Transmission device, conveying device and vacuum equipment

Abstract

The utility model relates to the technical field of transmission of vacuum equipment, in particular to a transmission device, a conveying device and vacuum equipment, and solves the problem of high leakage risk of the vacuum equipment due to more holes in a cavity of the vacuum equipment. The transmission device comprises a power input structure, a first transmission structure and at least one second transmission structure. The first end of the power input structure is located on the outer side of the cavity and connected with the power source. The first transmission structure and the second transmission structure are located in the cavity and are in transmission connection. The second end of the power input structure penetrates through the cavity, enters the cavity and is connected with the first transmission structure. The power source drives the power input structure and the first transmission structure to rotate around the first axis. According to the transmission device, multi-stage transmission in the vacuum cavity is achieved, the number of holes formed in the cavity is reduced, namely, the number of holes needing to be sealed is reduced, and the leakage risk is reduced.

Description

Technical Field

[0001] The present disclosure relates to the transmission technology field of vacuum equipment, and in particular to a transmission device, a conveying device and a vacuum equipment. Background Art

[0002] Vacuum equipment is widely used in semiconductor or photovoltaic material manufacturing. Vacuum equipment usually requires the use of various transmission structures outside and inside the vacuum cavity to achieve power transmission from outside the vacuum cavity to inside the cavity, thereby achieving functions such as material transportation and precise positioning inside the vacuum cavity.

[0003] When multiple moving structures are required in the chamber of the vacuum equipment, multiple holes need to be opened on the chamber of the vacuum equipment. The power source outside the chamber needs to drive the moving structure in the chamber to move through the transmission structure. Therefore, the transmission structure needs to pass through the hole, and the hole needs to be sealed. This results in more sealed holes on the chamber of the vacuum equipment, increasing the risk of leakage of the vacuum equipment. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a transmission device, a conveying device and a vacuum device, which solve the problem of high leakage risk of the vacuum device due to a large number of openings on the cavity of the vacuum device.

[0005] In a first aspect, an embodiment of the present disclosure provides a transmission device, which is applied to a vacuum device, wherein the vacuum device includes a cavity, and the cavity forms a vacuum chamber; wherein the transmission device includes: a power input structure, wherein a first end of the power input structure is located outside the chamber and is connected to a power source, and a second end of the power input structure passes through the cavity and enters the chamber, and under the drive of the power source, the power input structure rotates around a first axis, wherein the first axis coincides with the axis of the power input structure; a first transmission structure, which is arranged in the chamber and is connected to the second end of the power input structure, and the first transmission structure rotates around the first axis driven by the power input structure; and at least one second transmission structure, which is arranged in the chamber and is transmission-connected to the first transmission structure and moves driven by the first transmission structure.

[0006] In some embodiments, the transmission connection between the second transmission structure and the first transmission structure includes at least one of the following connections: belt transmission, chain transmission, and gear transmission.

[0007] In some embodiments, the transmission connection between the second transmission structure and the first transmission structure includes belt drive; wherein the first transmission structure includes: a first shaft, connected to the second end of the power input structure; at least one first pulley, mounted on the first shaft and rotating with the first shaft; wherein the second transmission structure includes: a first conveyor belt, wound around one of the first pulleys; at least one second pulley, the first conveyor belt is wound around one of the second pulleys, so as to utilize the first conveyor belt to transmit the rotation of the first pulley to the second pulley; a second shaft, connected to the second pulley, and rotating with the second pulley.

[0008] In some embodiments, the transmission device further includes: a tensioning structure abutting against the first conveyor belt and configured to tension the first conveyor belt.

[0009] In some embodiments, the tensioning structure includes: a support member, which is fixedly arranged relative to the cavity; a rotating member, the first end of which is rotatably connected to the support member, and the rotating member has a protrusion; an adjusting member, the first end of which is threadedly connected to the second end of the rotating member, and the second end of the adjusting member is abutted against the support member; wherein the pressing force of the protrusion on the first conveyor belt is achieved by adjusting the distance between the second end of the adjusting member and the second end of the rotating member.

[0010] In some embodiments, the first conveyor belt is made of metal.

[0011] In some embodiments, the transmission device further includes: a third transmission structure, which is disposed in the chamber, is transmission-connected to the second transmission structure, and moves driven by the second transmission structure.

