Vacuum pump set and waste gas treatment system

Abstract

The utility model relates to a vacuum pump set and a waste gas treatment system. The vacuum pump set comprises a main pump and a backing pump, the main pump and the backing pump are horizontally arranged, the main pump is located above the backing pump, and the main pump is parallel to the backing pump; the main pump comprises a main pump output port, and the backing pump comprises a backing pump suction port; and the output port of the main pump and the suction inlet of the backing pump are aligned up and down and are directly and fixedly connected through a flange structure. Compared with the prior art, a pipeline connecting mechanism connected between the output port of the main pump and the suction inlet of the backing pump is omitted, so that the output port of the main pump is directly communicated with the suction inlet of the backing pump, powder is more easily taken away by pumped gas, dust accumulation is effectively prevented, and the loss of pumping capacity is reduced; meanwhile, the overall height of the vacuum pump set is reduced, and the size of the vacuum pump set is smaller.

Description

Technical Field

[0001] The present application relates to the field of vacuum pumps, and in particular, to a vacuum pump assembly and an exhaust gas treatment system equipped with the vacuum pump assembly. Background Art

[0002] In industries such as semiconductor, flat screen or photovoltaic manufacturing, waste gas treatment systems consisting of vacuum pump units are widely used in so-called "powder" processes, such as etching, polishing, etc. These processes produce process gases that contain a large amount of solid by-products. These powdery substances tend to deposit in the vacuum pump unit.

[0003] At present, the industry uses a pipe connection mechanism composed of a bellows connection or a transition pipe to connect the front pump and the main pump of the vacuum pump group in series to coordinate the pumping of the pumped gas. This connection mechanism not only increases the height of the vacuum pump group, but also complicates the connection process. In particular, when there is a highly curved section in the pipe connection mechanism, sediments are easily accumulated in the connection mechanism. The presence of sediments will limit the channel size for gas, resulting in a loss of pumping capacity, and seriously, will affect the service life of the vacuum pump group in the absence of maintenance operations. For this reason, it needs to be frequently dismantled for cleaning, that is, the maintenance frequency is high. However, due to the position constraints between the front pump and the main pump in the vacuum pump group, the disassembly and assembly of the pipe connection mechanism is extremely inconvenient, resulting in complex and time-consuming maintenance. Utility Model Content

[0004] The purpose of the present application is to provide a vacuum pump group, which improves and optimizes the connection structure between the main pump and the front pump in the vacuum pump group, so as to at least partially solve the problems existing in the prior art.

[0005] The first aspect of the present application proposes a vacuum pump group, including a main pump and a fore-stage pump, wherein the main pump and the fore-stage pump are arranged horizontally, the main pump is located above the fore-stage pump, and the main pump is parallel to the fore-stage pump; the main pump includes a main pump output port, and the fore-stage pump includes a fore-stage pump suction port; the main pump output port and the fore-stage pump suction port are aligned vertically and are directly fixedly connected via a flange structure.

[0006] According to the vacuum pump group of the embodiment of the present application, the main pump and the front-stage pump are combined by aligning the main pump output port and the front-stage pump suction port up and down and directly fixing the connection based on the flange structure. On the one hand, in terms of structure, compared with the prior art, the pipeline connection mechanism connected between the main pump output port and the front-stage pump suction port is omitted, making the structure simpler, while reducing the overall height of the vacuum pump group, making the vacuum pump group smaller. On the other hand, in terms of function, the problem that powder is easily accumulated in the pipeline connection mechanism between the two pumps in the prior art and affects the pumping capacity is solved. The output port of the main pump and the suction port of the front-stage pump are directly connected up and down, and the powder is more easily carried away by the pumped gas, effectively reducing the loss of pumping capacity.

[0007] Furthermore, the fore-stage pump further comprises a fore-stage pump body, the fore-stage pump suction port is formed by a through hole formed on the fore-stage pump body, and the end face of the fore-stage pump suction port is flush with the upper surface of the fore-stage pump body. Since the fore-stage pump suction port is formed on the fore-stage pump body and its end face is flush with the upper surface of the fore-stage pump body, when the main pump output port is fixedly connected to the fore-stage pump suction port, the fore-stage pump body can provide support for the main pump, making the connection more stable.

