Liquid silane storage tank

Abstract

The utility model relates to a liquid silane storage tank which comprises a tank body inner layer, a vacuum layer and a tank body outer layer, the tank body inner layer is wrapped with the vacuum layer, the vacuum layer is wrapped with the tank body outer layer, and therefore the tank body inner layer is wrapped with the tank body outer layer in a sealed mode; the inner layer of the tank body is provided with a liquid accumulation chamber, the liquid accumulation chamber is used for storing liquid silane, a gas accommodating cavity is formed in the upper part of the liquid accumulation chamber, the gas accommodating cavity is communicated with the liquid accumulation chamber, and the gas accommodating cavity is used for collecting silane gas formed after the liquid silane in the liquid accumulation chamber is gasified; the liquid storage tank further comprises a liquid conveying device, the liquid conveying device is communicated with the liquid accumulation chamber, and liquid in the liquid accumulation chamber is conveyed to the outside of the liquid storage tank through the liquid conveying device.

Description

Technical Field

[0001] The utility model belongs to the technical field of liquid gas storage, and in particular relates to a liquid silane storage tank. Background Art

[0002] The use and utilization of silane is a very common technology in the industrial field, but the storage and access technology of liquid silane is still being continuously improved.

[0003] In the prior art, the liquid storage tank for storing liquid silane is very thick. During the transportation and storage process, due to the influence of bumps, temperature, etc., some of the liquid silane gradually gasifies and forms silane gas. As the silane gas increases, the gas pressure in the liquid storage tank increases, increasing the safety hazard.

[0004] Furthermore, the use of liquid silane is also one of the current technical difficulties. Generally, there is only one liquid silane delivery opening on the liquid silane storage tank. This is because the more delivery openings are set, the greater the risk of gas leakage, and the higher the sealing requirements between the storage tank and the delivery opening. However, one delivery opening cannot meet the actual needs. In actual needs, there are often multiple scenes where silane is needed, which reduces work efficiency to a certain extent. Summary of the invention

[0005] The utility model aims to solve the shortcomings in the prior art and provides a liquid silane storage tank.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a liquid silane storage tank, comprising an inner layer of a tank body, a vacuum layer and an outer layer of a tank body, wherein the vacuum layer is wrapped outside the inner layer of the tank body, and the outer layer of the tank body is wrapped outside the vacuum layer, so as to seal and wrap the inner layer of the tank body; the inner layer of the tank body has a liquid accumulation chamber, which is used to store liquid silane, and a gas accommodating chamber is formed at the upper part of the liquid accumulation chamber, wherein the gas accommodating chamber is connected to the liquid accumulation chamber, and the gas accommodating chamber is used to collect silane gas formed after the liquid silane in the liquid accumulation chamber is vaporized; the liquid storage tank also includes a liquid conveying device, which is connected to the liquid accumulation chamber, and the liquid in the liquid accumulation chamber is conveyed to the outside of the liquid storage tank via the liquid conveying device.

[0007] In the present application, a pressure sensor is also included, and the pressure sensor extends into the gas containing chamber to measure the gas pressure in the gas containing chamber.

[0008] In the present application, a silane gas recovery device is also included, one end of which extends into the gas containing chamber, and the other end extends into the liquid accumulation chamber. The gas recovery device compresses the silane gas in the gas containing chamber to form liquid silane liquid and then injects it into the liquid accumulation chamber, thereby dynamically ensuring that the pressure in the liquid storage tank 1 is maintained within a preset range.

[0009] In the present application, the silane gas recovery device includes a recovery pipe and a compression pump, one end of the recovery pipe extends into the gas containing chamber, and the other end of the recovery pipe is connected to the compression pump. The compression pump pumps the silane gas in the gas containing chamber into the compression pump through the recovery pipe, and compresses the silane gas into liquid silane and then inputs it into the liquid accumulation chamber.

