Corrugated pipe sealing thermocouple movement mechanism

Abstract

The utility model relates to a bellows sealing thermocouple movement mechanism, which comprises a contact type thermocouple, a first flange plate is fixed at the end of the contact type thermocouple close to a junction box, and the bellows sealing thermocouple movement mechanism is technically characterized in that a concentric bellows is sleeved outside the contact type thermocouple, one end of the concentric bellows is provided with a second flange plate connected with the first flange plate, and the other end of the concentric bellows is provided with a third flange plate connected with the second flange plate. One end of the contact type thermocouple is connected with a first flange plate, the other end of the contact type thermocouple is provided with a third flange plate connected with the outer wall of the vacuum chamber to be measured, a linear driving structure parallel to the contact type thermocouple is arranged on the side of the contact type thermocouple, a movable part of the linear driving structure is fixedly connected with the first flange plate, and a guide structure is arranged between a mounting frame of the linear driving structure and the concentric corrugated pipe. The mechanism solves the problem that the detection end of an existing contact thermocouple is in a high-temperature environment for a long time, and the service life is remarkably prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of temperature measurement of crystal material growth temperature field, in particular to a bellows sealed thermocouple motion mechanism. Background Art

[0002] With the development of science and technology, the requirements for crystal materials are getting higher and higher, which also means that the requirements for the growth process and growth equipment of crystal materials are getting higher and higher. One of the key technologies of crystal growth equipment and growth process is the temperature control of the temperature field. The control accuracy of the temperature of the temperature field directly affects the quality of the crystal product. Obviously, to achieve precise control, accurate measurement of the temperature inside the temperature field is a prerequisite.

[0003] The existing temperature measurement structures are mainly divided into two types, namely non-contact infrared thermometers and contact thermocouples. Infrared thermometers can measure the thermal radiation on the surface of the material through the observation window, and then deduce the temperature. Its advantage is that it can measure without additional mechanisms as long as there is an observation hole, and no additional pollution is generated in the vacuum; while the contact thermocouple is fixed on the outer wall of the vacuum chamber through a flange, and the detection end of the couple extends into the vacuum chamber. Its advantages are accurate temperature measurement and fast response. It does not require a large observation port on the temperature field. It can be measured under any circumstances and is not sensitive to pollution. However, there are also the following problems: the detection end of the thermocouple is in a high temperature environment for a long time, and its service life is short. Utility Model Content

[0004] The utility model aims to provide a bellows-sealed thermocouple motion mechanism with reasonable structure and reliable use, so as to solve the problem that the detection end of the existing contact thermocouple is in a high temperature environment for a long time and significantly improve the service life.

[0005] The technical solution of the utility model is:

[0006] A bellows-sealed thermocouple motion mechanism comprises a contact thermocouple, wherein the contact thermocouple is fixed with a first flange near the end of a junction box, and the technical key points are: a concentric bellows is sleeved on the outside of the contact thermocouple, one end of the concentric bellows is provided with a second flange connected to the first flange, and the other end is provided with a third flange for connecting to the outer wall of a vacuum chamber to be tested, a linear drive structure parallel to the contact thermocouple is provided on the side, a movable part of the linear drive structure is connected and fixed to the first flange, and a guide structure is provided between the mounting frame of the linear drive structure and the concentric bellows.

[0007] The above-mentioned bellows sealed thermocouple motion mechanism, the guide structure includes a front support arm and a rear support arm connected and fixed to the mounting frame, an optical axis connected between the front support arm and the rear support arm, a connecting sleeve arranged on the outer peripheral wall of the concentric bellows, and a guide arm connected to the connecting sleeve, the optical axis is parallel to the concentric bellows, the end of the guide arm is provided with a through hole corresponding to the optical axis, and a linear bearing is provided between the through hole and the optical axis.

[0008] In the above-mentioned bellows sealed thermocouple motion mechanism, the number of the front support arm, the rear support arm and the optical axis are respectively two, which are symmetrically arranged on both sides of the concentric bellows. The number of the guide arms on the connecting sleeve is two and they are symmetrically arranged on both sides of the connecting sleeve. The guide arms are connected to the optical axis on the corresponding side by means of linear bearings.

[0009] In the above-mentioned bellows-sealed thermocouple motion mechanism, there are multiple connecting sleeves, which are evenly spaced and fixed on the concentric bellows.

[0010] In the above-mentioned bellows-sealed thermocouple motion mechanism, the linear drive structure is a screw-nut transmission mechanism, and the movable part is the nut of the screw-nut transmission mechanism.

[0011] In the above-mentioned bellows-sealed thermocouple motion mechanism, the mounting frame is provided with a positioning seat connected to the outer wall of the vacuum chamber to be tested.

[0012] The beneficial effects of the utility model are:

[0013] 1. Before use, the third flange and mounting bracket of this mechanism are connected to the outer wall of the vacuum chamber to be measured. When in use, the linear drive structure can be used to drive the detection end of the contact thermocouple to move into the vacuum chamber and reach the set position. Since the bellows is retractable, the vacuum sealing is not affected during the movement of the contact thermocouple. In this way, we can insert the thermocouple into the temperature measurement area when temperature measurement is required, and withdraw the thermocouple when temperature measurement is not required. This not only gives full play to its advantages of accurate temperature measurement and fast response, but also avoids damage caused by long-term exposure to high-temperature vacuum environment, significantly improving its service life.

[0014] 2. The third flange and mounting bracket of this mechanism can be installed outside the vacuum chamber as needed. The installation difficulty is small and the installation angle can be determined according to the specific situation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model.

