Waste liquid recovery device

Abstract

The utility model belongs to the technical field of waste liquid recovery, and discloses a waste liquid recovery device. The device comprises a recovery pipeline, a pump body for providing suction force for the recovery pipeline, a recovery barrel, a sensor for monitoring overflow of waste liquid in the recovery barrel, a leaked liquid collection box for receiving the overflow waste liquid and a processor, the recycling barrel is externally connected with a waste liquid source through a recycling pipeline; and the pump body and the sensor are respectively connected with the processor. The waste liquid recovery device can automatically recover waste liquid, so that the safety of recovery operation is improved; the situation that waste liquid in the recycling bin overflows is reduced, meanwhile, the overflowed waste liquid can be effectively collected, an alarm can be given for abnormal conditions in the recycling process, and the pollution problem of a work site is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of waste liquid recovery, and particularly relates to a waste liquid recovery device. Background Art

[0002] In the wafer processing process, etching is an essential process. The etching liquid contains various chemicals and usually cannot be discharged directly. It needs to be recycled and treated uniformly. The existing waste liquid recycling method is to manually recycle the waste liquid in the etching equipment into a recycling bucket. However, this recycling method has the following disadvantages:

[0003] (1) The waste liquid is corrosive, and there are safety risks for operators during the recycling process;

[0004] (2) During the recycling process, people need to pay attention to the waste liquid recycling situation, which consumes manpower;

[0005] (3) During the manual recycling process, waste liquid in the recycling barrel may easily overflow and pollute the work site. Utility Model Content

[0006] In order to solve the above problems, the utility model provides a waste liquid recovery device, which can automatically recover the waste liquid and prevent the waste liquid from overflowing and causing pollution to the work site.

[0007] A waste liquid recovery device comprises a recovery pipeline, a pump body providing suction for the recovery pipeline, a recovery barrel, a sensor for monitoring waste liquid overflow from the recovery barrel, a leakage collection box for receiving overflowed waste liquid, and a processor; the recovery barrel is connected to an external waste liquid source via the recovery pipeline; the pump body and the sensor are respectively connected to the processor.

[0008] This solution avoids on-site contamination by setting up a leakage collection box. Specifically, the waste liquid from the waste liquid source is automatically transported to the recovery bucket through the recovery pipeline and the pump body. The sensor monitors the overflow of the waste liquid, and the processor can control the pump body to stop according to the waste liquid overflow signal transmitted by the sensor; when the waste liquid overflows, it can be collected through the leakage collection box.

[0009] Furthermore, the leakage collection box has a collection cavity at the bottom; a leakage plate is provided on the collection cavity, and a plurality of through holes communicating with the collection cavity are provided on the leakage plate; the recovery bucket is arranged on the leakage plate. In this solution, the waste liquid overflowing from the recovery bucket flows into the collection cavity through the through holes on the leakage plate.

[0010] Furthermore, the sensor includes a first sensor disposed at the inlet end of the recovery barrel and a second sensor disposed at the collection chamber. The first sensor can directly detect the liquid level in the recovery barrel, and the second sensor can determine the waste liquid condition of the collector to determine whether the waste liquid in the recovery barrel overflows; the overflow signal of any sensor is used to control the stop of waste liquid recovery, thereby avoiding the continuous overflow of waste liquid caused by misjudgment of one of the sensors.

[0011] Furthermore, the first sensor is arranged on the side wall of the leakage collection box, and the leakage plate is arranged obliquely on the collection chamber. In this solution, the inclined leakage plate allows the recovery bucket to be placed obliquely toward the side wall, thereby concentrating the location of the waste liquid overflow on the side of the recovery bucket inlet end facing the side wall, reducing the requirements for the detection sensitivity of the first sensor, so that the first sensor can sense the overflow of the waste liquid in time, reducing the risk of misjudgment by the first sensor.

[0012] Furthermore, in order to position the recovery bucket, the leakage collection box is provided with a limiting structure for limiting the wall of the recovery bucket; the limiting structure is arranged on the side wall of the leakage collection box; the limiting structure is a U-shaped limiting structure.

[0013] Furthermore, a drain valve communicating with the collection chamber is provided at the bottom of the leakage collection box, and the leakage collected in the collection chamber can be discharged through the drain valve.