[0010] In the present application, a controller is also included, and the pressure sensor and the compression pump are both connected to the controller. The pressure sensor transmits the measured gas pressure value to the controller, and the controller judges the gas pressure value. If the gas pressure value exceeds a preset value, the controller pneumatically drives the compression pump to start working, compressing the gas in the gas containing chamber into liquid gas, thereby ensuring that the pressure in the liquid storage tank is maintained within a preset range.

[0011] In the present application, the liquid conveying device includes a main connecting pipe, a first branch pipe, a second branch pipe, and a third branch pipe. The main connecting pipe, the first branch pipe, the third branch pipe and the third branch pipe are connected together and connected in pairs. The main connecting pipe is also connected to the liquid accumulation chamber. The liquid in the liquid accumulation chamber flows into the first branch pipe, the second branch pipe and the third branch pipe through the main connecting pipe.

[0012] In the present application, the liquid delivery device also includes a first drive motor, a first drive rod, a first sealing plate, a second drive motor, a second drive rod and a second sealing plate, one end of the first sealing plate is hinged on the inner wall of the first branch pipe, and the other end of the first sealing plate pivots relative to the first branch pipe; one end of the second sealing plate is hinged on the inner wall of the second branch pipe, and the other end of the second sealing plate pivots relative to the second branch pipe.

[0013] In the present application, one end of the first driving rod is fixedly connected to the first sealing plate, and the other end of the first driving rod is connected to the first driving motor. Under the drive of the first driving motor, the first sealing plate pivots relative to the first branch pipe, so that the total connecting pipe and the first branch pipe are switched between connected and interrupted connection; one end of the second driving rod is fixedly connected to the second sealing plate, and the other end of the second driving rod is connected to the second driving motor. Under the drive of the second driving motor, the second sealing plate pivots relative to the second branch pipe, so that the total connecting pipe and the second branch pipe are switched between connected and interrupted connection.

[0014] The beneficial effects of the present application are as follows: the liquid silane storage tank provided by the present application has a simple structure, can dynamically adjust the pressure in the storage tank, so that the pressure in the storage tank is maintained within a preset range, greatly improving the safety of the storage tank, and adding a plurality of delivery openings to the storage tank to improve the delivery efficiency, and the opening and closing structure of the delivery opening is completed by automated equipment, saving manpower and time. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic structural diagram of a liquid silane storage tank provided in one embodiment of the utility model.

[0016] Figure 2 A schematic structural diagram of a liquid conveying device installed on a liquid silane storage tank provided in one embodiment of the utility model. DETAILED DESCRIPTION

[0017] The present application is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0018] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations, and the operation steps involved in each embodiment can also be replaced or adjusted in order in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing a certain embodiment, and do not mean that the composition and / or order are necessary.

[0019] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0020] Please refer to Figure 1 The present application provides a liquid silane storage tank, the storage tank 1 comprising a tank inner layer 11, a vacuum layer 13 and a tank outer layer 12, the vacuum layer 13 is wrapped outside the tank inner layer 11, and the tank outer layer 12 is wrapped outside the vacuum layer 13, so as to seal and wrap the tank inner layer 11; the tank inner layer 11 has a liquid accumulation chamber 6, the liquid accumulation chamber 6 is used to store liquid silane, and a gas accommodating chamber 2 is formed on the upper part of the liquid accumulation chamber 6, the gas accommodating chamber 2 is connected to the liquid accumulation chamber 6, and the gas accommodating chamber 2 is used to collect silane gas formed after the liquid silane in the liquid accumulation chamber 6 is vaporized.

[0021] The liquid storage tank 1 further includes a pressure sensor 3 , which extends into the gas containing chamber 2 to measure the gas pressure in the gas containing chamber 2 .

[0022] The liquid storage tank 1 also includes a silane gas recovery device 4, one end of the gas recovery device 4 extends into the gas containing chamber 2, and the other end extends into the liquid accumulation chamber 6. The gas recovery device 4 compresses the silane gas in the gas containing chamber 2 to form liquid silane liquid and then injects it into the liquid accumulation chamber 6, thereby dynamically ensuring that the pressure in the liquid storage tank 1 is maintained within a preset range.

