Quartz boat deformation detection device

Abstract

The utility model relates to the technical field of solar cell manufacturing, in particular to a quartz boat deformation detection device. The device comprises a rack, and a boat tooth detection module, a boat rod detection module and a boat end surface detection module which are arranged on the rack, wherein the rack is provided with a detection station for placing a quartz boat to be detected; the boat tooth detection module is used for detecting the shape of the boat tooth of the to-be-detected quartz boat; the boat rod detection module is used for detecting the shape of a boat rod of the to-be-detected quartz boat; the boat end face detection modules are arranged at the two ends of the detection station in the first direction and used for detecting the shape of the boat end face of the to-be-detected quartz boat. The first direction is the axial direction of a boat rod of the to-be-detected quartz boat. According to the device, automatic detection of the to-be-detected quartz boat can be realized, multi-aspect detection of the to-be-detected quartz boat can be realized, the detection efficiency is relatively high, and the detection result is accurate and reliable, so that the damaged quartz boat can be found in time, and the productivity and the yield of a production line are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, in particular to a quartz boat deformation detection device. Background Art

[0002] During the high-temperature process of battery cells, the quartz boat will be deformed by the heat. If the deformation exceeds a certain degree, it will cause abnormalities such as silicon wafer tipping, misalignment, and fragmentation, seriously affecting the normal automated production, delaying production capacity and accelerating equipment wear.

[0003] Currently, manual observation is usually used to detect whether the quartz boat is deformed. The existing method is not only time-consuming and labor-intensive, but also manually unable to determine the degree of deformation of the quartz boat in real time. Failure to promptly detect a damaged quartz boat will cause damage to the silicon wafer, thereby affecting production capacity and yield. Utility Model Content

[0004] The utility model aims to provide a quartz boat deformation detection device to solve the technical problem in the prior art that the damaged quartz boat cannot be discovered in time, resulting in damage to silicon wafers, thereby affecting production capacity and yield.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A quartz boat deformation detection device comprises a frame, and a boat tooth detection module, a boat rod detection module and a boat end surface detection module mounted on the frame, wherein:

[0007] The frame is provided with a testing station for placing the quartz boat to be tested;

[0008] The boat tooth detection module is used to detect the shape of the boat teeth of the quartz boat to be inspected; the boat rod detection module is used to detect the shape of the boat rod of the quartz boat to be inspected; the boat end face detection module is arranged at both ends of the inspection station along the first direction, and is used to detect the shape of the boat end face of the quartz boat to be inspected; the first direction is the axial direction of the boat rod of the quartz boat to be inspected.

[0009] Furthermore, the boat tooth detection module includes a first image acquisition component and a second image acquisition component, wherein:

[0010] The first image acquisition component is used to acquire an image of the boat rod above the quartz boat to be inspected;

[0011] The second image acquisition component is used to acquire the image of the boat rod below the quartz boat to be inspected.

[0012] Further, the first image acquisition assembly includes two first line scan cameras, each of which is suspended above the detection station and slidably disposed on the frame along the first direction;

[0013] And / or, the number of the second image acquisition components is two groups, and the two groups of the second image acquisition components are respectively arranged on opposite sides of the inspection station; each group of the second image acquisition components includes a second line scan camera, and the second line scan camera is slidably arranged on the frame along the first direction.

[0014] Furthermore, the first image acquisition component also includes a first light source, and the first light source is arranged below the detection station.

[0015] Furthermore, the second image acquisition component also includes a third light source, and the third light source is connected to the second line scan camera.

[0016] Furthermore, the boat pole detection module includes a first area array camera, and the first area array camera is suspended above the detection station.

[0017] Furthermore, the boat end surface detection module includes two groups of third image acquisition components, which are respectively arranged at opposite ends of the detection station along the first direction and are respectively used to capture images of opposite ends of the quartz boat to be inspected.

[0018] Furthermore, each group of the third image acquisition components includes a second area array camera.

[0019] Furthermore, each group of the third image acquisition components also includes a second light source, and the second light source is arranged around the periphery of the second area array camera.

[0020] Furthermore, a conveying platform is provided on the frame, and the detection station is arranged on the conveying platform.

