Coaxial nested hose

Abstract

The utility model relates to a coaxial nested hose which is characterized in that a conveying hose for conveying photoresist is formed by a first hose body, a second hose body, a third hose body and a fourth hose body which are sequentially arranged in a sleeving manner from inside to outside; hollow interval structures are arranged in a first loop formed between the first pipe body and the second pipe body and a second loop formed between the second pipe body and the third pipe body, and the hollow interval structures are used for supporting the first loop and the second loop, so that an effective liquid flowing space is still ensured in the bending deformation and pulling process of the conveying hose; therefore, stable liquid flow is provided, and the temperature control effect is improved.

Description

Technical Field

[0001] The utility model relates to a coaxial nested hose and belongs to the technical field of semiconductor manufacturing. Background Art

[0002] In the image lithography commonly used in the field of semiconductor microelectronics manufacturing, the wafer as the main processed carrier needs to complete the necessary photolithography / coating / development processes, and these processes inevitably require contact with the medium of photoresist. With the development of the semiconductor industry, the performance of current photoresists is highly related to the temperature during the use of photoresists. Generally speaking, the increase in the temperature of photoresists accelerates the evaporation of the contained solvents, causing the fluidity of photoresists to decrease. Therefore, the demand for temperature control of photoresist pipelines is getting higher and higher.

[0003] Currently, the common temperature control of photoresist usually includes two types: air temperature of the coating environment and temperature control of photoresist in pipelines. Among them, temperature control of photoresist in pipelines is based on installing pipelines for liquid circulation outside the photoresist delivery pipeline, and injecting temperature-controlled liquid into the pipeline to transfer cold or heat to the photoresist through the polymer corrosion-resistant hose that transports the photoresist in a heat conduction manner. It is widely used due to its high temperature control efficiency.

[0004] However, during the glue coating process, the photoresist pipeline is not fixed in a specific position, but constantly changes position according to the requirements of the process action. During the continuous movement, the internal and external pipelines will be stuck inside the pipeline due to bending, deformation and pulling of the pipeline, resulting in unstable temperature control liquid flow in the pipeline and uneven contact area with the photoresist delivery pipeline, resulting in poor temperature control effect and easily causing the service life of the pipeline to be reduced. Utility Model Content

[0005] The utility model aims to provide a coaxial nested hose, which can avoid the internal adhesion of the pipeline caused by the bending deformation and pulling of the pipeline and improve the temperature control effect.

[0006] In order to achieve the above object, the utility model provides the following technical solution: a coaxial nested hose, wherein the coaxial nested hose comprises:

[0007] The tube structure comprises a first tube, a second tube, a third tube and a fourth tube which are sequentially sleeved from the inside to the outside, a first loop is formed between the first tube and the second tube, and a second loop is formed between the second tube and the third tube;

[0008] A joint structure, comprising a first joint and a second joint provided at both ends of the tube structure, the first joint being connected to a liquid supply source, and the first circuit and the second circuit being connected at the second joint;

[0009] A plurality of hollow spacer structures are arranged in the first loop and the second loop at intervals and respectively support the first tube body, the second tube body and the third tube body.

[0010] Furthermore, the hollow spacer structure includes a spacer ring body and a connector for connecting adjacent spacer ring bodies, and the spacer ring body is provided with an arc groove penetrating along the thickness direction.

[0011] Furthermore, the fourth tube body is a heat-insulating tube.

[0012] Furthermore, a liquid inlet cavity and a liquid outlet cavity which are respectively connected to the first circuit and the second circuit are formed in the first joint, and the liquid inlet cavity and the liquid outlet cavity are respectively connected to the liquid supply source.

[0013] Furthermore, the first joint includes an inner sleeve and an outer sleeve which are sleeved together, the liquid inlet cavity is formed between the inner sleeve and the first tube body, the liquid outlet cavity is formed between the inner sleeve and the outer sleeve, a liquid outlet connected to the liquid outlet cavity is formed on the outer sleeve, and the liquid outlet is connected to the liquid supply source.

[0014] Furthermore, a sealed circulation space is formed in the second joint, and the circulation space is used to connect the first circuit and the second circuit.