[0023] The silane gas recovery device 4 includes a recovery pipe 41 and a compression pump 42. One end of the recovery pipe 41 extends into the gas containing chamber 2, and the other end of the recovery pipe 41 is connected to the compression pump 42. The compression pump 42 pumps the silane gas in the gas containing chamber 2 into the compression pump 42 through the recovery pipe 41, and compresses the silane gas into liquid silane and then inputs it into the liquid accumulation chamber 6.

[0024] The liquid storage tank 1 also includes a controller 5, and the pressure sensor 3 and the compression pump 42 are both connected to the controller 5. The pressure sensor 3 transmits the measured gas pressure value to the controller 5, and the controller 5 judges the gas pressure value. If the gas pressure value exceeds a preset value, the controller 5 pneumatically drives the compression pump 42 to start working, compressing the gas in the gas containing chamber 2 into liquid gas, thereby ensuring that the pressure in the liquid storage tank 1 is maintained within a preset range.

[0025] The liquid storage tank 1 further comprises a liquid conveying device 8 , which is in communication with the liquid accumulating chamber 6 , and the liquid in the liquid accumulating chamber 6 is conveyed to the outside of the liquid storage tank 1 via the liquid conveying device 8 .

[0026] The liquid conveying device 8 includes a main connecting pipe 81, a first branch pipe 82, a second branch pipe 83, and a third branch pipe 84. The main connecting pipe 81, the first branch pipe 82, the third branch pipe 83 and the third branch pipe 84 are connected together and connected in pairs. The main connecting pipe 81 is also connected to the liquid accumulation chamber 6. The liquid in the liquid accumulation chamber 6 flows into the first branch pipe 82, the second branch pipe 83 and the third branch pipe 84 through the main connecting pipe 81.

[0027] The liquid delivery device 8 further includes a first drive motor 85, a first drive rod 86, a first sealing plate 87, a second drive motor 810, a second drive rod 89 and a second sealing plate 87, one end of the first sealing plate 87 is hinged on the inner wall of the first branch pipe 82, and the other end of the first sealing plate 87 pivots relative to the first branch pipe 82; one end of the second sealing plate 87 is hinged on the inner wall of the second branch pipe 83, and the other end of the second sealing plate 87 pivots relative to the second branch pipe 83. The above-mentioned hinged manner belongs to the prior art, for example, the first sealing plate 87 can be pivotally installed on the inner wall of the first branch pipe 82 by means of a hinge.

[0028] One end of the first driving rod 86 is fixedly connected to the first sealing plate 87, and the other end of the first driving rod 86 is connected to the first driving motor 85. Under the drive of the first driving motor 85, the first sealing plate 87 pivots relative to the first branch pipe 82, so that the total connecting pipe 81 and the first branch pipe 82 are switched between connecting and interrupting the connection; one end of the second driving rod 89 is fixedly connected to the second sealing plate 88, and the other end of the second driving rod 89 is connected to the second driving motor 810. Under the drive of the second driving motor 810, the second sealing plate 88 pivots relative to the second branch pipe 83, so that the total connecting pipe 81 and the second branch pipe 83 are switched between connecting and interrupting the connection. In this way, under the action of the first driving motor 85 and the second driving motor 810, the first branch pipe 82 and the second branch pipe 83 are opened according to demand, so as to achieve a larger number of conveying openings.

[0029] The liquid silane storage tank provided in the present application has a simple structure and can dynamically adjust the pressure in the storage tank so that the pressure in the storage tank is maintained within a preset range, greatly improving the safety of the storage tank. Several delivery openings are added to the storage tank to improve the delivery efficiency, and the opening and closing structure of the delivery opening is completed by automated equipment, saving manpower and time.