[0012] In some embodiments, there are multiple second pulleys; wherein the third transmission structure includes: a second conveyor belt, wound around another second pulley; at least one third pulley, the second conveyor belt is wound around one of the third pulleys, so as to utilize the second conveyor belt to transmit the rotation of the second pulley to the third pulley; and a third shaft, connected to the third pulley and rotates with the third pulley.

[0013] In some embodiments, the power input structure includes: a magnetic fluid, and the magnetic fluid is sealed and connected to the cavity.

[0014] In a second aspect, an embodiment of the present disclosure provides a conveying device, which is applied to a vacuum device, wherein the vacuum device includes a cavity, and the cavity forms a vacuum chamber; wherein the conveying device includes: a transmission device as described in the first aspect, which enters the chamber from the outside of the chamber through the cavity; and a carrier, which is connected to a part of the transmission device located in the chamber and moves under the drive of the transmission device.

[0015] In a third aspect, an embodiment of the present disclosure provides a vacuum device, comprising: a cavity, the cavity forming a vacuum chamber; and a conveying device as described in the second aspect, configured to convey materials in the chamber.

[0016] A transmission device provided in an embodiment of the present disclosure is applied to vacuum equipment. The vacuum equipment includes a cavity, which forms a vacuum chamber. The transmission device includes: a power input structure, a first transmission structure and at least one second transmission structure. The first end of the power input structure is located outside the chamber and is connected to a power source. The second end of the power input structure passes through the cavity and enters the chamber. Driven by the power source, the power input structure rotates around a first axis. The first axis coincides with the axis of the power input structure. The first transmission structure is arranged in the chamber and connected to the second end of the power input structure. The first transmission structure rotates around the first axis driven by the power input structure. At least one second transmission structure is arranged in the chamber, connected to the first transmission structure, and moves under the drive of the first transmission structure. The power input structure and the first transmission structure realize the transmission of power from the outside of the cavity to the chamber, and the first transmission structure and the at least one second transmission structure realize the multi-stage transmission of power in the chamber. The transmission device realizes multi-stage transmission in the vacuum chamber, reduces the number of openings on the cavity, that is, reduces the number of holes that need to be sealed, and reduces the manufacturing difficulty, manufacturing cost and leakage risk of the vacuum equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Shown is a schematic structural diagram of a transmission device provided in one embodiment of the present disclosure.

[0018] Figure 2 Shown is a schematic structural diagram of a transmission device provided in another embodiment of the present disclosure.

[0019] Figure 3 Shown is a schematic structural diagram of a transmission device provided in yet another embodiment of the present disclosure.

[0020] Figure 4 Shown is a schematic structural diagram of a tensioning structure provided in one embodiment of the present disclosure.

[0021] Figure 5 Shown is a schematic structural diagram of a vacuum device provided in one embodiment of the present disclosure.

[0022] Reference numerals:

[0023] 1. Conveying device; 10. Transmission device; 100. Power input structure; 110. First end of the power input structure; 120. Second end of the power input structure; 130. Axis of the power input structure; 140. First axis; 200. First transmission structure; 210. First shaft; 220. First pulley; 230. First shaft seat; 240. First roller; 300. Second transmission structure; 310. First conveyor belt; 320. Second pulley; 330. Second shaft; 340. Second shaft seat; 350. Second roller; 400. Tensioning structure; 420. Rotating member; 421 0. First end of rotating member; 4220. Protrusion; 4221. Axle; 4222. Rotating wheel; 4230. Second end of rotating member; 430. Adjusting member; 4310. First end of adjusting member; 4320. Second end of adjusting member; 4330. First threaded rod; 4340. Nut; 440. Second threaded rod; 500. Third transmission structure; 510. Second conveyor belt; 520. Third pulley; 530. Third shaft; 540. Third shaft seat; 550. Third roller; 600. Fourth transmission structure; 20. Carrier; 3. Vacuum equipment; 30. Cavity; 31. Chamber. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0025] Vacuum equipment is widely used in semiconductor or photovoltaic material manufacturing. Vacuum equipment usually requires the use of various transmission structures outside and inside the vacuum cavity to achieve power transmission from outside the vacuum cavity to inside the cavity, thereby achieving functions such as material transportation and precise positioning inside the vacuum cavity.