[0015] Furthermore, the second joint includes an outer sleeve joint and an inner sleeve joint, a first space is formed between the outer sleeve joint and the inner sleeve joint, a second space is formed between the inner sleeve joint and the first tube body, and a waist-shaped groove is radially penetrated on the inner sleeve joint, and the waist-shaped groove connects the first space and the second space to form a circulation space.

[0016] Furthermore, the second joint further comprises a quick-grasp nozzle end, the first tube body is arranged through the quick-grasp nozzle end, and a quick-grasp portion cooperating with the manipulator is formed on the quick-grasp nozzle end.

[0017] Furthermore, the quick-grasp portion includes a V-shaped groove symmetrically formed on the quick-grasp nozzle end and a locking portion formed in the V-shaped groove.

[0018] Furthermore, the locking portion is a fixing hole.

[0019] The beneficial effects of the utility model are as follows: the present application forms a delivery hose for delivering photoresist by sequentially sleeved a first tube body, a second tube body, a third tube body and a fourth tube body from the inside to the outside, and a first loop is formed between the first tube body and the second tube body, and a second loop is formed between the second tube body and the third tube body, and hollow spacer structures are provided in both of them, and the first loop and the second loop are supported by the hollow spacer structure, so that the delivery hose can still guarantee an effective liquid flow space during bending, deformation and pulling, thereby providing a stable liquid flow rate to improve the temperature control effect.

[0020] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a structural diagram of a coaxial nested hose shown in an embodiment of the present application.

[0022] Figure 2 for Figure 1 Cross-sectional view of the coaxial nested hose.

[0023] Figure 3 for Figure 1 Structural diagram of the hollow support structure.

[0024] Figure 4 for Figure 1 Enlarged structural diagram of part A in the middle.

[0025] Figure 5 for Figure 1 Enlarged structural diagram of part B in the middle.

[0026] Figure 6 for Figure 1 Structural diagram of the medium-fast grab nozzle end. DETAILED DESCRIPTION

[0027] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0028] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Please refer to Figures 1 to 3 A coaxial nested hose is shown in an embodiment of the present application. The coaxial nested hose includes a tube body structure 1, a joint structure and a plurality of hollow spacer structures 15.

[0031] The tube structure 1 includes a first tube body 11, a second tube body 12, a third tube body 13 and a fourth tube body 14 which are sequentially sleeved from the inside to the outside, a first loop 16 is formed between the first tube body 11 and the second tube body 12, and a second loop 17 is formed between the second tube body 12 and the third tube body 13. Among them, the first tube body 11 is used to transport photoresist, and the fourth tube body 14 is a heat-insulating tube with a wall thickness much thicker than other tube bodies, which is mainly used to reduce the heat exchange between the inside of the coaxial nested hose and the outside and improve the temperature control effect. The heat-insulating tube is a heat-insulating rubber hose, an aluminum foil composite heat-insulating hose and a glass fiber heat-insulating hose.

[0032] The joint structure includes a first joint 21 and a second joint 22 provided at both ends of the tube structure 1, the first joint 21 is connected to the liquid supply source, and the first loop 16 and the second loop 17 are connected at the second joint 22. The liquid supply source is used to provide photoresist and temperature control liquid, wherein the photoresist enters the first tube body 11 through the first joint 21, flows along the first tube body 11 to the second joint 22, and is sprayed to the designated position by the second joint 22. The temperature control liquid enters the first loop 16 from the first joint 21, flows along the first loop 16 to the second joint 22, and in this process, the temperature control liquid is close to the first tube body 11 and flows along its peripheral side, thereby heat exchange occurs with the photoresist in the first tube body 11, so as to realize temperature control of the photoresist. The temperature control liquid flows to the second joint 22, flows to the second loop 17 through the second joint 22, and flows back to the liquid supply source along the second loop 17, thereby realizing the circulation of the temperature control liquid. Among them, the temperature control liquid can be selected according to demand, and is not limited here.

