PECVD (plasma enhanced chemical vapor deposition) equipment and supporting rod assembly

Abstract

The utility model relates to PECVD (plasma enhanced chemical vapor deposition) equipment and a supporting rod assembly. The supporting rod assembly comprises an insulating rod, a first insulating spacer bush and a second insulating spacer bush. The first insulating spacer bush comprises a first inner lantern ring and a first outer lantern ring which are arranged on the insulating rod in a sleeving mode, the end portion of the first outer lantern ring correspondingly protrudes out of the end portion of the first inner lantern ring, and a first containing space is defined by the first inner lantern ring and the first outer lantern ring. The second insulating spacer bush comprises a second inner lantern ring and a second outer lantern ring which are arranged on the insulating rod in a sleeving mode, the end portion of the second inner lantern ring correspondingly protrudes out of the end portion of the second outer lantern ring, and a second containing space is defined by the second inner lantern ring and the second outer lantern ring. The first outer lantern ring is arranged in the second containing space, the second inner lantern ring is arranged in the first containing space, the end of the first outer lantern ring is in clearance fit with the end of the second outer lantern ring, and the inner side wall of the first outer lantern ring is in clearance fit with the outer side wall of the second inner lantern ring. Therefore, the service life of the supporting rod assembly can be prolonged, the maintenance frequency is reduced, the starting rate of PECVD equipment is improved, and the production efficiency is further improved.

Description

Technical Field

[0001] The present application relates to the technical field of solar cell deposition coating, and in particular to a PECVD device and a support rod assembly. Background Art

[0002] TOPCon (Tunnel Oxide Passivated Contact) cell is a photovoltaic crystalline silicon cell. Due to its advantages such as high conversion efficiency, low attenuation performance and high mass production cost performance, it has gradually been widely used.

[0003] TOPCon cells use the PECVD (Plasma Enhanced Chemical Vapor Deposition) route to deposit tunneling silicon oxide and doped amorphous silicon. The graphite boat is used as a wafer carrier. After loading, the corners of the graphite boat are placed on the support rods, and discharge is performed through the electrode rods or the discharge seat electrodes. Since the deposited tunneling silicon oxide is very thin and is sensitive to discharge fluctuations during the discharge process, doped amorphous silicon will be deposited on the support rods after long-term use, causing the support rods to be turned on, thereby affecting the discharge of the anode and cathode of the graphite boat. In severe cases, an RF power supply discharge alarm will occur, and the support rods need to be regularly maintained or replaced, affecting production efficiency. Summary of the invention

[0004] Based on this, it is necessary to provide a PECVD device and a support rod assembly, which are conducive to extending the service life of the support rod assembly, reducing the maintenance frequency, and improving production efficiency.

[0005] A support rod assembly, comprising:

[0006] Insulating rod;

[0007] A first insulating spacer, the first insulating spacer comprises a first inner ring and a first outer ring, the first inner ring is sleeved on the insulating rod, the first outer ring is sleeved on the first inner ring, an end of the first outer ring protrudes from an end of the first inner ring correspondingly, and the end of the first inner ring and the inner side wall of the first outer ring are surrounded to form a first receiving space;

[0008] A second insulating spacer, the second insulating spacer and the first insulating spacer are alternately arranged along the axial direction of the insulating rod, the second insulating spacer includes a second inner ring and a second outer ring, the second inner ring is sleeved on the insulating rod, the second outer ring is sleeved on the second inner ring, the end of the second inner ring protrudes from the end of the second outer ring correspondingly, the outer side wall of the second inner ring and the end of the second outer ring are surrounded to form a second receiving space; wherein, the first outer ring is arranged in the second receiving space, the second inner ring is arranged in the first receiving space, the end of the first outer ring is loosely matched with the end of the second outer ring, and the inner side wall of the first outer ring is loosely matched with the outer side wall of the second inner ring.

[0009] In one embodiment, the gap between the inner wall of the first outer ring and the outer wall of the second inner ring is 0.2 mm to 6 mm.

[0010] In one embodiment, a gap between an end of the first outer collar and an end of the second outer collar is 0.5 mm to 10 mm.