[0026] When multiple moving structures are required in the chamber of the vacuum equipment, multiple holes need to be opened on the chamber of the vacuum equipment. The power source outside the chamber needs to drive the moving structure in the chamber to move through the transmission structure. Therefore, the transmission structure needs to pass through the hole, and the hole needs to be sealed. This results in more sealed holes on the chamber of the vacuum equipment, increasing the risk of leakage of the vacuum equipment.

[0027] In view of the above problems, an embodiment of the present disclosure provides a transmission device, which is applied to a vacuum device. The vacuum device includes a cavity, which forms a vacuum chamber. The transmission device includes: a power input structure, a first transmission structure and at least one second transmission structure. The first end of the power input structure is located outside the chamber and is connected to a power source. The second end of the power input structure passes through the cavity and enters the chamber. Driven by the power source, the power input structure rotates around a first axis. The first axis coincides with the axis of the power input structure. The first transmission structure is arranged in the chamber and connected to the second end of the power input structure. The first transmission structure rotates around the first axis driven by the power input structure. At least one second transmission structure is arranged in the chamber, connected to the first transmission structure, and moves under the drive of the first transmission structure. The power input structure and the first transmission structure realize the transmission of power from the outside of the cavity to the chamber, and the first transmission structure and the at least one second transmission structure realize the multi-stage transmission of power in the chamber. The transmission device realizes multi-stage transmission in the vacuum chamber, reduces the number of openings on the cavity, that is, reduces the number of holes that need to be sealed, and reduces the manufacturing difficulty, manufacturing cost and leakage risk of the vacuum device.

[0028] The specific structure of the transmission device is described below in conjunction with the embodiments.

[0029] Figure 1 Shown is a schematic structural diagram of a transmission device provided in one embodiment of the present disclosure. Figure 2 Shown is a schematic structural diagram of a transmission device provided in another embodiment of the present disclosure. Figure 3 Shown is a schematic structural diagram of a transmission device provided in yet another embodiment of the present disclosure. Figure 4 Shown is a schematic structural diagram of a tensioning structure provided in one embodiment of the present disclosure. Figure 5 Shown is a schematic structural diagram of a vacuum device provided in one embodiment of the present disclosure.

[0030] like Figures 1 to 5As shown, a transmission device 10 is applied to a vacuum device 3. The vacuum device 3 includes a cavity 30. The cavity 30 forms a vacuum chamber 31. The transmission device 10 includes: a power input structure 100, a first transmission structure 200 and at least one second transmission structure 300. The first end 110 of the power input structure 100 is located outside the chamber 31 and is connected to the power source. The second end 120 of the power input structure 100 passes through the cavity 30 and enters the chamber 31. Driven by the power source, the power input structure 100 rotates around the first axis 140. The first axis 140 coincides with the axis 130 of the power input structure 100. The first transmission structure 200 is arranged in the chamber 31. The first transmission structure 200 is connected to the second end 120 of the power input structure 100. The first transmission structure 200 rotates around the first axis 140 driven by the power input structure 100. At least one second transmission structure 300 is arranged in the chamber 31. The second transmission structure 300 is transmission-connected to the first transmission structure 200 , and moves driven by the first transmission structure 200 .

[0031] The first end 110 of the power input structure 100 is fixedly connected to the power source. The first end 110 of the power input structure 100 may be non-detachably connected to the power source by welding, bonding, etc., or the first end 110 of the power input structure 100 may be detachably connected to the power source by bolts, nuts, screws, buckles, magnetism, etc.

[0032] The power source may be a motor or other components. As long as the power input structure 100 can rotate around the first axis 140 under the drive of the power source, the present disclosure does not specifically limit the structure of the power source.

[0033] The power input structure 100 can be a magnetic fluid or other structure, as long as it can achieve a sealed connection with the cavity 30, and be connected to the first transmission structure 200 and drive the first transmission structure 200 to rotate around the first axis 140. The present disclosure does not make any specific limitations on the power input structure 100.

[0034] The first transmission structure 200 is fixedly connected to the second end 120 of the power input structure 100. The first transmission structure 200 may be non-detachably connected to the second end 120 of the power input structure 100 by welding, bonding, etc., or the first transmission structure 200 may be detachably connected to the second end 120 of the power input structure 100 by bolts, nuts, screws, buckles, magnetism, etc.

[0035] The second transmission structure 300 is transmission-connected to the first transmission structure 200 , so that power is transmitted from the first transmission structure 200 to the second transmission structure 300 .