[0014] Furthermore, the leakage collection box is also provided with a drainage cavity for discharging excess waste liquid in the recovery pipeline.

[0015] Furthermore, the drainage cavity is detachably arranged on the side wall of the leakage collection box.

[0016] Furthermore, the processor is connected to an alarm.

[0017] Furthermore, the leakage collection box is a square box with openings on the top and one side, which facilitates the operation of moving the recovery barrel in and out.

[0018] Compared with the prior art, one or more of the above technical solutions can achieve at least one of the following beneficial effects:

[0019] The waste liquid recovery device can automatically recover the waste liquid, thus improving the safety of the recovery operation; reducing the overflow of waste liquid from the recovery barrel, while the overflowed waste liquid can be effectively collected, and can alarm for abnormal situations during the recovery process, thus avoiding pollution problems on the work site. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 It is a partial structural schematic diagram of the waste liquid recovery device in Example 1.

[0022] In the figure, 1. leakage collection box; 11. collection chamber; 12. leakage plate; 121. through hole; 13. second sensor; 14. first sensor; 15. drain valve; 16. limit structure; 2. recovery pipeline; 3. pump body; 4. control panel. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] like Figure 1 As shown, this embodiment provides a waste liquid recovery device, including a recovery pipeline 2, a pump body 3 providing suction to the recovery pipeline 2, a recovery bucket (not shown), a sensor for monitoring the overflow of waste liquid from the recovery bucket, a leakage collection box 1 for receiving the overflowed waste liquid, and a processor; the recovery bucket is connected to an external waste liquid source through the recovery pipeline 2; the pump body 3 and the sensor are respectively connected to the processor.

[0026] In this embodiment, a leakage liquid collection box 1 is provided to collect the waste liquid overflowed from the recovery bucket. Specifically, the leakage liquid collection box 1 is a square box body with openings on the top and one side, which is convenient for moving the recovery bucket in and out.

[0027] The bottom of the leakage collection box 1 is provided with a collection chamber 11; the collection chamber 11 is provided with a leakage plate 12, and the leakage plate 12 is provided with a plurality of through holes 121 communicating with the collection chamber 11. A recovery bucket is arranged inside the leakage collection box 1 (not shown) and placed on the leakage plate 12.

[0028] The sensor comprises a first sensor 14 disposed at the inlet end of the recovery barrel and a second sensor 13 disposed at the collection chamber 11. As a preferred embodiment, the first sensor 14 is disposed on the side wall of the leakage collection box 1, and two sensors are disposed.

[0029] The leakage collection box 1 is provided with a limiting structure 16 for limiting the wall of the recovery barrel. As a specific embodiment, the limiting structure 16 is arranged on the side wall of the leakage collection box 1, and can be a U-shaped limiting structure, with one U-shaped limiting structure arranged above and below to clamp the barrel wall of the recovery barrel. The leakage plate 12 is arranged obliquely on the collection chamber 11. Specifically, the lower end of the leakage plate 12 is close to the side wall of the leakage collection box 1 where the first sensor 14 is arranged. The leakage plate 12 can be specifically arranged to be inclined 5-10 degrees to the horizontal direction, so that the recovery barrel can be placed backward; when the waste liquid overflows, it can be concentrated from the side of the side wall close to the inlet end of the recovery barrel, so that the first sensor 14 arranged on the side wall can sense it in time. In this embodiment, there are limiting structures 16 on the upper and lower sides of the back of the recovery barrel, and they are arranged on the inclined leakage plate 12, which can effectively prevent the recovery barrel from being placed in the wrong place and avoid the first sensor 14 from sensing misjudgment.

[0030] The bottom of the leakage collection box 1 is also provided with a drain valve 15 connected to the collection chamber 11, through which the leakage collected in the collection chamber 11 can be discharged. In specific implementation, the drain valve 15 can be a manual valve; or the drain valve 15 can be connected to a processor, and the processor controls the opening and closing of the drain valve 15 according to the waste liquid situation in the collection chamber 11.

[0031] The leakage collection box 1 is also provided with a drainage chamber 17 for discharging excess waste liquid in the recovery pipeline 2. As a preferred embodiment, the drainage chamber 17 is detachably arranged on the other side wall of the leakage collection box 1. When the drainage chamber 17 is full, the drainage chamber 17 can be taken out from the leakage collection box 1, and then installed after the waste liquid inside is discharged.