[0011] In one embodiment, the end of the first inner ring is abutted against the end of the second inner ring; or, the end of the first inner ring is clearance-fitted against the end of the second inner ring.

[0012] In one embodiment, the inner diameter of the first inner ring is equal to the inner diameter of the second inner ring, and the inner diameter of the first inner ring and the inner diameter of the second inner ring are both adapted to the outer diameter of the insulating rod.

[0013] In one embodiment, the outer diameter of the first outer collar is equal to the outer diameter of the second outer collar.

[0014] In one embodiment, the thickness of the first inner ring is greater than the thickness of the first outer ring, and the thickness of the second inner ring is less than the thickness of the second outer ring.

[0015] In one embodiment, the first insulating sleeve and the second insulating sleeve are both ceramic sleeves.

[0016] A PECVD device comprises the above-mentioned support rod assembly.

[0017] In one embodiment, the PECVD equipment also includes a graphite boat, and the boat corners of the graphite boat are overlapped on the first insulating spacer and / or the second insulating spacer; or, the graphite boat includes a plurality of boat plates, all of the boat plates are provided with mounting holes, and the support rod assembly is arranged in the mounting holes to connect all the boat plates.

[0018] In the above-mentioned PECVD equipment and support rod assembly, during the amorphous silicon deposition process, amorphous silicon is mainly deposited on the outer surface of the first outer ring and the second outer ring, and in the gap between the end of the first outer ring and the end of the second outer ring, and is rarely or even not deposited in the gap between the inner side wall of the first outer ring and the outer side wall of the second inner ring, and in the position between the end of the first inner ring and the end of the second inner ring. In combination with the insulating rod, the first insulating spacer and the second insulating spacer being insulators, the possibility of the first insulating spacer and the second insulating spacer being turned on during the amorphous silicon deposition process can be reduced. After the boat corner of the graphite boat is overlapped with the first insulating spacer and / or the second insulating spacer, since the first insulating spacer and the second insulating spacer are insulated, there is no situation where the front and rear boat corners are turned on, that is, it will not affect the discharge of the anode and cathode of the graphite boat. In this way, it is beneficial to extend the service life of the support rod assembly, reduce the maintenance frequency, improve the start-up rate of the PECVD equipment, and thus improve production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a cross-sectional view of a support rod assembly according to an embodiment of the present application.

[0020] Figure 2 This is a cross-sectional view of the assembled first insulating spacer and the second insulating spacer according to one embodiment of the present application.

[0021] Figure 3 It is a cross-sectional view of a first insulating spacer according to an embodiment of the present application.

[0022] Figure 4 for Figure 3 Left side view.

[0023] Figure 5 It is a cross-sectional view of a second insulating spacer according to an embodiment of the present application.

[0024] Figure 6 for Figure 5 Left side view.

[0025] Description of Figure Numbers:

[0026] 10. Support rod assembly; 11. Insulating rod; 12. First insulating spacer; 121. First inner ring; 1211. First through hole; 122. First outer ring; 123. First receiving space; 13. Second insulating spacer; 131. Second inner ring; 1311. Second through hole; 132. Second outer ring; 133. Second receiving space; 20. Graphite boat; 21. Boat angle. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0028] See also Figure 1 , Figure 1 A cross-sectional view of a support rod assembly 10 of an embodiment of the present application is shown. A PECVD device provided in an embodiment of the present application includes a graphite boat 20 and a support rod assembly 10. The tunneling silicon oxide and doped amorphous silicon are deposited by a PECVD route, and the graphite boat 20 is used as a wafer carrier. After loading, the boat corner 21 of the graphite boat 20 is overlapped on the support rod assembly 10, and discharge is performed through an electrode rod or a discharge seat electrode.

[0029] Of course, in other embodiments, the support rod assembly 10 can also be used to connect multiple boat pieces to achieve the purpose of insulation. Specifically, each boat piece is provided with a mounting hole, and the support rod assembly 10 is penetrated in the mounting hole to connect all the boat pieces.

[0030] In one embodiment, see Figure 1 The support rod assembly 10 includes an insulating rod 11 , a first insulating spacer 12 and a second insulating spacer 13 sleeved on the insulating rod 11 , and the first insulating spacer 12 and the second insulating spacer 13 are alternately arranged along the axial direction of the insulating rod 11 .

