Auxiliary clamping structure for wafer defect detection

Abstract

The utility model discloses an auxiliary clamping structure for wafer defect detection, which comprises a limit base and a turnover mechanism, a servo motor is bolted at the bottom of the inner side of the limit base, and a replacement wheel disc is bolted at the top of the servo motor. The limiting base can limit the servo motor and the replacement wheel disc, the servo motor can be matched with the replacement wheel disc, and after the servo motor is powered on and started, the replacement wheel disc can be driven to rotate, so that the position of the turnover mechanism can be replaced, continuous detection of defect detection equipment is facilitated, an electric gear can be matched with a turnover gear, and the defect detection efficiency is improved. After the electric gear is electrified and started, the overturning gear is driven to overturn the position of the overturning clamping plate, the overturning clamping plate can be matched with the overturning limiting block to limit a wafer needing to be detected and can overturn along with the overturning gear, and the flexibility of wafer detection is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to an auxiliary clamping structure for wafer defect detection. Background Art

[0002] The auxiliary clamping structure for wafer defect detection is a structure used to provide stable clamping and support for wafers during wafer inspection in the semiconductor industry. During the semiconductor chip manufacturing process, wafers often need to undergo various inspections, such as optical inspection, chemical inspection, and electrical inspection. In order to ensure the accuracy and stability of the inspection, the wafer needs to be kept in a stable position and be evenly supported.

[0003] At present, a Chinese utility model with publication number: CN216485384U discloses a fixed clamping mechanism for a fully automatic wafer defect detection device, which relates to the technical field of wafer defect detection. In order to solve the problem that the existing wafer defect detection is not convenient for fixing the wafer, a lifting device is installed inside the fixed outer shell, and the lifting device is fixedly connected to the fixed outer shell, a fixed plate is installed on the upper end of the lifting device, a first drive motor is installed on the upper end of the fixed plate, and the first drive motor is connected to the fixed plate through a motor fixing frame, a fixed inner shell is installed on the upper end of the first drive motor, a placing table is installed on the upper end of the fixed inner shell, and the placing table is fixedly connected to the fixed inner shell, a sealing gasket is installed on the upper end of the placing table, and the sealing gasket is fixedly connected to the placing table.

[0004] When performing defect detection on a wafer, a detection structure is used, and an auxiliary clamping structure for wafer defect detection is one of them. However, the existing auxiliary clamping structure for wafer defect detection lacks an automatic flipping switching structure and cannot automatically flip during switching, which reduces the efficiency of wafer detection. Utility Model Content

[0005] The main purpose of the utility model is to provide an auxiliary clamping structure for wafer defect detection, aiming to solve the problem that the existing auxiliary clamping structure for wafer defect detection lacks an automatic flipping switching structure and cannot automatically flip during switching, thereby reducing the efficiency of wafer detection.

[0006] To achieve the above-mentioned purpose, the utility model proposes an auxiliary clamping structure for wafer defect detection, which includes a limit base and a flip mechanism, wherein a servo motor is bolted to the bottom of the inner side of the limit base, a replacement wheel is bolted to the top of the servo motor, an electric gear is bolted to the top of the replacement wheel, and the flip mechanism is engaged with the bottom of the output end of the electric gear;

[0007] The flipping mechanism includes a flipping clamp, a flipping gear and a flipping limit block, wherein the flipping limit block is rotatably connected to the top of the replacement wheel disc, the flipping clamp is bolted to the surface of the flipping limit block, the flipping gear is bolted to the side of the flipping clamp away from the flipping limit block, the side of the flipping gear away from the flipping clamp is rotatably connected to the replacement wheel disc, and the top of the flipping gear is meshed with the bottom of the electric gear.

[0008] Preferably, an auxiliary limiting plate is bolted to the inner side of the limiting base, and the top of the auxiliary limiting plate contacts the bottom of the replacement wheel disc.

[0009] Preferably, a reinforcement sleeve is bolted to the top of the servo motor, and the top of the reinforcement sleeve is bolted to the bottom of the replacement wheel disc.

[0010] Preferably, a weight-reducing groove is provided on the surface of the electric gear, and the weight-reducing groove is annular.

[0011] Preferably, the surface of the replacement wheel disc is rotatably connected with an auxiliary swivel, and the surface of the auxiliary swivel contacts the inner side of the limiting base.

[0012] Preferably, a protective cover is bolted to the top of the replacement wheel disc, and the bottom of the protective cover is bolted to the output end of the top of the servo motor.

[0013] Preferably, a reset clamping plate is bolted to a side of the replacement wheel disc close to the flip clamping plate, and a surface of the reset clamping plate contacts a surface of the flip clamping plate.

[0014] Preferably, a limiting ring plate is clamped on the inner side of the flip clamp plate, and the inner side of the limiting ring plate is engraved with anti-slip patterns.