[0036] The number of the second transmission structure 300 can be set according to the power transmission requirements in the chamber 31, and can be one, two, or more than two. The relative position of the second transmission structure 300 and the first transmission structure 200 can also be set according to the power transmission direction requirements.

[0037] For example, Figure 1 As shown, the transmission device 10 includes a power input structure 100, a first transmission structure 200 and a second transmission structure 300. The first end 110 of the power input structure 100 is located outside the chamber 31 and is connected to the power source. The second end 120 of the power input structure 100 passes through the cavity 30 into the chamber 31 and is connected to the first transmission structure 200. The second transmission structure 300 and the first transmission structure 200 are arranged opposite to each other in the vertical direction and are transmission-connected.

[0038] For example, Figure 2 As shown, the transmission device 10 includes a power input structure 100, a first transmission structure 200 and a second transmission structure 300. The second transmission structure 300 and the first transmission structure 200 are arranged opposite to each other on the same horizontal plane and are in transmission connection.

[0039] For example, Figure 3 As shown, the transmission device 10 includes a power input structure 100, a first transmission structure 200 and two second transmission structures 300. Among them, one second transmission structure 300 is arranged opposite to the first transmission structure 200 in the vertical direction and is in transmission connection. Another second transmission structure 300 is arranged opposite to the first transmission structure 200 in the same horizontal plane and is in transmission connection.

[0040] The transmission device 10 provided in the embodiment of the present disclosure is applied to a vacuum device 3. The vacuum device 3 includes a cavity 30, which forms a vacuum chamber 31. The transmission device 10 includes: a power input structure 100, a first transmission structure 200 and at least one second transmission structure 300. The first end 110 of the power input structure 100 is located outside the chamber 31 and is connected to the power source. The second end 120 of the power input structure 100 passes through the cavity 30 and enters the chamber 31. Driven by the power source, the power input structure 100 rotates around the first axis 140. The first axis 140 coincides with the axis 130 of the power input structure 100. The first transmission structure 100 is arranged in the chamber 31 and is connected to the second end 120 of the power input structure 100. The first transmission structure 200 rotates around the first axis 140 driven by the power input structure 100. At least one second transmission structure 300 is arranged in the chamber 31, is transmission-connected to the first transmission structure 200, and moves driven by the first transmission structure 200. The power input structure 100 and the first transmission structure 200 realize the transmission of power from the outside of the cavity 30 to the chamber 31, and the first transmission structure 200 and at least one second transmission structure 300 realize the multi-stage transmission of power in the chamber 31. The transmission device 10 realizes multi-stage transmission in the vacuum chamber 31, reduces the number of openings on the cavity 30, that is, reduces the number of holes that need to be sealed, and reduces the manufacturing difficulty, manufacturing cost and leakage risk of the vacuum equipment 3.

[0041] In some embodiments, the transmission connection between the second transmission structure 300 and the first transmission structure 200 includes at least one of the following connections: belt transmission, chain transmission, and gear transmission. Among them, belt transmission has the advantages of simple structure and low transmission noise.

[0042] In some embodiments, the transmission connection between the second transmission structure 300 and the first transmission structure 200 includes a belt drive.

[0043] The first transmission structure 200 includes: a first shaft 210 and at least one first pulley 220. The first shaft 210 is connected to the second end 120 of the power input structure 100. The at least one first pulley 220 is mounted on the first shaft 210 and rotates with the first shaft 210. The first shaft seat 230 is fixedly arranged relative to the cavity 30. The first shaft 210 passes through the first shaft seat 230 and is rotatably connected to the first shaft seat 230. The first shaft seat 230 can be a flange or other structures. The present disclosure does not specifically limit the structure and shape of the first shaft seat 230.

[0044] The first shaft 210 is fixedly connected to the second end 120 of the power input structure 100. The first shaft 210 may be non-detachably connected to the second end 120 of the power input structure 100 by welding, bonding, etc., or the first shaft 210 may be detachably connected to the second end 120 of the power input structure 100 by bolts, nuts, screws, buckles, magnetism, etc.

[0045] The first pulley 220 may be fixedly connected to the first shaft 210. The first pulley 220 may be non-detachably connected to the first shaft 210 by welding, bonding, etc., or the first pulley 220 may be detachably connected to the first shaft 210 by bolts, nuts, screws, buckles, magnetism, etc.