[0031] When the tunneling silicon oxide and doped amorphous silicon are deposited by the PECVD route, the boat corner 21 of the graphite boat 20 overlaps the first insulating spacer 12 and / or the second insulating spacer 13 .

[0032] See also Figure 1 , Figure 3 and Figure 4 , Figure 3 A cross-sectional view of a first insulating spacer 12 according to an embodiment of the present application is shown. Figure 4 Shows Figure 3 The left side view of the first insulating spacer 12 includes a first inner ring 121 and a first outer ring 122. The first inner ring 121 is sleeved on the insulating rod 11, and the first outer ring 122 is sleeved on the first inner ring 121. The end of the first outer ring 122 along its axial direction protrudes from the end of the first inner ring 121 along its axial direction, and the inner side wall of the first outer ring 122 and the end of the first inner ring 121 are surrounded to form a first receiving space 123.

[0033] Optionally, see Figure 4, the cross-sections of the first inner ring 121 and the first outer ring 122 are circular. Of course, in other embodiments, the cross-sections of the first inner ring 121 and the first outer ring 122 may also be square, oval, etc., and are not limited thereto.

[0034] See also Figure 1 , Figure 5 and Figure 6 , Figure 5 A cross-sectional view of a second insulating spacer 13 according to an embodiment of the present application is shown. Figure 6 Shows Figure 5 The second insulating spacer 13 includes a second inner ring 131 and a second outer ring 132. The second inner ring 131 is sleeved on the insulating rod 11, and the second outer ring 132 is sleeved on the second inner ring 131. The end of the second inner ring 131 along its axial direction protrudes from the end of the second outer ring 132 along its axial direction, and the outer wall of the second inner ring 131 and the end of the second outer ring 132 are surrounded to form a second receiving space 133.

[0035] Optionally, see Figure 6 The cross-sections of the second inner ring 131 and the second outer ring 132 are circular. Of course, in other embodiments, the cross-sections of the second inner ring 131 and the second outer ring 132 may also be square, oval, etc., and are not limited thereto.

[0036] Further, see Figure 1 and Figure 2 , Figure 2 A cross-sectional view of the first insulating spacer 12 and the second insulating spacer 13 after being assembled in one embodiment of the present application is shown. The first outer collar 122 is disposed in the second receiving space 133, and the second inner collar 131 is disposed in the first receiving space 123. The end of the first outer collar 122 is gap-matched with the end of the second outer collar 132, and the inner side wall of the first outer collar 122 is gap-matched with the outer side wall of the second inner collar 131.

[0037] During the deposition of amorphous silicon, see Figure 1 and Figure 2, amorphous silicon is mainly deposited on the outer surface of the first outer ring 122 and the second outer ring 132, and the gap between the end of the first outer ring 122 and the end of the second outer ring 132, and rarely or even cannot be deposited in the gap between the inner side wall of the first outer ring 122 and the outer side wall of the second inner ring 131, and the position between the end of the first inner ring 121 and the end of the second inner ring 131. In combination with the insulating rod 11, the first insulating spacer 12 and the second insulating spacer 13 are all insulators, so the possibility of the first insulating spacer 12 and the second insulating spacer 13 being turned on during the amorphous silicon deposition process can be reduced. After the boat corner 21 of the graphite boat 20 is overlapped with the first insulating spacer 12 and / or the second insulating spacer 13, since the first insulating spacer 12 and the second insulating spacer 13 are insulated, there is no situation where the front and rear boat corners 21 are turned on, that is, it will not affect the discharge of the cathode and cathode of the graphite boat 20. In this way, it is beneficial to extend the service life of the support rod assembly 10, reduce the maintenance frequency, and improve the start-up rate of the PECVD equipment.

[0038] It should be noted that the number of the first insulating spacers 12 and the second insulating spacers 13 can be set according to actual needs and is not limited here.

[0039] In this embodiment, two first insulating sleeves 12 and two second insulating sleeves 13 are provided, and the two first insulating sleeves 12 and the two second insulating sleeves 13 are alternately sleeved on the insulating rod 11 along the axial direction of the insulating rod 11 .