[0030] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A liquid silane storage tank, characterized in that: It includes an inner layer of a tank body, a vacuum layer and an outer layer of a tank body, wherein the vacuum layer is wrapped outside the inner layer of the tank body, and the outer layer of the tank body is wrapped outside the vacuum layer, so as to seal and wrap the inner layer of the tank body; the inner layer of the tank body has a liquid accumulation chamber, which is used to store liquid silane, and a gas accommodating chamber is formed on the upper part of the liquid accumulation chamber, wherein the gas accommodating chamber is connected to the liquid accumulation chamber, and the gas accommodating chamber is used to collect silane gas formed after the liquid silane in the liquid accumulation chamber is vaporized; the liquid storage tank also includes a liquid conveying device, which is connected to the liquid accumulation chamber, and the liquid in the liquid accumulation chamber is conveyed to the outside of the liquid storage tank via the liquid conveying device.

2. The liquid silane storage tank according to claim 1, characterized in that: A pressure sensor is also included, and the pressure sensor extends into the gas containing cavity to measure the gas pressure in the gas containing cavity.

3. The liquid silane storage tank according to claim 2, characterized in that: It also includes a silane gas recovery device, one end of which extends into the gas containing chamber, and the other end extends into the liquid accumulation chamber. The gas recovery device compresses the silane gas in the gas containing chamber to form liquid silane liquid and then injects it into the liquid accumulation chamber, thereby dynamically ensuring that the pressure in the liquid storage tank is maintained within a preset range.

4. The liquid silane storage tank according to claim 3, characterized in that: The silane gas recovery device includes a recovery pipe and a compression pump, one end of the recovery pipe extends into the gas containing chamber, and the other end of the recovery pipe is connected to the compression pump. The compression pump pumps the silane gas in the gas containing chamber into the compression pump through the recovery pipe, and compresses the silane gas into liquid silane and then inputs it into the liquid accumulation chamber.

5. The liquid silane storage tank according to claim 4, characterized in that: It also includes a controller, and the pressure sensor and the compression pump are both connected to the controller. The pressure sensor transmits the measured gas pressure value to the controller, and the controller determines the gas pressure value. If the gas pressure value exceeds a preset value, the controller pneumatically drives the compression pump to start working, compressing the gas in the gas containing chamber into liquid gas, thereby ensuring that the pressure in the liquid storage tank is maintained within a preset range.

6. The liquid silane storage tank according to claim 5, characterized in that: The liquid conveying device includes a main connecting pipe, a first branch pipe, a second branch pipe, and a third branch pipe. The main connecting pipe, the first branch pipe, the third branch pipe and the third branch pipe are connected together and connected in pairs. The main connecting pipe is also connected to the liquid accumulation chamber. The liquid in the liquid accumulation chamber flows into the first branch pipe, the second branch pipe and the third branch pipe through the main connecting pipe.

7. The liquid silane storage tank according to claim 6, characterized in that: The liquid delivery device also includes a first drive motor, a first drive rod, a first sealing plate, a second drive motor, a second drive rod and a second sealing plate, one end of the first sealing plate is hinged on the inner wall of the first branch pipe, and the other end of the first sealing plate pivots relative to the first branch pipe; one end of the second sealing plate is hinged on the inner wall of the second branch pipe, and the other end of the second sealing plate pivots relative to the second branch pipe.

8. The liquid silane storage tank according to claim 7, characterized in that: One end of the first driving rod is fixedly connected to the first sealing plate, and the other end of the first driving rod is connected to the first driving motor. Under the drive of the first driving motor, the first sealing plate pivots relative to the first branch pipe, so that the total connecting pipe and the first branch pipe are switched between connected and interrupted connection; one end of the second driving rod is fixedly connected to the second sealing plate, and the other end of the second driving rod is connected to the second driving motor. Under the drive of the second driving motor, the second sealing plate pivots relative to the second branch pipe, so that the total connecting pipe and the second branch pipe are switched between connected and interrupted connection.

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