[0021] Beneficial effects of the utility model:

[0022] The utility model provides a quartz boat deformation detection device, comprising a frame, and a boat tooth detection module, a boat rod detection module and a boat end face detection module installed on the frame, wherein: a detection station for placing a quartz boat to be detected is arranged on the frame; the boat tooth detection module is used to detect the shape of the boat teeth of the quartz boat to be detected; the boat rod detection module is used to detect the shape of the boat rod of the quartz boat to be detected; the boat end face detection module is arranged at both ends of the detection station along a first direction, and is used to detect the shape of the boat end face of the quartz boat to be detected; the first direction is the axial direction of the boat rod of the quartz boat to be detected.

[0023] The quartz boat deformation detection device provided in this application can realize the automatic detection of the quartz boat to be inspected, and can perform multi-faceted detection on the quartz boat to be inspected, which not only has high detection efficiency, but also has accurate and reliable detection results. After the above device is applied to the production line, it can perform streamlined detection on the quartz boats on the production line during the working process, so that damaged quartz boats can be found in time to prevent the damaged quartz boats from damaging silicon wafers, thereby improving the production capacity and yield of the production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 A schematic diagram of the three-dimensional structure of a quartz boat deformation detection device provided in an embodiment of the utility model;

[0026] Figure 2 A schematic diagram of the positional relationship between each detection module and the quartz boat to be detected provided in an embodiment of the utility model;

[0027] Figure 3 A schematic diagram of the working process of each detection module provided in an embodiment of the utility model.

[0028] icon:

[0029] 1-frame; 11-conveying platform;

[0030] 2-boat tooth detection module; 21-first image acquisition component; 211-first line scan camera; 212-first light source; 213-first slide rail component; 22-second image acquisition component; 221-second line scan camera; 222-third light source; 223-second slide rail component;

[0031] 3-Boat pole detection module; 31-First array camera;

[0032] 4-boat end surface detection module; 41-third image acquisition component; 411-second array camera; 412-second light source;

[0033] 100-Quartz boat to be inspected. DETAILED DESCRIPTION

[0034] The technical solution of the utility model will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] It should be noted that in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] It should be noted that in the description of the present invention, the terms "connection" and "installation" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or connected through an intermediate medium; it can be a mechanical connection or an electrical connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] The utility model embodiment provides a quartz boat deformation detection device, referring to Figure 1 The device comprises a frame 1, and a boat tooth detection module 2, a boat rod detection module 3 and a boat end surface detection module 4 mounted on the frame 1, wherein:

[0038] The frame 1 is provided with a testing station for placing the quartz boat 100 to be tested;

[0039] The boat tooth detection module 2 is used to detect the shape of the boat teeth of the quartz boat 100 to be inspected; the boat rod detection module 3 is used to detect the shape of the boat rod of the quartz boat 100 to be inspected; the boat end face detection module 4 is arranged at both ends of the inspection station along the first direction, and is used to detect the shape of the boat end face of the quartz boat 100 to be inspected; the first direction is the axial direction of the boat rod of the quartz boat 100 to be inspected.

[0040] The working process of the above-mentioned device is: first, the quartz boat 100 to be inspected is placed at the inspection station; then, the boat tooth detection module 2, the boat rod detection module 3 and the boat end face detection module 4 detect the quartz boat 100 to be inspected in sequence or simultaneously, so as to obtain the shapes of the boat teeth, boat rod and boat end face of the quartz boat 100 to be inspected; by identifying and analyzing the detection results of the boat tooth detection module 2, the boat rod detection module 3 and the boat end face detection module 4, it can be determined whether the boat teeth, boat rod and boat end face of the quartz boat 100 to be inspected have defects and deformations.

[0041] The quartz boat deformation detection device provided in the present application can realize the automatic detection of the quartz boat 100 to be inspected, and can perform multi-faceted detection on the quartz boat 100 to be inspected, not only with high detection efficiency, but also with accurate and reliable detection results. After the above device is applied to the production line, it can perform streamlined detection on the quartz boats on the production line during the working process, so that damaged quartz boats can be found in time to prevent the damaged quartz boats from damaging silicon wafers, thereby improving the production capacity and yield of the production line.

[0042] Continue to refer to Figure 1 , a conveying platform 11 is provided on the frame 1, and the inspection station is provided on the conveying platform 11. The conveying platform 11 is used to convey the quartz boat, and its conveying method can be a guide rail type, a belt type, a chain type, etc., which are not limited here. Under the action of the conveying platform 11, the quartz boat can be conveyed to the inspection station for inspection, and the quartz boat after the inspection is completed can be conveyed to the next process to realize the streamlined operation.