[0046] The second transmission structure 300 includes: a first conveyor belt 310, at least one second pulley 320, and a second shaft 330. The first conveyor belt 310 is wound around a first pulley 220. The first conveyor belt 310 is wound around a second pulley 320, so that the rotation of the first pulley 220 is transmitted to the second pulley 320 by the first conveyor belt 310. The second shaft 330 is connected to the second pulley 320 and rotates with the second pulley 320.

[0047] The second shaft 330 is fixedly connected to the second pulley 320. The second shaft 330 may be non-detachably connected to the second pulley 320 by welding, bonding, etc., or the second shaft 330 may be detachably connected to the second pulley 320 by bolts, nuts, screws, buckles, magnetism, etc.

[0048] The second shaft seat 340 is fixedly arranged relative to the cavity 30. The second shaft 330 passes through the second shaft seat 340 and is rotatably connected to the second shaft seat 340. The second shaft seat 340 can be a flange or other structures. The present disclosure does not specifically limit the structure and shape of the second shaft seat 340.

[0049] In some embodiments, the transmission device 10 further includes a tensioning structure 400 . The tensioning structure 400 abuts against the first conveyor belt 310 and is configured to tension the first conveyor belt 310 .

[0050] In some embodiments, Figure 4As shown, the tensioning structure 400 includes: a support member, a rotating member 420 and an adjusting member 430. The support member is fixedly arranged relative to the cavity 30. The first end 4210 of the rotating member 420 is rotatably connected to the support member. The rotating member 420 has a protrusion 4220. The first end 4310 of the adjusting member 430 is screwed to the second end 4230 of the rotating member 420. The second end 4320 of the adjusting member 430 abuts against the support member. Among them, by adjusting the distance between the second end 4320 of the adjusting member 430 and the second end 4230 of the rotating member 420, the pressing force of the protrusion 4220 on the first conveyor belt 310 is achieved. In the drawings of this embodiment, the structure of the support member is not shown.

[0051] The shape of the support member can be rectangular, L-shaped, or other polygonal or irregular shapes, as long as the first end 4210 of the rotating member 420 can be rotatably connected to the support member, and the second end 4320 of the adjusting member 430 can abut against the support member. The present disclosure does not specifically limit the shape of the support member.

[0052] The shape of the rotating member 420 can be L-shaped, or other polygonal or irregular shapes, as long as the first end 4210 of the rotating member 420 can be rotatably connected to the support member, and the first end 4310 of the adjusting member 430 is screwed to the second end 4230 of the rotating member 420. The present disclosure does not specifically limit the shape of the rotating member 420.

[0053] For example, Figure 4 As shown, the adjustment member 430 includes a first threaded rod 4330 and a nut 4340. The first end 4310 of the first threaded rod 4330 is threadedly connected to the second end 4230 of the rotating member 420. The nut 4340 is threadedly connected to the first threaded rod 4330 and is disposed on a side of the second end 4230 of the rotating member 420 away from the second end 4320 of the first threaded rod 4330. The second end 4320 of the first threaded rod 4330 abuts against the support member.

[0054] The protrusion 4220 includes an axle 4221 and a rotating wheel 4222. The rotating wheel 4222 is connected to the rotating member 420 through the axle 4221. The rotating wheel 4222 rotates around the axle 4221.

[0055] The first end 4210 of the rotating member 420 is rotatably connected to the supporting member via the second threaded rod 440 .

[0056] In some embodiments, the material of the first conveyor belt 310 includes metal. Metal has the characteristics of high hardness and high temperature resistance, and can meet the requirements of a vacuum environment. The metal can be steel, aluminum alloy, etc.

[0057] In some embodiments, the transmission device 10 further includes: a third transmission structure 500. The third transmission structure 500 is disposed in the chamber 31. The third transmission structure 500 is transmission-connected with the second transmission structure 300 and moves under the drive of the second transmission structure 300. The relative position of the third transmission structure 500 and the second transmission structure 300 can be set according to the power transmission direction requirements. Figure 3 As shown, the third transmission structure 500 and the other second transmission structure 300 are arranged opposite to each other in the vertical direction and are connected by belt transmission. Figure 5 As shown, the first transmission structure 200, the second transmission structure 300 and the third transmission structure 500 are arranged opposite to each other on the same horizontal plane and are connected in sequence with a belt transmission.