[0008] Furthermore, the suction port of the fore-stage pump includes a first funnel-shaped section and a second cylindrical section; wherein the large-diameter end of the first section is connected to the main pump outlet, and the small-diameter end of the first section is connected to the second section. With such a configuration, on the one hand, the large-diameter inlet formed by the first section facilitates dust to enter the fore-stage pump along with the pumped gas; on the other hand, since the diameter of the second section is smaller than that of the first section, a local flow restriction is formed at the connection between the first section and the second section, so that the gas is accelerated near the connection, thereby making it easier for the powder to be carried away by the pumped gas.

[0009] Furthermore, the flange structure includes: a flange plate and a plurality of fixing parts; the flange plate is fixedly connected to the main pump outlet, and the end surface of the flange plate facing the fore-stage pump abuts against the fore-stage pump body; the flange plate is fixedly connected to the fore-stage pump body through the plurality of fixing parts.

[0010] Furthermore, the pump body of the fore-stage pump is provided with a plurality of fixing holes around the suction port of the fore-stage pump, the flange is provided with a plurality of through holes corresponding to the plurality of fixing holes, and the fixing member passes through the through holes and is fixedly connected to the corresponding fixing holes to fix the flange to the pump body of the fore-stage pump. Therefore, the fixing member not only plays a role in fixing the flange to the pump body of the fore-stage pump, but also plays a role in positioning and guiding by cooperating with the through holes and the fixing holes when the output port of the main pump is connected to the suction port of the fore-stage pump.

[0011] Furthermore, the fixing member includes a positioning pin and a locking nut, one end of the positioning pin passes through the through hole and is fixedly connected to the corresponding fixing hole, and the other end of the positioning pin is threadedly connected to the locking nut to lock the flange and the pump body of the front-stage pump; both ends of the positioning pin are provided with threads, and the fixing hole is a blind hole with internal threads. In this way, the precise positioning of the main pump output port and the front-stage pump suction port is achieved through the positioning pin, the blind hole and the through hole, and the fixed connection between the main pump and the front-stage pump is achieved through the cooperation of the flange, the positioning pin and the locking nut.

[0012] Furthermore, the flange is integrally formed with the main pump outlet to improve the connection strength, and is usually integrally cast.

[0013] Furthermore, in order to ensure the airtightness of the vacuum pump group to maintain a vacuum environment, a seal is provided between the flange and the front pump, a groove is formed on the end surface of the flange facing the front pump, and the seal is arranged in the groove.

[0014] Furthermore, the main pump is a Roots pump, and the fore-stage pump is a multi-stage vacuum pump.

[0015] The second aspect of the present application proposes an exhaust gas treatment system, including the above-mentioned vacuum pump group. The vacuum pump group is a core component in the exhaust gas treatment system, and its working stability directly affects the working stability of the exhaust gas treatment system. When the pumping capacity loss of the vacuum pump group is reduced and the maintenance frequency is reduced, the pumping capacity loss and maintenance frequency of the exhaust gas treatment system equipped with the vacuum pump group are also reduced, thereby improving the efficiency of the exhaust gas treatment system.

[0016] Compared with the prior art, this application has at least the following beneficial effects:

[0017] The main pump output port and the front-stage pump suction port are aligned vertically and directly fixedly connected based on the flange structure to realize the combination of the main pump and the front-stage pump. In terms of structure, compared with the prior art, the pipeline connection mechanism connected between the main pump output port and the front-stage pump suction port is omitted, making the structure simpler; at the same time, the overall height of the vacuum pump group is reduced, making the vacuum pump group smaller. In terms of function, the problem of the prior art that powder is easily accumulated in the pipeline connection mechanism and affects the pumping capacity is solved. The main pump output port and the front-stage pump suction port are directly connected vertically, and the powder is more easily carried away by the pumped gas, effectively reducing the loss of pumping capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a front view of the vacuum pump assembly according to an embodiment of the present application;

[0020] Figure 2 for Figure 1 A partial enlarged view of point A in the middle.

[0021] Reference numerals:

[0022] 100-vacuum pump set;

[0023] 10-main pump; 11-main pump output port;

[0024] 20-pre-stage pump; 21-pre-stage pump suction port; 211-first section; 212-second section; 22-pre-stage pump body;

[0025] 30-flange structure; 31-flange plate; 32-fixing piece; 321-locating pin; 322-locking nut. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0028] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0031] Reference Figure 1 and Figure 2 The present embodiment provides a vacuum pump assembly 100, including a main pump 10 and a fore-stage pump 20. The main pump 10 and the fore-stage pump 20 are arranged horizontally, the main pump 10 is located above the fore-stage pump 20, and the main pump 10 and the fore-stage pump 20 are parallel, that is, the axes of the two are parallel. The main pump 10 includes a main pump outlet 11, and the fore-stage pump 20 includes a fore-stage pump suction port 21. The main pump outlet 11 and the fore-stage pump suction port 21 are aligned vertically, and the two are directly fixedly connected by a flange structure 30.