[0043] In this embodiment, a photoelectric sensor is provided on the frame 1, and the photoelectric sensor is used to detect whether the quartz boat 100 to be inspected reaches the inspection position. Optionally, the photoelectric sensor can be a reflective sensor or a through-beam sensor.

[0044] Furthermore, the boat tooth detection module 2 includes a first image acquisition component 21 and a second image acquisition component 22, wherein:

[0045] The first image acquisition component 21 is used to acquire an image of the boat rod above the quartz boat 100 to be inspected;

[0046] The second image acquisition component 22 is used to acquire the image of the boat rod below the quartz boat 100 to be inspected.

[0047] Specifically, refer to Figure 2 , the first image acquisition component 21 includes:

[0048] Two first line scan cameras 211, each of which is suspended above the inspection station and slidably disposed on the frame 1 along a first direction;

[0049] A first light source 212 is disposed below the detection station;

[0050] The first slide rail assembly 213 is installed on the frame 1 , and a power output end thereof is connected to the first line scan camera 211 .

[0051] In the above structure, the two first line scan cameras 211 are respectively used to obtain images of the two boat rods above the quartz boat 100 to be inspected; the first light source 212 is used for fill light to improve the clarity of the imaging; the first slide rail assembly 213 is used to drive the two first line scan cameras 211 to move back and forth along the first direction, so as to scan and photograph the two boat rods above the quartz boat 100 to be inspected.

[0052] Optionally, the first slide rail assembly 213 is an electric linear slide rail.

[0053] Continue to refer to Figure 2 The length direction of the first light source 212 is parallel to the first direction, and its two ends are fixed to the frame 1 by fasteners; the number of the first light sources 212 can be two, and when working, the two first light sources 212 respectively fill in the two sides of the quartz boat 100 to be inspected.

[0054] Reference Figure 1 and Figure 2 , the number of the second image acquisition components 22 is two groups, and the two groups of second image acquisition components 22 are respectively arranged on opposite sides of the detection station; each group of second image acquisition components 22 includes:

[0055] The second line scan camera 221 is slidably disposed on the frame 1 along the first direction;

[0056] A third light source 222 connected to the second line scan camera 221;

[0057] The second slide rail assembly 223 is installed on the frame 1 , and a power output end thereof is connected to the second line scan camera 221 and the third light source 222 .

[0058] In the above structure, the length direction of the third light source 222 is parallel to the height direction of the quartz boat 100 to be inspected, and the third light source 222 is connected to the second line scan camera 221, both of which are installed at the power output end of the second slide rail assembly 223. When working, the two second line scan cameras 221 are respectively used to obtain images of the two boat rods under the quartz boat 100 to be inspected; the third light source 222 is used for fill light to improve the clarity of imaging; the second slide rail assembly 223 is used to drive the first line scan camera 211 and the third light source 222 to reciprocate along the first direction, so as to scan and photograph the two boat rods under the quartz boat 100 to be inspected.

[0059] Optionally, the second slide rail assembly 223 is an electric linear slide rail.

[0060] During operation, the device provided in the present application uses four line scan cameras to respectively photograph the four boat rods of the quartz boat 100 to be inspected, so that the boat teeth on each boat rod of the quartz boat 100 to be inspected are imaged independently, which reduces the difficulty of image recognition and analysis, thereby improving the detection accuracy.

[0061] Continue to refer to Figure 1 The boat pole detection module 3 includes a first area array camera 31, and the first area array camera 31 is suspended above the detection station.

[0062] In this embodiment, the first area array camera 31 and the first line scan camera 211 share a light source.

[0063] Furthermore, the boat end surface detection module 4 includes two groups of third image acquisition components 41, which are respectively arranged at opposite ends of the detection station along the first direction and are used to respectively capture images of opposite ends of the quartz boat 100 to be inspected.

[0064] Specifically, each group of third image acquisition components 41 includes:

[0065] A second array camera 411;

[0066] The second light source 412 is disposed around the second area array camera 411 .

[0067] In this embodiment, the second light source 412 is specifically a surface light source with a through hole in the center, and the second area array camera 411 can capture the end surface image of the quartz boat 100 to be inspected through the through hole in the center of the second light source 412 .