[0058] In some embodiments, the number of the second pulleys 320 is multiple. The third transmission structure 500 includes: a second conveyor belt 510, at least one third pulley 520 and a third shaft 530. The second conveyor belt 510 is wound around another second pulley 320. The second conveyor belt 510 is wound around a third pulley 520, so that the rotation of the second pulley 320 is transmitted to the third pulley 520 by the second conveyor belt 510. The third shaft 530 is connected to the third pulley 520 and rotates with the third pulley 520.

[0059] The third shaft 530 is fixedly connected to the third pulley 520. The third shaft 530 may be non-detachably connected to the third pulley 520 by welding, bonding, etc., or the third shaft 530 may be detachably connected to the third pulley 520 by bolts, nuts, screws, buckles, magnetism, etc.

[0060] The third shaft seat 540 is fixedly arranged relative to the cavity 30. The third shaft 530 passes through the third shaft seat 540 and is rotatably connected to the third shaft seat 540. The third shaft seat 540 can be a flange or other structure, and the present disclosure does not specifically limit the structure and shape of the third shaft seat 540.

[0061] The tensioning structure 400 is disposed at the second conveyor belt 510. The tensioning structure 400 abuts against the second conveyor belt 510 and is configured to tension the second conveyor belt 510.

[0062] like Figures 1 to 3 as well as Figure 5 As shown, in this embodiment, there are two first pulleys 220, two second pulleys 320, and two third pulleys 520.

[0063] The transmission device 10 further includes: a fourth transmission structure 600. The fourth transmission structure 600 is transmission-connected with the third transmission structure 500 and moves under the drive of the third transmission structure 500. The relative position of the fourth transmission structure 600 and the third transmission structure 500 can be set according to the power transmission direction requirement. For example, Figure 5 As shown, the fourth transmission structure 600 and the third transmission structure 500 are arranged opposite to each other on the same horizontal plane and are connected by belt transmission. The fourth transmission structure 600 has the same structure as the third transmission structure 500.

[0064] In addition, according to the power transmission requirements, the transmission device 10 can also include a fifth transmission structure, a sixth transmission structure, a seventh transmission structure, etc., which are connected to each other by belt transmission, which will not be repeated here.

[0065] In addition, the number and position of the transmission device 10 can also be set according to the power transmission requirements. Figure 5 As shown, two transmission devices 10 are symmetrically arranged on both sides of the vacuum device 3. Each transmission device 10 comprises a first transmission structure 200, a second transmission structure 300, a third transmission structure 500 and a fourth transmission structure 600 which are arranged opposite to each other on the same horizontal plane and are sequentially transmission-connected.

[0066] In some embodiments, the power input structure 100 includes: a magnetic fluid. The magnetic fluid is sealed and connected to the cavity 30. The first end 110 of the magnetic fluid is located outside the chamber 31 and is connected to the power source. The second end 120 of the magnetic fluid passes through the cavity 30 and enters the chamber 31, and is connected to the first shaft 210 of the first transmission structure 200.

[0067] like Figure 5 As shown, the conveying device 1 is applied to the vacuum equipment 3. The vacuum equipment 3 includes a cavity 30. The cavity 30 forms a vacuum chamber 31. Among them, the conveying device 1 includes: the transmission device 10 and the carrier 20 mentioned in the above embodiment. The transmission device 10 passes through the cavity 30 from the outside of the chamber 31 and enters the chamber 31. The carrier 20 is connected to the part of the transmission device 10 located in the chamber 31 and moves driven by the transmission device 10. The first transmission structure 200, the second transmission structure 300, the third transmission structure 500 and the fourth transmission structure 600 of the transmission device 10 are distributed along the moving direction of the carrier 20.

[0068] The carrier 20 may be a rectangular plate, or a plate of other polygonal or irregular shapes. In this embodiment, the carrier 20 is a rectangular plate. The carrier 20 is located above the portion of the transmission device 10 located in the chamber 31. The bottoms of both sides of the carrier 20 are respectively connected to the first transmission structure 200, the second transmission structure 300, the third transmission structure 500, and the fourth transmission structure 600 of the two transmission devices 10.

[0069] More specifically, the end of the first shaft 210 is connected to the first roller 240. The end of the second shaft 330 is connected to the second roller 350. The end of the third shaft 530 is connected to the third roller 550. The end of the fourth shaft of the fourth transmission structure 600 is connected to the fourth roller. The bottom of the carrier 20 is rotatably connected to the first roller 240, the second roller 350, the third roller 550 and the fourth roller, respectively, to drive the carrier 20 to move.