[0032] The vacuum pump group 100 of this embodiment realizes the combination of the main pump 10 and the front-stage pump 20 by aligning the main pump output port 11 and the front-stage pump suction port 21 up and down and directly fixing the connection based on the flange structure 30. On the one hand, in terms of structure, compared with the prior art, the pipeline connection mechanism connected between the main pump output port 11 and the front-stage pump suction port 21 is omitted, the structure is simpler, the connection is more secure, and the overall height of the vacuum pump group 100 is also reduced, making the volume of the vacuum pump group 100 smaller. For vacuum pump groups 100 with different pumping capacities, the overall height can be reduced by 10 to 20 centimeters. On the other hand, in terms of function, the problem that powder is easily accumulated in the pipeline connection mechanism between the two pumps and affects the pumping capacity in the prior art is solved. The main pump output port 11 and the front-stage pump suction port 21 are directly connected up and down, and the powder is more easily carried away by the pumped gas, effectively reducing the loss of pumping capacity.

[0033] In the above-mentioned vacuum pump group 100 of the present embodiment, the main pump 10 is connected in series with the fore-stage pump 20, and is arranged upstream of the fore-stage pump 20 in the flow direction of the pumped gas. It can be understood that the term "upstream" refers to an element placed in front of another element relative to the flow direction of the pumped gas; correspondingly, the term "downstream" refers to an element placed behind another element relative to the flow direction of the pumped gas.

[0034] Furthermore, in the above-mentioned vacuum pump group 100, the main pump 10 is a dry Roots pump, and the fore-stage pump 20 is a multi-stage vacuum pump. The dry Roots pump has the characteristics of low compression ratio. It is used in combination with a multi-stage vacuum pump to form a vacuum pump group, which can obtain a high vacuum degree to improve the pumping capacity. The fore-stage pump 20, also known as a rough vacuum pump, is a positive displacement vacuum pump, which can be a "Roots", "claw" type, screw type, or a dry multi-stage vacuum pump based on other similar positive displacement vacuum pump principles. The fore-stage pump 20 also includes a fore-stage pump body 22 and a plurality of pumping stages (not shown) arranged in series along the axial direction of the fore-stage pump, and the pumped gas can flow in these multiple pumping stages. Each pumping stage has its own inlet (not shown) and outlet (not shown), and the outlet of the previous pumping stage is connected to the inlet of the next stage through an interstage channel. The inlet of the first pumping stage of the fore pump is in fluid communication with the fore pump suction port 21 , and the outlet of the last pumping stage of the fore pump is in fluid communication with the fore pump discharge port (not shown).

[0035] Reference Figure 2 Since the fore-stage pump body 22 is usually a thick-walled casting, in this embodiment, the fore-stage pump suction port 21 can be formed by a through hole opened on the fore-stage pump body 22. The end surface of the fore-stage pump suction port 21 is flush with the upper surface of the fore-stage pump body 22.

[0036] Since the front-stage pump suction port 21 is formed on the front-stage pump body 22 and its end face is flush with the upper surface of the front-stage pump body 22, when the main pump output port 11 and the front-stage pump suction port 21 are directly fixedly connected through the flange structure 30, the front-stage pump body 22 can provide support for the main pump 10, so that the main pump 10 can be fixedly supported on the front-stage pump body 22, making the connection more stable, and also improving the support stability of the main pump 10.

[0037] Generally, the main pump outlet 11 is larger than the front pump inlet 21. In order to allow the gas output from the main pump outlet 11 to smoothly transition into the front pump inlet 21, the front pump inlet 21 includes a funnel-shaped first section 211 and a cylindrical second section 212. The end with a larger diameter in the first section 211 is connected to the main pump outlet 11, and the end with a smaller diameter in the first section 211 is connected to the second section 212; the second section 212 is connected below the first section 211.