[0068] Reference Figure 3 , a working process of the above device is as follows:

[0069] First, the conveying platform 11 conveys the quartz boat 100 to be inspected to the inspection station;

[0070] After the quartz boat 100 to be inspected is in place, the two first line scan cameras 211 and the two second line scan cameras 221 move back and forth along the first direction to respectively collect images of the four boat rods of the quartz boat 100 to be inspected; by identifying and analyzing the images taken by the line scan cameras, the boat tooth spacing and boat tooth defect defects can be detected;

[0071] Next, the first area array camera 31 and the two second area array cameras 411 respectively capture the front image and the two end faces of the quartz boat 100 to be inspected; by identifying and analyzing the images captured by the first area array camera 31, the degree of deformation and distortion of the boat rod can be detected; by identifying and analyzing the images captured by the second area array cameras 411, the deformation and defect defects of the boat end faces can be detected.

[0072] In summary, the device provided in the present application uses four 4K line scan cameras to complete the acquisition of the boat tooth images of the four boat rods, so as to detect the boat tooth spacing and boat tooth defect defects; uses a 1200W area array camera to complete the acquisition of the front image of the quartz boat 100 to be inspected, and detects the deformation and distortion degree of the boat rod by calculating the spacing and straightness of the boat rods; uses two 600W area array cameras to complete the acquisition of the two end surface images, and detects the deformation and defect defects of the boat end surfaces.

[0073] The device provided in the present application realizes automated detection of the quartz boat 100 to be inspected through the coordinated cooperation of various detection modules, thereby improving the accuracy of detection, reducing the impact of the deformation of the quartz boat on the output and yield, and reducing manual labor intensity.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A quartz boat deformation detection device, characterized in that: The invention comprises a frame (1), and a boat tooth detection module (2), a boat rod detection module (3) and a boat end surface detection module (4) installed on the frame (1), wherein: The frame (1) is provided with a testing station for placing the quartz boat (100) to be tested; The boat tooth detection module (2) is used to detect the shape of the boat teeth of the quartz boat (100) to be inspected; the boat rod detection module (3) is used to detect the shape of the boat rod of the quartz boat (100) to be inspected; the boat end surface detection module (4) is arranged at both ends of the inspection station along a first direction, and is used to detect the shape of the boat end surface of the quartz boat (100) to be inspected; the first direction is the axial direction of the boat rod of the quartz boat (100) to be inspected.

2. The quartz boat deformation detection device according to claim 1, characterized in that: The boat tooth detection module (2) comprises a first image acquisition component (21) and a second image acquisition component (22), wherein: The first image acquisition component (21) is used to acquire an image of the boat rod above the quartz boat (100) to be inspected; The second image acquisition component (22) is used to acquire an image of the boat rod below the quartz boat (100) to be inspected.

3. The quartz boat deformation detection device according to claim 2, characterized in that: The first image acquisition component (21) comprises two first line scan cameras (211), each of the first line scan cameras (211) being suspended above the detection station and slidably disposed on the frame (1) along the first direction; And / or, the number of the second image acquisition components (22) is two groups, and the two groups of the second image acquisition components (22) are respectively arranged on opposite sides of the detection station; each group of the second image acquisition components (22) comprises a second line scan camera (221), and the second line scan camera (221) is slidably arranged on the frame (1) along the first direction.

4. The quartz boat deformation detection device according to claim 3, characterized in that: The first image acquisition component (21) further comprises a first light source (212), and the first light source (212) is arranged below the detection station.

5. The quartz boat deformation detection device according to claim 3, characterized in that: The second image acquisition component (22) further comprises a third light source (222), and the third light source (222) is connected to the second line scan camera (221).

6. The quartz boat deformation detection device according to claim 1, characterized in that: The boat pole detection module (3) comprises a first area array camera (31), and the first area array camera (31) is suspended above the detection station.

7. The quartz boat deformation detection device according to claim 1, characterized in that: The boat end surface detection module (4) comprises two groups of third image acquisition components (41), which are respectively arranged at two opposite ends of the detection station along the first direction and are respectively used to capture images of the opposite ends of the quartz boat (100) to be detected.

8. The quartz boat deformation detection device according to claim 7, characterized in that: Each group of the third image acquisition components (41) includes a second area array camera (411).

9. The quartz boat deformation detection device according to claim 8, characterized in that: Each group of the third image acquisition components (41) further comprises a second light source (412), wherein the second light source (412) is arranged around the periphery of the second area array camera (411).

10. The quartz boat deformation detection device according to any one of claims 1 to 9, characterized in that: A conveying platform (11) is arranged on the frame (1), and the detection station is arranged on the conveying platform (11).

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