[0040] In one embodiment, see Figure 2 The gap between the inner sidewall of the first outer collar 122 and the outer sidewall of the second inner collar 131 is 0.2 mm to 6 mm. In this way, during the amorphous silicon deposition process, the possibility of the inner sidewall of the first outer collar 122 and the outer sidewall of the second inner collar 131 being connected can be reduced.

[0041] Further, see Figure 2 The gap between the inner side wall of the first outer collar 122 and the outer side wall of the second inner collar 131 is 1 mm to 2 mm. In this embodiment, the gap between the inner side wall of the first outer collar 122 and the outer side wall of the second inner collar 131 is 1.5 mm.

[0042] In one embodiment, see Figure 2 , the gap between the end of the first outer ring 122 and the end of the second outer ring 132 is 0.5mm to 10mm. This limitation ensures that there is a large overlap area between the first outer ring 122 and the second inner ring 131. During the deposition of amorphous silicon, it is ensured that amorphous silicon is difficult to be deposited in the gap between the first outer ring 122 and the second inner ring 131, thereby ensuring the insulation performance of the support rod assembly 10.

[0043] Further, see Figure 2 , the gap between the end of the first outer collar 122 and the end of the second outer collar 132 is 2 mm to 3 mm. In this embodiment, the gap between the end of the first outer collar 122 and the end of the second outer collar 132 is 2.5 mm.

[0044] In one embodiment, see Figure 2 The end of the first inner ring 121 is in abutment with the end of the second inner ring 131. In this way, the first insulating sleeve 12 and the second insulating sleeve 13 can be prevented from moving along the axial direction of the insulating rod 11, which is conducive to fixing the positions of the first insulating sleeve 12 and the second insulating sleeve 13 on the insulating rod 11.

[0045] Of course, in other embodiments, the end of the first inner ring 121 and the end of the second inner ring 131 may also be gap-fitted. It should be noted that the gap between the end of the first inner ring 121 and the end of the second inner ring 131 cannot be too large, for example, the gap between the end of the first inner ring 121 and the end of the second inner ring 131 is 0.1mm to 5mm. In this way, it can be ensured that there is a large overlap area between the first outer ring 122 and the second inner ring 131. During the deposition of amorphous silicon, it is ensured that it is difficult for amorphous silicon to be deposited in the gap between the first outer ring 122 and the second inner ring 131, thereby ensuring the insulation performance of the support rod assembly 10.

[0046] In one embodiment, see Figure 1 and Figure 2 The inner diameter of the first inner ring 121 is equal to the inner diameter of the second inner ring 131, and is adapted to the outer diameter of the insulating rod 11. Specifically, the first inner ring 121 has a first through hole 1211, and the second inner ring 131 has a second through hole 1311. The diameters of the first through hole 1211 and the second through hole 1311 are equal and slightly larger than the diameter of the insulating rod 11, which is conducive to stably sleeve the first insulating spacer 12 and the second insulating spacer 13 on the insulating rod 11.

[0047] In one embodiment, see Figure 1 and Figure 2 , the outer diameter of the first outer ring 122 is equal to the outer diameter of the second outer ring 132. During operation, the boat corner 21 of the graphite boat 20 is overlapped on the outer surfaces of the first outer ring 122 and the second outer ring 132. Since the outer diameter of the first outer ring 122 is equal to the outer diameter of the second outer ring 132, the contact area between the boat corner 21 of the graphite boat 20 and the outer surfaces of the first outer ring 122 and the second outer ring 132 can be increased, thereby improving the stability of the overlap of the graphite boat 20.

[0048] Of course, in other embodiments, if the length of the first insulating spacer 12 or the second insulating spacer 13 is long enough and the boat corner 21 of the graphite boat 20 overlaps the first outer ring 122 or the second outer ring 132, the outer diameter of the first outer ring 122 may not be equal to the outer diameter of the second outer ring 132.