[0038] With such arrangement, on the one hand, the large-diameter inlet formed by the first section 211 facilitates dust to enter the front-stage pump 20 along with the pumped gas, thereby preventing dust from accumulating at the main pump output port 11, thereby affecting the pumping capacity of the main pump 10; on the other hand, since the diameter of the second section 212 is smaller than the diameter of the first section 211, a local flow restriction is formed at the connection between the first section 211 and the second section 212, so that the gas is accelerated near the connection, thereby making it easier for the powder to be carried away by the pumped gas.

[0039] Reference Figure 2 The flange structure 30 includes: a flange 31 and a plurality of fixings 32. The flange 31 is fixedly connected to the main pump outlet 11. Preferably, the flange 31 and the main pump outlet 11 are integrally formed. The end surface of the flange 31 facing the fore-stage pump 20 abuts against the fore-stage pump body 22. The flange 31 is fixedly connected to the fore-stage pump body 22 through a plurality of fixings 32.

[0040] Furthermore, a plurality of fixing holes are provided on the fore-stage pump body 22 around the fore-stage pump suction port 21, and a plurality of through holes corresponding to the plurality of fixing holes are provided on the flange 31. The fixing member 32 passes through the through hole and is fixedly connected to the corresponding fixing hole to fix the flange 31 to the fore-stage pump body 22. Therefore, the fixing member 32 not only plays a role in fixing the flange 31 to the fore-stage pump body 22, but also plays a role in positioning and guiding when the main pump outlet 11 is docked with the fore-stage pump suction port 21 through the cooperation of the fixing member 32 with the through hole and the fixing hole.

[0041] Preferably, the fixing member 32 includes a locating pin 321 and a locking nut 322. One end of the locating pin 321 passes through the through hole and is fixedly connected to the corresponding fixing hole, and the other end of the locating pin 321 is threadedly connected to the locking nut 322 to lock the flange 31 and the front pump body 22. Both ends of the locating pin 321 are provided with threads, and the fixing hole is a blind hole with an internal thread. In this way, the main pump output port 11 and the front pump suction port 21 are accurately positioned by the locating pin 321, the blind hole and the through hole, and the main pump 10 and the front pump 20 are fixedly connected by the cooperation of the flange 31, the locating pin 321 and the locking nut 322.

[0042] When the main pump 10 and the front-stage pump 20 are assembled and connected to form the vacuum pump group 100, the multiple positioning pins 321 can be first fixedly connected to the multiple blind holes on the front-stage pump body 22, and then the through holes on the flange 31 are aligned with the positioning pins 321 to complete the positioning to ensure that the main pump outlet 11 and the front-stage pump suction port 21 are aligned vertically, and finally the flange 31 and the front-stage pump body 22 are locked by the locking nut 322 to achieve the fixed connection between the main pump outlet 11 and the front-stage pump suction port 21.

[0043] With the aid of the flange structure 30 , not only the main pump outlet 11 is connected to the fore pump inlet 21 , but also the main pump 10 is directly supported and fixed on the fore pump 20 , thereby realizing the combination of the main pump 10 and the fore pump 20 .

[0044] Preferably, in order to ensure air tightness and maintain a vacuum environment, a seal (not shown) is provided between the flange 31 and the fore-stage pump body 22. Optionally, a groove (not shown) is formed on the end surface of the flange 31 facing the fore-stage pump 20, and the seal is provided in the groove. Alternatively, a flat sealing gasket is provided between the end surface of the flange 31 facing the fore-stage pump and the fore-stage pump body 22 for sealing.

[0045] Furthermore, in order to prevent the vibration generated during the operation of the main pump 10 from being transmitted to the front-stage pump 20 and / or the vibration generated during the operation of the front-stage pump 20 from being transmitted to the main pump 10, thereby causing resonance, a vibration-damping pad (not shown) is also arranged between the end surface of the flange 31 facing the front-stage pump and the front-stage pump body 22.

[0046] Furthermore, the present application also provides a waste gas treatment system, including the vacuum pump group 100 in the above embodiment, which is used to pump process gas. The vacuum pump group 100 is a core component in the waste gas treatment system. In the waste gas treatment system, the above vacuum pump group 100 is fluidically connected to the downstream of the process chamber (not shown) and the upstream of the gas treatment device (not shown) in the flow direction of the pumped gas. Since the vacuum pump group 100 is the core device in the pumping waste gas treatment system, its working stability directly determines the working stability of the pumping waste gas treatment system to a large extent. When the pumping capacity loss of the vacuum pump group 100 is reduced and the maintenance frequency is reduced, the pumping capacity loss and maintenance frequency of the waste gas treatment system equipped with the vacuum pump group 100 are also reduced.