[0033] A plurality of hollow spacer structures 15 are arranged at intervals in the first loop 16 and the second loop 17, and respectively abut the first tube body 11, the second tube body 12 and the third tube body 13. The hollow spacer structure 15 includes an annular sheet, and hollows are formed on the annular sheet to ensure the smoothness of the first loop 16 and the second loop 17. The outer circle and the inner circle of the annular sheet respectively abut the tube wall, so that when the coaxial nested hose is bent or stretched, there is still enough space between the tubes for the flow of the temperature control liquid, and the effective cross-sectional area is always maintained in the loop, thereby ensuring the temperature control effect. Among them, the number of hollow spacer structures 15 can be set according to demand and is not limited here.

[0034] The hollow spacer structure 15 includes a spacer ring body 151 and a connecting piece 152 for connecting adjacent spacer ring bodies 151. The spacer ring body 151 is provided with an arc groove 1511 extending through the spacer ring body 151 in the thickness direction. The spacer ring body 151 is an annular sheet, and the annular sheet is provided with an arc groove 1511 for connecting the two sides of the annular sheet to ensure the smoothness of the circuit, while the connecting piece 152 is a connecting rod, and the two ends of the connecting rod are respectively connected between two adjacent annular sheets to ensure that the spacing between the two annular sheets is always fixed, so as to prevent the annular sheets from moving during use, thereby causing the supporting effect of the annular sheets to deteriorate.

[0035] In this embodiment, the distance between the spacer ring bodies 151 located in the second loop 17 is equal to the distance between the spacer ring bodies 151 located in the first loop 16, and when the coaxial nested hose is radially projected, the projection of the spacer ring body 151 located in the second loop 17 falls in the middle of the projection of the spacer ring body 151 located in the first loop 16, thereby ensuring the stability of the supporting effect of the loop space.

[0036] Please refer to Figures 4 to 6The first joint 21 has a liquid inlet cavity 214 and a liquid outlet cavity 213 connected to the first circuit 16 and the second circuit 17, respectively. The liquid inlet cavity 214 and the liquid outlet cavity 213 are connected to the liquid supply source, respectively. The first joint 21 is used to fix the end of the pipe structure 1 to facilitate connection with the liquid supply source.

[0037] The first joint 21 includes an inner sleeve 212 and an outer sleeve 211, a liquid inlet cavity 214 is formed between the inner sleeve 212 and the first tube body 11, a liquid outlet cavity 213 is formed between the inner sleeve 212 and the outer sleeve 211, and a liquid outlet connected to the liquid outlet cavity 213 is formed on the outer sleeve 211, and the liquid outlet is connected to the liquid supply source. Among them, the outer sleeve 211 and the inner sleeve 212 are cylindrical, and the end of the inner sleeve 212 extends radially to form a ring, and the ring is connected to the outer sleeve 211 to seal one end of the liquid storage cavity. The liquid outlet is formed on the side wall of the outer sleeve 211, and the liquid supply source and the liquid storage cavity are connected through the liquid outlet. The liquid inlet cavity 214 is connected to the liquid supply source through the end of the inner sleeve 212 to achieve liquid inlet and liquid outlet in different directions, thereby reducing the sealing pressure.

[0038] A sealed circulation space is formed in the second joint 22, and the circulation space is used to connect the first loop 16 and the second loop 17. The end of the tube structure 1 is fixed by the first joint 21, which is convenient for the robot to grab and fix, so as to cooperate with the fixed-point spraying of photoresist. At the same time, since the joint is more stable than the tube structure 1, the circulation space formed in the second joint 22 connects the first loop 16 and the second loop 17, which can effectively ensure the stability and sealing of the circulation space.

[0039] The second joint 22 includes an outer sleeve joint 221 and an inner sleeve joint 222, a first space 223 is formed between the outer sleeve joint 221 and the inner sleeve joint 222, a second space 224 is formed between the inner sleeve joint 222 and the first tube body 11, a second space 225 is radially penetrated on the inner sleeve joint 222, and the second space 225 connects the first space 223 and the second space 224 to form a circulation space. A sealing structure is provided between the inner sleeve joint 222 and the first tube body 11 to ensure the sealing of the second space 224 and prevent the temperature control liquid from flowing out from the end of the inner sleeve joint 222.