[0049] In this embodiment, refer to Figure 2 The inner diameter of the first inner ring 121 is equal to the inner diameter of the second inner ring 131, and the outer diameter of the first outer ring 122 is equal to the outer diameter of the second outer ring 132. The thickness of the first inner ring 121 is greater than the thickness of the first outer ring 122, the thickness of the second inner ring 131 is less than the thickness of the second outer ring 132, and the thickness of the first inner ring 121 is greater than the thickness of the second inner ring 131.

[0050] In one embodiment, the first insulating spacer 12 and the second insulating spacer 13 are both ceramic spacers. Optionally, the material of the ceramic spacer can be corundum, silicon carbide, silicon nitride, etc. In this way, the ceramic spacer can withstand high temperatures of 600°C to 700°C, has stable physical and chemical properties, and is not easy to volatilize and introduce impurity pollution.

[0051] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0052] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0053] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0054] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0055] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0056] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A support rod assembly (10), characterized in that: include: Insulating rod (11); A first insulating spacer (12), the first insulating spacer (12) comprising a first inner ring (121) and a first outer ring (122), the first inner ring (121) being sleeved on the insulating rod (11), the first outer ring (122) being sleeved on the first inner ring (121), the end of the first outer ring (122) correspondingly protruding from the end of the first inner ring (121), the end of the first inner ring (121) and the inner side wall of the first outer ring (122) forming a first receiving space (123); a second insulating sleeve (13), wherein the second insulating sleeve (13) and the first insulating sleeve (12) are arranged alternately along the axial direction of the insulating rod (11), the second insulating sleeve (13) comprises a second inner sleeve ring (131) and a second outer sleeve ring (132), the second inner sleeve ring (131) is sleeved on the insulating rod (11), the second outer sleeve ring (132) is sleeved on the second inner sleeve ring (131), the end of the second inner sleeve ring (131) protrudes correspondingly from the end of the second outer sleeve ring (132), and the outer side wall of the second inner sleeve ring (131) and the end of the second outer sleeve ring (132) are arranged to form a second receiving space (133); The first outer ring (122) is arranged in the second receiving space (133), the second inner ring (131) is arranged in the first receiving space (123), the end of the first outer ring (122) and the end of the second outer ring (132) are loosely matched, and the inner wall of the first outer ring (122) and the outer wall of the second inner ring (131) are loosely matched.

2. The support rod assembly (10) according to claim 1, characterized in that: The gap between the inner wall of the first outer collar (122) and the outer wall of the second inner collar (131) is 0.2 mm to 6 mm.

3. The support rod assembly (10) according to claim 1, characterized in that: A gap between an end of the first outer collar (122) and an end of the second outer collar (132) is 0.5 mm to 10 mm.

4. The support rod assembly (10) according to claim 1, characterized in that: The end of the first inner ring (121) is in abutment with the end of the second inner ring (131); or, the end of the first inner ring (121) is in clearance with the end of the second inner ring (131).

5. The support rod assembly (10) according to claim 1, characterized in that: The inner diameter of the first inner ring (121) is equal to the inner diameter of the second inner ring (131), and the inner diameter of the first inner ring (121) and the inner diameter of the second inner ring (131) are both adapted to the outer diameter of the insulating rod (11).

6. The support rod assembly (10) according to claim 5, characterized in that: The outer diameter of the first outer ring (122) is equal to the outer diameter of the second outer ring (132).

7. The support rod assembly (10) according to claim 6, characterized in that: The thickness of the first inner ring (121) is greater than the thickness of the first outer ring (122), and the thickness of the second inner ring (131) is less than the thickness of the second outer ring (132).

8. The support rod assembly (10) according to any one of claims 1 to 7, characterized in that: The first insulating sleeve (12) and the second insulating sleeve (13) are both ceramic sleeves.

9. A PECVD device, characterized in that: It comprises a support rod assembly (10) as claimed in any one of claims 1 to 8.

10. The PECVD device according to claim 9, characterized in that The PECVD device further comprises a graphite boat (20), wherein a boat corner of the graphite boat (20) is overlapped with the first insulating spacer (12) and / or the second insulating spacer (13); Alternatively, the graphite boat (20) comprises a plurality of boat plates, all of the boat plates are provided with mounting holes, and the support rod assembly (10) is arranged in the mounting holes to connect all of the boat plates.

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