[0070] The first roller 240 is fixedly connected to the first shaft 210. The first roller 240 may be non-detachably connected to the first shaft 210 by welding, bonding, etc., or the first roller 240 may be detachably connected to the first shaft 210 by bolts, nuts, screws, buckles, magnetism, etc.

[0071] The connection method between the second roller 350 and the second shaft 330, the connection method between the third roller 550 and the third shaft 530, and the connection method between the fourth roller and the fourth shaft can be the same as the connection method between the first roller 240 and the first shaft 210, and will not be repeated here.

[0072] like Figure 5 As shown, the vacuum device 3 comprises: a cavity 30 and the conveying device 1 mentioned in the above embodiment. The cavity 30 forms a vacuum chamber 31. The conveying device 1 is configured to convey the material in the chamber 31.

[0073] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0074] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0075] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0076] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0077] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A transmission device, It is characterized in that Applied to vacuum equipment, the vacuum equipment includes a cavity, the cavity forms a vacuum chamber; wherein the transmission device includes: A power input structure, wherein a first end of the power input structure is located outside the chamber and connected to a power source, and a second end of the power input structure passes through the cavity and enters the chamber. Under the drive of the power source, the power input structure rotates around a first axis, wherein the first axis coincides with an axis of the power input structure; A first transmission structure is disposed in the chamber and connected to the second end of the power input structure, and the first transmission structure rotates around the first axis driven by the power input structure; At least one second transmission structure is disposed in the chamber, is transmission-connected to the first transmission structure, and moves driven by the first transmission structure.

2. The transmission device according to claim 1, It is characterized in that The transmission connection between the second transmission structure and the first transmission structure includes at least one of the following connections: belt transmission, chain transmission, and gear transmission.

3. The transmission device according to claim 2, It is characterized in that The transmission connection between the second transmission structure and the first transmission structure includes a belt drive; Wherein, the first transmission structure comprises: A first shaft connected to the second end of the power input structure; at least one first pulley, mounted on the first shaft and rotating along with the first shaft; Wherein, the second transmission structure comprises: a first conveyor belt, wound around one of the first pulleys; at least one second pulley, the first conveyor belt being wound around one of the second pulleys so as to transmit the rotation of the first pulley to the second pulley by means of the first conveyor belt; The second shaft is connected to the second pulley and rotates along with the second pulley.

4. The transmission device according to claim 3, It is characterized in that Also includes: The tensioning structure abuts against the first conveyor belt and is configured to tension the first conveyor belt.

5. The transmission device according to claim 4, It is characterized in that The tensioning structure comprises: A support member, fixedly arranged relative to the cavity; A rotating member, a first end of which is rotatably connected to the supporting member, and the rotating member has a protrusion; An adjusting member, wherein a first end of the adjusting member is threadedly connected to a second end of the rotating member, and a second end of the adjusting member is in contact with the supporting member; The pressing force of the protrusion on the first conveyor belt is achieved by adjusting the distance between the second end of the adjusting member and the second end of the rotating member.

6. The transmission device according to claim 3, It is characterized in that The material of the first conveyor belt includes metal.

7. The transmission device according to claim 3, It is characterized in that Also includes: The third transmission structure is arranged in the chamber, is transmission-connected with the second transmission structure, and moves under the drive of the second transmission structure.

8. The transmission device according to claim 7, It is characterized in that The number of the second pulleys is multiple; Wherein, the third transmission structure comprises: a second conveyor belt, wound around another of the second pulleys; at least one third pulley, the second conveyor belt being wound around one of the third pulleys so as to transmit the rotation of the second pulley to the third pulley by means of the second conveyor belt; The third shaft is connected to the third pulley and rotates along with the third pulley.

9. The transmission device according to any one of claims 1 to 8, It is characterized in that The power input structure comprises: A magnetic fluid is sealed and connected to the cavity.

10. A conveying device, It is characterized in that Applied to vacuum equipment, the vacuum equipment includes a cavity, the cavity forms a vacuum chamber; wherein the conveying device includes: The transmission device according to any one of claims 1 to 9, wherein the cavity is entered from the outside of the cavity through the cavity; The carrier is connected to the part of the transmission device located in the chamber and moves under the drive of the transmission device.

11. A vacuum device, It is characterized in that include: A cavity, wherein the cavity forms a vacuum chamber; The conveying device according to claim 10 is configured to convey the material in the chamber.

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