increasing the contact area between the gas and the water, and thus improving the speed and effect of the dissolution or chemical reaction of harmful substances.
[0038] Preferably, the heights of the first water spray pipe 502, the second water spray pipe 503 and the third water spray pipe 504 are lower than the upper cover plate of the water tank 5. Such a design is conducive to the exhaust gas fully contacting with the sprayed water droplets during the rising process, and is also conducive to preventing the high-speed sprayed water mist from escaping the water tank 5, causing water resource waste and environmental impact.
[0039] Preferably, a ball ring filler is provided in the second exhaust cavity 602 .
[0040] Preferably, the air inlet pipes 1 are evenly arranged on the sides of the main cavity 2 .
[0041] The principle of the utility model is as follows:
[0042] The pre-treated semiconductor tail gas enters through the air inlet pipe 1, then enters the main cavity 2, and finally enters the reaction cavity 3. The heating rod in the reaction cavity 3 electrically heats the tail gas for high-temperature decomposition. The reaction cavity 3 is sequentially provided with a first cavity layer 301, a second cavity layer 302, and a third cavity layer 303 from the outside to the inside. A sealed inner cavity is formed between the first cavity layer 301 and the second cavity layer 302. The circulating cooling water enters the sealed inner cavity under the action of the circulating cooling water. The tail gas enters the cooling cavity 4 after being cooled by the circulating cooling water, and then flows into the water tank 5. After the tail gas after high-temperature decomposition enters the water tank 5 through the cooling cavity 4, the water inlet pipe 501 is used as a water source access point to introduce clean circulating water or fresh water into the water tank 5, and further distributes it to the first water spray pipe 502, the second water spray pipe 503, and the third water spray pipe 504. The first water spray pipe 502, the second water spray pipe 503 and the third water spray pipe 504 are in the same plane, forming a three-dimensional cross-spray network, ensuring that the exhaust gas can be in full contact with the spray water after entering the water tank 5, increasing the contact area between the gas and the water, and further improving the uniform water washing effect; the one-way nozzles arranged on the first water spray pipe 502 and the third water spray pipe 504 can effectively decompose water into fine water mist, thereby enhancing the effect of mixing the water mist and the exhaust gas; the two-way nozzles arranged on the second water spray pipe 503 form a left-right staggered spray array, so that the exhaust gas after high-temperature decomposition can be uniformly and comprehensively washed with water no matter from which direction it enters the water tank; the exhaust gas after washing in the water tank 5 passes through the first exhaust chamber 601 and the second exhaust chamber 602 in turn for water vapor separation, and is discharged through the acid discharge pipe 603.
[0043] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.
Claims
1. An electrically heated water-washing tail gas treatment device, characterized in that: The invention comprises an air intake pipe (1), a main cavity (2), a heating rod, a reaction cavity (3), a cooling cavity (4), a water tank (5) and a gas-liquid separation cavity (6), wherein the air intake pipe (1) is connected to the main cavity (2), the heating rod is arranged on the main cavity (2) and extends into the reaction cavity (3), the main cavity (2) is connected to the reaction cavity (3), the lower end of the reaction cavity (3) is connected to the cooling cavity (4), the cooling cavity (4) is connected to the water tank (5), and the water tank (5) is connected to the gas-liquid separation cavity (6). The water tank (5) is provided with a water inlet pipe (501), a first water spray pipe (502), a second water spray pipe (503) and a third water spray pipe (504); the water inlet pipe (501) is connected to the first water spray pipe (502), the second water spray pipe (503) and the third water spray pipe (504) respectively; the first water spray pipe (502) and the third water spray pipe (504) are provided with a plurality of one-way nozzles, and the second water spray pipe (503) is provided with a plurality of two-way nozzles.
2. The electrically heated water-washing tail gas treatment equipment according to claim 1, characterized in that: The gas-liquid separation chamber (6) comprises a first exhaust chamber (601), a second exhaust chamber (602) and an acid exhaust pipe (603); the first exhaust chamber (601) and the second exhaust chamber (602) are fixedly connected via a flange; and the second exhaust chamber (602) and the acid exhaust pipe (603) are fixedly connected via a flange.
3. The electrically heated water-washing tail gas treatment equipment according to claim 1, characterized in that: The reaction chamber (3) is provided with a first chamber layer (301), a second chamber layer (302) and a third chamber layer (303) in sequence from the outside to the inside, a sealed inner chamber is formed between the first chamber layer (301) and the second chamber layer (302), and circulating cooling water enters the sealed inner chamber under the action of a circulating pump.
4. The electrically heated water-washing tail gas treatment equipment according to claim 3 is characterized in that: The interior of the third cavity layer (303) is coated with a high temperature resistant and corrosion resistant material.
5. The electrically heated water-washing tail gas treatment equipment according to claim 4 is characterized in that: The first water spray pipe (502) and the third water spray pipe (504) are arranged horizontally and perpendicular to each other; the second water spray pipe (503) and the third water spray pipe (504) are arranged horizontally and perpendicular to each other; the first water spray pipe (502), the second water spray pipe (503) and the third water spray pipe (504) are in the same plane.
6. The electrically heated water-washing tail gas treatment equipment according to claim 4, characterized in that: The heights of the first water spray pipe (502), the second water spray pipe (503) and the third water spray pipe (504) are lower than the upper cover plate of the water tank (5).
7. The electrically heated water-washing tail gas treatment equipment according to claim 2, characterized in that: A ball ring filler is arranged in the second exhaust cavity (602).
8. The electrically heated water-washing tail gas treatment equipment according to claim 2, characterized in that: The air inlet pipes (1) are evenly arranged on the side of the main cavity (2).