[0016] In the figure: 1. motor, 2. screw and nut transmission mechanism, 3. mounting frame, 4. first flange, 5. front support arm, 6. connecting sleeve, 7. concentric bellows, 8. optical axis, 9. guide arm, 10. linear bearing, 11. third flange, 12. contact thermocouple, 13. second flange, 14. positioning seat, 15. rear support arm. DETAILED DESCRIPTION

[0017] The utility model is described in detail according to the accompanying drawings of the specification.

[0018] like Figure 1 As shown, the bellows-sealed thermocouple motion mechanism includes a contact thermocouple 12, the contact thermocouple 12 is fixed with a first flange 4 near the terminal box end, the outer side of the contact thermocouple 12 is sleeved with a concentric bellows 7, one end of the concentric bellows 7 is provided with a second flange 13 connected to the first flange 4, and the other end is provided with a third flange 11 for connecting to the outer wall of the vacuum chamber to be tested. A linear drive structure parallel to the contact thermocouple 12 is provided on the side, the movable part of the linear drive structure is connected and fixed to the first flange 4, and a guide structure is provided between the mounting frame 3 of the linear drive structure and the concentric bellows 7.

[0019] In this embodiment, the guide structure includes a front support arm 5 connected and fixed to the mounting frame 3, a rear support arm 15, an optical axis 8 connected between the front support arm 5 and the rear support arm 15, a connecting sleeve 6 arranged on the outer peripheral wall of the concentric bellows 7, and a guide arm 9 connected to the connecting sleeve 6. The optical axis 8 is parallel to the concentric bellows 7. The end of the guide arm 9 is provided with a through hole corresponding to the optical axis 8. A linear bearing 10 is provided between the through hole and the optical axis 8. The linear bearing 10 ensures the movement stability of the concentric bellows 7. The number of the front support arm 5, the rear support arm 15 and the optical axis 8 are two respectively, which are symmetrically arranged on both sides of the concentric bellows 7. The number of the guide arms 9 on the connecting sleeve 6 is two and symmetrically arranged on both sides of the connecting sleeve 6. The guide arm 9 is connected to the optical axis 8 on the corresponding side by the linear bearing 10. The number of the connecting sleeves 6 is 3, which are evenly spaced and fixed on the concentric bellows 7. The linear drive structure is a screw nut transmission mechanism 2, and the movable part is the nut of the screw nut transmission mechanism 2. The mounting frame 3 is provided with a positioning seat 14 connected to the outer wall of the vacuum chamber to be tested.

[0020] Working principle:

[0021] 1. Connect and fix the third flange 11 of the mechanism to the outer periphery of the mounting hole opened on the outer wall of the vacuum chamber to be measured, connect and fix the positioning seat 14 on the mounting frame 3 to the outer wall of the vacuum chamber to be measured, and the concentric bellows 7 is connected to the vacuum environment of the vacuum chamber to be measured and ensures the stability of the sealed environment. 2. Start the motor 1 connected to the screw of the screw-nut transmission mechanism 2. During the rotation of the screw, the nut and the first flange 4 are driven to move linearly, thereby driving the contact thermocouple 12 to move into the vacuum chamber, and the concentric bellows 7 is folded toward the outer wall of the vacuum chamber, while ensuring the sealing. When the detection end of the contact thermocouple 12 reaches the set measurement position, the motor 1 stops rotating. 3. When temperature measurement is not required, the motor 1 is reversed, the screw of the screw-nut transmission mechanism 2 is reversed, and the nut and the first flange 4 are driven to move in the opposite direction, driving the detection end of the contact thermocouple 12 to reset and away from the high temperature environment.

[0022] The above embodiments of the present invention are described in detail, but the above contents are only preferred embodiments of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the present invention.

Claims

1. A bellows-sealed thermocouple motion mechanism, comprising a contact thermocouple, wherein a first flange is fixed to the end of the contact thermocouple near a junction box, and characterized in that: A concentric bellows is sleeved on the outside of the contact thermocouple, a second flange connected to the first flange is provided at one end of the concentric bellows, and a third flange for connecting to the outer wall of the vacuum chamber to be tested is provided at the other end, a linear drive structure parallel to the contact thermocouple is provided on the side, a movable part of the linear drive structure is fixedly connected to the first flange, and a guide structure is provided between the mounting frame of the linear drive structure and the concentric bellows.

2. The bellows-sealed thermocouple motion mechanism according to claim 1, characterized in that: The guide structure includes a front support arm and a rear support arm connected and fixed to the mounting frame, an optical axis connected between the front support arm and the rear support arm, a connecting sleeve arranged on the outer peripheral wall of the concentric bellows, and a guide arm connected to the connecting sleeve, wherein the optical axis is parallel to the concentric bellows, a through hole corresponding to the optical axis is arranged at the end of the guide arm, and a linear bearing is arranged between the through hole and the optical axis.

3. The bellows-sealed thermocouple motion mechanism according to claim 2, characterized in that: The number of the front support arm, the rear support arm and the optical axis are two respectively, which are symmetrically arranged on both sides of the concentric bellows. The number of the guide arms on the connecting sleeve is two and they are symmetrically arranged on both sides of the connecting sleeve. The guide arms are connected to the optical axis on the corresponding side by linear bearings.

4. The bellows-sealed thermocouple motion mechanism according to claim 2, characterized in that: There are multiple connecting sleeves, which are evenly spaced and fixed on the concentric corrugated pipe.

5. The bellows-sealed thermocouple motion mechanism according to claim 1, characterized in that: The linear drive structure is a screw-nut transmission mechanism, and the movable part is a nut of the screw-nut transmission mechanism.

6. The bellows-sealed thermocouple motion mechanism according to claim 1, characterized in that: The mounting frame is provided with a positioning seat connected to the outer wall of the vacuum chamber to be tested.

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