[0015] In the technical solution of the utility model, by setting a limit base and a flipping mechanism, the limit base can limit the servo motor and the replacement wheel, the servo motor can cooperate with the replacement wheel, and after the servo motor is powered on and started, it can drive the replacement wheel to rotate, so that the position of the flipping mechanism can be replaced, so as to facilitate continuous detection of the defect detection equipment, the electric gear can cooperate with the flipping gear, and after the electric gear is powered on and started, it drives the flipping gear to flip the position of the flipping clamp, the flipping clamp can cooperate with the flipping limit block to limit the wafer to be detected, and can flip with the flipping gear, thereby improving the flexibility of wafer detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the structure of an embodiment of the utility model;

[0018] Figure 2 This is a schematic diagram of the auxiliary limiting plate structure of an embodiment of the utility model;

[0019] Figure 3 This is a schematic diagram of the auxiliary swivel structure of an embodiment of the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of a reset card board according to an embodiment of the utility model;

[0021] Figure 5 It is a schematic diagram of the structure of the flipping mechanism of an embodiment of the utility model.

[0022] Explanation of the accompanying figures: 1. Limit base; 2. Servo motor; 3. Replacement wheel; 4. Electric gear; 5. Flip mechanism; 501. Flip splint; 502. Flip gear; 503. Flip limit block; 6. Auxiliary limit plate; 7. Reinforcement sleeve; 8. Weight reduction groove; 9. Auxiliary swivel; 10. Protective cover; 11. Reset card plate; 12. Limit ring plate.

[0023] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0026] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0027] Furthermore, the technical solutions of the various embodiments of the present invention may be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in the field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0028] The utility model provides an auxiliary clamping structure for wafer defect detection, aiming to solve the problem that the existing auxiliary clamping structure for wafer defect detection lacks an automatic flipping switching structure and cannot automatically flip during switching, thereby reducing the efficiency of wafer detection.

[0029] like Figure 1-5 As shown, an auxiliary clamping structure for wafer defect detection provided by an embodiment of the utility model comprises a limiting base 1 and a flipping mechanism 5, a servo motor 2 is bolted to the bottom of the inner side of the limiting base 1, a replacement wheel 3 is bolted to the top of the servo motor 2, an electric gear 4 is bolted to the top of the replacement wheel 3, and the flipping mechanism 5 is meshed at the bottom of the output end of the electric gear 4;

[0030] The flipping mechanism 5 includes a flipping splint 501, a flipping gear 502 and a flipping limit block 503. The flipping limit block 503 is rotatably connected to the top of the replacement wheel disc 3. The flipping splint 501 is bolted to the surface of the flipping limit block 503. The flipping gear 502 is bolted to the side of the flipping splint 501 away from the flipping limit block 503. The side of the flipping gear 502 away from the flipping splint 501 is rotatably connected to the replacement wheel disc 3. The top of the flipping gear 502 is meshed with the bottom of the electric gear 4.

[0031] In the technical solution of the utility model, by setting a limit base 1 and a flip mechanism 5, the limit base 1 can limit the servo motor 2 and the replacement wheel 3, the servo motor 2 can cooperate with the replacement wheel 3, and after the servo motor 2 is powered on and started, it can drive the replacement wheel 3 to rotate, so that the position of the flip mechanism 5 can be replaced, so as to facilitate continuous detection of defect detection equipment, the electric gear 4 can cooperate with the flip gear 502, and after the electric gear 4 is powered on and started, it drives the flip gear 502 to flip the position of the flip clamp 501, and the flip clamp 501 can cooperate with the flip limit block 503 to limit the wafer to be detected, and can be flipped along with the flip gear 502, thereby improving the flexibility of wafer detection.

[0032] Please refer to Figure 2 The inner side of the limiting base 1 is bolted with an auxiliary limiting plate 6, and the top of the auxiliary limiting plate 6 contacts the bottom of the replacement wheel disc 3. In this embodiment, by providing the auxiliary limiting plate 6, it can cooperate with the limiting base 1 to limit the position of the replacement wheel disc 3, further increasing the stability of the replacement wheel disc 3 when rotating.

[0033] For further information, please refer to Figure 2 The top of the servo motor 2 is bolted with a reinforcement sleeve 7, and the top of the reinforcement sleeve 7 is bolted to the bottom of the replacement wheel disc 3. In this embodiment, by providing the reinforcement sleeve 7, it can cooperate with the servo motor 2 to further reinforce the connection between the servo motor 2 and the replacement wheel disc 3, and further increase the stability of the connection between the replacement wheel disc 3 and the servo motor 2.

[0034] Please continue to refer to Figure 3 The surface of the electric gear 4 is provided with a weight-reducing groove 8, which is set to be annular. In this embodiment, by setting the weight-reducing groove 8, it can cooperate with the electric gear 4 to reduce the weight of the electric gear 4, improve the flexibility of the electric gear 4 when rotating, and the annular design is more in line with the shape of the electric gear 4.