[0032] The processor can be arranged on the side wall of the leakage collection box 1, and the processor is connected to an alarm. During the waste liquid recovery process, the processor can control the start and stop of the pump body 3 and issue an alarm according to the signal transmitted by the sensor, such as when the recovery bucket is full of liquid or there is overflow of waste liquid in the collection chamber.

[0033] In a specific implementation process, the pump body 3 may be a diaphragm pump; the processor is a PLC, which is packaged in the control panel 4, and the recycling operation is performed through buttons on the control panel 4.

[0034] The working principle of this embodiment is as follows: the recovery bucket is placed on the leakage plate 12 from the opening direction of the leakage collection box 1, and the recovery bucket is positioned in the leakage collection box 1 through the limiting structure 16 and the tilting effect of the leakage plate 12; the waste liquid from the waste liquid source is automatically transported to the recovery bucket through the recovery pipeline 2 and the pump body 3, and the liquid level in the recovery bucket is monitored by the first sensor 14; when the liquid level in the recovery bucket reaches the target position, the processor controls the pump body 3 to stop absorbing the waste liquid;

[0035] When the recovery barrel is full, one end of the recovery pipe 2 can be placed in the drainage chamber 17. On the one hand, the excess waste liquid in the recovery pipe 2 can be discharged, and on the other hand, the drainage chamber 17 can be used to position the recovery pipe 2 when it is idle.

[0036] If the first sensor 14 misjudges due to a malfunction or other reasons, causing the recovery barrel to be filled with waste liquid, the waste liquid overflows from the recovery barrel and flows to the leakage plate 12, and leaks into the collection chamber 11 through the through hole 121, the processor can control the pump body 3 to stop working based on the waste liquid situation in the collection chamber 11 sensed by the second sensor 13.

[0037] Obviously, the above embodiments are merely examples for clearly illustrating the technical solution of the utility model, and are not intended to limit the implementation methods of the utility model. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the utility model should be included in the protection of the claims of the utility model.

Claims

1. A waste liquid recovery device, It is characterized in that The device includes a recovery pipeline, a pump body that provides suction for the recovery pipeline, a recovery bucket, a sensor for monitoring waste liquid overflow from the recovery bucket, a leakage collection box for receiving overflowed waste liquid, and a processor; the recovery bucket is connected to an external waste liquid source through the recovery pipeline; the pump body and the sensor are respectively connected to the processor.

2. The waste liquid recovery device according to claim 1, It is characterized in that The bottom of the leakage collection box is provided with a collection cavity; the collection cavity is provided with a leakage plate, and the leakage plate is provided with a plurality of through holes communicating with the collection cavity; the recovery barrel is arranged on the leakage plate.

3. The waste liquid recovery device according to claim 2, It is characterized in that The sensor comprises a first sensor arranged at the inlet end of the recovery barrel and a second sensor arranged at the collection chamber.

4. The waste liquid recovery device according to claim 3, It is characterized in that The first sensor is arranged on the side wall of the leakage collection box, and the leakage plate is arranged obliquely on the collection chamber.

5. The waste liquid recovery device according to claim 1, It is characterized in that The leakage collection box is provided with a limiting structure for limiting the wall of the recovery barrel; the limiting structure is arranged on the side wall of the leakage collection box; the limiting structure is a U-shaped limiting structure.

6. The waste liquid recovery device according to claim 2, It is characterized in that The bottom of the leakage collection box is also provided with a drain valve communicated with the collection chamber.

7. The waste liquid recovery device according to claim 1, It is characterized in that The leakage liquid collection box is also provided with a liquid discharge cavity for discharging excess waste liquid in the recovery pipeline.

8. The waste liquid recovery device according to claim 7, It is characterized in that The liquid drainage cavity is detachably arranged on the side wall of the leakage collection box.

9. The waste liquid recovery device according to claim 1, It is characterized in that The processor is connected to the alarm.

10. The waste liquid recovery device according to any one of claims 1 to 9, It is characterized in that The leakage liquid collection box is a square box body with openings on the top and one side.

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