[0047] In summary, the vacuum pump group 100 according to the embodiment of the present application includes a main pump 10 and a front-stage pump 20, the main pump 10 and the front-stage pump 20 are arranged horizontally, the main pump 10 is located above the front-stage pump 20, and the main pump 10 is parallel to the front-stage pump 20; the main pump 10 includes a main pump output port 11, and the front-stage pump 20 includes a front-stage pump suction port 21; the main pump output port 11 and the front-stage pump suction port 21 are aligned up and down, and the two are directly fixedly connected by a flange structure 30. Compared with the prior art, on the one hand, the pipeline connection mechanism connected between the main pump output port 11 and the front-stage pump suction port 21 is omitted, the structure is simpler, and the overall height of the vacuum pump group 100 is reduced, making the volume of the vacuum pump group 100 smaller; on the other hand, because the main pump output port 11 and the front-stage pump suction port 21 are directly connected up and down, the powder is more easily taken away by the pumped gas, thereby effectively preventing dust accumulation and reducing the loss of pumping capacity.

[0048] The above is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A vacuum pump assembly (100), comprising a main pump (10) and a fore pump (20), characterized in that: The main pump (10) and the fore-stage pump (20) are arranged horizontally, the main pump (10) is located above the fore-stage pump (20), and the main pump (10) is parallel to the fore-stage pump (20); the main pump (10) comprises a main pump outlet (11), and the fore-stage pump (20) comprises a fore-stage pump suction port (21); the main pump outlet (11) and the fore-stage pump suction port (21) are arranged vertically aligned and are directly fixedly connected via a flange structure (30); The fore-stage pump (20) further comprises a fore-stage pump body (22), the fore-stage pump suction port (21) being formed by a through hole provided on the fore-stage pump body (22), and the end surface of the fore-stage pump suction port (21) being flush with the upper surface of the fore-stage pump body (22); The front pump suction port (21) comprises a first funnel-shaped section (211) and a second cylindrical section (212); wherein a large-diameter end of the first section (211) is connected to the main pump outlet (11), and a small-diameter end of the first section (211) is connected to the second section (212).

2. The vacuum pump assembly (100) according to claim 1, characterized in that: The flange structure (30) comprises: a flange (31) and a plurality of fixing members (32); the flange (31) is fixedly connected to the main pump outlet (11), and the end surface of the flange (31) facing the fore-stage pump (20) is in contact with the fore-stage pump body (22); the flange (31) is fixedly connected to the fore-stage pump body (22) via the plurality of fixing members (32).

3. The vacuum pump assembly (100) according to claim 2, characterized in that: The fore-stage pump body (22) is provided with a plurality of fixing holes surrounding the fore-stage pump suction port (21); the flange (31) is provided with a plurality of through holes corresponding to the plurality of fixing holes; the fixing member (32) passes through the through holes and is fixedly connected to the corresponding fixing holes to fix the flange (31) to the fore-stage pump body (22).

4. The vacuum pump assembly (100) according to claim 3, characterized in that: The fixing member (32) comprises a positioning pin (321) and a locking nut (322); one end of the positioning pin (321) passes through the through hole and is fixedly connected to the corresponding fixing hole, and the other end of the positioning pin (321) is threadedly connected to the locking nut (322) to lock the flange (31) and the front pump body (22); both ends of the positioning pin (321) are provided with threads, and the fixing hole is a blind hole with internal threads.

5. The vacuum pump assembly (100) according to claim 2, characterized in that: The flange (31) and the main pump outlet (11) are integrally formed.

6. The vacuum pump assembly (100) according to claim 2, characterized in that: A sealing member is provided between the flange (31) and the pump body (22) of the fore-stage pump. A groove is formed on the end surface of the flange (31) facing the fore-stage pump (20), and the sealing member is arranged in the groove.

7. The vacuum pump assembly (100) according to claim 1, characterized in that: The main pump (10) is a Roots pump, and the front-stage pump (20) is a multi-stage vacuum pump.

8. An exhaust gas treatment system, characterized in that: It comprises the vacuum pump assembly (100) as claimed in any one of claims 1 to 7.

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