[0035] Please refer to Figure 3 The surface of the replacement wheel disc 3 is rotatably connected with an auxiliary swivel 9, and the surface of the auxiliary swivel 9 contacts the inner side of the limiting base 1. In this embodiment, by providing the auxiliary swivel 9, it can cooperate with the replacement wheel disc 3 to assist in guiding the connection between the replacement wheel disc 3 and the limiting base 1, further increasing the stability of the auxiliary swivel 9 and the replacement wheel disc 3 when rotating.

[0036] Also, please refer to Figure 4The top of the replacement wheel disc 3 is bolted with a protective cover 10, and the bottom of the protective cover 10 is bolted to the output end of the top of the servo motor 2. In this embodiment, by providing the protective cover 10, it can be coordinated with the replacement special ticket to auxiliary reinforce the connection between the replacement turntable and the servo motor 2, further increasing the stability of the connection between the servo motor 2 and the replacement wheel disc 3.

[0037] Also, please refer to Figure 4 A reset clamping plate 11 is bolted to one side of the replacement wheel disc 3 close to the flip clamping plate 501, and the surface of the reset clamping plate 11 contacts the surface of the flip clamping plate 501. In this embodiment, by providing the reset clamping plate 11, it can cooperate with the replacement wheel disc 3 to limit the connection between the replacement wheel disc 3 and the flip clamping plate 501, further increasing the stability of the limit position of the flip clamping plate 501 after flipping in the replacement wheel disc 3.

[0038] Also, please refer to Figure 5 The inner side of the flip clamp 501 is clamped with a limit ring plate 12, and the inner side of the limit ring plate 12 is engraved with anti-skid patterns. In this embodiment, by providing the limit ring plate 12, it can cooperate with the flip clamp 501 to assist in limiting the position of the wafer clamped in the flip clamp 501, and the anti-skid patterns can further increase the stability of the limit ring plate 12 when clamping the wafer.

[0039] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the concept of the utility model, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. An auxiliary clamping structure for wafer defect detection, It is characterized in that The auxiliary clamping structure for wafer defect detection comprises a limiting base (1) and a flipping mechanism (5), wherein a servo motor (2) is bolted to the bottom of the inner side of the limiting base (1), a replacement wheel disc (3) is bolted to the top of the servo motor (2), an electric gear (4) is bolted to the top of the replacement wheel disc (3), and the flipping mechanism (5) is meshed with the bottom of the output end of the electric gear (4); The flipping mechanism (5) comprises a flipping clamp (501), a flipping gear (502) and a flipping limit block (503); the flipping limit block (503) is rotatably connected to the top of the replacement wheel disc (3); the flipping clamp (501) is bolted to the surface of the flipping limit block (503); the flipping gear (502) is bolted to a side of the flipping clamp (501) away from the flipping limit block (503); the side of the flipping gear (502) away from the flipping clamp (501) is rotatably connected to the replacement wheel disc (3); and the top of the flipping gear (502) is meshed with the bottom of the electric gear (4).

2. The auxiliary clamping structure for wafer defect detection according to claim 1, It is characterized in that An auxiliary limiting plate (6) is bolted to the inner side of the limiting base (1), and the top of the auxiliary limiting plate (6) contacts the bottom of the replacement wheel disc (3).

3. The auxiliary clamping structure for wafer defect detection according to claim 1, It is characterized in that A reinforcement sleeve (7) is bolted to the top of the servo motor (2), and the top of the reinforcement sleeve (7) is bolted to the bottom of the replacement wheel disc (3).

4. The auxiliary clamping structure for wafer defect detection according to claim 1, It is characterized in that A weight-reducing groove (8) is provided on the surface of the electric gear (4), and the weight-reducing groove (8) is designed to be annular.

5. The auxiliary clamping structure for wafer defect detection according to claim 1, It is characterized in that The surface of the replacement wheel disc (3) is rotatably connected to an auxiliary rotating ring (9), and the surface of the auxiliary rotating ring (9) is in contact with the inner side of the limiting base (1).

6. The auxiliary clamping structure for wafer defect detection according to claim 1, It is characterized in that A protective cover (10) is bolted to the top of the replacement wheel disc (3), and the bottom of the protective cover (10) is bolted to the output end of the top of the servo motor (2).

7. The auxiliary clamping structure for wafer defect detection according to claim 1, It is characterized in that A reset clamping plate (11) is bolted to one side of the replacement wheel disc (3) close to the flip clamping plate (501), and the surface of the reset clamping plate (11) is in contact with the surface of the flip clamping plate (501).

8. The auxiliary clamping structure for wafer defect detection according to claim 1, It is characterized in that The inner side of the flip clamp (501) is clamped with a limit ring plate (12), and the inner side of the limit ring plate (12) is engraved with anti-slip patterns.

Images