[0040] In addition, the first joint 21 and the second joint 22 also include a fixed joint 216 connected to the third tube body 13 and the fourth tube body 14, the third tube body 13 is inserted into the fixed joint 216, the fourth tube body 14 is fixedly connected to the end of the fixed joint 216, and the fixed joint 216 is connected to the outer sleeve 211 or the outer sleeve joint 221 to achieve sealing of the liquid storage chamber and the first space 223, thereby improving the sealing performance of the coaxial nested hose.

[0041] The second joint 22 also includes a quick-grab nozzle end 23, the first tube body 11 is disposed through the quick-grab nozzle end 23, and a quick-grab portion that cooperates with the manipulator is formed on the quick-grab nozzle end 23. The quick-grab nozzle end 23 is a rectangular block, and the top and bottom of the rectangular block are used as plane references to cooperate with the quick-grab portion to position and grasp the second joint 22.

[0042] The quick-grasp portion includes a V-shaped groove 231 symmetrically formed on the quick-grasp nozzle end 23 and a locking portion formed in the V-shaped groove 231. The V-shaped groove 231 can be easily engaged with the clamp of the manipulator, and the locking portion is locked with the manipulator, so that the second joint 22 is easily grasped and the grasping stability is improved.

[0043] The locking part is a fixing hole 232. The fixing hole 232 can be a through hole or a blind hole, and can be locked and fixed by setting a positioning column, a positioning rod or other positioning structures on the clamp of the manipulator to cooperate with the fixing hole 232, which is a prior art and will not be described in detail here.

[0044] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A coaxial nested hose, characterized in that: The coaxial nested hose comprises: The tube structure comprises a first tube, a second tube, a third tube and a fourth tube which are sequentially sleeved from the inside to the outside, a first loop is formed between the first tube and the second tube, and a second loop is formed between the second tube and the third tube; A joint structure, comprising a first joint and a second joint provided at both ends of the tube structure, the first joint being connected to a liquid supply source, and the first circuit and the second circuit being connected at the second joint; A plurality of hollow spacer structures are arranged in the first loop and the second loop at intervals and respectively support the first tube body, the second tube body and the third tube body.

2. The coaxial nested hose according to claim 1, characterized in that: The hollowed-out spacer structure comprises a spacer ring body and a connector for connecting adjacent spacer ring bodies, and the spacer ring body is provided with an arc groove penetrating along the thickness direction.

3. The coaxial nested hose according to claim 1, characterized in that: The fourth tube body is a heat-insulating tube.

4. The coaxial nested hose according to claim 1, characterized in that: A liquid inlet cavity and a liquid outlet cavity are formed in the first joint and are connected to the first circuit and the second circuit respectively. The liquid inlet cavity and the liquid outlet cavity are connected to the liquid supply source respectively.

5. The coaxial nested hose according to claim 4, characterized in that: The first joint includes an inner sleeve and an outer sleeve which are sleeved together. The liquid inlet cavity is formed between the inner sleeve and the first tube body, the liquid outlet cavity is formed between the inner sleeve and the outer sleeve, and a liquid outlet connected to the liquid outlet cavity is formed on the outer sleeve. The liquid outlet is connected to the liquid supply source.

6. The coaxial nested hose according to claim 1, characterized in that: A sealed circulation space is formed in the second joint, and the circulation space is used to connect the first circuit and the second circuit.

7. The coaxial nested hose according to claim 6, characterized in that: The second joint includes an outer sleeve joint and an inner sleeve joint, a first space is formed between the outer sleeve joint and the inner sleeve joint, a second space is formed between the inner sleeve joint and the first tube body, a waist-shaped groove is radially penetrated on the inner sleeve joint, and the waist-shaped groove connects the first space and the second space to form a circulation space.

8. The coaxial nested hose according to claim 7, characterized in that: The second joint further comprises a quick-grasp nozzle end, the first tube body is arranged through the quick-grasp nozzle end, and a quick-grasp portion cooperating with the manipulator is formed on the quick-grasp nozzle end.

9. The coaxial nested hose according to claim 8, characterized in that: The quick-grasp portion includes a V-shaped groove symmetrically formed on the quick-grasp nozzle end and a locking portion formed in the V-shaped groove.

10. The coaxial nested hose according to claim 9, characterized in that: The locking portion is a fixing hole.

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